CN116659454A - Laser measurement system and control method thereof - Google Patents

Laser measurement system and control method thereof Download PDF

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Publication number
CN116659454A
CN116659454A CN202310461272.0A CN202310461272A CN116659454A CN 116659454 A CN116659454 A CN 116659454A CN 202310461272 A CN202310461272 A CN 202310461272A CN 116659454 A CN116659454 A CN 116659454A
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China
Prior art keywords
laser
receiving surface
detection unit
image sensor
displacement
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CN202310461272.0A
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董珍时
田岳鑫
严炎象
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Shenzhen Junlei Optoelectronic Technology Co ltd
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Shenzhen Junlei Optoelectronic Technology Co ltd
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Publication of CN116659454A publication Critical patent/CN116659454A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C5/00Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details
    • G01C9/06Electric or photoelectric indication or reading means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details
    • G01C9/06Electric or photoelectric indication or reading means
    • G01C2009/066Electric or photoelectric indication or reading means optical

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The application provides a laser measuring system and a control method thereof, wherein the laser measuring system comprises: the laser measuring system can simultaneously detect displacement and deflection of a plurality of measuring points through the cooperation of one laser transmitting unit and a plurality of laser detecting units; the laser detection units share the laser beam, so that the error caused by laser inclination can be compensated in real time, and the laser inclination can be changed synchronously in the detection devices; meanwhile, the influence caused by structural change can be eliminated, the installation structure is synchronous under the influence of environmental change, and the synchronous change can be eliminated by making difference among a plurality of detection points.

Description

Laser measurement system and control method thereof
Technical Field
The application relates to the technical field of deformation measurement, in particular to a laser measurement system and a control method thereof.
Background
The deformation of the surface foundation, the upper structure and the surrounding environment of large structures such as high-speed rail tracks, dams, bridges and the like reflects the health condition of the large structures, namely whether the structures are deformed or not, wherein the deformation comprises displacement, sedimentation and the like, and the observation of the structures of the infrastructures becomes a very important daily work of the industry. These deformation data provide important technical data for the operation maintenance, design, management and scientific research of the infrastructure.
At present, in the deformation measurement of large structures in the related art, no matter leveling measurement or intersection measurement or hydrostatic leveling instrument and liquid pressure leveling instrument are adopted, the problems of high cost, low precision, no compliance with complex installation conditions and the like exist, and the deformation measurement method is not well suitable for the deformation measurement in the fields of rail transit and the like.
Disclosure of Invention
Accordingly, it is an object of the present application to provide a laser measuring system and method that overcomes or at least partially solves the above-mentioned problems.
Based on the above object, the present application provides a laser measuring system comprising:
the laser detection device comprises a laser emission unit, a plurality of laser detection units and a control unit;
wherein, the laser emission unit is fixedly arranged on the structure to be detected and is configured to: emitting a laser beam along a first direction for detecting the structure to be detected; the laser beams sequentially pass through a plurality of laser detection units;
the laser detection unit is fixedly arranged on the structure to be detected along the first direction in sequence and is configured to: detecting an incident position of the laser beam and a cross-sectional shape of the laser beam;
the control unit is respectively connected with the laser emitting unit and the laser detecting unit and is configured to: according to the change of the incidence position and the change of the cross section shape, determining the displacement and deflection of the measuring point corresponding to each laser detection unit; and determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the plurality of measuring points.
In some embodiments, the laser detection unit includes a beam splitter and a beam detection device; wherein the beam splitting sheet is used for splitting the laser beam into a first beam and a second beam; the beam detection device is used for detecting the cross-sectional shape through the second beam; the first light beam passes through the laser detection unit.
In some embodiments, the angle between the beam splitter and the bottom surface of the laser detection unit is 45 degrees.
In some embodiments, the first and second light beams have a split ratio of 99:1.
In some embodiments, the beam shape detection device includes an image sensor and a beam receiving surface; the light beam receiving surface is used for receiving the second light beam, and the image sensor is used for detecting a light spot image formed on the light beam receiving surface by the second light beam.
In some embodiments, the image sensor is located on a side of the beam receiving surface away from the beam splitter;
wherein a distance between the image sensor and the light beam receiving surface is determined by an optical field angle of the image sensor and a size of the light beam receiving surface.
In some embodiments, the plurality of image sensors is provided, and an acquisition range of each image sensor corresponds to a partial area of the light beam receiving surface.
In some embodiments, a filter is disposed between the beam detection device and the beam splitting plate, and a passband of the filter is consistent with a wavelength of the laser beam.
In some embodiments, the image sensor is located on a side of the beam receiving surface adjacent to the beam splitter.
Based on the same inventive concept, the application also provides a control method applied to the laser measurement system, comprising the following steps:
controlling the laser emission unit to emit the laser beam at a first time; and controlling each of the laser detection units to detect a first incident position of the laser beam and a first cross-sectional shape of the laser beam;
controlling the laser emitting unit to emit the laser beam at a second time; and controlling each of the laser detection units to detect a second incident position of the laser beam and a second cross-sectional shape of the laser beam;
determining the displacement of a measuring point corresponding to each laser detection unit according to the first incident position and the second incident position detected by each laser detection unit; determining deflection of a measuring point corresponding to each laser detection unit according to the first cross-sectional shape and the second interface shape detected by each laser detection unit;
and determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the measuring points corresponding to the laser detection units.
From the above, the laser measurement system and the control method thereof provided by the application can detect displacement and deflection of a plurality of measurement points simultaneously through the cooperation of one laser emission unit and a plurality of laser detection units; the laser detection units share the laser beam, so that the error caused by laser inclination can be compensated in real time, and the laser inclination can be changed synchronously in the detection devices; meanwhile, the influence caused by structural change can be eliminated, the installation structure is synchronous under the influence of environmental change, and the synchronous change can be eliminated by making difference among a plurality of detection points. Moreover, the incidence position of the laser beam on each laser detection unit and the cross-sectional shape of the laser beam are detected simultaneously, so that the sedimentation change and the inclination change of the structure to be detected can be accurately distinguished. In addition, a laser beam sequentially passes through the plurality of laser detection units, so that the plurality of laser detection units can share the laser emitted by one laser emission unit, the number of the laser emission units is further reduced, and the detection cost is saved.
The foregoing description is only an overview of the present application, and is intended to be implemented in accordance with the teachings of the present application in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present application more readily apparent.
Drawings
In order to more clearly illustrate the technical solutions of the present application or related art, the drawings that are required to be used in the description of the embodiments or related art will be briefly described below, and it is apparent that the drawings in the following description are only embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort to those of ordinary skill in the art.
FIG. 1 is a schematic diagram of a laser measurement system according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of a first laser detection unit according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a second laser detection unit according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a third laser detection unit according to an embodiment of the present application;
fig. 5 is a schematic structural diagram of a fourth laser detection unit according to an embodiment of the present application;
FIG. 6 is a schematic diagram of an image deflection of an image sensor according to an embodiment of the present application;
fig. 7 is a schematic structural diagram of a fifth laser detection unit according to an embodiment of the present application;
fig. 8 is a flow chart of a control method of a laser measurement system according to an embodiment of the application.
Reference numerals:
01-laser emission unit, 02-laser detection unit, 03-control unit, 04-structure to be measured, 011-laser beam, 011A-first laser, 011B-second laser, 021-first optical window, 022-second optical window, 023-beam splitter, 024-beam detection device, 0241-beam receiving surface, 0242-imaging sensor, 025-PSD photoelectric device.
Detailed Description
The present application will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present application more apparent.
It should be noted that unless otherwise defined, technical or scientific terms used in the embodiments of the present application should be given the ordinary meaning as understood by one of ordinary skill in the art to which the present application belongs. The terms "first," "second," and the like, as used in embodiments of the present application, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
As described in the background art, deformation of a structure includes displacement, settlement, and the like, and deformation measurement of a building essentially measures displacement of a plurality of points with respect to a reference point, a line, and thereby calculates relative displacement between the plurality of points, that is, differential deformation from each other. The measuring method mainly comprises the measuring modes of leveling measurement, intersection measurement, laser collimation, imaging vision measurement and the like. Leveling is based on optical alignment measurement, such as photoelectric level, which is matched with a passive target for measurement, and is usually used for manual measurement, such as the company of Leka, but cannot be monitored on line. The deformation of the structures is measured by adopting a measuring mode such as a junction method, the factors of high cost exist, the large size and the large size of the mirror can be met, and the linear object is measured, so that the deformation of the structures is easy to block on a line. The basic principle of the static level gauge is that liquid tanks in all sensors are filled with liquid, all the liquid tanks are connected through communicating pipes, so that a reference plane is formed by constructing a horizontal plane in the liquid tanks, and the displacement sensor is used for measuring the change of all the points relative to the reference plane. The sensor of the principle has wide application in engineering, but the sensor of the type has large volume, needs to be filled with liquid, is troublesome in construction and is limited in application. The liquid tanks of the sensors are connected together through liquid connecting pipes, and the relative displacement between the points is measured by utilizing the relation between the pressure generated by the liquid at different heights at all positions and the liquid height and density, so as to measure the change of sedimentation. However, the data deviation is large due to the influence of the ambient temperature, and the measurement accuracy is in the order of magnitude of a few mm. At present, the related art includes some sensors which utilize the principle of point-to-point measurement by utilizing the collimation characteristic of laser, but the sensors can only measure one point, one set of device includes a laser emitter and a laser receiver, the cost of a plurality of laser emitters is higher for one linear engineering measurement, in addition, the laser emitter and the receiving sensor are point-to-point, when any one point is inclined, the influence on the measurement result is large, and the sensor can not distinguish whether the displacement generated horizontally and vertically or the displacement generated by inclination causes false alarm. In a word, the prior art has the problems of high cost, low precision, no compliance with complex installation conditions and the like in application, and can not be well suitable for deformation measurement in the fields of rail transit and the like.
In order to solve the above problems, the present application provides a laser measurement system, which includes a laser emitting unit, a plurality of laser detecting units and a control unit; wherein, the laser emission unit is fixedly arranged on the structure to be detected and is configured to: emitting a laser beam along a first direction for detecting the structure to be detected; the laser beams sequentially pass through a plurality of laser detection units; the laser detection unit is fixedly arranged on the structure to be detected along the first direction in sequence and is configured to: detecting an incident position of the laser beam and a cross-sectional shape of the laser beam; the control unit is respectively connected with the laser emitting unit and the laser detecting unit and is configured to: according to the change of the incidence position and the change of the cross section shape, determining the displacement and deflection of the measuring point corresponding to each laser detection unit; and determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the plurality of measuring points. As can be seen from the above, the laser measurement system and the control method thereof provided by the application can detect the displacement and the offset of a plurality of measurement points simultaneously by using the laser emission unit and the plurality of laser detection units, and the plurality of receiving common laser beams can compensate in real time, so that the error caused by the laser inclination can be compensated, and the laser inclination can be changed synchronously in a plurality of detection devices. The second is that the influence caused by structural change can be eliminated, the installation structure is synchronous under the influence of environmental change, and the difference between a plurality of points can eliminate the synchronous change. Moreover, the incidence position of the laser beam on each laser detection unit and the cross-sectional shape of the laser beam are detected simultaneously, so that the sedimentation change and the inclination change of the structure to be detected can be accurately distinguished. In addition, a laser beam sequentially passes through the plurality of laser detection units, so that the plurality of laser detection units can share the laser emitted by one laser emission unit, the number of the laser emission units is further reduced, and the detection cost is saved.
Referring to fig. 1, a schematic structural diagram of a laser measurement system according to an embodiment of the present application includes:
a laser emission unit 01, a plurality of laser detection units 02 and a control unit 03;
wherein the laser emitting unit 01 is fixedly arranged on the structure 04 to be measured and is configured to: emitting a laser beam along a first direction for detecting the structure 04 to be detected; the laser beam sequentially passes through a plurality of the laser detection units 02;
the laser detection unit 02 is fixedly disposed on the structure 04 to be detected in the first direction, and is configured to: detecting an incident position of the laser beam and a cross-sectional shape of the laser beam;
the control unit 03, connected 02 to the laser emitting unit 01 and the laser detecting unit, respectively, is configured to: determining displacement and deflection of a measurement point corresponding to each laser detection unit 02 according to the change of the incidence position and the change of the cross-sectional shape; and determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the plurality of measuring points.
In some embodiments, referring to fig. 1, the control unit 03 and the laser emitting unit 01 and the laser detecting unit 02 may be connected through a wireless communication module, or may be connected through a wired module, which is not limited. Optionally, the wireless communication module may be wifi, loRa, or NBIOT based on public network, or a 4G, 5G communication module. Alternatively, the cable module may use an ethernet communication mode.
In some embodiments, the control unit typically employs a corex-M series single-chip microcomputer or other type of microcontroller, but may also employ an FPGA, DSP, or other type of controller.
In some embodiments, referring to fig. 2, the laser detection unit includes a first optical window 021 and a second optical window 022, and the laser beam sequentially passes through the first optical window 021 and the second optical window 022, and optionally, the first optical window and the second optical window can play a certain role in protecting components in the laser detection unit. Optionally, to reduce the effect of ambient light on the measurement, the optical window preferably has a certain spectral selectivity, e.g. comprises a material such as a long-wavelength pass, or a bandpass, or is provided with a filter. Alternatively, in some embodiments, the laser detection unit may not include the first optical window and the second optical window.
The first direction may be any direction that is consistent with the extending direction of the structure to be measured when the structure is measured for the first time. The change of the incident position of the laser beam mainly refers to the change of the position of the laser beam entering the laser detection unit at different moments, and the cross-sectional shape of the laser beam mainly refers to the change of the cross-sectional shape of the laser beam collected by the laser detection unit at different moments, and the change of the cross-sectional shape can be the change of the shape itself, for example, the change from circular shape to elliptical shape, or the change of the dimension of the cross-sectional shape, which is not limited. Alternatively, the change in the displacement of the cross-sectional shape on the receiving surface, that is, the change in the incident position of the laser beam may be expressed in terms of the change in the displacement of the geometric center of the cross-sectional shape. Alternatively, the change in the displacement of the cross-sectional shape on the receiving surface may be expressed in terms of the change in the displacement of the energy center of the cross-sectional shape, which is not limited.
In some embodiments, referring to fig. 2, the laser detection unit includes a beam splitter 023 and a beam detection device 024; wherein the beam splitter 023 is configured to split the laser beam 011 into a first beam 011A and a second beam 011B; the beam detection means 024 is configured to detect the cross-sectional shape and the incident position by the second beam 011B; the first light beam 011A passes through the laser detection unit.
In particular, when the laser beam needs to pass through the plurality of laser detection units in turn, it is considered that when the cross-sectional shape of the laser beam is detected by the current laser detection unit, the laser beam is not influenced as much as possible by the next laser detection unit, so that after the laser beam is injected into the laser detection unit, the laser beam is split by the beam splitter to obtain the first beam and the second beam. The beam splitting sheet mainly enables one part of light beams to pass through, and the other part of light beams are reflected, so that the beam splitting effect is achieved. Considering that the laser beam needs to be utilized by a plurality of detection units, in order to avoid serious attenuation of the split laser beam, the split ratio of the first beam to the second beam can be increased as much as possible under the requirement of meeting the detection of the cross-sectional shape, and in some embodiments, the split ratio can be set to 99:1.
In some embodiments, to ensure that the direction of the first beam is consistent with that of the original beam after the laser beam is split, the splitter 023 forms an angle of 45 degrees with the bottom surface of the laser detection unit.
In some embodiments, referring to fig. 2, the beam detection device includes an image sensor 0242 and a beam receiving face 0241; the beam receiving surface 0241 is configured to receive the second beam 011B, and the image sensor 0242 is configured to detect a flare image formed by the second beam 011B on the beam receiving surface 0241.
In some embodiments, referring to fig. 3, the image sensor 0242 is located on a side of the beam receiving face 0241 remote from the beam splitting sheet 023;
wherein a distance between the image sensor and the light beam receiving surface is determined by an optical field angle of the image sensor and a size of the light beam receiving surface.
In particular, since the image sensor is disposed on a side of the light beam receiving surface facing away from the laser beam, if the image sensor wants to recognize the cross-sectional shape of the laser beam on the light beam receiving surface, it is necessary for the light beam receiving surface to have a certain transmittance, so that the image sensor collects a flare image by light transmitted through the light beam receiving surface. Optionally, the light beam receiving surface may be made of a material such as a curtain or a semitransparent lens, and optionally, some marks, such as a coordinate system, may be disposed on the light beam receiving surface, so as to help the image sensor to better identify the change of the cross-sectional shape of the light beam.
In some embodiments, in order to ensure that the view angle of the image sensor may cover all areas of the light beam receiving surface, when determining the distance between the image sensor and the light beam receiving surface, it is necessary to consider the optical view angle of the image sensor and the size of the light beam receiving surface at the same time, referring to fig. 3, the distance between the image sensor and the light beam receiving surface is d, the optical view angle of the image sensor is a, and when the image sensor is parallel to the light beam receiving surface and the effective length of the light beam receiving surface is L, the distance d of the light beam receiving surface may be obtained by the following formula:
d=L/2×cot(α/2)
it should be noted that, the optical field angle of the image sensor is not easy to be too large or too small, alternatively, the field angle may be smaller than 90 degrees, and when the distance between the image sensor and the light beam receiving surface is too close, the optical field angle of the image sensor cannot cover the whole light beam receiving surface, and the laser detection unit needs to have a larger distance and volume. When the optical angle of view is too large, distortion of the image around the angle of view is caused, and measurement errors increase. Alternatively, as a preferred embodiment, the optical field angle may be set to 60 degrees, in which case the distortion is small, and in the case where the effective length of the light beam receiving surface is 100mm, the distance d between the image sensor and the light beam receiving surface is about 85mm, and the partial size width of the laser detection unit is 185mm. Alternatively, the imaging sensor may be a CIS sensor, the number of pixels is not less than 200 ten thousand pixels, for example, the resolution of CIS is 1920×1080, 100mm corresponds to 1920, that is, 19 pixels per millimeter, and the accuracy of single pixel correspondence may reach 0.05mm. Such as an image sensor employing 500 ten thousand pixels, or more, the corresponding displacement accuracy of a single pixel is higher.
In order to reduce the distance between the image sensor and the light beam receiving surface while ensuring the sharpness of the image sensor identification image, in some embodiments, referring to fig. 4, the image sensors 0242 are plural, and the collection range of each image sensor 0242 corresponds to a partial area of the light beam receiving surface. Therefore, the distance between the image sensor and the light beam receiving surface can be further reduced while the imaging definition and no distortion are ensured, and the volume of the laser detection unit can be further reduced. When there are a plurality of image sensors, it is necessary to splice together the images collected by the plurality of image sensors to form the cross-sectional shape of the finally detected laser beam.
In some embodiments, referring to fig. 4, the number of image sensors is 3, when the image sensors are parallel to the light beam receiving surface, if the effective receiving length of the light beam receiving surface is L, the measuring range corresponding to each image sensor is L/3, the optical field of view of each image sensor is a, and the distance d between the image sensor and the light beam receiving surface is:
d=L/6×cot(α/2);
alternatively, as a preferred embodiment, the optical field of view a of each image sensor is 45 degrees, and the distance d between the image sensor and the light beam receiving surface is about 40mm when the effective receiving length L of the light beam receiving surface is equal to 100 mm. Alternatively, each image sensor may use a CIS of 200 ten thousand pixels, and the measurement accuracy at the parallel mounting position of the camera is 1920×3/100=57 pixels/mm, that is, 57 pixels for each millimeter, which is higher than that of setting a single image sensor.
In some embodiments, a filter is disposed between the beam detection device and the beam splitting plate, and a passband of the filter is consistent with a wavelength of the laser beam.
In particular, in order to reduce interference of ambient light and improve signal-to-noise ratio of measurement, a filter may be disposed between the beam detection device and the beam splitter. In view of the fact that the size of the image sensor is generally smaller than the size of the light beam receiving surface, the optical filter may be disposed in front of the image sensor for cost saving, or alternatively, the optical filter may be disposed in front of the light beam receiving surface, which is not limited. The filter adopts an interference filter, and the passband of the filter is consistent with the wavelength of the laser. If the laser beam adopts 635nm red light, the center wavelength of the filter is 635nm, the bandwidth is 20nm, the transmittance is as high as possible and reaches more than 90 percent. Thus, the image has high signal to noise ratio, and the background light energy is greatly reduced due to high power density of the laser spots. The laser emitting unit is used for emitting lasers with other wavelengths, the center wavelength of the optical filter is consistent with the laser wavelength, the bandwidth is consistent with the bandwidth of the emitted laser wavelength, and the bandwidth is larger than the bandwidth of the laser wavelength.
To further reduce the volume of the laser detection unit, in some embodiments, referring to fig. 6, the image sensor 0242 is located on a side of the beam receiving surface 0241 near the beam splitting sheet 023.
During implementation, in order to reduce the volume of the laser detection unit and improve the installation convenience of the laser detection unit, the image sensor can be arranged on one side, close to the laser beam, of the beam receiving surface, so that the image sensor and the beam receiving surface are respectively positioned on two opposite surfaces of the laser detection unit, and the space of the laser detection unit can be fully utilized to enable the distance between the image sensor and the beam receiving surface to meet the requirement of the angle of view of the image sensor. At this time, since the image sensor collects an image formed by the light beam receiving surface reflecting the second light beam, that is, it is required that the light beam receiving surface reflect at least a part of the second light beam, the image sensor collects a spot image by the light reflected by the light beam receiving surface.
It should be noted that, referring to fig. 5, in order to avoid the beam splitter, the optical axis of the imaging sensor and the light beam receiving surface are generally not perpendicular, and referring to fig. 7, an angle α exists between the imaging sensor and the light beam receiving surface. However, the inventors have found that the presence of an included angle results in a displacement of the measured size of each pixel representation. Referring to fig. 6, the second beam actually forms a spot with a length n on the beam receiving surface, and the length of the spot detected by the imaging sensor is m, and it is obvious that there is a certain deviation between the two, and this deviation affects the final detection result. Therefore, correction is required for the measurement data of the imaging sensor. Alternatively, the correction may be made by the following formula:
m=n×cos(α);
wherein m represents the length of the light spot detected by the imaging sensor, n represents the length of the light spot actually formed by the second light beam on the light beam receiving surface, and alpha represents the included angle between the imaging sensor and the light beam receiving surface. When the light spot is circular, the length of the light spot may be a radius or a diameter of the circle, and when the light spot is elliptical, the length of the light spot may be a length of a longest or shortest line segment crossing the center of the ellipse and intersecting the edge of the ellipse, that is, the length of the light spot may be a major axis or a minor axis of the ellipse. Alternatively, in some embodiments, the calibration registration table of m and n may be obtained experimentally, and then the displacement calibration registration is performed through the calibration registration table.
In some embodiments, referring to fig. 7, the location of incidence of the laser beam may be detected by a PSD photocell 025. The PSD photoelectric device is a light energy/position conversion device, namely, after receiving light energy, the PSD photoelectric device can directly simulate and output the area and the position of the received light energy, so that the position of the energy center of the received light beam is determined. Optionally, in order to avoid interference caused by ambient light on detecting the cross-sectional shape of the laser beam, a filter may be disposed between the PSD photoelectric device and the beam splitter, where the passband of the filter is consistent with the wavelength of the laser beam, so as to filter ambient light with other wavelengths.
According to the same inventive concept, the present application also provides a control method applied to the laser measuring system as described above, corresponding to the laser detecting apparatus described in any of the above embodiments, with reference to fig. 8, the control method comprising the steps of:
s101, at a first time, controlling the laser emitting unit to emit the laser beam; and controls each of the laser detection units to detect a first incident position of the laser beam and a first cross-sectional shape of the laser beam.
In a specific implementation, at a first time, the control unit may control the laser emitting unit to emit the laser beam, and control all the laser detecting units to detect a first incident position of the laser beam and a first cross-sectional shape of the laser beam. Optionally, the controller may first turn on the laser emitting unit at the first time, and then turn on the laser detecting unit to collect, so that each detecting unit samples the light beam at the same time, and the influence of the weather condition change on the measurement can be reduced. Optionally, in order to ensure the accuracy of detection, the control unit controls each laser detection unit to synchronously perform acquisition.
S102, controlling the laser emission unit to emit the laser beam at a second time; and controls each of the laser detection units to detect a second incident position of the laser beam and a second cross-sectional shape of the laser beam.
The first time and the second time may be set as needed, which is not limited. Alternatively, the interval between the first time and the second time may be determined according to the structure of the structure to be measured and conditions such as use environment, that is, by determining the time when the structure to be measured changes its form.
S103, determining displacement of a measuring point corresponding to each laser detection unit according to the first incident position and the second incident position detected by each laser detection unit, and determining deflection of the measuring point corresponding to each laser detection unit according to the first cross-sectional shape and the second interface shape detected by each laser detection unit.
In a specific implementation, when the first cross-sectional shape is the same as the second cross-sectional shape, that is, the laser cross-sectional shape is not changed, it is indicated that the laser emitting unit and the laser detecting unit on the structure to be tested are not inclined and deformed, and at this time, if the first incident position is different from the second incident position, it is indicated that the structure to be tested is deformed such as subsidence, and the specific shape variable can be calculated according to the first incident position and the second incident position. When the first cross-sectional shape is different from the second cross-sectional shape, that is, the laser cross-sectional shape is changed, it indicates that the laser emitting unit or the laser detecting unit on the structure to be detected is inclined and deformed, and at this time, if the first incident position is the same as the second incident position, the direction of the deformation of the laser cross-section is opposite to the direction of the inclination of the laser detecting unit. In some embodiments, a correspondence between the angle at which the laser detection unit is tilted and the deformation of the laser section may be obtained through experiments, and then the tilt (deflection) angle at which the laser detection unit is tilted may be accurately determined through the correspondence, the first sectional shape, and the second sectional shape.
S104, determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the measuring points corresponding to the laser detection units.
In the implementation, after the displacement and deflection of the measuring point corresponding to each laser detection unit are obtained, the displacement and deflection of the structure to be detected can be determined according to the displacement and deflection.
In some embodiments, determining the first and second locations includes:
at a first time, controlling the laser emission units to emit the laser beams, and recording a first incidence position of the laser beams by the detector of each laser detection unit, and establishing coordinates by taking the first incidence position as an original point and taking a horizontal direction and a vertical direction as coordinate axes;
recording the first incident position as a first position;
referring to fig. 1, 1 laser emitting unit is disposed at the leftmost position, 3 laser detecting units are disposed in sequence from near to far from the laser emitting unit, laser beams emitted from the laser emitting units sequentially pass through the 3 laser detecting units, and at a first time, the first incident position coordinates recorded by the three laser detecting units are x respectively 11 、y 11 ,x 12 、y 12 And x 13 、y 13 I.e. x 11 、y 11 ,x 12 、y 12 ,x 13 、y 13 0, respectively.
Controlling the laser emission units to emit the laser beams at a second time, wherein the detector of each laser detection unit records a second incidence position of the laser beams, and determining the position coordinates of the second incidence position in the coordinate axes as a second position;
at a second time, the second incident position coordinates recorded by the three laser detection units are x respectively 21 、y 21 ,x 22 、y 22 And x 23 、y 23
In some embodiments, calculating a coordinate difference between the second position and the first position corresponding to each laser detection unit, determining a displacement of each laser detection unit, and determining a displacement of the structure according to a plurality of the coordinate differences;
through the above description, the coordinate differences of the second position and the first position are respectively DX 11 =x 21 -x 11 ,DY 11 =y 21 -y 11 ,DX 12 =x 22 -x 12 ,DY 12 =y 22 -y 12 ,DX 13 =x 23 -x 13 ,DY 13 =y 23 -y 13 Wherein DX 11 、DX 12 And DX 13 Second positions recorded at second time and first time of 3 laser detection units respectivelyDisplacement of a position x-axis DY 11 、DY 12 And DY 13 The displacement of the y-axis of the second position recorded at the second time and the first position recorded at the first time of the 3 laser detection units is respectively.
In some embodiments, the change in the cross-sectional shape of the laser beam may be determined by measuring a dimensional change in the shape of a spot formed by the second beam on the beam receiving surface.
In some embodiments, whether the laser generating unit is changed may be determined by measuring whether an energy center of a spot shape formed by the second light beam on the light beam receiving surface coincides with the geometric center.
The laser collimation measuring system is convenient to install, can measure the displacement of a measuring point where the laser measuring unit is located along the x-axis (horizontal) and the y-axis (vertical), can measure the deflection of the laser detecting unit caused by the inclination of the measuring point, and has higher practicability.
Those of ordinary skill in the art will appreciate that: the discussion of any of the embodiments above is merely exemplary and is not intended to suggest that the scope of the application (including the claims) is limited to these examples; the technical features of the above embodiments or in the different embodiments may also be combined within the idea of the application, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the application as described above, which are not provided in detail for the sake of brevity.
Additionally, well-known power/ground connections to Integrated Circuit (IC) chips and other components may or may not be shown within the provided figures, in order to simplify the illustration and discussion, and so as not to obscure the embodiments of the present application. Furthermore, the devices may be shown in block diagram form in order to avoid obscuring the embodiments of the present application, and also in view of the fact that specifics with respect to implementation of such block diagram devices are highly dependent upon the platform within which the embodiments of the present application are to be implemented (i.e., such specifics should be well within purview of one skilled in the art). Where specific details (e.g., circuits) are set forth in order to describe example embodiments of the application, it should be apparent to one skilled in the art that embodiments of the application can be practiced without, or with variation of, these specific details. Accordingly, the description is to be regarded as illustrative in nature and not as restrictive.
While the application has been described in conjunction with specific embodiments thereof, many alternatives, modifications, and variations of those embodiments will be apparent to those skilled in the art in light of the foregoing description. For example, other memory architectures (e.g., dynamic RAM (DRAM)) may use the embodiments discussed.
The present embodiments are intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, and the like, which are within the spirit and principles of the embodiments of the application, are intended to be included within the scope of the application.

Claims (10)

1. A laser measurement system, comprising:
the laser detection device comprises a laser emission unit, a plurality of laser detection units and a control unit;
wherein, the laser emission unit is fixedly arranged on the structure to be detected and is configured to: emitting a laser beam along a first direction for detecting the structure to be detected; the laser beams sequentially pass through a plurality of laser detection units;
the laser detection unit is fixedly arranged on the structure to be detected along the first direction in sequence and is configured to: detecting an incident position of the laser beam and a cross-sectional shape of the laser beam;
the control unit is respectively connected with the laser emitting unit and the laser detecting unit and is configured to: according to the change of the incidence position and the change of the cross section shape, determining the displacement and deflection of the measuring point corresponding to each laser detection unit; and determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the plurality of measuring points.
2. The system of claim 1, wherein the laser detection unit comprises a beam splitter and a beam detection device; wherein the beam splitting sheet is used for splitting the laser beam into a first beam and a second beam; the beam detection means is for detecting the cross-sectional shape and the incident position by the second beam; the first light beam passes through the laser detection unit.
3. The system of claim 2, wherein the beam splitter is angled 45 degrees from the bottom surface of the laser detection unit.
4. The system of claim 2, wherein the first beam and the second beam have a split ratio of 99:1.
5. The system of claim 2, wherein the beam detection device comprises an image sensor and a beam receiving surface; the light beam receiving surface is used for receiving the second light beam, and the image sensor is used for detecting a light spot image formed on the light beam receiving surface by the second light beam.
6. The system of claim 5, wherein the image sensor is located on a side of the beam receiving surface remote from the beam splitter;
wherein a distance between the image sensor and the light beam receiving surface is determined by an optical field angle of the image sensor and a size of the light beam receiving surface.
7. The system of claim 6, wherein the plurality of image sensors each have a collection range corresponding to a partial region of the light beam receiving surface.
8. The system of claim 2, wherein a filter is disposed between the beam detection device and the beam splitting plate, and wherein a passband of the filter is coincident with a wavelength of the laser beam.
9. The system of claim 5, wherein the image sensor is located on a side of the beam receiving surface proximate to the beam splitter.
10. A control method applied to the laser measuring system according to any one of claims 1 to 9, characterized by comprising:
controlling the laser emission unit to emit the laser beam at a first time; and controlling each of the laser detection units to detect a first incident position of the laser beam and a first cross-sectional shape of the laser beam;
controlling the laser emitting unit to emit the laser beam at a second time; and controlling each of the laser detection units to detect a second incident position of the laser beam and a second cross-sectional shape of the laser beam;
determining displacement of a measuring point corresponding to each laser detection unit according to the first incident position and the second incident position detected by each laser detection unit, and determining deflection of the measuring point corresponding to each laser detection unit according to the first cross-sectional shape and the second interface shape detected by each laser detection unit;
and determining the displacement and deflection of the structure to be detected based on the displacement and deflection of the measuring points corresponding to the laser detection units.
CN202310461272.0A 2022-07-12 2023-04-18 Laser measurement system and control method thereof Pending CN116659454A (en)

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