CN116625985A - High-precision spectrum calibration method based on double tunable lasers and application system thereof - Google Patents
High-precision spectrum calibration method based on double tunable lasers and application system thereof Download PDFInfo
- Publication number
- CN116625985A CN116625985A CN202310661320.0A CN202310661320A CN116625985A CN 116625985 A CN116625985 A CN 116625985A CN 202310661320 A CN202310661320 A CN 202310661320A CN 116625985 A CN116625985 A CN 116625985A
- Authority
- CN
- China
- Prior art keywords
- laser
- wavelength
- tunable
- precision
- pixel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 41
- 230000003595 spectral effect Effects 0.000 claims abstract description 58
- 238000005316 response function Methods 0.000 claims abstract description 5
- 230000004044 response Effects 0.000 claims description 39
- 238000005315 distribution function Methods 0.000 claims description 21
- 238000012937 correction Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 7
- 230000009977 dual effect Effects 0.000 claims description 7
- 239000005338 frosted glass Substances 0.000 claims description 6
- 238000005286 illumination Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000701 chemical imaging Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/127—Calibration; base line adjustment; drift compensation
- G01N2201/12746—Calibration values determination
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
Landscapes
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention relates to a high-precision spectrum calibration method based on a double-tunable laser and a system suitable for the same, wherein the high-precision spectrum calibration method comprises the following steps: step 1: establishing a function relation of pixel and wavelength; step 2: a spectral response function is established. The high-precision spectrum calibration method based on the double tunable lasers uses the tunable lasers to perform high-precision spectrum calibration. The tunable laser is used as an ideal monochromatic spectrum scaling light source and has the advantages of narrow bandwidth, high power, low wavelength uncertainty and the like. The high-precision spectrum calibration method based on the double tunable lasers adopts a method of combining high-precision discrete point measurement with wide-area continuous spectrum scanning, can realize sub-pixel level spectrum calibration, and has calibration precision superior to 0.005nm.
Description
Technical Field
The invention relates to the technical field of spectrum calibration, in particular to a high-precision spectrum calibration method based on a double-tunable laser and a system suitable for the same.
Background
The spectrum calibration is one of important preconditions of remote sensing quantification, and can ensure that the spectrum data measured by a remote sensing instrument has high precision, high reliability and repeatability, thereby realizing accurate remote sensing data processing and application. Spectral scaling can be divided into two parts: a pel-wavelength function and spectral responsivity scaling is established. There are typically three spectral scaling schemes including a line spectrum lamp spectral scaling method, a monochromatic collimated light spectral scaling method, and a tunable laser spectral scaling method. For line spectrum lamps, a limited number of characteristic peaks are only suitable for establishing a wavelength-pel function, and spectral responsivity calibration is usually carried out by a monochromatic collimated light spectrum calibration method and a tunable laser spectrum calibration method.
The monochromatic collimated light spectrum calibration method can realize continuous monochromatic light beam output by using the monochromator as a light source, and can acquire a spectrum response distribution function of a complete wave band of the spectrometer. The monochromator is a spectrometer for splitting light by a dispersive element, and can separate a beam of complex-color light into quasi-monochromatic light with extremely narrow wavelength bandwidth. Monochromators are divided into two main types of prism monochromators and grating monochromators according to different dispersive elements. The spectral curve calibration of the monochromator is done by means of a line spectral lamp with known wavelength. The light emitted by the light source uniformly illuminates the entrance slit of the monochromator, and is emitted at the secondary slit after passing through the prism/grating and other light splitting elements, the light emitted from the emission slit is quasi-monochromatic light under the light splitting action of the dispersion element, and the continuous output of the light from short wave to long wave can be realized by rotating the dispersion element. The spectrum calibration method of the monochromator can not only establish the corresponding relation between the wavelength and the pixels, but also calculate the spectrum response distribution function of each channel of the spectrum instrument. The accuracy of monochromator spectral calibration is limited by the following factors:
a) The stability of the light source determines the stability of the spectral line, and influences the position and intensity of the spectral line, thereby influencing the accuracy and precision of the spectral line.
b) The optical system of the monochromator comprises an incident slit, a dispersive element, an output slit and the like, and the quality of the optical system can influence the transmission and separation of light, thereby influencing the accuracy and precision of spectral lines.
c) The dispersion ratio of the dispersive element affects the degree of separation and resolution of the spectral lines and thus the accuracy and precision of the spectral lines.
The above reasons all affect the calibration precision of the monochromator, so the high-precision spectrum calibration requirement is not satisfied.
Because the line spectrum lamp only contains a limited number of discrete characteristic spectral lines in the band range, the line spectrum lamp is more suitable for a spectrum instrument with precisely known relation between pixel serial numbers and wavelengths, and the monochromator can output continuous monochromatic light, but has the problem of limitation of output energy and wavelength precision.
Disclosure of Invention
The invention aims to solve the technical problems in the prior art and provides a high-precision spectrum calibration method based on a double-tunable laser and a system suitable for the same.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a high-precision spectrum calibration method based on double tunable lasers comprises the following steps:
step 1: establishing a function relation of pixel and wavelength;
step 2: a spectral response function is established.
In the above technical solution, the step 1 specifically includes: the tunable solid laser and/or the tunable liquid laser are used for precisely positioning the wavelength of the discrete point, and in the technical scheme, the step 1 specifically comprises the following steps:
and correcting the dark signal by using a dark reference column of the detector, and then carrying out Gaussian fitting on the response effective signal along with a pixel change curve under the nominal wavelength of each laser to obtain the response center pixel position corresponding to the nominal wavelength of each laser.
In the above technical solution, the step 2 specifically includes: and (3) performing coarse scanning by using a tunable semiconductor laser, establishing a pixel-by-pixel spectral response distribution function, and performing wavelength correction according to the precisely positioned spectral information to obtain a spectral response function.
In the above technical solution, the step 2 specifically includes: calculating the accurate wavelength of each quasi-monochromatic laser by using a pixel-wavelength function; the accurate wavelength calibrated by the tunable laser is used for replacing the nominal wavelength of the laser, so that the wavelength correction of the tunable laser for outputting monochromatic laser is completed;
and carrying out integral time correction on the calibrated data after the wavelength correction to obtain the relative light intensity correction of the incident monochromatic light, and obtaining a spectral response distribution function of response effective signals of each pixel along with the change of the wavelength.
A system suitable for a high-precision spectrum calibration method based on a double-tunable laser is provided with the following components in turn in the direction of a light path: the tunable laser, the integrating sphere, the laser speckle eliminating device, the collimator and the spectrum radiance meter;
the adjustable laser outputs a series of monochromatic light illumination instruments with precisely known wavelengths, the central positions of response pixels corresponding to the wavelengths of the adjustable laser are obtained through fitting according to output signals of instrument detectors, and a relation formula between the pixel positions and the wavelengths is obtained through polynomial fitting;
the tunable laser outputs high-resolution monochromatic frequency doubling light, the high-resolution monochromatic frequency doubling light enters the integrating sphere through optical fiber coupling, and the monochromatic laser output by the integrating sphere is collimated into parallel monochromatic laser through the collimator; after the parallel monochromatic laser is subjected to speckle removal treatment by the laser speckle removing device, the parallel monochromatic laser enters a telescope system through a scanning mirror to uniformly illuminate the spectrum radiance meter, and finally is converged on a focal plane of a detector through a spectrum imaging system to finish spectrum detection of single laser wavelength.
In the above technical scheme, the laser speckle removing device comprises frosted glass and an integrating sphere oscillating motor, and the laser speckle removing device performs speckle removing treatment by rotating the frosted glass and the integrating sphere oscillating motor to oscillate the integrating sphere.
In the above technical solution, the integrating sphere opening is located at a focal plane of the collimator.
The invention has the following beneficial effects:
the high-precision spectrum calibration method based on the double tunable lasers uses the tunable lasers to perform high-precision spectrum calibration. The tunable laser is used as an ideal monochromatic spectrum scaling light source and has the advantages of narrow bandwidth, high power, low wavelength uncertainty and the like. The high-precision spectrum calibration method based on the double tunable lasers adopts a method of combining high-precision discrete point measurement with wide-area continuous spectrum scanning, can realize sub-pixel level spectrum calibration, and has calibration precision superior to 0.005nm.
Drawings
The invention is described in further detail below with reference to the drawings and the detailed description.
FIG. 1 is a flow chart of the steps of the high-precision spectral calibration method based on the dual tunable lasers of the present invention.
FIG. 2 is a schematic representation of the response curve of an instrument when a monochromatic laser light of nominal wavelength 350nm is incident.
FIG. 3 is a graph showing the response of the instrument when a monochromatic laser light with a nominal wavelength of 450nm is incident.
Fig. 4 is a graph showing the deviation of the nominal wavelength of the NT242 tunable laser.
FIG. 5 is a graph showing the spectral response distribution function of detection channel 1 with pixel number 150.
FIG. 6 is a graph showing the spectral response distribution function of detection channel 1 pixel number 350.
FIG. 7 is a graph showing the spectral response distribution function of detection channel 2 with pixel number 150.
FIG. 8 is a graph showing the spectral response distribution function of detection channel 2 pixel number 350.
Fig. 9 is a schematic diagram of spectral response distribution function of polarization channel pixel number 50.
Fig. 10 is a schematic diagram of spectral response distribution function of polarization channel pixel number 150.
Detailed Description
The invention is characterized in that:
the image information obtained by the hyperspectral detector is recorded in the detector pixels, the functional relation of the pixel wavelength is that the spectral information of the known light source is transmitted to the detector pixels, the energy value recorded by each pixel is related to the spectral response distribution function, and each wave band corresponds to a central wavelength and a certain wave band width. The function relation of the pixel wavelength of the ultraviolet hyperspectral ozone profile detector is established, and the spectral response distribution function is established to be the whole content of spectral calibration.
The tunable solid-dye laser can output quasi-monochromatic light with high stability and high accuracy, and can not scan pixel by pixel continuously, so that the tunable solid-dye laser is only suitable for high-precision wavelength pixel fine calibration of discrete points, and establishes a wavelength pixel relationship; the semiconductor laser has higher output power, can realize a continuous tuning range of wider wavelength, but has insufficient spectrum positioning precision, so the invention proposes a scheme for completing high-precision spectrum calibration by adopting a coarse scanning, fine positioning and interpolation verification method by respectively utilizing a solid-dye laser and a semiconductor laser.
The present invention will be described in detail with reference to the accompanying drawings.
In one embodiment, the calibration flow of the high-precision spectrum calibration method based on the double tunable lasers is shown in fig. 1. The invention relates to a high-precision spectrum calibration method based on a double-tunable laser, which mainly comprises two parts:
1) Establishing a pixel-wavelength functional relation: the characteristics of high precision, high stability and the like of the tunable solid laser and the tunable liquid laser are utilized to carry out the precise wavelength positioning of a large number of discrete points, and the tuning establishes the function relation between the pixel and the wavelength;
2) Establishing a spectral response distribution function: coarse scanning is performed by utilizing the characteristic of high-efficiency response of the tunable semiconductor laser, a pixel-by-pixel spectral response distribution function is established, and then wavelength correction is performed according to the precisely positioned spectral information, so that a high-precision spectral response distribution function is obtained.
In a system suitable for the high-precision spectrum calibration method based on the double tunable lasers, the ground wavelength calibration system takes the T & D-scan tunable lasers as calibration light sources, harmonic waves are coupled through a preposed light path, and when the harmonic waves are converged at an entrance slit after being folded by an instrument scanning mirror, the diameter of a focused light spot cannot be full of the entrance slit of an instrument. Underfill of the entrance slit causes the light source to have an uneven spot shape after passing through the instrument dispersion system, resulting in a deviation between the wavelength of the quasi-monochromatic light actually output by the laser and the wavelength value received at the receiving surface of the detector. The ground wavelength calibration device is designed as follows, and mainly comprises an ultraviolet/visible wave band T & D-scan tunable laser with a built-in wavemeter, an integrating sphere, a laser speckle eliminating device, a collimator and a spectrum radiance meter. A series of monochromatic light illumination instruments with precisely known wavelengths are output by using a T & D-scan adjustable laser, the central position of a response pixel corresponding to the wavelength of the adjustable laser is obtained by fitting according to output signals of an instrument detector, and a relation formula of the pixel position (serial number) and the wavelength is further obtained by polynomial fitting. The tunable laser outputs high-resolution monochromatic frequency doubling light, the monochromatic frequency doubling light enters the integrating sphere through optical fiber coupling, an opening of the integrating sphere is positioned at a focal plane of the collimator, and monochromatic laser output by the integrating sphere is collimated into parallel monochromatic laser through the collimator. Because the speckle phenomenon of laser can cause the fluctuation of spectrum calibration data, a laser speckle eliminating device is added between an integrating sphere and a parallel light pipe, the laser speckle eliminating device consists of rotary frosted glass and an integrating sphere oscillating motor, and speckle eliminating treatment is carried out by a method of oscillating the integrating sphere by the rotary frosted glass and the integrating sphere oscillating motor. The parallel monochromatic laser subjected to speckle removal treatment by the laser speckle removing device enters a slit of a uniform illumination spectrometer after entering a telescope system through a scanning mirror, and finally is converged on a focal plane of a detector through a spectral imaging system to finish spectral detection of single laser wavelength. The spectrum radiance meter is used for calibrating the relative spectrum radiance distribution of the collimated monochromatic laser beam and is used for eliminating the influence of the spectrum capacity distribution of the tunable laser system on spectrum calibration.
In another embodiment, to achieve high resolution fine full operating band spectral response distribution function calibration, the present invention uses a NT242 tunable semiconductor laser from EKSPLA corporation of litterabout to scan to obtain the spectral radiant energy distribution of each pixel of the detector. The NT242 tunable semiconductor laser outputs monochromatic laser, the spectral resolution in the wave band of 290 nm-500 nm is better than 0.08nm, the minimum wavelength adjustment compensation is smaller than 0.03nm, and the wavelength precision is about 0.2nm. The NT242 tunable semiconductor laser is simple to operate, internal elements are not required to be regulated when the wave band is replaced, wavelength scanning between 290nm and 500nm can be realized only through software control, and the characteristic of controllable continuous scanning of the NT242 tunable semiconductor laser software is utilized to realize the coarse calibration of the spectral response distribution function.
Since the NT242 tunable semiconductor laser outputs quasi-monochromatic laser light with a nominal wavelength accuracy of about 0.2nm, reconstruction of its output result is required. Firstly, correcting dark signals by using a dark reference column of a detector, and then carrying out Gaussian fitting on response effective signals along with pixel change curves under the nominal wavelength of each laser to obtain a response center pixel serial number corresponding to the nominal wavelength of each laser. The exact wavelength of each quasi-monochromatic laser can then be calculated using the pixel-wavelength function. And replacing the nominal wavelength of the laser with the accurate wavelength calibrated by the T & D-scan tunable laser, namely finishing the wavelength correction of the monochromatic laser output by the NT242 tunable laser. And (3) carrying out integral time correction on the calibrated data after the wavelength correction, and utilizing an integrating sphere to monitor the detector to obtain the relative light intensity correction of the incident monochromatic light, so as to obtain a change curve of response effective signals of each pixel of the detector along with the wavelength, namely a spectral response distribution function.
In yet another embodiment, the dual tunable laser-based high precision spectral calibration method of the present invention is used with an FY-3 (06-star) ozone profile finder and verifies that the method is viable. In the subsequent test, the spectral resolution and the signal to noise ratio of the optical fiber are obviously improved. The response effective signal of the detection channel of the ultraviolet hyperspectral ozone profile detector changes along with the change curve of the pixel serial number and the fitting result when the nominal wavelength of the typical laser is 350nm and 450nm, as shown in figures 2 and 3. Fitting to obtain response center pixel serial numbers 258.086 and 243.006, substituting the response center pixel serial numbers into spectrum calibration formulas of the detection channel 1 and the detection channel 2 respectively, and calculating to obtain accurate wavelengths 349.86nm and 449.75nm. The difference curve of the nominal wavelength of the NT242 tunable laser in the 290-500nm band versus the calculated exact wavelength is shown in fig. 4. Finally, the calibrated ultraviolet hyperspectral ozone profile detector detects the spectral response distribution function curves of typical pixels of the channels 1 and 2 and the polarization channel, as shown in fig. 5-10.
The high-precision spectrum calibration method based on the double tunable lasers uses the tunable lasers to perform high-precision spectrum calibration. The tunable laser is used as an ideal monochromatic spectrum scaling light source and has the advantages of narrow bandwidth, high power, low wavelength uncertainty and the like. The high-precision spectrum calibration method based on the double tunable lasers adopts a method of combining high-precision discrete point measurement with wide-area continuous spectrum scanning, can realize sub-pixel level spectrum calibration, and has calibration precision superior to 0.005nm.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (8)
1. The high-precision spectrum calibration method based on the double tunable lasers is characterized by comprising the following steps of:
step 1: establishing a function relation of pixel and wavelength;
step 2: a spectral response function is established.
2. The dual tunable laser-based high precision spectral calibration method according to claim 1, wherein the step 1 specifically comprises:
and (3) utilizing a tunable solid laser and/or a tunable liquid laser to carry out wavelength fine positioning of discrete points, and tuning to establish a pixel-wavelength functional relation.
3. The dual tunable laser-based high precision spectral calibration method according to claim 2, wherein the step 1 specifically comprises:
and correcting the dark signal by using a dark reference column of the detector, and then carrying out Gaussian fitting on the response effective signal along with a pixel change curve under the nominal wavelength of each laser to obtain the response center pixel position corresponding to the nominal wavelength of each laser.
4. A dual tunable laser based high precision spectral scaling method according to any of claims 1-3, wherein step 2 comprises in particular:
and (3) performing coarse scanning by using a tunable semiconductor laser, establishing a pixel-by-pixel spectral response distribution function, and performing wavelength correction according to the precisely positioned spectral information to obtain a spectral response function.
5. The method for high-precision spectral calibration based on dual tunable lasers according to claim 4, wherein said step 2 specifically comprises:
calculating the accurate wavelength of each quasi-monochromatic laser by using a pixel-wavelength function; the accurate wavelength calibrated by the tunable laser is used for replacing the nominal wavelength of the laser, so that the wavelength correction of the tunable laser for outputting monochromatic laser is completed;
and carrying out integral time correction on the calibrated data after the wavelength correction to obtain the relative light intensity correction of the incident monochromatic light, and obtaining a spectral response distribution function of response effective signals of each pixel along with the change of the wavelength.
6. The system suitable for the high-precision spectrum calibration method based on the double tunable lasers is characterized in that: the tunable laser, the integrating sphere, the laser speckle eliminating device, the collimator and the spectrum radiance meter;
the adjustable laser outputs a series of monochromatic light illumination instruments with precisely known wavelengths, the central positions of response pixels corresponding to the wavelengths of the adjustable laser are obtained through fitting according to output signals of instrument detectors, and a relation formula between the pixel positions and the wavelengths is obtained through polynomial fitting;
the tunable laser outputs high-resolution monochromatic frequency doubling light, the high-resolution monochromatic frequency doubling light enters the integrating sphere through optical fiber coupling, and the monochromatic laser output by the integrating sphere is collimated into parallel monochromatic laser through the collimator; after the parallel monochromatic laser is subjected to speckle removal treatment by the laser speckle removing device, the parallel monochromatic laser enters a telescope system through a scanning mirror to uniformly illuminate the spectrum radiance meter, and finally is converged on a focal plane of a detector through a spectrum imaging system to finish spectrum detection of single laser wavelength.
7. The system for high-precision spectral scaling method based on double tunable lasers according to claim 6, wherein said laser speckle removing means comprises a frosted glass and an integrating sphere oscillating motor, and said speckle removing process is performed by rotating said frosted glass and said integrating sphere oscillating motor to oscillate said integrating sphere.
8. The system for high precision spectral scaling method based on dual tunable lasers of claim 6, wherein said integrating sphere opening is located at the focal plane of said collimator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310661320.0A CN116625985A (en) | 2023-06-06 | 2023-06-06 | High-precision spectrum calibration method based on double tunable lasers and application system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310661320.0A CN116625985A (en) | 2023-06-06 | 2023-06-06 | High-precision spectrum calibration method based on double tunable lasers and application system thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116625985A true CN116625985A (en) | 2023-08-22 |
Family
ID=87616916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310661320.0A Pending CN116625985A (en) | 2023-06-06 | 2023-06-06 | High-precision spectrum calibration method based on double tunable lasers and application system thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116625985A (en) |
-
2023
- 2023-06-06 CN CN202310661320.0A patent/CN116625985A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7876456B2 (en) | Intensity compensation for interchangeable chromatic point sensor components | |
| US6441900B1 (en) | Method and apparatus for calibrating an optical spectrum analyzer in wavelength | |
| US5059027A (en) | Spatial heterodyne spectrometer and method | |
| EP0800066A2 (en) | Precise calibration of wavelengths in a spectrometer | |
| TW410494B (en) | Wavelength system for an excimer laser | |
| JP2006138874A (en) | Double optical pass double-etalon spectroscope | |
| JP3774630B2 (en) | Optical device and optical spectrum analyzer | |
| US7215422B2 (en) | Assembly and method for wavelength calibration in an echelle spectrometer | |
| CN107949776B (en) | Static Fourier transform spectrometer | |
| CN102538966A (en) | Short wave infrared laboratory spectrum calibration and correction method for hyper spectral imager | |
| CN114739507B (en) | Stray light correction method and measuring device for hyperspectral radiance instrument | |
| CN109855541B (en) | Air refractive index self-calibration system and method based on optical frequency comb | |
| US7450225B1 (en) | Correction of optical metrology for focus offset | |
| CA3039461C (en) | Apparatus and method for calibrating measuring instruments | |
| EP1120637A2 (en) | Method and means for calibrating a grating monochromator | |
| EP0084392B1 (en) | Spectrophotometer | |
| JP2010048640A (en) | Absolute spectroradiometer | |
| Bonaccini et al. | High resolution solar bidimensional spectroscopy with a universal birefringent filter in tandem with a Fabry-Perot interferometer-Tests and experimental results | |
| CN116625985A (en) | High-precision spectrum calibration method based on double tunable lasers and application system thereof | |
| CN109358036B (en) | Laser-induced breakdown spectroscopy signal error correction system and method | |
| CN108489609B (en) | A kind of wide range bearing calibration of FTIR measurement photodetector response | |
| Sandstrom | Measurements of beam characteristics relevant to DUV microlithography on a KrF excimer laser | |
| US6304324B1 (en) | Method of calculating optical frequency spectrum | |
| JP4629910B2 (en) | Optical spectrum detection method, optical spectrum detection program using the same, optical spectrum detection device, spectroscopic device, and laser device | |
| CN113324665B (en) | Wavemeter, method for obtaining parameters of wavemeter and method for on-line calibration |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |