CN116612613A - Purifying cabinet air leakage alarm disposal method and system - Google Patents
Purifying cabinet air leakage alarm disposal method and system Download PDFInfo
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- CN116612613A CN116612613A CN202310600238.7A CN202310600238A CN116612613A CN 116612613 A CN116612613 A CN 116612613A CN 202310600238 A CN202310600238 A CN 202310600238A CN 116612613 A CN116612613 A CN 116612613A
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- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000000746 purification Methods 0.000 claims description 33
- 238000003860 storage Methods 0.000 claims description 20
- 238000012545 processing Methods 0.000 claims description 17
- 238000004590 computer program Methods 0.000 claims description 15
- 238000010926 purge Methods 0.000 claims description 9
- 238000004364 calculation method Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 110
- 238000004519 manufacturing process Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 230000008569 process Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/18—Status alarms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
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- Business, Economics & Management (AREA)
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Abstract
The invention provides a purifying cabinet air leakage alarm disposal method and system. The method comprises the following steps: determining first data related to the leaked gas according to the leakage alarm signal of the purifying cabinet and second data related to the purifying cabinet; a leakage alarm handling scheme is generated from the first data and the second data and executed. The scheme of the invention can determine the most suitable air leakage alarm disposal scheme, thereby obtaining better air leakage alarm disposal effect of the purifying cabinet.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a purifying cabinet air leakage alarm disposal method, a purifying cabinet air leakage alarm disposal system, electronic equipment and a computer storage medium.
Background
The concentration of the process gas needed in the semiconductor production is very high (99.9999999%), the concentration of the gas which can be provided by the factory end is generally 6N-7N, if the gas is directly provided by the factory end, the load and regeneration cost of the purifier are huge, the cost can be reduced by selecting the purifying cabinet equipment, and the stability and quality of the gas flow can be ensured by single machine supply.
However, the purification cabinet has the risk of air leakage, the treatment mode of the air leakage of the purification cabinet in the prior art is not perfect, and the invention aims to optimize the air leakage of the purification cabinet.
Disclosure of Invention
In order to at least solve the technical problems in the background art, the invention provides a purifying cabinet air leakage alarm disposal method, a purifying cabinet air leakage alarm disposal system, electronic equipment and a computer storage medium.
The first aspect of the invention provides a purifying cabinet air leakage alarm disposal method, which comprises the following steps:
determining first data related to the leaked gas and second data related to the purifying cabinet according to the leakage alarm signal of the purifying cabinet;
and generating a gas leakage alarm treatment scheme according to the first data and the second data, and executing the gas leakage alarm treatment scheme.
In some embodiments, the determining the first data of the leaking gas according to the leakage alarm signal of the purifying cabinet includes:
determining the identity code of the purification cabinet according to the air leakage alarm signal, and calling the gas input record of the purification cabinet according to the identity code;
and determining the type code of the leakage gas according to the gas input record, and obtaining the first data according to the type code.
In some embodiments, the determining a type code of the leaking gas from the gas input record comprises:
determining first working state data of the purifying cabinet according to the second data, and determining a first period according to the first working state data;
and carrying out matching calculation on the gas input records according to the first time period to determine the type codes and the type quantity of the leaked gas.
In some embodiments, the generating a leakage alarm handling scheme from the first data and the second data comprises:
if the type code is single, determining a first alarm scheme and a first treatment scheme according to the type code;
if the type code is non-unitary, a second alarm scenario and a second treatment scenario are determined from the type code.
In some embodiments, the length of the first period is determined from an efficiency parameter of the purge exhaust of the purification cabinet.
In some embodiments, the second data relating to the purification cabinet further comprises second operational status data of a gas consuming device;
the generating a leakage alarm handling scheme from the first data and the second data comprises:
evaluating the job completion probability of the gas consuming device in a second period according to the second working state data, and optimizing the first treatment scheme or the second treatment scheme according to the job completion probability so as to contain a gas valve closing sub-scheme;
and the gas valve closing time of the gas valve closing sub-scheme is determined according to the operation completion probability.
In some embodiments, the evaluating the job completion probability of the gas consuming device in the second period according to the second operating state data includes:
calculating to obtain air supply prediction data and operation task attribute data of the air utilization equipment in the second period according to the second working state data;
and evaluating the job completion probability of the gas using equipment in a second period according to the gas supply prediction data and the job task attribute data.
The second aspect of the invention provides a purifying cabinet air leakage alarm disposal system, which comprises an acquisition module, a processing module and a storage module; the processing module is connected with the acquisition module and the storage module;
the memory module is used for storing executable computer program codes;
the acquisition module is used for acquiring first data related to the leaked gas and second data related to the purification cabinet and transmitting the first data and the second data to the processing module;
the method is characterized in that: the processing module is configured to perform the method of any of the preceding claims by invoking the executable computer program code in the storage module.
The third aspect of the present invention also provides an electronic apparatus, comprising: a memory storing executable program code; a processor coupled to the memory; the processor invokes the executable program code stored in the memory to perform the method of any one of the preceding claims.
A fourth aspect of the invention provides a computer storage medium having stored thereon a computer program which, when executed by a processor, performs a method as claimed in any preceding claim.
The invention has the beneficial effects that:
when the occurrence of air leakage is monitored, the air leakage alarm signal can be sent to the corresponding processing component, the processing component can determine the relevant data of the air leakage and the relevant data of the purification cabinet according to the air leakage alarm signal, and accordingly the most suitable air leakage alarm treatment scheme is determined, so that a better air leakage alarm treatment effect of the purification cabinet is obtained.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of a method for alarm disposal of air leakage in a purification cabinet according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a purifying cabinet leakage alarm disposal system according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure are described below in conjunction with the accompanying drawings, which include various details of the embodiments of the present disclosure to facilitate understanding, and should be considered as merely exemplary. Accordingly, one of ordinary skill in the art will recognize that various changes and modifications of the embodiments described herein can be made without departing from the scope and spirit of the present disclosure. Also, descriptions of well-known functions and constructions are omitted in the following description for clarity and conciseness.
Referring to fig. 1, the embodiment of the invention discloses a method for disposing an air leakage alarm of a purifying cabinet, which comprises the following steps:
determining first data related to the leaked gas and second data related to the purifying cabinet according to the leakage alarm signal of the purifying cabinet;
and generating a gas leakage alarm treatment scheme according to the first data and the second data, and executing the gas leakage alarm treatment scheme.
Various gas leakage detectors, such as Horniwell MIDAS series detectors, are arranged in the purification cabinet, when gas leakage is detected, gas leakage alarm signals can be sent to corresponding processing components, and the processing components can determine relevant data of the leaked gas and relevant data of the purification cabinet according to the gas leakage alarm signals, so that the most suitable gas leakage alarm treatment scheme is determined, and a better gas leakage alarm treatment effect of the purification cabinet is obtained.
The air leakage detector can be arranged on the inner wall of the purifying cabinet, the input interface and the output interface of the purifying cavity of the purifier, and the like, and the latter is preferred.
In some embodiments, the determining the first data of the leaking gas according to the leakage alarm signal of the purifying cabinet includes:
determining the identity code of the purification cabinet according to the air leakage alarm signal, and calling the gas input record of the purification cabinet according to the identity code;
and determining the type code of the leakage gas according to the gas input record, and obtaining the first data according to the type code.
In this embodiment, the air leakage detector is associated with the purifying cabinet where the air leakage detector is arranged in advance, so that the identity code of the purifying cabinet with air leakage can be determined according to the air leakage alarm signal, and accordingly, the gas input record of the purifying cabinet in the corresponding period can be further scheduled, and the type code of the leaked gas can be further determined. The different codes may indicate on the one hand the specific type of leakage gas and on the other hand also the risk of leakage gas and the proper way of handling the leakage.
It should be noted that, according to the actual requirement of production, the purifying cabinet needs to perform purifying operation on different types of gases, and only needs to perform purging operation after one type of gas is purified. The system records information corresponding to the type of gas input to each purifying cabinet and specific time.
In some embodiments, the determining a type code of the leaking gas from the gas input record comprises:
determining first working state data of the purifying cabinet according to the second data, and determining a first period according to the first working state data;
and carrying out matching calculation on the gas input records according to the first time period to determine the type codes and the type quantity of the leaked gas.
In this embodiment, the second data related to the purifying cabinet includes an operating state of the purifying cabinet, and the operating state mainly includes a purifying stage and a purge and exhaust stage. If the purifier is operated in the purification stage, the purification chamber contains only a single gas, while in the purge-exhaust stage, the purification chamber is a mixed gas consisting of at least two gases. The gas herein refers to the bulk of the process gas and does not contain impurity gases therein.
Aiming at the two situations, the invention determines the first time period for tracing according to the working state data of the purifier, and then calculates the type and the type quantity of the gas input into the purifier from the gas input record according to the first time period, thereby being beneficial to the subsequent determination of a more reasonable gas leakage alarm treatment scheme.
In some embodiments, the generating a leakage alarm handling scheme from the first data and the second data comprises:
if the type code is single, determining a first alarm scheme and a first treatment scheme according to the type code;
if the type code is non-unitary, a second alarm scenario and a second treatment scenario are determined from the type code.
In this embodiment, when the gas input recorded in the first period is a single gas type, for example, the gas of the same type is input only once or multiple times in the first period, the appropriate alarm scheme and treatment scheme may be determined only according to the specific type attribute of the gas. If the gas input recorded during the first time period is of a non-single gas type, then the appropriate alarm and treatment schemes need to be determined based on the specific type properties of each adjacent gas.
For example, if the gas is only inert gas/rare gas, an alarm signal may be sent to a specified alarm, and the inert gas/rare gas absorption pump may be controlled to operate so as to recover the inert gas/rare gas to a specified recovery bottle. If the gas contains corrosive gas in addition to inert gas, an alarm signal is sent to a designated alarm, and the corrosive gas absorption pump is controlled to work so as to discharge the corrosive gas to the disposal device, and the like. Of course, the absorption pump may also be followed by a gas separation pump to separate and reuse some of the separable leakage gas. The specific treatment scheme may be determined based on the type of gas leaked, and the present invention may not be particularly limited.
The alarm can be an audible and visual alarm arranged on the purifying cabinet body, an alarm indication button in a monitoring interface on a monitoring terminal of a monitoring center, even mobile alarm equipment equipped by field personnel, and the like, and the invention is not particularly limited.
In some embodiments, the length of the first period is determined from an efficiency parameter of the purge exhaust of the purification cabinet.
In this embodiment, the purifier equipped with the purifying cabinet has different efficiency of purging and exhausting, and the purifier also has different efficiency parameters due to the impurity interference characteristic of the previous input gas and purging and exhausting difficulty, and the efficiency parameters reflect the duration of purging and exhausting. According to the invention, the length of the first period is determined according to the efficiency parameter of the purge and exhaust of the purification cabinet, the length of the first period is inversely related to the efficiency parameter, namely, the higher the efficiency parameter is, the faster the purification cabinet is exhausting the prior input gas, when the purification cabinet is at a certain degree, the later input gas can be determined as the leakage gas, otherwise, the prior input gas and the later input gas which are adjacent in input time are treated as the leakage gas.
Obviously, the length of the first period is a scale of going back forward with reference to the current time or the time when the air leakage alarm signal is received.
In some embodiments, the second data relating to the purification cabinet further comprises second operational status data of a gas consuming device;
the generating a leakage alarm handling scheme from the first data and the second data comprises:
evaluating the job completion probability of the gas consuming device in a second period according to the second working state data, and optimizing the first treatment scheme or the second treatment scheme according to the job completion probability so as to contain a gas valve closing sub-scheme;
and the gas valve closing time of the gas valve closing sub-scheme is determined according to the operation completion probability.
In this embodiment, the purified gas outputted from the purifying cabinet is used by the semiconductor manufacturing apparatus, and the semiconductor manufacturing apparatus may be in different production stages when the purifying cabinet leaks. In view of this, the present invention further analyzes the second operating status data of the semiconductor manufacturing apparatus and evaluates whether it is capable of completing the current operation process within the second time period and accordingly determines when to close the input and/or output gas valves of the purification cabinet.
The length of the second period may be determined according to parameters such as purification efficiency of the purifier, leakage rate, gas pressure of a gas pipeline of the gas utilization device, gas flow rate, and the like. Obviously, the second period is used to characterize the expected duration of time that the purification cabinet is able to supply stable gas to the semiconductor manufacturing equipment at the moment of occurrence of the leak.
In some embodiments, the evaluating the job completion probability of the gas consuming device in the second period according to the second operating state data includes:
calculating to obtain air supply prediction data and operation task attribute data of the air utilization equipment in the second period according to the second working state data;
and evaluating the job completion probability of the gas using equipment in a second period according to the gas supply prediction data and the job task attribute data.
In this embodiment, the task attribute data of the semiconductor manufacturing apparatus may be used to analyze the independence of the current task, for example, if the second period includes tasks for different wafers, the independence of the current task is high, i.e. the influence of the interrupted current task is small; if the second period includes the task for a plurality of steps of a single wafer, the independence of the current task is low, i.e., the influence of the interrupted current task is large.
Aiming at the situation, the invention calculates the gas supply prediction data according to the second working state data, namely, the purifying cabinet can still supply the specific performance parameters of the purified gas to the semiconductor manufacturing equipment under the condition of gas leakage; then, job task attribute data of the semiconductor manufacturing equipment is calculated according to the second working state data, wherein the job task attribute data is mainly characterized by the index independence. Then, the job completion probability is determined according to the air supply prediction situation and whether the current job task can be interrupted.
The following are illustrated:
the gas supply prediction data indicate that the purifying cabinet can only supply gas to the first moment above the gas supply index after gas leakage.
If the second period includes the operation tasks for different wafers, and the operation task for the current wafer can be finished at a second time before the first time, the operation completion probability can be judged to be high, and the operation task of the semiconductor manufacturing equipment is temporarily interrupted by executing the gas valve closing sub-scheme at a proper time after the second time; if the task for the current wafer can be completed at a third time after the first time, it can be determined that the task completion probability is low, and the gas valve closing sub-scheme can be executed at a proper time earlier than the first time, that is, the task for the current wafer is abandoned.
If the second period includes the operation tasks of a plurality of processes for a single wafer and all the processes for the current wafer need to be finished at a fourth time before the first time, the operation completion probability can be judged to be high, and the operation tasks of the semiconductor manufacturing equipment can be temporarily interrupted by executing the gas valve closing sub-scheme at a proper time after the fourth time; if the task for the current wafer can be completed at the fifth time after the first time, it may be determined that the task completion probability is low, and the gas valve closing sub-scheme may be performed at a suitable time earlier than the first time, that is, the task for the current wafer is abandoned.
Referring to fig. 2, the embodiment of the invention also discloses a purifying cabinet air leakage alarm disposal system, which comprises an acquisition module, a processing module and a storage module; the processing module is connected with the acquisition module and the storage module;
the memory module is used for storing executable computer program codes;
the acquisition module is used for acquiring first data related to the leaked gas and second data related to the purification cabinet and transmitting the first data and the second data to the processing module;
the method is characterized in that: the processing module is configured to execute the method according to the previous embodiment by calling the executable computer program code in the storage module.
The embodiment of the invention also discloses an electronic device, which comprises: a memory storing executable program code; a processor coupled to the memory; the processor invokes the executable program code stored in the memory to perform the method as described in the previous embodiment.
The embodiment of the invention also discloses a computer storage medium, and a computer program is stored on the storage medium, and when the computer program is run by a processor, the computer program executes the method according to the previous embodiment.
The embodiment of the invention also discloses a computer program product which executes the method according to the previous embodiment.
Various implementations of the systems and techniques described here above may be implemented in digital electronic circuitry, integrated circuit systems, field Programmable Gate Arrays (FPGAs), application Specific Integrated Circuits (ASICs), application Specific Standard Products (ASSPs), systems On Chip (SOCs), complex Programmable Logic Devices (CPLDs), computer hardware, firmware, software, and/or combinations thereof. These various embodiments may include: implemented in one or more computer programs, the one or more computer programs may be executed and/or interpreted on a programmable system including at least one programmable processor, which may be a special purpose or general-purpose programmable processor, that may receive data and instructions from, and transmit data and instructions to, a storage system, at least one input device, and at least one output device.
Program code for carrying out methods of the present disclosure may be written in any combination of one or more programming languages. These program code may be provided to a processor or controller of a general purpose computer, special purpose computer, or other programmable data processing apparatus such that the program code, when executed by the processor or controller, causes the functions/operations specified in the flowchart and/or block diagram to be implemented. The program code may execute entirely on the machine, partly on the machine, as a stand-alone software package, partly on the machine and partly on a remote machine or entirely on the remote machine or server.
In the context of this disclosure, a machine-readable medium may be a tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device. The machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. The machine-readable medium may include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing. More specific examples of a machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
To provide for interaction with a user, the systems and techniques described here can be implemented on a computer having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to a user; and a keyboard and pointing device (e.g., a mouse or trackball) by which a user can provide input to the computer. Other kinds of devices may also be used to provide for interaction with a user; for example, feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form, including acoustic input, speech input, or tactile input.
The systems and techniques described here can be implemented in a computing system that includes a background component (e.g., as a data server), or that includes a middleware component (e.g., an application server), or that includes a front-end component (e.g., a user computer having a graphical user interface or a web browser through which a user can interact with an implementation of the systems and techniques described here), or any combination of such background, middleware, or front-end components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: local Area Networks (LANs), wide Area Networks (WANs), and the internet.
The computer system may include a client and a server. The client and server are typically remote from each other and typically interact through a communication network. The relationship of client and server arises by virtue of computer programs running on the respective computers and having a client-server relationship to each other. The server may be a cloud server, a server of a distributed system, or a server incorporating a blockchain.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps recited in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the disclosed aspects are achieved, and are not limited herein.
The above detailed description should not be taken as limiting the scope of the present disclosure. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (10)
1. A method for alarm disposal of a purifying cabinet for air leakage, the method comprising the steps of:
determining first data related to the leaked gas and second data related to the purifying cabinet according to the leakage alarm signal of the purifying cabinet;
and generating a gas leakage alarm treatment scheme according to the first data and the second data, and executing the gas leakage alarm treatment scheme.
2. A method for alarm disposal of a purifying cabinet for air leakage according to claim 1, wherein: the first data of the leakage gas is determined according to the leakage alarm signal of the purifying cabinet, and the first data comprises:
determining the identity code of the purification cabinet according to the air leakage alarm signal, and calling the gas input record of the purification cabinet according to the identity code;
and determining the type code of the leakage gas according to the gas input record, and obtaining the first data according to the type code.
3. A method for alarm disposal of a purifying cabinet for air leakage according to claim 2, wherein: the determining the type code of the leakage gas according to the gas input record comprises the following steps:
determining first working state data of the purifying cabinet according to the second data, and determining a first period according to the first working state data;
and carrying out matching calculation on the gas input records according to the first time period to determine the type codes and the type quantity of the leaked gas.
4. A method for alarm disposal of a purifying cabinet for air leakage according to claim 2, wherein: the generating a leakage alarm handling scheme from the first data and the second data, comprising:
if the type code is single, determining a first alarm scheme and a first treatment scheme according to the type code;
if the type code is non-unitary, a second alarm scenario and a second treatment scenario are determined from the type code.
5. A method of purifying a cabinet leak alarm disposal according to claim 3, wherein: the length of the first period is determined from an efficiency parameter of the purge exhaust of the purification cabinet.
6. The method for alarm disposal of a purifying cabinet for air leakage according to claim 4, wherein: the second data relating to the purification cabinet further comprises second operational status data of the gas-consuming device;
the generating a leakage alarm handling scheme from the first data and the second data comprises:
evaluating the job completion probability of the gas consuming device in a second period according to the second working state data, and optimizing the first treatment scheme or the second treatment scheme according to the job completion probability so as to contain a gas valve closing sub-scheme;
and the gas valve closing time of the gas valve closing sub-scheme is determined according to the operation completion probability.
7. The method for alarm disposal of a purifying cabinet for air leakage according to claim 6, wherein: the estimating the job completion probability of the gas using equipment in the second period according to the second working state data comprises the following steps:
calculating to obtain air supply prediction data and operation task attribute data of the air utilization equipment in the second period according to the second working state data;
and evaluating the job completion probability of the gas using equipment in a second period according to the gas supply prediction data and the job task attribute data.
8. The purifying cabinet air leakage alarm disposal system comprises an acquisition module, a processing module and a storage module; the processing module is connected with the acquisition module and the storage module;
the memory module is used for storing executable computer program codes;
the acquisition module is used for acquiring first data related to the leaked gas and second data related to the purification cabinet and transmitting the first data and the second data to the processing module;
the method is characterized in that: the processing module for performing the method of any of claims 1-7 by invoking the executable computer program code in the storage module.
9. An electronic device, comprising: a memory storing executable program code; a processor coupled to the memory; the processor invokes the executable program code stored in the memory to perform the method of any of claims 1-7.
10. A computer storage medium having stored thereon a computer program which, when executed by a processor, performs the method of any of claims 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310600238.7A CN116612613A (en) | 2023-05-25 | 2023-05-25 | Purifying cabinet air leakage alarm disposal method and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310600238.7A CN116612613A (en) | 2023-05-25 | 2023-05-25 | Purifying cabinet air leakage alarm disposal method and system |
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| CN116612613A true CN116612613A (en) | 2023-08-18 |
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| CN202310600238.7A Pending CN116612613A (en) | 2023-05-25 | 2023-05-25 | Purifying cabinet air leakage alarm disposal method and system |
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- 2023-05-25 CN CN202310600238.7A patent/CN116612613A/en active Pending
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