CN116619268A - Mounting fixture for cylindrical sample and use method thereof - Google Patents

Abstract

The invention discloses a mounting clamp for a cylindrical sample and a use method thereof, wherein the clamp comprises an inner hole clamp and an outer circle clamp, the inner hole clamp comprises a base and a supporting and clamping assembly, and the supporting and clamping assembly is arranged on the base and is used for clamping the inner periphery of the sample; the excircle clamp comprises a mounting seat, wherein the mounting seat is provided with a movable limiting assembly and a plurality of supports, and the supports are used for assisting the movable limiting assembly to clamp the periphery of a sample. The invention has the advantages of compact structure, stable and reliable clamping, contribution to narrowing the inclination angle range of the target table, mutual noninterference between the injection area and the clamp, and the like, solves the problems of confusion, redundancy and the like caused by the need of a plurality of traditional sleeve clamps due to the large diameter range of the cylindrical sample, solves the problems of overlarge bias angle of the target table, mutual interference between the injection area and the clamp, easy damage to the periphery of the sample and the like caused by unreasonable clamp design and matching, improves the quality or yield of finished products of the process, and reduces the running cost of semiconductor injection equipment.

Description

Mounting fixture for cylindrical sample and use method thereof

Technical Field

The invention belongs to the technical field of clamp equipment, and particularly relates to an installation clamp for a cylindrical sample and a use method thereof.

Background

With the diversification development of semiconductor products, germanium has more new applications in the fields of infrared equipment, R radiation detectors and the like. In the ion implantation stage, a set of clamps is required to mount a cylindrical sample to realize ion implantation (such as doping element B, P implantation) on the outer surface and inner hole of the sample, and the grounding is performed without damaging the sample.

In the industry, the existing clamp only uses a columnar clamping and supporting component to realize injection of the outer surface of a cylindrical sample, a target table is required to have a larger offset angle range, an injection area and the clamp are mutually interfered, and a grounding structure is required to be additionally designed to realize sample grounding, so that the eccentric condition is easy to exist when the sample is clamped.

Disclosure of Invention

The invention aims to solve the technical problem of overcoming the defects of the prior art and providing the mounting fixture for the cylindrical sample, which has the advantages of compact structure, stable and reliable clamping, contribution to narrowing the inclination angle range of a target table and no interference between an injection area and the fixture, and the use method thereof.

In order to solve the technical problems, the invention adopts the following technical scheme:

the mounting fixture for the cylindrical sample comprises an inner hole fixture and an outer circle fixture, wherein the inner hole fixture and the outer circle fixture are detachably mounted with an interface of a target table; the inner hole clamp comprises a base and a supporting and clamping assembly, wherein the supporting and clamping assembly is arranged on the base and used for clamping the inner periphery of a cylindrical sample; the excircle clamp comprises a mounting seat, wherein the mounting seat is provided with a movable limiting assembly and a plurality of supports, and the supports are used for assisting the movable limiting assembly to clamp the periphery of the cylindrical sample.

As a further improvement of the invention, the supporting and clamping assembly comprises a screw rod, a pressing ring and a conductive ring, wherein the bottom of the screw rod is fixedly arranged on the base, the pressing ring and the conductive ring are sequentially and alternately arranged on the periphery of the screw rod, the pressing ring is used for compressing the conductive ring, the inner periphery of the cylindrical sample is contacted with the conductive ring, and the conductive ring is used for realizing grounding of the cylindrical sample and stressed to expand and tension the inner periphery of the cylindrical sample.

As a further improvement of the invention, the movable limiting assembly comprises a driving ring and a movable pair, wherein the periphery of the driving ring is contacted with the mounting seat, the fixed end of the movable pair is arranged on the mounting seat, the movable end of the movable pair is sleeved on the driving ring, and a plurality of mounting seats and a plurality of movable pairs are sequentially and alternately arranged and used for limiting the driving ring.

As a further improvement of the invention, the movement limiting assembly further comprises a swing arm and a revolute pair, one end of the swing arm is connected with the movable end of the revolute pair, the other end of the swing arm is connected with the revolute pair, and the revolute pair is used for clamping the periphery of the cylindrical sample.

As a further improvement of the present invention, the revolute pair is provided with a contact plate for holding the outer periphery of the cylindrical sample.

As a further improvement of the invention, the contact plate is made of conductive flexible material.

As a further improvement of the invention, the outer circular clamp further comprises a sleeve, and the sleeve is connected with the mounting seat.

As a further improvement of the invention, the inner hole clamp further comprises a hollow shaft seat, wherein the hollow shaft seat is detachably arranged on the base, and a notch is arranged on the hollow shaft seat and is used for installing the screw rod.

As a further improvement of the invention, a nut is arranged in the base, and the nut is used for fastening the screw rod.

The invention also provides a using method of the mounting fixture based on the cylindrical sample, which comprises the following steps:

s1, mounting a cylindrical sample on an inner hole clamp;

s11, sleeving the conductive ring and the compression ring on the hollow shaft seat in sequence;

s12, inserting the screw rod into the hollow shaft seat, fixedly mounting the hollow shaft seat and the screw rod on the base, and connecting a nut at the bottom of the screw rod;

s13, placing an inner hole clamp into the inner hole of the cylindrical sample, and performing clearance fit between the inner hole clamp and the inner hole of the cylindrical sample;

s14, screwing a nut at the bottom of the screw rod, so that the compression ring compresses the conductive ring, and tensioning the inner hole wall of the cylindrical sample by using the expansion of the conductive ring;

s15, fixing the base on an interface of the target table to finish the excircle injection of the cylindrical sample;

s2, mounting a cylindrical sample on an outer circular clamp;

s21, when the outer circle clamp is fixed, manually applying force F2 to enable the driving ring to reversely rotate, enabling the moving pair to shrink, enabling the swing arm to expand, and placing the cylindrical sample;

s22, when the force F2 is withdrawn, clamping the cylindrical sample by means of the pre-contraction force of the moving pair;

s23, fixing the outer circular clamp to an interface of the target table through a connecting flange so as to finish injection of an inner hole and an end face of the cylindrical sample.

Compared with the prior art, the invention has the advantages that:

1. according to the mounting clamp for the cylindrical sample, the inner hole clamp and the outer circle clamp are detachably mounted with the interface of the target table respectively, and the inner hole clamp and the outer circle clamp are used for clamping the inner hole and the outer circle of the cylindrical sample respectively, so that the condition that the sample is eccentric during clamping is avoided, and the stability and the reliability of the sample clamping are improved.

2. According to the mounting fixture for the cylindrical sample, the hollow shaft seat with the notch is arranged in the center of the base of the inner hole fixture, so that the screw rod is detachably mounted on the base, the conductive rings and the pressing rings are sequentially and alternately sleeved on the periphery of the screw rod, the cylindrical sample is sleeved on the screw rod, the clamping and fixing of the inner periphery of the sample are realized, the grounding of the sample is realized, an additional grounding structure is not needed, and the structural arrangement of the mounting fixture is simplified.

3. According to the mounting fixture for the cylindrical sample, the support, the driving ring, the moving pair, the swinging arm, the rotating pair and the contact plate are arranged on the mounting seat of the outer circle fixture, so that the outer circle of the sample is clamped and fixed, specifically, the driving ring is limited by the alternately arranged support and the moving pair, the driving ring is prevented from being deviated, meanwhile, the driving ring is used as a rack of the moving pair, the swinging arm on the movable end of the moving pair is driven to regularly swing, meanwhile, the rotating pair connected with the swinging arm is driven to regularly swing, the end part of the rotating pair is provided with the contact plate clamped on the outer circle of the sample, the contact plate is made of conductive flexible materials, the clamping and fixing of the outer circle of the sample is realized, the grounding of the sample is realized, and the structure setting of the mounting fixture is simplified. Meanwhile, as the moving pair and the rotating pair have certain mobility, the clamping requirements of samples with different circumference sizes are well met, and the use flexibility of the mounting clamp is improved.

4. According to the application method of the mounting fixture for the cylindrical sample, the inner hole fixture and the outer circle fixture are used separately, the inner circumference and the outer circle of the sample are fixed respectively, the two fixtures can be replaced and used on the same interface of the target table, the cylindrical sample is stably clamped, the efficiency of mounting and fixing the sample is greatly improved, the yield of a finished product is improved, and finally the whole productivity of the device is improved.

Drawings

Fig. 1 is a schematic view of the structural principle of the mounting fixture for cylindrical samples of the present invention.

Fig. 2 is a schematic structural diagram of the inner hole clamp in the present invention.

Fig. 3 is a schematic diagram of a cross-sectional structure of the inner hole clamp according to the present invention.

Fig. 4 is a schematic view of the internal structure of the outer circular clamp in the present invention.

Legend description: 1. an inner hole clamp; 11. a base; 12. a hollow shaft seat; 13. a screw rod; 14. a compression ring; 15. a conductive ring; 16. a nut; 2. an outer circle clamp; 21. a mounting base; 22. a sleeve; 23. a support; 24. a drive ring; 25. a moving pair; 26. swing arms; 27. a revolute pair; 28. a contact plate; 29. an injection port; 3. and (5) connecting the flanges.

Detailed Description

The invention is further described below in connection with the drawings and the specific preferred embodiments, but the scope of protection of the invention is not limited thereby.

Example 1

As shown in fig. 1 to 4, the mounting fixture for a cylindrical sample of the present invention includes an inner hole fixture 1 and an outer circle fixture 2, both of which are detachably mounted to an interface of a target table. The inner hole clamp 1 comprises a base 11 and a supporting and clamping assembly, wherein the supporting and clamping assembly is arranged on the base 11 and is used for clamping the inner periphery of a cylindrical sample; the outer circle clamp 2 comprises a mounting seat 21, a movable limiting assembly and a plurality of supports 23 are arranged on the mounting seat 21, and the supports 23 are used for assisting the movable limiting assembly to clamp the periphery of the cylindrical sample.

As shown in fig. 1 and 2, in this embodiment, the supporting and clamping assembly includes a screw rod 13, a pressing ring 14 and a conductive ring 15, the bottom of the screw rod 13 is fixedly installed on the base 11, the outer periphery of the screw rod 13 is sequentially and alternately provided with the pressing ring 14 and the conductive ring 15, the pressing ring 14 is used for compressing the conductive ring 15, the inner periphery of the cylindrical sample is in contact with the conductive ring 15, the conductive ring 15 is used for realizing grounding of the cylindrical sample, and the inner periphery of the cylindrical sample is stressed to be expanded and tensioned. The inner hole clamp 1 is detachably connected with an interface of the target table through the base 11 so as to realize the injection of the outer circle of the cylindrical sample.

Further, the pressure ring 14 is made of stainless steel material, and the conductive ring 15 is a rubber ring filled with metal or conductive powder, so as to realize safe grounding of the cylindrical sample.

As shown in fig. 4, in this embodiment, the movement limiting assembly includes a driving ring 24 and a moving pair 25, the outer periphery of the driving ring 24 contacts with the mounting seat 21, the fixed end of the moving pair 25 is mounted on the mounting seat 21, the movable end of the moving pair 25 is sleeved on the driving ring 24, and a plurality of mounting seats 21 and a plurality of moving pairs 25 are alternately arranged in sequence for limiting the driving ring 24.

Further, the movement limiting assembly further comprises a swing arm 26 and a revolute pair 27, one end of the swing arm 26 is connected with the movable end of the revolute pair 25, the other end of the swing arm 26 is connected with the revolute pair 27, and the revolute pair 27 is used for clamping the periphery of the cylindrical sample. The revolute pair 27 is provided with a contact plate 28, and the contact plate 28 is used for clamping the outer periphery of the cylindrical sample. The contact plate 28 is made of conductive flexible materials, so that the outer surface of a sample workpiece is prevented from being scratched, and the sample is grounded. In this embodiment, the contact plate 28 is a conductive rubber block, which may be a silica gel or rubber block filled with conductive powder, so that the conductive function is achieved and the outer surface of the sample is not damaged.

It will be appreciated that the pre-clamping force of the driving ring 24 comes from the tangential force F1 generated by the contraction of the moving pair 25 (such as a spring, a cylinder, etc.) to drive the driving ring 24, and the driving ring 24 can perform circular motion under the same acting force of multiple groups of moving pairs 25 at the same time, so that the swing arm 26 can achieve self-centering and clamp the sample. When unloading the sample, the manual force F2 is manually applied to open the sample.

As shown in fig. 3, in this embodiment, the outer circular fixture 2 further includes a sleeve 22, and the sleeve 22 is connected to the mounting seat 21. It will be appreciated that the sleeve 22 corresponds to a "frame", the movement limiting assembly and the support are mounted on the mounting seat 21, then integrally put into the sleeve 22, and fixedly connected, and finally integrally mounted on the interface of the target table through the connection flange 3 connected with the sleeve 22. The sleeve 22 may accommodate a range of sizes of samples. At the same time, the center of the mounting seat 21 is also provided with an injection port 29, and the injection port 29 is used for injecting the inner hole and the end face of the cylindrical sample.

In this embodiment, the sample is packaged inside the outer circular fixture 2, the sleeve 22 is combined with the base 21 outside the outer circular fixture 2, and the driving ring 24 is limited by using the support 23 on the base 21 and the moving pair 25. Meanwhile, the movable pair 27 on the swing arm 26 takes the driving ring 24 as a frame and swings along with the circular motion of the driving ring 24, the acting force F1 is kept on the frame, the force F1 is a source of clamping force, the movable swing arm 26 can be opened under the action of the force F2 (when the force F1 is cancelled or F2> F1), the clamping of the excircle of a sample can be realized after the sample is put into the sample, and the rotating pair 27 is arranged between the contact plate 28 and the swing arm 26 and can better contact and tension the samples corresponding to different sizes.

As shown in fig. 2, in this embodiment, the inner hole fixture 1 further includes a hollow shaft seat 12, the hollow shaft seat 12 is detachably mounted on the base 11 by a screw, and an embedded notch is formed in the hollow shaft seat 12 and is used for mounting the screw rod 13. The clamping ring 14 and the conducting ring 15 arranged on the periphery of the screw rod 13 are circularly arranged by pressing one conducting ring 15 by one clamping ring 14, so that the coaxiality of a sample after being mounted with the hollow shaft seat can be remarkably improved, and the reliability of sample clamping is improved.

As shown in fig. 2, a nut 16 is provided inside the base 11, and the nut 16 is used for fastening the screw rod 13 to compress the conductive ring 15, and the inner hole of the sample is tensioned by expanding the outer diameter of the conductive ring 15.

The inner hole clamp 1 of the embodiment utilizes the conductive ring 15 to ground the sample, thereby avoiding the grounding of an additional redesigned wiring contact and simplifying the structure; according to the size difference of the holes in the sample, the clamp can be made into a matched size so as to meet the clamping requirements of samples in different size ranges.

Example 2

This example provides a method of using the mounting fixture of example 1, the mounting fixture to which the cylindrical sample is secured comprising the steps of:

s1, mounting a cylindrical sample on an inner hole clamp 1;

s11, sleeving the conductive ring 15 and the pressing ring 14 on the hollow shaft seat 12 in sequence;

s12, inserting a screw rod 13 into the hollow shaft seat 12, fixedly mounting the hollow shaft seat 12 and the screw rod 13 on the base 11, and connecting a nut 16 at the bottom of the screw rod 13; at this time, the nut 16 is only connected to the bottom of the screw 13, and does not lock the screw 13;

s13, placing the inner hole clamp 1 into the inner hole of the cylindrical sample, and performing clearance fit between the inner hole clamp 1 and the inner hole of the cylindrical sample;

s14, tightening a nut 16 at the bottom of the screw rod 13, wherein the screw rod 13 is circumferentially fixed, but can axially move under the action of the nut 16, so that the compression ring 14 compresses the conductive ring 15, and the expansion of the conductive ring 15 is utilized to tension the inner hole wall of the cylindrical sample;

s15, fixing the base 11 on the interface of the target table to finish the excircle injection of the cylindrical sample.

S2, mounting a cylindrical sample on the outer circular clamp 2;

s21, when the outer circular clamp 2 is fixed, manually applying force F2 to enable the driving ring 24 to reversely rotate, enabling the moving pair 25 to shrink, enabling the swing arm 26 to expand, and placing a cylindrical sample;

s22, when the force F2 is withdrawn, clamping the cylindrical sample by means of the pre-contraction force of the moving pair;

s23, fixing the outer circular clamp to an interface of the target table through a connecting flange so as to finish injection of an inner hole and an end face of the cylindrical sample.

In this embodiment, the inclination angle range of the target table can be reduced by matching the inner hole clamp 1 and the outer circle clamp 2. After the traditional clamp is clamped by the hole clamp, one outer circular surface and two end surfaces are clamped once, and injection is realized by the inclination angle of 0-180 degrees. In this embodiment, the injection of the end face of the sample can be achieved by using the outer circular clamp 2 for clamping the outer circle of the sample, so that the injection of one end face can be reduced when the inner hole clamp 1 is used, and the injection can be achieved by 0-90 degrees.

While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present invention or equivalent embodiments using the method and technical solution disclosed above without departing from the spirit and technical solution of the present invention. Therefore, any simple modification, equivalent substitution, equivalent variation and modification of the above embodiments according to the technical substance of the present invention, which do not depart from the technical solution of the present invention, still fall within the scope of the technical solution of the present invention.

Claims (10)

1. The mounting fixture for the cylindrical sample is characterized by comprising an inner hole fixture (1) and an outer circle fixture (2), wherein the inner hole fixture (1) and the outer circle fixture (2) are detachably mounted with an interface of a target table; the inner hole clamp (1) comprises a base (11) and a supporting and clamping assembly, wherein the supporting and clamping assembly is arranged on the base (11) and is used for clamping the inner periphery of a cylindrical sample; the excircle clamp (2) comprises a mounting seat (21), wherein a movable limiting assembly and a plurality of supports (23) are arranged on the mounting seat (21), and the supports (23) are used for assisting the movable limiting assembly to clamp the periphery of a cylindrical sample.

2. The mounting fixture for a cylindrical sample according to claim 1, wherein the supporting and clamping assembly comprises a screw rod (13), a pressing ring (14) and a conductive ring (15), the bottom of the screw rod (13) is fixedly mounted on the base (11), the pressing ring (14) and the conductive ring (15) are sequentially and alternately arranged on the periphery of the screw rod (13), the pressing ring (14) is used for compressing the conductive ring (15), the inner periphery of the cylindrical sample is in contact with the conductive ring (15), and the conductive ring (15) is used for realizing grounding of the cylindrical sample and is stressed to expand and tension the inner periphery of the cylindrical sample.

3. The mounting fixture for cylindrical samples according to claim 2, characterized in that the movement limiting assembly comprises a driving ring (24) and a moving pair (25), wherein the periphery of the driving ring (24) is in contact with the mounting seat (21), the fixed end of the moving pair (25) is mounted on the mounting seat (21), the movable end of the moving pair (25) is sleeved on the driving ring (24), and the plurality of mounting seats (21) and the plurality of moving pairs (25) are sequentially and alternately arranged for limiting the driving ring (24).

4. A mounting fixture for a cylindrical sample according to claim 3, characterized in that the movement limiting assembly further comprises a swing arm (26) and a revolute pair (27), one end of the swing arm (26) is connected with the movable end of the revolute pair (25), the other end of the swing arm (26) is connected with the revolute pair (27), and the revolute pair (27) is used for clamping the periphery of the cylindrical sample.

5. Mounting fixture for cylindrical samples according to claim 4, characterized in that the revolute pair (27) is provided with a contact plate (28), which contact plate (28) is used for clamping the outer circumference of the cylindrical sample.

6. Mounting fixture for cylindrical samples according to claim 5, characterized in that the contact plate (28) is made of an electrically conductive flexible material.

7. Mounting fixture for cylindrical samples according to any of the claims 1 to 6, characterized in that the outer circular fixture (2) further comprises a sleeve (22), which sleeve (22) is connected with a mounting seat (21).

8. Mounting fixture for cylindrical samples according to any of the claims 1 to 6, characterized in that the female fixture (1) further comprises a hollow shaft seat (12), the hollow shaft seat (12) being detachably mounted on the base (11), the hollow shaft seat (12) being provided with a notch for mounting a screw (13).

9. Mounting fixture for cylindrical samples according to claim 8, characterized in that the base (11) is internally provided with a nut (16), which nut (16) is used for fastening the screw (13).

10. A method of using a mounting fixture for cylindrical samples according to any one of claims 1 to 9, characterized by the steps of:

s1, mounting a cylindrical sample on an inner hole clamp (1);

s11, sleeving the conductive ring (15) and the pressing ring (14) on the hollow shaft seat (12) in sequence;

s12, inserting a screw rod (13) into the hollow shaft seat (12), fixedly mounting the hollow shaft seat (12) and the screw rod (13) on the base (11), and connecting a nut (16) at the bottom of the screw rod (13);

s13, placing the inner hole clamp (1) into the inner hole of the cylindrical sample, and performing clearance fit between the inner hole clamp (1) and the inner hole of the cylindrical sample;

s14, screwing a nut (16) at the bottom of the screw rod (13), enabling the pressing ring (14) to press the conductive ring (15), and tensioning the inner hole wall of the cylindrical sample by utilizing expansion of the conductive ring (15);

s15, fixing the base (11) on an interface of the target table to finish the excircle injection of the cylindrical sample;

s2, mounting a cylindrical sample on an outer circular clamp (2);

s21, when the outer circular clamp (2) is fixed, manually applying force F2 to enable the driving ring (24) to reversely rotate, enabling the moving pair (25) to shrink, enabling the swing arm (26) to open, and placing a cylindrical sample in the cylindrical clamp;

s22, when the force F2 is removed, clamping the cylindrical sample by means of the pre-contraction force of the moving pair (25);

s23, fixing the outer circular clamp (2) to an interface of the target table through the connecting flange (3) so as to finish inner hole and end face injection of the cylindrical sample.