CN116604815A - Micro-nano electrojet printing method based on electric field focusing and deflection control - Google Patents

Micro-nano electrojet printing method based on electric field focusing and deflection control Download PDF

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Publication number
CN116604815A
CN116604815A CN202310639292.2A CN202310639292A CN116604815A CN 116604815 A CN116604815 A CN 116604815A CN 202310639292 A CN202310639292 A CN 202310639292A CN 116604815 A CN116604815 A CN 116604815A
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micro
electric field
nano
needle
ink
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梁军生
李晓建
肖剑平
王华安
朱龙
张帆
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Dalian University of Technology
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Dalian University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/106Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/205Means for applying layers
    • B29C64/209Heads; Nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264Arrangements for irradiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

The invention belongs to the technical field of advanced manufacturing, and provides a micro-nano electrojet printing method based on electric field focusing and deflection control. The method uses double circular rings as induction electrodes, thereby inducing the printing of the ink at the micro-tip of the metal to obtain charged liquid drops with the resolution of micro-nano scale, then uses the jet deflection electrodes to generate time-varying pulse voltage signals to control the flight track of the liquid drops, prints high-precision micron patterns on a stationary receiving plate, and can further manufacture a macro-scale structure by combining the movement of a working platform. The method breaks through the limitation that the electro-jet printing micron patterning structure must depend on the track movement of the working platform, can realize the deposition of any pattern on the static platform, and has the characteristics of high printing resolution, high precision, high efficiency and the like.

Description

Micro-nano electrojet printing method based on electric field focusing and deflection control
Technical Field
The invention relates to the technical field of advanced manufacturing, in particular to a micro-nano electrojet printing method based on electric field focusing and deflection control.
Background
An electrojet printing (E-Jet printing) technology based on electrohydrodynamics (electrohydrodynamics) principle provides a printing process for directly and efficiently preparing a high-resolution micro-nano structure, and the technology utilizes the stretching of fluid in an electrostatic field to form large-diameter-ratio Jet flow and combines the movement of a specific track of a mechanical working platform to realize the positioning, deposition and patterning of functional material liquid drops. The principle of operation is that a suitable voltage is applied between the capillary orifice and the receiving substrate on the motion platform, and when liquid is delivered to the microorifice, the meniscus droplet surface formed at the orifice outlet forms a jet in the electric field. In this process, the electric field force and gravity, surface tension and viscous force acting on the liquid film cone are kept in dynamic balance to maintain the stability of jet flow. By adjusting the ink flow, the printing height and the application voltage, three printing types of drop-type electrospray jet printing, electrospray direct writing and electrospray can be realized. Where drop-wise electrospray printing drive techniques are typically implemented with direct voltage or pulsed voltage. Both of these techniques produce uniform droplets from the printhead, and the droplet size is at least an order of magnitude smaller than the nozzle size.
However, when the free pattern and the track are directly deposited, the jet stability is difficult to be ensured due to the irregular drop gravity falling in the start-stop stage of the pulse voltage, and the controllability of the printing process is reduced. In addition, since the patterned printing structure is obtained by the track motion of the platform, on the premise of fixed droplet emission frequency, the mechanical inertia and linear hysteresis (low acceleration) of the motion platform inevitably cause local accumulation of droplets on the printing structure (such as at the joint sections of track corners, curvature radius changes and the like), so that the rapid positioning and accurate deposition of continuous droplets into the patterned areas with micrometer feature sizes are difficult only by the two-dimensional motion of the mechanical platform.
In order to overcome the principle limitation of the bottom layer, the high-precision patterning and positioning of the charged jet flow are realized by regulating and controlling the parameters of an external electric field or a magnetic field in the prior art. Literature "plate P, fan j.controlled deposition of electrospun nanofibers by electrohydrodynamic reflections.journal of Applied Physics,2019,125 (5), 54901; liashenko I, rosell-Llombart J, cabot A.Ultrafast 3D printing with submicrometer features using electrostatic jet deflection.Nature Communication.2020;11 753 are all by adding additional deflection electrodes to deposit oriented fibers, which can effectively increase the printing speed and resolution of the fiber structure and realize the fiber deposition of complex patterns. However, precise control of the jet droplets is still not achieved, which greatly limits the geometric accuracy and application range of printing.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and discloses a micro-nano electrojet printing method based on electric field focusing and deflection control. The method combines electrostatic focusing and electrostatic deflection technology, wherein a double circular ring is used as an induction electrode to generate an electrostatic focusing electric field, so that ink at the tip of a metal micro-needle is induced to gather and jet liquid drops with micro-nano scale resolution, and simultaneously two additional jet deflection electrodes are introduced between the double circular ring structure and a receiving plate to generate a deflection electric field to continuously adjust the flight track of the jet liquid drops, so that a microstructure with any predefined pattern can be generated on the stationary receiving plate. The printing device has the advantages of high printing resolution, high structural accuracy, low cost and the like.
The technical scheme adopted by the invention is as follows: a micro-nano electric jet printing method based on electric field focusing and deflection control is provided, a double circular ring is used as an induction electrode to generate an electrostatic focusing electric field for inducing ink at the tip of a metal microneedle 2 to jet liquid drops; the droplets fly off the upper conductive ring 5 by inertia into the jet deflection domain. Two jet deflection electrodes are arranged to respectively generate time-varying pulse voltage signals for controlling the flight track of liquid drops to a static receiving plate 6, so that the manufacture of micro-nano devices is realized; the method comprises the following specific steps:
firstly, preparing and installing a printing device;
corroding the metal micro needle 2 to make the tip surface have a roughened structure 4 for promoting the ink to fully infiltrate the surface so as to provide a sufficient ink quantity; the bottom of the corroded metal microneedle 2 is fixed on the base 1, and the tip is positioned between the upper conductive circular ring 5 and the lower conductive circular ring 3; the high-voltage direct current power supply 12 is connected with the metal micro-needle 2; the receiving plate 6 is positioned above the upper conductive circular ring 5 and grounded; the upper conductive circular ring 5 and the lower conductive circular ring 3 are grounded and serve as grounding electrodes, and an electrostatic focusing electric field is formed between the upper conductive circular ring and the metal micro-needle 2; an x-direction deflection electrode 7 and a y-direction deflection electrode 8 are positioned between the receiving plate 6 and the upper conductive ring 5; the first high-voltage amplifier 9 connected to the y-direction deflection electrode 8 for the first passage of the pulse power supply 10, and the amplified pulse voltage is applied to the y-direction deflection electrode 8; the second channel of the pulse power supply 10 is connected to the x-direction deflection electrode 7 through a second high-voltage amplifier 11, and amplified pulse voltage is applied to the x-direction deflection electrode 7 to form a jet deflection electric field;
secondly, inducing micro-nano liquid drops;
disposing printing ink, attaching the ink on the metal micro-needles 2, so that the tips are completely immersed in the ink; the ink improves the wettability thereof under the action of the roughening structure 4; applying direct-current voltage on the metal micro-needle 2 through a high-voltage direct-current power supply 12, and adjusting the voltage value to ensure that partial ink at the tip of the metal micro-needle 2 overcomes the surface tension and viscous force of the ink under the action of a focusing electric field, and further focuses and sharpens and induces the formation of micro-nano liquid drops to be emitted; the rest of the ink on the surface of the metal microneedle 2 enters the next liquid drop emission period;
thirdly, deflecting the micro-nano liquid drops;
the channel I of the pulse power supply 10 and the first high-voltage amplifier 9 apply a pulse voltage signal in the y direction on the y-direction deflection electrode 8, the channel II of the pulse power supply 10 and the second high-voltage amplifier 11 apply a pulse voltage signal in the x direction on the x-direction deflection electrode 7 to form a jet deflection electric field, and parameters of the focusing electric field and the deflection electric field are regulated to continuously control and position and deposit emitted micro-nano liquid drops, so that a micro-nano patterning complex functional structure is finally obtained on the receiving plate 6.
The central axes of the lower conductive circular ring 3 and the upper conductive circular ring 5 are coaxial; the metal micro needle 2 is positioned on the central axis of the two conductive circular rings; the x-direction deflection electrode 7 and the y-direction deflection electrode 8 are orthogonally placed, and the distance between the x-direction deflection electrode and the central axis is larger than the inner radius of the two conductive circular rings; the distance between the deflection electrodes in the two directions is 0.1-1 mm from the conductive circular ring 5. The distance between the receiving plate 6 and the upper conductive circular ring 5 is 0.5-1.5 mm.
The radius of curvature of the tip of the metal microneedle 2 is 0.01-10 mu m; the inner diameters of the lower conductive circular ring 3 and the upper conductive circular ring 5 are 1-3 mm; the thickness of the x-direction deflection electrode 7 and the y-direction deflection electrode 8 is 0.01 to 0.2mm. The voltage value of the high-voltage direct-current power supply 12 is 200-2000V, and the liquid drop volume and the printing speed are controlled; the pulse amplitude of the y-direction deflection electrode 8 is-500-1500V, the pulse amplitude of the x-direction deflection electrode 7 is 0-2000V, and the deflection distance of the liquid drops is controlled.
The corrosion metal micro needle 2 is corroded by adopting ferric chloride solution.
The invention has the beneficial effects that: the micro-nano electrojet printing method based on electric field focusing and deflection control can realize high-precision and high-resolution patterning electrojet printing manufacture on a static receiving plate. In addition, the large-format array manufacturing with micron feature size and positioning accuracy can be realized by combining the movement of a mechanical working platform. The focusing state of the ink can be adjusted by changing the direct-current voltage parameter, and the printing speed and the volume of the liquid drop are further controlled. By adjusting the pulse voltage amplitude, the deflection distance of the droplet can be controlled. The dual-ring structure is adopted for electric jet printing, so that electric field crosstalk between a deflection domain and a focusing domain can be effectively avoided, and printing controllability is improved. The method has wide application prospect in the fields of large-format LED display screens, sensors and the like.
Drawings
FIG. 1 (a) is a schematic diagram of a micro-nano electrojet printing apparatus based on electric field focus and deflection control;
FIG. 1 (b) is an enlarged view of a portion of the tip of the metallic microneedle of FIG. 1 (a);
FIG. 2 is a schematic illustration of a metallic micro-needle tip immersion ink for a micro-nano electrojet printing device based on electric field focus and deflection control;
FIG. 3 is a high resolution photograph of a printing apparatus of the present invention;
fig. 4 (a) -4 (d) are high-speed camera photographs of droplet flight trajectories controlled by electric field focusing and deflection, wherein: fig. 4 (a) shows a liquid film covering the needle tip, fig. 4 (b) shows a liquid surface focusing a taylor cone and driving the droplet to be emitted, fig. 4 (c) shows deflection to control the flight of the droplet, and fig. 4 (d) shows the droplet to be deposited on the receiving plate.
Fig. 5 is a circular pattern array printed using the method of the present invention.
Wherein: the micro-needle comprises a 1-base, a 2-metal micro-needle, a 3-lower conductive circular ring, a 4-roughened structure, a 5-upper conductive circular ring, a 6-receiving plate, a 7-x direction deflection electrode, an 8-y direction deflection electrode, a 9-first high-voltage amplifier, a 10-pulse power supply, a 11-second high-voltage amplifier and a 12-high-voltage direct current power supply.
The following describes specific embodiments of the present invention in detail with reference to the technical scheme and the accompanying drawings.
Fig. 1 is a schematic diagram of a micro-nano electric jet printing device based on electric field focusing and deflection control, and as shown in fig. 1, in a micro-nano electric jet printing method based on electric field focusing and deflection control, a printing device is first prepared and installed, and specific steps of the method are as follows:
firstly, preparing and installing a printing device;
firstly, putting a metal microneedle 2 with a curvature radius of 0.01-10 mu m into 1-2 mol/L ferric chloride solution to corrode for 1-5 min, so that the surface of the metal microneedle is provided with a roughened structure 4, and the surface of the metal microneedle can be fully infiltrated by ink so as to provide sufficient ink quantity, as shown in figure 2; the corroded metal micro-needle 2 is fixed on the base 1 through PDMS in a heat curing mode, and the effect of isolating the metal micro-needle from the outside is achieved; then, the upper conductive circular ring 5 and the lower conductive circular ring 3 with the inner diameters of 1-3 mm are simultaneously fixed on the micro-motion platform, so that the positions of the conductive circular rings can be conveniently adjusted in real time; then vertically placing the metal micro-needle 2 between the upper conductive circular ring 5 and the lower conductive circular ring 3, and ensuring that the metal micro-needle coincides with the central axes of the two conductive circular rings; an x-direction deflection electrode 7 and a y-direction deflection electrode 8 with the thickness of 0.01-0.2 mm are orthogonally arranged and positioned between the receiving plate 6 and the upper conductive circular ring 5, and the distance between the upper conductive circular ring 5 is 0.1-1 mm; the distance between the receiving plate 6 and the upper conductive circular ring 5 is 0.5-1.5 mm, as shown in figure 3; the high-voltage direct current power supply 12 is connected with the metal micro-needle 2; the upper conductive circular ring 5 and the lower conductive circular ring 3 are grounded and serve as grounding electrodes, and an electrostatic focusing electric field is formed between the upper conductive circular ring and the metal micro-needle 2; the first channel of the pulse power supply 10 is connected with the first high-voltage amplifier 9, and the amplified pulse voltage is applied to the y-direction deflection electrode 8; the second channel of the pulse power supply 10 is connected to the second high-voltage amplifier 11, and applies the amplified pulse voltage to the x-direction deflection electrode 7, thereby forming a jet deflection electric field.
Secondly, inducing micro-nano liquid drops;
the printing ink is configured, and trace ink is attached to the metal micro-needle 2 in a manner similar to a dip pen, so that the tip is completely immersed in the ink; the ink improves the wettability of the ink under the action of the roughened surface structure 4; applying direct-current voltage on the metal micro-needle 2 through a high-voltage direct-current power supply 12, and adjusting the voltage value (200-2000V) to ensure that trace ink at the tip of the metal micro-needle 2 overcomes the surface tension and viscous force of the ink under the action of a focusing electric field, and further focuses and sharpens and induces micro-nano liquid drops to be emitted; next, the ink on the surface of the metal microneedle 2 enters the next droplet discharge period.
Third, deflecting micro-nano liquid drops
The channel I of the pulse power supply 10 and the first high-voltage amplifier 9 apply a pulse voltage signal (-500-1500V) in the y direction on the y-direction deflection electrode 8, and meanwhile, the channel II of the pulse power supply 10 and the second high-voltage amplifier 11 apply a pulse voltage signal (0-2000V) in the x direction on the x-direction deflection electrode 7 to form a jet deflection electric field; by adjusting the electric field parameters of the focusing electric field domain and the deflection electric field domain, continuous control and positioning deposition of jet flow liquid drops are realized, and finally, a micro-nano patterning complex functional structure is obtained on the receiving plate 6, and the printed liquid drops are shown in fig. 5.
Fig. 4 (a) -fig. 4 (d) are high-speed camera photographs of the flight path of the liquid drop controlled by electric field focusing and deflection, firstly, constant direct current voltage is applied to the metal microneedle 2, the surface of the liquid film is polarized to form electric charge under the effect of electrostatic focusing in the double circular rings, and the focusing liquid cone is further sharpened by electrowetting under the combined effect of electric field force and surface tension, overcomes the surface tension, viscous force and gravity of the liquid cone, and ejects micro-nano liquid drop. And then the jet liquid drops fly away from the double-circular-ring structure and enter the jet deflection domain by virtue of inertia, and the flying track of the liquid drops can be further controlled and deposited on a preset pattern position under the action of a time-varying pulse voltage signal generated by the jet deflection electrode.
The micro-nano electrojet printing method based on electric field focusing and deflection control breaks through the limitation that an electrojet printing patterning structure must rely on the track motion of a mechanical working platform. The electrostatic focusing electric field generated by the double circular rings is adopted to spray the liquid drops, the jet deflection electrode is further adopted to control the flight track of the liquid drops, high-precision micron pattern printing can be realized on the stationary receiving plate, and simultaneously, the macroscopic scale structure is manufactured by combining the movement of the mechanical working platform. The method has potential application value in the fields of light-emitting diodes, sensors and the like.

Claims (6)

1. A micro-nano electric jet printing method based on electric field focusing and deflection control is characterized in that double circular rings are arranged as induction electrodes to generate an electrostatic focusing electric field for inducing ink at the tips of metal micro-needles (2) to jet liquid drops; two jet deflection electrodes are arranged, and time-varying pulse voltage signals are respectively generated and used for controlling the flight track of liquid drops to a static receiving plate (6); the method comprises the following specific steps:
firstly, preparing and installing a printing device;
corroding the metal micro needle (2) to make the tip surface have a roughened structure (4) for promoting the ink to fully infiltrate the surface so as to provide a sufficient ink quantity; the bottom of the corroded metal microneedle (2) is fixed on the base (1), and the tip is positioned between the upper conductive circular ring (5) and the lower conductive circular ring (3); the high-voltage direct-current power supply (12) is connected with the metal micro-needle (2); the receiving plate (6) is positioned above the upper conductive circular ring (5) and grounded; the upper conductive circular ring (5) and the lower conductive circular ring (3) are grounded to serve as grounding poles, and an electrostatic focusing electric field is formed between the upper conductive circular ring and the metal micro-needle (2); the x-direction deflection electrode (7) and the y-direction deflection electrode (8) are positioned between the receiving plate (6) and the upper conductive circular ring (5); the first high-voltage amplifier (9) is connected to the y-direction deflection electrode (8) through the first channel of the pulse power supply (10); the second channel of the pulse power supply (10) is connected to the x-direction deflection electrode (7) through a second high-voltage amplifier (11) to form a jet deflection electric field;
secondly, inducing micro-nano liquid drops;
printing ink is arranged, the ink is attached to the metal micro-needle (2), and the tip is completely immersed in the ink; the wettability of the ink is improved under the action of the roughening structure (4); applying direct current voltage on the metal micro-needle (2) through a high-voltage direct current power supply (12), and adjusting the voltage value, so that partial ink at the tip of the metal micro-needle (2) overcomes the surface tension and viscous force of the ink under the action of a focusing electric field, and further focuses and sharpens and induces micro-nano liquid drops to be emitted; the rest ink on the surface of the metal micro needle (2) enters the next liquid drop emission period;
thirdly, deflecting the micro-nano liquid drops;
the channel I of the pulse power supply (10) and the first high-voltage amplifier (9) apply a pulse voltage signal in the y direction on the y-direction deflection electrode (8), the channel II of the pulse power supply (10) and the second high-voltage amplifier (11) apply a pulse voltage signal in the x direction on the x-direction deflection electrode (7) to form a jet deflection electric field, and parameters of the focusing electric field and the deflection electric field are regulated so as to continuously control and position and deposit the emitted micro-nano liquid drops, and finally, the micro-nano patterning complex functional structure is obtained on the receiving plate (6).
2. The micro-nano electro-jet printing method based on electric field focusing and deflection control according to claim 1, characterized in that the central axes of the lower conductive ring (3) and the upper conductive ring (5) are coaxial; the metal micro needle (2) is positioned on the central axis of the two conductive circular rings; the x-direction deflection electrode (7) and the y-direction deflection electrode (8) are orthogonally arranged, and the distance between the x-direction deflection electrode and the central axis is larger than the inner radius of the two conductive circular rings; the distance between the deflection electrodes in the two directions is 0.1-1 mm; the distance between the receiving plate (6) and the upper conductive circular ring (5) is 0.5-1.5 mm.
3. The micro-nano electro-jet printing method based on electric field focusing and deflection control according to claim 1 or 2, characterized in that the tip radius of curvature of the metal micro-needle (2) is 0.01-10 μm; the inner diameters of the lower conductive circular ring (3) and the upper conductive circular ring (5) are 1-3 mm; the thickness of the x-direction deflection electrode (7) and the y-direction deflection electrode (8) is 0.01-0.2 mm.
4. A micro-nano electro-jet printing method based on electric field focusing and deflection control according to claim 3, wherein the voltage value of the high voltage direct current power supply (12) is 200-2000V, the pulse amplitude of the y-direction deflection electrode (8) is-500-1500V, and the pulse amplitude of the x-direction deflection electrode (7) is 0-2000V.
5. The electric field focusing and deflection control-based micro-nano electro-jet printing method according to claim 1, 2 or 4, wherein the etched metal micro-needle (2) is etched with ferric chloride solution.
6. A micro-nano electro-jet printing method based on electric field focusing and deflection control according to claim 3, wherein the etched metal micro-needle (2) is etched with ferric chloride solution.
CN202310639292.2A 2023-06-01 2023-06-01 Micro-nano electrojet printing method based on electric field focusing and deflection control Pending CN116604815A (en)

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