CN116579273A - Power utilization dynamic simulation method and system for semiconductor equipment - Google Patents
Power utilization dynamic simulation method and system for semiconductor equipment Download PDFInfo
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Abstract
The invention discloses a method and a system for dynamic simulation of power consumption of semiconductor equipment, wherein the method comprises the following steps: determining the model of process equipment and the process procedure; disassembling the power utilization unit of the process equipment; grouping the power utilization units according to power utilization characteristics; establishing a power data set according to the grouping of the power utilization units; establishing an electric power simulation model according to the production beats and the processing flow of process equipment and process procedures, and inputting the electric power data set into the electric power simulation model; and running the power consumption dynamic simulation model, capturing the real-time state, and dynamically outputting the power consumption of the real-time state of the semiconductor equipment. The method can realize dynamic simulation of the electric power of the process equipment, can present the electric curve of the equipment with a certain period, and is convenient for data analysis.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to an electric dynamic simulation method and system for semiconductor equipment.
Background
With the upgrading of product technology nodes, the manufacturing process of semiconductor chips is more and more complex, the engineering technical requirements of process equipment are continuously improved, and the traditional engineering design scheme faces a plurality of challenges. In the early stage of chip manufacturing factory design, the process equipment and the partition installation power are usually obtained by combining engineering experience based on information such as the type of production line, the number of equipment and the like. Due to various factors, the deviation (redundancy) between the installation power and the actual demand is often large, resulting in an increase in the disposable investment cost and the operation and maintenance cost.
The simulation technology is applied to initial planning of a factory, and provides a reliable basis for initial planning of the factory, for example, patent document CN104850923A discloses a semiconductor production simulation system which is applied to an MES system, WIP information and historical records of machine in and out of the MES system are obtained, data information such as dispatching rules, wafer throwing plans, simulation starting time, simulation ending time, WIP information storage frequency and the like are input through an input module, after the data are processed through a calculation module, the fact that the WIP information is stored according to the set storage frequency in a period from the simulation starting time to the simulation ending time can be accurately calculated, and meanwhile, relevant KPI data such as machine in-order and out-order are stored in real time. However, this approach does not provide an effective basis for semiconductor power for initial evaluation of power consumption of semiconductor devices.
At present, the installation power in the equipment planning of a semiconductor factory is generally determined according to the rated power of equipment and engineering design experience, but the semiconductor chip production line has complex composition, multiple equipment types, large quantity and special processing procedures, and the installation power is obtained only according to the rated power in the factory information of the equipment and is inaccurate, so that the deviation between the obtained installation power and the actual demand is larger; and engineering designers have difficulty in grasping the power consumption peak-shifting situation of the equipment due to the processing beat difference.
Disclosure of Invention
The invention provides a power consumption dynamic simulation method and a power consumption dynamic simulation system for semiconductor equipment, which can perform power consumption dynamic simulation on the semiconductor equipment to obtain more accurate power consumption data and provide reliable basis for initial planning of a semiconductor factory.
In a first aspect, the present invention provides a method for dynamic simulation of power consumption of a semiconductor device, including:
determining the model of process equipment and the process procedure;
disassembling the power utilization unit of the process equipment;
grouping the power utilization units according to power utilization characteristics;
establishing a power data set according to the grouping of the power utilization units;
establishing an electric simulation model according to the production beats and the processing flow of process equipment and process procedures; and inputting the electric power data set into the electric power simulation model;
and running the power consumption dynamic simulation model, capturing the real-time state, and dynamically outputting the power consumption of the real-time state of the semiconductor equipment.
Further, determining the model of the process equipment and the process procedure includes:
obtaining and determining the category of the production process;
obtaining corresponding process equipment and process procedures according to the category of the production process;
determining the model of the process equipment according to the process equipment;
the model number of the process equipment and the process procedure are related based on the process procedure related to each model of the process equipment.
Further, the process equipment is disassembled by an electricity utilization unit, which comprises the following steps:
the process equipment is disassembled according to the processing process to obtain equipment modules;
and disassembling the equipment module according to the electricity consumption ratio and the electricity consumption change condition to obtain the electricity consumption unit.
Further, grouping the power usage units according to the power usage characteristics includes:
dividing the electricity utilization units with the electricity utilization ratio exceeding a preset percentage and fluctuating along with the electricity utilization of the processing flow into the same group; and dividing the electricity utilization units with the electricity consumption smaller than the preset value into the same group.
Further, establishing a power usage data set according to the grouping of power usage units, comprising:
acquiring power consumption data of grouped power consumption units;
setting a station module according to a process procedure, wherein the state of the station module comprises a working state and a waiting state, and the type of the station module comprises a real stay station, a processing station and an additional station;
determining the electricity consumption of the electricity consumption unit in different states of the corresponding station module according to the electricity consumption data;
establishing a mapping relation between the state of each station module and the power consumption to obtain the power consumption data set;
according to the electricity consumption data, determining the electricity consumption of the electricity consumption unit in different states of the corresponding station module comprises the following steps:
according to the electricity consumption data, determining the electricity consumption in working states and waiting states as constant values when the electricity consumption in all groups of electricity consumption units is constant and the type of the station module is true station retention;
according to the electricity consumption data, determining the electricity consumption in all groups of electricity consumption units according to working conditions, wherein the electricity consumption exceeds a preset percentage, the electricity consumption fluctuates along with a processing flow, and the electricity consumption in a working state and a waiting state is determined when the type of a station module is a real station;
according to the electricity consumption data, determining the electricity consumption in the working state when the electricity consumption exceeds a preset percentage, electricity consumption fluctuates along with a processing flow and the type of a station module is a processing station according to the processing steps and determining the electricity consumption in the waiting state to be 0;
and determining the power consumption value according to the processing steps from the working state that the type of the station module is the additional station in all the power consumption units according to the power consumption data, determining the power consumption in the waiting state to be 0, and setting the state that the type of the station module is the additional station in all the power consumption units to be opposite to the processing station in all the power consumption units when the type of the station module is the processing station and the states of the station modules are the same.
Further, according to the production takt and the processing flow of the process equipment and the process, the electric dynamic simulation model is established, and the method comprises the following steps:
determining the product residence time of each station module according to the production beats;
establishing a transmission module and setting transmission parameters;
connecting all the power utilization units according to the processing flow;
and a station grabbing module is established and used for reading the state of the station module according to a preset time interval and calling corresponding electricity utilization data to output.
Further, running the power consumption dynamic simulation model and capturing the real-time state, and dynamically outputting the power consumption of the real-time state of the semiconductor device, including:
and running the dynamic simulation model, capturing the states of the station modules according to a preset time interval through the station capturing module, and obtaining and outputting the power consumption of the station modules according to the mapping relation between the states of the station modules and the power consumption in the power consumption data set.
Further, the method further comprises:
and calculating and obtaining the total power consumption of the process equipment in a real-time state according to the power consumption of each station module.
Further, the total power consumption of the process equipment in the real-time state is calculated by the following formula:
wherein P is sum Representing the total power consumption of the process equipment in a real-time state; n represents the number of station modules, P i And the electricity consumption value of the ith station module is represented.
In a second aspect, the present invention also provides an electrodynamic simulation system for a semiconductor device, including:
the classification module is used for determining the model of the process equipment and the process procedure;
the disassembly module is used for disassembling the power utilization unit of the process equipment;
the grouping module is used for grouping the power utilization units according to the power utilization characteristics;
the data establishing module is used for establishing an electricity power data set according to the grouping of the electricity using units;
the model building module is used for building an electric power consumption simulation model according to the production takt and the processing flow of the process equipment and the process, and inputting the electric power consumption data set into the electric power consumption simulation model;
and the operation module is used for operating the power consumption dynamic simulation model and capturing the real-time state and dynamically outputting the power consumption of the real-time state of the semiconductor equipment.
The invention provides an electrodynamic simulation method and a electrodynamic simulation system for semiconductor equipment, which at least comprise the following beneficial effects:
(1) The dynamic simulation of the electric power of the process equipment can be realized, the electric curve of the equipment with a certain period can be presented, and the data analysis is convenient;
(2) The working equipment is disassembled and grouped to refine the electricity consumption into each process step, so that the accuracy of the simulation result is improved;
(3) The power simulation of the device with complex structure can be performed, such as Cluster type device with multiple reaction chambers (e.g. Dry Etch), track type device with continuous transfer sheet (e.g. Litho), etc.
(4) The simulation calculation result is closer to the real demand, and the service design scheme is accurate.
Drawings
Fig. 1 is a flowchart of an embodiment of an electrodynamic simulation method for a semiconductor device according to the present invention.
Fig. 2 is a flowchart of an embodiment of disassembling an electrical unit in the electrical dynamic simulation method for a semiconductor device according to the present invention.
Fig. 3 is a flowchart of an embodiment of establishing an electric power data set in the electric dynamic simulation method for a semiconductor device according to the present invention.
FIG. 4 is a flow chart of an embodiment of establishing an electrodynamic simulation model in an electrodynamic simulation method for a semiconductor device according to the present invention.
Fig. 5 is a schematic structural diagram of an embodiment of an electrodynamic simulation system for a semiconductor device according to the present invention.
Detailed Description
In order to better understand the above technical solutions, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1, in some embodiments, there is provided a semiconductor device power consumption dynamic simulation method, including:
s1, determining the model of process equipment and a process procedure;
s2, disassembling the power utilization unit of the process equipment;
s3, grouping the power utilization units according to the power utilization characteristics;
s4, establishing a power data set according to the grouping of the power utilization units;
s5, establishing an electric power simulation model according to the production beats and the processing flow of process equipment and process procedures, and inputting the electric power data set into the electric power simulation model;
and S6, running the power consumption dynamic simulation model, capturing the real-time state, and dynamically outputting the power consumption of the real-time state of the semiconductor equipment.
Specifically, in step S1, the production process may be classified into multiple types, such as Dry Etch, CVD, litho, diffusion, etc., and the type of the process equipment and the process procedure need to be determined, and the power consumption of the process equipment depends on the hardware configuration of the equipment itself and is also affected by the process parameter setting, so as to select the process procedure for simulation. And finally obtaining the uniquely determined equipment model and the process.
Specifically, determining the model of the process equipment and the process procedure includes:
obtaining and determining the category of the production process;
obtaining corresponding process equipment and process procedures according to the category of the production process;
determining the model of the process equipment according to the process equipment;
the model number of the process equipment and the process procedure are related based on the process procedure related to each model of the process equipment.
Referring to table 1, in one application scenario, each production process category includes a plurality of models of process equipment, each model of process equipment involves a plurality of process steps, and the process equipment model and the process step are determined.
TABLE 1
Further, referring to fig. 2, in step S2, the process equipment is disassembled by using an electrical unit, including:
s21, carrying out module disassembly on process equipment according to a processing process to obtain equipment modules;
s22, disassembling the equipment module according to the electricity consumption duty ratio and the electricity consumption change condition to obtain the electricity consumption unit.
Process equipment typically includes a stage (Loadport), an Equipment Front End Module (EFEM), a transport module (ATM, VTM), and a Process Module (PM). The processing module is complex, and comprises a raw material supply system, a temperature control system, a pressure control system, a power supply system and the like besides the reaction chamber. The process equipment is disassembled by using the electric unit, and the main basis is that: firstly, the electricity consumption of the electricity consumption unit is relatively high; and secondly, the electricity consumption of the electricity consumption unit has obvious fluctuation along with the change of the processing beat.
In a specific application scenario, taking a certain process device as an example, in combination with a wafer processing process, the power utilization unit is disassembled and described according to functions of each module, as shown in table 2:
TABLE 2
Under ideal conditions, the electricity consumption data of each electricity consumption unit of the process equipment is obtained and used as a data table, and a relatively accurate dynamic electricity consumption curve of the process equipment can be realized through simulation. However, in the usage meter provided by the equipment manufacturer and the owner (as shown in table 3), the process equipment power information generally only includes values of several main lines, and is not finely divided into each power utilization unit. The power consumption of all the power consumption units under different beats cannot be obtained. Therefore, aiming at the electricity utilization characteristics of process equipment, the electricity utilization units are subjected to grouping treatment by combining the existing power utilization meter to obtain an electricity utilization unit group.
TABLE 3 Table 3
In step S3, grouping the power utilization units according to the power utilization characteristics includes:
dividing the electricity utilization units with the electricity utilization ratio exceeding a preset percentage and fluctuating along with the electricity utilization of the processing flow into the same group; and dividing the electricity utilization units with the electricity consumption smaller than the preset value into the same group. The preset percentage and the preset value can be different values according to different scenes.
According to the power consumption characteristics of the apparatus exemplified in table 1, the dry pump, turbo pump, and RF Generator providing the activated plasma, which maintain the vacuum environment, occupy more than 80% of the power consumption of the apparatus, and the power consumption fluctuation is significant during the processing of the reaction chamber of the process apparatus. For components (such as robot, loadport) that are running at a fast rate or have a power consumption less than a preset value, the power consumption may be constant. The working conditions of each component are divided into two states of standby and operation, and in one application scene, the power utilization units of the equipment are grouped as shown in table 4. The clearer the disassembly and grouping of the power utilization units, the closer the output result is to the actual situation.
TABLE 4 Table 4
| Grouping | Power utilization unit |
| Group1 | Drypump+Turbo |
| Group2 | RFgenerator |
| Group3 | Others |
Further, referring to fig. 3, in step S4, a power usage data set is established according to the grouping of power usage units, including:
s41, acquiring power consumption data of grouped power consumption units, wherein the power consumption data comprises constant values and power consumption values under different working conditions;
s42, setting a station module according to a process procedure, wherein the state of the station module comprises a working state and a waiting state, and the type of the station module comprises a real stay station, a processing station and an additional station;
s43, determining the electricity consumption in the electricity consumption unit as a constant value in a working state and a waiting state when the electricity consumption is constant and the type of the station module is a real station according to the electricity consumption data;
s44, determining the electricity consumption in the electricity consumption unit according to the working conditions, wherein the electricity consumption exceeds a preset percentage, fluctuates along with the processing flow and is in a working state and a waiting state when the type of the station module is a real station;
s45, determining the electricity consumption in the electricity consumption unit according to the electricity consumption data, wherein the electricity consumption exceeds a preset percentage, the electricity consumption fluctuates along with the processing flow, and the electricity consumption in the working state is determined to be 0 in the waiting state when the type of the station module is a processing station according to the processing steps;
s46, determining the power consumption value according to the processing steps from the working state of the additional station with the type of the station module in the power consumption unit, determining the power consumption in the waiting state as 0, and setting the state of the additional station with the type of the station module in the power consumption unit as the opposite state of the processing station when the type of the station module in the power consumption unit is the processing station and the states are the same;
s47, establishing a mapping relation between the states of the station modules and the power consumption to obtain a power consumption data set.
Specifically, in step S41, the power consumption data of the grouped power consumption units may be obtained according to a power consumption meter provided by the owner or an actual experiment.
In step S42, the real station represents a real station of a real station unit of the process equipment, such as a wafer cassette stage, an airlock chamber for vacuum and atmosphere switching, and the like; the processing station represents a virtual station of processing steps in the reaction cavity, and the progressive processing process of the wafer is simulated in a station form; the additional stations are set for ease of calculation. Different from the real station that stops, the power consumption of processing station only has operating mode of operating mode, and other operating modes quantity is zero, depends on the specificity of processing step switching. The actual stop stations are different, and the stations are actually present and have various working conditions, so that the electricity consumption values corresponding to different working conditions exist. The mapping relationship established in step S47 can be obtained by steps S43 to S46.
The establishment of the electric power data set is described below in a specific application scenario.
Referring to table 5, let us assume that the station modules 1, 2 are real dwell stations, such as the power consuming units are divided into three groups, group1, group2, group3, where Group3 is an approximately constant Group. Firstly, one stay unit corresponding to the electricity utilization unit in the Group3 corresponds to the station module 1, and all working conditions corresponding to the station module 1 are set to be the same constant to represent the constant of the electricity utilization unit of the Group 3. Secondly, the station module 2 is characterized in that the electricity consumption is obvious under different working conditions, and the electricity consumption units of the station module 2 are independent groups, such as Group2, and only comprise one electricity consumption unit when the electricity consumption is needed to be distinguished in the data set. Finally, assuming that the working stations 3 to 8 are all working stations representing working steps, and the power consumption of the power consumption units in the Group1 fluctuates along with the switching of the working steps, the power consumption value of each working station module in the working state is determined to change along with the change of the working steps, and the power consumption in the waiting state is set to be zero, at this time, a third additional working station is needed. When the Group1 electricity utilization unit is in a Waiting state, the standby electricity utilization is not counted, a station module 9 with an additional station is needed, when the station modules 3 to 8 are all Waiting (Waiting state), the station 9 is set to be in a working state, otherwise, the Waiting state of the station 9 is opposite.
TABLE 5
Further, in step S5, an electric simulation model is built according to the process equipment and the process tact of the process, wherein the process tact refers to the transmission process of the product in the equipment, and the process tact refers to the residence time of the product in each position of the equipment.
For example, the process flow and the tact time of a certain process in a certain apparatus are shown in table 6.
TABLE 6
Referring to fig. 4, in step S5, according to the process equipment and the process tact and the process flow, an electric simulation model is built, including:
s51, determining the product residence time of each station module according to the production beats;
s52, establishing a transmission module and setting transmission parameters;
s53, connecting all the power utilization units according to a processing flow;
s54, a station grabbing module is established and used for reading the state of the station module according to a preset time interval and calling corresponding electricity utilization data to output.
In order to accurately simulate the fluctuation of the power consumption of the wafer in each processing step of the reaction cavity, the station module is required to represent different processing steps, the processing step of the wafer is determined by capturing the state of the station module, and then the power consumption data set is called for superposition calculation, so that the power consumption of any time section in the processing process of the reaction cavity can be obtained.
Further, in step S6, running the power-consumption dynamic simulation model and capturing a real-time state, dynamically outputting power consumption of the real-time state of the semiconductor device, including:
and running the dynamic simulation model, capturing the states of the station modules according to a preset time interval through the station capturing module, and obtaining and outputting the power consumption of the station modules according to the mapping relation between the states of the station modules and the power consumption in the power consumption data set.
And calculating and obtaining the total power consumption of the process equipment in a real-time state according to the power consumption of each station module.
The basic logic of the process equipment power utilization simulation is to capture states of 'station module' units in a model at fixed time intervals, output power consumption of a power utilization unit at a certain moment in a form of calling a data table, and calculate superposition to obtain power utilization of the simulation model, wherein the total power utilization of the process equipment in a real-time state is calculated by the following formula:
wherein P is sum Representing the total power consumption of the process equipment in a real-time state; n represents the number of station modules, P i And the electricity consumption value of the ith station module is represented.
Referring to fig. 5, in some embodiments, there is provided a semiconductor device power consumption dynamic simulation system comprising:
a classification module 201, configured to determine a model number of a process device and a process recipe;
a disassembly module 202 for disassembling the power utilization unit of the process equipment;
a grouping module 203, configured to group the electricity units according to electricity characteristics;
a data establishing module 204, configured to establish an electric power data set according to the grouping of the electric units;
the model building module 205 is configured to build an electric power consumption dynamic simulation model according to the production tact and the processing flow of the process equipment and the process, and input the electric power consumption data set into the electric power consumption dynamic simulation model;
and the operation module 206 is used for operating the power consumption dynamic simulation model and capturing the real-time state and dynamically outputting the power consumption of the real-time state of the semiconductor equipment.
Further, the model of the process equipment and the process recipe are determined.
Further, the disassembly module 202 is further configured to:
the process equipment is disassembled according to the processing process to obtain equipment modules;
and disassembling the equipment module according to the electricity utilization duty ratio and the electricity consumption change condition to obtain the electricity utilization unit.
Further, the grouping module 203 is further configured to:
dividing the electricity utilization units with the electricity utilization ratio exceeding a preset percentage and fluctuating along with the electricity utilization of the processing flow into the same group; and dividing the electricity utilization units with constant electricity consumption into the same group.
Further the data creation module 204 is further configured to:
acquiring power consumption data of grouped power consumption units;
setting a station module according to a process procedure, wherein the state of the station module comprises a working state and a waiting state, and the type of the station module comprises a real stay station, a processing station and an additional station;
determining the electricity consumption of the electricity consumption unit in different states of the corresponding station module according to the electricity consumption data;
establishing a mapping relation between the state of each station module and the electricity consumption to obtain an electricity consumption power data set;
according to the electricity consumption data, determining the electricity consumption of the electricity consumption unit in different states of the corresponding station module comprises the following steps:
according to the electricity consumption data, determining the electricity consumption in the electricity consumption unit as a constant value in a working state and a waiting state when the electricity consumption is constant and the type of the station module is a real station;
according to the electricity consumption data, determining the electricity consumption in the electricity consumption unit, wherein the electricity consumption exceeds a preset percentage, the electricity consumption fluctuates along with the processing flow, and the electricity consumption in a working state and a waiting state is determined according to working conditions when the type of the station module is a real station;
according to the electricity consumption data, determining the electricity consumption in the electricity consumption unit, wherein the electricity consumption exceeds a preset percentage, the electricity consumption fluctuates along with the processing flow, and the electricity consumption in the working state is determined according to the processing steps when the type of the station module is a processing station, and the electricity consumption in the waiting state is determined to be 0;
according to the electricity consumption data, determining an electricity consumption value according to a processing step when the working state of the station module in the electricity consumption unit is the additional station, determining the electricity consumption in a waiting state to be 0, and setting the state of the station module in the electricity consumption unit, which is the additional station, to be opposite to the processing station when the station module in the electricity consumption unit is the processing station and the states are the same.
Further, the model building module 205 is further configured to:
determining the product residence time of each station module according to the production beats;
establishing a transmission module and setting transmission parameters;
connecting all the power utilization units according to the processing flow;
and a station grabbing module is established and used for reading the state of the station module according to a preset time interval and calling corresponding electricity utilization data to output.
Further, the operation module 206 is further configured to:
and running the dynamic simulation model, capturing the states of the station modules according to a preset time interval through the station capturing module, and obtaining and outputting the power consumption of the station modules according to the mapping relation between the states of the station modules and the power consumption in the power consumption data set.
Further, the apparatus further comprises a calculation module 207, the calculation module 207 further being configured to:
and calculating and obtaining the total power consumption of the process equipment in a real-time state according to the power consumption of each station module.
The total power consumption of the process equipment in a real-time state is calculated by the following formula:
wherein P is sum Representing the total power consumption of the process equipment in a real-time state; n represents the number of station modules, P i And the electricity consumption value of the ith station module is represented.
The method and the system for dynamic simulation of the electricity consumption of the semiconductor device provided by the embodiment at least have the following beneficial effects:
(1) The dynamic simulation of the electric power of the process equipment can be realized, the electric curve of the equipment with a certain period can be presented, and the data analysis is convenient;
(2) The working equipment is disassembled and grouped to refine the electricity consumption into each process step, so that the accuracy of the simulation result is improved;
(3) The power simulation of the device with complex structure can be performed, such as Cluster type device with multiple reaction chambers (e.g. Dry Etch), track type device with continuous transfer sheet (e.g. Litho), etc.
(4) The simulation calculation result is closer to the real demand, and the service design scheme is accurate.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention. It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (10)
1. An electrodynamic simulation method for a semiconductor device, comprising:
determining the model of process equipment and the process procedure;
disassembling the power utilization unit of the process equipment;
grouping the power utilization units according to power utilization characteristics;
establishing a power data set according to the grouping of the power utilization units;
establishing an electric simulation model according to the production beats and the processing flow of process equipment and process procedures; and inputting the electric power data set into the electric power simulation model;
and running the power consumption dynamic simulation model, capturing the real-time state, and dynamically outputting the power consumption of the real-time state of the semiconductor equipment.
2. The method of claim 1, wherein determining the model of the process equipment and the process recipe comprises:
obtaining and determining the category of the production process;
obtaining corresponding process equipment and process procedures according to the category of the production process;
determining the model of the process equipment according to the process equipment;
the model number of the process equipment and the process procedure are related based on the process procedure related to each model of the process equipment.
3. The method of claim 1, wherein the process equipment is powered unit disassembled, comprising:
the process equipment is disassembled according to the processing process to obtain equipment modules;
and disassembling the equipment module according to the electricity consumption ratio and the electricity consumption change condition to obtain the electricity consumption unit.
4. A method according to claim 1 or 3, wherein grouping the power usage units according to power usage characteristics comprises:
dividing the electricity utilization units with the electricity utilization ratio exceeding a preset percentage and fluctuating along with the electricity utilization of the processing flow into the same group; and dividing the electricity utilization units with the electricity consumption smaller than the preset value into the same group.
5. The method of claim 4, wherein establishing the power usage data set based on the grouping of power usage units comprises:
acquiring power consumption data of grouped power consumption units;
setting a station module according to a process procedure, wherein the state of the station module comprises a working state and a waiting state, and the type of the station module comprises a real stay station, a processing station and an additional station;
determining the electricity consumption of the electricity consumption unit in different states of the corresponding station module according to the electricity consumption data;
establishing a mapping relation between the state of each station module and the power consumption to obtain the power consumption data set;
according to the electricity consumption data, determining the electricity consumption of the electricity consumption unit in different states of the corresponding station module comprises the following steps:
according to the electricity consumption data, determining the electricity consumption in the electricity consumption unit as a constant value in a working state and a waiting state when the electricity consumption is constant and the type of the station module is a real station;
according to the electricity consumption data, determining the electricity consumption in the electricity consumption unit according to working conditions, wherein the electricity consumption exceeds a preset percentage, the electricity consumption fluctuates along with a processing flow, and the electricity consumption in a working state and a waiting state is determined when the type of a station module is a real station;
according to the electricity consumption data, determining the electricity consumption in the electricity consumption unit to exceed a preset percentage, the electricity consumption fluctuates along with the processing flow, and the electricity consumption in the working state is determined to be 0 in the waiting state according to the processing steps when the type of the station module is a processing station;
and determining the power consumption value according to the processing steps when the working state of the station module in the power consumption unit is the additional station according to the power consumption data, determining the power consumption in the waiting state to be 0, and setting the state of the station module in the power consumption unit, which is the additional station, to be opposite to the processing station when the station module in the power consumption unit is the processing station and the states are the same.
6. The method of claim 5, wherein creating the electrokinetic simulation model based on the process equipment and process tact and flow of the process comprises:
determining the product residence time of each station module according to the production beats;
establishing a transmission module and setting transmission parameters;
connecting all the power utilization units according to the processing flow;
and a station grabbing module is established and used for reading the state of the station module according to a preset time interval and calling corresponding electricity utilization data to output.
7. The method of claim 6, wherein running the live dynamic simulation model and capturing the real-time state, dynamically outputting the live power of the real-time state of the semiconductor device, comprises:
and running the dynamic simulation model, capturing the states of the station modules according to a preset time interval through the station capturing module, and obtaining and outputting the power consumption of the station modules according to the mapping relation between the states of the station modules and the power consumption in the power consumption data set.
8. The method of claim 7, wherein the method further comprises:
and calculating and obtaining the total power consumption of the process equipment in a real-time state according to the power consumption of each station module.
9. The method of claim 8, wherein the total power used in the real-time state of the process equipment is calculated by the following equation:
wherein P is sum Representing the total power consumption of the process equipment in a real-time state; n represents the number of station modules, P i And the electricity consumption value of the ith station module is represented.
10. An electrodynamic simulation system for a semiconductor device, comprising:
the classification module is used for determining the model of the process equipment and the process procedure;
the disassembly module is used for disassembling the power utilization unit of the process equipment;
the grouping module is used for grouping the power utilization units according to the power utilization characteristics;
the data establishing module is used for establishing an electricity power data set according to the grouping of the electricity using units;
the model building module is used for building an electric power consumption simulation model according to the production takt and the processing flow of the process equipment and the process, and inputting the electric power consumption data set into the electric power consumption simulation model;
and the operation module is used for operating the power consumption dynamic simulation model and capturing the real-time state and dynamically outputting the power consumption of the real-time state of the semiconductor equipment.
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