CN116480589A - Cooling system for dry vacuum pump unit - Google Patents

Cooling system for dry vacuum pump unit Download PDF

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Publication number
CN116480589A
CN116480589A CN202310511483.0A CN202310511483A CN116480589A CN 116480589 A CN116480589 A CN 116480589A CN 202310511483 A CN202310511483 A CN 202310511483A CN 116480589 A CN116480589 A CN 116480589A
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CN
China
Prior art keywords
pipeline
hole
vacuum pump
dry vacuum
cooling liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310511483.0A
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Chinese (zh)
Inventor
陈林
杜勇
邓高飞
唐海宏
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Zhongke Jiuwei Technology Co ltd
Original Assignee
Zhongke Jiuwei Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhongke Jiuwei Technology Co ltd filed Critical Zhongke Jiuwei Technology Co ltd
Priority to CN202310511483.0A priority Critical patent/CN116480589A/en
Publication of CN116480589A publication Critical patent/CN116480589A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention relates to the technical field of vacuum pumps, in particular to a cooling system for a dry vacuum pump unit, which comprises the following components: the water inlet end of the first pipeline is communicated with a first cavity, and the first cavity is a cooling liquid channel which is arranged close to a first part of the dry vacuum pump unit; one end of the second pipeline is connected with the water outlet end of the first pipeline through a constant flow valve, the other end of the second pipeline is communicated with a second cavity, and the second cavity is a cooling liquid channel which is arranged close to a second part of the dry vacuum pump unit; the first part is a bearing for installing a gear, and the second part is a motor correspondingly; or the first part is a rear-stage main pump group, and the second part is a front-stage pump; according to the method, the constant flow valve is additionally arranged, so that the flow of the cooling liquid is limited, the cooling speed of the motor end or the backing pump is reduced, the motor end or the backing pump is kept at a higher temperature, and the formation of temperature difference is avoided; so that the temperature distribution of the dry vacuum pump unit is balanced.

Description

Cooling system for dry vacuum pump unit
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to a cooling system for a dry vacuum pump unit.
Background
The dry vacuum pump unit, especially the Roots-screw dry vacuum pump unit comprising Roots pump and oil-free screw vacuum pump, is used in semiconductor industry. For example: different gases are generated in different processes of semiconductor product processing, and the different gases have a certain critical condensation temperature. To prevent gas condensation, it is necessary to maintain the temperature of the working space of the Roots-screw dry vacuum pump assembly uniform. Therefore, the Roots-screw dry vacuum pump unit needs to be cooled by a cooling system in the running process, and is used for cooling a motor, a vacuum pump cavity and the like, so that the shutdown caused by overhigh temperature of part of components is prevented. However, the Roots-screw dry vacuum pump unit has the phenomena that the overall temperature of the Roots pump is low, the temperature of the oil-free screw vacuum pump is high and the temperature of a motor end is lower than that of a gear end in the running process; namely, when the Roots-screw dry vacuum pump unit works, the problem of unbalanced temperature distribution exists.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defect of unbalanced temperature distribution when the Roots-screw dry vacuum pump unit works.
To overcome the above-described drawbacks, the present invention provides a cooling system for a dry vacuum pump assembly, comprising:
the water inlet end of the first pipeline is communicated with a first cavity, and the first cavity is a cooling liquid channel which is arranged close to a first part of the dry vacuum pump unit;
one end of the second pipeline is connected with the water outlet end of the first pipeline through a constant flow valve, the other end of the second pipeline is communicated with a second cavity, and the second cavity is a cooling liquid channel which is arranged close to a second part of the dry vacuum pump unit; the first part is a bearing for installing a gear, and the second part is a motor correspondingly; or the first part is a rear-stage main pump group, and the second part is a front-stage pump correspondingly; the dry vacuum pump unit is a front-stage pump and a rear-stage main pump group which are sequentially connected in series;
and a third pipeline, one end of which is communicated with the second chamber, and the third pipeline is suitable for outputting the cooling liquid in the second chamber.
Optionally, the method further comprises:
a fourth pipeline connected with the other end of the third pipeline, wherein the fourth pipeline is suitable for discharging the cooling liquid in the third pipeline;
and one end of the fifth pipeline is connected with the fourth pipeline, and the other end of the fifth pipeline is connected with the first pipeline.
Optionally, the method further comprises:
the first end of the first three-way joint is connected with the water outlet end of the first pipeline, the second end of the first three-way joint is connected with the constant flow valve, and the third end of the first three-way joint is connected with the fifth pipeline;
the first end of the second three-way joint is connected with the third pipeline, the second end of the second three-way joint is connected with the fourth pipeline, and the third end of the second three-way joint is connected with the fifth pipeline.
Optionally, the constant flow valve includes:
the valve body is provided with a through hole, and the through hole is suitable for circulating cooling liquid;
the valve core is connected in the through hole in a sliding way; a throttle part is arranged on the downstream side of the valve core along the flowing direction of the cooling liquid, and the shape of the throttle part gradually decreases from the end part to the bottom part; an intermediate channel is further arranged in the valve core, and the intermediate channel is communicated with the upstream and the downstream of the valve core along the flowing direction of the cooling liquid;
the throttling piece is arranged in the through hole in a clamping way, is positioned at the downstream of the valve core along the flowing direction of the cooling liquid, and is provided with a throttling hole; the throttling part is suitable for sliding the valve core to a direction close to the throttling piece along with the increase of the pressure of the cooling liquid on the valve core, and the greater the depth of the throttling part placed in the throttling hole is;
and the elastic piece is positioned in the through hole, one end of the elastic piece is abutted on the valve core, and the other end of the elastic piece is abutted on the throttling piece.
Optionally, the constant flow valve further comprises:
the blocking plate is fixedly arranged in the through hole and is positioned at the upstream of the valve core along the flowing direction of the cooling fluid, a through hole is formed in the blocking plate, and a filter screen is arranged on the through hole.
Optionally, an annular groove is formed in the inner wall of the through hole of the valve body, and the edge of the blocking plate is embedded in the annular groove.
Optionally, the valve core is further provided with:
the cross-sectional dimension of the connecting part is larger than that of the throttling part;
and the sliding part is connected with the connecting part and is in sliding fit with the through hole.
Optionally, the middle channel is a first hole and a second hole which are communicated, the first hole is arranged at one end of the valve core far away from the throttling piece, and the first hole is communicated with the upstream of the valve core along the flowing direction of the cooling liquid; the second hole is perpendicular to the first hole, is arranged on the connecting part, and is communicated with the downstream of the valve core along the flowing direction of the cooling liquid.
Optionally, the elastic element is a spring, and the spring is sleeved on the connecting portion.
Optionally, the throttling element is provided with an annular flange, an annular shoulder is arranged in the through hole of the valve body, and the annular flange is in butt joint with the annular shoulder to form a clamping connection arrangement.
Compared with the prior art, the technical scheme of the invention has the following advantages:
1. the invention provides a cooling system for a dry vacuum pump unit, which comprises: the water inlet end of the first pipeline is communicated with a first cavity, and the first cavity is a cooling liquid channel which is arranged close to a first part of the dry vacuum pump unit; one end of the second pipeline is connected with the water outlet end of the first pipeline through a constant flow valve, the other end of the second pipeline is communicated with a second cavity, and the second cavity is a cooling liquid channel which is arranged close to a second part of the dry vacuum pump unit; the first part is a bearing for installing a gear, and the second part is a motor correspondingly; or the first part is a rear-stage main pump group, and the second part is a front-stage pump correspondingly; the dry vacuum pump unit is a front-stage pump and a rear-stage main pump group which are sequentially connected in series; a third pipe having one end communicating with the second chamber, the third pipe being adapted to output the coolant in the second chamber; according to the technical scheme, the constant flow valve is additionally arranged in the cooling system for the dry vacuum pump unit, so that the flow of cooling liquid is limited, the cooling speed of the motor end or the backing pump is reduced, the motor end or the backing pump is kept at a higher temperature, and the temperature difference is prevented from being formed between the motor end and the gear end or between the backing pump and the backing main pump; the temperature distribution of the dry vacuum pump unit is balanced, gas condensation during semiconductor product processing is prevented, the gas removal efficiency is effectively improved, and particularly, the capability of exhausting waste gas is improved.
2. The cooling system for the dry vacuum pump unit provided by the invention further comprises: a fourth pipeline connected with the other end of the third pipeline, wherein the fourth pipeline is suitable for discharging the cooling liquid in the third pipeline; one end of the fifth pipeline is connected with the fourth pipeline, and the other end of the fifth pipeline is connected with the first pipeline; by adopting the technical scheme, the cooling liquid in the third pipeline and the fifth pipeline is discharged through the fourth pipeline, so that the cooling liquid which continuously flows is formed, and the cooling efficiency of the cooling liquid is improved.
3. The cooling system for the dry vacuum pump unit provided by the invention further comprises: the first end of the first three-way joint is connected with the water outlet end of the first pipeline, the second end of the first three-way joint is connected with the constant flow valve, and the third end of the first three-way joint is connected with the fifth pipeline; the first end of the second three-way joint is connected with the third pipeline, the second end of the second three-way joint is connected with the fourth pipeline, and the third end of the second three-way joint is connected with the fifth pipeline; by adopting the technical scheme, the first pipeline, the constant flow valve and the fifth pipeline are conveniently connected through the first three-way joint; the third pipeline, the fourth pipeline and the fifth pipeline are conveniently connected through the second three-way joint; meanwhile, the device is convenient to detach and maintain.
4. The constant flow valve of the invention comprises: the valve body is provided with a through hole, and the through hole is suitable for circulating cooling liquid; the valve core is connected in the through hole in a sliding way; a throttle part is arranged on the downstream side of the valve core along the flowing direction of the cooling liquid, and the shape of the throttle part gradually decreases from the end part to the bottom part; an intermediate channel is further arranged in the valve core, and the intermediate channel is communicated with the upstream and the downstream of the valve core along the flowing direction of the cooling liquid; the throttling piece is arranged in the through hole in a clamping way, is positioned at the downstream of the valve core along the flowing direction of the cooling liquid, and is provided with a throttling hole; the throttling part is suitable for sliding the valve core to a direction close to the throttling piece along with the increase of the pressure of the cooling liquid on the valve core, and the greater the depth of the throttling part placed in the throttling hole is; the elastic piece is positioned in the through hole, one end of the elastic piece is abutted against the valve core, and the other end of the elastic piece is abutted against the throttling piece; by adopting the technical scheme, when the pressure of the cooling liquid is increased, the pressure of the cooling liquid to the valve core is increased, the valve core slides towards the direction close to the throttling element, after the valve core compresses the elastic element to a certain extent, the depth of the throttling part in the throttling hole is increased, the effective flow area is reduced, the flow rate of the cooling liquid passing through the throttling hole is increased, the flow rate of the cooling liquid passing through the constant flow valve is kept constant, the effect of limiting the flow is achieved, and the flow rate of the cooling liquid output under different pressures can be matched. And the constant flow valve has simple structure, easy production and processing and high durability.
5. The constant flow valve of the invention further comprises: the blocking plate is fixedly arranged in the through hole and is positioned at the upstream of the valve core along the flowing direction of the cooling fluid, a through hole is formed in the blocking plate, and a filter screen is arranged on the through hole; the application adopts above-mentioned technical scheme, through the closure plate that sets up the filter screen, can filter the partial impurity in the coolant liquid, prevent to block up, keep the circulation of coolant liquid unobstructed.
6. According to the invention, an annular groove is formed in the inner wall of a through hole of the valve body, and the edge of the blocking plate is embedded in the annular groove; the application adopts above-mentioned technical scheme, ensures that the closure plate firmly sets up.
7. The valve core of the invention is also provided with: the cross-sectional dimension of the connecting part is larger than that of the throttling part; the sliding part is connected with the connecting part and is in sliding fit with the through hole; by adopting the technical scheme, the valve core is ensured to be enough in strength, firm and reliable.
8. The middle channel is a first hole and a second hole which are communicated, the first hole is arranged at one end of the valve core far away from the throttling piece, and the first hole is communicated with the upstream of the valve core along the flowing direction of the cooling liquid; the second hole is perpendicular to the first hole, is arranged on the connecting part and is communicated with the downstream of the valve core along the flowing direction of the cooling liquid; by adopting the technical scheme, the middle channel is arranged on the connecting part and the sliding part with larger size, so that the valve core is ensured to be strong and firm and reliable under the condition of ensuring smooth circulation of cooling liquid.
9. The elastic piece is a spring, and the spring is sleeved on the connecting part; by adopting the technical scheme, the spring is subjected to certain force application guiding through the connecting part, so that force application deflection is prevented.
10. The throttling piece is provided with an annular flange, an annular shoulder is arranged in the through hole of the valve body, and the annular flange is in clamping connection with the annular shoulder in a propping way; by adopting the technical scheme, the installation of the throttling element is ensured to be firm and reliable.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a connection structure of a cooling system for a dry vacuum pump unit provided in an embodiment of the present invention;
fig. 2 is a schematic cross-sectional structure of a constant flow valve provided in an embodiment of the present invention.
Reference numerals illustrate:
1. a first pipeline; 2. a first three-way joint; 3. a constant flow valve; 4. a second pipeline; 5. a third pipeline; 6. a second three-way joint; 7. a fourth pipeline; 8. a fifth pipeline; 9. a valve body; 10. a closure plate; 11. a valve core; 12. an elastic member; 13. a throttle member.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
One embodiment of a cooling system for a dry vacuum pump assembly, as shown in fig. 1-2, includes: the first pipeline 1, the first three-way joint 2, the constant flow valve 3 and the second pipeline 4 which are connected in sequence, the third pipeline 5, the second three-way joint 6 and the fourth pipeline 7 which are connected in sequence, and the fifth pipeline 8 which is connected with the second three-way joint 6. The dry vacuum pump unit is a front-stage pump and a rear-stage main pump group which are sequentially connected in series. When the dry vacuum pump unit is a Roots-screw dry vacuum pump unit, the backing pump is a Roots pump, and the backing main pump is an oil-free screw vacuum pump. When the dry vacuum pump unit is a Roots-claw pump dry vacuum pump unit, the front stage pump is a Roots pump, and the rear stage main pump is a claw pump. When the dry vacuum pump unit is a Roots-multistage Roots dry vacuum pump unit, the backing pump is a backing Roots pump, and the backing main pump is a multistage Roots pump. For the dry vacuum pump unit, a motor drives a gear to rotate, and two gears which rotate relatively drive a pair of rotors of a front-stage pump to rotate respectively, so that the corresponding rotors of a rear-stage main pump are driven to rotate respectively through the pair of rotors.
As shown in fig. 1, the water inlet end of the first pipeline 1 is communicated with a first chamber, and the first chamber is a cooling liquid channel arranged near a first part of the dry vacuum pump unit; one end of the second pipeline 4 is connected with the water outlet end of the first pipeline 1 through the constant flow valve 3, the other end of the second pipeline 4 is communicated with a second cavity, and the second cavity is a cooling liquid channel which is arranged close to a second part of the dry vacuum pump unit; the first part is a bearing for installing a gear, and the second part is a motor correspondingly; or, the first part is a part of the rear-stage main pump group, and the second part is a front-stage pump. One end of the third pipeline 5 is communicated with the second chamber, the fourth pipeline 7 is connected with the other end of the third pipeline 5, and the fourth pipeline 7 is suitable for discharging the cooling liquid in the third pipeline 5; one end of the fifth pipeline 8 is connected with the fourth pipeline 7, and the other end of the fifth pipeline 8 is connected with the first pipeline 1. The first end of the first three-way joint 2 is connected with the water outlet end of the first pipeline 1, the second end of the first three-way joint 2 is connected with the constant flow valve 3, and the third end of the first three-way joint 2 is connected with the fifth pipeline 8; the first end of the second three-way joint 6 is connected with the third pipeline 5, the second end of the second three-way joint 6 is connected with the fourth pipeline 7, and the third end of the second three-way joint 6 is connected with the fifth pipeline 8. Specifically, the cooling liquid is cooling water.
As shown in fig. 2, the constant flow valve 3 includes: the valve comprises a valve body 9, a valve core 11, a throttling element 13, an elastic element 12 and a blocking plate 10, wherein the valve core 11 is connected in the valve body 9 in a sliding mode, the throttling element 13 is arranged in the valve body 9 in a clamping mode, and the elastic element 12 and the blocking plate 10 are arranged in the valve body 9. In fig. 2, arrows indicate the flow direction of the coolant, and the components are assembled in the direction indicated by the arrows.
The valve body 9 is provided with a through hole adapted to circulate a cooling liquid; the valve core 11 is connected in the through hole in a sliding way; a throttle portion, a connecting portion connected to the throttle portion, and a sliding portion connected to the connecting portion are provided on the downstream side of the valve body 11 in the coolant flow direction, the throttle portion gradually decreasing in shape from the end portion to the bottom portion, and the throttle portion is tapered in shape; the cross-sectional dimension of the connecting part is larger than that of the throttling part; the sliding part is in sliding fit with the through hole. An intermediate passage is further provided in the valve element 11, and communicates upstream and downstream of the valve element 11 in the flow direction of the coolant. The throttling piece 13 is arranged in the through hole in a clamping way, is positioned at the downstream of the valve core 11 along the flowing direction of the cooling liquid, and is provided with a throttling hole; the throttling part is suitable for sliding the valve core 11 towards the direction approaching the throttling piece 13 along with the increase of the pressure of the cooling liquid to the valve core 11, and the greater the depth of the throttling part placed in the throttling hole is; the elastic member 12 is located in the through hole, one end of the elastic member 12 abuts against the valve core 11, and the other end of the elastic member 12 abuts against the throttle member 13. The blocking plate 10 is fixedly arranged in the through hole and is positioned at the upstream of the valve core 11 along the flowing direction of the cooling fluid, a through hole is formed in the blocking plate 10, and a filter screen is arranged on the through hole. Specifically, an annular groove is provided on the inner wall of the through hole of the valve body 9, and the edge of the blocking plate 10 is embedded in the annular groove. The middle channel is a first hole and a second hole which are communicated, the first hole is arranged at one end of the valve core 11 far away from the throttling piece 13, and the first hole is communicated with the upstream of the valve core 11 along the flowing direction of the cooling liquid; the second hole is perpendicular to the first hole, and is disposed on the connection portion, and is in communication with the downstream of the valve element 11 in the direction of flow of the coolant. The elastic piece 12 is a spring, and the spring is sleeved on the connecting part; the spring is a stainless steel high-strength spring. The throttling element 13 is provided with an annular flange, an annular shoulder is arranged in the through hole of the valve body 9, and the annular flange is in butt joint with the annular shoulder to form a clamping connection arrangement.
The main working procedures of the cooling system for the dry vacuum pump unit are briefly described as follows: the cooling water is split into two paths which are connected in parallel from the first pipeline 1 through the first three-way joint 2, and one path of cooling water is connected with the cooling water in the fifth pipeline 8 through the constant flow valve 3 and the second chamber of the cooling motor at the position of the second three-way joint 6. The cooling water flow is limited by the constant flow valve 3, so that the cooling capacity of the motor end cavity or the backing pump is reduced, the motor end cavity or the backing pump is kept at a higher temperature, and the formation of temperature difference is avoided; thereby effectively improving the exhaust efficiency of the waste gas.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.

Claims (10)

1. A cooling system for a dry vacuum pump assembly, comprising:
the water inlet end of the first pipeline (1) is communicated with a first cavity, and the first cavity is a cooling liquid channel which is arranged close to a first part of the dry vacuum pump unit;
one end of the second pipeline (4) is connected with the water outlet end of the first pipeline (1) through the constant flow valve (3), and the other end of the second pipeline is communicated with a second cavity, and the second cavity is a cooling liquid channel which is arranged close to a second part of the dry vacuum pump unit; the first part is a bearing for installing a gear, and the second part is a motor correspondingly; or the first part is a rear-stage main pump group, and the second part is a front-stage pump correspondingly; the dry vacuum pump unit is a front-stage pump and a rear-stage main pump group which are sequentially connected in series;
and a third pipeline (5) with one end communicated with the second chamber, wherein the third pipeline (5) is suitable for outputting the cooling liquid in the second chamber.
2. The cooling system for a dry vacuum pump assembly of claim 1, further comprising:
a fourth pipe (7) connected to the other end of the third pipe (5), the fourth pipe (7) being adapted to discharge the coolant in the third pipe (5);
and one end of the fifth pipeline (8) is connected with the fourth pipeline (7), and the other end of the fifth pipeline is connected with the first pipeline (1).
3. The cooling system for a dry vacuum pump assembly of claim 2, further comprising:
the first end of the first three-way joint (2) is connected with the water outlet end of the first pipeline (1), the second end of the first three-way joint (2) is connected with the constant flow valve (3), and the third end of the first three-way joint (2) is connected with the fifth pipeline (8);
the first end of the second three-way joint (6) is connected with the third pipeline (5), the second end of the second three-way joint (6) is connected with the fourth pipeline (7), and the third end of the second three-way joint (6) is connected with the fifth pipeline (8).
4. A cooling system for a dry vacuum pump unit according to any of claims 1-3, characterized in that the constant flow valve (3) comprises:
a valve body (9) provided with a through hole adapted to circulate a cooling liquid;
a valve core (11) which is connected in the through hole in a sliding way; a throttle part is arranged on the downstream side of the valve core (11) along the flowing direction of the cooling liquid, and the shape of the throttle part gradually decreases from the end part to the bottom part; an intermediate channel is further arranged in the valve core (11), and the intermediate channel is communicated with the upstream and the downstream of the valve core (11) along the flowing direction of the cooling liquid;
the throttling piece (13) is arranged in the through hole in a clamping way, is positioned at the downstream of the valve core (11) along the flowing direction of the cooling liquid, and is provided with a throttling hole; the throttling part is suitable for sliding the valve core (11) towards the direction approaching the throttling piece (13) along with the increase of the pressure of the cooling liquid on the valve core (11), and the greater the depth of the throttling part placed in the throttling hole is;
and the elastic piece (12) is positioned in the through hole, one end of the elastic piece (12) is abutted against the valve core (11), and the other end of the elastic piece (12) is abutted against the throttling piece (13).
5. Cooling system for a dry vacuum pump assembly according to claim 4, characterized in that the constant flow valve (3) further comprises:
the blocking plate (10) is fixedly arranged in the through hole and is positioned at the upstream of the valve core (11) along the flowing direction of the cooling fluid, the blocking plate (10) is provided with a through hole, and the through hole is provided with a filter screen.
6. Cooling system for a dry vacuum pump unit according to claim 5, characterized in that an annular groove is provided in the inner wall of the through-hole of the valve body (9), in which groove the edge of the closure plate (10) is embedded.
7. Cooling system for a dry vacuum pump unit according to claim 4, characterized in that the valve cartridge (11) is further provided with:
the cross-sectional dimension of the connecting part is larger than that of the throttling part;
and the sliding part is connected with the connecting part and is in sliding fit with the through hole.
8. The cooling system for a dry vacuum pump unit according to claim 7, wherein the intermediate passage is a first hole and a second hole which are provided in communication, the first hole being provided at an end of the spool (11) remote from the throttle member (13), and the first hole being in communication with an upstream of the spool (11) in a flow direction of the cooling liquid; the second hole is perpendicular to the first hole, is arranged on the connecting part, and is communicated with the downstream of the valve core (11) along the flowing direction of the cooling liquid.
9. Cooling system for a dry vacuum pump assembly according to claim 7, characterized in that the elastic element (12) is a spring and the spring is sleeved on the connection.
10. Cooling system for a dry vacuum pump unit according to claim 4, characterized in that the throttle element (13) is provided with an annular flange, in the through hole of the valve body (9) an annular shoulder is provided, which annular flange is arranged by abutment with the annular shoulder into a snap-fit arrangement.
CN202310511483.0A 2023-05-08 2023-05-08 Cooling system for dry vacuum pump unit Pending CN116480589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310511483.0A CN116480589A (en) 2023-05-08 2023-05-08 Cooling system for dry vacuum pump unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310511483.0A CN116480589A (en) 2023-05-08 2023-05-08 Cooling system for dry vacuum pump unit

Publications (1)

Publication Number Publication Date
CN116480589A true CN116480589A (en) 2023-07-25

Family

ID=87213764

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310511483.0A Pending CN116480589A (en) 2023-05-08 2023-05-08 Cooling system for dry vacuum pump unit

Country Status (1)

Country Link
CN (1) CN116480589A (en)

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