CN116482936A - Laser imaging power control method, cascade control system and related equipment - Google Patents

Laser imaging power control method, cascade control system and related equipment Download PDF

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Publication number
CN116482936A
CN116482936A CN202210037864.5A CN202210037864A CN116482936A CN 116482936 A CN116482936 A CN 116482936A CN 202210037864 A CN202210037864 A CN 202210037864A CN 116482936 A CN116482936 A CN 116482936A
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China
Prior art keywords
laser
controller
control system
lasers
output
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Pending
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CN202210037864.5A
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Chinese (zh)
Inventor
陈钢
陈乃奇
唐怀丹
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Shenzhen Anteland Technology Co Ltd
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Shenzhen Anteland Technology Co Ltd
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Priority to CN202210037864.5A priority Critical patent/CN116482936A/en
Publication of CN116482936A publication Critical patent/CN116482936A/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • G03F7/2055Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser for the production of printing plates; Exposure of liquid photohardening compositions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The embodiment of the invention provides a laser imaging power control method, a cascade control system and related equipment, which are used for realizing feedback control of a plurality of laser output powers in a laser imaging process and guaranteeing the consistency of laser imaging. The method of the embodiment of the invention comprises the following steps: acquiring feedback parameters of a plurality of lasers in the laser imaging equipment, wherein the feedback parameters of each laser comprise a laser driving signal and a power parameter signal of the laser, and the power parameter signal is used for directly or indirectly marking the output power of the laser; inputting power parameter signals in feedback parameters of each laser into the main controller to form a main feedback control loop, and inputting the driving signals into a secondary controller of the cascade control system to form a secondary feedback control loop; and the laser driving signals of the lasers are output according to a control strategy preset by the cascade control system so as to respectively control the output of each laser, so that the consistency of the output power of the lasers is maintained.

Description

Laser imaging power control method, cascade control system and related equipment
Technical Field
The present invention relates to the field of laser imaging technologies, and in particular, to a laser imaging power control method, a cascade control system, and related devices.
Background
Laser direct imaging refers to controlling points on a photosensitive coating on an exposure surface to be exposed by laser irradiation, and generating a preset image after development. Compared with the traditional process, the laser direct imaging technology does not need to manufacture a mask, reduces the process complexity, saves the production cost, and can be applied to the fields of screen printing plate making, PCB manufacturing and the like.
The existing laser direct imaging device (for example, application number is 201310084860.3, and the laser direct plate making device for plane screen printing screen) can comprise a laser array composed of a plurality of lasers distributed along a straight line equidistantly, and a plurality of lasers are used for exposing a plurality of rows of pixels on an exposure surface at the same time. In the scanning exposure process, after the type of the photosensitive coating and the thickness of the photosensitive coating are determined, the power for completely exposing the photosensitive coating can be calculated, then the input power of the laser driving circuit is calculated, and finally the input power of a plurality of laser driving circuits is controlled to be a fixed value.
The applicant has noted that during operation of a laser direct imaging device, the power loss of the laser increases with increasing temperature of the laser (so that at the same driving power the output power of the laser decreases), the driving circuit output current of the laser increases with increasing temperature. If the input power of the laser driving circuit is kept unchanged, the output power of the laser driving circuit and the power loss of the laser dynamically change along with the change of the working environment temperature. In view of the above, the output power of a plurality of lasers in the imaging process of the laser direct imaging device is often difficult to be consistent, even the output power of the same laser is unstable, and the consistency of the output power directly influences the consistency of exposure of the laser to the photosensitive coating, so that the consistency of developed images after the photosensitive coating is developed is poor. Therefore, how to ensure the consistency of laser imaging becomes a problem to be solved.
Disclosure of Invention
The embodiment of the invention provides a laser imaging power control method, a cascade control system and related equipment, which are used for realizing laser output power feedback control in a laser imaging process and guaranteeing the consistency of laser imaging.
A first aspect of an embodiment of the present invention provides a method for controlling power in a laser imaging process, which may include:
respectively acquiring feedback parameters of a plurality of lasers in the laser imaging equipment, wherein the feedback parameters of each laser comprise a laser driving signal and a power parameter signal of the laser, and the power parameter signal is used for directly or indirectly marking the output power of the laser;
inputting power parameter signals in feedback parameters of each laser into the main controller to form a main feedback control loop, and inputting the driving signals into a secondary controller of the cascade control system to form a secondary feedback control loop;
and the laser driving signals of the lasers are output according to a control strategy preset by the cascade control system so as to respectively control the output of each laser, so that the consistency of the output power of the lasers is maintained.
Alternatively, as a possible implementation manner, the feedback control strategy of the main controller is a proportional-integral-derivative PID control strategy or a proportional-integral PI control strategy.
Optionally, as a possible implementation manner, the feedback control strategy in the secondary controller is a proportional P control strategy.
Alternatively, as a possible implementation manner, the driving signal is a current signal or a voltage signal.
A second aspect of an embodiment of the present invention provides a cascade control system, which may include:
a main controller, a sub controller, a first detector, and a second detector; the main controller is connected with the first detector, and the auxiliary controller is connected with the second detector;
the first detector is used for acquiring power parameter signals of a plurality of lasers in the laser imaging device and inputting the power parameter signals into the main controller; wherein the power parameter signal is used for directly or indirectly identifying the output power of the laser;
the second detector is used for acquiring laser driving signals of a plurality of lasers in the laser imaging device and inputting the driving signals into the auxiliary controller;
the output of the main controller in the cascade control system is the input of the auxiliary controller, the auxiliary controller is used for controlling laser driving signals, and the main controller is used for controlling the output power of the laser.
A third aspect of the embodiments of the present invention provides a computer apparatus comprising a processor for implementing the steps as in any one of the possible implementations of the first aspect and the first aspect when executing a computer program stored in a memory.
A fourth aspect of the embodiments of the present invention provides a computer readable storage medium having stored thereon a computer program which when executed by a processor performs steps as in any one of the possible implementations of the first aspect and the first aspect.
From the above technical solutions, the embodiment of the present invention has the following advantages:
in the embodiment of the invention, power parameter signals of a plurality of lasers in the laser imaging equipment are input into a main controller of a cascade control system to form a main feedback control loop corresponding to each laser, and laser driving signals of the plurality of lasers are input into a secondary controller of the cascade control system to form a secondary feedback control loop corresponding to each laser. The cascade feedback control system based on the main feedback control loop and the auxiliary feedback control loop not only can correct the fluctuation of each laser driving signal, but also can correct the fluctuation of output power caused by the power loss of the laser, so that the output power of a plurality of lasers is continuously kept consistent, and the consistency of the whole laser imaging is improved. And secondly, the main feedback control loop and the auxiliary feedback control loop form a cascade control system, the auxiliary feedback loop has strong inhibition capability on power disturbance in the whole control loop, and can inhibit disturbance with large severe variation amplitude, so that the consistency of laser imaging is further ensured.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a cascade control system according to an embodiment of the invention;
FIG. 2 is a schematic diagram of a laser imaging power control method according to an embodiment of the present invention;
fig. 3 is a schematic diagram of an embodiment of a computer device according to an embodiment of the invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
The terms first, second, third, fourth and the like in the description and in the claims and in the above drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, hierarchical control system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or apparatus.
In an embodiment of the present invention, as shown in fig. 1, a cascade control system is provided, where the cascade control system in the embodiment of the present application may include two controllers and two sets of detectors, that is, a main controller 10 and a sub-controller 20, a first detector 30 and a second detector 40. The main controller 10 is connected to the first detector 30, so that a main feedback control loop is formed among the main controller 10, the sub-controller 20 and the first detector 30, and the main controller 10 can feedback control the output power of the laser 50 according to the power parameter signals of the multiple lasers (two or more) 50 (such as the laser 1, the laser 2 and the laser … N in fig. 1) obtained by the first detector 30. Meanwhile, the output of the main controller 10 is used as an input of the sub-controller 20, the sub-controller 20 is connected with the second detector 40, so that a sub-feedback control loop is formed between the sub-controller 20 and the second detector 40, and the sub-controller 20 can feedback and adjust the driving signals of the lasers 50 according to the obtained driving signals of the multiple lasers 50 by the second detector 40.
It should be understood that the first detector 30 and the second detector 40 in the embodiments of the present invention may be formed by a plurality of physically separated independent detecting devices (that may detect a laser feedback parameter), or may be a physically integrated detecting device (that may detect a plurality of laser feedback parameters at the same time), which is not limited herein.
Optionally, in the cascade control system, the control strategy of the main controller is a proportional-integral-derivative PID control strategy or a proportional-integral PI control strategy, and the control strategy in the auxiliary controller is a proportional-P control strategy. The design principles of the specific PID control strategy, the PID control strategy and the P control strategy are the prior art, only the negative feedback of the two feedback loops is guaranteed, specific parameters can be set according to the actual working condition requirements, and details are omitted here.
It will be appreciated that the primary and secondary controllers in this application may be, in some embodiments, a central processing unit (Central Processing Unit, CPU), microprocessor or other data processing chip (e.g., FPGA, PLC, etc.), and the specific implementation is not limited by this application, by running program codes or processing data stored in the memory, etc. to implement the set functions (e.g., PID control strategy, P control strategy).
For easy understanding, on the basis of the embodiment shown in fig. 1, a specific control flow in the embodiment of the present invention is described below, referring to fig. 2, and an embodiment of a laser imaging power control method in the embodiment of the present invention may include:
s201, acquiring feedback parameters of a plurality of lasers in the laser imaging device.
In order to solve the problem of laser exposure consistency caused by dynamic change of output power of a driving circuit of a laser and power loss of the laser, in the embodiment of the application, a laser driving signal and a power parameter signal of the laser in a laser imaging device can be obtained, and feedback adjustment is performed based on the obtained signals.
The laser imaging device is a device comprising at least two lasers, and the exposure of the lasers to the photosensitive coating is used for realizing image transfer. The laser driving signal can be a current signal or a voltage signal; the power parameter signal is a signal for directly or indirectly identifying the output power of the laser, and specifically may be a signal for indirectly identifying the output power of the laser, for example, parameters such as spot brightness, spot area, and the like; the output power signal may also be directly detected based on a laser power detection device in the prior art, which is not limited herein.
S202, inputting power parameter signals in feedback parameters of each laser into a main controller to form a main feedback control loop, and inputting driving signals into a secondary controller of a cascade control system to form a secondary feedback control loop.
Based on the cascade control system shown in fig. 1, after the signal is acquired in the laser imaging process of the laser imaging device, the acquired laser driving signal can be input into a secondary controller of the cascade control system, and the power parameter signal of the laser is input into a main controller of the cascade control system to form a main feedback control loop and a secondary feedback control loop respectively.
S203, laser driving signals of a plurality of lasers are output according to a control strategy preset by the cascade control system so as to respectively control the output of each laser.
After a preset control strategy is configured, the cascade control system can be adopted to perform feedback regulation control on the output power of a plurality of lasers in the laser imaging equipment, the laser driving signals of the plurality of lasers are output, and then the output of each laser is controlled according to each laser driving signal, so that the output power of the plurality of lasers is stable relative to an initial setting value. If the initial set values of the lasers are consistent, the cascade control system can keep the output power of the lasers consistent continuously.
As can be seen from the above disclosure, the power parameter signals of the multiple lasers in the laser imaging device are input to the main controller of the cascade control system to form a main feedback control loop corresponding to each laser, and the laser driving signals of the multiple lasers are input to the sub-controller of the cascade control system to form a sub-feedback control loop corresponding to each laser. The cascade feedback control system based on the main feedback control loop and the auxiliary feedback control loop not only can correct the fluctuation of each laser driving signal, but also can correct the fluctuation of output power caused by the power loss of the laser, so that the output power of a plurality of lasers is continuously kept consistent, and the consistency of laser imaging is improved. And secondly, the main feedback control loop and the auxiliary feedback control loop form a cascade control system, the auxiliary feedback loop has strong inhibition capability on power disturbance in the whole control loop, and can inhibit disturbance with large severe variation amplitude, so that the consistency of laser imaging is further ensured.
Referring to fig. 3, the following describes a computer device in an embodiment of the present invention from the viewpoint of hardware processing:
the computer device 1 may include a memory 11, a processor 12, and an input-output bus 13. The steps in the above-described embodiment of the power control method in the laser imaging process shown in fig. 2, such as steps 201 to 203 shown in fig. 2, are implemented when the processor 11 executes a computer program. In the alternative, the processor may implement the functions of the modules or units in the above-described embodiments of the apparatus when executing the computer program.
In some embodiments of the present invention, the processor is specifically configured to implement the following steps:
respectively acquiring feedback parameters of a plurality of lasers in the laser imaging equipment, wherein the feedback parameters of each laser comprise a laser driving signal and a power parameter signal of the laser, and the power parameter signal is used for directly or indirectly marking the output power of the laser;
inputting power parameter signals in feedback parameters of each laser into the main controller to form a main feedback control loop, and inputting the driving signals into a secondary controller of the cascade control system to form a secondary feedback control loop;
and the laser driving signals of the lasers are output according to a control strategy preset by the cascade control system so as to respectively control the output of each laser, so that the consistency of the output power of the lasers is maintained.
The memory 11 includes at least one type of readable storage medium including flash memory, a hard disk, a multimedia card, a card type memory (e.g., SD or DX memory, etc.), a magnetic memory, a magnetic disk, an optical disk, etc. The memory 11 may in some embodiments be an internal storage unit of the computer device 1, such as a hard disk of the computer device 1. The memory 11 may also be an external storage device of the computer apparatus 1 in other embodiments, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash memory Card (Flash Card) or the like, which are provided on the computer apparatus 1. Further, the memory 11 may also include both an internal storage unit and an external storage device of the computer apparatus 1. The memory 11 may be used not only for storing application software installed in the computer apparatus 1 and various types of data, such as code of a computer program, but also for temporarily storing data that has been output or is to be output.
The processor 12 may in some embodiments be a central processing unit (Central Processing Unit, CPU), controller, microcontroller, microprocessor or other data processing chip for running program code or processing data stored in the memory 11, e.g. executing computer programs or the like.
The input/output bus 13 may be a peripheral component interconnect standard (peripheral component interconnect, PCI) bus, or an extended industry standard architecture (extended industry standard architecture, EISA) bus, among others. The bus may be classified as an address bus, a data bus, a control bus, etc.
Further, the computer apparatus may also comprise a wired or wireless network interface 14, and the network interface 14 may optionally comprise a wired interface and/or a wireless interface (e.g. WI-FI interface, bluetooth interface, etc.), typically used to establish a communication connection between the computer apparatus 1 and other electronic devices.
Fig. 3 shows only a computer device 1 with components 11-14 and a computer program, it being understood by a person skilled in the art that the structure shown in fig. 3 does not constitute a limitation of the computer device 1, and may comprise fewer or more components than shown, or may combine certain components, or a different arrangement of components.
The present invention also provides a computer readable storage medium having a computer program stored thereon, which when executed by a processor, can implement the steps of:
respectively acquiring feedback parameters of a plurality of lasers in the laser imaging equipment, wherein the feedback parameters of each laser comprise a laser driving signal and a power parameter signal of the laser, and the power parameter signal is used for directly or indirectly marking the output power of the laser;
inputting power parameter signals in feedback parameters of each laser into the main controller to form a main feedback control loop, and inputting the driving signals into a secondary controller of the cascade control system to form a secondary feedback control loop;
and the laser driving signals of the lasers are output according to a control strategy preset by the cascade control system so as to respectively control the output of each laser, so that the consistency of the output power of the lasers is maintained.
In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods may be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative, e.g., the division of the units is merely a logical function division, and there may be additional divisions when actually implemented, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied essentially or in part or all of the technical solution or in part in the form of a software product stored in a storage medium, including instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
The above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. The power control method in the laser imaging process is characterized by being applied to a cascade control system, wherein the cascade control system comprises a main controller and a secondary controller, and the output of the main controller in the cascade control system is the input of the secondary controller; the method comprises the following steps:
acquiring feedback parameters of a plurality of lasers in the laser imaging equipment, wherein the feedback parameters of each laser comprise a laser driving signal and a power parameter signal of the laser, and the power parameter signal is used for directly or indirectly marking the output power of the laser;
inputting power parameter signals in feedback parameters of each laser into the main controller to form a main feedback control loop, and inputting the driving signals into a secondary controller of the cascade control system to form a secondary feedback control loop;
and the laser driving signals of the lasers are output according to a control strategy preset by the cascade control system so as to respectively control the output of each laser, so that the consistency of the output power of the lasers is maintained.
2. The method of claim 1, wherein the feedback control strategy of the master controller is a proportional-integral-derivative PID control strategy or a proportional-integral PI control strategy.
3. The method of claim 1, wherein the feedback control strategy in the secondary controller is a proportional P control strategy.
4. A method according to any one of claims 1 to 3, wherein the drive signal is a current signal or a voltage signal.
5. A cascade control system, comprising: a main controller, a sub controller, a first detector, and a second detector; the main controller is connected with the first detector, and the auxiliary controller is connected with the second detector;
the first detector is used for acquiring power parameter signals of a plurality of lasers in the laser imaging device and inputting the power parameter signals into the main controller; wherein the power parameter signal is used for directly or indirectly identifying the output power of the laser;
the second detector is used for acquiring laser driving signals of a plurality of lasers in the laser imaging device and inputting the driving signals into the auxiliary controller;
the output of the main controller in the cascade control system is the input of the auxiliary controller, the auxiliary controller is used for controlling laser driving signals, and the main controller is used for controlling the output power of the laser.
6. The system of claim 5, wherein the feedback control strategy in the secondary controller is a proportional P control strategy.
7. The system of claim 6, wherein the control strategy of the master controller is a proportional-integral-derivative PID control strategy or a proportional-integral PI control strategy.
8. The system of any one of claims 5 to 7, wherein the drive signal is a current signal or a voltage signal.
9. A computer device comprising a processor for implementing the method according to any of claims 1 to 4 when executing a computer program stored in a memory.
10. A computer-readable storage medium having stored thereon a computer program, characterized by: the computer program implementing the method according to any of claims 1 to 4 when executed by a processor.
CN202210037864.5A 2022-01-13 2022-01-13 Laser imaging power control method, cascade control system and related equipment Pending CN116482936A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117074836A (en) * 2023-10-12 2023-11-17 成都明夷电子科技有限公司 Laser detection method, detector, electronic equipment and storage medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117074836A (en) * 2023-10-12 2023-11-17 成都明夷电子科技有限公司 Laser detection method, detector, electronic equipment and storage medium
CN117074836B (en) * 2023-10-12 2024-03-12 成都明夷电子科技有限公司 Laser detection method, detector, electronic equipment and storage medium

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