CN116604399A - Contour measurement method, apparatus, device and storage medium - Google Patents
Contour measurement method, apparatus, device and storage medium Download PDFInfo
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q23/00—Arrangements for compensating for irregularities or wear, e.g. of ways, of setting mechanisms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Abstract
The invention relates to the technical field of optical manufacturing and detection, and provides a contour measurement method, a contour measurement device, contour measurement equipment and a storage medium, wherein the contour measurement method comprises the following steps: acquiring a plurality of first measuring points and at least two contour points of an element to be measured; obtaining first contour information of the element to be measured according to a preset element processing path and a plurality of first measuring points; determining a radius compensation direction of each first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and at least two contour points; the first cutter processing point corresponds to the second measuring point; and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point. The invention reduces the measurement error caused by the radius of the measuring head, simplifies the error compensation process and improves the measurement precision.
Description
Technical Field
The present invention relates to the field of optical manufacturing and detection technologies, and in particular, to a contour measurement method, apparatus, device, and storage medium.
Background
In the process of preparing an aspherical optical element, it is necessary to measure the profile of the surface of the aspherical optical element, and the contact measurement method is widely used in the profile measurement of the aspherical optical element.
In the prior art, a mechanical measuring head always keeps contact with a surface to be measured in the contact measurement process, and displacement information of the mechanical measuring head is measured by a sensor so as to obtain profile information of the surface to be measured. However, when measuring profile information of an aspherical surface, since the normal direction of the surface to be measured is continuously changed and calculation is required, a deviation is likely to occur when compensating the probe radius, and the measurement accuracy is not high.
Disclosure of Invention
The invention provides a contour measurement method, a contour measurement device, contour measurement equipment and a storage medium, which are used for solving the defect of low measurement precision in the prior art and realizing improvement of the measurement precision.
In a first aspect, the present invention provides a contour measurement method, including:
acquiring a plurality of first measuring points and at least two contour points of an element to be measured;
obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
determining a radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point;
And obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
Optionally, the determining the radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first tool processing point, and the at least two contour points includes:
obtaining the position information of a second cutter processing point corresponding to the first measuring point according to the initial position information and the relative position information of the first measuring point;
and determining the radius compensation direction of the first measuring point according to the position information of the second cutter processing point and the at least two contour points.
Optionally, the determining the radius compensation direction of the first measurement point according to the position information of the second tool processing point and the at least two contour points includes:
determining at least one pair of adjacent contour points including the second tool processing point according to the position information of the second tool processing point and the at least two contour points;
determining normal vectors corresponding to the adjacent contour points according to the at least one pair of adjacent contour points;
And determining the radius compensation direction of the first measuring point according to the normal vector corresponding to each adjacent contour point.
Optionally, the first profile information is a first coordinate point set obtained based on position information corresponding to each of the first measurement points; the second profile information is a second coordinate point set obtained based on the compensated position information corresponding to each first measuring point; the first coordinate point set and the second coordinate point set are determined based on a coordinate system of a machine tool; the obtaining second profile information of the element to be measured according to the radius compensation direction and the first profile information corresponding to each first measurement point includes:
for each first measurement point, obtaining compensated position information corresponding to the first measurement point according to initial position information corresponding to the first measurement point, a radius compensation direction corresponding to the first measurement point and a compensation amount corresponding to the radius compensation direction; the compensated position information is represented by coordinate points;
determining compensated coordinate points corresponding to the first measurement points according to the compensated position information corresponding to the first measurement points;
And determining a set of compensated coordinate points corresponding to each first measuring point as the second contour information.
Optionally, the element to be measured is an aspheric optical element; the obtaining first profile information of the element to be measured according to the preset element processing path and the plurality of first measuring points includes:
moving a machine table according to the preset element processing path until the measuring range related to the surface profile of the aspheric optical element is traversed, and obtaining a plurality of first measuring points;
and obtaining the first contour information according to the initial position information of the plurality of first measuring points.
Optionally, before determining the radius compensation direction of the first measurement point according to the initial position information of the first measurement point, the relative position information of the second measurement point and the first tool processing point, and the at least two contour points, the method further includes:
determining the relative position information according to the position information of the second measuring point and the position information of the first cutter processing point; the position information of the first tool processing point is determined based on the position information of at least one pair of adjacent contour points including the first tool processing point; each pair of the adjacent contour points is two adjacent contour points including the first tooling point in the at least two contour points.
In a second aspect, the present invention provides a profile measurement apparatus comprising:
the acquisition module is used for acquiring a plurality of first measuring points and at least two contour points of the element to be measured;
the measuring module is used for obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
the compensation module is used for determining the radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point; and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
Optionally, the compensation module is configured to:
obtaining the position information of a second cutter processing point corresponding to the first measuring point according to the initial position information and the relative position information of the first measuring point;
and determining the radius compensation direction of the first measuring point according to the position information of the second cutter processing point and the at least two contour points.
In a third aspect, the present invention also provides an electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing any one of the contour measurement methods described above when executing the program.
In a fourth aspect, the invention also provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements a contour measurement method as described in any of the above.
In a fifth aspect, the invention also provides a computer program product comprising a computer program which, when executed by a processor, implements a contour measurement method as described in any of the above.
The invention provides a contour measurement method, a contour measurement device, contour measurement equipment and a contour measurement storage medium, wherein first contour information of an element to be measured is obtained by acquiring a plurality of first measurement points and at least two contour points of the element to be measured and then according to a preset element processing path and the plurality of first measurement points; further, for each first measuring point, determining a radius compensation direction of the first measuring point according to initial position information of the first measuring point, relative position information of a second measuring point and a first cutter processing point, and at least two contour points, wherein the first cutter processing point corresponds to the second measuring point; and finally, obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point. According to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and at least two contour points, the radius compensation direction of the first measuring point is determined, namely, according to the initial position information of each first measuring point, the compensation direction for compensating the radius of each first measuring point is determined by utilizing the relative position information of the second measuring point and the first cutter processing point and at least two contour points, namely, the radius compensation direction for compensating the radius of each first measuring point is determined by the cutter processing point in the actual processing process of the element, the measurement error caused by the measuring head radius is reduced, the error compensation process is simplified, and the measurement precision is improved.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of a contour measurement method according to the present invention;
FIG. 2a is a second flow chart of the contour measurement method according to the present invention;
FIG. 2b is a third schematic flow chart of the contour measurement method according to the present invention;
FIG. 3 is a schematic view of a contour measuring device according to the present invention;
fig. 4 is a schematic structural diagram of an electronic device provided by the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The application scenario related to the invention is described.
The aspheric optical element has more design freedom, and has the advantages of reducing aberration, improving image quality, simplifying optical system structure and the like, so that the aspheric optical element is widely applied to modern optical systems. In the production of an aspherical optical element, it is necessary to measure the profile of the surface of the aspherical optical element and to perform compensation processing based on the measurement result.
In the prior art, the contour measurement method of the surface of the aspheric optical element is mainly divided into two types of optical non-contact measurement and contact measurement. Wherein:
(1) The optical non-contact measuring method also comprises a Fizeau interferometry method, a calculation holographic method, a confocal scanning measuring method and the like according to the principle. However, the optical non-contact measurement method generally has relatively high requirements on the measurement environment, and in order to ensure the measurement accuracy, the surface to be measured needs to be cleaned if necessary.
(2) In the contact measurement process, the mechanical measuring head always keeps contact with the surface to be measured, and the profile information of the surface to be measured is obtained through displacement of the mechanical measuring head and measurement of the sensor. However, when measuring profile information of an aspherical surface, since the normal direction of the surface to be measured is continuously changed, a deviation is likely to occur when compensating the probe radius, and the measurement accuracy is poor.
Based on the defects, the invention provides a technical scheme for contour measurement, which is applied to the ultra-precise machining process of an aspheric optical element, can reduce compensation errors and has higher measurement precision.
The solution of profile measurement provided by the present invention is described below in connection with fig. 1-4.
Fig. 1 is a schematic flow chart of a contour measurement method according to the present invention, as shown in fig. 1, the method includes:
step 101, acquiring a plurality of first measuring points and at least two contour points of an element to be measured;
in particular, at least two contour points of an element to be measured, for example an aspherical optical element, can be obtained first, in particular a continuous contour line can be discretized into a series of contour points P in the machine coordinate system XZ plane using, for example, an interpolation algorithm i I=0, 1, … j, k …, n, where n is an integer of 2 or more.
Optionally, the number of discrete profile points is based on machining accuracy requirements for the profile of the aspheric optical element. For example, the higher the processing precision requirement of the surface type is, the more the corresponding discrete points are, the smaller the distance between a pair of adjacent contour points is, and meanwhile, the higher the requirements on the software and hardware systems of a machine tool are; on the contrary, the lower the machining precision requirement of the surface type is, the smaller the number of corresponding discrete points is, the larger the distance between a pair of adjacent contour points is, and meanwhile, the requirement on a software and hardware system of a machine tool is reduced.
Further, the plurality of first measurement points of the element under test may be determined based on relative position information of a measuring instrument, such as a mechanical stylus, and a machining tool, such as a diamond tool. Typically, the number of first measuring points of the element to be measured corresponds to the number of contour points.
102, obtaining first contour information of an element to be measured according to a preset element processing path and a plurality of first measuring points;
specifically, after the contour point and the first measurement point of the element to be measured are determined, the first contour information of the element to be measured may be obtained according to the element processing path and the plurality of first measurement points, for example, a table top of a machine tool may be moved according to a preset element processing path, for example, a cutter, a fixture, etc. may be disposed on the table top of the machine tool until a preset measurement range is traversed, where the measurement range refers to a measurement range related to the surface contour of the aspheric optical element, and the plurality of first measurement points may be obtained simultaneously.
Further, the first profile information, i.e. the profile information of the uncompensated element to be measured, may be obtained from initial position information of the plurality of first measuring points, i.e. the uncompensated initial position information of the plurality of first measuring points, e.g. the initial coordinates of the plurality of first measuring points in the machine tool coordinate system, and in one embodiment the first profile information of the uncompensated aspheric optical element is output, e.g. by means of a touch sensor on the measuring instrument.
Step 103, determining a radius compensation direction of each first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and at least two contour points; the first cutter processing point corresponds to the second measuring point;
specifically, after obtaining the initial position information of the plurality of first measurement points in step 102, compensation calculation may be performed for each first measurement point to obtain radius compensation directions corresponding to the plurality of first measurement points, and the implementation process is as follows:
firstly, it can be understood that the second measuring point corresponds to the first cutter machining point, that is, in the process of machining the element to be measured, the contour measurement and the machining process can be performed simultaneously, for example, the element to be measured is machined by using a diamond cutter, and meanwhile, the contour information of the element to be measured can be measured by using a mechanical measuring head, wherein in the process of machining and measuring the element to be measured, the relative position between the mechanical measuring head and the cutter machining point (i.e., the cutter point) of the diamond cutter is fixed, so that the relative position between the second measuring point and the first cutter machining point and the initial position information of the first measuring point can be used for calculating and representing the position information of the second cutter machining point corresponding to the first measuring point, that is, the position information of the second cutter machining point corresponding to the first measuring point can be obtained according to the initial position information of the first measuring point and the relative position information of the second measuring point and the first cutter machining point;
Further, the radius compensation direction of the first measuring point may be determined according to the position information of the second tool processing point corresponding to the first measuring point and at least two contour points, where the first tool processing point corresponds to the second measuring point, and the first measuring point corresponds to the second tool processing point. For example, a normal vector corresponding to at least one pair of adjacent contour points including the second tool machining point is determined as the radius compensation direction of the first measurement point.
Step 104, obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
Specifically, second profile information of the element to be measured is obtained according to the radius compensation direction and the first profile information corresponding to each first measurement point, for example, the first profile information is combined according to the radius compensation direction corresponding to each first measurement point, the first profile information comprises initial position information corresponding to each first measurement point, compensated position information corresponding to each first measurement point is obtained, and the compensated position information corresponding to each first measurement point can be represented by a coordinate point; and then, obtaining second contour information according to the compensated positions corresponding to the first measuring points.
In the method provided by the embodiment, a plurality of first measuring points and at least two contour points of an element to be measured are obtained, and then first contour information of the element to be measured is obtained according to a preset element processing path and the plurality of first measuring points; further, for each first measuring point, determining a radius compensation direction of the first measuring point according to initial position information of the first measuring point, relative position information of a second measuring point and a first cutter processing point, and at least two contour points, wherein the first cutter processing point corresponds to the second measuring point; and finally, obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point. According to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and at least two contour points, the radius compensation direction of the first measuring point is determined, namely, according to the initial position information of each first measuring point, the compensation direction for compensating the radius of each first measuring point is determined by utilizing the relative position information of the second measuring point and the first cutter processing point and at least two contour points, namely, the radius compensation direction for compensating the radius of each first measuring point is determined by the cutter processing point in the actual processing process of the element, the measurement error caused by the measuring head radius is reduced, the error compensation process is simplified, and the measurement precision is improved.
Optionally, determining the radius compensation direction of the first measurement point according to the initial position information of the first measurement point, the relative position information of the second measurement point and the first tool processing point, and at least two contour points includes:
obtaining the position information of a second cutter processing point corresponding to the first measuring point according to the initial position information and the relative position information of the first measuring point;
and determining the radius compensation direction of the first measuring point according to the position information of the second cutter processing point and at least two contour points.
Specifically, step 103 may be implemented by the following steps: firstly, according to initial position information and relative position information of a first measuring point, position information of a second cutter processing point corresponding to the first measuring point is obtained, and then, according to the position information of the second cutter processing point and at least two contour points, the radius compensation direction of the first measuring point is determined.
For example, the relative position information may be understood as the relative position information of a measuring point and a tool machining point in the actual machining and measuring process, for example, a diamond tool is used to machine the element to be measured, and a mechanical measuring head is used to measure the contour of the element to be measured, wherein the relative positions of the diamond tool and the mechanical measuring head are fixed in the machining and measuring process of the element to be measured. The relative position information is, for example, a vector corresponding to the coordinates of the measurement point where the mechanical probe is located to the coordinates of the machining point where the tool is located, as follows:
；
Wherein, the liquid crystal display device comprises a liquid crystal display device,representing relative position information, for example a vector connecting the second measuring point with the first tool machining point, wherein +.>Indicating that the movement from the second measuring point to the first tool machining point is to be in the machine coordinate system +.>Equivalent of on-axis movement, +.>Indicating that the movement from the second measuring point to the first tool machining point is to be in the machine coordinate system +.>Equivalent amount of movement on the shaft.
Further, based on the initial position information of the first measurement point and the relative position informationThe process of obtaining the position information of the second tool machining point corresponding to the first measuring point is exemplified as follows:
if the initial position information of the first measurement point is:
；
wherein, the liquid crystal display device comprises a liquid crystal display device,representing the initial position coordinates of the first measuring point, for example>Representing the initial position coordinate of the first measuring point in the machine tool coordinate system +.>Position on the shaft, ">Representing the initial position coordinate of the first measuring point in the machine tool coordinate system +.>A position on the shaft;
the position information of the second tool processing point corresponding to the first measurement point can be obtained based on the relative position information, which is:
。
wherein, the liquid crystal display device comprises a liquid crystal display device,representing the initial position coordinates of the first measuring point, for example>Representing the initial position coordinate of the first measuring point in the machine tool coordinate system +.>Position on the shaft, ">Representing the initial position coordinate of the first measuring point in the machine tool coordinate system +. >A position on the shaft.
Further, the radius compensation direction of the first measuring point can be obtained according to the position information of the second tool machining point corresponding to the first measuring point and at least two contour points.
According to the method provided by the embodiment, the position information of the second cutter processing point corresponding to the first measuring point is obtained according to the initial position information and the relative position information of the first measuring point, and then the radius compensation direction of the first measuring point is determined according to the position information of the second cutter processing point and at least two contour points; and then, the first measuring points are compensated according to the determined radius compensation direction of the first measuring points, the compensated second contour information is obtained, the calculated amount of the process of compensating the first measuring points is reduced, and the measuring precision is higher.
Optionally, determining the radius compensation direction of the first measurement point according to the position information of the second tool processing point and at least two contour points includes:
determining at least one pair of adjacent contour points comprising the second tool processing point according to the position information of the second tool processing point and the at least two contour points;
determining normal vectors corresponding to each adjacent contour point according to at least one pair of adjacent contour points;
And determining the radius compensation direction of the first measuring point according to the normal vector corresponding to each adjacent contour point.
Specifically, at least one pair of adjacent contour points including the second tool processing point may be determined according to the position information of the second tool processing point and at least two contour points, then a normal vector corresponding to each adjacent contour point may be determined according to the determined at least one pair of adjacent contour points, and then a radius compensation direction of the first measurement point may be determined according to the normal vector corresponding to each adjacent contour point.
Illustratively, the process of determining the radius compensation direction of the first measurement point is exemplified as follows:
for example, the contour point of the element to be measured is denoted as P i Where i=0, 1, … j, k …, n; n is a positive integer greater than or equal to 2;
further, at least one pair of adjacent contour points including the second tooling point is determined, e.g. the second tooling point is at P j And P k Between a pair of adjacent contour points is P j And P k ；
Further, a normal vector I corresponding to a pair of adjacent contour points including the second tool processing point is determined according to the pair of adjacent contour points including the second tool processing point jk . Wherein, a pair of adjacent contour points P j And P k Can be regarded as a two-dimensional straight line, the normal vector I of which jk Is a perpendicular to the two-dimensional straight line;
normal vector I jk A radius compensation direction for the first measurement point is determined.
In the method provided by the embodiment, the calculation amount in the process of compensating each first measuring point is reduced, the measuring precision is higher, and the finally obtained second contour information of the element to be measured is more accurate.
Optionally, the first profile information is a first coordinate point set obtained based on the position information corresponding to each first measurement point; the second contour information is a second coordinate point set obtained based on the compensated position information corresponding to each first measuring point; the first coordinate point set and the second coordinate point set are determined based on a coordinate system of the machine tool; obtaining second profile information of the element to be measured according to the radius compensation direction and the first profile information corresponding to each first measuring point, wherein the second profile information comprises:
for each first measuring point, obtaining compensated position information corresponding to the first measuring point according to initial position information corresponding to the first measuring point, a radius compensation direction corresponding to the first measuring point and a compensation amount corresponding to the radius compensation direction; the compensated position information is represented by coordinate points;
determining compensated coordinate points corresponding to the first measuring points according to the compensated position information corresponding to the first measuring points;
And determining a set of compensated coordinate points corresponding to each first measuring point as second contour information.
Specifically, the first profile information is a first coordinate point set obtained based on position information corresponding to each of the first measurement points, wherein the first coordinate point set is determined based on a coordinate system of the machine tool.
The second contour information is a second coordinate point set obtained based on the compensated position information corresponding to each first measuring point, wherein the second coordinate point set is determined based on a coordinate system of the machine tool.
Further, step 104 may be implemented by:
for each first measuring point, obtaining compensated position information corresponding to the first measuring point according to initial position information corresponding to the first measuring point, a radius compensation direction corresponding to the first measuring point and a compensation amount corresponding to the radius compensation direction, wherein the compensated position information is represented by a coordinate point; then, according to the compensated position information corresponding to each first measuring point, determining a compensated coordinate point corresponding to each first measuring point; and finally, determining a set of compensated coordinate points corresponding to each first measuring point as second contour information.
Fig. 2a is a second schematic flow chart of the contour measurement method according to the present invention, and fig. 2b is a third schematic flow chart of the contour measurement method according to the present invention. As shown in fig. 2a and 2b, an example of the procedure of determining the compensated position information corresponding to the first measurement point is as follows:
first, initial position information corresponding to the first measurement point is expressed as (x m ,z m ) According to adjacent contour points P j And P k Determining a radius compensation direction I corresponding to the first measuring point jk . I.e. perpendicular to the adjacent contour point P j And P k Normal vector I of connected two-dimensional straight lines jk As a radius compensation direction corresponding to the first measurement point;
further, as shown in fig. 2b, the compensation amount delta corresponding to the first measurement point is determined x And delta z The procedure of (a) is exemplified by delta x Representing the compensation quantity of the first measuring point on the x-axis, the calculation process is as follows:
δ x =R×cos(I jk )；
wherein delta x The compensation quantity of the first measuring point on the x axis is represented, and R represents the measuring head radius of the mechanical measuring head;
δ z representing the compensation quantity of the first measuring point on the Z axis, the calculation process is as follows:
δ z =R×[1-sin(I jk )]；
wherein delta z The compensation quantity of the first measuring point on the Z axis is represented, and R represents the measuring head radius of the mechanical measuring head;
further, according to the initial position information corresponding to the first measuring point, the radius compensation direction corresponding to the first measuring point and the compensation amount corresponding to the radius compensation direction, the compensated position corresponding to the first measuring point is obtained The information is (x) m +δ x ,z m +δ z ）；
Further, after the compensated position information corresponding to each first measurement point is obtained, the first contour information may be compensated, and the compensated second contour information may be obtained.
Illustratively, the first profile information is represented asThe initial position information of n first measuring points is contained, and n is an integer greater than or equal to 2. Wherein->Initial position information indicating the nth first measurement point.
Further, according to the initial position information of the nth first measurement pointRadius compensation direction I corresponding to the first measuring point jk For example, parallel to the x-axis and a corresponding compensation amount 10 in the radial compensation direction, the compensated position information corresponding to the first measuring point, for example, the compensated coordinate point corresponding to the nth first measuring point is ∈>。
Further, a set of compensated coordinate points corresponding to the respective first measurement points is determined as the second profile information. The second contour information is expressed asThe method comprises the steps of including compensated coordinate points corresponding to n first measurement points.
In the method provided by the embodiment, for each first measurement point, the compensated position information corresponding to the first measurement point is obtained according to the initial position information corresponding to the first measurement point, the radius compensation direction corresponding to the first measurement point and the compensation amount corresponding to the radius compensation direction, then the compensated coordinate points corresponding to the first measurement points are determined according to the compensated position information corresponding to each first measurement point, and finally the set of the compensated coordinate points corresponding to each first measurement point is determined as the second contour information. In the method provided by the embodiment, the calculation amount of the process of compensating each first measurement point is reduced, and the measurement accuracy is higher.
Optionally, the element to be measured is an aspheric optical element; obtaining first contour information of the element to be measured according to a preset element processing path and a plurality of first measuring points, wherein the first contour information comprises the following steps:
moving a machine tool table according to a preset element processing path until the measuring range related to the surface profile of the aspheric optical element is traversed, and obtaining a plurality of first measuring points;
and obtaining first contour information according to the initial position information of the plurality of first measuring points.
Specifically, the element to be measured may be an aspheric optical element, and commonly used parabolic mirrors, hyperboloid mirrors, ellipsoidal mirrors, and the like. The aspheric optical element refers to an optical element with a surface shape which is decided by a plurality of high-order equations and has inconsistent radiuses of points on the surface shape, and is generally applied to lenses and reflectors in an optical system. The optical system designed by adopting the aspheric technology can eliminate spherical aberration, coma aberration, astigmatism and field curvature and cut out light energy loss, so that high-quality image effect and high-quality optical characteristics can be obtained.
Step 102 may be implemented by:
specifically, the table of the machine tool may be moved according to a preset element processing path, and a tool, a fixture, etc. may be disposed on the machine tool until a preset measurement range is traversed, where the measurement range refers to a measurement range related to a surface profile of the aspheric optical element, and a plurality of first measurement points may be obtained.
Further, the first profile information may be obtained based on initial position information of the plurality of first measurement points, for example, initial coordinates of the plurality of first measurement points on a machine tool coordinate system.
In the method provided by the embodiment, the table top of the machine tool is moved according to the preset element processing path until the measuring range related to the surface profile of the aspheric optical element is traversed, so that a plurality of first measuring points are obtained, first profile information is obtained according to initial position information of the plurality of first measuring points, namely uncompensated first profile information is obtained, further compensation is conveniently carried out on the radius of the plurality of first measuring points based on the first profile information, compensated second profile information is obtained, and the obtained second profile information is accurate.
Optionally, before determining the radius compensation direction of the first measurement point according to the initial position information of the first measurement point, the relative position information of the second measurement point and the first tool processing point, and at least two contour points, the method further includes:
determining relative position information according to the position information of the second measuring point and the position information of the first cutter processing point; the position information of the first tooling point is determined based on the position information of at least one pair of adjacent contour points including the first tooling point; each pair of adjacent contour points is two adjacent contour points including the first tooling point in the at least two contour points.
Specifically, the position information of the first tooling point in the present embodiment is determined based on the position information of at least one pair of adjacent contour points including the first tooling point, each pair of adjacent contour points being two adjacent contour points including the first tooling point of the at least two contour points.
Illustratively, the process of obtaining the position information of the first tooling point is exemplified as follows:
for example, the contour point of the element to be measured is denoted as P i Where i=0, 1, … j, k …, n; n is a positive integer greater than or equal to 2;
determining at least one pair of adjacent two contour points including a first tooling point;
determining a normal vector I corresponding to at least one pair of adjacent two contour points including the first tool processing point according to the at least one pair of adjacent two contour points including the first tool processing point jk The method comprises the steps of carrying out a first treatment on the surface of the Wherein, a pair of adjacent contour points P j And P k Can be regarded as a two-dimensional straight line, the normal vector I of which jk Is perpendicular to the two dimensionsA perpendicular to the straight line;
based on normal vector I jk And performing radius compensation on the first cutter processing point, and determining the position information after the compensation of the first cutter processing point, namely the position information of the first cutter processing point.
Further, prior to step 103, the method may further comprise determining relative position information of a second measurement point and the first tooling point, wherein the second measurement point corresponds to the first tooling point. That is, during the processing of the element to be measured, the measuring and the processing may be performed simultaneously, for example, the element to be measured is processed by using, for example, a diamond tool, and the contour of the element to be measured is measured by using a mechanical probe, wherein the relative positions of the diamond tool and the mechanical probe are fixed during the processing and the measuring of the element to be measured.
Further, the position information of the second measurement point and the position information of the first tool processing point may be used to determine the relative position information of the second measurement point and the first tool processing point, for example, determine the relative position of the coordinates of the measurement point where the mechanical probe is located and the coordinates of the processing point where the tool is located, which is illustrated as follows:
if the position information of the first tool processing point isThe position information of the second measuring point is +.>The relative position is defined in the machine coordinate system as:
；
wherein, the liquid crystal display device comprises a liquid crystal display device,representing relative position information, for example a vector connecting the second measuring point with the first tool machining point, wherein +.>Indicating that the movement from the second measuring point to the first tool machining point is to be in the machine coordinate system +.>Equivalent of on-axis movement, +.>Indicating that the movement from the second measuring point to the first tool machining point is to be in the machine coordinate system +.>Equivalent amount of movement on the shaft.
Further, if the coordinates of the measurement start point where the mechanical probe is locatedIs +.>Based on the relative position information, the processing starting point of the cutter can be obtained>Is +.>。
In the method provided by the embodiment, the relative position information of the measuring head and the cutter processing point is determined according to the position information of the second measuring point and the position information of the first cutter processing point, so that the first profile information can be subjected to measuring head radius compensation according to the relative position information, extra calculation is not needed for determining the compensation direction, the calculated amount is reduced, and the measuring process is simple and convenient.
The contour measuring device provided by the invention is described below, and the contour measuring device described below and the contour measuring method described above can be referred to correspondingly.
Fig. 3 is a schematic structural diagram of a profile measuring apparatus 300 according to the present invention, as shown in fig. 3, the apparatus includes:
an acquisition module 310, configured to acquire a plurality of first measurement points and at least two contour points of the element to be measured;
the measurement module 320 is configured to obtain first profile information of the element to be measured according to a preset element processing path and a plurality of first measurement points;
the compensation module 330 is configured to determine, for each first measurement point, a radius compensation direction of the first measurement point according to initial position information of the first measurement point, relative position information of the second measurement point and the first tool processing point, and at least two contour points; the first cutter processing point corresponds to the second measuring point; and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
In the device provided in this embodiment, the obtaining module 310 obtains a plurality of first measurement points and at least two contour points of the element to be measured, and then the measuring module 320 obtains first contour information of the element to be measured according to a preset element processing path and the plurality of first measurement points; further, the compensation module 330 determines, for each first measurement point, a radius compensation direction of the first measurement point according to initial position information of the first measurement point, relative position information of a second measurement point and a first tool processing point, and at least two contour points, wherein the first tool processing point corresponds to the second measurement point; and finally, obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point. According to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and at least two contour points, the radius compensation direction of the first measuring point is determined, namely, according to the initial position information of each first measuring point, the compensation direction for compensating the radius of each first measuring point is determined by utilizing the relative position information of the second measuring point and the first cutter processing point and at least two contour points, namely, the radius compensation direction for compensating the radius of each first measuring point is determined by the cutter processing point in the actual processing process of the element, the measurement error caused by the measuring head radius is reduced, the error compensation process is simplified, and the measurement precision is improved.
Optionally, the compensation module 330 is specifically configured to:
obtaining the position information of a second cutter processing point corresponding to the first measuring point according to the initial position information and the relative position information of the first measuring point;
and determining the radius compensation direction of the first measuring point according to the position information of the second cutter processing point and at least two contour points.
Optionally, the compensation module 330 is further configured to:
determining at least one pair of adjacent contour points including the second tool processing point according to the position information of the second tool processing point and the at least two contour points;
determining normal vectors corresponding to the adjacent contour points according to the at least one pair of adjacent contour points;
and determining the radius compensation direction of the first measuring point according to the normal vector corresponding to each adjacent contour point.
Optionally, the first profile information is a first coordinate point set obtained based on position information corresponding to each of the first measurement points; the second profile information is a second coordinate point set obtained based on the compensated position information corresponding to each first measuring point; the first coordinate point set and the second coordinate point set are determined based on a coordinate system of a machine tool;
The compensation module 330 is further configured to:
for each first measurement point, obtaining compensated position information corresponding to the first measurement point according to initial position information corresponding to the first measurement point, a radius compensation direction corresponding to the first measurement point and a compensation amount corresponding to the radius compensation direction; the compensated position information is represented by coordinate points;
determining compensated coordinate points corresponding to the first measurement points according to the compensated position information corresponding to the first measurement points;
and determining a set of compensated coordinate points corresponding to each first measuring point as the second contour information.
Optionally, the element to be measured is an aspheric optical element; the measurement module 320 is specifically configured to:
moving a machine table according to the preset element processing path until the measuring range related to the surface profile of the aspheric optical element is traversed, and obtaining a plurality of first measuring points;
and obtaining the first contour information according to the initial position information of the plurality of first measuring points.
Optionally, the apparatus further comprises a relative position determination module;
The relative position determining module is used for:
determining the relative position information according to the position information of the second measuring point and the position information of the first cutter processing point; the position information of the first tool processing point is determined based on the position information of at least one pair of adjacent contour points including the first tool processing point; each pair of the adjacent contour points is two adjacent contour points including the first tooling point in the at least two contour points.
Fig. 4 illustrates a physical schematic diagram of an electronic device, as shown in fig. 4, which may include: processor 410, communication interface (Communications Interface) 420, memory 430 and communication bus 440, wherein processor 410, communication interface 420 and memory 430 communicate with each other via communication bus 440. The processor 410 may invoke logic instructions in the memory 430 to perform a contour measurement method comprising:
acquiring a plurality of first measuring points and at least two contour points of an element to be measured;
obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
Determining a radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point;
and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
Further, the logic instructions in the memory 430 described above may be implemented in the form of software functional units and may be stored in a computer-readable storage medium when sold or used as a stand-alone product. Based on this understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method of the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In another aspect, the present invention also provides a computer program product, the computer program product comprising a computer program, the computer program being storable on a non-transitory computer readable storage medium, the computer program, when executed by a processor, being capable of performing the contour measurement method provided by the above methods, the method comprising:
acquiring a plurality of first measuring points and at least two contour points of an element to be measured;
obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
determining a radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point;
and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
In yet another aspect, the present invention also provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, is implemented to perform the contour measurement method provided by the above methods, the method comprising:
Acquiring a plurality of first measuring points and at least two contour points of an element to be measured;
obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
determining a radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point;
and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
The apparatus embodiments described above are merely illustrative, wherein elements illustrated as separate elements may or may not be physically separate, and elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the embodiments may be implemented by means of software plus necessary general hardware platforms, or of course may be implemented by means of hardware. Based on such understanding, the foregoing technical solutions may be embodied essentially or in part in the form of a software product, which may be stored in a computer-readable storage medium, such as a ROM/RAM, a magnetic disk, an optical disk, etc., including several instructions to cause a computer device (which may be a personal computer, a server, or a network device, etc.) to perform the various embodiments or methods of some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A contour measurement method, comprising:
acquiring a plurality of first measuring points and at least two contour points of an element to be measured;
obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
determining a radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point;
and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
2. The contour measuring method as defined in claim 1, wherein said determining a radius compensation direction of said first measuring point based on initial position information of said first measuring point, relative position information of said second measuring point and said first tool processing point, and said at least two contour points includes:
obtaining the position information of a second cutter processing point corresponding to the first measuring point according to the initial position information and the relative position information of the first measuring point;
And determining the radius compensation direction of the first measuring point according to the position information of the second cutter processing point and the at least two contour points.
3. The contour measuring method as defined in claim 2, wherein said determining a radius compensation direction of said first measuring point based on said position information of said second tool processing point and said at least two contour points includes:
determining at least one pair of adjacent contour points including the second tool processing point according to the position information of the second tool processing point and the at least two contour points;
determining normal vectors corresponding to the adjacent contour points according to the at least one pair of adjacent contour points;
and determining the radius compensation direction of the first measuring point according to the normal vector corresponding to each adjacent contour point.
4. A contour measurement method as defined in any one of claims 1-3, wherein said first contour information is a first set of coordinate points obtained based on position information corresponding to each of said first measurement points; the second profile information is a second coordinate point set obtained based on the compensated position information corresponding to each first measuring point; the first coordinate point set and the second coordinate point set are determined based on a coordinate system of a machine tool; the obtaining second profile information of the element to be measured according to the radius compensation direction and the first profile information corresponding to each first measurement point includes:
For each first measurement point, obtaining compensated position information corresponding to the first measurement point according to initial position information corresponding to the first measurement point, a radius compensation direction corresponding to the first measurement point and a compensation amount corresponding to the radius compensation direction; the compensated position information is represented by coordinate points;
determining compensated coordinate points corresponding to the first measurement points according to the compensated position information corresponding to the first measurement points;
and determining a set of compensated coordinate points corresponding to each first measuring point as the second contour information.
5. A profile-measuring method as claimed in any one of claims 1 to 3, wherein the element to be measured is an aspherical optical element; the obtaining first profile information of the element to be measured according to the preset element processing path and the plurality of first measuring points includes:
moving a machine table according to the preset element processing path until the measuring range related to the surface profile of the aspheric optical element is traversed, and obtaining a plurality of first measuring points;
and obtaining the first contour information according to the initial position information of the plurality of first measuring points.
6. A contour measuring method as defined in any one of claims 1-3, wherein said determining a radius compensation direction of said first measuring point for each of said first measuring points based on initial position information of said first measuring point, relative position information of a second measuring point and a first tool processing point, and said at least two contour points, further comprises:
determining the relative position information according to the position information of the second measuring point and the position information of the first cutter processing point; the position information of the first tool processing point is determined based on the position information of at least one pair of adjacent contour points including the first tool processing point; each pair of the adjacent contour points is two adjacent contour points including the first tooling point in the at least two contour points.
7. A profile measuring apparatus, comprising:
the acquisition module is used for acquiring a plurality of first measuring points and at least two contour points of the element to be measured;
the measuring module is used for obtaining first contour information of the element to be measured according to a preset element processing path and the plurality of first measuring points;
the compensation module is used for determining the radius compensation direction of the first measuring point according to the initial position information of the first measuring point, the relative position information of the second measuring point and the first cutter processing point and the at least two contour points; the first cutter processing point corresponds to the second measuring point; and obtaining second contour information of the element to be measured according to the radius compensation direction and the first contour information corresponding to each first measuring point.
8. The profile measuring apparatus of claim 7, wherein the compensation module is configured to:
obtaining the position information of a second cutter processing point corresponding to the first measuring point according to the initial position information and the relative position information of the first measuring point;
and determining the radius compensation direction of the first measuring point according to the position information of the second cutter processing point and the at least two contour points.
9. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements the contour measurement method according to any of claims 1 to 6 when executing the program.
10. A non-transitory computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when executed by a processor, implements the contour measurement method according to any of claims 1 to 6.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117733644A (en) * | 2024-02-19 | 2024-03-22 | 中国航空制造技术研究院 | Milling allowance measurement equipment and method for rocket tank bottom before welding |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246365A (en) * | 2007-07-20 | 2008-08-20 | 天津大学 | Ultra-precise turning method with diamond knife tool hook angle compensation |
| CN102494657A (en) * | 2011-12-12 | 2012-06-13 | 北京建筑工程学院 | Measuring head radius compensation method for curve surface profile measuring and detecting |
| CN102865847A (en) * | 2012-10-10 | 2013-01-09 | 北京精雕科技有限公司 | Spline curve compensation method for measuring profile deviation based on path unit |
| CN104615083A (en) * | 2015-01-23 | 2015-05-13 | 大连理工大学 | Curved surface tool path contour error compensation method based tool location point correction |
| CN108645337A (en) * | 2018-04-27 | 2018-10-12 | 北京理工大学 | A kind of depth inside pipe wall Surface Location Error on-line measurement and compensation method |
| CN109407616A (en) * | 2018-09-29 | 2019-03-01 | 广东科杰机械自动化有限公司 | A method of real-time track compensation is realized based on measurement data |
| CN109782692A (en) * | 2019-01-02 | 2019-05-21 | 武汉华中数控股份有限公司 | A kind of method of 3C Product housing transition machining path Adaptive Planning |
| US20200326185A1 (en) * | 2019-04-15 | 2020-10-15 | Industrial Technology Research Institute | Contour accuracy measuring system and contour accuracy measuring method |
| CN113804121A (en) * | 2021-08-26 | 2021-12-17 | 华东师范大学 | Multi-workpiece profile real-time measurement method and measurement system |
| CN114185307A (en) * | 2021-11-23 | 2022-03-15 | 大连理工大学 | Large thin-wall part machining deformation partition compensation method |
| CN116068959A (en) * | 2023-01-14 | 2023-05-05 | 苏州千机智能技术有限公司 | Processing method based on tool path compensation, electronic equipment and storage medium |
| CN116300687A (en) * | 2023-05-11 | 2023-06-23 | 深圳市正和楚基科技有限公司 | Machining precision prediction method, system and medium based on numerical control machining |
-
2023
- 2023-07-20 CN CN202310893508.8A patent/CN116604399B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246365A (en) * | 2007-07-20 | 2008-08-20 | 天津大学 | Ultra-precise turning method with diamond knife tool hook angle compensation |
| CN102494657A (en) * | 2011-12-12 | 2012-06-13 | 北京建筑工程学院 | Measuring head radius compensation method for curve surface profile measuring and detecting |
| CN102865847A (en) * | 2012-10-10 | 2013-01-09 | 北京精雕科技有限公司 | Spline curve compensation method for measuring profile deviation based on path unit |
| CN104615083A (en) * | 2015-01-23 | 2015-05-13 | 大连理工大学 | Curved surface tool path contour error compensation method based tool location point correction |
| CN108645337A (en) * | 2018-04-27 | 2018-10-12 | 北京理工大学 | A kind of depth inside pipe wall Surface Location Error on-line measurement and compensation method |
| CN109407616A (en) * | 2018-09-29 | 2019-03-01 | 广东科杰机械自动化有限公司 | A method of real-time track compensation is realized based on measurement data |
| CN109782692A (en) * | 2019-01-02 | 2019-05-21 | 武汉华中数控股份有限公司 | A kind of method of 3C Product housing transition machining path Adaptive Planning |
| US20200326185A1 (en) * | 2019-04-15 | 2020-10-15 | Industrial Technology Research Institute | Contour accuracy measuring system and contour accuracy measuring method |
| CN113804121A (en) * | 2021-08-26 | 2021-12-17 | 华东师范大学 | Multi-workpiece profile real-time measurement method and measurement system |
| CN114185307A (en) * | 2021-11-23 | 2022-03-15 | 大连理工大学 | Large thin-wall part machining deformation partition compensation method |
| CN116068959A (en) * | 2023-01-14 | 2023-05-05 | 苏州千机智能技术有限公司 | Processing method based on tool path compensation, electronic equipment and storage medium |
| CN116300687A (en) * | 2023-05-11 | 2023-06-23 | 深圳市正和楚基科技有限公司 | Machining precision prediction method, system and medium based on numerical control machining |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117733644A (en) * | 2024-02-19 | 2024-03-22 | 中国航空制造技术研究院 | Milling allowance measurement equipment and method for rocket tank bottom before welding |
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|---|---|
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