CN116465213A - Safe connection method for epitaxial tail gas treatment - Google Patents
Safe connection method for epitaxial tail gas treatment Download PDFInfo
- Publication number
- CN116465213A CN116465213A CN202310385506.8A CN202310385506A CN116465213A CN 116465213 A CN116465213 A CN 116465213A CN 202310385506 A CN202310385506 A CN 202310385506A CN 116465213 A CN116465213 A CN 116465213A
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- China
- Prior art keywords
- epitaxial
- equipment
- combustion
- water washing
- tail gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000002485 combustion reaction Methods 0.000 claims abstract description 58
- 238000005406 washing Methods 0.000 claims abstract description 44
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 39
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000002159 abnormal effect Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000002253 acid Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- VNFVKWMKVDOSKT-LREBCSMRSA-N (2r,3r)-2,3-dihydroxybutanedioic acid;piperazine Chemical compound C1CNCCN1.OC(=O)[C@H](O)[C@@H](O)C(O)=O VNFVKWMKVDOSKT-LREBCSMRSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010517 secondary reaction Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/008—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases cleaning gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/02—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
Abstract
The invention discloses a safe connection method for epitaxial tail gas treatment, which comprises the following steps: s1, firstly, an epitaxial furnace, combustion equipment and water washing equipment in an epitaxial machine table are respectively connected and communicated in real time through corresponding pipelines, then equipment can be started to perform real-time operation processing, and tail gas generated by the epitaxial furnace is led into the water washing equipment for processing in the epitaxial processing process. S2, after the water washing treatment is finished, tail gas is led into the combustion equipment to be combusted, so that gas from the water washing equipment normally enters the combustion cavity of the water washing equipment to be combusted, and abnormal flameout occurs in the combustion cavity of the water washing equipment. According to the invention, through the establishment of the backup connecting pipeline of the adjacent combustion equipment, when abnormal flameout occurs in the self combustion equipment, the generated tail gas can enter the adjacent combustion equipment for combustion, so that the potential safety hazard in the process is effectively eliminated, and the overall safety of the process production is improved.
Description
Technical Field
The invention relates to the technical field of epitaxial processing, in particular to a safe connection method for epitaxial tail gas treatment.
Background
The epitaxial process comprises the following steps: the technological process of the epitaxial furnace comprises the steps of taking H2, TCS, HCL, B2H6 and PH3 into chemical reaction, treating the generated tail gas through a water washing device, absorbing the tail gas which is easy to dissolve in water (TCS, HCL, B2H6 and PH 3), wherein the tail gas discharged from the water washing device is mainly H2 which is not easy to dissolve, the content of the H2 is 99%, and the tail gas is discharged through an acid discharge pipe after being burnt by a combustion device.
At present, in the process of carrying out an epitaxial processing technology, the phenomenon that abnormal flameout of combustion equipment can not occur is unavoidable, and H2 generated in an epitaxial furnace can directly enter an acid bar, so that potential safety hazards exist in the process.
Disclosure of Invention
The invention aims to provide a safe connection method for epitaxial tail gas treatment, which is used for connecting the problem that the abnormal flameout phenomenon of combustion equipment cannot be avoided in the process of carrying out epitaxial processing technology in the prior art, and H2 generated in an epitaxial furnace directly enters an acid bank, so that potential safety hazards exist in the process.
In order to achieve the above purpose, the present invention provides the following technical solutions: the connection method for the epitaxial tail gas treatment safety comprises the following steps:
s1, firstly, an epitaxial furnace, combustion equipment and water washing equipment in an epitaxial machine table are respectively connected and communicated in real time through corresponding pipelines, then equipment can be started to perform real-time operation processing, and tail gas generated by the epitaxial furnace is led into the water washing equipment for processing in the epitaxial processing process. S2, after the water washing treatment is finished, tail gas is led into the combustion equipment to be combusted, so that gas coming out of the water washing equipment normally enters the combustion cavity of the water washing equipment to be combusted, when the combustion cavity of the water washing equipment is abnormally flameout, a backup pipeline can be switched to enter the combustion cavity of an adjacent machine to be combusted.
Preferably, the epitaxial machine station comprises 2 independent epitaxial furnaces, and each epitaxial furnace is processed by respective washing equipment.
Preferably, the number of the combustion apparatuses is set to 2, and one combustion apparatus has a total of 3 inlet ports, and each inlet port is a three-way valve.
Compared with the prior art, the invention has the beneficial effects that: according to the invention, through the establishment of the backup connecting pipeline of the adjacent combustion equipment, when abnormal flameout occurs in the self combustion equipment, the generated tail gas can enter the adjacent combustion equipment for combustion, so that the potential safety hazard in the process is effectively eliminated, and the overall safety of the process production is greatly improved.
Drawings
FIG. 1 is a schematic diagram of a system piping connection according to the present invention;
in the figure, 1, an epitaxial machine; 2. an epitaxial furnace; 3. a connecting pipeline; 4. washing equipment; 5. backup pipe rate; 6. a combustion apparatus.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Embodiment one:
referring to fig. 1, the method of connection of the present embodiment includes the following steps:
the connection method for the epitaxial tail gas treatment safety comprises the following steps:
s1, firstly, an epitaxial furnace, combustion equipment and water washing equipment in an epitaxial machine table are respectively connected and communicated in real time through corresponding pipelines, then equipment can be started to perform real-time operation processing, and in the epitaxial processing process, harmful substances in tail gas can be subjected to real-time treatment and filtration by guiding the tail gas generated by the epitaxial furnace into the water washing equipment for treatment, so that the purity of the tail gas is improved. S2, after the water washing treatment is finished, the tail gas is led into the combustion equipment to be combusted, so that the gas coming out of the water washing equipment normally enters the combustion cavity of the water washing equipment to be combusted, when the combustion cavity of the water washing equipment is abnormally flameout, the backup pipeline can be switched to enter the combustion cavity of the adjacent machine to be combusted, the harmful substances in the tail gas are subjected to secondary reaction treatment, and the tail gas is further purified.
In this embodiment, include 2 independent epitaxial furnaces in the epitaxial board, and every epitaxial furnace is handled through respective washing equipment, and adjacent combustion equipment replaces the establishment of connecting line, has realized that self combustion equipment appears when unusual flameout, and the tail gas that produces can enter into adjacent combustion equipment and burn, has eliminated the potential safety hazard.
In this embodiment, the quantity of combustion apparatus sets up to 2, and a combustion apparatus has 3 inlet ports altogether simultaneously, and every inlet port all is the three-way valve, can conveniently carry out the switching of pipeline direction in real time, can not in time dredge when avoiding single pipeline to cause the jam, influences the effect that tail gas led.
Embodiment two:
the distinguishing features from the first embodiment are that:
the method of connection of the present embodiment includes the steps of:
the connection method for the epitaxial tail gas treatment safety comprises the following steps:
s1, firstly, an epitaxial furnace, combustion equipment and water washing equipment in an epitaxial machine table are respectively connected and communicated in real time through corresponding pipelines, then equipment can be started to perform real-time operation processing, and tail gas generated by the epitaxial furnace is led into the water washing equipment for processing in the epitaxial processing process. S2, after the water washing treatment is finished, tail gas is led into the combustion equipment to be combusted, so that gas coming out of the water washing equipment normally enters the combustion cavity of the water washing equipment to be combusted, when the combustion cavity of the water washing equipment is abnormally flameout, a backup pipeline can be switched to enter the combustion cavity of an adjacent machine to be combusted.
In this embodiment, the epitaxial machine station includes 1 independent epitaxial furnace, and the epitaxial furnace is processed by the corresponding washing device.
In this embodiment, the number of the combustion apparatuses is set to 2, and at the same time, 3 inlet ports are provided in total for one combustion apparatus, and each inlet port is a three-way valve.
Embodiment III:
the distinguishing features from the first and second embodiments are that:
the method of connection of the present embodiment includes the steps of:
s1, firstly, an epitaxial furnace, combustion equipment and water washing equipment in an epitaxial machine table are respectively connected and communicated in real time through corresponding pipelines, then equipment can be started to perform real-time operation processing, and tail gas generated by the epitaxial furnace is led into the water washing equipment for processing in the epitaxial processing process. S2, after the water washing treatment is finished, tail gas is led into the combustion equipment to be combusted, so that gas coming out of the water washing equipment normally enters the combustion cavity of the water washing equipment to be combusted, when the combustion cavity of the water washing equipment is abnormally flameout, a backup pipeline can be switched to enter the combustion cavity of an adjacent machine to be combusted.
In this embodiment, the epitaxial machine includes 2 independent epitaxial furnaces, and each epitaxial furnace is processed by a respective washing device.
In this embodiment, the number of the combustion apparatuses is set to 1, and one combustion apparatus has 2 inlet ports in total, and each inlet port is a two-way valve path.
To sum up: compared with the experimental results of the process in the second and third embodiments, the experimental results of the invention in the first embodiment of the invention show that by establishing the backup connecting pipeline of the adjacent combustion equipment, when abnormal flameout occurs in the combustion equipment, the generated tail gas can enter the adjacent combustion equipment for combustion, thereby more effectively eliminating the potential safety hazard in the process and greatly improving the overall safety of the process production.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. The safe connection method for the epitaxial tail gas treatment is characterized by comprising the following steps of: the connection method comprises the following steps:
s1, firstly, respectively connecting and penetrating an epitaxial furnace, combustion equipment and water washing equipment in an epitaxial machine table in real time through corresponding pipelines, and then starting the equipment to perform real-time operation processing, wherein tail gas generated by the epitaxial furnace is led into the water washing equipment for processing in the epitaxial processing process; s2, after the water washing treatment is finished, tail gas is led into the combustion equipment to be combusted, so that gas coming out of the water washing equipment normally enters the combustion cavity of the water washing equipment to be combusted, when the combustion cavity of the water washing equipment is abnormally flameout, a backup pipeline can be switched to enter the combustion cavity of an adjacent machine to be combusted.
2. The method for safely connecting epitaxial tail gas treatment according to claim 1, wherein the method comprises the following steps: the epitaxial machine table comprises 2 independent epitaxial furnaces, and each epitaxial furnace is processed through respective washing equipment.
3. The method for safely connecting epitaxial tail gas treatment according to claim 1, wherein the method comprises the following steps: the number of the combustion devices is set to 2, and one combustion device has 3 inlet ports, and each inlet port is a three-way valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310385506.8A CN116465213A (en) | 2023-04-12 | 2023-04-12 | Safe connection method for epitaxial tail gas treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310385506.8A CN116465213A (en) | 2023-04-12 | 2023-04-12 | Safe connection method for epitaxial tail gas treatment |
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| Publication Number | Publication Date |
|---|---|
| CN116465213A true CN116465213A (en) | 2023-07-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310385506.8A Pending CN116465213A (en) | 2023-04-12 | 2023-04-12 | Safe connection method for epitaxial tail gas treatment |
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| Country | Link |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005216911A (en) * | 2004-01-27 | 2005-08-11 | Komatsu Electronic Metals Co Ltd | Exhaust gas treatment system of epitaxial growth device |
| JP2007150138A (en) * | 2005-11-30 | 2007-06-14 | Shin Etsu Handotai Co Ltd | Vapor phase epitaxial growth system |
| CN205536511U (en) * | 2016-01-22 | 2016-08-31 | 扬州金诚锅炉有限公司 | High -efficient combustion -supporting boiler in two rooms |
| CN212017370U (en) * | 2020-03-16 | 2020-11-27 | 上海晶盟硅材料有限公司 | Water washing pipe for treating tail gas of epitaxial furnace |
| CN115025594A (en) * | 2022-06-13 | 2022-09-09 | 中环领先半导体材料有限公司 | Epitaxial tail gas treatment equipment |
| CN115899720A (en) * | 2022-10-28 | 2023-04-04 | 中环领先半导体材料有限公司 | Method for epitaxial safety control |
-
2023
- 2023-04-12 CN CN202310385506.8A patent/CN116465213A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005216911A (en) * | 2004-01-27 | 2005-08-11 | Komatsu Electronic Metals Co Ltd | Exhaust gas treatment system of epitaxial growth device |
| JP2007150138A (en) * | 2005-11-30 | 2007-06-14 | Shin Etsu Handotai Co Ltd | Vapor phase epitaxial growth system |
| CN205536511U (en) * | 2016-01-22 | 2016-08-31 | 扬州金诚锅炉有限公司 | High -efficient combustion -supporting boiler in two rooms |
| CN212017370U (en) * | 2020-03-16 | 2020-11-27 | 上海晶盟硅材料有限公司 | Water washing pipe for treating tail gas of epitaxial furnace |
| CN115025594A (en) * | 2022-06-13 | 2022-09-09 | 中环领先半导体材料有限公司 | Epitaxial tail gas treatment equipment |
| CN115899720A (en) * | 2022-10-28 | 2023-04-04 | 中环领先半导体材料有限公司 | Method for epitaxial safety control |
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Application publication date: 20230721 |