CN116631834A

CN116631834A - Surface modification treatment equipment and modification treatment method

Info

Publication number: CN116631834A
Application number: CN202310905793.0A
Authority: CN
Inventors: 林默原; 章莹; 姚利峰
Original assignee: Suzhou Maineng Plasma Technology Co ltd
Current assignee: Suzhou Maineng Plasma Technology Co ltd
Priority date: 2023-07-24
Filing date: 2023-07-24
Publication date: 2023-08-22
Anticipated expiration: 2043-07-24
Also published as: CN116631834B

Abstract

The application discloses surface modification treatment equipment and a modification treatment method, wherein the surface modification treatment equipment comprises a vacuum cavity, a plasma source device, a roller and a driving assembly, the vacuum cavity comprises a cavity body and a cavity door which can be opened and closed, and a vacuum extraction opening is arranged on the cavity body and/or the cavity door; a plasma source device disposed outside the vacuum chamber and configured to generate a plasma species; a drum configured to hold a material to be processed is disposed within the vacuum chamber, an interior of the drum being in communication with the vacuum chamber; the driving assembly is configured to drive the roller to rotate; wherein, the plasma generated by the plasma source device is input into the vacuum cavity through the diversion channel. The application realizes stable discharge by separating the plasma excitation area from the material treatment area, so that the plasma discharge process is not influenced by the treated object and the movement of the treated object, thereby improving the material treatment quality.

Description

Surface modification treatment equipment and modification treatment method

Technical Field

The application relates to the field of plasma modification, in particular to surface modification treatment equipment and a modification treatment method.

Background

Compared with a chemical method and a heating method, the plasma modified powder material has the advantages of safety, environmental protection, high efficiency and low cost.

At present, roller type plasma equipment, such as a radio frequency induction plasma processing device and a dielectric barrier discharge plasma processing device, is mainly adopted for plasma processing of powder materials. When loading and unloading exist in the equipment, the rollers are required to be detached and installed independently, and the operation is extremely inconvenient; in order to meet the requirements of air supply, air extraction and tightness in the treatment process, the structure is complex, the precision and the installation requirements of extremely high parts are required, and the maintenance are inconvenient; in addition, during the treatment, the roller rotates, and the roller and the ion generating device arranged in the roller are in a motion state, so that unstable discharge is easily caused.

In summary, the existing plasma equipment for treating the particle/powder material has the problems of complex structure, inconvenient maintenance and operation, unstable discharge, low treatment quality and the like.

The above disclosure of background art is only for aiding in understanding the inventive concept and technical solution of the present application, and it does not necessarily belong to the prior art of the present patent application, nor does it necessarily give technical teaching; the above background should not be used to assess the novelty and creativity of the present application in the event that no clear evidence indicates that such is already disclosed prior to the filing date of the present patent application.

Disclosure of Invention

The application aims to provide surface modification treatment equipment and a modification treatment method, which are used for separating a plasma excitation area from a material treatment area, so that the plasma discharge process is not influenced by a treated object and the movement of the treated object, stable discharge is realized, and the material treatment quality is further improved.

In order to achieve the above purpose, the application adopts the following technical scheme:

a surface modification treatment apparatus comprising:

the vacuum cavity comprises a cavity body and a cavity door which can be opened and closed, and a vacuum extraction opening is formed in the cavity body and/or the cavity door;

a plasma source device disposed outside the vacuum chamber, configured to generate a plasma species;

a drum configured to hold a material to be processed, disposed within the vacuum chamber, an interior of the drum being in communication with the vacuum chamber;

a driving assembly configured to drive the drum to rotate;

the plasma generated by the plasma source device is input into the vacuum cavity through the diversion channel.

Further, according to any one or a combination of the foregoing aspects, an opening is provided on an end surface of the drum, and/or an opening with a pore diameter smaller than a particle diameter of a material to be processed is provided on a drum body of the drum, so that an interior of the drum is communicated with the vacuum chamber;

the inner end of the flow guide channel extends into the roller, extends into the vacuum cavity to a region within 5cm from the roller, is communicated with at least one conduit extending into the roller, or is communicated with at least one conduit extending to a region within 5cm from the roller.

Further, the drum is configured to rotate about its axis or to spin about a parallel line to the axis;

the roller is provided with an opening on at least one end face of two ends in the axial lead direction;

the diversion channel satisfies any one of the following configurations:

the diversion channel is a pipeline which passes through the opening and extends to the inside of the roller;

or the diversion channel extends to a region which is positioned outside the roller and is less than 5cm away from the opening;

alternatively, the diversion channel is connected with one or more guide pipes, and the guide pipes pass through the opening and extend into the roller;

alternatively, the diversion channel is connected with one or more guide pipes which extend to a region which is positioned outside the roller and is less than 5cm away from the opening;

alternatively, the diversion channel and/or conduit extends through the drum.

Further, according to any one or a combination of the above-mentioned technical solutions, the pipe body of the guide channel or the guide pipe extending to the inside of the drum is a straight pipe, a bent pipe or a spray pipe with spray holes on the pipe wall;

the guide channel is in sealing connection with the cavity of the vacuum cavity, and the guide channel and/or the guide pipe is in unsealing connection with the roller;

the drum is configured as a structure that is relatively fixedly connected to the vacuum chamber, or as a non-fixedly mounted structure that can be removed from within the vacuum chamber.

Further, according to any one or a combination of the foregoing aspects, openings are formed in the first end face and the second end face at both ends of the drum in the axial line direction;

the first end face is arranged opposite to the cavity door;

the diversion channel satisfies any one of the following configurations:

the diversion channel is a pipeline which passes through the opening on the second end surface and extends to the inside of the roller;

or the diversion channel extends to a region which is positioned outside the roller and has a distance of less than 5cm from the opening on the second end surface;

alternatively, the diversion channel is connected with one or more guide pipes, and the guide pipes pass through the opening on the second end surface and extend into the roller;

or, the diversion channel is connected with one or more guide pipes, and the guide pipes extend to a region which is positioned outside the roller and has a distance of less than 5cm from the opening on the second end surface;

alternatively, the diversion channel and/or conduit passes through openings on the second and first end faces.

Further, according to any one or a combination of the foregoing technical solutions, a vacuum extraction opening is provided on the cavity door, and the vacuum extraction opening on the cavity door is disposed opposite to the opening of the drum on the first end face;

and/or at least one of the first end face and the second end face is configured as a removable end cap structure relative to the drum.

Further, in combination with any one or more of the preceding claims, the flow guide channel is configured with a first air inlet configured to input a working gas and a carrier gas to cause the plasma source device to generate plasma;

the diversion channel and/or the conduit connected with the diversion channel is provided with one or more second air inlets, and the second air inlets are configured to input working gas or gaseous precursor.

Further, in the foregoing any one or a combination of the foregoing aspects, a ridge is provided on an inner surface of a sidewall of the drum along the axial direction.

Further, any one or a combination of the above-mentioned technical solutions, wherein the cavity is provided with a vacuum breaking air inlet for air intake;

and/or the cavity is provided with an auxiliary vacuum extraction opening.

Further, carrying out any one or combination of the foregoing aspects, the roller being a circular roller, the drive assembly comprising a motor and two rollers configured to jointly carry the roller;

wherein at least one roller is driven by the motor to rotate the drum, or the motor is configured to drive the drum to rotate through a bearing and gear structure.

Further, in combination with any one or more of the preceding claims, a stopper is provided on or adjacent to the roller, and the stopper is configured to prevent the roller from moving along the axial line direction.

Further, according to any one or a combination of the above-mentioned technical solutions, a first gear is circumferentially arranged on the drum, a second gear is sleeved on at least one of the rotating rollers, and the first gear is meshed with the second gear.

Further, the material of the roller is metal, quartz, ceramic or sapphire; and/or the material of the flow guide channel is quartz, ceramic or sapphire.

Further, in any one or a combination of the foregoing aspects, the excitation power supply frequency of the plasma source device is between 1kHz and 6GHz, the power is between 10W and 30kW, and the operation mode is a continuous wave operation mode or a pulse operation mode with a frequency between 5Hz and 1 MHz.

According to another aspect of the present application, there is provided a method for modifying a surface of a material by a surface modifying treatment apparatus according to any one or a combination of the above, comprising the steps of:

opening a cavity door of the vacuum cavity, and placing the material to be treated into the roller;

closing a cavity door of the vacuum cavity, and starting a vacuum pump to vacuumize the vacuum cavity; activating a driving assembly to rotate the drum; introducing working gas into the plasma source device to generate plasma;

closing the plasma source device, the driving component and the vacuum pump until the material to be processed completes plasma processing;

and breaking the vacuum cavity, opening a cavity door of the vacuum cavity, and taking out the material in the roller.

The technical scheme provided by the application has the following beneficial effects:

a. according to the application, the plasma source device is arranged outside the vacuum cavity, plasma is excited by the plasma source device and then is conveyed into the roller in the vacuum cavity, so that the plasma reacts with the surface of a material to be processed, and the plasma excitation area and the material processing area are separated, so that the plasma load is not influenced by the movement of the processed object and the processed object, stable discharge is realized, and the material processing quality can be improved;

b. compared with the existing mode of combining the plasma excitation cavity and the treatment cavity, the surface modification treatment equipment provided by the application has the advantages that the heating effect of the electrode and the excitation cavity wall is avoided in the discharge process, the heating of the roller is less in the material treatment process, the lower plasma treatment temperature can be obtained, and the material treatment quality is further improved;

c. according to the surface modification treatment equipment provided by the application, only the roller is of a rotating structure, the vacuum cavity and the plasma excitation device are of a fixed structure, the whole structure is simple, the component precision and the installation requirement can be reduced, the detachable end covers are arranged on the vacuum cavity and the roller, and the roller can be detached and taken out from the vacuum cavity, so that the equipment is convenient to maintain and overhaul;

e. according to the application, the diversion channel or the guide pipe extending to the interior of the roller is designed into the spray pipe structure with the spray holes, so that uniform and reasonable plasma distribution can be formed in the roller, and the material treatment quality can be improved;

f. according to the application, at least two first gears are circumferentially arranged on the roller, at least two second gears meshed with the first gears in one-to-one correspondence are arranged on each rotary roller, the rotary rollers are driven by a motor to rotate so as to drive the roller to rotate, and the limiting pieces are arranged on the rotary rollers or adjacent to the rotary rollers so as to prevent the roller from moving along the axial line direction, so that the roller can be prevented from moving along the axial line during rotation, and the rolling rotation is more stable.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.

FIG. 1 is a schematic view of the structure of a surface modification treatment apparatus provided in an exemplary embodiment of the present application;

fig. 2 (a) - (d) are schematic structural views of the second end surface of four different rollers according to an exemplary embodiment of the present application;

fig. 3 (a) - (e) are schematic structural diagrams of five different diversion channels according to an exemplary embodiment of the present application;

fig. 4 (a) - (b) are schematic structural views of the first end surface of two different rollers according to an exemplary embodiment of the present application;

FIG. 5 is a schematic view of the interior of a drum having a ridge structure provided in accordance with an exemplary embodiment of the present application;

fig. 6 is a schematic view of a structure for driving a drum by using gears according to an exemplary embodiment of the present application;

FIG. 7 is a schematic view of a vacuum chamber with rollers positioned therein for positioning a drum according to an exemplary embodiment of the present application;

fig. 8 is a schematic structural view of a diversion channel provided with two air inlets according to an exemplary embodiment of the present application;

FIG. 9 is a schematic view showing an internal structure of the surface modification treatment apparatus shown in FIG. 1;

fig. 10 is a schematic view of a structure for driving a drum using a bearing structure according to an exemplary embodiment of the present application;

fig. 11 is a schematic view showing still another structure of driving a drum using a bearing structure according to an exemplary embodiment of the present application.

Wherein, the reference numerals include: 1-cavity, 2-cavity door, 3-cylinder, 4-roller, 5-base, 6-motor, 7-ridge, 8-first terminal surface, 9-plasma source device, 10-water conservancy diversion passageway, 11-first gear, 12-second gear, 13-gyro wheel, 14-first air inlet, 15-second air inlet, 16-bearing frame, 17-upper gear, 18-lower gear.

Detailed Description

In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, apparatus, article, or device that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or device.

In one embodiment of the present application, there is provided a surface modification treatment apparatus, see fig. 1 and 9, including:

the vacuum cavity comprises a cavity body 1 and a cavity door 2 which can be opened and closed, and a vacuum extraction opening is formed in the cavity body 1 and/or the cavity door 2;

a plasma source device 9 disposed outside the vacuum chamber, configured to generate a plasma substance;

a drum 3 configured to contain a material to be processed, which is provided within the vacuum chamber, the interior of the drum 3 being in communication with the vacuum chamber;

a driving assembly configured to drive the drum 3 to rotate;

wherein, the plasma generated by the plasma source device 9 is input into the vacuum cavity through the diversion channel 10. And under the condition that the vacuum pump is connected with the vacuum pumping port and started, the gas in the vacuum cavity is pumped by the vacuum pump to form vacuum. In other words, the vacuum chamber and the external device should be connected in a sealed manner, that is, the plasma flowing through the flow guide channel 10 should enter the vacuum chamber entirely.

In this embodiment, the plasma source device 9 is disposed outside the vacuum chamber and the drum 3, and after the plasma source device 9 and the diversion channel 10 excite the plasma, the plasma is conveyed into the drum to react with the surface of the material to be processed, and by separating the plasma excitation area and the material processing area, the plasma load is not affected by the processed object and the motion of the processed object, so as to realize discharge stabilization; in addition, compared with the existing mode of combining the plasma excitation cavity and the treatment cavity, the surface modification treatment equipment provided by the application has the advantages that the heating effect of the electrode and the excitation cavity wall in the discharge process is avoided, the heating is less, and the lower plasma treatment temperature can be obtained, so that the material treatment quality can be improved.

In one embodiment of the application, see fig. 1, the drum 3 is configured to rotate around its axis or to spin around a parallel line to the axis, the drum 3 being provided with openings on at least one end face of both ends in the direction of the axis. Preferably, the drum 3 is provided with openings on both a first end face and a second end face at both ends in the axial direction, at least one of the first end face and the second end face being configured as a detachable end cover structure with respect to the drum 3. The first end face is arranged opposite to the cavity door 2; the diversion channel 10 is configured to pass through an opening on the second end face; alternatively, the diversion channel 10 connects to one or more conduits that pass through openings in the second end face. Referring to fig. 6 or 9, the opening on the first end face occupies a part of the end face, and a circle of edge is left on the first end face, so that materials cannot fall out of the end face of the roller 3 in the internal treatment of the roller 3; the second end face at the other viewing angle has the same setting.

In one embodiment of the present application, the communication between the interior of the drum 3 and the vacuum chamber may be achieved by providing an opening (not shown) having a smaller diameter than the particle size of the material to be treated on the drum body of the drum 3; in one embodiment, openings are formed on the end face of the roller, and openings are formed on the cylinder body, so that the effects of enhancing the vacuum uniformity inside the roller 3 and increasing the contact area between the material to be treated and the plasma are achieved.

In addition to the embodiment in which the guide passage 10 or the communicating duct thereof extends into the interior of the drum 3 in the above-described example, in another example, the guide passage 10 or the communicating duct thereof may be extended not into the interior of the drum 3, for example, to a position flush with the end surface opening of the drum 3, or even to a position located outside the drum 3 and 5cm from the end surface opening. For another example, the diversion channel 10 extends into the vacuum chamber and then branches off into a plurality of sub-channels (simultaneously communicates with a plurality of conduits), some of the sub-channels extend to the position adjacent to the opening of the end surface, some of the sub-channels extend into the drum 3, and even some of the sub-channels extend into the drum 3 and extend to different depths, without excluding that some of the sub-channels extend through the opening on the first end surface.

In one embodiment of the present application, referring to fig. 4, the first end surface of the drum 3 is provided with a detachably mounted end cover, and the end cover may have a planar structure, as shown in fig. 4 (a); or an outwardly extending gradual closing-in structure, as shown in fig. 4 (b); and an opening is provided in the end cap, preferably in the center of the end cap to facilitate placement and collection of the treatment material.

The second end surface of the drum 3 may be one of various structures shown in fig. 2, specifically, may be an opening structure with one end gradually shrinking outwards and extending outwards parallel to the axis line as shown in fig. 2 (a), may be an opening structure with one end gradually shrinking outwards as shown in fig. 2 (b), may be an opening structure with one end gradually shrinking outwards as shown in fig. 2 (c), and may be an opening structure with one end being a plane as shown in fig. 2 (d).

The diversion channel 10 may be configured as shown in fig. 2 (b) to pass through the opening and the end face of the diversion channel 10 is just at the position of the opening; or the guide passage 10 may be configured to pass through the opening and extend into the drum 3 as shown in fig. 2 (a), 2 (c) and 2 (d). Alternatively, the diversion channel 10 is configured to connect one or more ducts that extend into the interior of the drum 3. Preferably, the diversion channel 10 passes through the opening and extends to the interior of the roller 3, so that the interior of the roller 3 can obtain more uniform and sufficient plasma gas; more preferably, the diversion channel 10 is connected to one or more ducts extending into the interior of the drum 3, the ducts being of a material having less impact on material handling than the diversion channel 10. Preferably, the guide channel 10 or the guide tube is in non-sealing connection with the drum 3, in particular, a certain gap is provided between the guide channel 10 or the guide tube and the inner wall of the opening, so that the guide channel 10 or the guide tube does not synchronously rotate with the drum 3, and the drum 3 is configured as a non-fixed mounting structure capable of being taken out from the vacuum cavity, thereby facilitating the maintenance, the maintenance and the replacement thereof.

Referring to fig. 3, the pipe body of the guide channel 10 or the guide pipe extending into the drum 3 may have various structures such as a straight pipe, a bent pipe, or a shower pipe with a shower hole on the pipe wall. For example, the diversion channel 10 or the conduit may have a step-type thicker spray pipe structure with spray holes as shown in fig. 3 (a), a spray straight pipe structure with spray holes circumferentially or partially circumferentially as shown in fig. 3 (b) and 3 (d), a tubular structure with a lower slotted baffle as shown in fig. 3 (c), or a tubular structure with a lower slotted end and no baffle at the opposite end surface as shown in fig. 3 (e). Through designing the flow guide channel or the guide pipe entering the roller into a spray pipe structure with spray holes or a spout structure with grooves, the air inlet flow and the vacuum pressure in the vacuum cavity are matched and regulated, uniform and reasonable plasma distribution can be formed in the roller, and the material treatment quality is improved.

The drum 3 may have a cylindrical structure with no ridge on the inner wall as shown in the left side of fig. 5, or may have a cylindrical structure with a ridge on the inner wall as shown in the right side of fig. 5. Preferably, the inner surface of the side wall of the drum 3 along the axial direction is provided with two or more ridges 7, and each ridge 7 may be a continuous structure or an intermittent structure, and may extend through the interior of the drum 3 or may be distributed only in a part of the interior of the drum 3. The ridges 7 agitate the material as the drum rolls, making the plasma material treatment more uniform.

In one embodiment of the application, see fig. 6, the drum 3 is a circular drum, the drive assembly being arranged outside the vacuum chamber and on the opposite side to the chamber door 2, comprising a motor 6 and two rotating rollers 4. The two rotating rollers 4 are symmetrically arranged at the left and right ends of the bottom of the roller 3 and are configured to jointly support the roller 3, at least one rotating roller 4 is driven by the motor 6 to drive the roller 3 to rotate, namely the rotating roller 4 needs to penetrate out of the cavity 1 to be connected with the motor 6, and the position of the rotating roller 4 penetrating through the cavity 1 is in sealing connection with the cavity 1 so as to ensure the air tightness of the vacuum cavity.

The driving mode is shown in fig. 9, the rotating rollers 4 are in direct contact with the roller 3, and friction exists between the rotating rollers, so that when the motor 6 drives at least one rotating roller 4 to rotate, the rotating roller can drive the roller 3 to rotate;

as shown in fig. 6, in another driving mode, at least two first gears 11 are circumferentially arranged on the drum 3, at least two second gears 12 are arranged on each rotating roller 4, and the first gears 11 are meshed with the second gears 12 in a one-to-one correspondence. The two ends of the two rotating rollers 4 are fixed in the vacuum cavity through mounting seats 5 with built-in bearings, and when the motor 6 rotates, at least one rotating roller 4 is driven to rotate, so that the roller 3 is driven to rotate. For example, one of the rollers is driven to rotate by the motor 6, and the roller is driven to rotate by the other roller via a belt.

In one embodiment of the present application, suitable for various driving modes are: a stopper is provided on the roller 4 or adjacent to the roller 4, and the stopper is configured to prevent the roller 3 from moving along the axial line direction, so as to prevent the roller from moving along the axial line when rotating.

In another embodiment of the present application, the inner wall of the cavity 1 of the vacuum chamber is further provided with at least 1 roller 13, for example, as shown in fig. 7, four corners of the inner wall of the cavity 1 are respectively provided with one roller 13, and the rollers 13 are attached to the outer wall of the drum, so that the drum rotates more smoothly.

In addition to the embodiment of the above embodiment in which the motor is used to drive the roller 4 to rotate the drum 3, in another embodiment, referring to fig. 10, the roller 4 is used to support the sleeve 3, the sleeve 3 is provided with an extending member extending axially, the driving assembly further includes a bearing seat 16 (with a bearing therein) matched with the extending member on the drum, the extending member is further sleeved with an upper gear 17, an output shaft of the motor is connected with a lower gear 18, the upper gear 17 is meshed with the lower gear 18, and when the motor drives the lower gear 18 to rotate, the upper gear 17 is driven to rotate, so as to drive the drum 3 to rotate.

In a further embodiment, see fig. 11, the driving assembly also comprises a bearing seat 16 (with a bearing inside), which is different from fig. 10 in that an upper gear 17 is sleeved on the cylinder body of the cylinder 3, a lower gear 18 is sleeved on the rotating roller 4, and the motor drives the lower gear 18 or the rotating roller 4 to further drive the upper gear 17 to rotate, thereby driving the cylinder 3 to rotate.

In one embodiment of the present application, the cavity 1 of the vacuum cavity is connected with the cavity door 2 in a sealing manner, and the cavity door 2 is provided with a vacuum pumping port, preferably, the vacuum pumping port is arranged in a central area of the cavity door 2 and aligned to a position of the opening of the first end face of the roller 3, the area of the vacuum pumping port is preferably larger than the opening of the first end face of the roller 3, or the vacuum pumping port is an annular opening, and the outer diameter of the ring is larger than the opening of the first end face of the roller 3; more preferably, the side wall of the cavity 1 parallel to the axis is further provided with an auxiliary vacuum extraction opening for performing pre-evacuation or auxiliary evacuation before and during material treatment on the vacuum cavity, so that powder materials to be treated can be prevented from flying due to evacuation. Obviously, the arrangement that the vacuum pumping port on the upper chamber door 2 is opposite to the opening of the first end surface of the roller 3 is only a preferred embodiment, and the application is not limited thereto, for example, the opposite arrangement that the two positions deviate can also realize the operation of pumping the vacuum chamber and the interior of the roller 3 after the vacuum pump is connected with the vacuum pumping port.

Preferably, at least one pressure sensor is arranged in the cavity 1, the pressure sensor is configured to monitor the pressure value in the vacuum cavity in real time, and if the pressure value is detected to be higher than a preset value, the vacuum pump is started to work, and the vacuum cavity is pumped, so that the vacuum cavity maintains the target vacuum pressure of 1-10000 pascals in the whole material processing process. Preferably, the cavity 1 is further provided with a vacuum breaking air inlet for air intake, so that the treated objects are prevented from escaping from the roller 3 due to back pressure during vacuum breaking. The application is not limited to providing a vacuum breaking air inlet on the surface shell of the vacuum cavity, for example, the air inlet of the plasma source can be used as the vacuum breaking air inlet.

In this embodiment, the plasma source device 9 is disposed on the outer side of the vacuum chamber and on the opposite side of the chamber door 2, and the guide channel 10 of the plasma source device 9 penetrates the sidewall of the vacuum chamber and extends into the drum 3, preferably, the axis of the guide channel 10 is aligned with the axis of the drum 3. The excitation power frequency of the plasma source device 9 is between 1kHz and 6GHz, the power is between 10W and 30kW, the working mode is a continuous wave working mode or a pulse working mode with the frequency between 5Hz and 1MHz, and the duty ratio is between 1% and 100%. Referring to fig. 8, the flow guide channel 10 is provided with a first gas inlet 14, and the first gas inlet 14 is configured to input a working gas and a carrier gas to enable the plasma source device 9 to generate plasma; the diversion channel 10 and/or the conduit connected with the diversion channel 10 is provided with one or more second air inlets 15, the second air inlets 15 are configured to input working gas or gaseous precursor, and the design of the first air inlets and the second air inlets can meet the treatment requirement of improving the hydrophobicity of the material surface.

In this embodiment, the material of the roller 3 is metal, quartz, ceramic or sapphire; and/or the material of the diversion channel 10 is quartz, ceramic or sapphire, and the material of the conduit is quartz, ceramic, sapphire, metal or organic material with temperature resistance exceeding 100 ℃. The surface modification treatment equipment provided by the application can be universally used for modification treatment of various particle/powder materials, such as conductive materials, inorganic salt materials (ceramic powder), organic materials and temperature-sensitive or electric-sensitive materials.

In one embodiment of the present application, there is provided a method for modifying a surface of a material using the surface modifying apparatus according to any one of the embodiments, including the steps of:

opening a cavity door of the vacuum cavity, and placing the material to be treated into the roller; the specific step of placing can be to directly place the material through the opening of the first end surface, or to take off the end cover at the first end surface, then place the material and then install the end cover at the first end surface;

the vacuum cavity is broken, a cavity door of the vacuum cavity is opened, materials in the roller are taken out, and specifically, after a carrying disc is placed or a customized powder collecting tube is installed, the roller is taken out, a roller end cover is detached, and the processed materials are collected.

In a specific application of the application, taking silicon dioxide powder as an example, in order to improve the hydrophobicity of the silicon dioxide powder, placing the silicon dioxide powder to be treated into a roller, closing a vacuum cavity door, vacuumizing after setting process parameters, starting a motor, introducing argon from a first air inlet, starting a remote plasma source (Remote Plasma Source/Radical Plasma Source, called RPS for short), introducing hexamethyldisilazane steam from a second air inlet, and depositing hydrophobic (CHx) groups on the surface of the powder after the set treatment time. For remote plasma sources, the flow channel 10 may be a discharge tube or a combination of discharge tubes and conduits, and for non-remote plasma sources, the flow channel 10 may be a conduit. The discharge tube arranged on the remote plasma source can extend out of the body of the remote plasma source or not, in this case, the remote plasma source can be connected to the cavity of the vacuum cavity through a connector, so that the discharge tube is communicated with an inlet for introducing plasma on the cavity of the vacuum cavity, and the discharge tube and the inlet for introducing plasma can also be communicated through an intermediate communicating piece (such as a catheter).

The application provides a surface modification treatment device which can obtain better surface treatment quality for the material, and the surface modification treatment for the material by using plasma comprises, but is not limited to, one or more of hydrophilic treatment, hydrophobic treatment, grafting and film coating of the material by using the plasma.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The foregoing is merely illustrative of the embodiments of this application and it will be appreciated by those skilled in the art that variations and modifications may be made without departing from the principles of the application, and it is intended to cover all modifications and variations as fall within the scope of the application.

Claims

1. A surface modification treatment apparatus, comprising:

the vacuum cavity comprises a cavity body (1) and a cavity door (2) which can be opened and closed, and a vacuum extraction opening is formed in the cavity body (1) and/or the cavity door (2);

a plasma source device (9) disposed outside the vacuum chamber, configured to generate a plasma substance;

a drum (3) configured to contain a material to be treated, which is disposed within the vacuum chamber, the interior of the drum (3) being in communication with the vacuum chamber;

a drive assembly configured to drive the drum (3) in rotation;

wherein, the plasma generated by the plasma source device (9) is input into the vacuum cavity through the diversion channel (10).

2. Surface modification treatment device according to claim 1, characterized in that the end face of the drum (3) is provided with openings and/or that the drum body of the drum (3) is provided with openings with a smaller pore size than the particle size of the material to be treated, so that the interior of the drum (3) communicates with the vacuum chamber;

the inner end of the flow guide channel (10) extends into the roller (3), extends into the vacuum cavity to a region within 5cm from the roller (3), is communicated with at least one conduit extending into the roller (3), or is communicated with at least one conduit extending to a region within 5cm from the roller (3).

3. The surface modification treatment apparatus according to claim 1, wherein the drum (3) is configured to rotate about its axis or to spin off-line about a parallel line of axes;

the roller (3) is provided with an opening on at least one end face of two ends in the axial lead direction;

the diversion channel (10) satisfies any one of the following configurations:

the diversion channel (10) is a pipeline which passes through the opening and extends to the inside of the roller (3);

alternatively, the diversion channel (10) extends to a region located outside the drum (3) and at a distance of less than 5cm from the opening;

alternatively, the diversion channel (10) is connected to one or more ducts which pass through the opening and extend inside the drum (3);

alternatively, the diversion channel (10) is connected to one or more ducts extending to an area located outside the drum (3) and at a distance of less than 5cm from the opening;

alternatively, the guide channel (10) and/or the conduit extends through the drum (3).

4. A surface modifying treatment apparatus according to claim 3, characterized in that the body of the guide channel (10) and/or the conduit extending into the interior of the drum (3) is a straight pipe, a curved pipe or a shower pipe with shower holes in the wall;

the diversion channel (10) is in sealing connection with the cavity body (1) of the vacuum cavity, and the diversion channel (10) and/or the guide pipe are in non-sealing connection with the roller (3);

the roller (3) is configured as a structure that is relatively fixedly connected with the vacuum chamber, or as a non-fixedly mounted structure that can be taken out from within the vacuum chamber.

5. A surface modification treatment apparatus according to claim 3, wherein the drum (3) is provided with openings on both the first end face and the second end face at both ends in the axial direction;

the first end face is arranged opposite to the cavity door (2);

the diversion channel (10) satisfies any one of the following configurations:

the diversion channel (10) is a pipeline which passes through the opening on the second end surface and extends to the inside of the roller (3);

or, the diversion channel (10) extends to a region which is positioned outside the roller (3) and has a distance of less than 5cm from the opening on the second end surface;

alternatively, the guide channel (10) is connected to one or more ducts which pass through openings in the second end face and extend into the interior of the drum (3);

alternatively, the guide channel (10) is connected to one or more ducts extending to an area outside the drum (3) and at a distance of less than 5cm from the opening on the second end face;

alternatively, the diversion channel (10) and/or conduit passes through openings on the second and first end faces.

6. The surface modification treatment equipment according to claim 5, wherein a vacuum extraction opening is provided on the chamber door (2), and the vacuum extraction opening on the chamber door (2) is arranged opposite to the opening of the drum (3) on the first end surface;

and/or at least one of the first end face and the second end face is configured as a removable end cap structure with respect to the drum (3).

7. A surface modifying treatment apparatus as claimed in claim 3, wherein the flow guide channel (10) is provided with a first gas inlet (14), the first gas inlet (14) being configured to input a working gas and a carrier gas to cause the plasma source device (9) to generate a plasma;

the diversion channel (10) and/or the conduit connected with the diversion channel (10) are provided with one or more second air inlets (15), and the second air inlets (15) are configured to input working gas or gaseous precursor.

8. Surface modification treatment plant according to claim 1, characterized in that the inner surface of the side wall of the drum (3) in the direction of the axis is provided with ridges (7).

9. Surface modification treatment plant according to claim 1, characterized in that the cavity (1) is provided with a vacuum breaking air inlet for air intake;

and/or an auxiliary vacuum extraction opening is arranged on the cavity (1).

10. The surface modification treatment apparatus according to claim 1, wherein the drum (3) is a circular drum, the drive assembly comprising a motor (6) and two rollers (4), the two rollers (4) being configured to jointly carry the drum (3);

wherein at least one roller (4) is driven by the motor (6) to rotate the drum (3), or the motor (6) is configured to drive the drum (3) to rotate through a bearing and gear structure.

11. Surface modification treatment apparatus according to claim 10, characterized in that a stop is provided on the roller (4) or adjacent to the roller (4), the stop being configured to prevent the drum (3) from moving in the direction of the axis.

12. Surface modifying treatment apparatus according to claim 10, characterized in that the drum (3) is provided with a first gear (11) circumferentially, at least one of the rotating rollers (4) is provided with a second gear (12) in a sleeved manner, the first gear (11) being in engagement with the second gear (12).

13. The surface modification treatment apparatus according to claim 1, wherein the material of the drum (3) is metal, quartz, ceramic or sapphire; and/or the material of the diversion channel (10) is quartz, ceramic or sapphire.

14. The surface modification treatment apparatus according to any one of claims 1 to 13, wherein the excitation power supply frequency of the plasma source device (9) is between 1kHz and 6GHz, the power thereof is between 10W and 30kW, and the operation mode thereof is a continuous wave operation mode or a pulse operation mode with a frequency of 5Hz to 1 MHz.

15. A method of modifying a surface of a material based on the surface modification treatment apparatus according to any one of claims 1 to 14, comprising the steps of: