CN116673079A - Three-dimensional focusing high-flux micro-fluidic chip and application and manufacturing method thereof - Google Patents
Three-dimensional focusing high-flux micro-fluidic chip and application and manufacturing method thereof Download PDFInfo
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- 239000007788 liquid Substances 0.000 claims abstract description 69
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 239000002699 waste material Substances 0.000 claims abstract description 29
- 239000012530 fluid Substances 0.000 claims description 38
- 238000003860 storage Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
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- 238000001259 photo etching Methods 0.000 claims description 2
- 230000004907 flux Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/30—Against vector-borne diseases, e.g. mosquito-borne, fly-borne, tick-borne or waterborne diseases whose impact is exacerbated by climate change
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Abstract
The invention discloses a three-dimensional focusing high-flux microfluidic chip and an application and a manufacturing method thereof, wherein a microfluidic structure is arranged in a chip main body, the microfluidic structure comprises a sample channel, a sheath liquid channel, a detection channel and a waste liquid channel, and the sample channel is arranged between the two sheath liquid channels; the sample channel comprises a sample inlet channel and a sample converging channel which are communicated; the sheath liquid channel comprises a sheath liquid inlet channel and a sheath liquid converging channel which are communicated; the sample inlet channel and the sheath liquid inlet channel are both arranged on one side of the chip main body, and the waste liquid channel is arranged on the other side of the chip main body. The invention abandons the traditional inlet design vertical to the plane of the chip, adopts the side surface to set the sample inlet and the sample outlet, avoids the interference of the chip interface and the microscope lens, reduces the size of the chip, greatly reduces the flow resistance of the channel and realizes the high-speed flow of cells.
Description
Technical Field
The invention relates to the technical field of microfluidic chips, in particular to a three-dimensional focusing high-flux microfluidic chip and application and a manufacturing method thereof.
Background
The time domain stretching single cell imaging technology is a novel cell imaging detection method, broadband pulse laser is used as a light source, the broadband pulse laser is subjected to stretching coding in the time domain and dispersion in space and irradiates cells, and clear cell images are recovered by decoding the collected signals. The detection method has extremely high image acquisition speed (the number of transmission frames per second is as high as tens of millions to billions), and is very suitable for detecting cell samples with huge orders of magnitude.
However, in the practical application process, the performance of the time domain stretching single-cell imaging technology is limited by the micro-fluidic chip. As a carrier for most cell detection, cells are detected or captured during flow, and the flow rate of cells is difficult to match the imaging detection speed of time-domain stretched single-cell imaging technology. At present, the fastest microfluidic chip for cell imaging detection can enable the cell to reach the movement speed of 25m/s, but still is lower than the upper limit of 60m/s allowed by the current time domain stretching single cell imaging system, and the microfluidic chip is a full glass chip, and has the advantages of good optical performance, high material strength and the like, but the processing equipment is expensive, the process is complex, and the single-chip cost of the microfluidic chip is extremely high.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a three-dimensional focusing high-flux micro-fluidic chip which comprises a chip cover plate, a chip main body and a chip bottom plate,
the chip comprises a chip main body, wherein a microfluidic structure is arranged in the chip main body, the microfluidic structure comprises a sample channel, a sheath liquid channel, a detection channel and a waste liquid channel, and the sample channel is arranged between the two sheath liquid channels;
the sample channel comprises a sample inlet channel and a sample converging channel which are communicated;
the sheath liquid channel comprises a sheath liquid inlet channel and a sheath liquid converging channel which are communicated;
the sample converging channel and the sheath fluid converging channel converge in a converging section and are communicated with the detection channel in the converging section;
the detection channel is communicated with the waste liquid channel;
the sample inlet channel and the sheath liquid inlet channel are both arranged on one side of the chip main body, and the waste liquid channel is arranged on the other side of the chip main body.
Further, the initial height of the sheath fluid junction channel is greater than twice the initial height of the sample junction channel;
and the initial height of the sheath fluid confluence channel is larger than the diameter of the detection cell.
Further, the sheath fluid converging channel and the sample converging channel are both of a structure with a wide front and a narrow rear.
Further, a sample liquid storage pool is arranged at the communication part of the sample inlet channel and the sample converging channel;
a sheath liquid storage tank is arranged at the communication position of the sheath liquid inlet channel and the sheath liquid converging channel;
and a waste liquid storage tank is arranged at the communication part of the detection channel and the waste liquid channel.
Further, the transverse and longitudinal sections of the detection channels are rectangular.
Further, if there is a gap in the chip main body, the chip cover plate, and the chip base plate, the gap is filled with resin.
Further, the sample inlet channel, the sheath fluid inlet channel and the waste liquid channel are made of capillary steel needles.
The invention also provides the application of the three-dimensional focusing high-flux micro-fluidic chip in single-cell imaging detection, which comprises,
injecting a sample into the chip body by using a syringe pump, wherein the sample flows through the sample inlet channel, the sample liquid storage tank and the sample converging channel, and simultaneously injecting a sheath liquid into the chip body by using the syringe pump, wherein the sheath liquid flows through the sheath liquid inlet channel, the sheath liquid storage tank and the sheath liquid converging channel;
subsequently, the sample and the sheath fluid are joined at a junction section, and cells in the sample are detected in a detection channel.
The invention also provides a manufacturing method of the three-dimensional focusing high-flux micro-fluidic chip, which comprises the following steps of,
photoetching to form a mould;
preparing a chip body using the mold;
and assembling the chip cover plate, the chip main body and the chip bottom plate to obtain the three-dimensional focusing high-flux micro-fluidic chip.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention abandons the traditional inlet design vertical to the plane of the chip, adopts the side surface to set the sample inlet and the sample outlet, avoids the interference of the chip interface and the microscope lens, reduces the size of the chip and greatly reduces the flow resistance of the channel. The microfluidic chip can bear high flow and pressure, and realize high-speed flow of cells so as to meet the requirements of a time domain stretching optical microscope as much as possible.
2. According to the invention, aiming at focusing of cells, the sample channel and the sheath liquid channel are arranged at different heights, so that the cells are driven to flow to one side of the rectangular channel; the flow velocity of the liquid and the flow velocity of the cells are increased, and the velocity gradient on the section of the channel is increased, so that the effect of inertia lifting force on the cells is more obvious, the cells are quickly stabilized at a fixed vertical height under the effect of high inertia force, and the three-dimensional focusing of the cells is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 shows a schematic structural diagram of a three-dimensionally focused high-throughput microfluidic chip according to an embodiment of the present invention;
FIG. 2 shows a schematic flow diagram of a method for preparing a three-dimensionally focused high-throughput microfluidic chip in accordance with an embodiment of the present invention;
reference numerals illustrate:
1. a chip cover plate; 2. a chip main body; 21. a sample channel; 211. a sample inlet channel; 212. a sample reservoir; 213. a sample junction channel; 22. a sheath fluid channel; 221. a sheath fluid inlet channel; 222. a sheath fluid reservoir; 223. a sheath fluid converging channel; 23. a converging section; 24. a detection channel; 25. a waste liquid storage tank; 26. a waste liquid channel; 3. a chip base plate; 4. a microstructure mold; 5. single polishing silicon wafer; 6. a microstructure; 7. quartz slide; 8. capillary steel tube; 9. and (5) resin glue.
Detailed Description
The endpoints of the ranges and any values disclosed in the present invention are not limited to the precise range or value, and the range or value should be understood to include values close to the range or value. For numerical ranges, one or more new numerical ranges may be obtained in combination with each other between the endpoints of each range, between the endpoint of each range and the individual point value, and between the individual point values, and are to be considered as specifically disclosed in the present invention.
The following description of specific embodiments of the present invention and the accompanying drawings will provide a clear and complete description of the technical solutions of embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, in one embodiment of the present invention, a three-dimensionally focused high-throughput microfluidic chip is provided, which is applicable to single-cell imaging detection, and includes a chip cover plate 1, a chip body 2, and a chip base plate 3, wherein the chip cover plate 1 and the chip base plate 3 are made of quartz, the chip body 2 is PDMS with a microfluidic structure, the chip body 2 is fixed in the middle by the chip cover plate 1 and the chip base plate 3, and gaps of the chip body 2, the chip cover plate 1, and the chip base plate 3 are filled with resin, and the resin also bonds them.
The microfluidic structure of the chip body 2 comprises a sample channel 21, a sheath liquid channel 22, a converging section 23, a detection channel 24 and a waste liquid channel 26, wherein the sample channel 21 is arranged between the two sheath liquid channels 22; the sample channel 21 comprises a sample inlet channel 211, a sample liquid storage pool 212 and a sample converging channel 213 which are communicated in sequence; the sheath fluid channel 22 comprises a sheath fluid inlet channel 221, a sheath fluid reservoir 222 and a sheath fluid converging channel 223 which are communicated in sequence; the sample junction channel 213 joins the sheath liquid junction channel 223 in the junction section 23, and communicates with the detection channel 24 in the junction section 23; the detection channel 24 is sequentially communicated with the waste liquid storage tank 25 and the waste liquid channel 26, and the transverse and longitudinal sections of the detection channel 24 are rectangular; the sample inlet channel 211 and the sheath fluid inlet channel 221 are both disposed on one side of the chip body 2, and the waste liquid channel 26 is disposed on the other side of the chip body 2.
The initial height of the sheath fluid junction channel 223 is greater than twice the initial height of the sample junction channel 213; and the initial height of the sheath fluid junction channel 223 is greater than the diameter of the test cell. It should be noted that the initial height referred to in the present invention refers to a height away from one end of the merging section 23. The sheath fluid junction channel 223 and the sample junction channel 213 are each of a structure having a wide front and a narrow rear.
One embodiment of the invention specifically provides a three-dimensional focusing high-flux micro-fluidic chip applied to single-cell imaging detection with the diameter of 5-25 mu m, wherein the length of a chip main body 2 is 10mm, the width is 10mm, and the height is 1mm; the materials of the sample inlet channel 211 and the sheath fluid inlet channel 221 are capillary steel needles of 21G; the sample reservoir 212 and the sheath reservoir 222 are the same shape and are cylinders with a diameter of 1.5mm and a height of 1mm; the initial height of the sample merging channel 213 is 30 μm, the initial height of the sheath liquid merging channel 223 is 70 μm, and the height of the merging section 23 is 70 μm; the width of the detection channel 24 is 100 μm and the height is 70 μm; the waste liquid storage tank 25 is a cylinder with the height of 2mm and the height of 1mm; the material of the waste channel 26 is a 19G capillary steel needle.
One embodiment of the invention provides the application of a three-dimensional focused high-flux microfluidic chip in single-cell (diameter 5-25 μm) imaging detection,
setting the flow rate of the syringe pump to 3.36mL/min, injecting a sample into the chip body 2, flowing the sample through the sample inlet channel 211, the sample reservoir 212 and the sample merging channel 213, and setting the flow rate of the syringe pump to 6.72mL/min, injecting a sheath fluid into the chip body 2 by using the syringe pump, and flowing the sheath fluid through the sheath fluid inlet channel 221, the sheath fluid reservoir 222 and the sheath fluid merging channel 223;
subsequently, the sample and the sheath fluid are joined at a joining section 23, at which time the flow rate in the detection channel 24 is 16.8mL/min and the average flow rate is 40m/s, and the cells in the sample are detected in the detection channel 24.
The working principle of the three-dimensionally focused high-flux microfluidic chip is as follows:
firstly, a cell sample is driven by a pump to flow through a pipeline from a sample inlet channel 211, a sample liquid storage pool 212 and a sample converging channel 213 of a microfluidic chip; simultaneously, sheath fluid is driven by a pump to flow from a sheath fluid inlet channel 221, a sheath fluid reservoir 222 and a sheath fluid converging channel 223 of the microfluidic chip through pipelines; the cell sample flows from the sample merging channel 213 into the merging section 23 to merge with the sheath fluid, and after merging, enters the long and narrow detection channel 24 and the waste fluid reservoir 25, the cell accelerates during the process of entering the detection channel 24 from the lower half part of the merging section 23, and is stabilized at a point on the cross section in the detection channel 24 of optical imaging, and flows to the waste fluid reservoir 25 after detection, and flows out from the waste fluid channel 26.
In summary, the three-dimensional focusing high-flux microfluidic chip of the invention abandons the traditional inlet design perpendicular to the chip plane, adopts the side surface to set the sample inlet and sample outlet interfaces instead, and avoids the interference of the chip interfaces and the microscope lens, thereby reducing the size of the chip and greatly reducing the flow resistance of the channel. The microfluidic chip can bear high flow and pressure, and realize high-speed flow of cells so as to meet the requirements of a time domain stretching optical microscope as much as possible. In addition, focusing on the cells, the sample channel and the sheath liquid channel are arranged at different heights, so that the cells are driven to flow to one side of the rectangular channel; the flow velocity of the liquid and the flow velocity of the cells are increased, and the velocity gradient on the section of the channel is increased, so that the effect of inertia lifting force on the cells is more obvious, the cells are quickly stabilized at a fixed vertical height under the effect of high inertia force, and the three-dimensional focusing of the cells is realized.
The invention also provides a manufacturing method of the three-dimensional focusing high-flux micro-fluidic chip, which comprises the following steps:
step 1: as shown in fig. 2 (a), a microstructured mold 4 is fabricated on a single polished silicon wafer 5 using SU-8 negative photoresist by conventional photolithographic means.
Step 2: attaching the SU8 male die obtained in the step 1 into a flat-bottom box capable of containing the single-polished silicon wafer 5 to be used as a casting die;
step 3: and (2) vacuumizing the mixture of PDMS and the curing agent, pouring the mixture into the casting mold obtained in the step (2), and baking the mixture at 80 ℃ for 2 hours for curing, wherein the microstructure 6 is obtained after the PDMS is cured, as shown in fig. 2 (b).
Step 3: peeling the microstructure 6 from the single polished silicon wafer 5;
step 4: a hole punch was used to punch holes at the inlets and outlets of the micro channels on the microstructure 6 as the sample reservoir 212, the sheath reservoir 222 and the waste reservoir 25, as shown in fig. 2 (c).
Step 5: the sample reservoir 212, sheath reservoir 222 and waste reservoir 25 are perforated from the side of the microstructure 6 using a puncher, and these holes are used as conduit insertion holes as shown in FIG. 2 (d)
Step 6: blowing the perforated microstructure 6 and the quartz slide 7 clean, carrying out surface treatment on the microstructure 6 and the quartz slide 7 for channel sealing by using plasma, and attaching the treated surfaces together;
step 7: the microstructure 6 and the other liquid storage tank are sealed, the quartz slide 7 is used for blowing clean, plasma is used for carrying out surface treatment on the upper surface of the microstructure 6 and the quartz slide 7 again, and the treated surfaces are attached together. At this time, the holes of the sample reservoir 212, the sheath reservoir 222 and the waste liquid reservoir 25 are closed by two quartz slides 7 to form a cavity, as shown in FIG. 2 (e)
Step 8: as shown in FIG. 2 (f), the microstructure 6 has conduit insertion holes formed in step 7, and capillary tubes 8 are inserted into the interfaces, respectively, so that the capillary tubes 8 cannot be inserted into the sample reservoir 212, sheath reservoir 222 and waste reservoir 25, thereby obtaining the chip body 2.
Step 9: the mixed resin glue 9 is poured into the gap between the two quartz slides 7 and the chip main body 2, and the chip main body 2 and the capillary tube 8 are sealed and fixed.
The manufacturing of the three-dimensional focusing high-flux micro-fluidic chip can be completed through the 9 steps.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present invention, and although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present invention.
Claims (9)
1. A three-dimensional focusing high flux micro-fluidic chip comprises a chip cover plate, a chip main body and a chip bottom plate, and is characterized in that,
the chip comprises a chip main body, wherein a microfluidic structure is arranged in the chip main body, the microfluidic structure comprises a sample channel, a sheath liquid channel, a detection channel and a waste liquid channel, and the sample channel is arranged between the two sheath liquid channels;
the sample channel comprises a sample inlet channel and a sample converging channel which are communicated;
the sheath liquid channel comprises a sheath liquid inlet channel and a sheath liquid converging channel which are communicated;
the sample converging channel and the sheath fluid converging channel converge in a converging section and are communicated with the detection channel in the converging section;
the detection channel is communicated with the waste liquid channel;
the sample inlet channel and the sheath liquid inlet channel are both arranged on one side of the chip main body, and the waste liquid channel is arranged on the other side of the chip main body.
2. The high-throughput microfluidic chip of claim 1, wherein the initial height of the sheath fluid junction channel is greater than twice the initial height of the sample junction channel;
and the initial height of the sheath fluid confluence channel is larger than the diameter of the detection cell.
3. The high-throughput microfluidic chip according to claim 1, wherein the sheath fluid junction channel and the sample junction channel are each of a structure with a wide front and a narrow rear.
4. The high-throughput microfluidic chip according to claim 1, wherein a sample reservoir is provided at a place where the sample inlet channel and the sample junction channel communicate;
a sheath liquid storage tank is arranged at the communication position of the sheath liquid inlet channel and the sheath liquid converging channel;
and a waste liquid storage tank is arranged at the communication part of the detection channel and the waste liquid channel.
5. The high-throughput microfluidic chip of claim 1, wherein the detection channel is rectangular in transverse and longitudinal cross-section.
6. The high-throughput microfluidic chip of claim 1, wherein if there is a gap in the chip body, the chip cover plate, and the chip base plate, the gap is filled with resin.
7. The high-throughput microfluidic chip of claim 1, wherein the sample inlet channel, the sheath inlet channel, and the waste channel are made of capillary steel needles.
8. A three-dimensional focusing high-flux micro-fluidic chip for single cell imaging detection, as claimed in claim 5, comprising,
injecting a sample into the chip body by using a syringe pump, wherein the sample flows through the sample inlet channel, the sample liquid storage tank and the sample converging channel, and simultaneously injecting a sheath liquid into the chip body by using the syringe pump, wherein the sheath liquid flows through the sheath liquid inlet channel, the sheath liquid storage tank and the sheath liquid converging channel;
subsequently, the sample and the sheath fluid are joined at a junction section, and cells in the sample are detected in a detection channel.
9. A method for fabricating a three-dimensionally focused high-throughput microfluidic chip according to any one of claims 1 to 7, comprising,
photoetching to form a mould;
preparing a chip body using the mold;
and assembling the chip cover plate, the chip main body and the chip bottom plate to obtain the three-dimensional focusing high-flux micro-fluidic chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310667688.8A CN116673079A (en) | 2023-06-06 | 2023-06-06 | Three-dimensional focusing high-flux micro-fluidic chip and application and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310667688.8A CN116673079A (en) | 2023-06-06 | 2023-06-06 | Three-dimensional focusing high-flux micro-fluidic chip and application and manufacturing method thereof |
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| Publication Number | Publication Date |
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| CN116673079A true CN116673079A (en) | 2023-09-01 |
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| CN202310667688.8A Pending CN116673079A (en) | 2023-06-06 | 2023-06-06 | Three-dimensional focusing high-flux micro-fluidic chip and application and manufacturing method thereof |
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