CN116520553A - Six-axis image stabilization piezoelectric self-adaptive zoom lens and preparation and working methods thereof - Google Patents
Six-axis image stabilization piezoelectric self-adaptive zoom lens and preparation and working methods thereof Download PDFInfo
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Classifications
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- G—PHYSICS
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
- G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
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- G—PHYSICS
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B30/00—Camera modules comprising integrated lens units and imaging units, specially adapted for being embedded in other devices, e.g. mobile phones or vehicles
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Lens Barrels (AREA)
Abstract
The invention provides a six-axis image stabilizing piezoelectric self-adaptive zoom lens and a preparation and working method thereof, wherein the six-axis image stabilizing piezoelectric self-adaptive zoom lens comprises a piezoelectric element, a transparent medium and a base which are sequentially arranged along an optical axis; the piezoelectric element is a transparent body, and two surfaces of the piezoelectric element perpendicular to the optical axis are respectively provided with a transparent first electrode and a transparent second electrode; the first electrode or the second electrode is divided into a plurality of side independent electrodes and a center electrode; the piezoelectric material and the base are fixed on the frame body, and the structure is constructed through an ordered structure of three-dimensional spatial arrangement of strain units of the piezoelectric material, so that the composite motion mode of the self-adaptive zoom lens under the six-axis basic motion and the coupling state of the six-axis basic motion can be excited in a very wide non-resonance low-frequency range; the device has the advantages of simple and compact structure, easy miniaturization, high response speed, large output displacement, low working electric field, ultrahigh adjustable focusing sensitivity, insensitivity to external environment conditions, no influence of external conditions, extremely low power consumption and easy system integration.
Description
Technical Field
The invention belongs to the technical field of optical devices, and particularly relates to a six-axis image stabilizing piezoelectric self-adaptive zoom lens and a preparation and working method thereof.
Background
With the continuous development of electronic technology, the requirements of people on photographing quality are continuously improved. The conventional auto-focusing function is realized by driving a voice coil motor in the camera module to push a lens, and the camera module can only drive the lens to move in the optical axis direction. However, when photographing or image capturing, the image is often blurred due to the relative motion between the imaging device and the object, so that the image stabilizing function becomes an indispensable function in image capturing. Two main stream image stabilization techniques exist: electronically and optically stable images. Electronic image stabilization is a technique of correcting and recovering an image formed after shake by a digital image processing technique, and is a technique of compensating shake by reducing image quality, so that the electronic image stabilization is also called as "artifact". The optical image stabilization is an effective image stabilization technology accepted by the public because the optical path with vibration deviation is compensated through a movable component so as to realize the effect of reducing the blurring of the photo.
In the prior art, like a voice coil motor for realizing an automatic focusing function, an optical image stabilizing voice coil motor is still based on the voice coil motor in the horizontal direction (X direction or Y direction) perpendicular to an optical axis, and a lens is driven to move by Lorentz force to obtain better image quality so as to realize optical image stabilization. The main disadvantages are as follows: (1) The optical image stabilizing motor is easy to be influenced by the magnetic field of nearby motors or external magnetic fields because of the magnets in the moving parts designed by the optical image stabilizing motor; (2) The motors can jointly control the multidimensional movement of the lens to realize optical image stabilization, namely, the motors are driven in at least two directions, so that the problems of large module size, complex mechanical structure, high power consumption, heavy weight of moving parts and high cost are solved, the mutual anti-interference design is difficult, and the reliability of the whole camera module structure is finally reduced; (3) Limited by the space size of the motors, the lens module cannot be made thin.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a six-axis image stabilization piezoelectric self-adaptive zoom lens and a preparation and working method thereof, and the six-axis image stabilization piezoelectric self-adaptive zoom lens can excite 57 composite motion modes of the self-adaptive zoom lens under the conditions of automatic zooming, optical image stabilization six-axis basic motion and coupling thereof in a very wide non-resonance low-frequency range by constructing an ordered structure of three-dimensional arrangement of piezoelectric material strain units.
The self-adaptive zoom lens solves the problems that the self-adaptive zoom lens of the existing optical image stabilizing voice coil motor is easily influenced by an external magnetic field or a magnetic field of a nearby motor, has larger size and higher overall cost, has a complicated mechanical structure, has heavier moving parts and large power consumption, is difficult to design mutually anti-interference, and finally reduces the reliability of the whole camera module structure.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: a six-axis image stabilization piezoelectric self-adaptive zoom lens and a preparation and working method thereof comprise a piezoelectric element, a transparent medium, a frame body and a base; the piezoelectric element is a transparent body, and a first electrode and a second electrode are respectively arranged on two surfaces of the piezoelectric element perpendicular to the optical axis; the first electrode and the second electrode are transparent electrodes, and the first electrode or the second electrode is divided into a plurality of independent working areas, namely a center electrode and an edge independent electrode; the piezoelectric element, the transparent medium and the base are sequentially arranged along the optical axis, and the piezoelectric material and the base are fixed on the frame body.
The piezoelectric element is polarized in the thickness direction or radial direction.
The side independent electrode is a plurality of equally divided or a plurality of annularly nested structures which are symmetrical about the center and around 1 part of the center electrode.
The frame body adopts PDMS gel, clearFlex50 glue, silicon rubber PDMS or flexible solid material capable of 3D printing material; the transparent medium adopts a transparent medium with the refractive index larger than 1.4; the base is made of transparent rigid solid materials; the first electrode and the second electrode adopt ITO electrodes and AZO electrodes, and the first electrode and the second electrode adopt magnetron sputtering or evaporation transparent electrodes; the piezoelectric element is bonded with the frame body and the base through an adhesive, and the piezoelectric element is packaged by ultraviolet curing glue or epoxy resin materials.
The cross section of the piezoelectric element is round or square; the piezoelectric element is a piezoelectric sheet, a piezoelectric film, a piezoelectric block or a piezoelectric stack structure; when the piezoelectric element is in a piezoelectric stack structure, the piezoelectric element comprises a plurality of piezoelectric sheets stacked, and a plurality of piezoelectric single crystal sheets are overlapped and arranged along the thickness direction; the piezoelectric pile structure is directly prepared by adopting a cofiring and film coating method or prepared by bonding independent piezoelectric sheets through transparent epoxy resin.
When the piezoelectric unit adopts a plurality of piezoelectric sheets, the piezoelectric sheets are electrically connected in parallel and in series.
The invention provides a preparation method of the six-axis image stabilizing piezoelectric self-adaptive zoom lens, which comprises the following steps:
cutting the transparent piezoelectric material block into piezoelectric sheets with the same size;
respectively carrying out surface grinding and polishing treatment on the upper surface and the lower surface of the cut piezoelectric sheet, wherein the surface flatness is within 0.01 mm;
the transparent electrode is sputtered or evaporated by magnetron according to the designed internal electrode pattern;
polarizing the piezoelectric sheet with the electrode according to the requirement, and cleaning;
bonding the polarized and cleaned piezoelectric sheets together through ultraviolet curing glue or epoxy resin, applying set pressure to discharge redundant epoxy resin, obtaining a glue layer with micron-sized and uniform thickness, and curing the glue layer to obtain an integrated piezoelectric stack; wherein a plurality of piezoelectric sheets are overlapped along the thickness direction, internal electrodes between adjacent piezoelectric sheets are distributed uniformly, the internal electrodes are arranged in an interdigital electrode structure, and the internal electrodes are led out by using side electrodes.
The invention also provides a self-adaptive optical imaging system, wherein the six-axis image stabilizing piezoelectric self-adaptive zoom lens is arranged in the lens component.
The invention relates to a working method of a six-axis image stabilizing piezoelectric self-adaptive zoom lens, wherein a piezoelectric element realizes the movement of zooming and image stabilizing based on a length stretching mode or a thickness shearing mode, and the working method specifically comprises the following steps: the focus facing the AF function moves linearly along the optical axis; the OIS function-oriented focal spot moves linearly along an X-axis or Y-axis perpendicular to the optical axis, the focal spot rotates the ROLL motion ROLL about the X-axis, the focal spot rotates the PITCH motion PITCH about the Y-axis, the focal spot rotates the YAW motion YAW about the imaging optical axis, and a composite motion modality of coupled AF, linear and rotational motion.
In the length expansion or thickness shearing mode, the polarization direction of the piezoelectric element is thickness or radial, and when an excitation electric field is applied to the upper surface and the lower surface of the piezoelectric element, the mode of applying the electric field is as follows: the independent electrode area applies an electric field consistent with the mode of applying an electric field by single linear or axial rotation, the central electrode area applies a 0 electric field or a direct current electric field with a fixed value, and the other surface is not dividedAlways apply 0 electric field, through d 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element in the length expansion and thickness shearing modes, excites at least one of deformation elongation, shortening, arching and recessing of different areas, and finally forms an automatic zooming, linear or pivoting compound movement mode of the focus moving linearly along the optical axis.
Compared with the prior art, the invention has at least the following beneficial effects: the invention provides a six-axis image stabilization piezoelectric self-adaptive zoom lens, which can excite basic vibration modes of automatic zooming (AF) and Optical Image Stabilization (OIS) functions of the self-adaptive zoom lens in a very wide non-resonance low-frequency range, and has high response speed and large output displacement; the self-adaptive zoom lens has low working electric field, large adjustable focal length range and ultrahigh adjustable focal length sensitivity; the self-adaptive zoom lens is insensitive to external environment conditions, and does not have the influence of external temperature, pressure, magnetic field and gravity, so that a complex calibration procedure is not needed; the working electric field currents of the self-adaptive zoom lens are smaller, and the self-adaptive zoom lens has extremely low power consumption; the self-adaptive zoom lens has the advantages of smaller size, simple and compact structure, lower overall cost, simple manufacturing process and high integration level, and can be used for making a lens body very thin, and moving parts have lighter weight and no electromagnetic interference; the self-adaptive zoom lens has the advantages of stable performance, long service life and the like during the service life.
Drawings
FIG. 1 is a schematic diagram of a six-axis image stabilization piezoelectric adaptive zoom lens according to the present invention;
FIG. 2 is an exploded view of a six-axis image stabilization piezoelectric adaptive zoom lens configuration of the present invention;
FIG. 3 is a schematic view of the structure of electrodes on the upper and lower surfaces of a piezoelectric material of a piezoelectric adaptive zoom lens, wherein the edge independent electrode is 1 ring (dividing one surface into 5 independent electrode areas);
FIG. 4 is a schematic view of the structure of electrodes on the upper and lower surfaces of a piezoelectric material of a piezoelectric adaptive zoom lens, wherein the edge independent electrode is formed by 2 rings (dividing one surface into 9 independent electrode areas);
FIG. 5 is a schematic view of the structure of the electrode on the upper and lower surfaces of the piezoelectric material of the piezoelectric adaptive zoom lens, wherein the edge independent electrode is 3 rings (dividing one surface into 13 independent electrode areas);
FIG. 6 is a schematic illustration of a process for fabricating a three-dimensional multi-layer piezoelectric material smart structure for a piezoelectric adaptive zoom lens;
FIG. 7 is a schematic diagram of an electrical parallel structure of a piezoelectric material bilayer thickness polarized piezoelectric unit of a piezoelectric adaptive zoom lens;
FIG. 8 is a schematic diagram of an electrical parallel structure of piezoelectric material multilayer thickness polarization piezoelectric units of a piezoelectric adaptive zoom lens;
FIG. 9 is a schematic diagram of an electrical series configuration of piezoelectric material bilayer thickness polarized piezoelectric elements of a piezoelectric adaptive zoom lens;
FIG. 10 is a schematic diagram of an electrical series configuration of piezoelectric material multilayer thickness polarized piezoelectric elements of a piezoelectric adaptive zoom lens;
FIG. 11 is a schematic diagram of an electrical parallel structure of a piezoelectric material dual-layer radially polarized piezoelectric unit of a piezoelectric adaptive zoom lens;
FIG. 12 is a schematic diagram of an electrical parallel structure of a piezoelectric material multilayer radially polarized piezoelectric unit of a piezoelectric adaptive zoom lens;
FIG. 13 is a schematic diagram of an electrical series configuration of a piezoelectric material dual-layer radially polarized piezoelectric element of a piezoelectric adaptive zoom lens;
FIG. 14 is a schematic diagram of an electrical series configuration of piezoelectric material multilayer radially polarized piezoelectric elements of a piezoelectric adaptive zoom lens;
FIG. 15 is a schematic diagram of a driving voltage waveform and a variation thereof for forming a meniscus lens when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention achieves automatic zooming (AF) in which a focal point moves linearly along an optical axis (Z axis), wherein a dotted line in the voltage waveform represents 0 voltage;
FIG. 16 is a schematic diagram of a driving voltage waveform and its variation when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention realizes the linear movement of a focal point along the X axis of a vertical optical axis, wherein a dashed line in the voltage waveform represents 0 voltage;
FIG. 17 is a schematic diagram of a driving voltage waveform and its variation when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention realizes the linear movement of a focal point along the Y axis of the vertical optical axis, wherein the dashed line in the voltage waveform represents 0 voltage;
FIG. 18 is a schematic diagram of a driving voltage waveform and a variation thereof when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention realizes a ROLL motion ROLL of a focus rotating around an X-axis, wherein a dotted line in the voltage waveform represents 0 voltage;
FIG. 19 is a schematic diagram of a driving voltage waveform and a variation thereof when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention realizes a PITCH motion PITCH of a focus rotating around a Y axis, wherein a dotted line in the voltage waveform represents 0 voltage;
FIG. 20 is a schematic diagram of a driving voltage waveform and a variation thereof when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention realizes a YAW motion YAW of a focus rotating around a Z axis, wherein a dotted line in the voltage waveform represents 0 voltage;
FIG. 21 is a schematic diagram of a driving voltage waveform and its variation when an automatic zoom (AF) lens of the present invention, in which a focal point is linearly moved along an optical axis (Z-axis), is coupled with a linear movement along an X-axis perpendicular to the optical axis, wherein a broken line in the voltage waveform represents a 0-voltage;
FIG. 22 is a schematic diagram of a driving voltage waveform and its variation when an automatic zoom (AF) lens of the present invention, in which a focal point is linearly moved along an optical axis (Z-axis), is coupled with a linear movement along a Y-axis perpendicular to the optical axis, wherein a dotted line in the voltage waveform represents a 0-voltage;
FIG. 23 is a schematic diagram of a driving voltage waveform and its variation when an automatic zoom (AF) lens of the present invention, in which a focal point is linearly moved along an optical axis (Z-axis), is coupled with a ROLL motion ROLL rotated about an X-axis, and a broken line in the voltage waveform indicates a voltage of 0;
FIG. 24 is a schematic diagram of a driving voltage waveform and its variation when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention implements auto zoom (AF) in which a focal point moves linearly along an optical axis (Z axis) and pitching motion PITCH is rotated around a Y axis, wherein a dotted line in the voltage waveform represents 0 voltage;
FIG. 25 is a schematic diagram of a driving voltage waveform and its variation when the six-axis image stabilization piezoelectric adaptive zoom lens of the present invention achieves an automatic zoom (AF) in which a focal point moves linearly along an optical axis (Z axis) and a YAW motion YAW is rotated around the Z axis, wherein a broken line in the voltage waveform represents 0 voltage;
FIG. 26 is a schematic diagram showing motion coupling deformation of an automatic zoom (AF) lens for realizing linear motion of a focal point along an optical axis (Z-axis) and linear motion perpendicular to the optical axis (X-axis or Y-axis) and rotation around an axis (X-axis rotation ROLL motion ROLL, Y-axis rotation PITCH motion PITCH, and imaging optical axis rotation YAW motion YAW), and a schematic diagram of electrode structures of upper and lower surfaces of piezoelectric materials, wherein the electrode structures of the upper and lower surfaces of the piezoelectric materials are composed of 5 rings of edge independent electrodes (one surface is divided into 21 independent electrode areas);
Fig. 27 is a schematic structural diagram of a six-axis image stabilization piezoelectric adaptive zoom lens.
Detailed Description
The present invention will be described in further detail with reference to the drawings and embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the substances, and not restrictive of the invention. It should be further noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
In addition, the embodiments of the present invention and the features of the embodiments may be combined with each other without collision. The technical scheme of the present invention will be described in detail below with reference to the accompanying drawings in combination with embodiments.
Unless otherwise indicated, the exemplary implementations/embodiments shown are to be understood as providing exemplary features of various details of some of the ways in which the technical concepts of the present invention may be practiced. Thus, unless otherwise indicated, the features of the various implementations/embodiments may be additionally combined, separated, interchanged, and/or rearranged without departing from the technical concepts of the present invention.
The use of cross-hatching and/or shading in the drawings is typically used to clarify the boundaries between adjacent components. As such, the presence or absence of cross-hatching or shading does not convey or represent any preference or requirement for a particular material, material property, dimension, proportion, commonality between illustrated components, and/or any other characteristic, attribute, property, etc. of a component, unless indicated. In addition, in the drawings, the size and relative sizes of elements may be exaggerated for clarity and/or descriptive purposes. While the exemplary embodiments may be variously implemented, the specific process sequences may be performed in a different order than that described. For example, two consecutively described processes may be performed substantially simultaneously or in reverse order from that described. Moreover, like reference numerals designate like parts.
When an element is referred to as being "on" or "over", "connected to" or "coupled to" another element, it can be directly on, connected or coupled to the other element or intervening elements may be present. However, when an element is referred to as being "directly on," "directly connected to," or "directly coupled to" another element, there are no intervening elements present. For this reason, the term "connected" may refer to physical connections, electrical connections, and the like, with or without intermediate components.
For descriptive purposes, the invention may use spatially relative terms such as "under … …," "under … …," "under … …," "lower," "above … …," "upper," "above … …," "higher" and "side (e.g., as in" sidewall ") to describe one component's relationship to another (other) component as illustrated in the figures. In addition to the orientations depicted in the drawings, the spatially relative terms are intended to encompass different orientations of the device in use, operation, and/or manufacture. For example, if the device in the figures is turned over, elements described as "under" or "beneath" other elements or features would then be oriented "over" the other elements or features. Thus, the exemplary term "below" … … can encompass both an orientation of "above" and "below". Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless explicitly defined otherwise.
The invention provides a six-axis image stabilizing piezoelectric self-adaptive zoom lens which comprises a piezoelectric element 1, a transparent medium 2, a frame 3 and a base 4, wherein the piezoelectric element is arranged on the frame; referring to fig. 1, the piezoelectric element 1, the transparent medium 2, the frame 3, and the base 4 are sequentially arranged from top to bottom, and the piezoelectric element 1 and the base 4 are fixed on the frame 3; the upper surface of the piezoelectric element 1 is provided with an upper electrode, and the lower surface of the piezoelectric element 1 is provided with a lower electrode; one of the surface electrodes (upper electrode or lower electrode) of the piezoelectric element 1 is divided into a plurality of independent working areas, that is, one of the surface electrodes is divided into a center electrode and an edge independent electrode, and the first electrode and the second electrode correspond to the upper electrode and the lower electrode, and "upper" and "lower" are used only for distinction in description and do not limit the structure described in the present application in azimuth.
The frame 3 may be made of PDMS (Polydimethylsiloxane) gel, clearFlex 50 glue, silicone PDMS, or a flexible material capable of 3D printing, and the hardness of the material used for the frame 3 is not more than 60HA.
The transparent medium 2 adopts a transparent medium with a refractive index larger than 1.4, and can adopt silicone oil or PDMS.
The base 4 is made of transparent solid materials which are relatively high in rigidity and not easy to deform, the hardness of the base 4 is not lower than 80HD, and PMMA, glass or materials which can be formed by 3D printing can be adopted.
The piezoelectric element 1 and the frame 3, and the frame 3 and the base 4 of the self-adaptive zoom lens are bonded by adhesive, and can be packaged by ultraviolet curing glue, epoxy resin and the like. The adhesive adopts epoxy resin, and the assembly of each component and the solidification of the adhesive are completed under the prestress loading condition.
As shown in fig. 1, the piezoelectric sheet is a thin wafer or a thin Fang Pian; the transparent piezoelectric ceramic, transparent piezoelectric textured ceramic or transparent piezoelectric monocrystalline material can be used for manufacturing; the piezoelectric sheets are polarized along the thickness or radial direction, and an electric field is applied along the thickness direction during operation.
The upper surface of the piezoelectric sheet is provided with an upper electrode, and the lower surface of the piezoelectric sheet is provided with a lower electrode; the upper electrode of the piezoelectric material is divided into different working areas, namely a central electrode and an edge independent electrode, and the upper electrode and the lower electrode can adopt magnetron sputtering or evaporation transparent electrodes, such as ITO electrodes or AZO electrodes.
Referring to fig. 3, 4 and 5, the upper electrode of the piezoelectric sheet is divided into a central electrode and an edge independent electrode, and referring to fig. 3 (a) and 3 (c), the central electrode is square or circular, the edge independent electrode is divided into four parts, the edge independent electrode is symmetrically distributed about the center of the piezoelectric sheet, and fig. 3 (b), 3 (d), 3 (f) and 3 (h) are all lower electrodes of the piezoelectric sheet, and the lower electrodes are integral. Referring to fig. 3 (e) and 3 (g), the side independent electrodes may be divided into more parts, the number of which is an integer multiple of 4.
When the piezoelectric sheet is polarized, the areas corresponding to the different electrodes in the same piezoelectric sheet can be polarized along the thickness direction and the radial direction, namely, the areas polarized along the thickness direction and the areas polarized along the radial direction exist in the same piezoelectric sheet.
Taking the example that the upper electrode of the piezoelectric plate is divided into a central electrode and edge independent electrodes, referring to fig. 4 (a) and 4 (c), the central electrode is square or circular, the edge independent electrodes are distributed in two circles, and as a possible embodiment, the width of the edge independent electrode of the outer circle is larger than that of the edge independent electrode of the inner circle, a plurality of edge independent electrodes of each circle are symmetrical about the center of the piezoelectric plate, and referring to fig. 4 (b) and 4 (d), the lower electrode of the piezoelectric plate is an integral body.
Similarly, taking the example that the upper electrode of the piezoelectric sheet is divided into a central electrode and an independent electrode at the edge, the independent electrode at the edge shown in fig. 5 (a) and 5 (c) presents a design scheme of three circles, and the lower electrode of the piezoelectric sheet shown in fig. 5 (b) and 5 (d) is an integral body.
The side independent electrode may be a ring, as shown in fig. 3 (a) to 3 (d), or a plurality of annular nested structures (as shown in fig. 4 and 5), and one independent electrode may be 1 part or a plurality of parts, as shown in fig. 3 (e) to 3 (h). The center independent electrode is used for realizing the linear motion of the focus facing the AF function along the optical axis (Z axis), the side independent electrode is used for realizing the linear motion of the focus facing the OIS function along the X axis or the Y axis perpendicular to the optical axis, the rotation rolling motion ROLL of the focus around the X axis, the rotation pitching motion PITCH of the focus around the Y axis, the rotation yaW of the focus around the imaging optical axis and the like, and one ring can only realize one motion mode; that is, the third view can realize a single motion mode (including a dual composite motion mode in which the focal point facing the AF function is linearly moved along the optical axis (Z-axis), the focal point facing the OIS function is linearly moved along the X-axis or Y-axis perpendicular to the optical axis, the focal point is rotationally rolled over the X-axis, the focal point is rotationally pitching about the Y-axis, and the focal point is rotationally yawed about the imaging optical axis), and the AF is coupled with the linear or rotational motion; multiple ring nested structures (fig. 4, 5) are required when tri-modal coupling and more are required.
The piezoelectric element 1 adopts a piezoelectric sheet, a piezoelectric film, a piezoelectric block or a piezoelectric stack structure; when the piezoelectric element is in a piezoelectric stack structure, the piezoelectric element is formed by stacking a plurality of piezoelectric sheets, wherein the plurality of piezoelectric sheets comprise at least two piezoelectric sheets, and the plurality of piezoelectric single-crystal sheets are overlapped along the thickness direction; and the piezoelectric sheets are electrically connected in parallel or in series.
Referring to fig. 6, the present invention further provides a method for preparing a three-dimensional multi-layer piezoelectric material intelligent structure of a piezoelectric adaptive zoom lens, which comprises:
1) Taking a transparent piezoelectric material block as a piezoelectric element, wherein the piezoelectric material block is piezoelectric ceramic or piezoelectric monocrystal;
2) Cutting the transparent piezoelectric material block into piezoelectric sheets with the same size;
3) Respectively carrying out surface grinding and polishing treatment on the upper surface and the lower surface of the cut piezoelectric sheet to ensure that the thickness is uniform and the surface is flat and smooth;
4) The transparent electrode is sputtered or evaporated by magnetron according to the designed internal electrode pattern;
5) Polarizing the piezoelectric material with the electrode according to the requirement, and cleaning;
6) Bonding the clean and polarized piezoelectric sheets together through ultraviolet curing glue or epoxy resin, applying set pressure to discharge redundant epoxy resin so as to obtain a glue layer with micron-sized and uniform thickness, and curing the glue layer for 24 hours to obtain an integrated piezoelectric stack; the piezoelectric single crystal plates are overlapped along the thickness direction, the internal electrodes between the adjacent piezoelectric plates are uniformly distributed, the internal electrodes are arranged in an interdigital electrode structure, and the internal electrodes are led out by using side electrodes. Specifically, when the piezoelectric element 1 is a piezoelectric stack structure, the piezoelectric stack includes a plurality of piezoelectric sheets, the plurality of piezoelectric sheets are electrically connected in series or in parallel, and the polarization direction is the thickness direction or the radial direction. The structure is shown in fig. 7 to 14, so that the effects of amplifying the output displacement and reducing the working electric field can be realized. Wherein, fig. 7, fig. 9, fig. 11, fig. 13 show a double-layer piezoelectric material, fig. 8, fig. 10, fig. 12, fig. 14 show a multi-layer piezoelectric material, and fig. 7 and fig. 8 show a schematic view of a parallel structure of piezoelectric materials along thickness polarization; FIGS. 9 and 10 are schematic views of piezoelectric material in series along thickness polarization; FIGS. 11 and 12 are schematic diagrams of parallel structures of piezoelectric materials polarized along radial directions; fig. 13 and 14 are schematic diagrams of parallel structures in which piezoelectric materials are polarized in the radial direction.
The piezoelectric stack structure can be directly prepared by adopting a cofiring method or a film coating method, and also can be prepared by bonding independent piezoelectric sheets together through transparent epoxy resin.
The piezoelectric element 1 may be made of a monolithic transparent piezoelectric single crystal material such as a lead zinc niobate-lead titanate single crystal (PZN-PT), a lead magnesium niobate-lead titanate single crystal (PMN-PT), a lead indium niobate-lead magnesium niobate-lead titanate single crystal (PIN-PMN-PT), a erbium doped lead indium niobate-lead magnesium niobate-lead titanate single crystal (Er-PIN-PMN-PT), a erbium doped lead magnesium niobate-lead titanate single crystal (Er-PMN-PT), a samarium doped lead magnesium niobate-lead titanate single crystal (Sm-PIN-PMN-PT) or a samarium doped lead magnesium niobate-lead titanate single crystal (Sm-PMN-PT), or a transparent piezoelectric ceramic material such as a erbium doped lead magnesium niobate-lead titanate ceramic (Er-PMN-PT), an erbium doped lead magnesium niobate-lead titanate ceramic (Er-PIN-PMN-PT), a lanthanum doped lead zirconate titanate (PLZT) transparent ceramic, a potassium sodium niobate-lead titanate single crystal (Sm-PIN-PMN-PT), or a samarium doped lead magnesium niobate-lead titanate single crystal (Sm-PMN-PT), or a transparent piezoelectric ceramic, may be made of a transparent piezoelectric single crystal.
The invention relates to a working method of a six-axis image stabilizing piezoelectric self-adaptive zoom lens, which comprises the following steps: the piezoelectric element realizes the movement of zooming and image stabilization based on a length expansion mode or a thickness shearing mode, and specifically comprises the following steps: the focus facing the AF function moves linearly along the optical axis (Z axis); the OIS function-oriented focal spot moves linearly along an X-axis or Y-axis perpendicular to the optical axis, the focal spot rotates the ROLL motion ROLL about the X-axis, the focal spot rotates the PITCH motion PITCH about the Y-axis, the focal spot rotates the YAW motion YAW about the imaging optical axis, and a composite motion modality of coupled AF, linear and rotational motion.
Automatic zooming in which the focus moves linearly along the optical axis: the piezoelectric element is in a length stretching mode or a thickness shearing mode, and the polarization direction of the piezoelectric element is the thickness or radial direction; the piezoelectric element is polarized along the thickness direction, when the upper layer of the piezoelectric element applies an excitation electric field in the same direction (or opposite direction) with the polarization direction and the lower layer applies an excitation electric field in the opposite direction (or same direction) with the polarization direction, the piezoelectric element is polarized along the thickness direction by d 31 The piezoelectric working mode successfully excites the vibration of opposite length stretching modes of the upper layer and the lower layer of the piezoelectric element, the piezoelectric element can generate larger stretching deformation along the radial direction, the upper part works in an stretching state mode (or a shortening mode), and the lower part works in a shortening mode (or an stretching mode); when the polarization direction of the piezoelectric sheet is radial and the upper layer and the lower layer of the piezoelectric element apply the same-direction excitation electric field perpendicular to the polarization direction, the piezoelectric sheet is excited by d 15 The piezoelectric mode successfully excites the thickness shear mode vibration of the piezoelectric element, and the upper surface and the lower surface of the piezoelectric element generate upward or downward shear motion; the edge of the piezoelectric element is fixed, so that the central part of the piezoelectric element is forced to generate larger displacement motion perpendicular to the surface of the piezoelectric element by a length expansion mode (or a thickness shearing mode) of the piezoelectric element, and finally, the automatic zooming of the focus moving linearly along the optical axis is formed;
The focal point moves linearly along an X-axis perpendicular to the optical axis: piezoelectric elementIn the length stretching mode, the polarization direction of the piezoelectric element is the thickness direction; the piezoelectric element applies an excitation electric field to a surface perpendicular to the optical axis, specifically in the following manner: an independent electrode at one side of the X-axis is divided into an upper end and a lower end, and an electric field in the same direction (or opposite direction) with the polarization direction is applied; the independent electrode at the other side of the X axis is also divided into an upper end and a lower end, and an electric field which is opposite to (or same as) the polarization direction is applied to the independent electrode; the center electrode area is applied with 0 electric field or fixed direct current electric field, and the surface of the other surface which is not segmented is always applied with 0 electric field. By d 31 The piezoelectric working mode successfully excites the vibration of the piezoelectric material in a length stretching mode, and the area on one side of the X axis and the area on the other side of the X axis form opposite displacement changes, namely, the upper area and the lower area on one side of the X axis are both operated in an stretching state mode (or a shortening state mode), and the upper area and the lower area on the other side of the X axis are both operated in a shortening state mode (or an stretching state mode), so that the focus is finally formed to linearly move along the X axis perpendicular to the optical axis.
The focal point moves linearly along the Y-axis perpendicular to the optical axis: in the length stretching mode, the polarization direction of the piezoelectric element is the thickness direction; the upper and lower surfaces of the piezoelectric element are applied with an excitation electric field, specifically, the mode of applying the excitation electric field is as follows: the independent electrode at one side of the Y-axis is divided into an upper end and a lower end, and an electric field which is in the same direction or opposite direction with the polarization direction is applied; the independent electrode at the other side of the Y axis is also divided into an upper end and a lower end, and an electric field which is opposite to (or same as) the polarization direction is applied to the independent electrode; applying 0 electric field or fixed DC electric field to the central electrode region, applying 0 electric field to the undivided surface of the other surface all the time, passing through d 31 The piezoelectric working mode successfully excites the vibration of the piezoelectric element in the length stretching mode, and the area on one side of the Y axis and the area on the other side of the Y axis form opposite displacement changes, namely, the upper area and the lower area on one side of the Y axis are both operated in an stretching state mode (a shortening state mode), and the upper area and the lower area on the other side of the Y axis are both operated in the stretching state mode (the shortening state mode), so that the focus is finally formed to linearly move along the Y axis perpendicular to the optical axis.
The focus rotates around the X-axis and ROLLs the motion ROLL: the piezoelectric element is in a length stretching mode or a thickness shearing mode, and the polarization direction of the piezoelectric element is the thickness or radial direction; the piezoelectric element has upper and lower surfaces applying an excitation field, and when in a length-stretching mode, the piezoelectric element applies an excitation fieldThe method comprises the following steps: an electric field which is in the same direction or reverse direction with the polarization direction is applied to the upper layer of the piezoelectric element at one side of the X axis, and an electric field which is in the reverse direction or the same direction with the polarization direction is applied to the lower layer of the piezoelectric element; the upper layer of the piezoelectric element on the other side of the X axis applies an electric field which is opposite to or in the same direction as the polarization direction, and the lower layer of the piezoelectric element applies an electric field which is in the same direction as or opposite to the polarization direction; when in thickness shear mode, the electric field is applied in the following manner: the piezoelectric element on one side of the X axis applies an electric field to form 90 degrees clockwise or anticlockwise with the polarization direction; the piezoelectric element on the other side of the X axis applies an electric field 90 degrees counterclockwise or clockwise to the polarization direction. Applying 0 electric field or fixed DC electric field to the central electrode region, applying 0 electric field to the undivided surface of the other surface all the time, passing through d 31 Or d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element in a length expansion or thickness shearing mode, the upper layer on one side of the X axis and the lower layer on the other side of the X axis work in an elongation state mode or a shortening state mode, the lower layer on one side of the X axis and the upper layer on the other side of the X axis work in a shortening state mode or an elongation state mode, namely the region on one side of the X axis is arched upwards or sunken downwards, the region on the other side of the X axis is sunken downwards and arched upwards, and finally, the rotary rolling motion ROLL of a focus along the X axis is formed;
the focal point rotates about the Y axis and PITCH motion PITCH: the polarization direction of the piezoelectric element is thickness or radial under the length stretching mode or the thickness shearing mode; the upper and lower surfaces of the piezoelectric element are applied with an excitation electric field, and when in a length stretching mode, the mode of applying the electric field is as follows: the upper layer of the piezoelectric element on one side of the Y axis applies an electric field which is in the same direction or reverse direction to the polarization direction, and the lower layer of the piezoelectric element applies an electric field which is in the reverse direction or the same direction to the polarization direction); the upper layer of the piezoelectric element on the other side of the Y axis applies an electric field which is opposite to or in the same direction as the polarization direction, and the lower layer of the piezoelectric element applies an electric field which is in the same direction as or opposite to the polarization direction; when in thickness shear mode, the electric field is applied in the following manner: the piezoelectric element on one side of the Y axis applies an electric field to form 90 degrees clockwise or anticlockwise with the polarization direction; the piezoelectric element on the other side of the Y axis applies an electric field to form an anticlockwise or clockwise 90 degrees with the polarization direction; applying 0 electric field or fixed direct current electric field to the central electrode area, and always applying 0 electric field to the surface of the other surface which is not segmented; by d 31 Or d 15 The piezoelectric working mode successfully excites the length expansion or thickness shearing of the piezoelectric elementThe tangential mode vibration, the upper layer on one side of the Y axis and the lower layer on the other side of the Y axis work in an elongation state mode or a shortening state mode, and the lower layer on one side of the Y axis and the upper layer on the other side of the Y axis work in a shortening state mode or an elongation state mode, namely, the area on one side of the Y axis is arched upwards or sunken downwards, and the area on the other side of the Y axis is sunken downwards or arched upwards, so that the rotary pitching motion PITCH of a focus along the Y axis is finally formed.
The focus rotates about the Z-axis YAW motion YAW: in the length stretching mode, the polarization direction of the piezoelectric element is the thickness direction or the radial direction; the upper and lower surfaces of the piezoelectric element are applied with an excitation electric field, and if N parts exist on the edge part independent electrodes of the surface of the piezoelectric element, the N parts are sequentially applied with an electric field with a phase difference of 1/N period, and when in a length stretching mode, the mode of applying the electric field is as follows: the upper layer of the piezoelectric element is in the same direction or reverse direction with the polarization direction, and the lower layer is in the reverse direction or the same direction with the polarization direction to apply an electric field; when in thickness shear mode, the electric field is applied in the following manner: the piezoelectric element applies an electric field which is clockwise or anticlockwise rotated by 90 degrees with the polarization direction; the center electrode area is applied with 0 electric field or fixed direct current electric field, and the surface of the other surface which is not segmented is always applied with 0 electric field. By d 31 Or d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element in a length expansion or thickness shearing mode, the upper and lower regions of the same edge are independently operated in opposite states, namely, the upper region is operated in an extension state mode and a shortening state mode, the lower region is operated in the shortening state mode or the extension state mode, and finally, the electrode regions of the edge are independently arched and recessed in sequence, so that the rotary YAW motion YAW of a focus along the Z axis is finally formed.
Composite motion mode: in the length expansion or thickness shearing mode, the polarization direction of the piezoelectric element is the thickness direction or radial direction, and when an excitation electric field is applied to the upper surface and the lower surface of the piezoelectric element, the mode of applying the electric field is as follows: the independent electrode area applies an electric field consistent with that applied by a single straight line (the focus moves along an X axis or a Y axis which is perpendicular to the optical axis) or a rotary motion around the axis (the focus rotates and ROLLs over the motion ROLL around the X axis, the focus rotates and pitching motion PITCH around the Y axis, and the focus rotates and YAWs around the Z axis), the central electrode area applies a direct current electric field with 0 electric field or a fixed value, and the other surface is not divided all the timeApplying an electric field of 0, passing d 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element in the length expansion and thickness shearing modes, at least one of deformation elongation, shortening, arching and recessing of different areas is excited, and finally, a composite motion mode of automatic zooming, linear motion (linear motion of the focus along an X axis or a Y axis perpendicular to the optical axis) or axial rotation (rotary rolling motion ROLL of the focus around the X axis, rotary pitching motion PITCH of the focus around the Y axis and rotary yawing motion YAW of the focus around the Z axis) of the focus along the optical axis is formed. The working principle of the piezoelectric element 1 of the adaptive zoom lens is based on a length expansion mode or a thickness shearing mode to realize an automatic zoom (AF) mode comprising a focus moving linearly along an optical axis (Z axis), a focus moving linearly along a direction perpendicular to the optical axis (X axis or Y axis), a focus rotating rolling motion ROLL around the X axis, a focus rotating pitching motion PITCH around the Y axis, a focus rotating yawing motion YAW around an imaging optical axis, and 57 composite motion modes of AF and linear and rotary motion, wherein the modes comprise the following specific steps: taking the double-layer piezoelectric element 1 as an example, the electrode division is as shown in fig. 3, and the double-layer structure bonds together the undivided electrode surface F as a bonding surface and divides the two surfaces of the electrode as upper and lower surfaces, so that the electrode is divided into 12 electrode areas, a upper, a lower, B upper, B lower, C upper, C lower, D upper, D lower, E upper, E lower, F upper, F lower, and the polarization direction is the thickness direction, referring to fig. 7 or radial direction, and referring to fig. 13.
Automatic zoom (AF): in the length expansion or thickness shearing mode of the piezoelectric element 1, the polarization direction of the piezoelectric element 1 is the thickness direction or radial direction, and when an excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: the upper and lower electrodes applied in region A, B, C, D, E are applied with a terminal voltage (V On A 、V Under A 、V On B 、V Under B 、V On C 、V Under C 、V On D 、V Under D 、V On E 、V Under E ) The upper and lower electrodes of region F apply the other end voltage (V F is on 、V Under F ) The voltage is applied by d as shown in FIG. 15 31 Or d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element 1 in a length expansion or thickness shearing mode, and the piezoelectric element 1 can move along the radial directionThe large expansion deformation can be generated; in the above-mentioned length expansion or thickness shearing mode operation mode, since the edge portion of the piezoelectric element 1 is fixed to the frame 3, a large displacement motion perpendicular to the surface of the piezoelectric element 1 is forced to occur in the center portion thereof by the length expansion mode of the piezoelectric element, and the deformation schematic diagram thereof is shown in fig. 15;
linear motion along a direction perpendicular to the optical axis (X axis): in the length extension mode of the piezoelectric element 1, the polarization direction of the piezoelectric element 1 is the thickness direction, and when an excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied by: the upper electrode of region A, D and the lower electrode of region B and C are one end (V On A 、V Under B 、V Under C 、V On D ) The upper electrode of region B and region C and the lower electrode of region A and region D are the other end (V Under A 、V On B 、V On C 、V Under D ) Which applies the same-frequency reverse voltage, and the rest region E applies 0 voltage or a fixed value of DC voltage (V On E 、V Under E ) Zone F applies a voltage of 0 (V F is on 、V Under F ) The voltage waveform is shown in FIG. 16, passing through d 31 The piezoelectric working mode successfully excites the vibration of the length expansion mode of the independent electrode part at the edge of the piezoelectric material, and the displacement changes of the area A and the area D, the area B and the area C are opposite, namely the area A and the area D work in an extension state mode (a shortening state mode), the area B and the area C work in a shortening state mode (an extension state mode), and finally linear motion along the direction perpendicular to the optical axis (X axis) is formed, and the deformation schematic diagram is shown in fig. 16;
linear motion along a direction perpendicular to the optical axis (Y axis): in the length stretching mode of the piezoelectric element, the polarization direction of the piezoelectric element is the thickness direction, and when the excitation voltage is applied to the upper surface and the lower surface of the piezoelectric element, the voltage is applied in the mode that: the upper electrode of region A and region B and the lower electrode of region C and region D are one end (V On A 、V On B 、V Under C 、V Under D ) The upper electrode of region C and region D and the lower electrode of region A and region B are one end (V Under A 、V Under B 、V On C 、V On D ) Which applies the same-frequency opposite-phase voltage, the rest area E applies 0 voltage or fixed valueDC voltage (V) On E 、V Under E ) Zone F applies a voltage of 0 (V F is on 、V Under F ) The voltage waveform is shown in FIG. 17, and is shown by d 31 The piezoelectric working mode successfully excites the vibration of the length expansion mode of the independent electrode part at the edge of the piezoelectric element, and the area A, B and the areas C and D form opposite displacement changes, namely the areas A and B work in an extension state mode (a shortening state mode), the areas C and D work in a shortening state mode (an extension state mode), and finally linear motion along the direction perpendicular to the optical axis (Y axis) is formed, and the deformation schematic diagram is shown in fig. 17;
rotating the tumbling motion ROLL about the X-axis: in the length expansion or thickness shearing mode of the piezoelectric element 1, the polarization direction of the piezoelectric element 1 is thickness or radial, and when an excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: the areas A and B are one end (V On A 、V Under A 、V On B 、V Under B ) Region C and region D are one end (V On C 、V Under C 、V On D 、V Under D ) Which applies the same-frequency reverse voltage, and the rest region E applies 0 voltage or a fixed value of DC voltage (V On E 、V Under E ) Zone F applies a voltage of 0 (V F is on 、V Under F ) The voltage waveform is shown in FIG. 18, and is shown by d 31 Or d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element 1 in the length expansion or thickness shearing mode of the independent electrode part at the edge, and the displacement change of the region A and the region B, the region C and the region D is opposite, namely, the region A and the region B arch upwards (downwards concave), the region C and the region D arch downwards (upwards concave), and finally, the rotary rolling motion ROLL along the X axis is formed, and the deformation schematic diagram is shown in fig. 18;
rotational PITCH motion PITCH about the Y axis: in the length expansion or thickness shearing mode of the piezoelectric element 1, the polarization direction of the piezoelectric element 1 is thickness or radial, and when an excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: region A, D is one end (V On A 、V Under A 、V On D 、V Under D ) Region B, C is one end (V On B 、V Under B 、V On C 、V Under C ) Application thereofApplying common-frequency reverse voltage, and applying 0 voltage or DC voltage (V) On E 、V Under E ) Zone F applies a voltage of 0 (V F is on 、V Under F ) The voltage waveform is shown in FIG. 19, and is represented by d 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element 1 in the length expansion or thickness shearing mode of the independent electrode part at the edge, and the displacement changes of the area A and the area D, the area B and the area C are opposite, namely the area A and the area D arch upwards (downwards concave), the area B and the area C are downwards concave (upwards arched), and finally the rotation pitching motion PITCH along the Y axis is formed, and the deformation schematic diagram is shown in figure 19;
YAW motion YAW is rotated about the Z-axis: in the length expansion or thickness shearing mode of the piezoelectric element 1, the polarization direction of the piezoelectric element 1 is thickness or radial, and when an excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: each of the regions A, B, C and D is one end (V On A 、V Under A 、V On B 、V Under B 、V On C 、V Under C 、V On D 、V Under D ) Which applies voltages differing by 1/4 period, the remaining region E applying 0 voltage or a fixed value of DC voltage (V On E 、V Under E ) Zone F applies a voltage of 0 (V F is on 、V Under F ) The voltage waveform is shown in FIG. 20, and is shown by d 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element 1 in a length expansion mode or a thickness shearing mode, the areas A, B, C and D are arched (sunken) in sequence, and finally the rotary YAW motion YAW along the Z axis is formed, and the deformation schematic diagram is shown in figure 20;
composite motion mode: in the length expansion or thickness shearing mode of the piezoelectric element 1, the polarization direction of the piezoelectric element 1 is thickness or radial, and the voltage is applied: region A, region B, region C, region D apply voltages consistent with (V) applied by linear motion alone, rotational motion alone (PITCH, YAW, and ROLL motion) On A 、V Under A 、V On B 、V Under B 、V On C 、V Under C 、V On D 、V Under D ) Zone E applies a straightCurrent voltage (V) On E 、V Under E ) Zone F still applies a ground voltage (V F is on 、V Under F ) The voltage waveform is shown in fig. 21, 22, 23, 24 and 25, and d is used as follows 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element 1 in a length expansion mode or a thickness shearing mode, excites arching (sinking) of different areas, and finally forms the coupling of the automatic zooming AF and the pivoting (pitching motion PITCH, YAW and rolling motion ROLL), and the deformation schematic diagrams are shown in fig. 21, 22, 23, 24 and 25.
Full coupled motion mode for six basic motion states (compound motion mode 31 in table 1): the piezoelectric element 1 has a thickness or radial polarization direction, and the electrode structure of the upper and lower surfaces of the piezoelectric material is shown in FIG. 26, wherein the side independent electrodes are 5 rings (one surface is divided into 21 independent electrode areas), and an electric field is applied according to the driving modes of the six basic motion states, and d is applied 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element 1 in a length expansion mode or a thickness shearing mode, excites deformation (elongation, shortening, arching and sinking modes) of different areas, and finally forms a full-coupling motion mode in six basic motion states, and a deformation schematic diagram of the full-coupling motion mode is shown in fig. 26.
Fig. 27 is a schematic structural diagram of a six-axis motion double-layer piezoelectric adaptive zoom lens forming a zoom and image stabilization integration, namely, two independent piezoelectric adaptive zoom lens units are bonded by an adhesive to form a back-to-back structure, so that the six-axis motion and larger zoom range of the zoom and image stabilization integration can be realized.
The six-axis basic movement comprises an AF function-oriented focus point moving linearly along an optical axis (Z axis); the OIS function is oriented, the focal spot moves linearly along the X-axis or Y-axis perpendicular to the optical axis, the focal spot rotates the ROLL motion ROLL around the X-axis, the focal spot rotates the PITCH motion PITCH around the Y-axis, the focal spot rotates the YAW motion YAW around the imaging optical axis, and 57 composite motion modes of AF, linear and rotational motion are coupled, and the specific motion mode details are shown in table 1.
TABLE 1 details of 57 composite motion modes for six-axis basic motion and coupled state thereof
On the other hand, the invention can also provide a self-adaptive optical imaging system, wherein the lens component of the self-adaptive zoom lens is provided with the six-axis image stabilizing piezoelectric self-adaptive zoom lens, and the lens component of the electronic photographing equipment realizes an automatic AF function and/or an OIS function based on a single motion mode, two motion modes or a compound motion mode of the six-axis image stabilizing piezoelectric self-adaptive zoom lens, and the power supply of the six-axis image stabilizing piezoelectric self-adaptive zoom lens is from the self-adaptive optical imaging system.
The adaptive optical imaging system may be a microscopic imaging device, a laser measurement device, a spatial light modulator, a video camera, a professional camera, a cell phone camera, a motion camera.
Finally, it should be noted that the examples are disclosed for the purpose of aiding in the further understanding of the present invention, but those skilled in the art will appreciate that: various alternatives and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the disclosed embodiments, but rather the scope of the invention is defined by the appended claims.
Claims (10)
1. The six-axis image stabilizing piezoelectric self-adaptive zoom lens is characterized by comprising a piezoelectric element (1), a transparent medium (2), a frame body (3) and a base (4); the piezoelectric element (1) is a transparent body, and a first electrode and a second electrode are respectively arranged on two surfaces of the piezoelectric element (1) perpendicular to the optical axis; the first electrode and the second electrode are transparent electrodes, and the first electrode or the second electrode is divided into a plurality of independent working areas, namely a center electrode and an edge independent electrode; the piezoelectric element (1), the transparent medium (2) and the base (4) are sequentially arranged along the optical axis, and the piezoelectric material (1) and the base (4) are fixed on the frame body (3).
2. Six-axis image stabilization piezoelectric adaptive zoom lens according to claim 1, characterized in that the piezoelectric element (1) is polarized in the thickness direction or radial direction.
3. A six axis image stabilizing piezoelectric adaptive zoom lens according to claim 1, wherein the side independent electrode is a plurality of equally divided or a plurality of annularly nested structures symmetrical about the center electrode about 1 part of the center electrode.
4. The six-axis image stabilization piezoelectric adaptive zoom lens according to claim 1, wherein the frame body is made of PDMS gel, clearFlex50 glue, silicone rubber PDMS, or a flexible solid material capable of being 3D printed; the transparent medium (2) adopts a transparent medium with the refractive index larger than 1.4; the base is made of transparent rigid solid materials; the first electrode and the second electrode adopt ITO electrodes and AZO electrodes, and the first electrode and the second electrode adopt magnetron sputtering or evaporation transparent electrodes; the piezoelectric element (1) and the frame body (3) and the base (4) are bonded by an adhesive, and are packaged by ultraviolet curing glue or epoxy resin materials.
5. Six-axis image stabilization piezoelectric adaptive zoom lens according to claim 1, characterized in that the cross section of the piezoelectric element (1) is circular or square; the piezoelectric element (1) is a piezoelectric sheet, a piezoelectric film, a piezoelectric block or a piezoelectric stack structure; when the piezoelectric element (1) is in a piezoelectric stack structure, a plurality of piezoelectric sheets are stacked, and a plurality of piezoelectric single crystal sheets are overlapped and arranged along the thickness direction; the piezoelectric pile structure is directly prepared by adopting a cofiring and film coating method or prepared by bonding independent piezoelectric sheets through transparent epoxy resin.
6. The six-axis image stabilization piezoelectric adaptive zoom lens according to claim 1, wherein when the piezoelectric unit (1) employs a plurality of piezoelectric sheets, the plurality of piezoelectric sheets are electrically connected in parallel and in series.
7. The method for manufacturing the six-axis image stabilizing piezoelectric adaptive zoom lens according to any one of claims 1 to 6, comprising the steps of:
cutting the transparent piezoelectric material block into piezoelectric sheets with the same size;
respectively carrying out surface grinding and polishing treatment on the upper surface and the lower surface of the cut piezoelectric sheet, wherein the surface flatness is within 0.01 mm;
the transparent electrode is sputtered or evaporated by magnetron according to the designed internal electrode pattern;
polarizing the piezoelectric sheet with the electrode according to the requirement, and cleaning;
bonding the polarized and cleaned piezoelectric sheets together through ultraviolet curing glue or epoxy resin, applying set pressure to discharge redundant epoxy resin, obtaining a glue layer with micron-sized and uniform thickness, and curing the glue layer to obtain an integrated piezoelectric stack; wherein a plurality of piezoelectric sheets are overlapped along the thickness direction, internal electrodes between adjacent piezoelectric sheets are distributed uniformly, the internal electrodes are arranged in an interdigital electrode structure, and the internal electrodes are led out by using side electrodes.
8. An adaptive optics imaging system, wherein the six-axis image stabilizing piezoelectric adaptive zoom lens of any one of claims 1-6 is disposed in a lens assembly.
9. The working method of the six-axis image stabilizing piezoelectric adaptive zoom lens according to any one of claims 1 to 6, wherein the piezoelectric element (1) realizes the movement of zooming and image stabilizing based on a length expansion mode or a thickness shearing mode, specifically comprising: the focus facing the AF function moves linearly along the optical axis; the OIS function-oriented focal spot moves linearly along an X-axis or Y-axis perpendicular to the optical axis, the focal spot rotates the ROLL motion ROLL about the X-axis, the focal spot rotates the PITCH motion PITCH about the Y-axis, the focal spot rotates the YAW motion YAW about the imaging optical axis, and a composite motion modality of coupled AF, linear and rotational motion.
10. According to claimThe working method according to claim 9, wherein the polarization direction of the piezoelectric element (1) is the thickness direction or the radial direction in the length expansion or thickness shearing mode of the piezoelectric element (1), and when an excitation electric field is applied to the upper and lower surfaces of the piezoelectric element (1), the mode of applying the electric field is as follows: the independent electrode area applies an electric field consistent with the mode of applying an electric field by single linear or axial rotation, the central electrode area applies a 0 electric field or a direct current electric field with a fixed value, the other surface is not divided and always applies the 0 electric field, and d is passed through 31 And d 15 The piezoelectric working mode successfully excites the vibration of the piezoelectric element (1) in the length expansion and thickness shearing modes, excites at least one of deformation elongation, shortening, arching and recessing of different areas, and finally forms a composite motion mode of automatic zooming, linear or axial rotation of a focus along the linear motion of an optical axis.
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