CN116512406A - Equipment and method for preparing silicon nitride ceramic insulating plate by tape casting method - Google Patents
Equipment and method for preparing silicon nitride ceramic insulating plate by tape casting method Download PDFInfo
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- CN116512406A CN116512406A CN202310512316.8A CN202310512316A CN116512406A CN 116512406 A CN116512406 A CN 116512406A CN 202310512316 A CN202310512316 A CN 202310512316A CN 116512406 A CN116512406 A CN 116512406A
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- green body
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- 238000000034 method Methods 0.000 title claims abstract description 32
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 30
- 239000000919 ceramic Substances 0.000 title claims abstract description 30
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 238000010345 tape casting Methods 0.000 title abstract description 15
- 238000003860 storage Methods 0.000 claims abstract description 50
- 238000001035 drying Methods 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000003921 oil Substances 0.000 claims description 39
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 34
- 238000010438 heat treatment Methods 0.000 claims description 20
- 238000005266 casting Methods 0.000 claims description 17
- 229910052742 iron Inorganic materials 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 15
- 239000002904 solvent Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 13
- 239000002002 slurry Substances 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 12
- 239000002270 dispersing agent Substances 0.000 claims description 10
- 239000004014 plasticizer Substances 0.000 claims description 10
- 238000005245 sintering Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 239000011863 silicon-based powder Substances 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 230000000903 blocking effect Effects 0.000 claims description 8
- 238000000498 ball milling Methods 0.000 claims description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 6
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical group CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000000462 isostatic pressing Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000002202 Polyethylene glycol Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000005238 degreasing Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 3
- 229920001223 polyethylene glycol Polymers 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
- B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
- B28B3/02—Producing shaped articles from the material by using presses; Presses specially adapted therefor wherein a ram exerts pressure on the material in a moulding space; Ram heads of special form
- B28B3/025—Hot pressing, e.g. of ceramic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention provides equipment and a method for preparing a silicon nitride ceramic insulating plate by a tape casting method. The equipment for preparing the silicon nitride ceramic insulating plate by the tape casting method comprises an oven; a drying mechanism; the fixing mechanism is used for rotationally connecting the plurality of fixing shafts at equal intervals in the support rod, and the side walls of the fixing shafts are symmetrically and fixedly connected with the plurality of rubber rods and the baffle rods which are distributed in a V shape respectively; a substrate; a driving mechanism; a storage mechanism; a pressurizing mechanism; the rubber pad and the fixed sleeve are connected in a sliding manner in the cylinder; the side wall of the fixed sleeve is fixedly connected with the hydraulic rod and the elastic rubber pad respectively; the side wall of the fixed sleeve is provided with the limiting rods which are distributed in an annular mode, and the limiting rods are abutted against the side wall of the rubber pad; a one-way valve; the equipment and the method for preparing the silicon nitride ceramic insulating plate by the tape casting method have the advantages of quick drying, increasing the density of the green body and enabling the surface of the green body to be smooth.
Description
Technical Field
The invention relates to the technical field of production of silicon nitride ceramic insulating plates, in particular to equipment and a method for preparing a silicon nitride ceramic insulating plate by a tape casting method.
Background
The casting forming process is one special forming process of ceramic substrate, and includes the first mixing crushed powder with organic plasticizer solution in certain proportion to form slurry with certain viscosity, the subsequent flowing down from the container, scraping and coating with scraper to form green belt film, drying, curing and other steps.
In the casting silicon nitride blank piece drying process, solvent migrates from the bottom surface of the blank piece to the surface of the blank piece, and then volatilizes on the surface, so that the drying of the blank piece is a unique unidirectional drying process, air holes are generated on the surface of the blank piece, and the binder and the plasticizer are difficult to fill the holes left by the volatilized solvent before drying, so that the blank piece is loose and of an uneven structure, the quality of a green body is reduced, the blank piece drying process is required to be slowly performed in order to ensure the quality of the green body, and the production efficiency is reduced.
Therefore, there is a need to provide a new apparatus and method for preparing a silicon nitride ceramic insulating plate by casting and molding, which solve the above technical problems.
Disclosure of Invention
The invention solves the technical problem of providing equipment and a method for preparing a silicon nitride ceramic insulating plate by a tape casting method, wherein the equipment and the method are used for rapidly drying, increasing the density of a green body and enabling the surface of the green body to be smooth.
In order to solve the technical problems, the equipment for preparing the silicon nitride ceramic insulating plate by using the tape casting method provided by the invention comprises the following steps: an oven; the drying mechanism is connected with the oven; the fixing mechanism comprises a supporting rod, a fixing shaft, a rubber rod, rubber blocks, an iron plate, an electromagnet and a baffle rod, wherein a plurality of supporting rods are symmetrically arranged in the oven, and a plurality of hemispherical rubber blocks are arranged on the surface of each supporting rod; the inside of the supporting rod is rotationally connected with a plurality of fixed shafts at equal intervals, the side walls of the fixed shafts are symmetrically and fixedly connected with a plurality of rubber rods and baffle rods which are distributed in a V shape respectively, and the side walls of the baffle rods are provided with electromagnets; the base plate is abutted against the rubber block and the baffle rod; the driving mechanism is arranged on the side wall of the oven and is connected with the fixed shaft; the storage mechanism is fixed on the side walls of the oven and the drying mechanism; the pressurizing mechanism comprises a hydraulic rod, a cylinder body, a first connecting pipe, a rubber pad, a fixed sleeve, a limiting rod and a second connecting pipe, wherein the cylinder body is arranged in the drying mechanism, two ends of the cylinder body are respectively and fixedly connected with the first connecting pipe and the second connecting pipe, and the second connecting pipe is communicated with the inside of the storage mechanism; the side wall of the drying mechanism is provided with the hydraulic rod, and the inside of the cylinder body is connected with the rubber pad and the fixed sleeve in a sliding manner; the side wall of the fixed sleeve is fixedly connected with the hydraulic rod and the elastic rubber pad respectively; the side wall of the fixed sleeve is provided with the limiting rods which are distributed in an annular mode, and the limiting rods are abutted against the side wall of the rubber pad; and the check valve is arranged in the second connecting pipe.
Preferably, the drying mechanism comprises a circulating pipe, an oil pump, a heating coil and an oil tank, wherein the bottom end of the oven is fixedly connected with the oil tank, and the spiral heating coil is arranged in the oil tank; the bottom end of the oven is provided with the oil pump, two ends of the circulating pipe are respectively connected with the oil pump and the oil tank, and the circulating pipe is spirally distributed in the oven.
Preferably, the storage mechanism comprises a partition board, a communicating pipe and an electromagnetic valve, wherein the partition board is installed at the bottom end of the oven, the side wall of the oven is provided with the arc-shaped communicating pipe, the electromagnetic valve is installed at the top end of the communicating pipe, and the lowest end of the communicating pipe is located between the partition board and the oil tank.
Preferably, the side wall of the oven is rotationally connected with the oven door, a sealing gasket is arranged on the side wall of the oven door, and the sealing gasket is clamped with the side wall of the oven.
Preferably, the driving mechanism comprises a stepping motor, a rotating shaft, a first gear, a second gear, a chain wheel, a sealing sleeve, a box body and a chain, wherein the box body is arranged on the side wall of the oven, the stepping motor is arranged on the top surface of the box body, and the stepping motor is connected with the rotating shaft; a plurality of first gears are equidistantly arranged on the side wall of the rotating shaft, and the first gears are meshed with the second gears; one end of the fixed shaft is fixedly connected with the chain wheel, the adjacent chain wheels are sleeved with the chains, and the side wall of one of the chain wheels in each row is fixedly connected with the second gear; the side wall of the oven is provided with a plurality of sealing sleeves, and the inside of each sealing sleeve is rotationally connected with the corresponding fixed shaft.
Preferably, the first gear and the second gear are perpendicular to each other, and the diameter of the second gear is smaller than that of the first gear.
Preferably, a blank is paved on the surface of the base plate, and the blank is abutted against the side wall of the rubber rod; the iron plate is arranged on the bottom surface of the substrate, and is adsorbed on the side wall of the electromagnet.
Preferably, the one-way valve comprises a valve core, a clamping plug, a spring and a fixed net, wherein the valve core and the fixed net are symmetrically arranged in the second connecting pipe, two ends of the spring are respectively and fixedly connected with the fixed net and the clamping plug, and the clamping plug is clamped with the valve core in a funnel shape.
Preferably, a method for preparing a silicon nitride ceramic insulating plate by a tape casting method comprises the following steps:
step one: weighing silicon powder, a sintering aid (the sintering aid is MgO), a dispersing agent (the dispersing agent is triethyl phosphate) and an absolute ethyl alcohol-butanone azeotrope according to the proportion, wherein the weight ratio of the silicon powder to the sintering aid (the sintering aid is MgO), the dispersing agent (the dispersing agent is triethyl phosphate) to the absolute ethyl alcohol-butanone azeotrope is 100:12:2:125; putting the weighed materials into a ball mill for ball milling for 24 hours; then adding an adhesive (the adhesive is polyvinyl butyral) and a plasticizer (the plasticizer is polyethylene glycol) into the ball-milled material, wherein the weight ratio of the silicon powder to the adhesive to the plasticizer is as follows: 8:1:1, and then ball milling the materials again for 24 hours by using a ball mill to obtain slurry; placing the slurry into a vacuum deaeration machine for deaeration, and deaerating the slurry for 2 hours under the condition that the vacuum degree is 0.1 Pa;
step two: casting the defoamed slurry on the surface of the substrate by using a casting machine to form a green body, placing a plurality of substrates on the surface of the supporting rod, closing the box door, and externally connecting the oven with a power supply; the drying mechanism is opened, the temperature in the oven is continuously increased by the operation of the drying mechanism, the temperature in the oven is kept at 30 ℃, the green body is dried in the oven for 2 hours, the green body is dried in a low-temperature environment, the slow volatilization of the solvent is ensured, and the diffusion speed of the solvent in the green body is consistent with the volatilization speed of the surface; after preliminary drying, the hardness of the green body is increased to form a green body, the surface of the green body is hardened, the driving mechanism is opened, the driving mechanism drives the fixed shaft to continuously and rapidly rotate back and forth for 3 minutes, the rotation angle of the fixed shaft is not more than 10 degrees, when the fixed shaft rotates anticlockwise, the fixed shaft drives the baffle rod to rotate upwards to push the substrate and the green body to slightly move upwards, when the fixed shaft rotates clockwise, the baffle rod rotates downwards to enable the substrate to move downwards to be in contact with the hemispherical rubber block, and the baffle rod rotates back and forth to push the substrate and the green body to continuously vibrate on the surface of the rubber block, so that the substrate and the green body are gradually separated; the driving mechanism and the electromagnet are turned on, the electromagnet is electrified to generate magnetic force, the driving mechanism drives the fixed shaft to rotate anticlockwise by 90-120 degrees, the fixed shaft pushes the baffle rod to rotate upwards, the electromagnet on the side wall of the baffle rod is in contact with the iron plate on the bottom surface of the substrate, and the electromagnet adsorbs the iron plate, so that the substrate is fixed on the side wall of the baffle rod; the blank body is gradually close to the side wall attached to the rubber rod along with the rotation of the base plate and the blank body pushed by the baffle rod, and the blank body is separated from the base plate; the rubber rod has good elasticity, and the blank body is protected when the blank body is reversed to the rubber rod, so that the blank body is prevented from being damaged;
step three: opening the hydraulic rod, the hydraulic rod drives the rubber pad to continuously move back and forth in the cylinder, when the rubber pad moves towards the second connecting pipe, air in the cylinder extrudes the rubber pad, so that the rubber pad with elasticity is propped against the side walls of the cylinder and the limiting rod, the limiting rod blocks the rubber pad to prop against the inner side wall of the cylinder to move, the rubber pad is made to tightly press the air in the cylinder into the storage mechanism, the one-way valve in the second connecting pipe is opened, when the rubber pad moves towards the first connecting pipe, the one-way valve in the second connecting pipe is closed, air in the cylinder extrudes the rubber pad, the rubber pad is contracted, external air enters the cylinder through the first connecting pipe, and the pressure in the storage mechanism is gradually increased along with the back and forth movement of the rubber pad; when the pressure in the storage mechanism reaches 50MPa, the storage mechanism is opened, so that the storage mechanism is communicated with the interior of the oven, the pressure in the oven is rapidly increased, at the moment, gas in the oven extrudes the green body, the gas applies uniform isostatic pressure to the green body in all directions, so that the green body is subjected to temperature isostatic pressure, the two sides of the green body are dried, the solvent in the green body is accelerated to evaporate, the density of the green body is increased, and meanwhile, the heating mechanism operates to enable the internal temperature of the oven to reach 35 ℃; each time the green body is dried in the oven for fifteen minutes, the pressurizing mechanism is operated to increase the pressure in the storage mechanism by 50MPa, then the storage mechanism is opened to increase the pressure in the oven, and meanwhile, the drying mechanism is operated to increase the internal temperature of the oven by 5 ℃; along with the gradual increase of the pressure and the temperature in the oven, the pressure of the temperature isostatic pressure applied to the green body is gradually increased, and the temperature is increased, so that the uniform evaporation efficiency of the solvent in the green body is quickened; meanwhile, the density of the blank body after being subjected to temperature isostatic pressing is improved, the surface is smooth, the thickness is uniform, and the warping caused by unidirectional drying of the blank body is eliminated; when the temperature in the oven reaches 50 ℃, the green body is dried, and the oven can be opened to take out the dried green body;
step four: cutting the dried green body according to the required requirement, and placing the dried green body into a vacuum degreasing furnace for vacuum glue discharging for 4 hours to obtain a degreased green body; and (3) placing the degreased green body into a graphite crucible, heating to 1930 ℃ at a heating rate of 20 ℃ per minute under nitrogen atmosphere, preserving heat for 5 hours, and performing furnace cooling to obtain the silicon nitride ceramic insulating plate.
Compared with the related art, the equipment and the method for preparing the silicon nitride ceramic insulating plate by using the tape casting method have the following beneficial effects:
the invention provides a device and a method for preparing a silicon nitride ceramic insulating plate by a tape casting method, when a tape casting green body is dried in a baking oven for 2 hours, the surface of the green body is hardened, a driving mechanism is started, the driving mechanism drives a fixed shaft to continuously and rapidly rotate back and forth, the fixed shaft drives a baffle rod to rotate back and forth, and the substrate and the green body are pushed to continuously vibrate on the surface of a rubber block, so that the substrate and the green body are gradually separated; the driving mechanism and the electromagnet are opened, the electromagnet is electrified to generate magnetic force, the driving mechanism drives the fixed shaft to push the baffle rod to rotate upwards anticlockwise, the electromagnet on the side wall of the baffle rod is in contact with the iron plate on the bottom surface of the substrate, and the electromagnet adsorbs the iron plate, so that the substrate is fixed on the side wall of the baffle rod; the blank body is gradually close to the side wall attached to the rubber rod along with the rotation of the base plate and the blank body pushed by the baffle rod, and the blank body is separated from the base plate; opening the hydraulic rod, wherein the hydraulic rod operates to drive the rubber pad to continuously move back and forth in the cylinder body, so that the rubber pad extrudes air in the cylinder body into the storage mechanism, and the pressure in the storage mechanism is gradually increased; when the pressure in the storage mechanism reaches 50MPa, the storage mechanism is opened, so that the storage mechanism is communicated with the interior of the oven, the pressure in the oven is rapidly increased, at the moment, gas in the oven extrudes the green body, the gas applies uniform isostatic pressure to the green body in all directions, so that the green body is subjected to temperature isostatic pressure, the two sides of the green body are dried, the solvent in the green body is accelerated to evaporate, the density of the green body is increased, and meanwhile, the heating mechanism operates to enable the internal temperature of the oven to reach 35 ℃; each time the green body is dried in the oven for fifteen minutes, the pressurizing mechanism is operated to increase the pressure in the storage mechanism by 50MPa, then the storage mechanism is opened to increase the pressure in the oven, and meanwhile, the drying mechanism is operated to increase the internal temperature of the oven by 5 ℃; along with the gradual increase of the pressure and the temperature in the oven, the pressure of the temperature isostatic pressure applied to the green body is gradually increased, and the temperature is increased, so that the uniform evaporation efficiency of the solvent in the green body is quickened; meanwhile, the density of the blank body after being subjected to temperature isostatic pressing is improved, the surface is smooth, the thickness is uniform, and the warping caused by unidirectional drying of the blank body is eliminated; and when the temperature in the oven reaches 50 ℃, the green body is dried, and the oven can be opened to take out the dried green body.
Drawings
FIG. 1 is a schematic diagram of a device and method for preparing a silicon nitride ceramic insulating plate by casting;
FIG. 2 is a view showing the internal structure of the oven shown in FIG. 1;
FIG. 3 is an enlarged schematic view of the structure at A shown in FIG. 1;
FIG. 4 is a view showing the internal structure of the cylinder shown in FIG. 3;
FIG. 5 is an enlarged schematic view of the structure at B shown in FIG. 1;
FIG. 6 is an enlarged schematic view of the structure at C shown in FIG. 2;
fig. 7 is a view showing the internal structure of the case shown in fig. 6;
fig. 8 is a schematic structural view of the fixing mechanism shown in fig. 1.
Reference numerals in the drawings: 1. oven, 11, gasket, 12, oven door, 2, driving mechanism, 21, stepping motor, 22, rotating shaft, 23, first gear, 24, second gear, 25, sprocket, 26, sealing sleeve, 27, case, 28, chain, 3, fixing mechanism, 31, support rod, 32, fixing shaft, 33, rubber rod, 34, rubber block, 35, iron plate, 36, electromagnet, 37, stopper, 4, storage mechanism, 41, partition, 42, communicating pipe, 43, solenoid valve, 5, drying mechanism, 51, circulating pipe, 52, oil pump, 53, heating coil, 54, oil tank, 6, pressurizing mechanism, 61, hydraulic rod, 62, cylinder, 63, first connecting pipe, 64, rubber pad, 65, fixing sleeve, 66, stopper, 67, second connecting pipe, 7, check valve, 71, valve core, 72, stopper, 73, spring, 74, fixing net, 8, base plate, 81, blank body.
Description of the embodiments
The invention will be further described with reference to the drawings and embodiments.
Referring to fig. 1 to 8, fig. 1 is a schematic structural diagram of an apparatus and a method for preparing a silicon nitride ceramic insulating plate by a tape casting method according to the present invention; FIG. 2 is a view showing the internal structure of the oven shown in FIG. 1; FIG. 3 is an enlarged schematic view of the structure at A shown in FIG. 1; FIG. 4 is a view showing the internal structure of the cylinder shown in FIG. 3; FIG. 5 is an enlarged schematic view of the structure at B shown in FIG. 1; FIG. 6 is an enlarged schematic view of the structure at C shown in FIG. 2; fig. 7 is a view showing the internal structure of the case shown in fig. 6; fig. 8 is a schematic structural view of the fixing mechanism shown in fig. 1. The equipment for preparing the silicon nitride ceramic insulating plate by the tape casting method comprises the following steps: an oven 1; the drying mechanism 5 is connected with the oven 1; the fixing mechanism 3 comprises a supporting rod 31, a fixing shaft 32, a rubber rod 33, a rubber block 34, an iron plate 35, an electromagnet 36 and a baffle rod 37, wherein a plurality of supporting rods 31 are symmetrically arranged in the oven 1, and a plurality of hemispherical rubber blocks 34 are arranged on the surface of the supporting rods 31; the inside of the supporting rod 31 is rotationally connected with a plurality of fixed shafts 32 at equal intervals, the side walls of the fixed shafts 32 are symmetrically and fixedly connected with a plurality of rubber rods 33 and baffle rods 37 which are distributed in a V shape respectively, and the side walls of the baffle rods 37 are provided with electromagnets 36; a base plate 8, wherein the base plate 8 abuts against the rubber block 34 and the stop lever 37; a driving mechanism 2, wherein the driving mechanism 2 is installed on the side wall of the oven 1, and the driving mechanism 2 is connected with the fixed shaft 32; a storage mechanism 4, wherein the storage mechanism 4 is fixed on the side walls of the oven 1 and the drying mechanism 5; the pressurizing mechanism 6, the pressurizing mechanism 6 comprises a hydraulic rod 61, a cylinder 62, a first connecting pipe 63, a rubber pad 64, a fixed sleeve 65, a limiting rod 66 and a second connecting pipe 67, the cylinder 62 is arranged in the drying mechanism 5, two ends of the cylinder 62 are respectively and fixedly connected with the first connecting pipe 63 and the second connecting pipe 67, and the second connecting pipe 67 is communicated with the inside of the storage mechanism 4; the side wall of the drying mechanism 5 is provided with the hydraulic rod 61, and the inside of the cylinder 62 is connected with the rubber pad 64 and the fixed sleeve 65 in a sliding manner; the side walls of the fixed sleeve 65 are fixedly connected with the hydraulic rod 61 and the elastic rubber pad 64 respectively; the side wall of the fixed sleeve 65 is provided with the limiting rods 66 which are distributed in an annular shape, and the limiting rods 66 are abutted against the side wall of the rubber pad 64; a check valve 7, wherein the check valve 7 is installed inside the second connection pipe 67.
Preferably, the drying mechanism 5 comprises a circulating pipe 51, an oil pump 52, a heating coil 53 and an oil tank 54, the bottom end of the oven 1 is fixedly connected with the oil tank 54, and the spiral heating coil 53 is installed in the oil tank 54; the bottom end of the oven 1 is provided with the oil pump 52, two ends of the circulating pipe 51 are respectively connected with the oil pump 52 and the oil tank 54, the circulating pipe 51 is spirally distributed in the oven 1, in order to facilitate the power-on operation of the heating coil 53, the heating coil 53 generates heat to gradually raise the oil temperature in the oil tank 54, and the oil pump 52 operates to circularly move the oil in the oil tank 54 through the circulating pipe 51, so that the temperatures in the oven 1 and the storage mechanism 4 are continuously raised.
The side wall of the oven 1 is rotationally connected with the oven door 12, the side wall of the oven door 12 is provided with the sealing gasket 11, the sealing gasket 11 is clamped with the side wall of the oven 1, and the sealing gasket 11 seals the interior of the oven 1 to prevent air leakage in the oven 1 in order to facilitate closing of the oven door 12.
The driving mechanism 2 comprises a stepping motor 21, a rotating shaft 22, a first gear 23, a second gear 24, a chain wheel 25, a sealing sleeve 26, a box 27 and a chain 28, wherein the box 27 is arranged on the side wall of the oven 1, the stepping motor 21 is arranged on the top surface of the box 27, and the stepping motor 21 is connected with the rotating shaft 22; a plurality of first gears 23 are equidistantly arranged on the side wall of the rotating shaft 22, and the first gears 23 are meshed with the second gears 24; one end of the fixed shaft 32 is fixedly connected with the chain wheel 25, the chain 28 is sleeved between the adjacent chain wheels 25, and the side wall of one chain wheel 25 in each row is fixedly connected with the second gear 24; a plurality of sealing sleeves 26 are arranged on the side wall of the oven 1, and the inner parts of the sealing sleeves 26 are rotationally connected with the fixed shafts 32; the first gear 23 and the second gear 24 are perpendicular to each other, so that when the stepper motor 21 operates to drive the rotating shaft 22 to rotate, the rotating shaft 22 drives the first gear 23 to rotate, and the first gear 23 drives the second gear 24, the sprocket 25 and the chain 28 to rotate, thereby driving all the fixed shafts 32 to rotate; the diameter of the second gear 24 is smaller than the diameter of the first gear 23, so that the rotation speed of the first gear 23 is smaller than the rotation speed of the second gear 24, thereby increasing the rotation speed of the fixed shaft 32.
Paving a blank body 81 on the surface of the base plate 8, wherein the blank body 81 is abutted against the side wall of the rubber rod 33; the iron plate 35 is mounted on the bottom surface of the base plate 8, and the iron plate 35 is attached to the side wall of the electromagnet 36, so that the base plate 8 is separated from the blank 81 for convenience in fixing the base plate 8 to the side wall of the stopper 37.
The check valve 7 comprises a valve core 71, a clamping plug 72, a spring 73 and a fixed net 74, wherein the valve core 71 and the fixed net 74 are symmetrically arranged in the second connecting pipe 67, two ends of the spring 73 are respectively and fixedly connected with the fixed net 74 and the clamping plug 72, and the clamping plug 72 is clamped with the valve core 71 which is internally funnel-shaped. The storage mechanism 4 comprises a partition board 41, a communicating pipe 42 and an electromagnetic valve 43, the partition board 41 is arranged at the bottom end of the oven 1, the communicating pipe 42 with an arc-shaped side wall is arranged at the side wall of the oven 1, the electromagnetic valve 43 is arranged at the top end of the communicating pipe 42, the lowest end of the communicating pipe 42 is positioned between the partition board 41 and the oil tank 54, in order to press the blocking plug 72 to move upwards to compress the spring 73 when gas in the cylinder 62 enters the second connecting pipe 67, the valve core 71 is opened, the gas in the cylinder 62 enters the lower part of the partition board 41, the pressure in the storage mechanism 4 is increased, and when the second connecting pipe 67 does not convey the gas, the spring 73 stretches to push the blocking plug 72 to move downwards to be blocked by the valve body 71, the valve body 71 is closed, and the pressure in the storage mechanism 4 is kept; when the pressure inside the storage mechanism 4 is proper, the electromagnetic valve 43 is opened, so that the gas inside the storage mechanism 4 enters the inside of the oven 1 through the communicating pipe 42, and the pressure inside the oven 1 is increased.
A method for preparing a silicon nitride ceramic insulating plate by a tape casting method comprises the following steps:
step one: weighing silicon powder, wherein the sintering aid is MgO, the dispersing agent is triethyl phosphate and absolute ethyl alcohol-butanone azeotrope according to the proportion, the silicon powder, the sintering aid is MgO, and the dispersing agent is triethyl phosphate and absolute ethyl alcohol-butanone azeotrope with the weight ratio of 100:12:2:125; putting the weighed materials into a ball mill for ball milling for 24 hours; then adding an adhesive binder which is polyvinyl butyral and a plasticizer which is polyethylene glycol into the ball-milled material, wherein the weight ratio of silicon powder, the adhesive and the plasticizer is as follows: 8:1:1, and then ball milling the materials again for 24 hours by using a ball mill to obtain slurry; placing the slurry into a vacuum deaeration machine for deaeration, and deaerating the slurry for 2 hours under the condition that the vacuum degree is 0.1 Pa;
step two: casting the defoamed slurry on the surface of the base plate 8 by using a casting machine to form a green body, placing a plurality of base plates 8 on the surface of the supporting rod 31 (shown in fig. 1 and 5), closing the box door 12, and externally connecting the oven 1 with a power supply; the heating coil 53 is powered on to operate, the heating coil 53 generates heat to gradually increase the oil temperature in the oil tank 54, the oil pump 52 operates to circularly move the oil in the oil tank 54 through the circulating pipe 51, so that the temperatures in the oven 1 and the storage mechanism 4 are continuously increased, the closing of the heating coil 53 and the oil speed in the circulating pipe 51 are controlled and controlled, the temperature in the oven 1 is kept at 30 ℃, the green compact is dried in the oven 1 for 2 hours, the green compact is dried in a low-temperature environment, slow volatilization of the solvent is ensured, and the diffusion speed of the solvent in the green compact is consistent with the volatilization speed of the surface; after preliminary drying, the hardness of the green body is increased to form a green body 81, the surface of the green body 81 is hardened, the stepping motor 21 operates to drive the rotating shaft 22 to rotate, the rotating shaft 22 drives the first gear 23 to rotate, and the first gear 23 drives the second gear 24, the sprocket 25 and the chain 28 to rotate, so that all the fixed shafts 32 are driven to rotate; the fixed shaft 32 continuously rotates back and forth for 3 minutes, the rotation angle of the fixed shaft 32 does not exceed 10 degrees, when the fixed shaft 32 rotates anticlockwise, the fixed shaft 32 drives the baffle rod 37 to rotate upwards to push the base plate 8 and the blank 81 to move upwards slightly, when the fixed shaft 32 rotates clockwise, the baffle rod 37 rotates downwards to enable the base plate 8 to move downwards to be in contact with the hemispherical rubber block 34, and as the baffle rod 37 rotates back and forth, the base plate 8 and the blank 81 are pushed to vibrate continuously on the surface of the rubber block 34, so that the base plate 8 and the blank 81 are gradually separated; the stepping motor 21 and the electromagnet 36 are turned on, the electromagnet 36 is electrified to generate magnetic force, the driving mechanism 2 drives the fixed shaft 32 to rotate anticlockwise by 90 degrees to 120 degrees, the fixed shaft 32 pushes the baffle rod 37 to rotate upwards, the electromagnet 36 on the side wall of the baffle rod 37 is contacted with the iron plate 35 on the bottom surface of the base plate 8, and the electromagnet 36 adsorbs the iron plate 35, so that the base plate 8 is fixed on the side wall of the baffle rod 37; as the gear lever 37 pushes the base plate 8 and the blank 81 to rotate, the blank 81 is gradually made to approach to the side wall attached to the rubber rod 33, and the blank 81 is separated from the base plate 8 (as shown in fig. 8); the rubber rod 33 has good elasticity, and the blank 81 is protected when the blank 81 is poured to the rubber rod 33, so that the blank 81 is prevented from being damaged;
step three: opening the hydraulic rod 61, the hydraulic rod 61 operates to drive the rubber pad 64 to continuously move back and forth in the cylinder 62, when the rubber pad 64 moves towards the second connecting pipe 67, air in the cylinder 62 presses the rubber pad 64, so that the rubber pad 64 with elasticity is propped against the side walls of the cylinder 62 and the limiting rod 66, the limiting rod 66 blocks the rubber pad 64 from being propped against the inner side wall of the cylinder 62 by too large an angle, so that the rubber pad 64 moves against the inner side wall of the cylinder 62, when the rubber pad 64 presses the air in the cylinder 62 into the second connecting pipe 67, the air presses the blocking plug 72 to move upwards to compress the spring 73, the valve core 71 is opened, the air in the cylinder 62 enters the lower part of the partition 41, the pressure in the storage mechanism 4 is increased, and when the rubber pad 64 moves towards the first connecting pipe 63, the blocking plug 72 is stretched to push the blocking plug 72 to move downwards to block the valve body 71, so that the valve body 71 is kept in the storage mechanism 4 to be closed; the air in the cylinder 62 presses the rubber pad 64 to shrink the rubber pad 64, external air enters the cylinder 62 through the first connecting pipe 63, the pressure in the storage mechanism 4 is gradually increased along with the back and forth movement of the rubber pad 64, when the pressure in the storage mechanism 4 is increased, a part of circulating pipe 51 is positioned in the storage mechanism 4, the cylinder 62 is positioned in the oil tank 54, the oil temperature heats the air in the storage mechanism 4, and the temperature in the oven 1 is almost the same as the temperature in the storage mechanism 4; when the pressure in the storage mechanism 4 reaches 50MPa, the electromagnetic valve 43 is opened, so that the gas in the storage mechanism 4 enters the oven 1 through the communicating pipe 42, the pressure in the oven 1 is rapidly increased, at the moment, the gas in the oven 1 extrudes the blank 81, the gas applies uniform isostatic pressures to the blank 81 in all directions, thereby carrying out warm isostatic pressures on the blank 81, drying the two sides of the blank 81, accelerating solvent evaporation in the blank 81, increasing the density of the blank 81, and simultaneously, the heat supply mechanism 5 operates to enable the internal temperature of the oven 1 to reach 35 ℃; every fifteen minutes of drying of the blank 81 in the oven 1, the pressurizing mechanism 6 is operated to increase the pressure in the storage mechanism 4 by 50MPa, then the storage mechanism 4 is opened to increase the pressure in the oven 1, and the drying mechanism 5 is operated to increase the internal temperature of the oven 1 by 5 ℃; along with the gradual increase of the pressure and the temperature in the oven 1, the pressure of the isostatic temperature pressure applied to the blank 81 is gradually increased, and the temperature is increased at the same time, so that the uniform evaporation efficiency of the solvent in the blank 81 is quickened; meanwhile, the density of the blank 81 after being subjected to temperature isostatic pressing is improved, the surface is smooth, the thickness is uniform, and the warping caused by unidirectional drying of the blank 81 is eliminated; when the temperature inside the oven 1 reaches 50 ℃, the blank 81 is dried, and the oven 1 can be opened to take out the dried blank 81;
step four: cutting the dried green body 81 according to the required requirement, and placing the green body into a vacuum degreasing furnace for vacuum glue discharging for 4 hours to obtain a degreased green body; and (3) placing the degreased green body into a graphite crucible, heating to 1930 ℃ at a heating rate of 20 ℃ per minute under nitrogen atmosphere, preserving heat for 5 hours, and performing furnace cooling to obtain the silicon nitride ceramic insulating plate.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present invention.
Claims (9)
1. An apparatus for producing a silicon nitride ceramic insulating plate by a casting method, comprising:
an oven (1);
the drying mechanism (5) is connected between the drying mechanism (5) and the oven (1);
the fixing mechanism (3), the fixing mechanism (3) comprises a supporting rod (31), a fixing shaft (32), a rubber rod (33), rubber blocks (34), an iron plate (35), an electromagnet (36) and a baffle rod (37), a plurality of supporting rods (31) are symmetrically arranged in the oven (1), and a plurality of hemispherical rubber blocks (34) are arranged on the surface of the supporting rod (31); the inside of the supporting rod (31) is rotationally connected with a plurality of fixed shafts (32) at equal intervals, the side walls of the fixed shafts (32) are symmetrically and fixedly connected with a plurality of rubber rods (33) and baffle rods (37) which are distributed in a V shape respectively, and the side walls of the baffle rods (37) are provided with electromagnets (36);
a base plate (8), wherein the base plate (8) is abutted against the rubber block (34) and the baffle rod (37);
the driving mechanism (2) is arranged on the side wall of the oven (1), and the driving mechanism (2) is connected with the fixed shaft (32);
the storage mechanism (4) is fixed on the side walls of the oven (1) and the drying mechanism (5);
the pressurizing mechanism (6), the pressurizing mechanism (6) comprises a hydraulic rod (61), a cylinder body (62), a first connecting pipe (63), a rubber pad (64), a fixed sleeve (65), a limiting rod (66) and a second connecting pipe (67), the cylinder body (62) is installed in the drying mechanism (5), two ends of the cylinder body (62) are respectively and fixedly connected with the first connecting pipe (63) and the second connecting pipe (67), and the second connecting pipe (67) is communicated with the inside of the storage mechanism (4); the side wall of the drying mechanism (5) is provided with the hydraulic rod (61), and the rubber pad (64) and the fixed sleeve (65) are connected inside the cylinder body (62) in a sliding manner; the side wall of the fixed sleeve (65) is fixedly connected with the hydraulic rod (61) and the elastic rubber pad (64) respectively; the side wall of the fixed sleeve (65) is provided with limiting rods (66) which are distributed in an annular mode, and the limiting rods (66) are abutted against the side wall of the rubber pad (64);
and a check valve (7), wherein the check valve (7) is arranged inside the second connecting pipe (67).
2. The apparatus for producing a silicon nitride ceramic insulating plate by casting and molding according to claim 1, wherein the drying mechanism (5) comprises a circulation pipe (51), an oil pump (52), a heating coil (53) and an oil tank (54), the bottom end of the oven (1) is fixedly connected with the oil tank (54), and the heating coil (53) of a spiral shape is installed inside the oil tank (54); the bottom end of the oven (1) is provided with the oil pump (52), two ends of the circulating pipe (51) are respectively connected with the oil pump (52) and the oil tank (54), and the circulating pipe (51) is spirally distributed in the oven (1).
3. The apparatus for producing a silicon nitride ceramic insulating plate by casting and molding according to claim 2, wherein the storage mechanism (4) comprises a partition plate (41), a communicating pipe (42) and an electromagnetic valve (43), the partition plate (41) is installed at the bottom end of the oven (1), the communicating pipe (42) having an arc-shaped side wall is installed at the side wall of the oven (1), the electromagnetic valve (43) is installed at the top end of the communicating pipe (42), and the lowest end of the communicating pipe (42) is located between the partition plate (41) and the oil tank (54).
4. A casting apparatus for producing a silicon nitride ceramic insulating plate according to claim 3, characterized in that the side wall of the oven (1) is rotatably connected to the oven door (12), a gasket (11) is mounted on the side wall of the oven door (12), and the gasket (11) is engaged with the side wall of the oven (1).
5. The apparatus for producing a silicon nitride ceramic insulating plate by casting and molding according to claim 4, wherein the driving mechanism (2) comprises a stepping motor (21), a rotating shaft (22), a first gear (23), a second gear (24), a sprocket (25), a sealing sleeve (26), a case (27) and a chain (28), the case (27) is installed on the side wall of the oven (1), the stepping motor (21) is installed on the top surface of the case (27), and the stepping motor (21) is connected with the rotating shaft (22); a plurality of first gears (23) are equidistantly arranged on the side wall of the rotating shaft (22), and the first gears (23) are meshed with the second gears (24); one end of the fixed shaft (32) is fixedly connected with the chain wheels (25), the adjacent chain wheels (25) are sleeved with the chains (28), and the side wall of one chain wheel (25) in each row is fixedly connected with the second gear (24); the side wall of the oven (1) is provided with a plurality of sealing sleeves (26), and the inside of each sealing sleeve (26) is rotationally connected with the corresponding fixed shaft (32).
6. The apparatus for producing a silicon nitride ceramic insulating plate according to claim 5, characterized in that the first gear (23) and the second gear (24) are perpendicular to each other, and the diameter of the second gear (24) is smaller than the diameter of the first gear (23).
7. The apparatus for producing a silicon nitride ceramic insulating plate by casting according to claim 1, characterized in that a green body (81) is laid on the surface of the base plate (8), the green body (81) abutting against the side wall of the rubber rod (33); the iron plate (35) is arranged on the bottom surface of the base plate (8), and the iron plate (35) is adsorbed on the side wall of the electromagnet (36).
8. The apparatus for producing a silicon nitride ceramic insulating plate by casting and molding according to claim 1, wherein the check valve (7) comprises a valve core (71), a blocking plug (72), a spring (73) and a fixed net (74), the valve core (71) and the fixed net (74) are symmetrically installed inside the second connecting pipe (67), two ends of the spring (73) are respectively and fixedly connected with the fixed net (74) and the blocking plug (72), and the blocking plug (72) is blocked with the valve core (71) with a funnel shape inside.
9. A method for producing a silicon nitride ceramic insulating plate according to any one of claims 1 to 8, characterized by comprising the steps of:
step one: weighing silicon powder, a sintering aid (the sintering aid is MgO), a dispersing agent (the dispersing agent is triethyl phosphate) and an absolute ethyl alcohol-butanone azeotrope according to the proportion, wherein the weight ratio of the silicon powder to the sintering aid (the sintering aid is MgO), the dispersing agent (the dispersing agent is triethyl phosphate) to the absolute ethyl alcohol-butanone azeotrope is 100:12:2:125; putting the weighed materials into a ball mill for ball milling for 24 hours; then adding an adhesive (the adhesive is polyvinyl butyral) and a plasticizer (the plasticizer is polyethylene glycol) into the ball-milled material, wherein the weight ratio of the silicon powder to the adhesive to the plasticizer is as follows: 8:1:1, and then ball milling the materials again for 24 hours by using a ball mill to obtain slurry; placing the slurry into a vacuum deaeration machine for deaeration, and deaerating the slurry for 2 hours under the condition that the vacuum degree is 0.1 Pa;
step two: casting the defoamed slurry on the surface of the substrate (8) by using a casting machine to form a green body, placing a plurality of substrates (8) on the surface of the supporting rod (31), closing the box door (12), and externally connecting the oven (1) with a power supply; opening the drying mechanism (5), wherein the drying mechanism (5) is operated to continuously increase the internal temperature of the oven (1), the internal temperature of the oven (1) is kept at 30 ℃, the green body is dried in the oven (1) for 2 hours, and the green body is dried in a low-temperature environment, so that the slow volatilization of the solvent is ensured, and the diffusion speed of the solvent in the green body is consistent with the volatilization speed of the surface; after preliminary drying, the hardness of the green body is increased to form a green body (81), the surface of the green body (81) is hardened, the driving mechanism (2) is opened, the driving mechanism (2) drives the fixed shaft (32) to continuously and rapidly rotate back and forth for 3 minutes, the rotation angle of the fixed shaft (32) is not more than 10 degrees, when the fixed shaft (32) rotates anticlockwise, the fixed shaft (32) drives the baffle rod (37) to rotate upwards to push the base plate (8) and the green body (81) to slightly move upwards, and when the fixed shaft (32) rotates clockwise, the baffle rod (37) rotates downwards to enable the base plate (8) to move downwards to be in contact with the hemispherical rubber block (34), and the baffle rod (37) rotates back and forth to push the base plate (8) and the green body (81) to continuously vibrate on the surface of the rubber block (34), so that the base plate (8) and the green body (81) are gradually separated; opening the driving mechanism (2) and the electromagnet (36), wherein the electromagnet (36) is electrified to generate magnetic force, the driving mechanism (2) drives the fixed shaft (32) to rotate anticlockwise by 90-120 degrees, the fixed shaft (32) pushes the baffle rod (37) to rotate upwards, the electromagnet (36) on the side wall of the baffle rod (37) is in contact with the iron plate (35) on the bottom surface of the base plate (8), and the electromagnet (36) adsorbs the iron plate (35), so that the base plate (8) is fixed on the side wall of the baffle rod (37); as the baffle rod (37) pushes the base plate (8) and the blank body (81) to rotate, the blank body (81) is gradually close to the side wall attached to the rubber rod (33) in a rotating way, and the blank body (81) is separated from the base plate (8); the rubber rod (33) has good elasticity, and the blank (81) is protected when the blank (81) is poured to the rubber rod (33) so as to prevent the blank (81) from being damaged;
step three: opening the hydraulic rod (61), the hydraulic rod (61) operates to drive the rubber pad (64) to continuously move back and forth in the cylinder (62), when the rubber pad (64) moves towards the second connecting pipe (67), air in the cylinder (62) presses the rubber pad (64), the elastic rubber pad (64) is propped against the side walls of the cylinder (62) and the limiting rod (66), the limiting rod (66) stops the rubber pad (64) from being propped at an excessive angle, the rubber pad (64) is made to move against the inner side wall of the cylinder (62), the rubber pad (64) presses air in the cylinder (62) into the storage mechanism (4), the one-way valve (7) in the second connecting pipe (67) is opened, when the rubber pad (64) moves towards the first connecting pipe (63), the one-way valve (7) in the second connecting pipe (67) is closed, the air in the cylinder (62) is tightly pressed against the inner side wall of the cylinder (62), and the air in the cylinder (64) is compressed by the rubber pad (64) to move back and forth along with the air in the cylinder (64), gradually increasing the pressure inside the storage mechanism (4); when the pressure in the storage mechanism (4) reaches 50MPa, the storage mechanism (4) is opened, so that the storage mechanism (4) is communicated with the interior of the oven (1), the pressure in the oven (1) is rapidly increased, at the moment, gas in the oven (1) extrudes the blank (81), the gas applies uniform isostatic pressures to the blank (81) in all directions, so that the blank (81) is subjected to temperature isostatic pressure, the blank (81) is dried on two sides, the solvent in the blank (81) is accelerated to evaporate, the density of the blank (81) is increased, and meanwhile, the heat supply mechanism (5) operates to enable the internal temperature of the oven (1) to reach 35 ℃. Each time the green body (81) is dried for fifteen minutes in the oven (1), the pressurizing mechanism (6) is operated to increase the pressure in the storage mechanism (4) by 50MPa, then the storage mechanism (4) is opened to increase the pressure in the oven (1), and meanwhile, the drying mechanism (5) is operated to increase the internal temperature of the oven (1) by 5 ℃; along with the gradual increase of the pressure and the temperature in the oven (1), the pressure of the temperature isostatic pressure applied to the blank (81) is gradually increased, and the temperature is increased at the same time, so that the uniform evaporation efficiency of the solvent in the blank (81) is quickened; meanwhile, the density of the blank (81) after being subjected to temperature isostatic pressing is improved, the surface is smooth, the thickness is uniform, and the warping caused by unidirectional drying of the blank (81) is eliminated; when the internal temperature of the oven (1) reaches 50 ℃, the blank (81) is dried, and the oven (1) can be opened to take out the dried blank (81);
step four: cutting the dried green body (81) according to the required requirement, and placing the green body into a vacuum degreasing furnace for vacuum glue discharging for 4 hours to obtain a degreased green body; and (3) placing the degreased green body into a graphite crucible, heating to 1930 ℃ at a heating rate of 20 ℃ per minute under nitrogen atmosphere, preserving heat for 5 hours, and performing furnace cooling to obtain the silicon nitride ceramic insulating plate.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008290401A (en) * | 2007-05-28 | 2008-12-04 | Miyazono Seisakusho:Kk | Roof tile manufacturing method |
| CN101985398A (en) * | 2009-07-29 | 2011-03-16 | 中国科学院福建物质结构研究所 | Method for preparing transparent polycrystalline Re:YAG ceramic |
| CN114986661A (en) * | 2022-04-07 | 2022-09-02 | 辽宁伊菲科技股份有限公司 | Preparation method and device of silicon nitride sonar thermal imaging insulating strip |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008290401A (en) * | 2007-05-28 | 2008-12-04 | Miyazono Seisakusho:Kk | Roof tile manufacturing method |
| CN101985398A (en) * | 2009-07-29 | 2011-03-16 | 中国科学院福建物质结构研究所 | Method for preparing transparent polycrystalline Re:YAG ceramic |
| CN114986661A (en) * | 2022-04-07 | 2022-09-02 | 辽宁伊菲科技股份有限公司 | Preparation method and device of silicon nitride sonar thermal imaging insulating strip |
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