CN116449501A - Focal plane microcavity switch array light beam scanning device - Google Patents
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- 230000003287 optical effect Effects 0.000 claims abstract description 242
- 238000003491 array Methods 0.000 claims abstract description 20
- 239000011159 matrix material Substances 0.000 claims description 26
- 239000004038 photonic crystal Substances 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 230000033228 biological regulation Effects 0.000 abstract description 4
- 238000004891 communication Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29337—Cavities of the linear kind, e.g. formed by reflectors at ends of a light guide
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Abstract
The invention discloses a focal plane microcavity switch array light beam scanning device, which comprises an optical coupler, a connecting waveguide, a 1 XN microcavity optical switch array comprising N microcavity optical switch units, and N rows of N X M microcavity optical switch emission matrixes formed by 1 XM microcavity optical switch emission matrixes comprising M microcavity optical switches and emission units. The output port of the optical coupler is connected with the input port of the connecting waveguide, the connecting waveguide is connected with the input port of the optical switch array, the input port of the microcavity optical switch array is composed of N microcavity optical switch units which are connected end to end, the N output ports of the microcavity optical switch array are respectively connected with the respective input ports of N rows of microcavity optical switch emitting arrays, the microcavity optical switch emitting lines are composed of M microcavity optical switch units and emitting antennas, and the microcavity optical switch units are connected end to end. The invention only needs to select the working states of two microcavities when scanning the light beam, and has the advantages of low loss, low power consumption, large view field, high resolution and easy expansion regulation and control.
Description
Technical Field
The invention relates to a light beam scanning device, free space optical communication and wavelength division multiplexing technology, in particular to a focal plane microcavity switch array light beam scanning device.
Background
In the aspect of optical fiber communication, with the development of internet technology and the arrival of big data age, technologies such as cloud computing, cloud storage, artificial intelligence and the like are rising, the demands of various communities on communication capacity are increasing, and wavelength division multiplexing technology is proposed. The device is characterized in that light with different wavelengths carries different information to be transmitted on the chip through the multiplexer, the communication capacity is expanded by tens of times or hundreds of times, the efficiency of carrying information by the light is improved, and the communication capacity is greatly expanded.
In the aspect of intelligent perception, the laser radar technology can accurately perceive three-dimensional space information of objects, and is widely applied to the fields of metering, environment monitoring, archaeology, robots and the like, particularly in the field of automatic driving. The difficulty is that: how high-resolution, low-power, high-speed beam scanning can be achieved in a large field of view. Free-space optical communication systems also require high-speed beam scanning to achieve communication network reconfiguration networking. While the traditional light beam scanning device adopts a mechanical rotator to scan the light beam, the traditional light beam scanning device has obvious limitations in reliability, size, cost and the like. Thus, a more compact solid-state beam scanning device is considered to be an ultimate solution.
At present, the architecture of the all-solid-state light beam scanning device with the most application prospect mainly comprises an optical phased array, a focal plane switch array and the like. The optical phased array can realize flexible beam scanning, but the amplitude and the phase of all optical antennas in the array need to be precisely controlled, so that the expansibility of the optical phased array is very challenging. In contrast, a focal plane switch array uses a camera-like optical system to map each angle within the field of view to one pixel on the back focal plane of the imaging lens. The optical switching network in the focal plane switching array allows all pixels to share one (or more) beam scanning device without requiring integration of one ranging unit per pixel.
Focal plane switch arrays have been reported to generally employ thermally tuned Mach-Zehnder interferometer (MZI) switches (Opt. Express)27,32970-32983,2019.) At present, a small-scale focal plane switch array containing tens of pixels is realized, but the focal plane switch array has the limitations of complex structure, large loss, high power consumption, difficult calibration and the like, and is difficult to obtain larger scale expansion. At the same time, focal plane MEMS switch arrays have also been reported (Nature,603,253–258,2022.) The method has the advantages of low power consumption, easy expansion and the like, but has the problems of high process difficulty, high driving voltage, incomplete solid state and the like.
Disclosure of Invention
In order to solve the problems in the background technology, the invention aims to provide the focal plane microcavity switch array light beam scanning device which meets the application requirements of low loss, low power consumption, large view field, high resolution, easy expansion, easy regulation and control and the like.
The technical scheme adopted by the invention is as follows:
the invention comprises a first optical coupler, a first connecting waveguide, a 1 xN microcavity optical switch array comprising N microcavity optical switch units, and N rows of N xM microcavity optical switch emission matrixes comprising M microcavity optical switches and 1 xM microcavity optical switch emission matrixes of emission units; the light source enters the first connecting waveguide through the first optical coupler, the first connecting waveguide is connected with the input ports of the 1 XN microcavity optical switch array, N output ports of the 1 XN microcavity optical switch array are sequentially connected with respective input ports of N rows of 1 XM microcavity optical switch emission arrays respectively, wherein the nth output port of the 1 XN microcavity optical switch array is connected with the input port of the nth row of 1 XM microcavity optical switch emission arrays, and n=1, … and N.
The first optical coupler is in a waveguide grating coupler or an end face coupler.
The 1 XN microcavity optical switch array comprises N1X 2 or 2X 2 microcavity optical switch units which are connected end to end in sequence; the input port of the nth microcavity optical switching unit 3n is connected with the through output port of the (n-1) th microcavity optical switching unit 3 (n-1), and the through output port of the nth microcavity optical switching unit 3n is connected with the input port of the (n+1) th microcavity optical switching unit 3 (n+1).
The 1X 2 or 2X 2 microcavity optical switch unit at least comprises an input port, a straight-through output port and a downloading output port, and the structure of the optical switch unit comprises a micro-ring, an F-P microcavity, a photonic crystal cavity, a micro-disk, a cascading micro-ring, a cascading F-P microcavity, a cascading photonic crystal cavity and a cascading micro-disk.
The N×M microcavity optical switch emission matrix comprises N rows of 1×M microcavity optical switch emission matrixes; the nth row 1 XM microcavity optical switch transmitting linear array comprises M microcavity optical switch transmitting units which are connected end to end in sequence. The input port of the nth row of the mth microcavity optical switch transmitting unit 4nm is connected with the through output port of the nth row of the (m-1) th microcavity optical switch transmitting unit 4n (m-1), and the through output port of the nth row of the mth microcavity optical switch unit 4nm is connected with the input port of the nth row of the (m+1) th microcavity optical switch unit 4n (m+1).
The micro-cavity optical switch transmitting unit 4nm consists of a micro-cavity optical switch and an optical waveguide transmitting antenna, and the 1 multiplied by 2 or 2 multiplied by 2 micro-cavity optical switch unit at least comprises an input port, a straight-through output port and a downloading output port, and the structure of the micro-cavity optical switch transmitting unit comprises a micro-ring, an F-P micro-cavity, a photonic crystal cavity, a micro-disk, a cascade micro-ring, a cascade F-P micro-cavity, a cascade photonic crystal cavity and a cascade micro-disk.
The structure of the optical waveguide transmitting antenna is a waveguide reflector or a waveguide grating, including but not limited to a one-dimensional waveguide grating and a two-dimensional waveguide grating, and a uniform grating or a chirped grating is adopted; the optical waveguide transmitting antennas in the n×m microcavity optical switch transmitting matrix may be the same or different.
The microcavity optical switch is based on a technology including but not limited to thermo-optical effect, electro-optical effect, acousto-optic effect, micro-optics mechanism.
The microcavity optical switches are respectively provided with a corresponding regulating electrode, and the regulating electrodes are arranged on the sides or the upper sides of the microcavity optical switch waveguides.
The resonant wavelength of the initial state of the microcavity optical switch in the 1 XN microcavity optical switch array and the N XM microcavity optical switch emission matrix is the same or similar, and the resonant wavelength is different from the input optical wavelength, but can be overlapped with the input wavelength through a switch switching function.
The invention has the innovation that a brand new architecture based on the microcavity optical switch array is invented, has the outstanding advantages of low loss, low power consumption, large view field, high resolution, easy expansion, easy processing and the like, and lays a road for the application of the high-performance all-solid-state on-chip beam scanning device.
The beneficial effects of the invention are as follows:
in the scheme of the invention, the working states of the two microcavities are selected during the light beam scanning, so that the invention has the characteristics of low loss, simple structure, high integration, small size, easy expansion and the like. Compared with an MEMS switch light beam scanning device, the MEMS switch light beam scanning device has the advantages of overcoming the problems of complex process, sensitive vibration and the like, along with smaller size and the like; compared with an MZI switch light beam scanning device, the invention solves the problems of large system loss, large device size, complex wiring, high control complexity, difficult scale expansion and the like.
The invention has the advantages of low loss, low power consumption, large visual field, high resolution, easy expansion and the like, and paves the way for realizing the on-chip large-scale light beam scanning device system.
Drawings
FIG. 1 is a schematic view of a focal plane microcavity switch array beam scanning device according to the present invention;
FIG. 2 is a schematic diagram of a microcavity optical switch unit in a 1 XN microcavity optical switch array and an N XM microcavity optical switch emission matrix according to the present invention;
FIG. 3 is a schematic diagram showing a first optical coupler according to the present invention;
fig. 4 is a schematic diagram of a structure of an optical waveguide transmitting antenna according to the present invention;
FIG. 5 is a structural layout of a focal plane microcavity switch array beam scanning device according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a ranging test system according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of another embodiment of the present invention;
in the figure: 1. the first optical coupler comprises 2 parts of a first connecting waveguide, 3 parts of a 1 xN microcavity optical switch array comprising N microcavity optical switch units, 4 parts of N rows of an N x M microcavity optical switch emission matrix formed by 1 xM microcavity optical switch emission arrays comprising M microcavity optical switches and emission units, 31-3N parts of microcavity optical switch units in the 1 xN microcavity optical switch array, 31 c-3 Nc parts of N output ports of the 1 xN microcavity optical switch array, 41-4N, N rows of 1 xM microcavity optical switch emission arrays, 41 a-4 Na parts of N rows of 1 xM microcavity optical switch emission arrays, input ports of the 1 a-4 NM parts of N rows of 1 xM microcavity optical switch emission arrays, 411 a-4 NMa parts of microcavity optical switch emission units in the N x M microcavity optical switch emission matrix, and waveguide emission antennas in the N x M microcavity optical switch emission matrix.
Detailed Description
The invention is further described below with reference to the drawings and examples.
As shown in fig. 1, the implementation includes a first optical coupler 1, a first connection waveguide 2, a 1×n microcavity optical switch array 3 including N microcavity optical switch units, and an n×m microcavity optical switch emission matrix 4 formed by N rows of 1×m microcavity optical switch emission arrays including M microcavity optical switches and emission units; the light source enters the first connecting waveguide 2 through the first optical coupler, the first connecting waveguide 2 is connected with the input port of the 1×n microcavity optical switch array 3, N output ports 31c, 32c, …, 3Nc of the 1×n microcavity optical switch array 3 are sequentially connected with N rows of 1×m microcavity optical switch emission arrays 41, 42, 43, …, 4N input ports 41a, 42a, 43a, …, 4Na respectively, wherein an nth output port 3Nc of the 1×n microcavity optical switch array 3 is connected with an input port 4Na of an nth row of 1×m microcavity optical switch emission arrays 4N, n=1, …, N.
The 1×n microcavity optical switch array 3 includes N1×2 or 2×2 microcavity optical switch units 31, 32, 33, …, 3N connected end to end in sequence; the input port of the nth microcavity optical switching unit 3n is connected with the through output port of the (n-1) th microcavity optical switching unit 3 (n-1), and the through output port of the nth microcavity optical switching unit 3n is connected with the input port of the (n+1) th microcavity optical switching unit 3 (n+1).
The n×m microcavity optical switch transmission matrix 4 includes N rows of 1×m microcavity optical switch transmission matrices 41, 42, 43, …, 4N; the nth row 1×m microcavity optical switch transmitting array 4N includes M microcavity optical switch transmitting units 4N1, 4N2, …, 4nm …, 4nm, n=1, …, N, which are sequentially connected end to end. The input port of the nth row of the mth microcavity optical switch transmitting unit 4nm is connected with the through output port of the nth row of the mth-1 microcavity optical switch transmitting unit 4n (m-1), and the through output port of the nth row of the mth microcavity optical switch unit 4nm is connected with the input port of the nth row of the (m+1) th microcavity optical switch unit 4n (m+1).
Fig. 2 shows that the 1×2 or 2×2 microcavity optical switching units 4n1, 4n2, …, 4nM …, 4nM at least include an input port, a through output port, and a download output port, and the structure of the present invention includes, but is not limited to, a micro-ring, an F-P microcavity, a photonic crystal cavity, a micro-disk, a cascaded micro-ring, a cascaded F-P microcavity, a cascaded photonic crystal cavity, and a cascaded micro-disk.
As shown in fig. 3, the first optical coupler according to the present invention includes a waveguide grating coupler or an end-face coupler.
As shown in fig. 4, the structure of the optical waveguide transmitting antenna provided by the invention is a waveguide reflector or a waveguide grating, including but not limited to a one-dimensional waveguide grating, a two-dimensional waveguide grating, and a uniform grating or a chirped grating is adopted.
As shown in fig. 5, the structure layout of the optical beam scanning device with the focal plane microcavity switch array of n=16 and m=16 according to the proposed embodiment of the present invention includes an optical coupler, a connection waveguide, a 1×16 microcavity optical switch array and a 16×16 micro-ring optical switch emission matrix.
FIG. 6 is a schematic diagram of a system structure according to an embodiment of the present invention, including a laser isolator, an amplifier, a beam splitter, a loop mirror, a beam scanning device according to the present invention, a focusing lens, and an object to be measured; the linear frequency modulation continuous wave laser signal is divided into measuring light and local oscillation light after passing through an isolator, an amplifier and a beam splitter, the measuring light enters a light beam scanning device chip designed by the invention, the local oscillation light returns through a loop reflector, the measuring light is aligned through a micro-ring, an optical waveguide transmitting antenna is lightened through a tuning micro-cavity optical switch state, the light vertically exits and is collimated through a focusing lens and is transmitted to a space object to be measured, the reflected light is collected on a chip again through the focusing lens by the optical waveguide transmitting antenna, and the local oscillation light and the measuring light are processed by a detector after being mixed to obtain target object information.
As shown in fig. 7, a schematic diagram of another embodiment of the present invention is provided, including a laser, a light beam scanning device chip and a detector, where the emitted light of the laser includes n×m working light beams with wavelengths, and by adjusting the microcavity optical switch units in the 1×n microcavity optical switch array 3 and the n×m microcavity optical switch emission matrix 4, the n×m working light beams with wavelengths are emitted from different positions and finally detected by the detector.
The working process of the invention is as follows:
the input light can be single wavelength or multi-wavelength, the input light wave enters the first connecting waveguide 2 through the first optical coupler 1, and is transmitted in the 1×n microcavity optical switch array 3, N output ports 31c, 32c, … and 3Nc of the 1×n microcavity optical switch array 3 are sequentially connected with N rows of 1×m microcavity optical switch transmitting linear arrays 41, 42, 43, … and 4N input ports 41a, 42a, 43a, … and 4Na respectively, wherein an N output port 3Nc of the 1×n microcavity optical switch array 3 is connected with an input port 4Na of an N row of 1×m microcavity optical switch transmitting linear array 4N, the 1×n microcavity optical switch array comprises N1×2 or 2×2 microcavity optical switch units which are sequentially connected end to end, and the light wave is output from a through output port of an N-th microcavity optical switch unit 3N under the condition of no modulation, and then enters an input port of an (n+1) -th microcavity optical switch unit 3N; when the light wave passes through the nth microcavity optical switch unit 3N for switching, the light wave is output from a downloading output port of the nth microcavity optical switch unit 3N and then is input into an nth row 1×M microcavity optical switch transmitting array, and the nth row 1×M microcavity optical switch transmitting array 4N comprises M microcavity optical switch transmitting units 4N1, 4N2, …, 4nm …, 4nM, n=1, … and N which are connected end to end in sequence; the light wave sequentially passes through the nth row of the mth microcavity optical switch transmitting unit 4nm under the condition of no modulation, is output from a straight-through output port of the nth row of the mth microcavity optical switch unit 4nm, and then enters an input port of the nth row of the (m+1) th microcavity optical switch unit 4n (m+1); when the light wave passes through the nth row mth microcavity optical switch transmitting unit 4nm for switching, the light wave is output from the nth row mth microcavity optical switch unit 4nm downloading output port and input into the nth row mth optical waveguide transmitting antenna, and the light is emitted from the optical waveguide transmitting antenna 4 nma. Therefore, the invention realizes the scanning or the wave-division multiplexing of the light beams by changing the working states of the microcavity optical switch units in the microcavity optical switch array 3 and the microcavity optical switch emitting linear array of N rows of 1 XM microcavity optical switches and emitting the light beams from different positions at different angles.
A specific example is given below, where a silicon nanowire optical waveguide based on silicon-on-insulator (SOI) material is selected: the core layer material is silicon with the thickness of 220nm; the upper and lower cladding materials are silicon dioxide, the thickness of the lower cladding is 2 mu m, the thickness of the upper cladding is 1.2 mu m, a thermo-optical effect is adopted, a regulating electrode of the thermo-optical effect is positioned right above a waveguide, a TE polarization is taken as an example, a 2 x 2 micro-ring optical switch is used as a switch unit, N=16, M=16, and a light source is 1550nm.
As shown in fig. 5, the embodiment includes a first optical coupler 1, a first connection waveguide 2, a 1×16 microcavity optical switch array 3 including N microcavity optical switch units, and a 16×16 microcavity optical switch emission matrix 4 formed by 16 rows of 1×16 microcavity optical switch emission arrays including 16 microcavity optical switches and emission units. The first optical coupler 1 adopts a width gradual change type end face coupler which is efficiently coupled; the width of the first connecting waveguide 2 is 2 mu m, so that the transmission loss is effectively reduced; a 1 multiplied by 16 microcavity optical switch array 3 of the 16 microcavity optical switch units adopts a 2 multiplied by 2 micro-ring optical switch unit based on a thermo-optical effect; the microcavity optical switch unit of the 16×16 microcavity optical switch emission matrix 4 is based on a 2×2 microring optical switch of a thermo-optical effect, a waveguide emission antenna adopts a non-uniform grating with high-efficiency emission, and grating parameters are as follows: the grating period number is 3, the period is 522nm, and the duty ratio is 0.535,0.423,0.3 respectively. The x-direction pitch between microcavity optical switch emitting units of the 16×16 microcavity optical switch emitting matrix 4 is 20 μm and the y-direction pitch is 20 μm.
As shown in fig. 5, the relevant parameters of the 2×2 micro-ring optical switch unit based on thermo-optical effect in the focal plane 16×16 micro-cavity switch array optical beam scanning device are: the width of the input waveguide 4nma is 400nm, the width of the elliptical ring waveguide 4nmb is gradually changed from 450nm to 650nm, the bending radius of the long side of the elliptical ring is 4 mu m, the bending radius of the short side is 3.5 mu m, the width of the lower carrier waveguide 4nmc is 450nm, the slit distance between the input waveguide 4nma and the ring waveguide 4nmb is 220nm, the slit distance between the lower carrier waveguide 4nmc and the ring waveguide 4nmb is 220nm, the resonance wavelength deviates from 1550nm, the heating regulation electrode is positioned right above the elliptical ring, titanium metal is adopted as the heating regulation electrode, the width is 2 mu m, gold is adopted as the connection electrode, and the width is more than 10 mu m. The 16 micro-ring optical switch units in the 1×16 micro-cavity optical switch array 3 are provided with independent regulating electrodes, the regulating electrodes share one ground electrode, the 16×16 micro-cavity optical switch emission matrix 4 consists of 16 rows of 1×16 micro-cavity optical switch emission arrays, wherein the 16 micro-ring optical switch units in the 1×16 micro-cavity optical switch emission arrays are provided with the independent regulating electrodes, and the regulating electrodes of a micro-ring optical switch unit in a longitudinal column in the 16×16 micro-cavity optical switch emission matrix are divided into an upper part and a lower part which are respectively connected in series, namely 8 regulating electrodes are connected in series, so that the number of the electrodes is effectively reduced, and the device arrangement is more compact.
As shown in fig. 6, the system structure of the proposed embodiment of the present invention includes a laser, an isolator, an amplifier, a beam splitter, a beam scanning device, and a focusing lens; the method comprises the steps of firstly generating a linear frequency modulation continuous wave laser signal, dividing the linear frequency modulation continuous wave laser signal into measuring light and local oscillation light after passing through an isolator, an amplifier and a beam splitter, enabling the measuring light to enter a light beam scanning device chip designed by the method, enabling the local oscillation light to return through a loop reflector, enabling the measuring light to switch laser to a specific row through a 1X 16 microcavity optical switch array 3, enabling the measuring light to be switched to a waveguide transmitting antenna at a specific position through a 16X 16 microcavity optical switch matrix, enabling the measuring light to be emitted to a focusing lens at a certain angle, enabling the measuring light to be emitted to an object to be detected in a space after being collimated by the focusing lens, enabling the reflected light to enter the light beam scanning device chip again through the focusing lens after being collected by the transmitting antenna matrix of the light beam scanning device chip, and enabling the local oscillation light and the measuring light to be processed by a detector after being mixed, and obtaining target object information including distance, speed and the like. When the focal length of the focusing lens is selected to be f=1 mm, the field of view thereof is represented as fov=2tan -1 (L/2 f), wherein L is the overall size of the microcavity optical switch matrix, i.e. 15×20=300 μm, thus yielding a field of view of 17×17 °; addressing resolution is denoted as tan -1 (p/f), wherein p is the period 20 μm of the microcavity optical switching matrix, then its addressing resolution is 1.14 ° ×1.14 °; the beam divergence angle is denoted as tan -1 (x/f), wherein x is the spot size of the waveguide transmitting antenna 2 μm x 2 μm, then its beam divergence angle is 0.11 ° x 0.11 °; likewise, when the focal length of the focusing lens is selected to be 5mm, the field of view thereof is 3.4 ° by 3.4 °, the addressing resolution is 0.228 ° by 0.228 °, and the beam divergence angle is 0.022 ° by 0.022 °.
Another specific embodiment is provided below, and in particular, a micro-ring wavelength division multiplexing optical beam scanning device, where the emitted light of the laser includes at most 16×16 working beams with wavelengths, and enters the optical beam scanning device chip through the first optical coupler and the first connection waveguide, and by adjusting and controlling the micro-cavity optical switch units in the 1×16 micro-cavity optical switch array 3 and the 16×16 micro-cavity optical switch emitting matrix 4, the working beams with the 16×16 wavelengths are emitted from the different optical waveguide emitting antennas, received by the optical fibers, and finally enter the detector for detection. The heating control electrode is positioned right above the elliptical ring, titanium metal is adopted as the heating control electrode, the width is 2 mu m, gold is adopted as the connecting electrode, and the width is more than 10 mu m. The 16 micro-ring optical switch units in the 1×16 micro-cavity optical switch array 3 have independent control electrodes, they share one ground electrode, the 16×16 micro-cavity optical switch emission matrix 4 is composed of 16 rows of 1×16 micro-cavity optical switch emission arrays, and each micro-cavity optical switch unit has independent control electrodes, they share one ground electrode.
The above-described embodiments are intended to illustrate the present invention, not to limit it, and any modifications and variations made thereto are within the spirit of the invention and the scope of the appended claims.
Claims (10)
1. A focal plane microcavity switch array light beam scanning device is characterized in that:
the device comprises a first optical coupler (1), a first connecting waveguide (2), a 1 XN microcavity optical switch array (3) containing N microcavity optical switch units, and an N XM microcavity optical switch emission matrix (4) consisting of N rows of 1 XM microcavity optical switch emission arrays containing M microcavity optical switches and emission units;
the light source enters the first connecting waveguide (2) through the first optical coupler (1), the first connecting waveguide (2) is connected with the input port of the 1 XN microcavity optical switch array (3), N output ports of the 1 XN microcavity optical switch array (3) are sequentially connected with the respective input ports of N rows of 1 XM microcavity optical switch transmission arrays respectively, and the N output ports of the 1 XN microcavity optical switch array (3) are connected with the input ports of the N rows of 1 XM microcavity optical switch transmission arrays.
2. The focal plane microcavity switch array beam scanning device of claim 1 wherein: the first optical coupler (1) is in a waveguide grating coupler or an end face coupler.
3. A focal plane microcavity switch array beam scanning device as claimed in claim 1 or 2, characterized in that: the 1 XN microcavity optical switch array (3) comprises N1X 2 or 2X 2 microcavity optical switch units which are connected end to end in sequence; the input port of the nth microcavity optical switch unit is connected with the through output port of the (N-1) th microcavity optical switch unit (N-1), the through output port of the nth microcavity optical switch unit is connected with the input port of the (n+1) th microcavity optical switch unit (n+1), and the download output port of the nth microcavity optical switch unit is connected with the nth output port of the 1 XN microcavity optical switch array (3).
4. A focal plane microcavity switch array beam scanning device as recited in claim 3, wherein: the 1X 2 or 2X 2 microcavity optical switch unit at least comprises an input port, a straight-through output port and a downloading output port, and the structure of the optical switch unit comprises a micro-ring, an F-P microcavity, a photonic crystal cavity, a micro-disk, a cascading micro-ring, a cascading F-P microcavity, a cascading photonic crystal cavity and a cascading micro-disk.
5. A focal plane microcavity switch array beam scanning device as recited in claim 3, wherein: the N×M microcavity optical switch emission matrix (4) comprises N rows of 1×M microcavity optical switch emission matrixes; the N-th row 1 xM microcavity optical switch transmitting linear array comprises M microcavity optical switch transmitting units which are sequentially connected end to end, wherein n=1, … and N; the input port of the nth row of the mth microcavity optical switch transmitting unit is connected with the through output port of the nth row of the (m-1) th microcavity optical switch transmitting unit, and the through output port of the nth row of the mth microcavity optical switch unit is connected with the input port of the nth row of the (m+1) th microcavity optical switch unit.
6. The focal plane microcavity switch array beam scanning device of claim 5 wherein: the micro-cavity optical switch transmitting unit consists of a micro-cavity optical switch and an optical waveguide transmitting antenna, and the 1 multiplied by 2 or 2 multiplied by 2 micro-cavity optical switch unit at least comprises an input port, a through output port and a download output port, and the structure of the micro-cavity optical switch transmitting unit comprises, but is not limited to, a micro-ring, an F-P micro-cavity, a photonic crystal cavity, a micro-disk, a cascade micro-ring, a cascade F-P micro-cavity, a cascade photonic crystal cavity and a cascade micro-disk.
7. The focal plane microcavity switch array beam scanning device of claim 6 wherein: the structure of the optical waveguide transmitting antenna is a waveguide reflector or a waveguide grating, including but not limited to a one-dimensional waveguide grating and a two-dimensional waveguide grating, and a uniform grating or a chirped grating is adopted; the optical waveguide transmitting antennas in the N×M microcavity optical switch transmitting matrix (4) can be the same or different.
8. The focal plane microcavity switch array beam scanning device of claim 1 wherein: the microcavity optical switch comprises but is not limited to a thermo-optical effect, an electro-optical effect, an acousto-optic effect and a micro-optics mechanism.
9. The focal plane microcavity switch array beam scanning device of claim 8 wherein: the microcavity optical switches are respectively provided with a corresponding regulating electrode, and the regulating electrodes are arranged on the sides or the upper sides of the microcavity optical switch waveguides.
10. The focal plane microcavity switch array beam scanning device of claim 1 wherein: the resonant wavelength of the initial state of the microcavity optical switch in the 1 XN microcavity optical switch array and the N XM microcavity optical switch emission matrix is the same or similar, and the resonant wavelength is different from the input optical wavelength, but can be overlapped with the input wavelength through a switch switching function.
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| CN202310204167.9A CN116449501A (en) | 2023-03-06 | 2023-03-06 | Focal plane microcavity switch array light beam scanning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117289398A (en) * | 2023-11-24 | 2023-12-26 | 中国科学院长春光学精密机械与物理研究所 | Focal plane switch array light beam scanning system based on micro-ring resonator switch |
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- 2023-03-06 CN CN202310204167.9A patent/CN116449501A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117289398A (en) * | 2023-11-24 | 2023-12-26 | 中国科学院长春光学精密机械与物理研究所 | Focal plane switch array light beam scanning system based on micro-ring resonator switch |
| CN117289398B (en) * | 2023-11-24 | 2024-01-30 | 中国科学院长春光学精密机械与物理研究所 | Focal plane switch array light beam scanning system based on micro-ring resonator switch |
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