CN116625410A - Hemispherical resonator gyro excitation electrode gain calibration method - Google Patents
Hemispherical resonator gyro excitation electrode gain calibration method Download PDFInfo
- Publication number
- CN116625410A CN116625410A CN202310889269.9A CN202310889269A CN116625410A CN 116625410 A CN116625410 A CN 116625410A CN 202310889269 A CN202310889269 A CN 202310889269A CN 116625410 A CN116625410 A CN 116625410A
- Authority
- CN
- China
- Prior art keywords
- electrode
- excitation
- gain
- hemispherical resonator
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005284 excitation Effects 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000000284 resting effect Effects 0.000 claims abstract description 4
- 230000000087 stabilizing effect Effects 0.000 claims description 12
- 238000004378 air conditioning Methods 0.000 abstract 3
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005865 ionizing radiation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention relates to the technical field of gyroscopes, in particular to a hemispherical resonator gyroscope excitation electrode gain calibration method, which comprises the following steps: resting hemispherical resonant gyroscope on a test plate, applying the same stable amplitude voltage to an X electrode and a Y electrode, and recordingA kind of electronic device with high-pressure air-conditioning systemThe method comprises the steps of carrying out a first treatment on the surface of the Gain increase of Y electrodeRecordingA kind of electronic device with high-pressure air-conditioning systemThe method comprises the steps of carrying out a first treatment on the surface of the According to、、A kind of electronic device with high-pressure air-conditioning systemCalculating the resultant force direction angle of stable amplitude force of hemispherical resonator gyroscopeThe method comprises the steps of carrying out a first treatment on the surface of the Calculating gain error of exciting electrode of hemispherical resonator gyroscopeAnd adjusting the output voltage of the Y electrode to make the gain calibration of the X electrode and the Y electrode consistent. The method solves the problem of inconsistent gain of the excitation electrode, and improves the precision and stability of the hemispherical resonator gyroscope.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a hemispherical resonator gyroscope excitation electrode gain calibration method.
Background
The hemispherical resonant gyroscope is a novel high-precision gyroscope with great development prospect, and has the advantages that: the hemispherical resonator gyro has the advantages of small volume, high precision, low power consumption, high reliability, short starting time, simple mechanical component structure, large working temperature range, strong ionizing radiation resistance, insensitivity to linear overload, good stability when power is off, realization of automatic production when manufacturing the hemispherical resonator gyro, and the like, and has longer service life. The related data show that: hemispherical resonator gyroscopes can operate continuously for more than 15 years and maintain the required performance, and are therefore recognized as the most long-lived gyroscopes.
The hemispherical resonator gyro is controlled by applying electrostatic force to the harmonic oscillator through at least a pair of excitation electrodes with a space distance of 45 degrees, and the electrostatic force is applied to the harmonic oscillator by virtue of a plate capacitor formed by the coating of the excitation electrodes and the harmonic oscillator. Because of process limitations, the capacitance spacing of the two excitation electrodes tends to be inconsistent, and there is a maximum error of 0.1%, which approximately causes a gain error of 1000PPM, which affects the accuracy of the hemispherical resonator gyroscope in applying electrostatic force to the harmonic oscillator, and generates additional drift, which affects the accuracy and stability of the hemispherical resonator gyroscope if not calibrated.
Disclosure of Invention
The invention aims to provide a hemispherical resonant gyroscope excitation electrode gain calibration method, which is characterized in that the gain of one excitation electrode is changed, the standing wave binding effect enables the gyroscope vibration mode to be bound at different vibration mode angles, the gain of the excitation electrode is calculated according to the deviation of the bound vibration mode angles, and then the output voltage of the excitation electrode is calibrated according to the calculated gain of the excitation electrode, so that the problem of inconsistent gain of the excitation electrode is solved.
The invention is realized by the following technical scheme:
a hemispherical resonator gyro excitation electrode gain calibration method comprises the following steps:
the first step: resting the hemispherical resonator gyroscope on a test flat plate, applying the same amplitude stabilizing voltage to an excitation X electrode and an excitation Y electrode, and recording the resultant force of amplitude stabilizing force of the hemispherical resonator gyroscope after the vibration mode angle output by the hemispherical resonator gyroscope reaches a steady-state positionVibration direction angle of vibration mode antinode>；
And a second step of: gain increase of exciting Y electrodeRecording gain amplitude stabilizing force resultant force +.A. of the hemispherical resonator gyroscope after the vibration angle output by the hemispherical resonator gyroscope reaches a steady-state position>Gain vibration mode antinode vibration direction angle +.>；
And a third step of: combining the stable amplitude force and the resultant force of the hemispherical resonator gyroscopes recorded in the first step and the second stepVibration direction angle of vibration mode antinode>Gain amplitude stabilizing force resultant force->Gain vibration mode antinode vibration direction angle +.>Substituting into the formula (1), calculating the steady force resultant force direction angle of the hemispherical resonator gyro>；
（1）；
Fourth step: calculating the gain error of the excitation electrode of the hemispherical resonator gyroscope according to the formula (2) and the formula (3)And multiplying the output voltage of the excitation Y electrode by (+)>) Doubling the gain calibration of the excitation X electrode and the excitation Y electrode;
（2）
（3）；
wherein:indicating the angle of departure between the direction of the steady force resultant and the angular line of the two excitation electrodes.
And optimally, the time from the application of the same stable amplitude voltage to the excitation X electrode and the excitation Y electrode to the arrival of the vibration mode angle output by the hemispherical resonator gyro at the steady-state position is 10 minutes.
Further, in the third step, the output voltage of the excitation Y electrode is increased by (1 +) The excitation Y electrode gain is increased in a multiplied way>。
The invention has the beneficial effects that:
according to the invention, the gain of one excitation electrode is changed, the standing wave binding effect binds the vibration mode of the gyroscope at different vibration mode angles, the gain of the excitation electrode is calculated according to the deviation of the bound vibration mode angles, and then the output voltage of the excitation electrode is calibrated according to the calculated gain of the excitation electrode, so that the problem of inconsistent gain of the excitation electrode is solved, the extra drift of the precision of applying electrostatic force to the harmonic oscillator by the hemispherical resonator gyroscope is prevented, and the precision and stability of the hemispherical resonator gyroscope are improved.
Drawings
FIG. 1 is a schematic diagram of the hemispherical resonator gyro mode location of the present invention.
Detailed Description
A hemispherical resonator gyro excitation electrode gain calibration method comprises the following steps:
the first step: resting the hemispherical resonator gyroscope on a test flat plate, applying the same amplitude stabilizing voltage to an excitation X electrode and an excitation Y electrode, and recording the resultant force of amplitude stabilizing force of the hemispherical resonator gyroscope after the vibration mode angle output by the hemispherical resonator gyroscope reaches a steady-state positionVibration direction angle of vibration mode antinode>；
And a second step of: gain increase of exciting Y electrodeRecording half after the vibration angle output by the hemispherical resonant gyroscope reaches a steady-state positionGain amplitude stabilizing force resultant force of ball resonance gyro>Gain vibration mode antinode vibration direction angle +.>；
And a third step of: combining the stable amplitude force and the resultant force of the hemispherical resonator gyroscopes recorded in the first step and the second stepVibration direction angle of vibration mode antinode>Gain amplitude stabilizing force resultant force->Gain vibration mode antinode vibration direction angle +.>Substituting into the formula (1), calculating the steady force resultant force direction angle of the hemispherical resonator gyro>；
（1）；
Fourth step: calculating the gain error of the excitation electrode of the hemispherical resonator gyroscope according to the formula (2) and the formula (3)And multiplying the output voltage of the excitation Y electrode by (+)>) Doubling the gain calibration of the excitation X electrode and the excitation Y electrode;
（2）；
（3）；
wherein:indicating the angle of departure between the direction of the steady force resultant and the angular line of the two excitation electrodes.
The exciting X electrode and the exciting Y electrode of the hemispherical resonator gyroscope are a pair of exciting electrodes which are 45 degrees apart, and the gain of the exciting X electrode is assumed to beThe gain of the excitation Y electrode is +.>The gain of the excitation X electrode is +>Gain with excitation Y electrodeThe relation between the two is shown in the formula (4):
（4）；
when the same constant amplitude excitation voltage is applied to the two excitation electrodes, if the gains of the two excitation electrodes are identicalIs 0. As known from the vector synthesis rule, the constant amplitude force resultant force of the hemispherical resonator gyro is +.>If the gyroscope has no drift and external input angular velocity, the vibration mode antinode is bound in the direction of resultant force of stable amplitude force, which is called standing wave binding effect. When the gains of the two excitation electrodes are inconsistent, a deviation angle of the resultant force direction of the steady amplitude force and the angular line of the two excitation electrodes can appear>The deviation angle +.>And->The relation of (2) is represented by the following formula (5):
（5）；
in practical situations, there is generally an input angular velocity from the outside, such as the rotation angular velocity of the earth and the drift of the hemispherical resonator gyro itself, the standing wave is not in the direction of the resultant force of the steady amplitude force in the steady state, but generates an offset, as shown in fig. 1. This is because the gyro drift and the coriolis force standing wave precession caused by the external input angular velocity until the projected components of the steady-amplitude force resultant force in the gyro drift and coriolis force acting directions are equal and opposite. Detection electrodeDetection electrode->The position of the standing wave, namely the vibration mode angle, can be output in real time through detecting the vibration signal and through a signal demodulation module, and the position is generally in the detection electrode +_ in the vibration direction of the standing wave>The vibration mode angle is represented by 0 DEG, and the increase of the vibration mode angle is defined as anticlockwise rotation, the vibration mode angle corresponding to the excitation electrode angle line of the excitation electrode X and the excitation electrode Y in FIG. 1 is 112.5 DEG, because the coriolis force and the gyro drift action direction and the vibration mode antinode vibration direction are constantly different by 90 DEG, which is determined by the working principle of the hemispherical resonator gyro.
The relationship between these several variables is shown in equation (6):
（6）；
wherein:is the sum of the coriolis force and the drift force;
also according to formula (7), formula (6) may be rewritten as formula (8):
（7）；
（8）；
in (8)、/>For unknown quantity->And->If the amount is known, the +.>The +.>。
Actively increasing the gain of the stimulated Y electrode is knownThis can be achieved by increasing the output voltage of the excitation Y electrode, and a new relational expression (9) can be obtained after the mode shape is stabilized:
（9）；
the root of formula (1) can be obtained from formulas (8) and (9)Can be calculated according to the formula (1)The excitation electrode gain error of the hemispherical resonator gyro can be calculated according to the formula (2) and the formula (3)>Then, the output voltage of the excitation Y electrode is changed, and the output voltage of the excitation Y electrode is multiplied by (+)>) The gain calibration of the excitation X electrode and the excitation Y electrode is consistent, the problem that the gains of the excitation X electrode and the excitation Y electrode are inconsistent is solved, and the extra drift generated by the precision of applying electrostatic force to the harmonic oscillator by the hemispherical resonator gyroscope is prevented, so that the precision and the stability of the hemispherical resonator gyroscope are improved.
Optimally, the time from when the same stable amplitude voltage is applied to the excitation X electrode and the excitation Y electrode to when the vibration mode angle output by the hemispherical resonator gyro reaches the steady-state position is 10 minutes, after the same stable amplitude voltage is applied to the excitation X electrode and the excitation Y electrode, a period of time is required to wait until the vibration mode angle output by the hemispherical resonator gyro reaches the steady-state position, so that recorded data can be more accurate, and finally, the calibration is more accurate, thereby ensuring the precision and the stability of the hemispherical resonator gyro.
Further, in the third step, the output voltage of the excitation Y electrode is increased by (1 +) The excitation Y electrode gain is increased in a multiplied way>The mode enables the operation to be simpler and more direct, is more convenient for engineering realization, and has stronger engineering application value.
In summary, according to the hemispherical resonator gyro excitation electrode gain calibration method provided by the invention, the gain of one excitation electrode is calculated by changing the gain of one excitation electrode and the deviation of the bound vibration mode angle, so that the output voltage of the excitation electrode is calibrated, the problem of inconsistent excitation electrode gain is solved, the precision and stability of the hemispherical resonator gyro are improved, the engineering realization is facilitated, and the hemispherical resonator gyro has a relatively high engineering application value.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. The hemispherical resonator gyro excitation electrode gain calibration method is characterized by comprising the following steps of:
the first step: resting the hemispherical resonator gyroscope on a test flat plate, applying the same amplitude stabilizing voltage to an excitation X electrode and an excitation Y electrode, and recording the resultant force of amplitude stabilizing force of the hemispherical resonator gyroscope after the vibration mode angle output by the hemispherical resonator gyroscope reaches a steady-state positionVibration direction angle of vibration mode antinode>；
And a second step of: gain increase of exciting Y electrodeRecording gain amplitude stabilizing force resultant force +.A. of the hemispherical resonator gyroscope after the vibration angle output by the hemispherical resonator gyroscope reaches a steady-state position>Gain vibration mode antinode vibration direction angle +.>；
And a third step of: combining the stable amplitude force and the resultant force of the hemispherical resonator gyroscopes recorded in the first step and the second stepVibration direction angle of vibration mode antinode>Gain amplitude stabilizing force resultant force->Gain vibration mode antinode vibration direction angle +.>Substituting into the formula (1), calculating the steady force resultant force direction angle of the hemispherical resonator gyro>；
（1）；
Fourth step: calculating the gain error of the excitation electrode of the hemispherical resonator gyroscope according to the formula (2) and the formula (3)And multiplying the output voltage of the excitation Y electrode by (+)>) Doubling the gain calibration of the excitation X electrode and the excitation Y electrode;
（2）
（3）；
wherein:indicating the angle of departure between the direction of the steady force resultant and the angular line of the two excitation electrodes.
2. The method for calibrating the gain of the excitation electrode of the hemispherical resonator gyroscope according to claim 1, wherein the time from when the same steady-amplitude voltage is applied to the excitation X electrode and the excitation Y electrode until the vibration mode angle of the output of the hemispherical resonator gyroscope reaches a steady-state position is 10 minutes.
3. The method for calibrating gain of excitation electrode of hemispherical resonator gyro according to claim 1, wherein in the third step, the output voltage of the excitation Y electrode is increased by (1 +) The excitation Y electrode gain is increased in a multiplied way>。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310889269.9A CN116625410B (en) | 2023-07-20 | 2023-07-20 | Hemispherical resonator gyro excitation electrode gain calibration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310889269.9A CN116625410B (en) | 2023-07-20 | 2023-07-20 | Hemispherical resonator gyro excitation electrode gain calibration method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116625410A true CN116625410A (en) | 2023-08-22 |
| CN116625410B CN116625410B (en) | 2023-09-19 |
Family
ID=87638548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310889269.9A Active CN116625410B (en) | 2023-07-20 | 2023-07-20 | Hemispherical resonator gyro excitation electrode gain calibration method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116625410B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813341A (en) * | 2019-02-26 | 2019-05-28 | 南京理工大学 | A kind of online self-calibration system of silicon micromechanical gyroscope driving force coupling error |
| CN113899365A (en) * | 2021-11-22 | 2022-01-07 | 哈尔滨工业大学 | Standing wave azimuth angle measurement method based on asymmetric parameter identification of hemispherical resonator gyroscope detection channel |
| CN114780903A (en) * | 2022-05-05 | 2022-07-22 | 哈尔滨工业大学 | Hemispherical resonator gyroscope X/Y channel drive gain asymmetry and electrode non-orthogonal error identification method |
| CN114838741A (en) * | 2022-07-04 | 2022-08-02 | 中国船舶重工集团公司第七0七研究所 | Error compensation method for excitation electrode of full-angle hemispherical resonator gyroscope |
| CN114858191A (en) * | 2022-07-05 | 2022-08-05 | 中国船舶重工集团公司第七0七研究所 | Error calibration method for detecting electrode of full-angle hemispherical resonator gyroscope |
| CN115855121A (en) * | 2023-02-28 | 2023-03-28 | 中国船舶集团有限公司第七〇七研究所 | Error self-calibration method of hemispherical resonator gyroscope |
| CN115876182A (en) * | 2023-02-27 | 2023-03-31 | 中国船舶集团有限公司第七〇七研究所 | Electrode error modeling method of hemispherical resonator gyroscope |
-
2023
- 2023-07-20 CN CN202310889269.9A patent/CN116625410B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813341A (en) * | 2019-02-26 | 2019-05-28 | 南京理工大学 | A kind of online self-calibration system of silicon micromechanical gyroscope driving force coupling error |
| CN113899365A (en) * | 2021-11-22 | 2022-01-07 | 哈尔滨工业大学 | Standing wave azimuth angle measurement method based on asymmetric parameter identification of hemispherical resonator gyroscope detection channel |
| CN114780903A (en) * | 2022-05-05 | 2022-07-22 | 哈尔滨工业大学 | Hemispherical resonator gyroscope X/Y channel drive gain asymmetry and electrode non-orthogonal error identification method |
| CN114838741A (en) * | 2022-07-04 | 2022-08-02 | 中国船舶重工集团公司第七0七研究所 | Error compensation method for excitation electrode of full-angle hemispherical resonator gyroscope |
| CN114858191A (en) * | 2022-07-05 | 2022-08-05 | 中国船舶重工集团公司第七0七研究所 | Error calibration method for detecting electrode of full-angle hemispherical resonator gyroscope |
| CN115876182A (en) * | 2023-02-27 | 2023-03-31 | 中国船舶集团有限公司第七〇七研究所 | Electrode error modeling method of hemispherical resonator gyroscope |
| CN115855121A (en) * | 2023-02-28 | 2023-03-28 | 中国船舶集团有限公司第七〇七研究所 | Error self-calibration method of hemispherical resonator gyroscope |
Non-Patent Citations (1)
| Title |
|---|
| 李先梅;方针;余波;杨勇;彭慧;: "半球谐振陀螺信号检测与动态性能改进方法的研究", 导航与控制, no. 03 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116625410B (en) | 2023-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7827864B2 (en) | Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method | |
| CN115876182B (en) | Electrode error modeling method of hemispherical resonator gyroscope | |
| US7640803B1 (en) | Micro-electromechanical system inertial sensor | |
| CN109945894A (en) | The installation error compensation method of hemispherical resonant gyro harmonic oscillator and outer frame | |
| CN101968359B (en) | Campaniform oscillator type angular rate gyroscope | |
| JP2001512645A (en) | Temperature-insensitive silicon oscillator and precision voltage reference formed therefrom | |
| JPS62184325A (en) | Quartz type gas pressure gauge | |
| CN114838741B (en) | Error compensation method for excitation electrode of full-angle hemispherical resonator gyroscope | |
| CN109728791B (en) | Microelectromechanical resonator system with improved stability against temperature changes | |
| JP4068370B2 (en) | Vibrating gyro | |
| CN114440852B (en) | Hemispherical resonator gyroscope X/Y path drive gain asymmetry error identification method | |
| CN116608890B (en) | Scale error compensation method of full-angle mode hemispherical resonator gyroscope | |
| CN115388910A (en) | Hemispherical resonant gyro error self-excitation method and system | |
| CN107389090A (en) | A kind of mechanical non-orthogonal closed-loop policy for improving MEMS gyro anti-vibration characteristic | |
| CN116412837A (en) | Method for generating hemispherical resonance gyro force balance mode calibration electric signal | |
| CN114858184A (en) | Hemispherical harmonic oscillator parameter identification method | |
| CN116625410B (en) | Hemispherical resonator gyro excitation electrode gain calibration method | |
| CN117949011A (en) | Hemispherical resonator gyroscope sampling gain asymmetric calibration method | |
| Yin et al. | A phase self-correction method for bias temperature drift suppression of MEMS gyroscopes | |
| US11262265B2 (en) | Temperature correction device, sensor module, and temperature correction method | |
| CN115597574B (en) | Real-time automatic mode matching device, method, equipment and medium for micromechanical gyroscope | |
| CN114964309A (en) | Temperature compensation method for MEMS inertial navigation system | |
| JP2001194148A (en) | Vibrating gyro | |
| US8468886B2 (en) | Yaw rate sensor and method for operating a yaw rate sensor | |
| US10175044B2 (en) | Circuit device, physical quantity detection device, electronic apparatus, and moving object |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |