CN116498581A - Reverse diffusion type multi-extraction-opening molecular pump - Google Patents
Reverse diffusion type multi-extraction-opening molecular pump Download PDFInfo
- Publication number
- CN116498581A CN116498581A CN202310451562.7A CN202310451562A CN116498581A CN 116498581 A CN116498581 A CN 116498581A CN 202310451562 A CN202310451562 A CN 202310451562A CN 116498581 A CN116498581 A CN 116498581A
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- China
- Prior art keywords
- carbon fiber
- fiber cylinder
- air inlet
- main shaft
- pump body
- Prior art date
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 37
- 230000002441 reversible effect Effects 0.000 title claims description 4
- 229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 73
- 239000004917 carbon fiber Substances 0.000 claims abstract description 73
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 73
- 238000000605 extraction Methods 0.000 claims description 10
- 238000005086 pumping Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/44—Fluid-guiding means, e.g. diffusers
- F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Details And Applications Of Rotary Liquid Pumps (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention provides a back diffusion type multi-extraction-opening molecular pump, which comprises: the pump body is internally provided with a rotor assembly and a stator assembly; the rotor assembly comprises a driving assembly, an inner carbon fiber cylinder and an outer carbon fiber cylinder, wherein the inner carbon fiber cylinder and the outer carbon fiber cylinder are arranged on the driving assembly at intervals, and the driving assembly drives through the stator assembly; the inner carbon fiber cylinder is positioned in the outer carbon fiber cylinder, an inner spiral piece and an outer spiral piece are arranged on the inner side wall of the pump body, the inner spiral piece is positioned in the inner carbon fiber cylinder, and the outer spiral piece is positioned between the inner carbon fiber cylinder and the outer carbon fiber cylinder. The invention optimally designs the rotor assembly, has light weight, high strength, high precision and small vibration.
Description
Technical Field
The invention relates to the technical field of vacuum obtaining equipment, in particular to a back diffusion type molecular pump with multiple extraction openings.
Background
The molecular pump is used as main flow vacuum obtaining equipment and is an important matching equipment of high-end analysis instruments such as leak detectors and the like. When the instrument is used, a plurality of chambers are required to reach corresponding vacuum states, the back diffusion capability is required (such as that the leak detector needs small molecular gas back diffusion into a main mass spectrum chamber), and meanwhile, in order to ensure analysis accuracy, the rotor operation stability and vacuum cleanliness are required to be higher. If the traditional molecular pump is adopted, a plurality of molecular pumps are required to be simultaneously arranged, the use cost is high, the back diffusion capability is not provided, the use requirement of an instrument is difficult to meet, the traditional rotor has poor dynamic characteristics, the mechanical bearing is volatilized, and the precision of the instrument is influenced.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a back diffusion type molecular pump with multiple extraction openings.
According to the present invention, there is provided a back-diffusion type multi-pumping port molecular pump comprising: the pump body is internally provided with a rotor assembly and a stator assembly;
the rotor assembly comprises a driving assembly, an inner carbon fiber cylinder and an outer carbon fiber cylinder, wherein the inner carbon fiber cylinder and the outer carbon fiber cylinder are arranged on the driving assembly at intervals, and the driving assembly drives through the stator assembly;
the inner carbon fiber cylinder is positioned in the outer carbon fiber cylinder, an inner spiral piece and an outer spiral piece are arranged on the inner side wall of the pump body, the inner spiral piece is positioned in the inner carbon fiber cylinder, and the outer spiral piece is positioned between the inner carbon fiber cylinder and the outer carbon fiber cylinder.
Preferably, the rotor assembly further comprises a plurality of moving blades, and a plurality of moving blades are arranged on the driving assembly at intervals;
the inner side wall of the pump body is provided with a plurality of static blades, and the static blades are arranged on the inner side wall of the pump body at intervals;
the plurality of moving blades and the plurality of stationary blades are staggered with each other.
Preferably, the drive assembly comprises a spindle structure, a motor rotor and a base member; the stator component is a motor stator;
the two ends of the main shaft structure are rotatably arranged on the pump body, and the motor rotor and the base piece are arranged on the main shaft structure; the motor rotor is positioned in the motor stator;
the inner carbon fiber cylinder and the outer carbon fiber cylinder are arranged on the base piece at intervals; the moving blades are arranged on the main shaft structure at intervals.
Preferably, a center column is arranged in the pump body, and an inner magnetic ring is arranged at one end of the center column;
a rotating groove is formed in one end, close to the central column, of the main shaft structure, an outer magnetic ring is arranged on the inner side wall of the rotating groove, and the inner magnetic ring is positioned in the outer magnetic ring;
the inner magnetic ring and the outer magnetic ring form a non-contact permanent magnet bearing structure, and the center column restrains and supports the main shaft structure through the non-contact permanent magnet bearing structure.
Preferably, the spindle structure comprises a first spindle sub-part and a second spindle sub-part;
the first main shaft sub-part is arranged at one end of the second main shaft sub-part, the first main shaft sub-part is arranged close to the center column, and the rotating groove is arranged on the first main shaft sub-part; the other end of the second main shaft sub-component is rotatably arranged on the pump body;
the rotor blade and the base member are disposed on the first main shaft sub-member, and the motor rotor is disposed on the second main shaft sub-member.
Preferably, the pump body comprises a pump shell and a base, and the base is arranged at one end of the pump shell;
the base is provided with a bearing seat, a mechanical bearing is arranged in the bearing seat, and the other end of the second main shaft sub-component is arranged on the bearing seat through the mechanical bearing.
Preferably, the direction of the rotation axis of the rotor assembly is a first direction,
the length direction of the stator blades and the length direction of the moving blades are arranged along a second direction, and the second direction is perpendicular to the first direction;
the central axes of the inner carbon fiber cylinder and the outer carbon fiber cylinder are arranged along the first direction.
Preferably, the stator blades and the rotor blades form a turbine stage structure;
the inner carbon fiber cylinder and the outer carbon fiber cylinder form a traction level structure;
the pump body is provided with a first air inlet, a second air inlet and a third air inlet;
the first air inlet is arranged at one end of the pump body; the second air inlet is arranged corresponding to the turbine stage structure; the third air inlet is arranged corresponding to the traction stage structure;
the first air inlet is used for forward air intake, the second air inlet is used for back diffusion backflow and forward air intake, and the third air inlet is used for back diffusion backflow and forward air intake.
Preferably, an exhaust port is arranged on the pump body, and the exhaust port is arranged corresponding to the internal screw element.
Preferably, a first gas passage is formed between the stator blade and the rotor blade;
a second gas channel is formed between the inner carbon fiber cylinder and the outer carbon fiber cylinder;
the first air inlet is used for positively feeding air to the first air channel; the second air inlet is used for forward air inlet and reverse diffusion backflow through the first air channel; the third air inlet is back-diffused and flows back through the first channel, and the third air inlet is positively air-inlet through the second air inlet channel.
Compared with the prior art, the invention has the following beneficial effects:
1. the rotor assembly is optimally designed, so that the rotor assembly is light, high in strength, high in precision and small in vibration; the non-contact permanent magnet bearing is used as a constraint support of the high vacuum part of the upper half part of the rotor assembly, has no abrasion, has high reliability and can provide a cleaner vacuum environment;
2. the air inlet on the pump shell can be custom designed, the interface is flexible, the vacuum can be pumped for a plurality of chambers at the same time, the back diffusion capability is realized, the requirements of related instruments are completely matched, a user only needs to purchase one pump, the effect of 2-3 pumps in the past can be achieved, and the use cost is effectively reduced.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic cross-sectional view of a back-diffusion multi-pumping port molecular pump according to the present invention.
The figure shows:
screw 12 in pump body 1
Outer screw 13 of center post 2
Inner magnetic ring 3 motor stator 14
Outer magnetic ring 4 motor rotor 15
Bearing seat 16 of first main shaft sub-part 5
Mechanical bearing 17 of second spindle sub-assembly 6
Base 18 of rotor blade 7
First inlet 19 of stator vane 8
Second air inlet 20 of base member 9
Third air inlet 21 of outer carbon fiber cylinder 10
Exhaust port 22 of inner carbon fiber tube 11
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Example 1:
as shown in fig. 1, the present embodiment provides a back-diffusion type molecular pump with multiple pumping ports, which includes: the pump body 1 is internally provided with a rotor assembly and a stator assembly, the rotor assembly comprises a driving assembly, an inner carbon fiber cylinder 11 and an outer carbon fiber cylinder 10, the inner carbon fiber cylinder 11 and the outer carbon fiber cylinder 10 are arranged on the driving assembly at intervals, the driving assembly drives through the stator assembly, the inner carbon fiber cylinder 11 is positioned in the outer carbon fiber cylinder 10, an inner spiral piece 12 and an outer spiral piece 13 are arranged on the inner side wall of the pump body 1, the inner spiral piece 12 is positioned in the inner carbon fiber cylinder 11, and the outer spiral piece 13 is positioned between the inner carbon fiber cylinder 11 and the outer carbon fiber cylinder 10.
The stator blades 8 and the rotor blades 7 form a turbine stage structure, the inner carbon fiber cylinder 11 and the outer carbon fiber cylinder 10 form a traction stage structure, the pump body 1 is provided with a first air inlet 19, a second air inlet 20 and a third air inlet 21, and the first air inlet 19 is arranged at one end of the pump body 1; the second air inlet 20 is arranged corresponding to the turbine stage structure; the third air inlet 21 is arranged corresponding to the traction stage structure, the first air inlet 19 is used for forward air intake, the second air inlet 20 is used for back diffusion backflow and forward air intake, and the third air inlet 21 is used for back diffusion backflow and forward air intake. The pump body 1 is provided with an exhaust port 22, and the exhaust port 22 is arranged corresponding to the inner screw member 12.
A first gas channel is formed between the stator blades 8 and the rotor blades 7, a second gas channel is formed between the inner carbon fiber cylinder 11 and the outer carbon fiber cylinder 10, and a first gas inlet 19 is used for positively charging the first gas channel; the second air inlet 20 is positively charged and reversely diffused and returned through the first air passage, the third air inlet 21 is reversely diffused and returned through the first air passage, and the third air inlet 21 is positively charged through the second air inlet passage.
The rotation axis direction of the rotor assembly is a first direction, the length direction of the stator blades 8 and the rotor blades 7 is set along a second direction, the second direction is perpendicular to the first direction, and the central axes of the inner carbon fiber cylinder 11 and the outer carbon fiber cylinder 10 are set along the first direction.
The rotor assembly further comprises a plurality of moving blades 7, the moving blades 7 are arranged on the driving assembly at intervals, a plurality of stator blades 8 are arranged on the inner side wall of the pump body 1, the stator blades 8 are arranged on the inner side wall of the pump body 1 at intervals, and the moving blades 7 and the stator blades 8 are arranged in a staggered mode.
The driving assembly comprises a main shaft structure, a motor rotor 15 and a base piece 9, wherein the stator assembly is a motor stator 14, two ends of the main shaft structure are rotatably arranged on the pump body 1, the motor rotor 15 and the base piece 9 are arranged on the main shaft structure, the motor rotor 15 is positioned in the motor stator 14, and the inner carbon fiber tube 11 and the outer carbon fiber tube 10 are arranged on the base piece 9 at intervals; the rotor blades 7 are arranged on the main shaft structure at intervals. A central column 2 is arranged in the pump body 1, an inner magnetic ring 3 is arranged at one end of the central column 2, a rotating groove is arranged at one end of the main shaft structure close to the central column 2, an outer magnetic ring 4 is arranged on the inner side wall of the rotating groove, the inner magnetic ring 3 is positioned in the outer magnetic ring 4, the inner magnetic ring 3 and the outer magnetic ring 4 form a non-contact type permanent magnet bearing structure, and the central column 2 restrains and supports the main shaft structure through the non-contact type permanent magnet bearing structure.
The main shaft structure comprises a first main shaft sub-part 5 and a second main shaft sub-part 6, wherein the first main shaft sub-part 5 is arranged at one end of the second main shaft sub-part 6, the first main shaft sub-part 5 is arranged close to the central column 2, and a rotating groove is formed in the first main shaft sub-part 5; the other end of the second main shaft sub-part 6 is rotatably arranged on the pump body 1, the moving blades 7 and the base part 9 are arranged on the first main shaft sub-part 5, and the motor rotor 15 is arranged on the second main shaft sub-part 6. The pump body 1 comprises a pump shell and a base 18, wherein the base 18 is arranged at one end of the pump shell, a bearing seat 16 is arranged on the base 18, a mechanical bearing 17 is arranged in the bearing seat 16, and the other end of the second main shaft sub-part 6 is arranged on the bearing seat 16 through the mechanical bearing 17.
Example 2:
the present embodiment will be understood by those skilled in the art as a more specific description of embodiment 1.
As shown in fig. 1, the present embodiment provides a back diffusion type molecular pump with multiple pumping ports, which comprises a square pump body 1, a center column 2, a permanent magnet bearing, a rotor assembly, stator vanes 8, an outer screw member 13, an inner screw member 12, a motor stator 14, a bearing seat 16, a mechanical bearing 17, a base 18 and the like. The rotor assembly is assembled by moving blades 7, an outer magnetic ring 4, a first main shaft sub-part 5, a second main shaft sub-part 6, a base part 9, an outer carbon fiber cylinder 10, an inner carbon fiber cylinder 11 and a motor rotor 15.
The motor stator 14, the inner screw 12, and the base 18 are integrally mounted. The rotor assembly upper moving blades 7 and static blades 8 form a turbine stage, and the outer carbon fiber cylinder 10, the inner carbon fiber cylinder 11, the inner screw 12 and the outer screw 13 form a traction stage. The upper and lower ends of the rotor assembly are respectively restrained and supported by a non-contact permanent magnet bearing and a mechanical bearing 17 which are formed by an inner magnetic ring 3 and an outer magnetic ring 4, and the upper motor rotor 15 rotates at a high speed under the magnetic traction of a motor stator 14. The square pump body 1 is provided with a plurality of air inlets, has the capability of back diffusion of gas and meets the use requirements of related instruments.
The first main shaft sub-part 5 is made of aviation aluminum alloy materials, the second main shaft sub-part 6 is made of high-strength alloy steel materials, and the first main shaft sub-part and the second main shaft sub-part are integrally machined after interference fit, so that the mass distribution is reasonable, the inertia is small, and the high stability is achieved.
Rotor assembly formed by assembling rotor blade 7, outer magnetic ring 4, first main shaft sub-part 5, second main shaft sub-part 6, base part 9, outer carbon fiber tube 10 and inner carbon fiber tube 11 from inside to outside in sequence by adopting small interference thermal sleeve, and rotation precision can reach within 0.01 mm.
The permanent magnet bearing comprises an inner magnetic ring 3 and an outer magnetic ring 4 which are stacked, and the material is selected from a permanent magnet samarium cobalt material.
The inner magnetic ring 3 is arranged on the central column and fixed on the square pump body 1, the outer magnetic ring 5 is arranged on the rotor assembly in an interference manner, the inner magnetic ring 3 and the outer magnetic ring 4 are in non-contact, and are supported in a uniformly restrained manner through magnetic force resistance, so that the rotor assembly is free from abrasion and high in cleanliness.
The outer carbon fiber tube 10 and the inner carbon fiber tube 11 are made of light high-strength carbon fiber reinforced materials, resist centrifugal force during ultrahigh-speed rotation, and have strong radial rigidity and small deformation.
The number of the moving blades 7 and the static blades 8 (influencing the air extraction performance of each air inlet), the air inlet on the square pump body 1 can be custom designed, the interface is flexible, the requirements of related instruments can be completely matched, and the use cost is effectively reduced.
The first air inlet 19 and the second air inlet 20 of the square pump body 1 are in a turbine stage, the third air inlet 21 is in a traction stage, and air can be continuously extracted from the first air inlet 19, the second air inlet 20 and the third air inlet 21 at the same time, and finally discharged from the air outlet 22, so that the vacuum requirements of a plurality of chambers are met.
The second air inlet 20 and the third air inlet 21 of the square pump body 1 have the capability of forward exhaust and back diffusion backflow during air suction.
The working state of the back diffusion type molecular pump with multiple air extraction openings provided by the embodiment is as follows: the upper and lower ends of the rotor assembly are respectively restrained and supported by a non-contact permanent magnet bearing and a mechanical bearing which are formed by an inner magnetic ring and an outer magnetic ring, and the upper motor rotor rotates at a high speed under the traction of the magnetic force of the motor stator. The rotor assembly comprises a turbine stage formed by the upper moving blades and the stationary blades, and a traction stage formed by the inner carbon fiber cylinder, the outer carbon fiber cylinder, the inner spiral piece and the outer spiral piece. Three air inlets are designed on the square pump body, wherein the first air inlet and the second air inlet are arranged at a turbine stage, the third air inlet is arranged at a traction stage, the three air inlets can simultaneously positively enter air to be vacuumized and discharged from an air outlet, the air suction performance of the three air inlets is gradually reduced, the air inlets simultaneously have gas back diffusion capability, namely, partial gas is reversely introduced, finally enters a mass spectrum chamber from the air inlet 1 for instrument analysis and detection, and the positive air inlet and back diffusion flow are shown in the arrow direction in the figure 1.
The molecular pump provided by the invention has the advantages that the rotor component is optimally designed, the weight is light, the strength is high, the precision is high, and the vibration is small; the non-contact permanent magnet bearing is used as a constraint support of the high vacuum part of the upper half part of the rotor assembly, has no abrasion, has high reliability and can provide a cleaner vacuum environment; the pump shell is provided with the air inlet which can be custom designed, the interface is flexible, the vacuum can be pumped for a plurality of chambers at the same time, the back diffusion capability is achieved, the requirements of related instruments are completely matched, a user only needs to purchase one pump, the effect of 2-3 pumps in the past can be achieved, and the use cost is effectively reduced.
In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements being referred to must have a specific orientation, be configured and operated in a specific orientation, and are not to be construed as limiting the present application.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily without conflict.
Claims (10)
1. A back-diffusion type multi-pumping port molecular pump, comprising: the pump comprises a pump body (1), wherein a rotor assembly and a stator assembly are arranged in the pump body (1);
the rotor assembly comprises a driving assembly, an inner carbon fiber cylinder (11) and an outer carbon fiber cylinder (10), wherein the inner carbon fiber cylinder (11) and the outer carbon fiber cylinder (10) are arranged on the driving assembly at intervals, and the driving assembly drives through the stator assembly;
the inner carbon fiber cylinder (11) is located in the outer carbon fiber cylinder (10), an inner spiral piece (12) and an outer spiral piece (13) are arranged on the inner side wall of the pump body (1), the inner spiral piece (12) is located in the inner carbon fiber cylinder (11), and the outer spiral piece (13) is located between the inner carbon fiber cylinder (11) and the outer carbon fiber cylinder (10).
2. The back-diffusion multi-extraction molecular pump according to claim 1, wherein the rotor assembly further comprises a plurality of rotor blades (7), a plurality of the rotor blades (7) being spaced apart on the drive assembly;
a plurality of stationary blades (8) are arranged on the inner side wall of the pump body (1), and the plurality of stationary blades (8) are arranged on the inner side wall of the pump body (1) at intervals;
the plurality of moving blades (7) and the plurality of stationary blades (8) are arranged in a staggered manner.
3. A counter-diffusion multi-pumping port molecular pump according to claim 2, wherein the drive assembly comprises a spindle structure, a motor rotor (15) and a base member (9); the stator assembly is a motor stator (14);
the two ends of the main shaft structure are rotatably arranged on the pump body (1), and the motor rotor (15) and the base piece (9) are arranged on the main shaft structure; -the motor rotor (15) is located within the motor stator (14);
the inner carbon fiber cylinder (11) and the outer carbon fiber cylinder (10) are arranged on the base piece (9) at intervals; the moving blades (7) are arranged on the main shaft structure at intervals.
4. A counter-diffusion type multi-extraction molecular pump according to claim 3, characterized in that a central column (2) is arranged in the pump body (1), and an inner magnetic ring (3) is arranged at one end of the central column (2);
a rotating groove is formed in one end, close to the central column (2), of the main shaft structure, an outer magnetic ring (4) is arranged on the inner side wall of the rotating groove, and the inner magnetic ring (3) is located in the outer magnetic ring (4);
the inner magnetic ring (3) and the outer magnetic ring (4) form a non-contact permanent magnet bearing structure, and the central column (2) carries out constraint support on the main shaft structure through the non-contact permanent magnet bearing structure.
5. The back-diffusion multi-pumping port molecular pump according to claim 4, wherein the spindle arrangement comprises a first spindle sub-part (5) and a second spindle sub-part (6);
the first main shaft sub-part (5) is arranged at one end of the second main shaft sub-part (6), the first main shaft sub-part (5) is arranged close to the center column (2), and the rotating groove is arranged on the first main shaft sub-part (5); the other end of the second main shaft sub-part (6) is rotatably arranged on the pump body (1);
the rotor blade (7) and the base part (9) are arranged on the first main shaft part (5), and the motor rotor (15) is arranged on the second main shaft part (6).
6. The back-diffusion multi-extraction molecular pump according to claim 5, characterized in that the pump body (1) comprises a pump housing and a base (18), the base (18) being arranged at one end of the pump housing;
the base (18) is provided with a bearing seat (16), a mechanical bearing (17) is arranged in the bearing seat (16), and the other end of the second main shaft sub-component (6) is arranged on the bearing seat (16) through the mechanical bearing (17).
7. The back-diffusion multi-pumping port molecular pump according to claim 2, wherein the direction of the axis of rotation of the rotor assembly is a first direction,
the length direction of the stator blades (8) and the rotor blades (7) is set along a second direction, and the second direction is perpendicular to the first direction;
the central axes of the inner carbon fiber cylinder (11) and the outer carbon fiber cylinder (10) are arranged along the first direction.
8. The counter-diffusion multi-extraction molecular pump according to claim 2, characterized in that the stator vanes (8) and the rotor blades (7) constitute a turbine stage structure;
the inner carbon fiber cylinder (11) and the outer carbon fiber cylinder (10) form a traction level structure;
the pump body (1) is provided with a first air inlet (19), a second air inlet (20) and a third air inlet (21);
the first air inlet (19) is arranged at one end of the pump body (1); the second air inlet (20) is arranged corresponding to the turbine stage structure; the third air inlet (21) is arranged corresponding to the traction stage structure;
the first air inlet (19) is used for forward air intake, the second air inlet (20) is used for back diffusion backflow and forward air intake, and the third air inlet (21) is used for back diffusion backflow and forward air intake.
9. The back diffusion type multi-extraction molecular pump according to claim 8, wherein an exhaust port (22) is provided on the pump body (1), and the exhaust port (22) is provided corresponding to the inner screw member (12).
10. The back-diffusion multi-extraction molecular pump according to claim 8, characterized in that a first gas channel is formed between the stator vanes (8) and the rotor blades (7);
a second gas channel is formed between the inner carbon fiber cylinder (11) and the outer carbon fiber cylinder (10);
the first air inlet (19) is used for positively feeding air to the first air channel; the second gas inlet (20) is used for forward gas inlet and reverse diffusion backflow through the first gas channel; the third air inlet (21) is back-diffused and flows back through the first channel, and the third air inlet (21) is positively air-inlet through the second air inlet channel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310451562.7A CN116498581A (en) | 2023-04-24 | 2023-04-24 | Reverse diffusion type multi-extraction-opening molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310451562.7A CN116498581A (en) | 2023-04-24 | 2023-04-24 | Reverse diffusion type multi-extraction-opening molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116498581A true CN116498581A (en) | 2023-07-28 |
Family
ID=87329718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310451562.7A Pending CN116498581A (en) | 2023-04-24 | 2023-04-24 | Reverse diffusion type multi-extraction-opening molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116498581A (en) |
-
2023
- 2023-04-24 CN CN202310451562.7A patent/CN116498581A/en active Pending
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