CN116567905A - Circulating water temperature control large-area water net electrode DBD material surface modification device - Google Patents
Circulating water temperature control large-area water net electrode DBD material surface modification device Download PDFInfo
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- CN116567905A CN116567905A CN202310758561.7A CN202310758561A CN116567905A CN 116567905 A CN116567905 A CN 116567905A CN 202310758561 A CN202310758561 A CN 202310758561A CN 116567905 A CN116567905 A CN 116567905A
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/40—Surface treatments
Abstract
The invention provides a circulating water temperature control large-area water screen electrode DBD material surface modification device, wherein a high-voltage electrode is a water screen electrode, a medium side is fixed below the water screen electrode, a ground electrode is arranged below the medium side, the centers of the ground electrode and the water screen electrode are aligned, a plasma discharge area is arranged between the medium side and a gap between the ground electrode, working gas and a medium enter the plasma discharge area through an air pipe, a water outlet is arranged on a vacuum cavity, the water inlet is used for injecting water into the water screen electrode through a water pipe, and the water outlet discharges aqueous solution in the water screen electrode through the water pipe. The invention effectively solves the problems of unstable discharge, poor modification effect and the like caused by large-area modification temperature elevation. The temperature rise is less than 1 ℃ in one minute, the device can realize the temperature change within 5 ℃ after continuous operation for one hour, and the device can realize the discharge 24 h operation without shutdown under the holding of a circulating water cooling system, thereby having higher industrial production application prospect.
Description
Technical Field
The invention belongs to the field of material surface modification, and relates to a circulating water temperature control large-area water network electrode DBD material surface modification device.
Background
The atmospheric pressure low-temperature plasma is non-equilibrium plasma generated under the open atmosphere condition by utilizing gas discharge, has higher chemical activity and gas temperature close to room temperature, and has been used as a novel molecular activation means in the fields of modification, sterilization, medical appliances and the like. The corona, the electric arc and the glow in the air can generate plasmas under the atmospheric pressure, but the corona discharge is too weak, so that the treatment efficiency is low; too strong an arc discharge would damage the test article; glow discharge is the most suitable discharge mode for carrying out uniform treatment on the surface of an article.
The surface modification of the material is an important direction for the research, exploration and practical application of the atmospheric pressure low-temperature plasma. Research shows that low-temperature plasma can be generated in a mild environment, and contains a large amount of high-energy high-chemical active substances such as electrons, ions, excited particles and the like, the active particles directly act on the surface of a material, and complex physical and chemical actions such as physical etching, chemical modification, surface crosslinking and the like are generated on the surface of the material in a nano-to-micro scale, so that the physical morphology and chemical components of the surface of the material can be changed without affecting the basic structure of the material, and the surface characteristics such as hydrophobicity, dielectric property, corrosion resistance and the like of the surface of the material are improved, thereby realizing the surface properties required by orientation to meet the actual application requirements. In addition, the flexible control of the surface treatment effect of the low-temperature plasma can be realized by controlling the electrode structure, the power supply type, the gas medium, the power and time of discharge and other conditions, so that the method is suitable for different requirements of surface modification of different materials and improves the material modification effect. Thus, the application of atmospheric low temperature plasma to material surface modification is a viable technical approach.
Reasonable reactor design is a key to improving active particle generation and transport efficiency and is also a precondition for plasma surface modification. Common reactors can be classified into dielectric barrier discharge type and jet discharge type reactors according to the difference of discharge principles. The DBD prevents arc discharge by inserting a blocking medium between metal electrodes to generate a large area of low temperature plasma; the jet discharge utilizes the combined action of the air flow and the electric field to convey active particles generated by ionization of the discharge area to the open area, so that the discharge area and the area to be treated are effectively separated. In order to modify a large area material, it is preferable to generate plasma generated by uniform glow discharge at an atmospheric pressure with a moderate power density by the DBD based on the advantage that the DBD is easy to generate a large area plasma. However, the large-area electrode is not simply enlarged in area, and there is a problem of variation in discharge uniformity and material processing uniformity.
The prior large-area DBD electrode can realize plasma treatment under the atmosphere, the effective discharge area can reach about 60% -70%, compared with the traditional plasma DBD modification, the method has the advantages of large treatment area and suitability for industrial production, but the relative treatment efficiency is low, and the effective area is not large enough. The moving platform type DBD can solve the problem of insufficient effective area, but has the problems of complex wiring and more external supply devices, and most large-area electrode plasma processing methods require higher working gas flow rate and smaller gap adjustment range, and the dielectric medium may have the condition of generating cracks due to the fact that the temperature of the device is increased during long-time operation.
Disclosure of Invention
1. The technical problems to be solved are as follows:
the existing large-area DBD electrode has low relative processing efficiency, complex wiring and more external supply equipment, the required working gas flow rate is higher, the gap adjusting range is smaller, and the dielectric medium can have the conditions of cracks and the like due to the fact that the temperature of the device is increased when the device is operated for a long time.
2. The technical scheme is as follows:
in order to solve the problems, the invention provides a circulating water temperature-control large-area water screen electrode DBD material surface modification device, which comprises a high-voltage electrode and a ground electrode, wherein the high-voltage electrode is connected with an excitation source through a high-voltage connection terminal, the ground electrode is grounded through a ground electrode connection terminal, the high-voltage electrode and the ground electrode are fixed in a vacuum cavity, the high-voltage electrode is a water screen electrode, a medium side is fixed below the water screen electrode, a ground electrode is arranged below the medium side, the centers of the ground electrode and the water screen electrode are aligned, a plasma discharge area is arranged between a gap between the medium side and the ground electrode, working gas and the medium enter the plasma discharge area through a gas pipe, a water outlet is arranged on the vacuum cavity, the water outlet comprises a water injection port and a water outlet, the water injection port is used for injecting water into the water screen electrode through a water pipe, and the water outlet discharges aqueous solution in the water screen electrode through the water pipe.
The sealing ring is arranged around the water network electrode, screw holes are formed in the positions, corresponding to the screws, of the sealing ring on each side, the screws are required to be arranged at the four corners of the sealing ring, grooves are formed in the same positions on the upper surface and the lower surface of the sealing ring, and the first silicon rubber sealing strip and the second silicon rubber sealing strip are respectively fixed in the upper groove and the lower groove in an adhering mode.
Each side of the water screen electrode is provided with a screw hole filler strip, and the screws uniformly penetrate through the screw hole filler strips in a central arrangement mode.
The whole frame of water injection frame just in time nests with the sealing washer inboard, the water injection frame includes the water injection strip, water injection port one side is provided with the water injection strip, it has evenly distributed's a plurality of spouts to open the water injection strip side, the spout subtends the water network electrode, the delivery port sets up at the water injection strip rear side, is close to frame position lateral wall, opens and has the perforation, is used for the drainage.
The water outlet is a perforation on the upper side of the sealing ring, and the position of the water outlet corresponds to the water outlet position of the water injection strip on the water injection frame.
The size of the metal net of the water net electrode is slightly larger than that of the ground electrode, the periphery edge is wrapped with an insulating tape, the wrapped size is the same as that of the ground electrode, and the metal net is positioned at the center of the medium side.
The working gas is arranged in a high-pressure gas cylinder, the gaseous medium is directly mixed with the working gas through a mixing cavity and then is introduced into a discharge area, the liquid medium is mixed with the plasma discharge area through the mixing cavity after the working gas passes through a back-absorbing bottle and a medium bottle by adopting a bubbling method, and the proportion of the reaction medium and the working gas is regulated through a flow controller.
The device is also provided with an air inlet valve and an air outlet valve, the air inlet valve is used for leading the needed working gas and medium into the plasma discharge area, the waste gas is discharged through the air outlet valve, the air inlet pipe in the air inlet valve is used for converting the multi-channel air into the air inlet hole, and the working gas and the medium are led into the plasma discharge area.
The high-voltage probe is also provided with a high-voltage probe for measuring discharge voltage, a current coil for measuring discharge current, a capacitor and differential probe measuring result, the discharge voltage and current result for calculating to obtain discharge power, the measured voltage and current waveform is displayed in an oscilloscope, a camera for shooting discharge images through overlooking and side view angles, and a vacuum pressure gauge for reflecting the internal air pressure of the vacuum cavity.
The water inlet is connected with a water inlet valve of the water valve interface, and the water outlet is connected with a water outlet valve of the water valve interface.
3. The beneficial effects are that:
compared with the traditional large-area DBD material modification method, the invention combines the advantages of the water electrode and the solid electrode, designs a novel water screen electrode applied to the structure of the DBD reactor, introduces a circulating water cooling system, and effectively solves the problems of unstable discharge, poor modification effect and the like caused by large-area modification temperature rise. The temperature rise is less than 1 ℃ in one minute, the device can realize the temperature change within 5 ℃ after continuous operation for one hour, and the device can realize the discharge 24 h operation without shutdown under the holding of a circulating water cooling system, thereby having higher industrial production application prospect.
Drawings
Fig. 1 is a schematic diagram of the structure of the present invention.
Fig. 2 is a schematic view of a vacuum chamber structure.
Fig. 3 is a schematic diagram of the air path structure.
Fig. 4 is a schematic view of a ground electrode.
Fig. 5 is a schematic view of a water screen electrode structure.
Reference numerals illustrate: 1. a vacuum chamber; 101. an air outlet valve; 102. an intake valve; 103. a ground electrode terminal; 104. a high voltage wire connection; 105. a water valve interface; 1051. a first inlet valve; 1052. a first outlet valve; 1053. a second inlet valve; 1054. a second water outlet valve; 106. a vacuum pressure gauge; 107. a support base; 1071. a first support frame; 1072. a second support frame; 108. a housing base; 2. a water screen electrode; 201. a metal mesh; 202. a seal ring; 2021 first silicone rubber seal strip; 2022. a second silicone rubber seal strip; 203. a screw; 204. screw hole filler strips; 205. a water outlet; 2051. a first water filling port; 2052. a first water outlet; 2053. a second water filling port; 2054. a second water outlet; 206. a water injection frame; 207. a medium side; 208. a cover plate; 209. a high voltage terminal; 3. a ground electrode; 4. an air path structure; 401. a first air inlet hole; 402. a second air inlet hole; 403. a third air inlet hole; 404. a fourth air inlet hole; 4051. a first circulating water pipe through hole; 4052. a second circulating water pipe through hole; 4053. a third circulating water pipe through hole; 4054. a fourth circulating water pipe through hole; 406. the ground electrode fixes the supporting feet; 5. an excitation source; 6. a high pressure probe; 7. a current coil; 8. measuring capacitance; 9. a differential probe; 10. an oscilloscope; 11. a camera; 12. a mixing chamber; 13. a flow meter; 14. a one-way valve; 15. anti-suck-back bottle; 16. a media bottle; 17. a high pressure gas cylinder.
Detailed Description
The invention will now be described in detail with reference to the drawings and examples.
As shown in fig. 1, the circulating water temperature-control large-area water screen electrode DBD material surface modification device comprises a high-voltage electrode and a ground electrode 3, wherein the high-voltage electrode is connected with an excitation source 5 through a high-voltage terminal 104, the ground electrode 3 is grounded through a ground electrode terminal 103, the high-voltage electrode and the ground electrode 3 are fixed in a vacuum cavity 1, the high-voltage electrode is a water screen electrode 2, a medium side 207 is fixed below the water screen electrode 2, the ground electrode 3 is arranged below the medium side 207, the centers of the ground electrode 3 and the water screen electrode 2 are aligned, a plasma discharge area is arranged between the medium side 207 and the ground electrode 3, working gas and a medium enter the plasma discharge area through an air pipe, a water outlet 205 is arranged on the vacuum cavity 1, the water outlet 205 comprises a water filling port and a water outlet, the water filling port is used for filling water into the water screen electrode 2 through the water pipe, and the water outlet discharges aqueous solution in the water screen electrode 2 through the water pipe.
In one embodiment, as shown in FIG. 2, the vacuum chamber 1 housing according to the present invention is made of plexiglas with a size of 540X 640X 20mm 3 The structural details consist of an air outlet valve 101, an air inlet valve 102, a ground electrode terminal 103, a high-pressure wiring terminal 104, a water valve interface 105, a vacuum pressure gauge 106, a support base 107, and a housing base 108.
The device is used for introducing the required working gas into the gas path structure 4 in the cavity through the air inlet valve 102, and the valve control can control the air inlet switch. Exhaust gas is discharged through the gas outlet valve 101, the exhaust gas can be collected, and the gas outlet switch can be controlled by valve control according to the reaction process of product analysis. The device is grounded through a ground electrode terminal 103, the inside is connected with the bottom of the ground electrode 3, the device is connected with an external excitation source 5 through a high-voltage terminal 104, and the inside is connected with the water network electrode 2 to transmit high-voltage electricity.
In one embodiment, the working gas is contained in a high pressure gas cylinder 17, and the working gas is intended to be an Ar inert gas. For the surface modification of the material, hydrophobic modification is taken as an example, and Si-containing media such as HMDSO, PDMS and the like are adopted. The gaseous medium is directly mixed with the working gas through the gas mixing cavity 12 and then is introduced into the discharge area, the liquid medium is mixed with the working gas through the gas mixing cavity 12 and then is introduced into the discharge area after the working gas passes through the back-absorbing bottle 15 and the medium bottle 16 by adopting a bubbling method, the proportion of the reaction medium and the working gas is regulated through the flow controller 13, and the check valve 14 is used for preventing the gas from being absorbed back and ensuring the gas to be introduced in a one-way. Compared with the traditional DBD plasma material modifying device, the invention can be added with one or more media to realize the adjustable modifying effect, has larger area and realizes the uniform discharge of 30 multiplied by 40 cm for modifying treatment.
In one embodiment, the water valve interface 105 is composed of a first water inlet valve 1051 and a second water inlet valve 1053, and a first water outlet valve 1052 and a second water outlet valve 1054, and is connected with the water inlet and the water outlet of the water network electrode 2, and the outside is connected with a circulating water system, so as to provide circulating water for the water network electrode, and the valve control can control the water flow switch. A vacuum gauge 106 is mounted on the top cover to reflect the pressure of the air inside the vacuum chamber.
In one embodiment, the support base 107 is made of polytetrafluoroethylene, and is composed of a first support 1071 and a second support 1072, which are used to support the gas circuit structure and the electrode structure, and the surface is required to be flat and uniform. The housing base 108 is composed of 9 acrylic cylinders of the same size and a bottom plate, supporting the overall device.
In one embodiment, as shown in fig. 3, the air path structure 4 is made of organic glass, and is integrally supported on the supporting base 107, and is composed of a first air inlet hole 401, a second air inlet hole 402, a third air inlet hole 403, a third air inlet hole 404, a first circulating water pipe through hole 4051, a second circulating water pipe through hole 4052, a third circulating water pipe through hole 4053, a fourth circulating water pipe through hole 4054 and a ground electrode fixing support leg 406. The air pipe inside the vacuum cavity air inlet valve 102 is changed into four paths of air to be introduced into the first air inlet hole 401, the second air inlet hole 402, the third air inlet hole 403 and the fourth air inlet hole 404, and working air is introduced into the discharge space. The circulating water pipe passes through the first circulating water pipe through hole 4051 and the second circulating water pipe through hole 4052 to lead in water solution and lead out water solution for the water screen electrode, and the opposite side third circulating water pipe through hole 4053 and the fourth circulating water pipe 4054 function as a pair of side. The ground electrode fixing leg 406 mainly serves to fix the air passage structure 4 to the support base 107 and fix the ground electrode 3 to the inside region of the leg to ensure alignment with the high-voltage electrode, the water network electrode 2. The main purpose of the gas circuit structure 4 is to provide a uniform gas intake for the discharge space.
The structure can judge the weight change of the working gas and the air according to the type of the working gas, if the working gas is heavier than the air, such as Ar, the bottom air inlet and the top air outlet are selected as shown in fig. 3, and if the working gas is lighter than the air, such as He, the top air inlet and the bottom air outlet are selected.
In one embodiment, as shown in fig. 4, the ground electrode 3, which is made of an aluminum alloy with a size of 30×40 cm and a thickness of 10mm, functions as a ground electrode in the DBD, maintaining plasma discharge. The position of the ground electrode 3 is determined by the fixed support leg 406 shown in fig. 3, and the electrode gap between the two electrodes and the discharge gap is adjusted by controlling the thickness of a barrier strip which is 20cm long and 2mm wide and is made of organic glass, and is aligned with the center of the upper water screen electrode so as to maintain discharge uniformity.
In one embodiment, as shown in fig. 5, the water screen electrode 2 is composed of a metal screen 201, a sealing ring 202, screws 203, screw hole filler strips 204, a water outlet 205, a water injection frame 206, a medium side 207, a cover plate 208 and a high-voltage wire column 209. The parts of the water screen electrode are detachable, and the parts are fixed into a whole by screws 203.
In one embodiment, the metal mesh 201 is made of metal, the size of the metal mesh is slightly larger than that of the ground electrode by using stainless steel and tungsten material test discharge in this example, the insulating tape is wrapped around the periphery of the metal mesh to prevent breakdown caused by larger polarity of the discharge edge, the size of the metal mesh after wrapping is ensured to be the same as that of the ground electrode, and the metal mesh is positioned at the center of the medium side 207 and aligned concentrically with the ground electrode 3.
In one embodiment, the metal mesh 201 is made of metal, the stainless steel and tungsten materials are used for testing discharge, the size is slightly larger than that of the ground electrode, the insulating tape is wrapped around the periphery of the metal mesh, the discharge edge is prevented from being broken down due to larger polarity, the wrapped size is guaranteed to be the same as that of the ground electrode, and the metal mesh is positioned at the center of the medium side 207 and aligned concentrically with the ground electrode 3.
In one embodiment, the sealing ring 202 is provided with screw holes at positions corresponding to the screws 203, four sides are respectively and evenly distributed, grooves are formed in the same positions on the upper surface and the lower surface, the groove width is 2mm, the positions are in the centers of the screw holes and the inner edges, and a first silicon rubber sealing strip 2021 and a second silicon rubber sealing strip 2022 with the diameters of 4.5 mm and the hardness of 20-25N/mm < 2 > are respectively adhered and fixed in the upper groove and the lower groove, so that the water leakage of the water network electrode 2 is prevented.
In one embodiment, the screws 203 are made of PEEK insulating material and serve to fix the main body of the water screen electrode 2, and are located outside the first silicone rubber seal 2021 and the second silicone rubber seal 2022, and the screws must be disposed at four corners of the water screen electrode 2 to prevent water leakage of the electrode 2.
In one embodiment, the screw hole filler strip 204 is made of black bakelite, the thickness is 3mm, the total of four screws are four, the size of the short-side filler strip is 20×440 mm, the size of the long-side filler strip is 20×450 mm, and the screws 203 uniformly pass through the screw hole filler strip 204 in a central arrangement mode. The screw hole filler strip 204 is used for balancing the stress of the screw 203 on the medium side 207, so that the glass breakage caused by uneven stress is avoided.
In one embodiment, the water running ports 205 are divided into four water injection ports 2051 and 2053, and first water outlet 2052 and second water outlet 2054, wherein the water net electrode 2 is injected by the first water injection port 2051 and the second water injection port 2053, and the first water outlet 2052 and the second water outlet 2054 are used for discharging the water solution in the water net electrode. The water running port 205 is an M5 threaded hole, is a through hole on the upper side of the sealing ring 202, and corresponds to the water injection and water outlet position on the water injection frame 206.
There are two water modes, if the device adopts a circulating water mode, the water pipe is connected with the water pipe through the water outlet 205, the water pipe is connected with the water valve interface 105 on the vacuum cavity 1 through the water outlet 205, and the external circulating water system is connected to realize a circulating water cooling mode, so that the discharge temperature can be reduced, and the discharge can be regulated and controlled by regulating the concentration proportion and the solute type in the water solution. If the circulation scheme is not adopted, the water running port 205 is connected with a plastic screw to realize the sealing and complete the standing water mode.
In one embodiment, the water injection frame 206 includes water injection bars made of ABS photosensitive resin and insulating material. The area in the frame is 30×40 cm, water injection strips are arranged on one side of the water outlet 205 and are pipelines with the inner diameter of 6mm, a plurality of nozzles with the inner diameter of 5mm are uniformly distributed on the side surface of the water outlet, and are used for uniformly injecting water, the positions of the two ends of the water injection strips are concentrically aligned with the first water injection opening 2051 and the first water outlet 2053 on the sealing ring 202, the water outlet is arranged on the rear side of the water injection strips and is close to the side wall of the frame, and the holes with the inner diameter of 6mm are perforated and used for draining water, and the positions of the water injection strips are concentrically aligned with the water outlet 2052 and 2054 on the sealing ring 202. The whole outer frame of the water injection frame 206 is just nested with the inner side of the sealing ring 202, and the main function is to uniformly inject water and drain water to the water screen electrode 2, and press the metal screen 201 on the medium side 207.
In one embodiment, the dielectric side 207 is made of transparent insulating material such as quartz or high borosilicate, and in this case, high borosilicate glass with a relative dielectric constant of 3.7. Holes are formed in the corresponding positions of the four-side edge screws 203, the size is 442 multiplied by 542 mm, and the thickness is 3mm.
The dielectric side 207 is an important part of the dielectric barrier discharge DBD for determining the discharge, and is critical to the selection of the material and thickness for determining the discharge breakdown capacitance and the withstand voltage. The main purpose of the dielectric side 207 is to provide a blocking medium in the DBD and to bear the overall weight of the water screen electrode 2. Because the thickness of the medium side is too thick, the discharging is difficult, and when the thickness is thinner, more than 3L of aqueous solution is needed to be injected into the inner side of the water screen electrode 2, the whole parts are more, the bearing problem is needed to be considered, and the screw 203 is required to strictly control the stress when fastening the water screen electrode 2, so that the medium side 207 is prevented from being broken due to uneven stress.
In one embodiment, the cover plate 208 is made of transparent insulating material such as quartz, high borosilicate glass, etc. On the right side of the short side, a hole is formed near the center of the inner frame of the water injection frame 206 to put the high-voltage wire column 209 in, so that the bottom end of the high-voltage wire column is attached to the metal mesh. And then sealing by adopting a screw gasket and water sealing glue to prevent water leakage. The cover plate 208 is mainly used for pressing the integral structure of the water network electrode 2 and providing a high-voltage wiring column 209 interface.
In one embodiment, the high-voltage wire column 209 is made of a metal screw, in this case stainless steel 304, which is used to connect the water screen electrode 2 with high voltage, a flat head screw is used, the size is M4, the flat head is attached to the inner metal screen 201, and the high-voltage wire is fixed on the outside through a nut and connected with the inside of the high-voltage wire terminal 104 on the vacuum chamber 1 through the high-voltage wire.
In one embodiment, the discharge voltage is measured by the high voltage probe 6, the discharge current is measured by the current coil, the discharge power is calculated by measuring the capacitance 8 and the differential probe 9 and the discharge voltage current result, and the oscilloscope 10 reflects the measured voltage current waveform. The camera 11 shoots the discharge image through overlook and side view angles, so that the discharge uniformity analysis of the device is facilitated, and the material modification uniformity is facilitated to be verified. Compared with the traditional DBD plasma modifying device, the invention has the advantages of real-time three-dimensional visualization, can intuitively monitor the discharge conditions at different times, and is convenient for parameter regulation and safe operation of the industrial site
The working flow of the device is as follows: the method is characterized in that working gas is Ar, medium is HMDSO, the material to be treated is epoxy resin EP, and the aim is to realize hydrophobic modification. The process of plasma acting on the surface of the material comprises etching, grafting and depositing, wherein the hydrophobic modification of the silicon-containing precursor is mainly depositing. And (3) generating large-area plasma by using DBD discharge to deposit the silicon-containing film on the surface of the material. From the graph, when the output end of the excitation source 5 provides a high-voltage pulse or high-frequency alternating voltage with the amplitude of 6 kV-15 kV and the frequency of 0-5 kHz, the gas gaps among the water network electrode, the medium side and the ground electrode can be broken down, and the atmospheric pressure low-temperature plasma is generated. In the process of generating low-temperature plasma, free electrons in a discharge region are accelerated into excitation under the drive of an electric fieldThe excited state electrons trigger excitation, ionization and dissociation reactions, collide with the ground state argon atoms, generate a large number of excited state atoms and ions in large-area DBD plasmas, bombard the surface of the material to be treated, and destroy chemical bonds on the surface of the material. After being introduced into the medium HMDSO, the plasma discharge reaction mainly comprises several processes of electron impact ionization, electron ion recombination, charge transfer reaction, penning ionization and the like, and different reaction products are caused. On the one hand, the low-polarity silicon-containing groups (CH) 3 ) 2 SiO and Si (CH) 3 ) 3 The polymer chain based on polydimethylsiloxane PDMS is formed by polymerization and deposited on the surface of the sample, and a layer of polymer chain based on Si-O-Si and Si- (CH) is grafted or crosslinked on the surface of the destroyed epoxy plate 3 ) x A thin layer whose main component is a functional group. The deposited functional groups themselves are less polar than the original groups of the material, and after grafting to the sample surface, the polarity of the sample surface can be reduced, so that the hydrophobicity of the sample surface is improved. Decomposition of HMDSO to form CH 3 、(CH 3 )SiO(CH 3 ) 2 、(CH 3 ) 3 SiO、Si(CH 3 ) 3 The equal functional groups are deposited on the surface layer of the EP, and Si-O-Si and Si- (CH) containing low polar groups of silicon are introduced 3 ) x Thereby lowering the surface energy of the material. Meanwhile, the large-area DBD plasma changes the surface morphology of the sample, the roughness of the surface of the sample is improved through etching and deposition, the introduction of hydrophobic silicon-containing groups on the surface of the sample and the improvement of the roughness jointly reduce the surface polarity of the epoxy plate, and the increase of the surface water contact angle WCA is promoted, so that the hydrophobic modification of the surface of the material is realized.
The invention combines the advantages of water electrode and solid electrode to design a novel water screen electrode applied to a DBD reactor structure, introduces a circulating water cooling system, and effectively solves the problems of unstable discharge, poor modification effect and the like caused by large-area modification temperature elevation. The temperature rise is less than 1 ℃ in one minute, the device can realize the temperature change within 5 ℃ after continuous operation for one hour, and the device can realize the discharge 24 h operation without shutdown under the holding of a circulating water cooling system, thereby having higher industrial production application prospect. Compared with the traditional liquid phase modification method, the method can implement detection and regulation of the temperature and the concentration of the solution of the device, does not need complicated treatment steps, can recycle the solution, has no waste liquid pollution, and is efficient and environment-friendly.
Claims (10)
1. The utility model provides a circulating water accuse temperature large tracts of land water network electrode DBD material surface modification device, includes high-voltage electrode and ground electrode (3), high-voltage electrode passes through high-voltage terminal (104) and is connected with excitation source (5), and ground electrode (3) pass through ground electrode wiring end (103) ground connection, its characterized in that: the high-voltage electrode and the ground electrode (3) are fixed in the vacuum cavity (1), the high-voltage electrode is a water network electrode (2), a medium side (207) is fixed below the water network electrode (2), the ground electrode (3) is arranged below the medium side (207), the centers of the ground electrode (3) and the water network electrode (2) are aligned, a plasma discharge area is formed between the medium side (207) and the ground electrode (3), working gas and media enter the plasma discharge area through an air pipe, a water outlet (205) is formed in the vacuum cavity (1), the water outlet (205) comprises a water filling port and a water outlet, the water filling port is used for filling water into the water network electrode (2) through a water pipe, and the water outlet discharges aqueous solution in the water network electrode (2) through the water pipe.
2. The circulating water temperature-controlled large-area water screen electrode DBD material surface modification device according to claim 1, wherein: the water screen electrode (2) is equipped with sealing washer (202) all around, and sealing washer (202) on every limit are equipped with the screw hole of evenly distributed screw (203) corresponding position, and wherein, water must arrange screw (203) in four bight department sealing washer (202) upper and lower two sides same position fluting, and first silicone rubber sealing strip (2021) and second silicone rubber sealing strip (2022) are fixed in upper and lower inslot respectively in the bonding.
3. The circulating water temperature-controlled large-area water screen electrode DBD material surface modification device according to claim 2, wherein: each side of the water screen electrode (2) is provided with a screw hole filler strip (204), and the screws (203) uniformly penetrate through the screw hole filler strips (204) in a central arrangement mode.
4. The circulating water temperature-controlled large-area water screen electrode DBD material surface modification device according to claim 2, wherein: the whole frame of water injection frame (206) just in time nests with sealing washer (202) inboard, water injection frame (206) are including the water injection strip, water injection mouth one side is provided with the water injection strip, it has evenly distributed's a plurality of spouts to open the water injection strip side, spout subtend water net electrode (2), the delivery port sets up at water injection strip rear side, is close to frame position lateral wall, opens and has the perforation, is used for the drainage.
5. The circulating water temperature control large-area water screen electrode DBD material surface modification device according to claim 4, wherein: the water outlet (205) is a perforation on the upper side of the sealing ring (202), and the position of the water outlet corresponds to the water outlet position of the water injection strip on the water injection frame (206).
6. The circulating water temperature-controlled large-area water screen electrode DBD material surface modification device according to claim 1, wherein: the size of the metal net (201) of the water net electrode (2) is slightly larger than that of the ground electrode, the periphery edge is wrapped with an insulating tape, the wrapped size is the same as that of the ground electrode, and the metal net (201) is positioned at the center of the medium side (207).
7. The circulating water temperature-controlled large-area water screen electrode DBD material surface modification device according to claim 1, wherein: the gaseous medium is directly mixed with the working gas through the gas mixing cavity (12) and then is introduced into the discharge area, and the liquid medium is mixed with the working gas through the gas mixing cavity (12) and then is introduced into the plasma discharge area after passing through the back-suction bottle (15) and the medium bottle (16) by the working gas through a bubbling method, and the proportion of the reaction medium and the working gas is regulated through the flow controller (13).
8. The circulating water temperature-controlled large-area water screen electrode DBD material surface modification device according to claim 1, wherein: the device is also provided with an air inlet valve (102) and an air outlet valve (101), wherein the air inlet valve (102) is used for introducing needed working gas and medium into the plasma discharge area, exhaust gas is discharged through the air outlet valve (101), multiple paths of air in the air inlet valve (102) are converted into multiple paths of air to be introduced into the air inlet hole, and the working gas and the medium are introduced into the plasma discharge area.
9. The circulating water temperature control large area water network electrode DBD material surface modification apparatus according to any one of claims 1-8, wherein: the high-voltage probe (6) is also arranged for measuring discharge voltage, the current coil (7) is arranged for measuring discharge current, the capacitor (8) and the differential probe (9) are arranged for calculating the measurement result, the discharge voltage and the current result to obtain discharge power, the measured voltage and current waveform is displayed in the oscilloscope (10), the camera (11) is also arranged for shooting discharge images through overlooking and side view angles, and the vacuum manometer (106) is arranged for reflecting the internal air pressure of the vacuum cavity (1).
10. The circulating water temperature control large area water network electrode DBD material surface modification apparatus according to any one of claims 1-8, wherein: the water inlet is connected with a water inlet valve of the water valve interface (105), and the water outlet is connected with a water outlet valve of the water valve interface (105).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310758561.7A CN116567905A (en) | 2023-06-26 | 2023-06-26 | Circulating water temperature control large-area water net electrode DBD material surface modification device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310758561.7A CN116567905A (en) | 2023-06-26 | 2023-06-26 | Circulating water temperature control large-area water net electrode DBD material surface modification device |
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| CN116567905A true CN116567905A (en) | 2023-08-08 |
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| CN202310758561.7A Pending CN116567905A (en) | 2023-06-26 | 2023-06-26 | Circulating water temperature control large-area water net electrode DBD material surface modification device |
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| CN (1) | CN116567905A (en) |
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- 2023-06-26 CN CN202310758561.7A patent/CN116567905A/en active Pending
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