CN116474636A - Blending device suitable for semiconductor high-cleanliness chemical solution - Google Patents
Blending device suitable for semiconductor high-cleanliness chemical solution Download PDFInfo
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- CN116474636A CN116474636A CN202310451936.5A CN202310451936A CN116474636A CN 116474636 A CN116474636 A CN 116474636A CN 202310451936 A CN202310451936 A CN 202310451936A CN 116474636 A CN116474636 A CN 116474636A
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- fixedly arranged
- valve
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- base
- ring
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- 239000000126 substance Substances 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000002156 mixing Methods 0.000 title claims description 6
- 239000002904 solvent Substances 0.000 claims abstract description 42
- 230000000694 effects Effects 0.000 claims abstract description 9
- 230000003749 cleanliness Effects 0.000 claims abstract description 6
- 230000007246 mechanism Effects 0.000 claims description 46
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 abstract description 48
- 239000000243 solution Substances 0.000 abstract description 41
- 238000001035 drying Methods 0.000 abstract description 27
- 239000007788 liquid Substances 0.000 abstract description 21
- 238000002360 preparation method Methods 0.000 abstract description 12
- 239000012535 impurity Substances 0.000 abstract description 8
- 239000011550 stock solution Substances 0.000 abstract description 3
- 239000010902 straw Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/10—Maintenance of mixers
- B01F35/11—Maintenance of mixers using fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/716—Feed mechanisms characterised by the relative arrangement of the containers for feeding or mixing the components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
- B08B9/0323—Arrangements specially designed for simultaneous and parallel cleaning of a plurality of conduits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2209/00—Details of machines or methods for cleaning hollow articles
- B08B2209/02—Details of apparatuses or methods for cleaning pipes or tubes
- B08B2209/027—Details of apparatuses or methods for cleaning pipes or tubes for cleaning the internal surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2209/00—Details of machines or methods for cleaning hollow articles
- B08B2209/02—Details of apparatuses or methods for cleaning pipes or tubes
- B08B2209/027—Details of apparatuses or methods for cleaning pipes or tubes for cleaning the internal surfaces
- B08B2209/032—Details of apparatuses or methods for cleaning pipes or tubes for cleaning the internal surfaces by the mechanical action of a moving fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Multiple-Way Valves (AREA)
Abstract
The invention belongs to the technical field of high-purity chemical solution preparation, and discloses a preparation device suitable for semiconductor high-purity chemical solution. According to the invention, the cleaning liquid in the first feeding pipe and the drying gas in the second feeding pipe alternately enter the inner cavity of the annular shell through the guide pipe at the front side, the relative flow speed of the cleaning liquid or the drying gas along the inner wall of the suction pipe is increased through the opposite rotation direction of the cleaning liquid or the drying gas at the other side of the inner cavity of the annular shell and the suction pipe, so that the collision force of the attachment on the inner wall of the suction pipe and the cleaning liquid or the drying gas is improved, the cleaning effect of the inner wall of the suction pipe is improved, the problems that the cleaning effect of the inner wall of the suction pipe is poor and residues are easy to occur due to the fact that the cleaning liquid in the traditional suction pipe is difficult to flow, and the problem that the residual impurities pollute the solvent stock solution and the cleanliness is reduced are solved.
Description
Technical Field
The invention belongs to the technical field of high-purity chemical solution preparation, and particularly relates to a preparation device suitable for a semiconductor high-cleanliness chemical solution.
Background
The semiconductor industry has a very high demand for high purity chemicals, wherein the solution is an essential part of the semiconductor manufacturing process, and the preparation of semiconductor high purity chemical solutions is a very important technology because high purity chemicals are required as raw materials for the production of high quality semiconductor devices. The key point of preparing the high-cleanliness chemical solution is the high purity of raw materials and the influence of external impurities, the preparation process is required to be carried out in a high-cleanliness environment such as a clean room, the preparation of the high-cleanliness chemical solution is an indispensable ring in the semiconductor manufacturing process, and the preparation method has important influence on the performance and quality of semiconductor devices.
In general, a process of preparing a semiconductor chemical solution is a process of obtaining a corresponding mixture by sucking a certain amount of solvent in a solvent tank through a suction pipe, injecting the solvent into the solvent tank, and mixing the solvent with the solution, wherein when the suction pipe sucks the solvent in the solvent tank, a part of the solvent is adhered to the outer surface of the suction pipe, when the suction pipe sucks the solvent and transfers the solvent to the solvent tank, the solvent adhered to the surface of the suction pipe reacts with chemical substances in the air, so that the chemical property of the solvent on the surface of the suction pipe is changed, and meanwhile, dust in the air is adhered, so that when the suction pipe sucks the solvent again, the solvent adhered to the suction pipe is polluted, so that the original solvent is polluted, and the performance and quality of a semiconductor device are reduced, therefore, the suction pipe needs to be cleaned, the current straw cleaning method is to place the straw that has used into the circular chamber that is equipped with the washing liquid, the mode of rethread stirring washs the straw, because straw one end diameter is little, when leading to the stirring to wash, the inside washing liquid of straw is difficult for taking place to flow, thereby lead to the straw inner wall cleaning effect poor, easily remain, the mode that makes the cleaning efficiency of straw through naturally airing after the washing simultaneously is low, thereby when leading to the suction frequency high, need prepare a large amount of straws, current cleaning equipment single cleaning efficiency is low simultaneously, it washs together again to lead to piling up after a certain amount of straws to need, because semiconductor chemical solvent is mostly organic solvent, its viscidity is strong, volatile, lead to along with the extension of settling time, chemical solvent water loss adhesion is the surface of straw again, thereby the washing degree of difficulty has been increased, lead to the straw surface to remain impurity.
Disclosure of Invention
The present invention is directed to a device for preparing a semiconductor high-cleanliness chemical solution, which solves the above-mentioned problems.
In order to achieve the above object, the present invention provides the following technical solutions: the utility model provides a blending device suitable for high cleanliness factor chemical solution of semiconductor, includes the base, the front side fixed mounting at base upper surface middle part has the solvent case, the rear side fixed mounting at base upper surface middle part has the solution case, one side of base upper surface is equipped with regulation and control mechanism, the opposite side circumference equidistance at base upper surface middle part is equipped with the multiunit backup pad, multiunit the top fixed mounting of backup pad has the ring shell, the middle part fixed mounting of ring shell has the supporting ring, the middle part sliding sleeve of supporting ring has the kicking block, the upper surface circumference equidistance fixed mounting of kicking block has the multiunit fixture block that cup joints with the supporting ring slip, the bottom fixed mounting outside the fixture block has the ring cover that cup joints with the outer curved surface sliding of supporting ring, the multiunit mounting hole has been seted up to the side circumference equidistance of ring cover, multiunit the gear shaft has all been cup jointed to the middle part of mounting hole, multiunit the middle part of rack has all slid the rack, the bottom fixed mounting of rack has the spacing ring that cup joints with the ring shell slip, a plurality of the one end of gear shaft has the fixed mounting of the valve has the ring between the valve and the lifting mechanism and the base is equipped with the suction pipe, the valve has the fixed surface mechanism that all is equipped with the suction pipe.
Preferably, the regulation and control mechanism includes the direction shell, direction shell fixed mounting is in one side of base upper surface, one side fixed mounting that the base trailing flank is close to the direction shell has first driving piece, the front end fixed mounting of first driving piece output shaft has the threaded rod, the screw thread curved surface of threaded rod is connected with the screw thread slider that cup joints with the direction shell is sliding, the middle part of direction shell is sliding cup jointed the back shaft with screw thread slider fixed connection, the top fixed mounting of back shaft has the telescopic link, the bottom fixed mounting of telescopic link has the tube axle, one side fixed mounting that the back shaft bottom is close to the ring shell has the installation piece that cup joints with the direction shell is sliding, the equal fixed mounting in bottom surface both sides of installation piece has the anchor clamps.
Preferably, the lifting mechanism comprises a driving seat, the driving seat is fixedly arranged on the front side of the middle part of the upper surface of the base, a second driving part is fixedly arranged on the top surface of the inner cavity of the driving seat, a driving gear is fixedly arranged at the bottom end of an output shaft of the second driving part, a telescopic sleeve is fixedly arranged at the middle part of the round block, a telescopic rod movably sleeved with the base is sleeved at the middle part of the telescopic sleeve in a sliding manner, and a driven gear meshed with the driving gear is fixedly arranged at the bottom of the telescopic rod.
Preferably, the valve mechanism comprises a limit sleeve, the limit sleeve is fixedly arranged at the bottom of the curved surface of the telescopic sleeve, the side surface of the limit sleeve is in sliding sleeve connection with an installation sleeve in sliding sleeve connection with the telescopic sleeve, a plurality of groups of movable sleeve-connected cranks are arranged at equal intervals on the side surface circumference of the installation sleeve, a push rod is movably sleeved at one end of the crank, which is far away from the installation sleeve, a plurality of groups of guide valve blocks are arranged at equal intervals on the circumference of the upper surface of the annular shell, and valves fixedly connected with the push rod are in sliding sleeve connection with the middle parts of two adjacent guide valve blocks.
Preferably, the reversing valve mechanism comprises a connecting rod, the connecting rod slides and sets up the middle part at two clamp posts, the connecting rod is close to the equal fixed mounting of front and back both sides of ring shell one side and has the cock stem, the front side the length of cock stem is greater than the rear side the length of cock stem, two the equal fixed mounting of one end of keeping away from the connecting rod of cock stem has the piston, the front and back bilateral symmetry fixed mounting at base upper surface middle part has the valve casing, two the piston slides and cup joints the middle part at adjacent valve casing, the cock stem slides and cup joints with adjacent valve casing, two the valve casing is close to one side of ring shell equal fixed mounting have with ring shell fixed connection's pipe, two the valve casing is kept away from one side fixed mounting that the ring shell is close to the connecting rod has first inlet pipe, two the valve casing is kept away from one side fixed mounting of ring shell has the second inlet pipe.
The beneficial effects of the invention are as follows:
1. according to the invention, the piston of the reversing valve mechanism is driven to move to one side or the other side along the inner cavity of the valve casing by the regulating mechanism, so that the cleaning liquid in the first feeding pipe and the drying gas in the second feeding pipe alternately enter the inner cavity of the annular casing through the guide pipe at the front side, the relative flow speed of the cleaning liquid or the drying gas along the inner wall of the suction pipe is increased by the opposite rotation direction of the cleaning liquid or the drying gas at the other side of the inner cavity of the annular casing and the suction pipe, the collision force of the attachment of the inner wall of the suction pipe and the cleaning liquid or the drying gas is increased, the cleaning effect of the inner wall of the suction pipe is improved, the problems that the cleaning liquid in the traditional suction pipe is difficult to flow, the cleaning effect of the inner wall of the suction pipe is poor and residues are easy to occur are solved, and the problem that the residual impurities pollute the solvent stock solution and the cleanliness is reduced is solved.
2. According to the invention, the lifting mechanism is arranged, the telescopic sleeve of the lifting mechanism moves upwards, the valve on the valve mechanism is driven by the telescopic sleeve to move outwards along the guide valve blocks, the upward moving telescopic sleeve drives the round blocks to move upwards, the round blocks sequentially pass through the clamping blocks, the annular sleeve, the gear shafts and the fixed sleeves to drive the suction pipes to pass through the middle gaps of the two guide valve blocks to move upwards, meanwhile, the gear racks force the upward moving gear shafts to rotate clockwise, the gear shafts drive the suction pipes to rotate clockwise through the fixed sleeves, the tips of the suction pipes are enabled to be vertical to the upper surface of the base, finally, after the suction pipes are replaced and driven by the regulating mechanism to suck solvent from the inner cavity of the solvent tank on the front side, the suction pipes after sucking the solvent are moved to the upper side of the solution tank on the rear side, finally, the solvent is injected into the solution tank, so that the preparation of chemical solution is realized, and simultaneously, the continuous alternate cleaning and drying of the suction pipes are realized, the cleaning and drying efficiency is improved, and the problems that a large amount of overlong and the rest time are needed to cause the chemical solution to be dehydrated and adhered to the surface of the suction pipes are increased, the cleaning difficulty is caused, the suction pipes are caused, the residual impurities are finally, the residual impurities are caused, and the purity is reduced.
Drawings
FIG. 1 is a schematic view of the overall appearance of the structure of the present invention;
FIG. 2 is a schematic view of a structural support ring of the present invention;
FIG. 3 is a schematic view of a gear shaft of the present invention;
FIG. 4 is a schematic diagram of a control mechanism according to the present invention;
FIG. 5 is a schematic view of a lifting mechanism according to the present invention;
FIG. 6 is a schematic view of a suction tube constructed in accordance with the present invention;
FIG. 7 is a schematic view of a valve mechanism of the present invention;
FIG. 8 is a schematic view of a structural collar of the present invention;
fig. 9 is a schematic view of a structural stop collar of the present invention.
In the figure: 1. a base; 201. a solvent tank; 202. a solution tank; 3. a regulating mechanism; 301. a first driving member; 302. a threaded rod; 303. a thread slider; 304. a support shaft; 305. a telescopic rod; 306. a tube shaft; 307. a guide housing; 308. a mounting block; 309. a clamping column; 4. a support plate; 5. a ring shell; 6. a support ring; 7. round blocks; 8. a clamping block; 9. a ring sleeve; 901. a mounting hole; 902. a mounting groove; 10. a gear shaft; 11. a rack; 12. a limiting ring; 13. a fixed sleeve; 14. a suction pipe; 15. a lifting and rotating mechanism; 1501. a driving seat; 1502. a second driving member; 1503. a drive gear; 1504. a driven gear; 1505. a telescopic rod; 1506. a telescopic sleeve; 16. a valve mechanism; 1601. a limit sleeve; 1602. a mounting sleeve; 1603. a crank; 1604. a push rod; 1605. a valve; 1606. a pilot valve block; 17. a reversing valve mechanism; 1701. a connecting rod; 1702. a plug rod; 1703. a piston; 1704. a valve housing; 1705. a conduit; 1706. a first feed tube; 1707. and a second feed tube.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1 to 9, the embodiment of the invention provides a blending device suitable for semiconductor high-cleanliness chemical solution, which comprises a base 1, wherein a solvent tank 201 is fixedly arranged at the front side of the middle part of the upper surface of the base 1, a solution tank 202 is fixedly arranged at the rear side of the middle part of the upper surface of the base 1, a regulating mechanism 3 is arranged at one side of the upper surface of the base 1, a plurality of groups of support plates 4 are equidistantly arranged on the circumference of the other side of the middle part of the upper surface of the base 1, a ring shell 5 is fixedly arranged at the top end of the plurality of groups of support plates 4, a support ring 6 is fixedly arranged at the middle part of the ring shell 5, a round block 7 is sleeved at the middle part of the support ring 6 in a sliding manner, a plurality of groups of clamping blocks 8 sleeved with the support ring 6 in a sliding manner are fixedly arranged at the bottom end of the outer side of the clamping blocks 8, a plurality of groups of mounting holes 901 are equidistantly arranged on the circumference of the outer side surface of the ring 9, a plurality of groups of mounting grooves 902 are formed in the circumference of the upper surface of the ring sleeve 9 at equal intervals, gear shafts 10 are movably sleeved at the middle parts of the plurality of groups of mounting holes 901, racks 11 are slidably sleeved at the middle parts of the plurality of groups of mounting grooves 902, limiting rings 12 which are slidably sleeved with the ring shell 5 are fixedly arranged at the bottom ends of the racks 11, fixed sleeves 13 are fixedly arranged at one ends of the plurality of gear shafts 10 far away from the supporting rings 6, suction pipes 14 are arranged at the middle parts of the plurality of fixed sleeves 13, a lifting mechanism 15 is arranged between the middle part of the round block 7 and the upper surface of the base 1, a valve mechanism 16 is arranged between the lifting mechanism 15 and the upper surface of the ring shell 5, reversing valve mechanisms 17 connected with the regulating mechanism 3 and the ring shell 5 are arranged at the front side and the rear side of the upper surface of the base 1, wherein the limiting rings 12 are used for limiting the up-down displacement of the racks 11, and the contact surfaces of the supporting rings 6, the round block 7, the clamping blocks 8 and the ring sleeve 9 are smooth surfaces, thereby reduce the frictional resistance when circle piece 7, fixture block 8 and ring cover 9 reciprocate and rotate along the curved surface of supporting ring 6, avoid supporting ring 6, circle piece 7, fixture block 8 and ring cover 9 friction heat production to lead to the shape to take place sharp change, improve supporting ring 6, circle piece 7, fixture block 8 and ring cover 9 life, reduce the load of second driving piece 1502 simultaneously.
As shown in fig. 1 and 4, the regulating mechanism 3 comprises a guide shell 307, the guide shell 307 is fixedly arranged on one side of the upper surface of the base 1, a first driving piece 301 is fixedly arranged on one side of the rear side of the base 1 close to the guide shell 307, a threaded rod 302 is fixedly arranged at the front end of an output shaft of the first driving piece 301, a threaded sliding block 303 which is in sliding sleeve connection with the guide shell 307 is connected with a thread curved surface of the threaded rod 302, a supporting shaft 304 which is fixedly connected with the threaded sliding block 303 is in sliding sleeve connection with the middle part of the guide shell 307, a telescopic rod 305 is fixedly arranged at the top end of the supporting shaft 304, a tube shaft 306 is fixedly arranged at the bottom end of the telescopic rod 305, a mounting block 308 which is in sliding sleeve connection with the guide shell 307 is fixedly arranged on one side of the bottom of the supporting shaft 304 close to the ring shell 5, clamping columns 309 are fixedly arranged on two sides of the bottom surface of the mounting block 308, wherein the clamping columns 309 are cylindrical, so that the contact between the clamping columns 309 and a connecting rod 1701 is in linear contact, so as to avoid clamping when the clamping post 309 moves to the corner of the connecting rod 1701, the clamping post 309 contacts with the upper part of the side surface of the connecting rod 1701, the plug rod 1702 is fixedly arranged at the lower part of the side surface of the connecting rod 1701, so that the clamping post 309 cannot move along the connecting rod 1701 due to collision with the plug rod 1702 when the clamping post 309 moves along the connecting rod 1701, when in use, the first driving piece 301 drives the thread slider 303 to move to the middle of the guide shell 307 through the threaded rod 302, the thread slider 303 drives the tube shaft 306 to move to the position right above the annular shell 5 through the supporting shaft 304 and the telescopic rod 305, the tube shaft 306 is started, the tube shaft 306 firstly moves downwards to clamp the suction tube 14, then drives the suction tube 14 to move upwards to be separated from the fixed sleeve 13, then the first driving piece 301 is started, the first driving piece 301 rotates positively, the output shaft of the first driving piece 301 drives the threaded rod 302 to rotate positively, the threaded rod 302 drives the thread slider 303 to move forwards, the screw slider 303 drives the supporting shaft 304 to move forward, the supporting shaft 304 drives the telescopic rod 305 to move forward, the telescopic rod 305 drives the tube shaft 306 to move forward, the tube shaft 306 drives the suction tube 14 to move to the upper part of the solvent tank 201, after sucking solvent into the solvent tank 201, the first driving member 301 is reversed, the first driving member 301 drives the suction tube 14 to move to the upper part of the solution tank 202 through the threaded rod 302, the screw slider 303, the supporting shaft 304, the telescopic rod 305 and the tube shaft 306, the solvent is extruded into the solution tank 202 to mix the solvent and the solution, then the first driving member 301 rotates forward, the first driving member 301 drives the suction tube 14 to move forward to the upper part of the ring shell 5 through the threaded rod 302, the screw slider 303, the supporting shaft 304, the telescopic rod 305 and the tube shaft 306, the suction tube 14 after being used is placed in the middle part of the fixed sleeve 13, and simultaneously the suction tube 14 after being cleaned and dried is extracted from the other fixed sleeve 13.
As shown in fig. 6 to 7 and 9, the lifting mechanism 15 includes a driving seat 1501, the driving seat 1501 is fixedly mounted on the front side of the middle of the upper surface of the base 1, a second driving member 1502 is fixedly mounted on the top surface of the inner cavity of the driving seat 1501, a driving gear 1503 is fixedly mounted at the bottom end of the output shaft of the second driving member 1502, a telescopic sleeve 1506 is fixedly mounted in the middle of the round block 7, a telescopic rod 1505 movably sleeved with the base 1 is slidingly sleeved in the middle of the telescopic sleeve 1506, a driven gear 1504 meshed with the driving gear 1503 is fixedly mounted at the bottom of the telescopic rod 1505, a plurality of groups of vertical guide strips are formed on the circumference of the side surface of the telescopic sleeve 1505 at equal intervals, a plurality of groups of guide grooves are formed on the circumference of the inner side surface of the telescopic sleeve 1506 at equal intervals, and are slidingly sleeved in the guide grooves, so that the telescopic sleeve 1506 can be driven to rotate along the side surface of the telescopic sleeve 1506, and simultaneously the telescopic sleeve 1506 can also move up and down along the telescopic sleeve 1505.
As shown in fig. 6 to 7 and 9, the valve mechanism 16 comprises a stop collar 1601, the stop collar 1601 is fixedly installed at the bottom of the curved surface of the telescopic collar 1506, a mounting sleeve 1602 is slidably sleeved on the side surface of the stop collar 1601, a plurality of groups of movable sleeved cranks 1603 are equidistantly arranged on the side surface circumference of the mounting sleeve 1602, one end of each crank 1603 far away from the mounting sleeve 1602 is movably sleeved with a push rod 1604, a plurality of groups of guide valve blocks 1606 are equidistantly arranged on the circumference of the upper surface of the annular shell 5, the middle parts of two adjacent guide valve blocks 1606 are slidably sleeved with a valve 1605 fixedly connected with the push rod 1604, wherein the stop collar 1601 is enabled to drive the stop collar 1601 to move up and down and rotate through the setting of the stop collar 1601, the stop collar 1601 can only be enabled to drive the mounting sleeve 1602 to rotate, when the telescopic collar 1601 on the ascending mechanism 15 is enabled to drive the stop collar 1601 to move up, the mounting sleeve 1601 is enabled to drive the mounting sleeve 1601 to move up, the crank 1603 is enabled to push the push rod 1605 to move along the guide valve blocks to move outwards, the guide valve blocks are enabled to move outwards through the guide rings 1605, and the guide rings 1605 are enabled to move along the guide rings 1606 are enabled to move along the opening direction of the guide rings 1606, the inner side of the guide rings can be enabled to move along the guide rings 1605, and the inner side of the guide rings can be opened, and the guide valve blocks can be opened, and the guide valve can be opened.
As shown in fig. 1 and 4, the reversing valve mechanism 17 includes a connecting rod 1701, the connecting rod 1701 is slidably disposed in the middle of two clamp posts 309, plugs 1702 are fixedly mounted on both front and rear sides of one side of the connecting rod 1701 close to the annular shell 5, the length of the front side plug 1702 is longer than that of the rear side plug 1702, pistons 1703 are fixedly mounted on one ends of the two plugs 1702, which are far from the connecting rod 1701, valve casings 1704 are symmetrically mounted on both front and rear sides of the middle of the upper surface of the base 1, the two pistons 1703 are slidably sleeved in the middle of the adjacent valve casings 1704, the plugs 1702 are slidably sleeved with the adjacent valve casings 1704, a guide pipe 1705 fixedly connected with the annular shell 5 is fixedly mounted on one sides of the two valve casings 1704 close to the annular shell 5, a first feed pipe 1706 is fixedly mounted on one side of the two valve casings 1704, which is far from the annular shell 5, a second feed pipe 1707 is fixedly mounted on one side of the two valve casings 1704, which is far from the annular shell 5, the first feeding pipe 1706 is connected with a device for supplying cleaning liquid outside the device, the second feeding pipe 1707 is connected with a device for supplying drying gas outside the device, meanwhile, the cleaning liquid and the drying gas are chemical substances which do not react with solvent solution, the contact surface of the piston 1703 and the valve casing 1704 is smooth plane, so that the cleaning liquid or the drying gas is prevented from flowing out of the contact surface of the piston 1703 and the valve casing 1704, the length of the piston 1703 is one third of the length of the valve casing 1704, the alternating opening and closing of the guide pipe 1705, the first feeding pipe 1706 and the second feeding pipe 1707 are realized, the cleaning liquid or the drying gas is alternately flowed into the cavity of the annular shell 5 to clean the suction pipe 14, when the cleaning liquid and the drying gas are required to flow at a speed which is higher than the linear speed when the suction pipe 14 rotates, so that the cleaning liquid and the drying gas can clean and dry the suction pipe 14 normally when the cleaning liquid and the drying gas are used, when the screw slider 303 is positioned at the forefront side of the guide shell 307, at this time, the cleaning solution inside the first feeding pipe 1706 sequentially passes through the front side valve casing 1704, the front side conduit 1705 and the inner cavity of the ring shell 5, the rear side conduit 1705 and the rear side valve casing 1704 flow out from the rear side first feeding pipe 1706, so that cleaning treatment is realized on the suction pipe 14 inside the ring shell 5, when the screw slider 303 drives the clamp column 309 to move to the middle of the guide shell 307 through the supporting shaft 304 and the mounting block 308, the clamp column 309 drives the connecting rod 1701 to move towards the direction of the guide shell 307, the connecting rod 1701 drives the piston 1703 to move to the middle of the valve casing 1704 through the plug rod 1702, at this time, the cleaning solution and the drying gas stop flowing, at this time, after the pipe shaft 306 is placed on the suction pipe 14 and the new suction pipe 14 clamped, the screw slider 303 then moves to the rear side, when the clamp column 309 drives the connecting rod 1701 to move to the rear side through the supporting shaft 304 and the mounting block 308, the connecting rod 1701 moves to the direction away from the guide shell 307, and the drying gas in the inner cavity of the front side second 1707 sequentially passes through the front side valve casing 1704, the front side conduit 5 and the inner cavity of the guide shell 307, the rear side conduit 1707 and the inner cavity of the suction pipe 1707 is sequentially dried, so that drying treatment is realized on the suction pipe and the inner cavity is realized.
Working principle and using flow:
when the device is used, first, the first driving piece 301 drives the thread sliding block 303 to move to the middle of the guide shell 307 through the threaded rod 302, and the thread sliding block 303 drives the pipe shaft 306 to move to the position right above the ring shell 5 through the supporting shaft 304 and the telescopic rod 305. Starting the lifting mechanism 15, the telescopic sleeve 1506 on the lifting mechanism 15 moves upwards along the telescopic rod 1505, the telescopic sleeve 1506 drives the limiting sleeve 1601 to move upwards, the limiting sleeve 1601 drives the mounting sleeve 1602 to move upwards, the mounting sleeve 1602 drives the crank 1603 to move upwards, the crank 1603 pushes the push rod 1604 to move outwards, the push rod 1604 drives the valve 1605 to move outwards along the guide valve blocks 1606, and the opening between the two adjacent guide valve blocks 1606 is opened, so that preparation is made for the suction pipe 14 to move to the upper part of the inner cavity of the annular shell 5.
Then, the telescopic sleeve 1506 moves upwards to drive the round block 7 to move upwards along the inner side of the supporting ring 6, the round block 7 drives the clamping block 8 to move upwards, the clamping block 8 drives the annular sleeve 9 to move upwards, the annular sleeve 9 drives the gear shaft 10 to move upwards along the rack 11, at the moment, the gear shaft 10 rotates clockwise under the action of the rack 11, the gear shaft 10 drives the fixing sleeve 13 to move upwards and rotate clockwise, the fixing sleeve 13 drives the suction pipe 14 to move upwards and rotate clockwise, the suction pipe 14 passes through the middle openings of the two adjacent guide valve blocks 1606 and the central axis of the suction pipe 14 is perpendicular to the upper surface of the base 1, and thus preparation is made for replacing the suction pipe 14 by the regulating mechanism 3.
Then, after the tube shaft 306 stretches downward to replace the suction tube 14, the telescopic sleeve 1506 on the lifting mechanism 15 moves downward along the telescopic rod 1505, so that the suction tube 14 which is not clamped by the tube shaft 306 returns to the inner cavity of the ring shell 5 again, and meanwhile, the telescopic sleeve 1506 drives the valve 1605 on the valve mechanism 16 to move inward along the guide valve blocks 1606, so that the openings in the middle of the two adjacent guide valve blocks 1606 are closed, and the inner cavity of the ring shell 5 is closed, so that preparation is made for subsequent cleaning liquid and drying gas flowing.
And then the second driving member 1502 is started, the second driving member 1502 drives the driving gear 1503 to rotate clockwise, the driving gear 1503 drives the driven gear 1504 to rotate clockwise, the driven gear 1504 drives the telescopic rod 1505 to rotate clockwise, the telescopic rod 1505 drives the telescopic sleeve 1506 to rotate clockwise, the telescopic sleeve 1506 drives the round block 7 to rotate clockwise, the round block 7 drives the clamping block 8 to rotate clockwise, the clamping block 8 drives the annular sleeve 9 to rotate clockwise, the annular sleeve 9 drives the gear shaft 10 to rotate clockwise, the gear shaft 10 drives the fixing sleeve 13 to rotate clockwise, and the fixing sleeve 13 drives the suction pipe 14 to rotate clockwise around the inner cavity of the annular shell 5.
Then the first driving piece 301 is started, the first driving piece 301 rotates positively, the output shaft of the first driving piece 301 drives the threaded rod 302 to rotate positively, the threaded rod 302 drives the threaded slider 303 to move forward, the threaded slider 303 drives the supporting shaft 304 to move forward, the supporting shaft 304 drives the telescopic rod 305 to move forward, the telescopic rod 305 drives the pipe shaft 306 to move forward, the pipe shaft 306 drives the suction pipe 14 to move above the front solvent tank 201, after the solvent is sucked into the solvent tank 201, the threaded slider 303 drives the supporting shaft 304 to move forward, the supporting shaft 304 drives the mounting block 308 to move forward, the mounting block 308 drives the clamp post 309 to move forward, the clamp post 309 pushes the connecting rod 1701 to move away from the guide shell 307, the connecting rod 1701 pushes the plug rod 1702 to move away from the guide shell 307, the plug rod 1702 pushes the piston 1703 in the middle of the valve housing 1704 to move away from the guide shell 307, at this time, the valve port of the conduit 1705 is opened, the cleaning solution in the first feeding pipe 1706 sequentially passes through the front side valve casing 1704 and the front side conduit 1705 to enter the inner cavity of the annular casing 5, the cleaning solution flowing into the inner cavity of the annular casing 5 rotates clockwise at one side of the inner cavity of the annular casing, the other side of the inner cavity of the annular casing 5 rotates anticlockwise, and then flows out from the rear side first feeding pipe 1706 after sequentially passing through the rear side conduit 1705 and the rear side valve casing 1704, the cleaning solution flowing reversely from the clock at the other side of the inner cavity of the annular casing flows out from the tip opening of the suction pipe along the large end of the suction pipe rotating clockwise, the relative flowing speed of the cleaning solution along the inner wall of the suction pipe is regulated by the opposite rotating direction of the cleaning solution in the inner cavity of the annular casing and the suction pipe, so that the collision force of the attachment of the inner wall of the suction pipe and the cleaning solution is improved, the cleaning effect of the inner wall of the suction pipe is improved, and the problem that the cleaning solution in the traditional suction pipe is difficult to flow is solved, thereby causing the problems of poor cleaning effect and easy residue of the inner wall of the suction pipe, and further ensuring that the chemical solution is preserved with high cleanliness.
The first driving member 301 is reversed, the first driving member 301 drives the suction pipe 14 to move to the upper part of the rear solution tank 202 through the threaded rod 302, the threaded slider 303, the supporting shaft 304, the telescopic rod 305 and the pipe shaft 306, the solvent is extruded into the solution tank 202, the solvent is mixed with the solution, and the chemical solution is prepared, meanwhile, the reversed first driving member 301 pulls the connecting rod 1701 to move towards the direction of the guide shell 307 through the threaded rod 302, the threaded slider 303, the supporting shaft 304, the mounting block 308 and the clamping column 309, the connecting rod 1701 pushes the plug rod 1702 to move towards the direction of the guide shell 307, the plug rod 1702 pulls the piston 1703 to move towards the direction of the guide shell 307, when the supporting shaft 304 moves to the rear side beyond the middle of the guide shell 307, the first feeding pipe 1706 is closed, the cleaning liquid stops flowing at the moment, the second feeding pipe 1707 is opened, the drying gas in the second feeding pipe 1707 sequentially passes through the front side valve casing 1704, the front side conduit 1705 and the inner cavity of the annular shell 5, and the rear side conduit 1705 and the rear side valve casing 1704 flow out from the rear side second feeding pipe 1707, so that the drying treatment of the suction pipe 14 after cleaning in the annular shell 5 is realized, the drying efficiency of the suction pipe 14 is further improved, when the solvent is mixed with the solution, the first driving member 301 rotates positively again, the first driving member 301 drives the suction pipe 14 to move to the upper side of the annular shell 5 through the threaded rod 302, the threaded sliding block 303, the supporting shaft 304, the telescopic rod 305 and the pipe shaft 306, the pipe shaft 306 places the used suction pipe 14 in the middle of the fixed sleeve 13, simultaneously extracts a new suction pipe 14 after cleaning and drying treatment from the other fixed sleeve 13, realizes continuous alternate cleaning and drying of the suction pipe 14, improves the cleaning and drying efficiency, avoids the need of preparing a large amount of suction pipes 14 and overlong rest time, causing the chemical solvent to be dehydrated and adhered to the surface of the suction pipe 14, thereby increasing the cleaning difficulty, resulting in residual impurities on the surface of the suction pipe 14, and finally resulting in the problem of reduced cleanliness due to the pollution of the solvent stock solution by the residual impurities.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a blending device suitable for semiconductor high cleanliness factor chemical solution, includes base (1), the front side fixed mounting at base (1) upper surface middle part has solvent tank (201), the rear side fixed mounting at base (1) upper surface middle part has solution tank (202), its characterized in that: one side of base (1) upper surface is equipped with regulation and control mechanism (3), the opposite side circumference equidistance in base (1) upper surface middle part is equipped with multiunit backup pad (4), multiunit the top fixed mounting of backup pad (4) has ring shell (5), the middle part fixed mounting of ring shell (5) has backup ring (6), the middle part of backup ring (6) has slided and has cup jointed round block (7), the upper surface circumference equidistance fixed mounting of round block (7) has multiunit fixture block (8) that slide cup joint with backup ring (6), the bottom fixed mounting in fixture block (8) outside has ring cover (9) that slide cup joint with backup ring (6) outer curved surface, multiunit mounting hole (901) have been seted up to the lateral surface circumference equidistance of ring cover (9), multiunit mounting groove (902) have been seted up to the upper surface circumference equidistance of ring cover (9), multiunit the middle part of mounting hole (901) has all movably cup jointed gear shaft (10), the middle part of multiunit gear shaft (902) has slided and cup jointed rack (11), the bottom fixed mounting of rack (11) has fixed mounting and ring shell (6) to slide cup joint with backup ring (6) and have fixed suction pipe (13) that one end (13) is kept away from, a lifting mechanism (15) is arranged between the middle part of the round block (7) and the upper surface of the base (1), a valve mechanism (16) is arranged between the lifting mechanism (15) and the upper surface of the annular shell (5), and reversing valve mechanisms (17) connected with the regulating mechanism (3) and the annular shell (5) are arranged on the front side and the rear side of the upper surface of the base (1).
2. The apparatus for preparing a semiconductor highly-clean chemical solution according to claim 1, wherein: the regulating mechanism (3) comprises a guide shell (307), the guide shell (307) is fixedly arranged on one side of the upper surface of the base (1), a first driving part (301) is fixedly arranged on one side, close to the guide shell (307), of the rear side of the base (1), a threaded rod (302) is fixedly arranged at the front end of an output shaft of the first driving part (301), a threaded sliding block (303) in sliding sleeve connection with the guide shell (307) is connected to a threaded curved surface of the threaded rod (302), a supporting shaft (304) in sliding sleeve connection with the threaded sliding block (303) is fixedly arranged at the middle part of the guide shell (307), a telescopic rod (305) is fixedly arranged at the top end of the supporting shaft (304), a tube shaft (306) is fixedly arranged at the bottom end of the telescopic rod (305), a mounting block (308) in sliding sleeve connection with the guide shell (307) is fixedly arranged on one side, and two sides of the bottom surface of the mounting block (308) are fixedly provided with clamping columns (309).
3. The apparatus for preparing a semiconductor highly-clean chemical solution according to claim 1, wherein: the lifting mechanism (15) comprises a driving seat (1501), the driving seat (1501) is fixedly arranged on the front side of the middle part of the upper surface of the base (1), a second driving part (1502) is fixedly arranged on the top surface of an inner cavity of the driving seat (1501), a driving gear (1503) is fixedly arranged at the bottom end of an output shaft of the second driving part (1502), a telescopic sleeve (1506) is fixedly arranged in the middle of the round block (7), a telescopic rod (1505) movably sleeved with the base (1) is sleeved in the middle of the telescopic sleeve (1506) in a sliding mode, and a driven gear (1504) meshed with the driving gear (1503) is fixedly arranged at the bottom of the telescopic rod (1505).
4. A dispensing apparatus for semiconductor high purity chemical solutions according to claim 3, wherein: valve mechanism (16) are including stop collar (1601), stop collar (1601) fixed mounting is in the bottom of flexible cover (1506) curved surface, the side slip of stop collar (1601) has cup jointed installation cover (1602) that cup jointed with flexible cover (1506) slip, the side circumference equidistance of installation cover (1602) is equipped with crank (1603) that multiunit activity cup jointed, push rod (1604) has been cup jointed in the activity of the one end that installation cover (1602) was kept away from to crank (1603), ring shell (5) upper surface circumference equidistance is equipped with multiunit direction valve piece (1606), and valve (1605) with push rod (1604) fixed connection have been cup jointed in the middle part of two adjacent direction valve pieces (1606) slip.
5. A dispensing apparatus for semiconductor high purity chemical solutions according to claim 2, wherein: the reversing valve mechanism (17) comprises a connecting rod (1701), the connecting rod (1701) is slidably arranged in the middle of two clamp columns (309), plugs (1702) are fixedly arranged on the front side and the rear side of one side, close to the annular shell (5), of the connecting rod (1701), the length of each plug (1702) is larger than that of the corresponding plug (1702), pistons (1703) are fixedly arranged at one ends, far away from the connecting rod (1701), of the corresponding plugs (1702), valve casings (1704) are symmetrically fixedly arranged on the front side and the rear side of the upper surface middle of the base (1), the two pistons (1703) are slidably sleeved in the middle of the adjacent valve casings (1704), the corresponding plugs (1702) are slidably sleeved with the adjacent valve casings (1704), guide pipes (1705) are fixedly arranged on one sides, close to the annular shells (5), of the two valve casings (1704), close to one sides, close to the connecting rod (1701), of the corresponding valve casings (1704), and the first valve casings (1706) are fixedly arranged on one sides, close to the annular shells (5), and the second valve casings (1704) are fixedly arranged on the sides, and the first valve casings (1706) are fixedly arranged on the sides, and the second valve casings (1704) far away from the feed pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310451936.5A CN116474636A (en) | 2023-04-25 | 2023-04-25 | Blending device suitable for semiconductor high-cleanliness chemical solution |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310451936.5A CN116474636A (en) | 2023-04-25 | 2023-04-25 | Blending device suitable for semiconductor high-cleanliness chemical solution |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117244453A (en) * | 2023-10-13 | 2023-12-19 | 河北高耐泵业有限公司 | Mixer for producing ceramic slurry pump |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117244453A (en) * | 2023-10-13 | 2023-12-19 | 河北高耐泵业有限公司 | Mixer for producing ceramic slurry pump |
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