CN116688705A

CN116688705A - Exhaust gas purification system

Info

Publication number: CN116688705A
Application number: CN202210191671.5A
Authority: CN
Inventors: 闫升虎
Original assignee: Illinois Tool Works Inc
Current assignee: Illinois Tool Works Inc
Priority date: 2022-02-28
Filing date: 2022-02-28
Publication date: 2023-09-05
Also published as: WO2023164343A1

Abstract

The present application provides an exhaust gas purification system for a reflow oven, comprising: a filtering device that receives exhaust gas from a hearth of the reflow oven, cools and filters the exhaust gas to purify the exhaust gas, and outputs primary purified gas; and an adsorption device in fluid communication with the filtration device, performing an adsorption operation on the primary purge gas from the filtration device to purge the primary purge gas and output a secondary purge gas, and delivering the secondary purge gas to the furnace. The application adds an adsorption device for absorbing pollutants remained in the exhaust gas due to insufficient cooling temperature in the filtering device, so that the cleaning efficiency of the pollutants is improved to prolong the maintenance time of a working area and reduce the improvement cost. The application also adds a heating device for desorbing the saturated adsorption device, so that the adsorption device can be reused.

Description

Exhaust gas purification system

Technical Field

The application relates to an exhaust gas treatment system, in particular to an exhaust gas treatment system in a reflow oven, which is used for purifying exhaust gas in a hearth of the reflow oven.

Background

In the fabrication of printed circuit boards, electronic components are typically mounted to the circuit board using a process known as "reflow soldering". In a typical reflow soldering process, solder paste (e.g., solder paste) is deposited onto selected areas of a circuit board and wires of one or more electronic components are inserted into the deposited solder paste. The circuit board then passes through a reflow oven in which the solder paste is reflowed (i.e., heated to a melting or reflow temperature) in a heated zone and then cooled in a cooling zone to electrically and mechanically connect the leads of the electronic components to the circuit board. The term "circuit board" as used herein includes substrate assemblies of any type of electronic component, including, for example, wafer substrates. In reflow ovens, air or a substantially inert gas (e.g., nitrogen) is typically used as the working gas, with different working gases being used for circuit boards of different process requirements. The hearth of the reflow oven is filled with a working gas in which the circuit board performs soldering while being conveyed through the hearth by the conveyor.

Disclosure of Invention

In a reflow oven, the solder paste includes not only solder, but also flux that promotes wetting of the solder and provides good solder joints. Other additives such as solvents and catalysts may also be included. After the solder paste is printed on the circuit board, the circuit board is transported on a conveyor through a plurality of heating zones of a reflow oven. The heat in the heated zone causes the solder paste to melt and the organic compounds, including mainly the flux, contain volatile organic compounds (referred to as "VOCs") to vaporize to form vapors, thereby forming "contaminants". These contaminants mix with the working gas in the heating zone to form an exhaust gas. The build up of these contaminants in the reflow oven can cause problems. For example, as the circuit board is transported from the heating zone to the cooling zone, contaminants may also flow to the cooling zone, where they condense into liquids and/or solids that drip onto the circuit board to contaminate the circuit board, thereby necessitating a subsequent cleaning step. In addition, condensation may also drip onto subsequent circuit boards, possibly damaging components on the circuit boards or necessitating subsequent cleaning steps of the contaminated circuit boards.

Therefore, there is a need to purify the exhaust gas containing contaminants in the reflow oven hearth (e.g., heating and cooling zones) to keep the working atmosphere in the reflow oven hearth clean, thereby preventing contaminants from entering the reflow oven cooling zone, which causes the above-mentioned problems in the reflow oven.

When the reflow oven is operated with a substantially inert gas (e.g., nitrogen), it is often desirable that the exhaust gas exiting the reflow oven be cleaned by an exhaust gas cleaning system and then transported back to the reflow oven for reuse because the substantially inert gas (e.g., nitrogen) is expensive. When the reflow oven takes air as working gas, the waste gas discharged from the reflow oven can be directly discharged into the atmosphere after being treated by the waste gas purifying system, and can be conveyed back to the reflow oven for recycling.

In the exhaust gas purifying system of the related art, exhaust gas generated in a heating zone of a reflow oven is drawn out to a filtering device, the exhaust gas is cooled and filtered using the filtering device to remove pollutants (e.g., flux components) in the exhaust gas to obtain purified gas, and the purified gas is input to the heating zone and the cooling zone for recycling.

Through observation and research, applicants have found that the exhaust gas drawn from the heating zone of a reflow oven and entering the filter device includes a plurality of flux components, and that the removal efficiency of the filter device varies from one flux component to another. For certain flux components, the filter device has very low or even no removal efficiency. When the level of flux composition in the cooling zone reaches a predetermined threshold, maintenance of the cooling zone is required, e.g., shut down to clean the cooling zone. In the case where the amount of volatilized contaminants (e.g., flux components) is the same, if the removal efficiency of some flux components by the filter device is very low, the "cleaned" gas output by the filter device will contain more of the non-cleaned flux components, and the "cleaned" gas is recycled for input to the heating and cooling zones, so that the content of the non-cleaned flux components in the cooling zone is greater, and the maintenance time of the cooling zone is greatly reduced, even far below the uniform maintenance time of the complete machine system. At this time, the cooling area in the complete machine system needs to be maintained separately, which results in an increase in maintenance cost of the complete machine system. For the whole system, the maintenance time of each device/apparatus in the system is required to be approximately the same, so that each device/apparatus of the whole system can be maintained at the same time, thereby reducing maintenance cost.

In searching for a solution to increase the purging efficiency of the filter device to extend the maintenance time of the cooling zone, the applicant has found that the low purging efficiency of the filter device may be due to insufficient cooling temperature, whereas increasing the purging efficiency by further lowering the cooling temperature may result in too high costs. In addition, the flux component is generally not present in the exhaust gas at a high ratio (low concentration), and therefore the cooling temperature required to improve the cleaning efficiency of the filter device needs to be further reduced, thereby further increasing the improvement cost. For example, the filter device may condense a portion of the organics in the flux, such as organics like rosin, alcohols, acids or esters or ethers, at a cooling temperature of 40 ℃ to 50 ℃. However, the condensation temperature of some organics in the flux (e.g., N-methylpiperidine) is low, and below 0deg.C, the improvement cost is too high by lowering the cooling temperature of the filter assembly.

In order to solve at least one of the problems described above, the present application provides an exhaust gas purification system such that improvement costs are reduced while improving the removal efficiency of pollutants to extend maintenance time of a work area.

In order to achieve the above object, a first aspect of the present application provides an exhaust gas purification system for a reflow oven, comprising: a filter device that receives the exhaust gas from the furnace of the reflow oven, the filter device for cooling and filtering the exhaust gas to purify the exhaust gas and output a primary purified gas, and a first adsorption device in fluid communication with the filter device, the first adsorption device for performing an adsorption operation on the primary purified gas from the filter device to purify the primary purified gas and output a secondary purified gas, and delivering the secondary purified gas to the furnace.

According to the first aspect described above, the exhaust gas purification system further includes: heating means, the first adsorption means being controllably in alternating fluid communication with the filtration means and the heating means, wherein: (i) The first adsorption device performs an adsorption operation when the first adsorption device is in fluid communication with the filtration device, and (ii) the first adsorption device performs a desorption operation when the first adsorption device is in fluid communication with the heating device.

According to the first aspect described above, the heating means is configured to heat the air that enters the heating means and output the heated air to the first adsorption means, the heated air performing the desorption operation on the first adsorption means in the saturated state or the approximately saturated state, so that the first adsorption means in the saturated state or the approximately saturated state is restored to the operation state.

According to the first aspect described above, the filtering device includes: and a cooling unit for receiving the exhaust gas from the furnace, cooling the exhaust gas to condense part of pollutants in the exhaust gas, and outputting cooled and purified exhaust gas, and a filtering unit for receiving the cooled and purified exhaust gas from the cooling unit, filtering liquid and/or solid mixed in the cooled and purified exhaust gas, and outputting primary purified gas.

According to the first aspect described above, the cooling temperature range at which the filtering means cools the exhaust gas includes 40 ℃ to 50 ℃.

According to the first aspect described above, the furnace comprises a heating zone and a cooling zone, wherein the filtering means receives exhaust gases from the heating zone of the furnace and the first adsorption means is adapted to deliver secondary cleaning gases to the heating zone and/or the cooling zone of the furnace.

According to the first aspect described above, the exhaust gas purification system further includes: a valve assembly for controlling the first adsorption means to be in alternating fluid communication with the filtration means and the heating means, wherein the valve assembly comprises: a first valve for controlling fluid communication or disconnection of the filter device and the first adsorption device; and a second valve for controlling the heating means to be in fluid communication with or out of fluid communication with the first adsorption means.

According to the first aspect described above, the first adsorption means includes the first adsorption material for adsorbing the contaminants in the primary purge gas from the filter means to the surface and/or inside of the first adsorption material for the adsorption operation.

According to the first aspect described above, the heated air that enters the first adsorption device from the heating device heats the contaminant adsorbed in the first adsorption device to discharge the contaminant out of the first adsorption device, thereby causing the first adsorption device to perform the desorption operation.

The application adds an adsorption device for absorbing pollutants remained in the exhaust gas in the filtering device due to insufficient cooling temperature. The application also adds a heating device for desorbing the saturated adsorption device, so that the adsorption device can be reused.

Specifically, the adsorption device can absorb the soldering flux which cannot be cooled and removed by the filtering device at the set temperature of the adsorption device, so that the content of the soldering flux in the waste gas is prevented from being reduced by further reducing the cooling temperature of the filtering device, and the removal cost is reduced. In addition, since the adsorption apparatus is in a saturated state and is not operated when there are too many contaminants (e.g., flux) adsorbed in the adsorption apparatus, in order to make the adsorption apparatus no longer in a saturated state, the heating apparatus supplies hot air to make the adsorption apparatus perform desorption to discharge the contaminants adsorbed in the adsorption apparatus out of the adsorption apparatus, thereby restoring the adsorption apparatus to an operating state while avoiding being in a saturated state.

On the basis of the first aspect of the present application, the exhaust gas purification system provided in the second aspect of the present application further includes: a second adsorption device controllably in alternating fluid communication with the filter device and the heating device, the second adsorption device for performing an adsorption operation on primary purge gas from the filter device to purge the primary purge gas and output a secondary purge gas, and delivering the secondary purge gas to the furnace, wherein: (i) When the first adsorption device is in fluid communication with the heating device, the second adsorption device is in fluid communication with the filtering device, and at this time, the first adsorption device performs desorption operation, and the second adsorption device performs adsorption operation; (ii) When the first adsorption device is in fluid communication with the filtering device, the second adsorption device is in fluid communication with the heating device, and at this time, the first adsorption device performs adsorption operation, and the second adsorption device performs desorption operation.

According to the second aspect described above, (i) the first adsorption means is in a saturated or near saturated state when the first adsorption means is in fluid communication with the heating means; (ii) The second adsorption device is in a saturated or near saturated state when the second adsorption device is in fluid communication with the heating device.

According to the second aspect described above, the heating means is configured to heat the air received into the heating means and output the heated air to the second adsorption means, the heated air performing the desorption operation on the second adsorption means in the saturated state or the approximately saturated state, thereby allowing the second adsorption means in the saturated state or the approximately saturated state to be restored to the operation state.

According to the second aspect described above, the furnace comprises a heating zone and a cooling zone, wherein the filtering means receives exhaust gases from the heating zone of the furnace and the second adsorption means is arranged to deliver secondary cleaning gases to the heating zone and/or the cooling zone of the furnace.

According to the second aspect described above, the filter device is configured to be controllably in fluid communication with one of the first adsorption device and the second adsorption device, and the heating device is configured to be controllably in fluid communication with the other of the first adsorption device and the second adsorption device.

According to the above second aspect, the exhaust gas purification system further includes: a first valve assembly for controlling the filter device to be in fluid communication with one of the first adsorption device and the second adsorption device; and a second valve assembly for controlling the heating device to be in fluid communication with one of the first and second adsorption devices.

According to the second aspect described above, the first valve assembly includes a first valve for controlling the filter device and the first adsorption device to be in fluid communication or disconnected, and a third valve for controlling the filter device and the second adsorption device to be in fluid communication or disconnected, the second valve assembly includes a second valve for controlling the heating device and the first adsorption device to be in fluid communication or disconnected, and a fourth valve for controlling the heating device and the second adsorption device to be in fluid communication or disconnected.

According to the second aspect described above, the second adsorption means includes a second adsorption material for adsorbing the contaminants in the primary purge gas from the filter means to the surface and/or inside of the second adsorption material for adsorption operation.

According to the second aspect described above, the heated air that enters the second adsorption device from the heating device heats the contaminants adsorbed in the second adsorption device to discharge the contaminants out of the second adsorption device, thereby causing the second adsorption device to perform the desorption operation.

In order to enable the adsorption device to be used uninterruptedly in the PCB processing process, the application is provided with two sets of adsorption devices to be used alternately. Specifically, since the adsorption apparatus cannot perform an adsorption operation to purify the exhaust gas while performing desorption, the content of contaminants in the cooling zone of the furnace may be increased. The second adsorption device is added, so that the first adsorption device can still perform adsorption operation when in desorption, and therefore at least one adsorption device is kept to perform adsorption operation, and the whole system can work normally when in desorption.

The conception, specific structure, and technical effects of the present application will be further described with reference to the accompanying drawings to fully understand the objects, features, and effects of the present application.

Drawings

Fig. 1 shows a simplified block diagram of an exhaust gas purification system 100 according to a first embodiment of the present application;

fig. 2 shows a simplified block diagram of an exhaust gas purification system 200 according to a second embodiment of the application;

fig. 3A shows a schematic perspective view of an embodiment of the filtering device 103 in the exhaust gas purification system 100, 200 in fig. 1 and 2;

FIG. 3B is a top view of the filter apparatus 103 shown in FIG. 3A;

FIG. 3C is a schematic perspective view of the filter device 103 of FIG. 3A with the top 304, left 305, right 306 and rear 308 portions of the housing (the front 307 and bottom portions of the housing remaining) removed;

FIG. 3D is a left side view of the filter apparatus 103 shown in FIG. 3C;

fig. 3E is a right side view of the filter device 103 shown in fig. 3C;

fig. 3F is a top view of the filter apparatus 103 shown in fig. 3C;

FIG. 3G is a bottom view of the filter device 103 of FIG. 3A with the bottom of the housing removed;

fig. 4 shows a schematic structural view of an embodiment of the heating device 105 in the exhaust gas purification system 100, 200 in fig. 1 and 2;

fig. 5A shows a schematic perspective view of an embodiment of the first adsorption device 104 in the exhaust gas purification system 100, 200 in fig. 1 and 2;

FIG. 5B is a schematic perspective view of the first adsorption device 104 of FIG. 5A with the top portion removed;

FIG. 5C is a front view of the first adsorption device 104 shown in FIG. 5B; and

fig. 5D is a top view of the first adsorption device 104 shown in fig. 5B.

Detailed Description

Various embodiments of the present application are described below with reference to the accompanying drawings, which form a part hereof. It is to be understood that, although directional terms, such as "front", "rear", "upper", "lower", "left", "right", "top", "bottom", "side", etc., may be used in the present application to describe various example structural portions and elements of the present application, these terms are used herein for convenience of description only and are determined based on the example orientations shown in the drawings. Since the disclosed embodiments of the application may be arranged in a variety of orientations, these directional terms are used by way of illustration only and are in no way limiting.

It will be appreciated by those skilled in the art that the exhaust gas or gas described in this embodiment refers to a component that is largely gaseous and may also contain a portion of the liquid or solid component.

Fig. 1 shows a simplified block diagram of an exhaust gas purification system 100 according to a first embodiment of the present application, for illustrating the connection relationship of the respective parts of the exhaust gas purification system 100. As shown in fig. 1, the exhaust gas purification system 100 is disposed outside the reflow oven hearth 110 and is connected to the reflow oven hearth 110. When the reflow oven uses a substantially inert gas (e.g., nitrogen) as the working gas, the exhaust gas purification system 100 receives exhaust gas exhausted from the furnace 110 of the reflow oven, purifies the exhaust gas, and conveys the purified gas back into the furnace 110.

As shown in fig. 1, the exhaust gas purification system 100 includes a filtering device 103 and a first adsorption device 104, the filtering device 103 and the first adsorption device 104 are connected to each other and to the furnace 110 to purify exhaust gas discharged from the furnace 110, and the purified gas is conveyed back to the furnace 100 for recycling. The filter device 103 is connected to the furnace 110 and receives exhaust gases from the furnace 110. The filtering device 103 cools and filters the received exhaust gas to purify the exhaust gas, and outputs primary purified gas. The first adsorption device 104 is connected to the filtering device 103 and receives primary purge gas from the filtering device 103. The first adsorption device 104 performs an adsorption operation on the primary purge gas to purge the primary purge gas and output a secondary purge gas, and delivers the secondary purge gas to the furnace 110.

The first adsorption device 104 in the present application is used to absorb pollutants (e.g., flux) remaining in the exhaust gas due to insufficient cooling temperature in the filtering device 103. Specifically, the first adsorption device 104 can absorb the flux that cannot be cooled and removed by the filter device 103 at the set temperature thereof, thereby avoiding the reduction of the flux content in the exhaust gas by further reducing the cooling temperature of the filter device 103, and thus reducing the removal cost.

The exhaust gas purification system 100 further comprises a heating device 105, the first adsorption device 104 being controllably in alternating fluid communication with the filtration device 103 and the heating device 105. The exhaust gas purification system 100 further comprises a valve assembly for controlling the first adsorption means 104 to be in alternating fluid communication with the filtration means 103 and the heating means 105. The valve assembly includes a first valve 1061 and a second valve 1062, the first valve 1061 being configured to control the first adsorption device 104 and the filtration device 103 to be in fluid communication or out of fluid communication, and the second valve 1062 being configured to control the first adsorption device 104 and the heating device 105 to be in fluid communication or out of fluid communication. The valve assembly, first valve 1061, and second valve 1062 may be operated under control of a controller to control the fluid communication or disconnection of the various devices connected thereto. The valve assembly includes other forms of valve structures. The first adsorption device 104 performs an adsorption operation when the first adsorption device 104 is in fluid communication with the filtration device 103, and the first adsorption device 104 performs a desorption operation when the first adsorption device 104 is in fluid communication with the heating device 105. When the first adsorption device 104 is operated for a period of time to reach a saturated or near saturated state, the first adsorption device 104 can no longer or substantially no longer operate to adsorb contaminants (e.g., flux) in the exhaust gas into the first adsorption device 104 to purify the exhaust gas. The first adsorption device 104 in a saturated state or an approximately saturated state may perform a desorption operation using the heating device 105 to restore to an operating state. The heating device 105 is configured to heat the air that enters therein and output the heated air to the first adsorption device 104, and the heated air performs a desorption operation on the first adsorption device 104 in a saturated state or an approximately saturated state, so that the first adsorption device 104 in a saturated state or an approximately saturated state is restored to an operating state. The heated air entering the first adsorption device 104 from the heating device 105 heats the pollutants in the exhaust gas adsorbed in the first adsorption device 104 to discharge the pollutants in the exhaust gas out of the first adsorption device 104, thereby causing the first adsorption device 104 to perform a desorption operation.

The heating device 105 in the present application is used to desorb the first adsorption device 104 in a saturated state or a nearly saturated state, so that the first adsorption device 104 can be reused. Because when the first adsorption means 104 adsorbs too much contaminants (e.g., flux) in the adsorption operation, the first adsorption means 104 will be in a saturated state and not be operated, i.e., the adsorption operation cannot be performed or is substantially impossible to purify the exhaust gas. Therefore, in order to keep the first adsorption apparatus 104 out of saturation, the heating apparatus 105 supplies hot air to desorb the first adsorption apparatus 104 to discharge contaminants adsorbed in the first adsorption apparatus 104 out of the first adsorption apparatus 104, thereby restoring the first adsorption apparatus 104 to an operating state while avoiding the saturation.

Specifically, as shown in fig. 1, the furnace 110 includes a heating area 101 and a cooling area 102, and the conveying device conveys the PCB to the heating area 101 for heat welding treatment, and then conveys the PCB to the cooling area 102 for cooling treatment. The heating zone 101 comprises a first gas inlet 1011, a second gas inlet 1013 and an exhaust gas outlet 1012, and the cooling zone 102 comprises a first gas inlet 1021 and a second gas inlet 1022. The filter device 103 includes an exhaust gas inlet 1031 and a gas outlet 1032, and the first adsorption device 104 includes a gas inlet 1041, a clean gas outlet 1042, an air inlet 1043, and an exhaust gas The outlet 1044, the heating device 105 includes an air inlet 1051 and an air outlet 1052. The first gas inlet 1011 of the heating zone 101 and the first gas inlet 1021 of the cooling zone 102 are for receiving nitrogen (N) ₂ ) So as to provide a low-oxygen environment for the welding of the PCB. The exhaust gas outlet 1012 of the heating zone 101 is in fluid communication with the exhaust gas inlet 1031 of the filter device 103, the gas outlet 1032 of the filter device 103 is in fluid communication with the gas inlet 1041 of the first adsorption device 104, and the clean gas outlet 1042 of the first adsorption device 104 is in fluid communication with the second gas inlet 1013 of the heating zone 101 and the second gas inlet 1022 of the cooling zone 102. In other embodiments, the gas outlet 1032 of the filter device 103 is controllably in fluid communication with the gas inlet 1041 of the first adsorption device 104 via the first valve 1061, and the net gas outlet 1042 of the first adsorption device 104 is in fluid communication with the second gas inlet 1013 of the heating zone 101 or the second gas inlet 1022 of the cooling zone 102. The air inlet 1051 of the heating device 105 is for receiving air or compressed air, and the air outlet 1052 of the heating device 105 is controllably in fluid communication with the air inlet 1043 of the first adsorption device 104 via a second valve 1062. The exhaust outlet 1044 of the first adsorption device 104 is used for discharging exhaust gas generated by the desorption operation of the first adsorption device 104.

In operation, the filtering device 103 receives exhaust gas from the heating zone 101 through the exhaust gas inlet 1031, performs cooling and filtering processes on the received exhaust gas to purify the exhaust gas, and outputs primary purified gas through the gas outlet 1032. The filtering device 103 performs cooling and filtering treatment on the exhaust gas to remove a part of pollutants in the exhaust gas, thereby outputting primary purge gas. The filtering device 103 includes a cooling unit 111 and a filtering unit 112. The cooling unit 111 is configured to receive the exhaust gas from the heating region 101, cool the exhaust gas to condense part of pollutants in the exhaust gas, and output the cooled and purified exhaust gas. The filtering unit 112 is configured to receive the cooled and purified exhaust gas from the cooling unit 111, filter out liquid and/or solid mixed in the cooled and purified exhaust gas, and output primary purified gas.

When the first adsorption device 104 performs an adsorption operation, the first valve 1061 controls the fluid communication between the gas inlet 1041 of the first adsorption device 104 and the gas outlet 1032 of the filter device 103, and the second valve1062 control the fluid disconnection of the air inlet 1043 of the first adsorption device 104 and the air outlet 1052 of the heating device 105. The first adsorption device 104 receives the primary purge gas from the filtering device 103 through the gas inlet 1041, performs an adsorption operation on the primary purge gas to purge the primary purge gas, and delivers the secondary purge gas to the heating zone 101 and/or the cooling zone 102 through the purge gas outlet 1042. The heating zone 101 receives secondary purge gas from the first adsorption device 104 through the second gas inlet 1013 to provide a working environment required for welding. The cooling zone 102 receives secondary purge gas from the first adsorption device 104 through the second gas inlet 1022 to provide the working environment required for welding. Since the exhaust gas drawn from the heating zone 101 includes the nitrogen (N) gas received by the heating zone 101 from the first gas inlet 1011 ₂ ) While the filtering device 103 and the first adsorption device 104 do not purge nitrogen (N) during the purge treatment ₂ ) The secondary purge gas thus output after being purged by the filtering device 103 and the first adsorption device 104 includes nitrogen (N) ₂ ) May be transported to the heating zone 101 and/or the cooling zone 102 for recycling.

When the first adsorption device 104 is subjected to the desorption operation, the first valve 1061 controls the gas inlet 1041 of the first adsorption device 104 and the gas outlet 1032 of the filter device 103 to be fluidly disconnected, and the second valve 1062 controls the air inlet 1043 of the first adsorption device 104 and the air outlet 1052 of the heater device 105 to be fluidly connected. The heating device 105 receives air through the air inlet 1051, heats the received air, and delivers the heated air to the first adsorption device 104 through the air outlet 1052. The first adsorption device 104 in a saturated or nearly saturated state receives heated air from the heating device 105 through the air inlet 1043, heats pollutants in the exhaust gas adsorbed in the first adsorption device 104 using the heated air to discharge the pollutants out of the first adsorption device 104, thereby restoring the first adsorption device 104 in a saturated or nearly saturated state to an operating state, and outputs the exhaust gas through the exhaust gas outlet 1044. In other embodiments, the heating device 105 may receive compressed air through the air inlet 1051, such as from a compressor, and heat the received compressed air to output heated air.

Fig. 2 shows a simplified block diagram of an exhaust gas purification system 200 according to a second embodiment of the present application, for illustrating the connection relationship of the respective parts of the exhaust gas purification system 200. As shown in fig. 2, the exhaust gas purification system 200 is disposed outside the reflow oven hearth 110 and is connected to the reflow oven hearth 110. When the reflow oven uses a substantially inert gas (e.g., nitrogen) as the working gas, the exhaust gas purification system 200 receives exhaust gas exhausted from the furnace 110 of the reflow oven, purifies the exhaust gas, and conveys the purified gas back into the furnace 110.

Compared to the exhaust gas purification system 100 shown in fig. 1, the exhaust gas purification system 200 shown in fig. 2 adds a second adsorption device 201, and the second adsorption device 201 alternately performs an adsorption operation and a desorption operation with the first adsorption device 104. Specifically, when the first adsorption device 104 performs the adsorption operation, the second adsorption device 201 performs the desorption operation; when the first adsorption device 104 performs the desorption operation, the second adsorption device 201 performs the adsorption operation. The use of the first adsorption device 104 and the second adsorption device 201 can make the exhaust gas purification system 200 always have one adsorption device capable of performing adsorption operation, thereby avoiding the failure of operation, such as failure of adsorption operation to purify exhaust gas, due to the need to perform desorption operation. Because for a single adsorption device, the adsorption operation cannot be performed to purify the exhaust gas when desorption is performed.

As shown in fig. 2, the exhaust gas purification system 200 includes a filter device 103, a heating device 105, a first adsorption device 104, and a second adsorption device 201. The structures of the filter 103, the heating device 105, and the first adsorption device 104 in fig. 2 are the same as the structures of the filter 103, the heating device 105, and the first adsorption device 104 in fig. 1, respectively. The first adsorption device 104 and the second adsorption device 201 in fig. 2 have the same structure. In other embodiments, the first adsorption device 104 and the second adsorption device 201 may be configured differently.

In fig. 2, the first adsorption means 104 is controllably in alternating fluid communication with the filtration means 103 and the heating means 105, thereby alternately performing adsorption and desorption operations, wherein the first adsorption means 104 performs an adsorption operation when the first adsorption means 104 is in fluid communication with the filtration means 103; when the first adsorption device 104 is in fluid communication with the heating device 105, the first adsorption device 104 performs a desorption operation. The second adsorption device 201 is controllably in alternating fluid communication with the filtration device 103 and the heating device 105 to alternately perform adsorption and desorption operations, wherein the second adsorption device 201 performs an adsorption operation when the second adsorption device 201 is in fluid communication with the filtration device 103; when the second adsorption device 201 is in fluid communication with the heating device 105, the second adsorption device 201 performs a desorption operation.

When the first adsorption device 104 is in fluid communication with the filtration device 103, the second adsorption device 201 is in fluid communication with the heating device 105, at which time the first adsorption device 104 is operated for adsorption and the second adsorption device 201 is operated for desorption. When the first adsorption device 104 is in fluid communication with the heating device 105, the second adsorption device 201 is in fluid communication with the filtering device 103, at which time the first adsorption device 104 performs a desorption operation and the second adsorption device 201 performs an adsorption operation. When the first adsorption device 104 is in a saturated or near saturated condition, the first adsorption device 104 is substantially incapable or incapable of adsorption operation to purify the exhaust gas, at which time the first adsorption device 104 may be controlled to be in fluid communication with the heating device 105 for desorption operation, thereby returning to an operating condition. When the second adsorption device 201 is in a saturated or near saturated condition, the second adsorption device 201 is substantially incapable or incapable of performing an adsorption operation to purify the exhaust gas, at which time the second adsorption device 201 may be controlled to be in fluid communication with the heating device 105 to perform a desorption operation to thereby restore to an operating condition.

As shown in fig. 2, the filtering device 103 is connected to the furnace 110 and receives the exhaust gas from the furnace 110, cools and filters the exhaust gas to purify the exhaust gas, and outputs primary purified gas. When the first adsorption device 104 is in fluid communication with the filtration device 103 and the second adsorption device 201 is in fluid communication with the heating device 105, the first adsorption device 104 performs an adsorption operation and the second adsorption device 201 performs a desorption operation. At this time, the first adsorption device 104 receives the primary purge gas from the filtration device 103, performs an adsorption operation on the primary purge gas to purge the primary purge gas and output the secondary purge gas, and conveys the secondary purge gas to the furnace 110. The heating device 105 heats the air entered therein and outputs the heated air to the second adsorption device 201, which performs a desorption operation on the second adsorption device 201 in a saturated state or an approximately saturated state, thereby restoring the second adsorption device 201 in a saturated state or an approximately saturated state to an operating state. The heated air entering the second adsorption device 201 from the heating device 105 heats the pollutants in the exhaust gas adsorbed in the second adsorption device 201 to discharge the pollutants out of the second adsorption device 201, thereby causing the second adsorption device 201 to perform a desorption operation.

When the first adsorption device 104 is in fluid communication with the heating device 105 and the second adsorption device 201 is in fluid communication with the filtering device 103, the first adsorption device 104 performs a desorption operation and the second adsorption device 201 performs an adsorption operation. At this time, the second adsorption device 201 receives the primary purge gas from the filtration device 103, performs an adsorption operation on the primary purge gas to purge the primary purge gas and output the secondary purge gas, and conveys the secondary purge gas to the furnace 110. The heating device 105 heats the air entered therein and outputs the heated air to the first adsorption device 104, which performs a desorption operation on the first adsorption device 104 in a saturated state or an approximately saturated state, thereby restoring the first adsorption device 104 in a saturated state or an approximately saturated state to an operating state. The heated air entering the first adsorption device 104 from the heating device 105 heats the exhaust gas adsorbed in the first adsorption device 104 to discharge the exhaust gas out of the first adsorption device 104, thereby causing the first adsorption device 104 to perform a desorption operation.

When the first adsorption device 104 and the second adsorption device 201 in the operating state are initially used, only the first adsorption device 104 may be made to perform adsorption operation, while the second adsorption device 201 is not operated, and when the first adsorption device 104 performs adsorption operation for a period of time to reach a saturated state or a near saturated state, the second adsorption device 201 may be used to perform adsorption operation. At this time, the first adsorption device 104 reaching the saturated state or the nearly saturated state may be controlled to be connected with the heating device 105 to perform the desorption operation. The above-described operation of the first adsorption device 104 and the second adsorption device 201 and vice versa.

Specifically, as shown in fig. 2, the furnace 110 includes a heating area 101 and a cooling area 102, and the conveying device conveys the PCB to the heating area 101 for heat welding treatment, and then conveys the PCB to the cooling area 102 for cooling treatment. The heating zone 101 comprises a first gas inlet 1011, a second gas inlet 1013 and an exhaust gas outlet 1012, and the cooling zone 102 comprises a first gas inlet 1021 and a second gas inlet 1022. The filter device 103 comprises an exhaust gas inlet 1031 and a gas outlet 1032, the heating device 105 comprises an air inlet 1051 and an air outlet 1052, the first adsorption device 104 comprises a gas inlet 1041, a clean gas outlet 1042, an air inlet 1043 and an exhaust gas outlet 1044, and the second adsorption device 201 comprises a gas inlet 2011, a clean gas outlet 2012, an air inlet 2013 and an exhaust gas outlet 2014. The first gas inlet 1011 of the heating zone 101 and the first gas inlet 1021 of the cooling zone 102 are for receiving nitrogen (N) ₂ ) So as to provide a low-oxygen environment for the welding of the PCB. The exhaust outlet 1012 of the heating zone 101 is in fluid communication with the exhaust inlet 1031 of the filter apparatus 103. The gas outlet 1032 of the filter device 103 is controllably in alternating fluid communication with the gas inlet 1041 of the first adsorption device 104 and the gas inlet 2011 of the second adsorption device 201 via a first valve assembly. The net gas outlet 1042 of the first adsorption device 104 is in fluid communication with the second gas inlet 1013 of the heating zone 101 and/or the second gas inlet 1022 of the cooling zone 102. The net gas outlet 2012 of the second adsorption device 201 is in fluid communication with the second gas inlet 1013 of the heating zone 101 and/or the second gas inlet 1022 of the cooling zone 102. The air inlet 1051 of the heating device 105 is for receiving air or compressed air, and the air outlet 1052 of the heating device 105 is controllably in alternating fluid communication with the air inlet 1043 of the first adsorption device 104 and the air inlet 2013 of the second adsorption device 201 via a second valve assembly. The exhaust outlet 1044 of the first adsorption device 104 is used for discharging exhaust gas generated by the desorption operation of the first adsorption device 104. The exhaust outlet 2014 of the second adsorption apparatus 201 is used for discharging exhaust gas generated by the desorption operation of the second adsorption apparatus 201.

The first valve assembly is used to control the filter device 103 in fluid communication with one of the first adsorption device 104 and the second adsorption device 201. The second valve assembly is used to control the heating device 105 to be in fluid communication with one of the first adsorption device 104 and the second adsorption device 201. While the first valve assembly controls the filter device 103 to be in fluid communication with one of the first adsorption device 104 and the second adsorption device 201, the second valve assembly controls the heating device 105 to be in fluid communication with the other of the first adsorption device 104 and the second adsorption device 201. The first valve assembly includes a first valve 1061 and a third valve 2073, and the second valve assembly includes a second valve 1062 and a fourth valve 2074. The first valve 1061 is used to control the filter apparatus 103 and the first adsorption apparatus 104 to be in fluid communication or disconnected, the third valve 2073 is used to control the filter apparatus 103 and the second adsorption apparatus 201 to be in fluid communication or disconnected, the second valve 1062 is used to control the heating apparatus 105 and the first adsorption apparatus 104 to be in fluid communication or disconnected, and the fourth valve 2074 is used to control the heating apparatus 105 and the second adsorption apparatus 201 to be in fluid communication or disconnected. The first and second valve assemblies include other forms of valve structures.

In operation, the filtering device 103 receives exhaust gas from the heating zone 101 through the exhaust gas inlet 1031, performs cooling and filtering processes on the received exhaust gas to purify the exhaust gas, and outputs primary purified gas through the gas outlet 1032. The filtering device 103 performs cooling and filtering treatment on the exhaust gas to remove a part of pollutants in the exhaust gas, thereby outputting primary purge gas.

When the first adsorption device 104 performs an adsorption operation, the second adsorption device 201 performs a desorption operation. At this time, the first valve assembly controls the filter device 103 to be in fluid communication with the first adsorption device 104 and to be in fluid communication with the second adsorption device 201, and the second valve assembly controls the heating device 105 to be in fluid communication with the second adsorption device 201 and to be in fluid communication with the first adsorption device 104. As shown in fig. 2, when the first valve 1061 in the first valve assembly controls the filter device 103 and the first adsorption device 104 to be in fluid communication, the third valve 2073 in the first valve assembly controls the filter device 103 and the second adsorption device 201 to be in fluid communication, the second valve 1062 in the second valve assembly controls the heating device 105 and the first adsorption device 104 to be in fluid communication, and the fourth valve 2074 in the second valve assembly controls the heating device 105 and the second adsorption device 201 to be in fluid communication.

As described above, when the first adsorption device 104 performs the adsorption operation, the second adsorption device 201 performs the desorption operation. At this time, the first adsorption device 104 receives the primary purge gas from the filtering device 103 through the gas inlet 1041, performs an adsorption operation on the primary purge gas to purge the primary purge gas, and delivers the secondary purge gas to the heating zone 101 and/or the cooling zone 102 through the purge gas outlet 1042. The heating zone 101 receives secondary purge gas from the first adsorption device 104 through the second gas inlet 1013 to provide a working environment required for welding. The cooling zone 102 receives secondary purge gas from the first adsorption device 104 through the second gas inlet 1022 to provide the working environment required for welding. Since the exhaust gas drawn from the heating zone 101 includes the nitrogen (N) gas received by the heating zone 101 from the first gas inlet 1011 ₂ ) While the filtering device 103 and the first adsorption device 104 do not purge nitrogen (N) during the purge treatment ₂ ) The secondary purge gas thus output after being purged by the filtering device 103 and the first adsorption device 104 includes nitrogen (N) ₂ ) May be transported to the heating zone 101 and/or the cooling zone 102 for recycling.

As described above, when the first adsorption device 104 performs the adsorption operation, the second adsorption device 201 performs the desorption operation. At this time, the heating device 105 receives air through the air inlet 1051, heats the received air, and delivers the heated air to the second adsorption device 201 through the air outlet 1052. The second adsorption device 201 in a saturated or nearly saturated state receives heated air from the heating device 105 through the air inlet 2013, uses the heated air to perform a desorption operation of contaminants in the exhaust gas adsorbed in the second adsorption device 201 to restore the second adsorption device 201 in a saturated or nearly saturated state to an operating state, and outputs the exhaust gas through the exhaust gas outlet 2014. In other embodiments, the heating device 105 may receive compressed air through the air inlet 1051, such as from a compressor, and heat the received compressed air to output heated air.

When the first adsorption device 104 performs the desorption operation, the second adsorption device 201 performs the adsorption operation. At this time, the first valve assembly controls the filter device 103 to be in fluid communication with the second adsorption device 201 and to be in fluid communication with the first adsorption device 104, and the second valve assembly controls the heating device 105 to be in fluid communication with the first adsorption device 104 and to be in fluid communication with the second adsorption device 201. As shown in fig. 2, when the first valve 1061 in the first valve assembly controls the filtration device 103 and the first adsorption device 104 to be fluidly disconnected, the third valve 2073 in the first valve assembly controls the filtration device 103 and the second adsorption device 201 to be fluidly connected, the second valve 1062 in the second valve assembly controls the heating device 105 and the first adsorption device 104 to be fluidly connected, and the fourth valve 2074 in the second valve assembly controls the heating device 105 and the second adsorption device 201 to be fluidly disconnected.

As described above, when the first adsorption device 104 performs the desorption operation, the second adsorption device 201 performs the adsorption operation. At this time, the second adsorption device 201 receives the primary purge gas from the filtration device 103 through the gas inlet 2011, performs an adsorption operation on the primary purge gas to purge the primary purge gas, and delivers the secondary purge gas to the heating zone 101 and/or the cooling zone 102 through the purge gas outlet 2012. The heating zone 101 receives secondary purge gas from the second adsorption device 201 through the second gas inlet 1013 to provide a working environment required for welding. The cooling zone 102 receives secondary purge gas from the second adsorption device 201 through the second gas inlet 1022 to provide the working environment required for welding. Since the exhaust gas drawn from the heating zone 101 includes the nitrogen (N) gas received by the heating zone 101 from the first gas inlet 1011 ₂ ) While the filtering device 103 and the second adsorption device 201 do not purge nitrogen (N) during the purge treatment ₂ ) The secondary purge gas thus output after being purged by the filtering device 103 and the second adsorption device 201 includes nitrogen (N) ₂ ) May be transported to the heating zone 101 and/or the cooling zone 102 for recycling.

As described above, when the first adsorption device 104 performs the desorption operation, the second adsorption device 201 performs the adsorption operation. At this time, the heating device 105 receives air through the air inlet 1051, heats the received air, and delivers the heated air to the first adsorption device 104 through the air outlet 1052. The first adsorption device 104 in a saturated or nearly saturated state receives heated air from the heating device 105 through the air inlet 1043, uses the heated air to perform a desorption operation of contaminants in the exhaust gas adsorbed in the first adsorption device 104 to restore the first adsorption device 104 in a saturated or nearly saturated state to an operating state, and outputs the exhaust gas through the exhaust gas outlet 1044. In other embodiments, the heating device 105 may receive compressed air through the air inlet 1051, such as from a compressor, and heat the received compressed air to output heated air.

Fig. 3A-G show an overall schematic of an embodiment of the filtering device 103 in the exhaust gas purification system 100, 200 of fig. 1 and 2, wherein fig. 3A is a schematic perspective view of the filtering device 103, fig. 3B is a top view of fig. 3A, fig. 3C is a schematic perspective view of the filtering device 103 of fig. 3A with the top 304, left 305, right 306, and rear 308 (front 307 and bottom of the remaining housing) removed, fig. 3D is a left view of fig. 3C, fig. 3E is a right view of fig. 3C, fig. 3F is a top view of fig. 3C, and fig. 3G is a bottom view of the filtering device 103 of fig. 3A with the bottom of the housing removed.

The filtering device 103 is used to cool and filter the exhaust gas from the furnace 110 to purify the exhaust gas and output primary purified gas. The filtering device 103 includes a cooling unit 111 and a filtering unit 112. As shown in fig. 3C, the cooling unit 111 includes a first stage cooling member 301 and a second stage cooling member 302, and the filter unit 112 includes a filter member 303. The first stage cooling unit 301 and the second stage cooling unit 302 are used to cool the exhaust gas to purify the exhaust gas, and output the cooled purified exhaust gas. The first stage cooling unit 301 and the second stage cooling unit 302 cool the exhaust gas such that part of the pollutants in the exhaust gas is condensed into liquid and/or solid, thereby removing the part of the pollutants from the exhaust gas, and thus the exhaust gas is purified. The first stage cooling section 301 and the second stage cooling section 302 also reject the condensed liquids and/or solids. The filter member 303 is for filtering the cooled and purified exhaust gas from the cooling unit 111 to purify the cooled and purified exhaust gas, and outputting primary purified gas. The filtering part 303 filters the cooled purified exhaust gas from the cooling unit 111 to filter out liquid and/or solid in the cooled purified exhaust gas, thereby further purifying the cooled purified exhaust gas, and outputs the primary purified gas.

As shown in fig. 3A-B, the filter device 103 includes a housing that is generally box-shaped with a cavity therein, including a top 304, a bottom, a left 305, a right 306, a front 307, and a rear 308. The filter device 103 further comprises an exhaust gas inlet 1031 and a gas outlet 1032 provided on the housing. The exhaust gas inlet 1031 is connected to the furnace chamber 110 of the reflow oven, for example, the heating zone 101 of the furnace chamber 110, by means of a connecting line 330. A connecting conduit 309 is provided on the gas outlet 1032, and a valve may be provided on the connecting conduit 309 for controlling the fluid communication or disconnection of the filtering means 103 from the adsorption means 104, 201. The gas outlet 1032 is connected to the adsorption device 104, 201 via a connecting conduit 309. The exhaust gas discharged from the furnace 110 can enter the filter device 103 from the exhaust gas inlet 1031, be cooled and filtered by the filter device 103 to be purified into primary purified gas, and then be discharged to the adsorption device 104, 201 from the gas outlet 1032.

As shown in fig. 3A-C, the front 307 of the housing includes a first front plate 310 and a second front plate 311. The first front plate 310 is used to seal the first cooling chamber 312 inside the case from the front side direction, and the second front plate 311 is used to seal the second cooling chamber 313 inside the case from the front side direction. The first front plate 310 is provided with an inlet 3101 and an outlet 3102, wherein a cooling medium (e.g., air) enters the first cooling chamber 312 through the inlet 3101 and exits the first cooling chamber 312 through the outlet 3102. The second front plate 311 is also provided with an inlet 3111 and an outlet 3112, wherein a cooling medium (e.g., air) enters the second cooling volume 313 through the inlet 3111 and exits the second cooling volume 313 through the outlet 3112. The cooling medium flows through the first stage cooling element 301 and the second stage cooling element 302 in the first and second cooling plenums 312, 313 to exchange heat with the exhaust gases in the first and second cooling plenums 312, 313 to cool the exhaust gases, as described in detail below.

As shown in fig. 3A-E, the filter apparatus 103 further includes a cooling collection duct 318 and a filter collection duct 319 mounted to the bottom of the housing. The cooling collection conduit 318 is connected to the cooling collection chamber 316 (see fig. 3D) inside the housing and the filtering collection conduit 319 is connected to the filtering collection chamber 317 (see fig. 3E) inside the housing.

A cooling collection plenum 316 is disposed below the first cooling plenum 312 and the second cooling plenum 313 and is in fluid communication with both the first cooling plenum 312 and the second cooling plenum 313 for collecting contaminants, such as liquid and/or solid contaminants, discharged from the first cooling plenum 312 and the second cooling plenum 313. A filter collection chamber 317 is disposed below the filter and vent chambers 314, 315 and is in fluid communication with both the filter and vent chambers 314, 315 for collecting contaminants, such as liquid and/or solid contaminants, exhausted from the filter and vent chambers 314, 315. The cooling collection conduit 318 and the filtering collection conduit 319 may be connected to a collection vessel (not shown) such that the collection vessel collects contaminants exhausted from the first and second cooling, filtering and exhausting plenums 313, 314, 315. The bottom of the housing forms the bottom of the cooling collection chamber 316. The bottom of the cooling collection chamber 316 includes three parts, a first flat plate 320, an inclined plate 321, and a second flat plate 322, which are sequentially disposed from the rear to the front as viewed from the front of the filtering apparatus 103, the second flat plate 322 being lower than the first flat plate 320, wherein the rear end of the inclined plate 321 is connected to the first flat plate 320, the front end of the inclined plate 321 is connected to the second flat plate 322, and the second inclined plate 321 is gradually inclined downward from the rear end thereof to the front end (see fig. 3D and 3E). The cooling collection duct 318 and the filtering collection duct 319 are provided on the second plate 322. By providing inclined plates 321, contaminants that condense into liquids and/or solids can be more easily discharged from cooling collection duct 318 and filtering collection duct 319. The filter collection chamber 317 has a similar structure to the cooling collection chamber 316.

As shown in fig. 3A-G, the bottom of the filter device 103 may be fitted with moving feet 3310, 3311 to facilitate moving the filter device 103 to a desired position. In other embodiments, the filter device 103 may not include a moving foot rest, but may be mounted in a desired position by, for example, a fastening assembly.

Fig. 3C-G show the internal structure and components of the filter device 103. The interior of the housing includes a plurality of chambers divided into two layers, an upper layer including a first cooling chamber 312, a second cooling chamber 313, a filtration chamber 314, and an exhaust chamber 315, and a lower layer including a cooling collection chamber 316 and a filtration collection chamber 317. The first cooling volume 312 is arranged in a first row, the second cooling volume 313 is arranged in a second row, the filter volume 314 and the exhaust volume 315 are arranged in a third row, seen from the front of the filter device 103 from left to right, wherein the filter volume 314 is arranged at the rear of the third row and the exhaust volume 315 is arranged at the front of the third row. The first cooling plenum 312, the second cooling plenum 313, the filter plenum 314, and the exhaust plenum 315 are in fluid communication in sequence, the first cooling plenum 312 is in fluid communication with the exhaust gas inlet 1031, and the exhaust plenum 315 is in fluid communication with the gas outlet 1032. The flue gas from the furnace enters the filter device 103 through the flue gas inlet 1031, passes through the first cooling plenum 312, the second cooling plenum 313, the filter plenum 314, and the exhaust plenum 315 in that order, and exits through the gas outlet 1032 to the adsorption devices 104, 201.

The first stage cooling unit 301 is disposed in the first cooling chamber 312, the second stage cooling unit 302 is disposed in the second cooling chamber 313, the filter unit 303 is disposed in the filter chamber 314, and the fan 323 is disposed in the exhaust chamber 315. The first stage cooling element 301 and the second stage cooling element 302 cool the exhaust gas such that a portion of the contaminants in the exhaust gas condense into liquids and/or solids, which may be discharged from the first stage cooling element 301 and the second stage cooling element 302 to the cooling collection vessel 316, and the remaining uncondensed exhaust gas is discharged to the filtration vessel 314, whereby the portion of the contaminants in the exhaust gas is cleaned, i.e. the exhaust gas is cooled and purified. The filtering part 303 filters the cooled purified exhaust gas from the second stage cooling part 302 to filter out liquid and/or solid pollutants (i.e., another part of pollutants) in the cooled purified exhaust gas, thereby further purifying the exhaust gas and outputting primary purified gas. A fan 323 in the exhaust plenum 315 assists in flowing exhaust gas through the various plenums in the filter assembly 103. The fan 323 is connected to a motor 324 of the housing top 304, the motor 324 being configured to drive the fan 323. When the fan 323 is operated, the exhaust gas sequentially enters the first cooling capacity 312 and the second cooling capacity 313 through the exhaust gas inlet 1031, is cooled by the first stage cooling unit 301 and the second stage cooling unit 302, removes part of pollutants in the exhaust gas, enters the filtering capacity 314, is filtered by the filtering unit 303, removes another part of pollutants in the exhaust gas, and then enters the exhaust gas capacity 315 and is discharged from the gas outlet 1032. Exhaust gas discharged from the filter member 303 enters the exhaust chamber 315 to be in contact with the blades of the fan 323, so that a small portion of liquid/solid contaminants mixed in the exhaust gas are attached to the blades of the fan 323 and can be discharged to the filter collecting chamber 317.

The first stage cooling element 301 comprises a first heat exchanger 3011, an upper plate 3012 and a lower plate 3013, the upper plate 3012 being mounted to an upper surface of the first heat exchanger 3011 and the lower plate 3013 being mounted to a lower surface of the first heat exchanger 3011. As shown in fig. 3F-G, the upper plate 3012 is provided with an inlet 3014 near the front 307 of the housing, which inlet 3014 is in fluid communication with the exhaust gas inlet 1031 of the first cooling plenum 312 and the connecting duct 330, so that exhaust gas from the furnace 110 can enter the first heat exchanger 3011 via the connecting duct 330 and the exhaust gas inlet 1031 in sequence. The lower plate 3013 is provided with an outlet 3015 at its rear 308 adjacent the housing, which outlet 3015 is in fluid communication with the cooling collection plenum 316 so that the exhaust gas cooled and cleaned by the first heat exchanger 3011 can exit from the outlet 3015 to the cooling collection plenum 316. The cooling collection volume 316 is in fluid communication with the second cooling volume 313 so that exhaust gas exiting the first cooling volume 312 may enter the second cooling volume 313.

The first heat exchanger 3011 includes a plurality of cooling plates 3016, each cooling plate 3016 internally may contain a cooling medium (e.g., air), and exhaust gas flows outside the cooling plates 3016. The cooling medium inside the cooling plate 3016 exchanges heat with the exhaust gas outside the cooling plate 3016 through the outer peripheral side wall of the cooling plate 3016, reducing the temperature of the exhaust gas. The interiors of the cooling plates 3016 are in fluid communication to form cooling medium channels through which a cooling medium (e.g., air) may flow. The inlet and outlet of the cooling medium channel are in fluid communication with the inlet 3101 and the outlet 3102 of the first front plate 310, respectively, so that the cooling medium may enter the inlet of the cooling medium channel of the first heat exchanger 3011 from the inlet 3101 of the first front plate 310, flow through the cooling medium channel of the first heat exchanger 3011 and out the outlet of the cooling medium channel, and then be discharged from the outlet 3102 of the first front plate 310. The plurality of cooling plates 3016 of the first heat exchanger 3011 are arranged vertically side by side with a spacing, and the upper plate 3012 and the lower plate 3013 are respectively arranged at the upper side and the lower side of the plurality of cooling plates 3016 side by side. Exhaust gas enters the spaces between the individual cooling plates 3016 through the inlets 3014 of the upper plate 3012, flows from near the front 307 of the housing toward the rear 308 of the housing, and exits near the rear 308 of the housing through the outlets 3015 of the lower plate 3013 to the cooling collection plenum 316 below the first cooling plenum 312. As the cooling medium exchanges heat with the exhaust gas such that the temperature of the exhaust gas decreases, a portion of the exhaust gas (e.g., pollutants) may condense into liquids and/or solids due to the temperature decrease as the exhaust gas flows from the space between the cooling plates 3016 toward the rear 308 of the housing, which are accumulated in the first heat exchanger 3011 and discharged from the outlets 3015 of the lower plate 3013 to the cooling collection plenum 316 below the first cooling plenum 312.

The second stage cooling section 302 includes a second heat exchanger 3021, an upper plate 3022, and a lower plate 3023, the upper plate 3022 being mounted to an upper surface of the second heat exchanger 3021, the lower plate 3023 being mounted to a lower surface of the second heat exchanger 3021. As shown in fig. 3F-G, the lower plate 3023 is provided with an inlet 3024 at its front portion 307 adjacent the housing, the inlet 3024 being in fluid communication with the cooling collection volume 316. As previously described, the outlet 3015 of the lower plate of the first stage cooling component 301 is in fluid communication with the cooling collection plenum 316, and thus the outlet 3015 of the lower plate of the first stage cooling component 301 and the inlet 3024 of the lower plate of the second stage cooling component 302 are in fluid communication via the cooling collection plenum 316. The upper plate 3022 of the second stage cooling element 302 is provided with an outlet 3025 at its rear portion 308 adjacent the housing, the outlet 3025 being in fluid communication with the inlet 3140 of the filter volume 314 so that exhaust gas may be discharged from the second stage cooling element 302 to the filter volume 314. The inlet 3140 is disposed proximate to the outlet 3025.

Like the first heat exchanger 3011, the second heat exchanger 3021 also includes a plurality of cooling plates 3026, each cooling plate 3026 being capable of containing a cooling medium (e.g., air) therein, and exhaust gas flowing outside the cooling plates 3026. The plurality of cooling plates 3026 are erected side by side at intervals, and an upper plate 3022 and a lower plate 3023 are provided on the upper side and the lower side of the plurality of cooling plates 3026 side by side, respectively. In the second-stage cooling section 302, the cooling medium enters the inlet of the cooling medium passage of the second heat exchanger 3021 from the inlet 3111 of the second front plate 311, flows through the cooling medium passage of the second heat exchanger 3021 and flows out from the outlet of the cooling medium passage, and then is discharged from the outlet 3112 of the second front plate 311. At the same time, exhaust gas enters the spaces between the individual cooling plates through inlets 3024 of the lower plate 3023, flows from near the front 307 of the housing towards the rear 308 of the housing, and exits near the rear 308 of the housing through outlets 3025 of the upper plate 3022 to the filter volume 314. As the cooling medium exchanges heat with the exhaust gas such that the temperature of the exhaust gas decreases, a portion of the exhaust gas (e.g., contaminants) may condense into liquids and/or solids due to the temperature decrease as the exhaust gas flows from the space between the cooling plates 3026 toward the rear 308 of the housing near the front 307 of the housing, which liquids and/or solids are discharged from the inlet 3024 of the lower plate 3023 to the cooling collection volume 316 below the first cooling volume 312 after accumulating in the second heat exchanger 3021.

The first heat exchanger 3011 and the second heat exchanger 3021 may operate in series or in parallel. When the first heat exchanger 3011 and the second heat exchanger 3021 are operated in series, the outlet 3102 of the first front plate 310 is in fluid communication with the inlet 3111 of the second front plate 311 so that the cooling medium (e.g., air) discharged from the first heat exchanger 3011 may enter the second heat exchanger 3021. Specifically, the cooling medium (e.g., air) enters the first heat exchanger 3011 through the inlet 3101 of the first front plate 310, flows through the first heat exchanger 3011, enters the second heat exchanger 3021 through the outlet 3102 of the first front plate 310 and the inlet 3111 of the second front plate 311, flows through the second heat exchanger 3021, and is discharged through the outlet 3112 of the second front plate 311. When the first and second heat exchangers 3011, 3021 are operated in parallel, the first and second heat exchangers 3011, 3021 are operated independently, and the outlet 3102 of the first front plate 310 is not in fluid communication with the inlet 3111 of the second front plate 311. At this time, the cooling medium (e.g., air) enters the first heat exchanger 3011 through the inlet 3101 of the first front plate 310, flows through the first heat exchanger 3011, and then exits 3102 through the outlet of the first front plate 310. In parallel with this, another cooling medium (e.g., air) enters the second heat exchanger 3021 through the inlet 3111 of the second front plate 311, flows through the second heat exchanger 3021, and is discharged through the outlet 3112 of the second front plate 311.

The exhaust gas (temperature of approximately 170 ℃) containing contaminants in the reflow oven chamber 110 is discharged from the heating zone 101 of the chamber, cooled to a first temperature (e.g., 60-70 ℃) by the first stage cooling unit 301, and then further cooled to a second temperature (e.g., 40-50 ℃) by the second stage cooling unit 302, so that organic matters such as rosin, alcohols, acids or esters or ethers (e.g., 4-terpene alcohol, alpha-terpineol, tripropylene glycol methyl ether, diethylene glycol monohexyl ether, 2-methyl-2, 4-pentanediol, N-methylpyrrolidone, etc.) in the exhaust gas condense into liquid and/or solid. The condensed liquid and/or solids may be discharged to the cooling collection vessel 316 and the remaining exhaust gas discharged to the filtration vessel 314, so that the exhaust gas is cooled and purified.

A filter member 303 is disposed in the filter volume 314. The filtering part 303 filters the cooled purified exhaust gas from the second stage cooling part 302 to filter out liquid and/or solid pollutants (i.e., another part of pollutants) in the cooled purified exhaust gas, thereby further purifying the exhaust gas and outputting primary purified gas. As described above, the first stage cooling unit 301 and the second stage cooling unit 302 cool the exhaust gas to condense part of the pollutants in the exhaust gas into liquid and/or solid, thereby removing the part of the pollutants from the exhaust gas, and output the cooled and purified exhaust gas. Although a portion of the exhaust gas is condensed with liquids and/or solids and discharged to the cooling collection plenum 316, there may be a portion of the liquids and/or solids suspended in the gas and discharged to the filtration plenum 314 as the gas flows. The filter member 303 serves to pass the gas in the exhaust gas while blocking the liquid and solid in the exhaust gas from passing therethrough, thereby filtering the liquid and solid in the exhaust gas. As shown in fig. 3C-G, the filter member 303 is mounted laterally in the filter housing 314, and exhaust gas is allowed to flow through the filter member 303 from top to bottom after entering the filter housing 314 due to the blowing of the fan 323 in the exhaust housing 315 and is discharged from the outlet 3031 below the filter member 303 to the filter collection housing 317 below the filter housing 314. The liquid and solids in the exhaust gas are blocked above the filter element 303 and the gas in the exhaust gas flows out through the outlet 3031 to the filter collection chamber 317. Although the filter element 303 allows the gases in the exhaust to pass while blocking the liquids and solids in the exhaust from passing, a small portion of the liquids and/or solids may still be mixed with the gases passing through the filter element 303. The gas exiting the filter chamber 314 contacting the bottom of the filter collection chamber 317 may cause liquids and/or solids suspended in the gas to adhere to the bottom of the filter collection chamber 317 and thereby collect in the filter collection chamber 317. The filter member 303 includes filter cotton. In other embodiments, the filter component 303 includes other structures for filtering liquids and/or solids suspended in a gas.

The vent plenum 315 is in fluid communication with the filter collection plenum 317. The fan 323 in the exhaust plenum 315 draws exhaust gas from the filter collection plenum 317 into the exhaust plenum 315, which, when entering the exhaust plenum 315, contacts the vanes of the fan 323, causes a small portion of the liquid/or solid contaminants mixed in the exhaust gas to adhere to the vanes and, after accumulation on the vanes, can drip into the filter collection plenum 317 below the exhaust plenum 315. The remaining exhaust gas in the exhaust plenum 315 exits through the gas outlet 1032.

Fig. 4 shows a schematic structural view of an embodiment of the heating device 105 in the exhaust gas purification system 100, 200 in fig. 1 and 2. The heating device 105 is used for heating the air entering therein and outputting the heated air to the adsorption device 104, 201. The heated air is used to perform a desorption operation on the adsorption device 104, 201 in a saturated or nearly saturated state, so that the adsorption device 104, 201 in a saturated or nearly saturated state is restored to an operating state and is no longer in a saturated or nearly saturated state. In this operating state, the adsorption device 104, 201 can resume the adsorption operation to purify the gas.

As shown in fig. 4, the heating device 105 includes a housing 401 and a heating wire 402 provided in the housing 401. The housing 401 is provided with an air inlet 1051 and an air outlet 1052, air entering the housing 401 from the air inlet 1051 and exiting the housing 401 through the air outlet 1052. In one embodiment, the air is air in the atmosphere, which may be blown into the housing 401 by a fan. In another embodiment, the air entering the housing 401 may be compressed air output by a compressor. In operation, air enters the housing 401 through the air inlet 1051, the heater wire 402 heats the incoming air, and the heated air exits the housing 401 through the air outlet 1052 and is delivered to the adsorption device 104, 201 for desorption by the adsorption device 104, 201.

The heating wire 402 is used to heat the air entering the housing 401. When the heating wire 402 is energized, the temperature of the heating wire 402 increases and generates heat, and the heat generated by the heating wire 402 is diffused outward and transferred to the air inside the housing 401, so that the air inside the housing 401 is heated. In other embodiments, the heating device 105 includes other structures for heating air.

Fig. 5A-D show a general schematic of an embodiment of the first adsorption device 104 in the exhaust gas purification system 100, 200 of fig. 1 and 2, wherein fig. 5A is a schematic of a perspective structure of the first adsorption device 104, fig. 5B is a schematic of a perspective structure of the first adsorption device 104 of fig. 5A with a top portion removed, fig. 5C is a front view of fig. 5B, and fig. 5D is a top view of fig. 5B. The second adsorption device 201 in fig. 2 is identical or substantially identical in structure to the first adsorption device 104 and is not otherwise shown and described herein.

The first adsorption device 104 is used to absorb pollutants remaining in the exhaust gas in the filtering device 103 due to insufficient cooling temperature. The first adsorption device 104 can absorb the flux which cannot be cooled and removed by the filter device 103 at the set temperature thereof, thereby avoiding the reduction of the flux content in the exhaust gas by further reducing the cooling temperature of the filter device 103, and thus reducing the removal cost. The heating device 105 is used for desorbing the saturated first adsorption device 104, so that the first adsorption device 104 can be reused.

The first adsorption device 104 may perform only adsorption operation, and may alternatively perform adsorption and desorption operation. When the first adsorption device 104 performs an adsorption operation, the first adsorption device 104 is in fluid communication with the filtration device 103. The first adsorption device 104 performs an adsorption operation on the primary purge gas from the filtration device 103 to purge the primary purge gas and output a secondary purge gas, and delivers the secondary purge gas to the furnace. When the first adsorption device 104 is operated for a period of time to reach a saturated or near saturated state, the first adsorption device 104 can no longer or substantially no longer operate to adsorb exhaust gas into the first adsorption device 104 to purify the exhaust gas. The first adsorption device 104 in a saturated state or an approximately saturated state may perform a desorption operation using the heating device 105 to restore to an operating state. When the first adsorption device 104 in a saturated or nearly saturated state is subjected to a desorption operation, the first adsorption device 104 is in fluid communication with the heating device 105. The first adsorption device 104 in a saturated state or a nearly saturated state receives heated air from the heating device 105, which transfers heat to pollutants in the exhaust gas adsorbed by the first adsorption device 104 at the time of adsorption operation, so that individual molecules in the pollutants are raised in temperature so as not to be adsorbed on or in the surface of the adsorption material 509 (e.g., a hole) of the first adsorption device 104 any more, and is discharged out of the first adsorption device 104 as the heated air flows. The first adsorption device 104 may be operated to desorb when saturated or may be operated to desorb before saturated, for example, when nearly saturated.

As shown in fig. 5A-D, the first adsorption device 104 includes a housing having a substantially box shape with a cavity therein, which includes a top 500, a bottom 501, a left 502, a right 503, a front 504, and a rear 505. The front portion 504 of the housing includes a gas inlet 1041 and a clean gas outlet 1042, the gas inlet 1041 being proximate to the left portion 502 of the housing and the clean gas outlet 1042 being proximate to the right portion 503 of the housing. The right portion 503 of the housing includes an air inlet 1043 and the left portion 502 of the housing includes an exhaust outlet 1044.

A conduit 506 is connected to the gas inlet 1041, the conduit 506 being adapted to be connected to the gas outlet 1032 of the filter device 103 for receiving primary purge gas from the filter device 103. A valve is provided in the conduit 506 for controlling the fluid communication or disconnection of the gas inlet 1041 of the first adsorption device 104 from the gas outlet 1032 of the filtration device 103. The clean gas outlet 1042 is connected to a conduit 507 for connection to the second gas inlet 1013 of the heating zone 101 and/or the second gas inlet 1022 of the cooling zone 102 of the furnace for feeding the second cleaned gas cleaned by the first adsorption means 104 to the heating zone 101 and/or the cooling zone 102. A valve is provided in the conduit 507 for controlling the flow of the purge gas out 1042 of the first adsorption device 104 to and from the second gas inlet 1013 of the heating zone 101, thereby controlling whether the first adsorption device 104 inputs the secondary purge gas to the heating zone. The valve may also be used to control the flow of clean gas out 1042 of first adsorption device 104 into and out of fluid communication with second gas inlet 1022 of cooling zone 102.

The air inlet 1043 is adapted to be connected to an air outlet 1052 of the heating device 105, for example, by a conduit, to the air outlet 1052 of the heating device 105 to receive heated air from the heating device 105. A valve is provided in the conduit for controlling the fluid communication or disconnection of the air inlet 1043 of the first adsorption device 104 with the air outlet 1052 of the heating device 105. The exhaust outlet 1044 is used for discharging exhaust gas generated after the adsorption operation of the first adsorption device 104. The exhaust outlet 1044 may be connected to a conduit in which a valve is disposed for controlling whether the exhaust is discharged from the first adsorption device 104.

At least one of the top 500, bottom 501, left 502, right 503, front 504 and rear 505 portions of the housing includes an insulating layer 508 for thermal insulation. Because the desorption temperature at the time of the desorption operation of the first adsorption device 104 is high, for example, about 250 c, the temperature inside the housing is high. The insulation 508 is provided such that the temperature of the outer surface of the housing is below a predetermined temperature.

The first adsorption device 104 further comprises an adsorption material 509, the adsorption material 509 being disposed within the housing. The adsorption material 509 is used to adsorb primary purge gas from the filter device 103 to the surface and/or inside of the adsorption material 509 (e.g., holes) for adsorption operation. When the desorption operation is performed, the heated air enters the adsorption material 509 and transfers heat to the contaminants adsorbed in the adsorption material 509, so that the temperature of the respective molecules in the contaminants increases so as not to be adsorbed on the surface or inside of the adsorption material 509 (e.g., holes), and the molecules are discharged out of the adsorption material 509 along with the flow of the heated air.

The adsorbent material 509 comprises a honeycomb zeolite molecular sieve. The molecular sieve crystal has many holes with certain size and many holes with same diameter connected between them. The molecular sieve can adsorb molecules smaller than the pore diameter into the cavity, and repel molecules larger than the pore diameter out of the cavity, so that the molecular sieve can be used for removing pollutants in exhaust gas. When a portion of the molecules of a substance adsorb to the interior of the cavities of the molecular sieve, a portion of the other molecules will adsorb to the surface and/or interior of the cavities of the molecular sieve due to intermolecular forces. The adsorbent material 509 also includes other suitable materials for adsorption.

Four honeycomb zeolite molecular sieves aligned are shown in fig. 5B and 5D. The honeycomb zeolite molecular sieve is generally cubic with cellular 3.2mm hexagonal pores. The honeycomb zeolite molecular sieve can be used for removing VOC gas in exhaust gas. In other embodiments, the honeycomb zeolite molecular sieve comprises other suitable numbers, shapes, and/or arrangements. The cellular zeolite molecular sieve is separated by a window-shaped separation plate 510 and is prevented from moving in the transverse direction, and the bottom 501 of the housing is further provided with a blocking member 511 for blocking the movement of the cellular zeolite molecular sieve in the longitudinal direction. The partition plate 510 shields the edges of the honeycomb zeolite molecular sieve and exposes other portions of the honeycomb zeolite molecular sieve. The arrangement of the partition plate 510 does not substantially affect the adsorption and desorption operations of the cellular zeolite molecular sieve. In other embodiments, the first adsorption device 104 includes other structures for immobilizing the honeycomb zeolite molecular sieve.

When the first adsorption device 104 is in adsorption operation, the valve controls the first adsorption device 104 to be in fluid communication with the filtration device 103, in which case the gas inlet 1041 of the first adsorption device 104 is in fluid communication with the gas outlet 1032 of the filtration device 103 via the conduit 506. The primary purified gas purified by the filtering device 103 is discharged from the gas outlet 1032 of the filtering device 103, and sequentially enters the first adsorption device 104 through the pipe 506 and the gas inlet 1041. In the first adsorption device 104, the primary purge gas flows through four zeolite molecular sieves in order from left to right (as viewed from the front of the first adsorption device 104), and the zeolite molecular sieves adsorb contaminants in the primary purge gas to the surfaces and/or the inside of the cavities thereof, thereby purging contaminants in the primary purge gas and outputting a secondary purge gas. In outputting the secondary purge gas, the valve controls the purge outlet 1042 of the first adsorption device 104 to be in fluid communication with the second gas inlet 1013 of the heating zone 101 such that the first adsorption device 104 inputs the secondary purge gas to the heating zone through the purge outlet 1042. The valve may also control the clean gas outlet 1042 of the first adsorption device 104 to be in fluid communication with the second gas inlet 1022 of the cooling zone 102 such that the first adsorption device 104 inputs secondary clean gas into the cooling zone through the clean gas outlet 1042.

Depending on the composition of the contaminant (e.g., flux) to be cleaned, a suitable adsorbent material may be selected to adsorb the contaminant in the exhaust gas. For example, for an exhaust gas containing N-methylpiperidine having a condensation temperature below about 0deg.C, zeolite molecular sieves may be used to adsorb the N-methylpiperidine to the adsorption unit and thereby remove the component from the exhaust gas.

When the first adsorption device 104 is undergoing a desorption operation, a valve (not shown) controls the first adsorption device 104 to be in fluid communication with the heating device 105, while the air inlet 1043 of the first adsorption device 104 is in fluid communication with the air outlet 1052 of the heating device 105. The heated air exits the air outlet 1052 of the heating device 105 and enters the first adsorption device 104 via conduit and air inlet 1043 in sequence. In the first adsorption device 104, heated air flows through the four zeolite molecular sieves in sequence from right to left (as viewed from the front of the first adsorption device 104), which when passing through the zeolite molecular sieves transfers heat to contaminants adsorbed by the zeolite molecular sieves in the adsorption operation, so that the individual molecules in the contaminants are raised in temperature so as not to be adsorbed on the surfaces or inside the cavities of the zeolite molecular sieves. And, as the heated air is discharged through the exhaust outlet 1044, the molecules are also discharged out of the zeolite molecular sieve, i.e., contaminants adsorbed in the zeolite molecular sieve are discharged out of the zeolite molecular sieve.

As previously described, the filtering device 103 cools the exhaust gases from the furnace to 40-50 ℃ to condense organic matter such as rosin, alcohols, acids or esters or ethers in the exhaust gases into liquids and/or solids. For other flux contaminants having condensation temperatures below 40 c (e.g., N-methylpiperidine having condensation temperatures below 0 c), the filter device 103 cannot condense it as a liquid and/or a solid. The first adsorption device 104 uses a zeolite molecular sieve as the adsorbing material 509 to adsorb other flux contaminants (e.g., N-methylpiperidine having a condensation temperature below 0 ℃) which are not removed by the filtering device 103 to the surface and/or inside of the adsorbing material 509 (e.g., holes) thereof, thereby removing the contaminants in the exhaust gas which are not removed by the filtering device 103.

The improvement of the filter device 103 by reducing its cooling temperature, for example to below 0 c, is too costly, since air can no longer be used as cooling medium at this time, and it is necessary to provide equipment for generating the cooling medium, which is energy-intensive to operate. While the first adsorption means 104 of the present application uses an adsorbent material 509, such as a honeycomb zeolite molecular sieve, to remove contaminants from the exhaust gas that are not removed by the filtration means 103. The first adsorption device 104 using the adsorption material 509 has a lower cost than the above-described improvement cost of the filtration device 103 in lowering the cooling temperature to increase the exhaust gas removal effect. And, an air heater is used to generate heated air for the desorption operation of the first adsorption device 104 so that the adsorption operation can be reused. The air heater consumes less energy in operation than the equipment producing the cooling medium, thus resulting in a cost reduction.

While the present disclosure has been described in conjunction with the examples of embodiments outlined above, various alternatives, modifications, variations, improvements, and/or substantial equivalents, whether known or that are or may be presently or later be envisioned, may be apparent to those of ordinary skill in the art. Accordingly, the examples of embodiments of the disclosure as set forth above are intended to be illustrative, not limiting. Various changes may be made without departing from the spirit or scope of the disclosure. Accordingly, the present disclosure is intended to embrace all known or earlier developed alternatives, modifications, variations, improvements and/or substantial equivalents. The technical effects and problems of the present specification are illustrative and not restrictive. It should be noted that the embodiments described in the present specification may have other technical effects and may solve other technical problems.

Claims

1. An exhaust gas purification system (100, 200) for a reflow oven, characterized in that the exhaust gas purification system (100, 200) comprises:

a filtering device (103), the filtering device (103) receiving exhaust gas from a furnace chamber (110) of the reflow oven, the filtering device (103) for cooling and filtering the exhaust gas to purify the exhaust gas and output primary purified gas, and

-a first adsorption device (104), the first adsorption device (104) being in fluid communication with the filtration device (103), the first adsorption device (104) being adapted to perform an adsorption operation on the primary purge gas from the filtration device (103) to purge the primary purge gas and to output a secondary purge gas, and to deliver the secondary purge gas to the furnace (110).

2. The exhaust gas purification system (100, 200) according to claim 1, wherein the exhaust gas purification system (100, 200) further comprises:

-heating means (105), said first adsorption means (104) being controllably in alternating fluid communication with said filtering means (103) and said heating means (105), wherein:

(i) When the first adsorption device (104) is in fluid communication with the filtration device (103), the first adsorption device (104) performs an adsorption operation,

(ii) The first adsorption device (104) is subjected to a desorption operation when the first adsorption device (104) is in fluid communication with the heating device (105).

3. The exhaust gas purification system (100, 200) as claimed in claim 2, wherein,

the heating device (105) is used for heating air entering the heating device (105) and outputting heated air to the first adsorption device (104), and the heated air is used for carrying out desorption operation on the first adsorption device (104) in a saturated state or an approximate saturated state, so that the first adsorption device (104) in the saturated state or the approximate saturated state is restored to an operating state.

4. The exhaust gas purification system (100, 200) according to claim 1, wherein the filtering device (103) includes:

a cooling unit (111), the cooling unit (111) being adapted to receive the exhaust gases from the furnace (110), cool the exhaust gases such that part of the pollutants in the exhaust gases are condensed, and output cooled and purified exhaust gases,

-a filtering unit (112), the filtering unit (112) being adapted to receive the cooled purified exhaust gas from the cooling unit (111), to filter liquid and/or solids mixed in the cooled purified exhaust gas and to output the primary purified gas.

5. The exhaust gas purification system (100, 200) according to claim 1, wherein a cooling temperature range at which the filtering means (103) cools the exhaust gas includes 40 ℃ to 50 ℃.

6. The exhaust gas purification system (100, 200) according to claim 1, characterized in that:

the furnace (110) comprises a heating zone (101) and a cooling zone (102),

wherein the filtering device (103) receives the exhaust gas from the heating zone (101) of the furnace (110), the first adsorption device (104) being for delivering the secondary purge gas to the heating zone (101) and/or the cooling zone (102) of the furnace (110).

7. The exhaust gas purification system (100, 200) according to claim 2, wherein the exhaust gas purification system (100, 200) further comprises:

a valve assembly for controlling the first adsorption means (104) to be in alternating fluid communication with the filtration means (103) and the heating means (105), wherein the valve assembly comprises:

a first valve (1061), said first valve (1061) for controlling said filtration device (103) and said first adsorption device (104) to be in fluid communication or disconnected; and

a second valve (1062), said second valve (1062) being configured to control the fluid connection and disconnection of said heating device (105) and said first adsorption device (104).

8. The exhaust gas purification system (100, 200) according to claim 1, characterized in that:

the first adsorption device (104) comprises a first adsorption material for adsorbing contaminants in the primary purified gas from the filtration device (103) to the surface and/or inside of the first adsorption material for adsorption operation.

9. An exhaust gas purification system (100, 200) as claimed in claim 3, characterized in that:

the heated air entering the first adsorption device (104) from the heating device (105) heats contaminants adsorbed in the first adsorption device (104) to expel the exhaust gas out of the first adsorption device (104), thereby causing the first adsorption device (104) to perform a desorption operation.

10. The exhaust gas purification system (100, 200) according to any one of claims 2-9, wherein the exhaust gas purification system (200) further comprises:

-a second adsorption device (201), the second adsorption device (201) being controllably in alternating fluid communication with the filtering device (103) and the heating device (105), the second adsorption device (201) being adapted to perform an adsorption operation on the primary purge gas from the filtering device (103) to purge the primary purge gas and output a secondary purge gas, and to deliver the secondary purge gas to the furnace (110), wherein:

(i) When the first adsorption device (104) is in fluid communication with the heating device (105), the second adsorption device (201) is in fluid communication with the filtering device (103), at which time the first adsorption device (104) performs a desorption operation and the second adsorption device (201) performs an adsorption operation;

(ii) When the first adsorption device (104) is in fluid communication with the filtration device (103), the second adsorption device (201) is in fluid communication with the heating device (105), at which time the first adsorption device (104) performs an adsorption operation and the second adsorption device (201) performs a desorption operation.

11. The exhaust gas purification system (100, 200) according to claim 10, characterized in that:

(i) When the first adsorption means (104) is in fluid communication with the heating means (105), the first adsorption means (104) is in a saturated or near saturated state;

(ii) When the second adsorption means (201) is in fluid communication with the heating means (105), the second adsorption means (201) is in a saturated or near saturated state.

12. The exhaust gas purification system (100, 200) according to claim 10, characterized in that:

the heating device (105) is used for heating the air received by the heating device (105) and outputting the heated air to the second adsorption device (201), and the heated air is used for carrying out desorption operation on the second adsorption device (201) in a saturated state or an approximate saturated state, so that the second adsorption device (201) in the saturated state or the approximate saturated state is restored to the working state.

13. The exhaust gas purification system (100, 200) according to claim 10, characterized in that:

the furnace (110) comprises a heating zone (101) and a cooling zone (102),

wherein the filtering device (103) receives the exhaust gas from the heating zone (101) of the furnace (110), the second adsorption device (201) being for delivering the secondary purge gas to the heating zone (101) and/or the cooling zone (102) of the furnace (110).

14. The exhaust gas purification system (100, 200) as claimed in claim 10, wherein,

the filtration device (103) is configured to controllably be in fluid communication with one of the first adsorption device (104) and the second adsorption device (201), and the heating device (105) is configured to controllably be in fluid communication with the other of the first adsorption device (104) and the second adsorption device (201).

15. The exhaust gas purification system (100, 200) according to claim 14, wherein the exhaust gas purification system (100, 200) further comprises:

a first valve assembly (1061, 2073), said first valve assembly (1061, 2073) for controlling said filter device (103) in fluid communication with one of said first adsorption device (104) and said second adsorption device (201); and

a second valve assembly (1062, 2074), said second valve assembly (1062, 2074) for controlling said heating device (105) in fluid communication with one of said first adsorption device (104) and said second adsorption device (201).

16. The exhaust gas purification system (100, 200) as set forth in claim 15, wherein,

the first valve assembly (1061, 2073) comprises a first valve (1061) and a third valve (2073), the first valve (1061) for controlling the fluid communication or disconnection of the filter device (103) and the first adsorption device (104), the third valve (2073) for controlling the fluid communication or disconnection of the filter device (103) and the second adsorption device (201),

The second valve assembly (1062, 2074) includes a second valve (1062) and a fourth valve (2074), the second valve (1062) for controlling fluid communication or disconnection of the heating device (105) and the first adsorption device (104), and the fourth valve (2074) for controlling fluid communication or disconnection of the heating device (105) and the second adsorption device (201).

17. The exhaust gas purification system (100, 200) according to claim 10, characterized in that:

the second adsorption device (201) comprises a second adsorption material for adsorbing contaminants in the primary purified gas from the filtration device (103) to the surface and/or inside of the second adsorption material for adsorption operation.

18. The exhaust gas purification system (100, 200) according to claim 12, characterized in that:

the heated air entering the second adsorption device (201) from the heating device (105) heats contaminants adsorbed in the second adsorption device (201) to expel the exhaust gas out of the second adsorption device (201), thereby causing the second adsorption device (201) to perform a desorption operation.