CN116671253A - Heating device - Google Patents

Abstract

The heating device has a heating plate and a plurality of heaters. The heating plate has a heating surface, and a plurality of concave portions are provided on a back surface of a side opposite to the heating surface. The plurality of heaters are respectively located in the plurality of concave portions.

Description

Heating device

Technical Field

The disclosed embodiments relate to a heating device.

Background

Patent document 1 discloses a heating device in which a plurality of heaters are inserted into a plurality of holes formed in a side surface of a mold, respectively, so that the plurality of heaters are arranged parallel to a heating surface of the mold.

Prior art literature

Patent literature

Patent document 1: JP patent publication 2017-154409

Disclosure of Invention

The heating device according to one embodiment has a heating plate and a plurality of heaters. The heating plate has a heating surface, and a plurality of concave portions are provided on a back surface of a side opposite to the heating surface. The plurality of heaters are respectively located in the plurality of concave portions.

Drawings

Fig. 1 is a side view of a heating device according to embodiment 1.

Fig. 2 is a plan view of the heating device according to embodiment 1.

Fig. 3 is a cross-sectional view at line III-III of fig. 2.

Fig. 4 is a cross-sectional view taken along line IV-IV of fig. 2.

Fig. 5 is a cross-sectional view of a heating device according to modification 1 of embodiment 1.

Fig. 6 is a side view of a heating device according to modification 2 of embodiment 1.

Fig. 7 is a cross-sectional view of a heating device according to modification 2 of embodiment 1.

Fig. 8 is a side view of a heating device according to embodiment 2.

Fig. 9 is a plan view of a heating device according to embodiment 2.

Fig. 10 is a cross-sectional view taken at line X-X of fig. 9.

Fig. 11 is a cross-sectional view of a heating device according to modification 1 of embodiment 2.

Fig. 12 is a cross-sectional view of a heating device according to modification 2 of embodiment 2.

Fig. 13 is a cross-sectional view of a heating device according to modification 3 of embodiment 2.

Fig. 14 is a cross-sectional view of a heating device according to embodiment 3.

Fig. 15 is a cross-sectional view of a heating device according to embodiment 4.

Fig. 16 is a side view of a heating device according to embodiment 5.

Fig. 17 is a cross-sectional view of a heating device according to embodiment 5.

Fig. 18 is a side view of a heating device according to embodiment 6.

Fig. 19 is a cross-sectional view of a heating device according to embodiment 6.

Detailed Description

Embodiments of the heating device disclosed in the present application will be described below with reference to the drawings. In addition, the present disclosure is not limited by the embodiments shown below. Note that the drawings are schematic, and the relationship of the dimensions of the elements, the ratio of the elements, and the like are different from those shown. Further, the drawings may include portions having different dimensional relationships and ratios.

In the embodiments described below, expressions such as "fixed", "orthogonal", "perpendicular" and "parallel" are sometimes used, but these expressions are not necessarily strictly "fixed", "orthogonal", "perpendicular" and "parallel". That is, the above-described expressions allow for deviations in manufacturing accuracy, setting accuracy, and the like, for example.

< embodiment 1 >

Fig. 1 is a side view of a heating device 100 according to embodiment 1. Fig. 2 is a plan view of a heating device 100 according to embodiment 1. In the following description, the surface on the heating object side when the heating device 100 is brought into contact with the heating object is referred to as the "upper surface", and the surface on the opposite side to the heating object is referred to as the "lower surface". However, the heating device 100 may be used in any posture, for example, by being turned upside down.

The heating apparatus 100 shown in fig. 1 has a heating plate 110, a plurality of heaters 120, a fixing plate 130, and a support plate 150.

The heating plate 110 is, for example, a plate-like member made of metal, and has an upper surface 110a capable of contacting the heating target. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated. The upper surface 110a is used for heating a mold, which is an example of a heating target. A plurality of concave portions 113 are formed on a lower surface 110b of the heating plate 110 on the side opposite to the heating surface (see fig. 3).

The plurality of heaters 120 are, for example, ceramic heaters having a ceramic body and a heat generating resistor body located inside the ceramic body. By using the heater 120 as a ceramic heater, thermal adhesion between the metal heating plate 110 and the heater 120 can be suppressed.

The length of the heater 120, that is, the length of the ceramic body is, for example, about 1mm to 200 mm. The external dimensions of the ceramic body are, for example, about 0.5mm to 100 mm. The shape of the heater 120, that is, the shape of the ceramic body is not limited to a cylindrical shape, and may be, for example, an elliptic cylindrical shape or a square cylindrical shape. The material of the ceramic body is, for example, a ceramic having insulation properties. As a material of the ceramic body, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. The heat generating resistor generates heat by passing a current. The heat generating resistor may include a high-resistance conductor including tungsten, molybdenum, or the like, for example. The heating resistor may have a width of 0.1mm to 5mm, a thickness of 0.05mm to 0.3mm, and a total length of 1mm to 500mm. The heating resistor may be, for example, a conductive ceramic containing carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor can be reduced. This reduces thermal stress between the ceramic body and the heating resistor. As a result, the durability of the heater 120 can be improved.

The plurality of heaters 120 are inserted into the plurality of recesses 113, respectively. That is, the plurality of heaters 120 are arranged perpendicular to the heating surface, i.e., the upper surface 110a of the heating plate 110 by being inserted into the plurality of recesses 113, respectively.

By disposing the plurality of heaters 120 perpendicular to the heating surface of the heating plate 110 in this manner, the variation in the distance between the plurality of heaters 120 and the heating surface can be suppressed. As a result, the heat uniformity in the heating surface, i.e., the surface of the upper surface 110a of the heating plate 110, can be improved,

The plurality of concave portions 113 into which the plurality of heaters 120 are respectively inserted are formed at different densities on the lower surface 110b of the heating plate 110 on the side opposite to the heating surface. In fig. 2, the heating surface, i.e., the upper surface 110a of the heating plate 110 is shown as a rectangular plate shape, and the formation positions of the plurality of concave portions 113 are shown. That is, the concave portion 113 is formed so as to be sparse in the central portion of the lower surface 110b, and the concave portion 113 is formed so as to be dense in the peripheral portion of the lower surface 110 b. In other words, the plurality of concave portions 113 are formed such that the closer to the center of the lower surface 110b, the lower the density of the concave portions 113, the closer to the peripheral edge, and the higher the density of the concave portions 113.

In this way, by adjusting the density of the plurality of concave portions 113 on the lower surface 110b of the heating plate 110 on the side opposite to the heating surface, the density of the plurality of heaters 120 inserted into the plurality of concave portions 113 can be adjusted. As a result, the heat uniformity in the heating surface, i.e., the surface of the upper surface 110a of the heating plate 110 can be further improved. That is, the peripheral portions of the upper surface 110a and the lower surface 110b of the heating plate 110 are more likely to be deprived of heat by the atmosphere around the heating plate 110 than the central portion. For this reason, the peripheral edge portions of the upper surface 110a and the lower surface 110b of the heating plate 110 may be lower in temperature than the central portion. In this case, since the density of the concave portion 113 can be increased in the peripheral edge portion of the lower surface 110b, the density of the heater 120 can be increased, and therefore the amount of heat generated in the peripheral edge portion of the upper surface 110a can be relatively increased. This compensates for the amount of heat generated by the surrounding atmosphere, and therefore can further improve the heat uniformity.

In a conventional heating device in which a plurality of heaters (for example, cartridge heaters) are inserted into a plurality of holes in a side surface of a mold, when a defect such as a disconnection of 1 cartridge heater occurs during heating, a region having a low temperature may be formed linearly along the cartridge heater. For this reason, in the conventional heating apparatus, there is a possibility that the temperature of the object to be heated becomes uneven. In contrast, the heating device 100 according to the present embodiment can narrow the region of low temperature even when a defect such as a broken line of 1 heater 120 occurs during heating. Further, the heating device 100 according to the present embodiment can control the output of the heater 120 close to the heater 120 causing the failure, thereby making the temperature of the object to be heated uniform. Further, the heating device 100 according to the present embodiment can heat not the entire area but a local area of the heating device 100 by controlling the output of the individual heaters for each arbitrary area. This can further heat only an arbitrary region of the object to be heated, and can heat a plurality of objects to be heated at different temperatures, and as a result, heat treatment can be performed simultaneously on a plurality of products.

The arrangement of the concave portion 113 is not limited to that shown in fig. 2. For example, when a hot spot having a higher temperature than other areas is generated in the heating surface, i.e., the upper surface 110a of the heating plate 110, a plurality of concave portions 113 may be formed such that the density of the concave portions 113 becomes low in the area corresponding to the hot spot of the lower surface 110 b.

The fixing plate 130 is, for example, a plate-like member made of metal. The plurality of heaters 120 are fixed to the fixing plate 130.

The support plate 150 is fixed to the fixing plate 130 by a plurality of columnar members 151 in a state of being separated from the fixing plate 130. By positioning the support plate 150 at a position separated from the fixing plate 130, a space for disposing power supply terminals 122 and 123 described later in the plurality of heaters 120 can be ensured between the support plate 150 and the fixing plate 130. The support plate 150 and the plurality of columnar members 151 may be omitted as needed.

Fig. 3 is a cross-sectional view at line III-III of fig. 2. Fig. 4 is a cross-sectional view taken along line IV-IV of fig. 2. In fig. 3 and 4, the support plate 150 and the plurality of columnar members 151 are not shown.

As shown in fig. 3 and 4, the heating device 100 is configured by fixing a plurality of heaters 120 to a fixing plate 130 and inserting the heaters into a plurality of concave portions 113 of the heating plate 110.

The heating plate 110 has a 1 st plate member 111 and a 2 nd plate member 112.

The 1 st plate member 111 is a plate member having a heating surface, i.e. an upper surface 110a of the heating plate 110. The 1 st plate member 111 is joined to the 2 nd plate member 112 by a joining member 114 such as a bolt. That is, the lower surface 111a of the 1 st plate member 111 on the opposite side from the upper surface 110a is a joint surface with the 2 nd plate member 112.

The 2 nd plate member 112 is a plate-like member having: an upper surface 112a which is a surface to be joined to the joining surface of the 1 st plate member 111; and a lower surface 110b located on the opposite side of the upper surface 112 a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the 1 st plate member 111 is exposed from each of the plurality of through holes 112 b.

Each of the plurality of concave portions 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the 1 st plate member 111 exposed from each of the plurality of through holes 112 b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the 1 st plate member 111 forms the bottom surface of each recess 113. The distal ends 120a of the plurality of heaters 120 are in contact with the lower surface 111a of the 1 st plate member 111 in a state where the plurality of heaters 120 are inserted into the plurality of recesses 113, respectively. By bringing the front ends 120a of the plurality of heaters 120 into contact with the lower surface 111a in this manner, the positions of the front ends 120a and the lower surface 111a can be aligned on the same plane. For this reason, the distance between the plurality of heaters 120 and the heating surface can be made equal to the distance corresponding to the thickness of the 1 st plate member 111, and as a result, the heat uniformity in the heating surface, i.e., the surface of the upper surface 110a of the heating plate 110 can be improved.

In addition, in the case where the tip 120a of the heater 120 is rounded to a hemispherical shape, for example, in the contact between the tip 120a of the heater 120 and the lower surface 111a of the 1 st plate member 111, only the tip of the hemisphere may be further contacted with the lower surface 111a of the 1 st plate member 111. For example, when the heater 120 has a cylindrical shape and the front end 120a has an end face, the end face of the front end 120a of the heater 120 may be in surface contact with the lower surface 111a of the 1 st plate member 111. In this case, the temperature increase rate can be increased. Further, a side portion (edge portion) among the end surfaces may be in contact with the lower surface 111a of the 1 st plate member 111. In this case, the temperature rising speed can be increased and the stress can be reduced. Further, the front end 120a of the heater 120 and the lower surface 111a of the 1 st plate member 111 may be provided so as to be isolated when not in use in an environment of room temperature, and to be brought into contact by thermal expansion of the heater 120 when in use (when heated).

The fixing plate 130 has a plurality of fixing holes 130a at positions corresponding to the plurality of recesses 113. The plurality of heaters 120 are inserted and fixed into the plurality of fixing holes 130a, respectively. Specifically, an internal thread is formed at a portion of the inner wall of each of the fixing holes 130a. On the other hand, a cylindrical mounting member 121 is mounted on the outer peripheral surface of each heater 120, and a male screw 121a is formed on a part of the outer peripheral surface of the mounting member 121. When the heaters 120 are inserted into the fixing holes 130a, the male screws 121a are fitted into the female screws of the fixing holes 130a, thereby fixing the heaters 120 to the fixing plate 130.

The fixing plate 130 is disposed to be spaced apart from the heating plate 110. As shown in fig. 4, the fixing plate 130 is coupled to the heating plate 110 (the 2 nd plate member 112) by a coupling member 131 such as a bolt in a state where a gap is formed between the fixing plate 130 and the heating plate 110. In this way, by isolating the fixing plate 130 from the heating plate 110, the temperature rise of the plurality of heaters 120 with respect to the fixing portion (e.g., the portion where the mounting member 121 is mounted) of the fixing plate 130 can be suppressed. On the other hand, since the heat extracted from the heating plate 110 is reduced by the fixing plate 130, the temperature rise of the heating plate 110 can be promoted.

Further, a spacer member 140 is arranged between the heating plate 110 and the fixing plate 130. The spacer member 140 is formed in a cylindrical shape, and the coupling member 131 is inserted therethrough. By providing a spacer member 140 between the heating plate 110 and the fixing plate 130, the possibility of collision of the fixing plate 130 with the heating plate 110 can be reduced.

The material of the spacer member 140 is preferably, for example, a ceramic having heat resistance. As a material of the spacer member 140, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. Accordingly, thermal expansion and thermal contraction of the spacer member 140 can be reduced, and therefore, consumption of the spacer member 140 can be reduced.

The plurality of heaters 120 have base ends 120b at positions farther from the heating surface, i.e., the upper surface 110a of the heating plate 110, than the lower surface of the fixing plate 130 on the opposite side of the heating plate 110. Power supply terminals 122 and 123 for supplying power to the plurality of heaters 120 are provided at the base end 120b. In other words, the base ends 120b of the plurality of heaters 120 protrude further away from the heating surface, i.e., the upper surface 110a of the heating plate 110 than the lower surface of the fixing plate 130, and the power supply terminals 122 and 123 are provided at the relevant base ends 120b. By providing the power supply terminals 122 and 123 at the base end 120b protruding in the direction away from the heating surface, i.e., the upper surface 110a of the heating plate 110, the power supply terminals 122 and 123 can be separated from the heating surface. As a result, the power supply terminals 122 and 123 can be thermally protected from the heating surface.

< modification of embodiment 1 >

Next, various modifications of embodiment 1 will be described with reference to fig. 5. In the following description, the same reference numerals are given to the structures common to embodiment 1 described above, and detailed description thereof is omitted.

Fig. 5 is a cross-sectional view of a heating device 100 according to modification 1 of embodiment 1. The heating apparatus 100 shown in fig. 5 mainly has a structure of a heating plate, and a manner of inserting a plurality of heaters is different from the heating apparatus 100 shown in fig. 1 to 4. Specifically, as shown in fig. 5, the heating plate 110 has a 1 st plate member 111, a 2 nd plate member 112, and an insulating member 115.

The 1 st plate member 111 is a plate member having a heating surface, i.e. an upper surface 110a of the heating plate 110. The 1 st plate member 111 is joined to the 2 nd plate member 112 by a joining member 114 such as a bolt in a state where the heat insulating member 115 is disposed between the 1 st plate member 111 and the 2 nd plate member 112. That is, the lower surface 111a of the 1 st plate member 111 on the opposite side from the upper surface 110a is a joint surface with the 2 nd plate member 112. A plurality of concave portions 111b are formed in a lower surface 111a of the 1 st plate member 111 on the side opposite to the heating surface.

The 2 nd plate member 112 is a plate-like member having: an upper surface 112a which is a surface to be joined to the joining surface of the 1 st plate member 111; and a lower surface 110b located on the opposite side of the upper surface 112 a. A plurality of through holes 112b are formed in positions of the 2 nd plate member 112 corresponding to the plurality of concave portions 111b.

The heat insulating member 115 is interposed between the 1 st plate member 111 and the 2 nd plate member 112. The heat insulating member 115 is, for example, a sheet-like member including heat insulating fibers, and has a function of restricting heat transfer from the 1 st plate member 111 to the 2 nd plate member 112. A plurality of through holes 115a are formed in the heat insulating member 115 at positions corresponding to the plurality of concave portions 111b.

The material of the heat insulating member 115 is preferably, for example, ceramic having heat insulating properties. As a material of the heat insulating member 115, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used.

Each of the plurality of concave portions 113 is formed by each of the plurality of through holes 112b, each of the plurality of through holes 115a, and the plurality of concave portions 111 b. That is, the inner surface of each through hole 112b, the inner surface of each through hole 115a, and the inner surface of each recess 111b form the inner surface of each recess 113, and the bottom surface of each recess 111b forms the bottom surface of each recess 113. Then, the tips 120a of the plurality of heaters 120 are positioned in the plurality of concave portions 111b in a state where the plurality of heaters 120 are inserted into the plurality of concave portions 113, respectively.

When the tips 120a of the plurality of heaters 120 are positioned in the plurality of concave portions 111b, for example, when the tips 120a of the plurality of heaters 120 have a maximum heat generation point at which the temperature is maximum, the maximum heat generation point can be brought close to the heating surface, that is, the upper surface 110a of the heating plate 110. As a result, according to the heating device 100 according to modification 1, the upper surface 110a of the heating plate 110, which is the heating surface, can be efficiently heated. Further, by positioning the distal ends 120a of the plurality of heaters 120 in the plurality of concave portions 111b, the maximum heat generation point can be separated from the proximal ends 120b of the plurality of heaters 120. As a result, according to the heating device 100 of modification 1, since heat from the maximum heat generation point is less likely to be transmitted to the power supply terminals 122, 123 provided at the base ends 120b of the plurality of heaters 120, deterioration of the power supply terminals 122, 123 can be suppressed.

The tips 120a of the plurality of heaters 120 may or may not be in contact with the bottom surfaces of the recesses 111 b.

Further, the fixing plate 130 is disposed to be isolated from the heating plate 110 by being coupled to the heating plate 110 through a coupling metal 160 having a column shape of a given length. The length of the connecting metal 160 can be longer than the thickness of the spacer member 140 shown in fig. 4, for example.

Fig. 6 is a side view of a heating device 100 according to modification 2 of embodiment 1. Fig. 7 is a cross-sectional view of a heating device 100 according to modification 2 of embodiment 1. The heating device 100 shown in fig. 6 and 7 basically has the same structure as the heating device 100 shown in fig. 1 to 4. The heating device 100 shown in fig. 6 and 7 differs from the heating device 100 shown in fig. 1-4 in the point where the heating plate 110 is not divided into 2 members, the 1 st plate member 111 and the 2 nd plate member 112. Specifically, as shown in fig. 6 and 7, the heating plate 110 has a portion corresponding to the 1 st plate member 111 and the 2 nd plate member 112 integrally formed with a plate member made of metal. As a result, according to the heating device 100 according to modification 2, the manufacturing process of the heating device 100 can be simplified.

As described above, the heating device (e.g., heating device 100) according to embodiment 1 includes a heating plate (e.g., heating plate 110) and a plurality of heaters (e.g., heater 120). The heating plate has a heating surface (e.g., upper surface 110 a), and a rear surface (e.g., lower surface 110 b) opposite to the heating surface has a plurality of concave portions (e.g., concave portions 113). The plurality of heaters are respectively located in the plurality of concave portions. This improves the in-plane heat uniformity of the heating surface.

The heating plate according to embodiment 1 is a metal member. The plurality of heaters are ceramic heaters having a ceramic body and a heat generating resistor body located inside the ceramic body. This suppresses thermal adhesion between the metal heating plate and the heater.

Furthermore, the heating plate according to embodiment 1 has a 1 st plate member (e.g. 1 st plate member 111) and a 2 nd plate member (e.g. 2 nd plate member 112). The 1 st plate member has: a heating surface; and an engagement surface (e.g., lower surface 111 a) located opposite the heating surface. The 2 nd plate member has: a surface to be joined to the joining surface; a back surface located opposite the joined surface; a plurality of through holes (for example, through holes 112 b) penetrating from the back surface to the surface to be bonded. Each of the plurality of recesses includes a joint surface and each of the plurality of through holes. The front ends of the plurality of heaters (e.g., front end 120 a) are respectively in contact with the joint surfaces. This makes it possible to match the distance between the plurality of heaters and the heating surface with the distance corresponding to the thickness of the 1 st plate member, and as a result, the in-plane heat uniformity of the heating surface can be improved.

The heating device according to embodiment 1 further includes a fixing plate (for example, fixing plate 130). The fixing plate 130 fixes a plurality of heaters at positions separated from the heating plate. This suppresses the temperature rise of the plurality of heaters with respect to the fixed portion of the fixed plate, and promotes the temperature rise of the heating plate.

Furthermore, the heating device according to embodiment 1 further includes a spacer member (e.g., the spacer member 140) between the heating plate and the fixing plate. Thereby, the possibility of collision of the fixing plate with the heating plate can be reduced.

The spacer member according to embodiment 1 includes ceramic. Thereby, the consumption of the spacer member can be reduced.

The fixing plate according to embodiment 1 has a plurality of fixing holes (for example, fixing holes 130 a) through which a plurality of heaters are inserted and fixed at positions corresponding to the plurality of concave portions. The plurality of heaters have a base end (e.g., base end 120 b) at a position farther from the heating surface than the back surface of the fixing plate on the opposite side of the heating plate. The base end is provided with power supply terminals (for example, power supply terminals 122 and 123) for supplying power to the plurality of heaters. This can protect the power supply terminal from the heat of the heating surface.

The heating device according to embodiment 1 further includes a support plate (for example, support plate 150). The support plate is fixed to the fixing plate by a plurality of columnar members (e.g., columnar members 151) in a state of being separated from the fixing plate. Thereby, a space for disposing the power supply terminals in the plurality of heaters can be ensured between the support plate and the fixing plate.

In addition, in the plurality of concave portions according to embodiment 1, a part is dense in the surface direction, and the other part on the back surface is sparse. This can further improve the in-plane heat uniformity of the heating surface.

The heating device according to embodiment 1 is a die heating device. This improves the in-plane heat uniformity of the heating surface used for heating the mold.

Further, the heating plate according to embodiment 1 includes a 1 st plate member, a 2 nd plate member, and an insulating member (e.g., the insulating member 115). The 1 st plate member has: a heating surface; a junction surface (e.g., lower surface 111 a) located opposite the heating surface; and a plurality of 1 st concave parts (111 b) positioned on the joint surface. The 2 nd plate member has: a surface to be joined to the joining surface; a back surface located opposite the joined surface; and a plurality of 1 st through holes (for example, through holes 112 b) provided corresponding to the 1 st concave portions and penetrating from the back surface to the surface to be bonded. The heat insulating member is located between the 1 st plate member and the 2 nd plate member, and has a plurality of 2 nd through holes (for example, through holes 115 a) provided corresponding to the plurality of 1 st concave portions. Each of the plurality of concave portions is constituted by each of the plurality of 1 st through holes, each of the plurality of 2 nd through holes, and each of the plurality of 1 st concave portions. The front ends of the plurality of heaters are respectively connected with the plurality of 1 st concave parts. This can efficiently heat the heating surface, and can suppress deterioration of the power supply terminals provided at the base ends of the plurality of heaters.

< embodiment 2 >

Fig. 8 is a side view of a heating device 100A according to embodiment 2. Fig. 9 is a plan view of a heating device 100A according to embodiment 2. Fig. 10 is a cross-sectional view taken at line X-X of fig. 9. In the following description, the same reference numerals are given to the structures common to modification 1 of embodiment 1 described above, and detailed description thereof is omitted.

The heating device 100A shown in fig. 8 to 10 mainly has a structure of a connecting member, a positional relationship between the connecting member and a joint member, and the like, which are different from the heating device 100 according to modification 1 of embodiment 1 shown in fig. 5. The heating plate 110 of the heating device 100A shown in fig. 8 to 10 has a 1 st plate member 111, a 2 nd plate member 112, and an insulating member 115, similarly to the heating plate 110 of the heating device 100 shown in fig. 5.

The 2 nd plate member 112 is a plate-like member having: an upper surface 112a which is a surface to be joined to the joining surface of the 1 st plate member 111; and a lower surface 110b located on the opposite side of the upper surface 112 a. A screw hole 112c penetrating the upper surface 112a and the lower surface 110b is formed in the 2 nd plate member 112. For example, a plurality (here, 4) of screw holes 112c are formed in the 2 nd plate member 112. Female screws are formed on the inner wall surfaces of the screw holes 112c.

The fixing plate 130A fixes the plurality of heaters 120, and is disposed apart from the 2 nd plate member 112. As shown in fig. 9 and 10, the fixing plate 130A is coupled to the 2 nd plate member 112 by a coupling member 131A such as a bolt in a state of a apricot gap between the fixing plate 130A and the heating plate 110. For example, the fixing plate 130A is coupled to the 2 nd plate member 112 by a plurality of (here, 4) coupling members 131A.

The coupling member 131A has a distal end 131Aa forming an external thread capable of fitting with the internal thread of the screw hole 112c of the 2 nd plate member 112. The distal end 131Aa of the coupling member 131A is fitted into the screw hole 112c of the 2 nd plate member 112, and extends in a length that does not penetrate the heat insulating member 115 in the direction of the 1 st plate member 111. In the present embodiment, the distal end 131Aa of the coupling member 131A extends from the lower surface 110b of the 2 nd plate member 112 to a position reaching the upper surface 112a in the screw hole 112c, and contacts the surface of the heat insulating member 115 exposed from the screw hole 112 c.

In this way, the distal end 131Aa of the connecting member 131A does not extend through the heat insulating member 115 in the direction of the 1 st plate member 111, so that the connecting member 131A can be prevented from contacting the 1 st plate member 111. As a result, heat conduction from the 1 st plate member 111 having the heating surface, i.e., the upper surface 110a, to the connecting member 131A can be suppressed.

Further, by bringing the front ends 131Aa of the coupling members 131A into contact with the surface of the heat insulating member 115, the positions of the front ends 131Aa of the plurality of coupling members 131A and the surface of the heat insulating member 115 can be aligned on the same plane. Therefore, the length of the heat transfer path from the 1 st plate member 111 to the distal ends 131Aa of the plurality of connecting members 131A can be made uniform, and as a result, the heat uniformity of the 1 st plate member 111 can be improved.

Further, the coupling member 131A has a spacer member 140A at the outer periphery of a portion located between the fixed plate 130A and the 2 nd plate member 112. The spacer member 140A is formed in a tubular shape surrounding the outer periphery of the portion of the coupling member 131A between the fixed plate 130A and the 2 nd plate member 112, and is in contact with the fixed plate 130A and the 2 nd plate member 112. A gap may or may not be provided between the inner peripheral surface of the spacer member 140A and the outer peripheral surface of the coupling member 131A. The outer periphery of the coupling member 131A is surrounded by the tubular spacer member 140A, so that heat of the coupling member 131A can be prevented from being released to the space around the coupling member 131A.

As a material of the spacer member 140A, for example, a metal such as stainless steel can be used. This can improve the durability of the spacer member 140A, and maintain the interval between the fixing plate 130A and the 2 nd plate member 112 constant.

As shown in fig. 9 and 10, the 2 nd plate member 112 is joined to the 1 st plate member 111 by a joining member 114A such as a bolt in a state where the heat insulating member 115 is disposed between the 1 st plate member 111 and the 2 nd plate member 112. For example, the 2 nd plate member 112 is engaged with the 1 st plate member 111 by a plurality of (4 here) engaging members 114A.

However, the 1 st plate member 111 and the 2 nd plate member 112 having the heating surface, i.e., the upper surface 110a, are thermally connected via the joint member 114A. In order to further suppress heat conduction from the 1 st plate member 111 to the coupling member 131A, it is important that the positional relationship between the coupling member 131A and the joint member 114A is such that the heat transfer path from the joint member 114A to the coupling member 131A is as long as possible.

For this reason, in the heating device 100A according to the present embodiment, as shown in fig. 9, the connecting member 131A is located at a position that does not overlap with the joint member 114A in a plan view. As a result, the heat transfer path from the joint member 114A to the coupling member 131A becomes longer, and as a result, heat conduction from the 1 st plate member 111 to the coupling member 131A via the joint member 114A can be suppressed.

As shown in fig. 9 and 10, the coupling member 131A is located at a position sandwiching one recess 113 among the plurality of recesses 113 with the joint member 114A in plan view and side view. By providing the concave portion 113 between the coupling member 131A and the joint member 114A, a heat transfer path from the joint member 114A to the coupling member 131A becomes a path bypassing the concave portion 113. This can further suppress heat conduction from the 1 st plate member 111 to the connecting member 131A via the joint member 114A. The number of the concave portions 113 sandwiched between the coupling member 131A and the joint member 114A in the plan view and the side view is not limited to one, and may be two or more.

The coupling member 131A is located closer to the center of the 2 nd plate member 112 than the joint member 114A in plan view and side view. Accordingly, since the connecting member 131A supports the portion near the center of the heating plate 110, the deflection of the center of the heating plate 110 due to the self weight can be suppressed. Further, since the joint member 114A is located further from the center of the 2 nd plate member 112 than the joining member 131A, heat conduction from the center of the heating plate 110 (1 st plate member 111) to the joint member 114A can be suppressed.

However, the portion of the 1 st plate member 111 located near the joining member 114A is more likely to be deprived of heat by the joining member 114A than other portions. For this reason, there is a possibility that the temperature of the portion of the 1 st plate member 111 located in the vicinity of the joint member 114A becomes lower than that of the other portions. If the temperature of the portion of the 1 st plate member 111 located near the joint member 114A becomes low, the soaking property of the 1 st plate member 111 may be impaired.

For this reason, in the heating device 100A according to the present embodiment, as shown in fig. 9, the joint member 114A is located further inside than the recess 113 closest to the peripheral edge of the lower surface 110b (see fig. 10) among the plurality of recesses 113 in a plan view. Thus, since the periphery of the joining member 114A is surrounded by the plurality of concave portions 113, the portion of the 1 st plate member 111 located in the vicinity of the joining member 114A is heated by the plurality of heaters 120 inserted into the plurality of concave portions 113, respectively. As a result, the temperature decrease in the portion of the 1 st plate member 111 located in the vicinity of the joint member 114A can be suppressed, and the heat uniformity of the 1 st plate member 111 can be maintained.

As shown in fig. 10, the joint member 114A penetrates the heat insulating member 115, and has a spacer member 170 on the outer periphery of the penetrated portion. The spacer member 170 is formed in a cylindrical shape surrounding the portion of the joint member 114A penetrating the heat insulating member 115, and is in contact with the 1 st plate member 111 and the 2 nd plate member 112. A gap may or may not be provided between the inner peripheral surface of the spacer member 170 and the outer peripheral surface of the joint member 114A. The outer periphery of the joint member 114A is surrounded by the tubular spacer member 170, so that heat transfer from the joint member 114A to the heat insulating member 115 can be suppressed.

The spacer 170 is preferably made of ceramic having relatively high heat insulation property, for example. As a material of the spacer member 170, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. This can further suppress heat transfer from the joint member 114A to the heat insulating member 115.

< modification of embodiment 2 >

Next, various modifications of embodiment 2 will be described with reference to fig. 11 to 13. In the following description, the same reference numerals are given to the structures common to embodiment 2 described above, and detailed description thereof is omitted.

Fig. 11 is a cross-sectional view of a heating device 100A according to modification 1 of embodiment 2. The heating device 100A shown in fig. 11 mainly has a structure of the front end 131Aa of the connecting member 131A, which is different from the heating device 100A shown in fig. 8 to 10.

The front end 131Aa of the coupling member 131A shown in fig. 11 extends from the lower surface 110b of the 2 nd plate member 112 to a position not reaching the upper surface 112a in the screw hole 112 c. The distal end 131Aa of the coupling member 131A forms a gap 112d between the end surface of the distal end 131Aa and the surface of the heat insulating member 115 exposed from the screw hole 112 c.

A gas such as air is present in the gap 112d. The air in the gap 112d has a lower thermal conductivity than the heat insulating member 115. Therefore, by forming the gap 112d between the end surface of the front end 131Aa of the coupling member 131A and the surface of the heat insulating member 115, heat conduction from the heat insulating member 115 to the coupling member 131A can be suppressed. As a result, heat conduction from the 1 st plate member 111 having the heating surface, i.e., the upper surface 110a, to the connecting member 131A via the heat insulating member 115 can be suppressed.

Fig. 12 is a cross-sectional view of a heating device 100A according to modification 2 of embodiment 2. The heating device 100A shown in fig. 12 mainly has a structure of the front end 131Aa of the connecting member 131A and a structure of the heat insulating member 115, which are different from those of the heating device 100A shown in fig. 8 to 10.

The front end 131Aa of the coupling member 131A shown in fig. 12 extends from the lower surface 110b of the 2 nd plate member 112 to a position not reaching the upper surface 112a in the screw hole 112 c. The distal end 131Aa of the coupling member 131A is in contact with a part of the heat insulating member 115 filled in the screw hole 112 c.

In this way, by bringing a part of the heat insulating member 115 filled in the screw hole 112c into contact with the distal end 131Aa of the connecting member 131A, the thickness of the heat insulating member 115 can be locally increased at a position corresponding to the distal end 131Aa of the connecting member 131A. As a result, heat conduction from the 1 st plate member 111 having the heating surface, i.e., the upper surface 110a, to the connecting member 131A via the heat insulating member 115 can be suppressed.

Fig. 13 is a cross-sectional view of a heating device 100A according to modification 3 of embodiment 2. The heating device 100A shown in fig. 13 mainly has a structure of the front end 131Aa of the connecting member 131A, which is different from the heating device 100A shown in fig. 8 to 10.

The distal end 131Aa of the coupling member 131A shown in fig. 13 protrudes from the screw hole 112c toward the heat insulating member 115 and extends in the direction of the 1 st plate member 111, and is buried in the heat insulating member 115.

Thus, by embedding the distal end 131Aa of the coupling member 131A inside the heat insulating member 115, positional displacement of the heat insulating member 115 can be suppressed.

As described above, the heating device (for example, the heating device 100A) according to embodiment 2 further includes a fixing plate (for example, the fixing plate 130A) and a connecting member (for example, the connecting member 131A). The fixing plate fixes the plurality of heaters (e.g., heater 120) at a position separated from the 2 nd plate member (e.g., 2 nd plate member 112). The connecting member connects the fixing plate and the 2 nd plate member. The connecting member engages the distal end with a screw hole (for example, screw hole 112 c) provided in the 2 nd plate member, and extends in the direction of the 1 st plate member by a length that does not penetrate the heat insulating member (for example, heat insulating member 115). This suppresses heat conduction from the 1 st plate member (for example, the 1 st plate member 111) of the heating surface to the connecting member.

The distal end of the connecting member according to embodiment 2 is in contact with the surface of the heat insulating member exposed from the screw hole at a position where the screw hole extends from the rear surface (for example, the lower surface 110 b) to reach the surface to be joined (for example, the upper surface 112 a). Thus, the length of the heat transfer path from the 1 st plate member to the distal ends of the plurality of connection members can be made uniform, and as a result, the heat uniformity of the 1 st plate member can be improved.

The connecting member according to embodiment 2 may be provided in the screw hole so as to extend from the back surface to a position where the connecting member does not reach the joined surface, and may be provided separately from the surface of the heat insulating member exposed from the screw hole. This suppresses heat conduction from the 1 st plate member having the heating surface to the connecting member via the heat insulating member.

The distal end of the connecting member according to embodiment 2 may extend from the rear surface to a position where the distal end does not reach the joined surface in the screw hole, and may contact a part of the heat insulating member filled in the screw hole. This suppresses heat conduction from the 1 st plate member having the heating surface to the connecting member via the heat insulating member.

The distal end of the connecting member according to embodiment 2 may protrude from the screw hole toward the heat insulating member, extend in the direction of the 1 st plate member, and be embedded in the heat insulating member. Thereby, positional deviation of the heat insulating member can be suppressed.

The heating device according to embodiment 2 further includes a joining member (for example, joining member 114A) for joining the 2 nd plate member and the 1 st plate member. The joint member is located at a position not overlapping the coupling member in a plan view. This can further suppress heat conduction from the 1 st plate member to the connecting member via the joint member.

In addition, the heating device according to embodiment 2 has at least one recess among a plurality of recesses between the coupling member and the joining member. This can further suppress heat conduction from the 1 st plate member to the connecting member via the joint member.

The connecting member according to embodiment 2 is located closer to the center of the 2 nd plate member than the joint member. This suppresses deflection of the center of the heating plate due to its own weight, and suppresses heat conduction from the center of the heating plate to the joint member.

Further, the joint member according to embodiment 2 is located further inside than the recess closest to the periphery of the back surface among the plurality of recesses. Thus, the portion of the 1 st plate member located in the vicinity of the joining member is heated by the plurality of heaters inserted into the plurality of concave portions, respectively, and therefore, a decrease in temperature of the portion can be suppressed, and the heat uniformity of the 1 st plate member can be maintained.

The joint member according to embodiment 2 includes a 1 st spacer member (e.g., the spacer member 170). The 1 st spacer member is an annular body surrounded by the heat insulating member and is in contact with the 1 st plate member and the 2 nd plate member. This suppresses heat transfer from the joining member to the heat insulating member.

The 1 st spacing member according to embodiment 2 includes ceramic. This can further suppress heat transfer from the joint member to the heat insulating member.

The coupling member according to embodiment 2 includes a 2 nd spacer member (e.g., the spacer member 140A). The 2 nd spacing member is a cylindrical body, and is connected to the fixing plate and the 2 nd plate member. This suppresses the heat of the connecting member from being released to the space around the connecting member.

The 2 nd spacer member according to embodiment 2 is formed of a metal. This can improve the durability of the spacer member and maintain the interval between the fixing plate and the 2 nd plate member fixed.

< embodiment 3 >

Fig. 14 is a cross-sectional view of a heating device 100B according to embodiment 3. In the following description, the same reference numerals are given to the structures common to embodiment 2 described above, and detailed description thereof is omitted.

The heating device 100B shown in fig. 14 differs from the heating device 100A shown in fig. 8 to 10 in the structure of the 1 st plate member. Specifically, in the heating device 100B shown in fig. 14, the 1 st plate member 111 has a groove portion 111c at the lower surface 111 a. The groove 111c extends from the periphery of the lower surface 111a toward the center, and the opening at the top is closed by the heat insulating member 115.

By providing the groove 111c in the lower surface 111a of the 1 st plate member 111 in this manner, thermal expansion and thermal contraction of the 1 st plate member 111 due to thermal cycling can be absorbed by the groove 111c.

Further, the 1 st plate member 111 is provided with a lateral hole or a longitudinal hole instead of the groove portion 111c.

< embodiment 4 >

Fig. 15 is a cross-sectional view of a heating device 100C according to embodiment 4. In the following description, the same reference numerals are given to the structures common to embodiment 3 described above, and detailed description thereof is omitted.

The heating device 100C shown in fig. 15 is different from the heating device 100B shown in fig. 14 in that it has a temperature measuring element. Specifically, in the heating device 100C shown in fig. 15, the 1 st plate member 111 has a temperature measuring element 180 inserted into the groove portion 111C. As the temperature measuring element 180, for example, a thermocouple can be used.

In this way, by inserting the temperature measuring element 180 into the groove 111c of the 1 st plate member 111, the temperature of the 1 st plate member 111 can be measured.

< embodiment 5 >

Fig. 16 is a side view of a heating device 100D according to embodiment 5. Fig. 17 is a cross-sectional view of a heating device 100D according to embodiment 5. In the following description, the same reference numerals are given to the structures common to modification 2 of embodiment 1 described above, and detailed description thereof is omitted.

The heating device 100D shown in fig. 16 and 17 mainly has a structure of a fixing plate, etc., which is different from the heating device 100 according to modification 2 of embodiment 1 shown in fig. 6 and 7. Specifically, the fixing plate 130B has a 3 rd plate member 132, a 4 th plate member 133, and a heat insulating member 135.

The 3 rd plate member 132 is a plate member made of metal and having an opposing surface 132a opposing the heating plate 110. The 3 rd plate member 132 is joined to the 4 th plate member 133 by a joining member (not shown) such as a bolt in a state where the heat insulating member 135 is disposed between the 3 rd plate member 132 and the 4 th plate member 133.

The 4 th plate member 133 is a metal plate member joined to the back surface of the 3 rd plate member 132 opposite to the facing surface 132 a. A plurality of heaters 120 are fixed to the 4 th plate member 133. That is, the 4 th plate member 133 has a plurality of fixing holes 130a at positions corresponding to the plurality of recesses 113, and the plurality of heaters 120 are inserted and fixed into the plurality of fixing holes 130a, respectively. Specifically, an internal thread is formed at a portion of the inner wall of each of the fixing holes 130 a. On the other hand, a cylindrical mounting member 121 is mounted on the outer peripheral surface of each heater 120, and a male screw 121a is formed on a part of the outer peripheral surface of the mounting member 121. The plurality of heaters 120 are fixed to the 4 th plate member 133 by the male screw 121a being fitted into the female screw of each fixing hole 130a when each heater 120 is inserted into each fixing hole 130 a. Further, through holes through which the heater 120 can be inserted are formed in the 3 rd plate member 132 and the heat insulating member 135, respectively, corresponding to the fixing holes 130 a.

The heat insulating member 135 is interposed between the 3 rd plate member 132 and the 4 th plate member 133. The heat insulating member 135 is, for example, a sheet-like member including fibers having heat insulating properties, and has a function of restricting heat transfer from the 3 rd plate member 132 side to the 4 th plate member 133 side.

The material of the heat insulating member 135 is preferably, for example, ceramic having heat insulating properties. As a material of the heat insulating member 135, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used.

In this way, by providing the heat insulating member 135 to the fixing plate 130B, the temperature rise of the plurality of heaters 120 with respect to the fixing portion (for example, the portion where the mounting member 121 is mounted) of the fixing plate 130B can be suppressed.

< embodiment 6 >

Fig. 18 is a side view of a heating device 100E according to embodiment 6. Fig. 19 is a cross-sectional view of a heating device 100E according to embodiment 6. In the following description, the same reference numerals are given to the structures common to modification 2 of embodiment 1 described above, and detailed description thereof is omitted.

The heating device 100E shown in fig. 18 and 19 is different from the heating device 100 according to modification 2 of embodiment 1 shown in fig. 6 and 7 mainly in that it has a heat insulating plate. Specifically, the heating device 100E shown in fig. 18 and 19 includes a heat insulating plate 190 located between the heating plate 110 and the fixing plate 130.

The heat insulating plate 190 includes a 5 th plate member 191, a 6 th plate member 192, and a heat insulating member 195. A plurality of through holes through which the plurality of heaters 120 fixed to the fixed plate 130 can be inserted are formed in the 5 th plate member 191, the 6 th plate member 192, and the heat insulating member 195, respectively.

The 5 th plate member 191 is a plate member made of metal and having an opposing surface 191a opposing the heating plate 110. The 5 th plate member 191 is joined to the 6 th plate member 192 by a joining member (not shown) such as a bolt in a state where the heat insulating member 195 is disposed between the 5 th plate member 191 and the 6 th plate member 192. Further, the 5 th plate member 191 is arranged in isolation from the heating plate 110 by being coupled to the heating plate 110 via a columnar coupling metal 196 having a given length. The length of the connecting metal 196 is longer than the thickness of the spacer member 140 shown in fig. 6 and 7, for example.

The 6 th plate member 192 is a metal plate member joined to the back surface of the 5 th plate member 191 opposite to the facing surface 191 a. The columnar connecting metal 197 of the 6 th plate member is connected to the fixing plate 130 and is disposed apart from the fixing plate 130. The length of the connecting metal 197 is longer than the thickness of the spacer 140 shown in fig. 6 and 7, for example.

The heat insulating member 195 is interposed between the 5 th plate member 191 and the 6 th plate member 192. The heat insulating member 195 is, for example, a sheet-like member including fibers having heat insulating properties, and has a function of suppressing heat transfer from the 5 th plate member 191 side to the 6 th plate member 192 side.

The material of the heat insulating member 195 is preferably, for example, ceramic having heat insulating properties. As a material of the heat insulating member 195, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used.

In this way, by providing the heat insulating plate 190 between the heating plate 110 and the fixing plate 130, the temperature rise of the fixing plate 130 can be suppressed.

Further effects and modifications can be easily derived by those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments characterized and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

Symbol description-

100. 100A-100E heating device

110. Heating plate

110a upper surface

110b lower surface

111. 1 st plate member

111a lower surface

111b recess

111c groove part

112. 2 nd plate member

112a upper surface

112b through hole

112c threaded hole

112d gap

113. Concave part

114. 114A joint member

115. Heat insulation member

115a through hole

120. Heater

120a front end

120b base end

121. Mounting member

121a external thread

122. 123 power supply terminal

130. 130A, 130B fixing plate

130a fixing hole

131. 131A connecting member

131Aa front end

132. 3 rd plate member

132a opposite surface

133. 4 th plate member

135 heat insulation member

140. 140A spacer member

170 spacer member

180 temperature measuring element

190 heat insulation plate

191 th plate member 5

191a opposite surfaces

192 th plate member

195 insulating members.

Claims (20)

1. A heating device is provided with:

a heating plate having a heating surface, the heating plate having a plurality of concave portions on a back surface opposite to the heating surface; and

and a plurality of heaters respectively positioned in the plurality of concave portions.

2. The heating device according to claim 1, wherein,

the heating plate is a member made of metal,

the plurality of heaters are ceramic heaters having a ceramic body and a heat generating resistor located inside the ceramic body.

3. The heating device according to claim 1 or 2, wherein,

the heating plate has:

a 1 st plate member having the heating surface and a joint surface located opposite to the heating surface; and

A 2 nd plate member having a surface to be joined to the joining surface, the back surface located opposite to the surface to be joined, and a plurality of through holes penetrating from the back surface to the surface to be joined,

the plurality of concave portions are respectively formed by each of the plurality of through holes and the joint surface,

the front ends of the plurality of heaters are respectively contacted with the joint surfaces.

4. The heating device according to claim 1 or 2, wherein,

the heating plate has:

a 1 st plate member having the heating surface, a joint surface located opposite to the heating surface, and a plurality of 1 st concave portions located at the joint surface;

a 2 nd plate member having a surface to be joined to the joining surface, the rear surface located opposite to the surface to be joined, and a plurality of 1 st through holes provided in correspondence with the plurality of 1 st concave portions and penetrating from the rear surface to the surface to be joined; and

a heat insulating member located between the 1 st plate member and the 2 nd plate member and having a plurality of 2 nd through holes provided corresponding to the plurality of 1 st concave portions,

the plurality of concave portions are respectively composed of each of the plurality of 1 st through holes, each of the plurality of 2 nd through holes and each of the plurality of 1 st concave portions,

The front ends of the plurality of heaters are respectively connected with the plurality of 1 st concave parts.

5. The heating device according to any one of claims 1 to 4, wherein,

a fixing plate for fixing the plurality of heaters is further provided at a position separated from the heating plate.

6. The heating device according to claim 5, wherein,

a spacer member is also provided between the heating plate and the stationary plate.

7. The heating device according to claim 6, wherein,

the spacing member comprises a ceramic.

8. The heating device according to any one of claims 5 to 7, wherein,

the fixing plate is provided with a plurality of fixing holes which are respectively inserted and fixed with the plurality of heaters at the positions corresponding to the plurality of concave parts,

the plurality of heaters have base ends at positions farther from the heating surface than the back surface of the fixing plate on the opposite side of the heating plate,

the base end is provided with a power supply terminal for supplying power to the plurality of heaters.

9. The heating device according to claim 4, wherein,

the heating device further has:

a fixing plate that fixes the plurality of heaters at a position separated from the 2 nd plate member; and

a connecting member connecting the fixing plate and the 2 nd plate member,

The connecting member engages the distal end with a screw hole provided in the 2 nd plate member, and extends in the direction of the 1 st plate member so as not to penetrate the heat insulating member.

10. The heating device of claim 9, wherein,

the connection member extends from the rear surface to a position not reaching the joined surface in the screw hole, and is located at a position separated from the surface of the heat insulating member exposed from the screw hole.

11. The heating device according to claim 9 or 10, wherein,

the heating device further has: a joining member joining the 2 nd plate member with the 1 st plate member,

the joint member is located at a position not overlapping the coupling member in a plan view.

12. The heating device of claim 11, wherein,

at least one recess among the plurality of recesses is provided between the coupling member and the engaging member.

13. The heating device according to claim 11 or 12, wherein,

the coupling member is located closer to the center of the 2 nd plate member than the engaging member.

14. The heating device according to any one of claims 11 to 13, wherein,

The engagement member is located further inside than a recess closest to a periphery of the back surface among the plurality of recesses.

15. The heating device according to any one of claims 11 to 14, wherein,

the engagement member has a 1 st spacing member,

the 1 st spacing member is an annular body, surrounded by the heat insulating member, and is in contact with the 1 st plate member and the 2 nd plate member.

16. The heating device according to any one of claims 10 to 15, wherein,

the linking member has a 2 nd spacing member,

the 2 nd spacing member is a cylindrical body, and is connected to the fixing plate and the 2 nd plate member.

17. The heating device according to any one of claims 1 to 16, wherein,

the plurality of recesses are dense in one portion and sparse in another portion in the face direction.

18. The heating device according to claim 4, wherein,

the 1 st plate member has: and a groove portion extending from a peripheral edge of the joint surface toward a center thereof and closed by the heat insulating member.

19. The heating device of claim 18, wherein,

the 1 st plate member has a temperature measuring element in the groove portion.

20. The heating device according to any one of claims 1 to 19, wherein,

The heating device is a mold heating device.