CN116413225A

CN116413225A - Spectral analysis method and device, electronic equipment and storage medium

Info

Publication number: CN116413225A
Application number: CN202310587562.XA
Authority: CN
Inventors: 何超; 王贺; 李洋
Original assignee: Beijing Jinjing Science And Technology Co ltd
Current assignee: Beijing Jinjing Science And Technology Co ltd
Priority date: 2023-05-23
Filing date: 2023-05-23
Publication date: 2023-07-11

Abstract

The disclosure provides a spectrum analysis method, a spectrum analysis device, electronic equipment and a storage medium, wherein the method comprises the following steps: acquiring a cathode fluorescence signal acquired by a cathode fluorescence detector; carrying out light splitting treatment on the cathode fluorescent signal by utilizing a grating light splitting component to obtain a spectrum signal; and carrying out spectrum analysis processing based on the spectrum signal to obtain a spectrum analysis result. The spectral processing can distinguish the optical signals in the form of wavelength, and then based on further spectral analysis processing, the spectral characteristics of the luminous samples under different wavelengths or wave bands can be obtained, for example, spectral characteristic comparison analysis, spectral characteristic average analysis and the like can be performed, so that the spectral analysis with higher precision and more dimensions is realized.

Description

Spectral analysis method and device, electronic equipment and storage medium

Technical Field

The disclosure relates to the technical field of spectrum analysis, in particular to a spectrum analysis method, a spectrum analysis device, electronic equipment and a storage medium.

Background

The electron beam excited cathode fluorescent signal refers to electromagnetic wave with frequency in ultraviolet, infrared or visible light wave band when the electron beam bombards on the surface of the material, and the basic principle is that electrons in the material are excited to a high energy state by incident electrons, and jump back to a low energy state through certain relaxation time, and release excessive energy, wherein a part of energy is emitted in the form of electromagnetic radiation.

Cathode fluorescence detection is usually combined with scanning or transmission electron microscopy, and can realize the combined research of morphology observation, structure and component analysis and electron beam excitation fluorescence spectrum. However, there is currently a lack of efficient spectroscopic analysis schemes to accommodate the current increasing demands.

Disclosure of Invention

The embodiment of the disclosure provides at least a spectrum analysis method, a spectrum analysis device, an electronic device and a storage medium, so that spectrum analysis with finer granularity can be automatically performed, and applicability is improved.

In a first aspect, embodiments of the present disclosure provide a spectroscopic analysis method, including:

acquiring a cathode fluorescence signal acquired by a cathode fluorescence detector;

carrying out light splitting treatment on the cathode fluorescent signal by utilizing a grating light splitting component to obtain a spectrum signal;

and carrying out spectrum analysis processing based on the spectrum signal to obtain a spectrum analysis result.

In a possible implementation manner, the performing a spectrum analysis process based on the spectrum signal includes:

carrying out projection processing on the spectrum signals by using a charge coupled device to obtain spectrum signal intensity values corresponding to each band interval respectively; the physical pixel width of each column of the charge coupled device has a corresponding relation with each band interval;

And determining the spectrum analysis result based on the spectrum signal intensity values respectively corresponding to the wave band intervals.

In one possible implementation manner, the determining the spectrum analysis result based on the spectrum signal intensity values respectively corresponding to the band intervals includes:

determining a spectrum waveform chart taking the wavelength as a horizontal axis and taking the photon number as a vertical axis based on the spectrum signal intensity values respectively corresponding to the wave band intervals;

and determining the spectrum waveform diagram as the spectrum analysis result.

In one possible embodiment, the spectral signal intensity values corresponding to the respective band intervals are determined according to the following steps:

for a target band interval in the band intervals, performing projection processing on the spectrum signals by using a charge coupled device, and determining a plurality of spectrum signal intensity values generated in the target band interval; the method comprises the steps of,

and carrying out integral operation based on the plurality of spectrum signal intensity values to determine the spectrum signal intensity value corresponding to the target band interval.

In one possible implementation manner, the performing, by using a grating beam-splitting component, the beam-splitting processing on the cathode fluorescent signal includes:

performing light filtering treatment on the cathode fluorescence signal in a specific wave band by using a light filtering component to obtain a filtered cathode fluorescence signal;

And carrying out light splitting treatment on the filtered cathode fluorescence signal by utilizing a grating light splitting component to obtain a spectrum signal.

In one possible embodiment, the filtering means includes a band-pass filter for allowing light signals of a band of 50nm to pass up and down a specific band, and/or a high-pass filter for allowing light signals above the specific band to pass.

In a possible embodiment, in case the filter component comprises at least two filters, the method further comprises:

responding to a motor control instruction, and extracting filter parameter information in the motor control instruction;

and selecting a corresponding target filter from the light filtering component based on the light filtering parameter information, wherein the target filter is used for carrying out light filtering processing of a specific wave band on the cathode fluorescent signal.

In one possible embodiment, the acquiring the cathode fluorescence signal acquired by the cathode fluorescence detector includes:

and responding to the electron beam scanning operation, and acquiring cathode fluorescence signals of each target scanning point scanned by the electron beam scanning operation.

For any target scanning point, performing superposition average operation on the basis of the spectrum signal intensity values of the target scanning point in different wave band intervals to obtain an average spectrum intensity value corresponding to the target scanning point;

and collecting average spectrum intensity values corresponding to the target scanning points, and determining a spectrum intensity map corresponding to the target scanning points or a target scanning area formed by the target scanning points.

In a possible embodiment, in the case that the spectrum analysis result is a plurality, after obtaining the spectrum analysis result, the method further includes:

determining the luminescence peak positions corresponding to each detection sample according to each spectrum analysis result;

and establishing a mapping relation between the luminescence peak positions of each detection sample and various defect types.

In one possible embodiment, the method further comprises:

determining the luminous peak position of a sample to be detected based on the spectrum analysis result of the sample to be detected;

and determining the defect type matched with the sample to be detected based on the established mapping relation.

In a second aspect, the present disclosure also provides a spectroscopic analysis device comprising:

the acquisition module is used for acquiring the cathode fluorescence signal acquired by the cathode fluorescence detector;

The light splitting module is used for carrying out light splitting treatment on the cathode fluorescent signal by utilizing the grating light splitting component to obtain a spectrum signal;

and the analysis module is used for carrying out spectrum analysis processing based on the spectrum signal to obtain a spectrum analysis result.

In a third aspect, the present disclosure also provides an electronic device, including: a processor, a memory and a bus, the memory storing machine-readable instructions executable by the processor, the processor and the memory in communication over the bus when the electronic device is running, the machine-readable instructions when executed by the processor performing the spectroscopic analysis method as set forth in the first aspect and any one of its various embodiments.

In a fourth aspect, the present disclosure also provides a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, performs the spectroscopic analysis method as in the first aspect and any of its various embodiments.

By adopting the spectrum analysis method, the spectrum analysis device, the electronic equipment and the storage medium, under the condition that the cathode fluorescence signal collected by the cathode fluorescence detector is obtained, the grating light splitting component can be utilized to carry out light splitting treatment on the cathode fluorescence signal, and then spectrum analysis treatment is carried out on the basis of the spectrum signal, so that a spectrum analysis result is obtained. In consideration of the fact that the optical signals with different wavelengths have different spectral characteristics, the optical signals can be distinguished in terms of wavelength by the optical splitting treatment, and then the spectral characteristics of the luminous samples with different wavelengths or wave bands can be obtained based on further spectral analysis treatment, for example, spectral characteristic comparison analysis, spectral characteristic average analysis and the like can be carried out, so that the spectral analysis with higher precision and more dimensions is realized.

Other advantages of the present disclosure will be explained in more detail in conjunction with the following description and accompanying drawings.

It should be understood that the foregoing description is only an overview of the technical solutions of the present disclosure so that the technical means of the present disclosure may be more clearly understood and may be implemented in accordance with the content of the specification. The following specific examples illustrate the present disclosure in order to make the above and other objects, features and advantages of the present disclosure more comprehensible.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for the embodiments are briefly described below, which are incorporated in and constitute a part of the specification, these drawings showing embodiments consistent with the present disclosure and together with the description serve to illustrate the technical solutions of the present disclosure. It is to be understood that the following drawings illustrate only certain embodiments of the present disclosure and are therefore not to be considered limiting of its scope, for the person of ordinary skill in the art may admit to other equally relevant drawings without inventive effort. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:

FIG. 1 illustrates a flow chart of a method of spectral analysis provided by an embodiment of the present disclosure;

FIG. 2 shows a schematic diagram of a spectroscopic analysis device provided by an embodiment of the present disclosure;

fig. 3 shows a schematic diagram of an electronic device provided by an embodiment of the disclosure.

Detailed Description

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

In the description of the embodiments of the present disclosure, it should be understood that terms such as "comprises" or "comprising" are intended to indicate the presence of features, numbers, steps, acts, components, portions or combinations thereof disclosed in the present specification, and are not intended to exclude the possibility of the presence of one or more other features, numbers, steps, acts, components, portions or combinations thereof.

Unless otherwise indicated, "/" means or, e.g., A/B may represent A or B; "and/or" herein is merely an association relationship describing an association object, and means that three relationships may exist, for example, a and/or B may mean: a exists alone, A and B exist together, and B exists alone.

The terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present disclosure, unless otherwise indicated, the meaning of "a plurality" is two or more.

It is found that the physical process of fluorescence generated by the sample material under the excitation of electron beam is determined by the electronic structure, and the electronic structure is related to the element components, lattice structure and defects, and the mechanical, thermal and electromagnetic environment. Thus, electron beam excited cathode fluorescence spectra can reflect intrinsic physical properties of a material through its electronic structure.

Cathode fluorescence detection is usually combined with scanning or transmission electron microscopy, and can realize the combined research of morphology observation, structure and component analysis and electron beam excitation fluorescence spectrum. The electron beam spot used for exciting fluorescence by the electron beam is very small, the energy is high, compared with photoluminescence, the electron beam excited fluorescence signal has the characteristics of high spatial resolution, high excitation energy, wide spectrum range, large excitation depth and the like.

It can be seen that efficient analysis of cathode fluorescence is an unprecedented problem to be solved.

To at least partially solve one or more of the above-mentioned problems, and other potential problems, the present disclosure provides at least a spectroscopic analysis method, apparatus, electronic device, and storage medium to automatically perform finer-grained spectroscopic analysis, improving applicability.

For the sake of understanding the present embodiment, first, a detailed description will be given of a spectrum analysis method disclosed in the present embodiment, and an execution subject of the spectrum analysis method provided in the present embodiment is generally an electronic device with a certain processing capability, where the electronic device includes, for example, a terminal device or a processing device, and the terminal device may be a User Equipment (UE), a mobile device, a personal digital assistant (Personal Digital Assistant, PDA), or the like. Considering that the spectrum analysis method provided by the embodiment of the disclosure can be mainly applied to the technical field of electron beam excitation fluorescence, the electronic device can be a spectrometer device integrated with various supporting spectrum analysis components, and the spectrum analysis components can comprise a grating light-splitting component, a light-filtering component and the like, so that finer granularity spectrum analysis on cathode fluorescence signals can be realized, and the spectrum analysis method has higher applicability.

In some possible implementations, the spectral analysis method may be implemented by way of a processor invoking computer readable instructions stored in a memory.

Referring to fig. 1, a flowchart of a spectrum analysis method according to an embodiment of the disclosure is shown, where the method includes steps S101 to S103, where:

s101: acquiring a cathode fluorescence signal acquired by a cathode fluorescence detector;

s102: carrying out light-splitting treatment on the cathode fluorescence signal by utilizing a grating light-splitting component to obtain a spectrum signal;

s103: and carrying out spectrum analysis processing based on the spectrum signal to obtain a spectrum analysis result.

In order to facilitate understanding of the spectroscopic analysis method provided by the embodiments of the present disclosure, a detailed description will be given next of the application field of the method. The spectrum analysis method in the embodiment of the disclosure can be mainly applied to the technical field of electron beam excitation fluorescence or other related technical fields needing spectrum analysis. In view of the wide application of electron beam excitation fluorescence technology, this application field will be exemplified in the following.

For better spectroscopic analysis, the process of generating the cathode fluorescence signal will be described first. The cathode fluorescent signal can be an optical signal generated after the electron beam and the sample to be detected are excited. In practical application, the cathode fluorescence signal may be obtained by direct excitation, or may be obtained by driving an electron beam to perform deflection scanning by means of an electron beam deflection scanning system, which is not particularly limited herein.

In either excitation method, after the cathode fluorescent signal is obtained, the obtained cathode fluorescent signal may be first subjected to a spectroscopic process by using a grating spectroscopic unit to obtain a spectroscopic signal, and then subjected to a spectroscopic analysis process based on the spectroscopic signal. The spectrum analysis result obtained in this way is an analysis result aiming at each band interval, and it is particularly important to perform spectrum analysis on the sample to be tested aiming at different bands mainly in consideration of that the spectrum characteristics corresponding to different wavelengths/bands are different.

In practical application, the cathode fluorescence signal can be collected by the high-efficiency cathode fluorescence detector and transmitted into the spectrometer device by the high-transmittance optical fiber, and the optical signal entering the spectrometer device can be subjected to spectral analysis after being subjected to grating light splitting.

Here, in order to be better adapted to the spectroscopic operation of the grating spectroscopic unit, the light signal impinging on the CCD may be subjected to reflection by a mirror before the grating spectroscopic is performed, and may enter a charge coupled device (Charge Coupled Device, CCD) based on convergence of a focusing mirror after the grating spectroscopic is performed, while the light signal impinging on the CCD may be discriminated in wavelength form due to the spectroscopic of the grating.

The spectrum analysis method provided by the embodiment of the disclosure may provide spectrum analysis in multiple modes, for example, a single spectrum analysis mode in which photoelectric conversion processing (i.e., discretization processing) is directly performed to present a spectrum waveform chart, for example, a section spectrum analysis mode for special requirements may be further used, for example, a hyperspectral analysis mode may be further used in combination with point-by-point scanning, so as to adapt to different application requirements.

The three spectral analysis modes described above will be specifically described in the following three aspects, respectively.

First aspect: for a single spectral analysis mode, the spectral analysis process may be performed as follows:

the method comprises the steps that firstly, a charge coupled device is used for carrying out projection processing on spectrum signals to obtain spectrum signal intensity values corresponding to each band interval respectively; the physical pixel width of each column of the charge coupled device has a corresponding relation with each band interval;

and step two, determining a spectrum analysis result based on the spectrum signal intensity values respectively corresponding to the wave band intervals.

Here, a spectrum waveform chart with a wavelength as a horizontal axis and the number of photons as a vertical axis is determined based on the spectrum signal intensity values respectively corresponding to the band intervals, that is, the spectrum chart is presented in a form of counting with an abscissa as a wavelength and an ordinate as a count after photoelectric conversion, and thus a spectrum chart in a single spectrum analysis mode can be obtained.

In the process of actually determining the spectral signal intensity values corresponding to each band interval, taking into consideration that the initial cathode fluorescence signal is unfavorable for targeted spectral analysis as a continuous spectral signal, the embodiment of the disclosure can firstly enter the cathode fluorescence signal into spectrometer equipment, split light through a diffraction grating, and convert the cathode fluorescence signal into a spectral signal which widens in a certain direction in real space according to the wavelength. The spectrum signal is projected to the CCD, and the widening direction of the spectrum signal is parallel to the long side of the CCD pixel. The physical pixel width of each row of the CCD corresponds to each section of the continuous spectrum signal, a plurality of spectrum signal intensity values of the section are integrated to obtain a spectrum signal intensity value corresponding to the section, and a unique wavelength value corresponding to the section is determined through an algorithm. At this time, discretization processing of the continuous spectrum signal is completed. It is known that the discrete processing can obtain the spectral signal intensity value corresponding to each band interval.

Second aspect: for the section spectrum analysis mode, before the light splitting treatment, the light filtering treatment can be performed through the light filtering component, and then the spectrum analysis is performed on the screened light signals with specific wavebands, wherein the spectrum analysis process on the screened light signals is similar to the spectrum analysis process on the non-screened light signals, and the description is omitted herein.

The filtering component can perform filtering processing of specific wave bands on the cathode fluorescent signals, for example, the filtering component such as a band-pass filter can accurately analyze the wave band signals focused by researchers to avoid interference of stray signals, and for example, the filtering component such as a high-pass filter can distinguish whether certain peaks are second-order diffraction peaks or not by filtering intrinsic luminescence peak signals so as to fully understand the meaning of each signal peak.

In practical application, the spectrometer device in the embodiment of the disclosure can be provided with 2 filter wheels, so that optical signals with specific wave bands can be screened for section spectrum analysis. The 2 filter wheels are respectively provided with a band-pass filter and a high-pass filter.

The band-pass filter has 5 specifications of 450nm, 500nm, 550nm, 600nm and 700nm, and can allow light signals of 100nm wave bands which are up and down to 50nm of the selected wave band to pass through; the high-pass filter has 5 specifications of 360nm, 450nm, 650nm, 800nm and 1300nm, and can allow light signals above the selected wave band to pass through. The optical signals screened by the filtering component are finally received by the CCD, so that the section spectrum analysis can be realized.

The free switching of the optical filter can be realized by controlling the motor through software, and the method can be realized by the following steps:

Step one, responding to a motor control instruction, and extracting filter parameter information in the motor control instruction;

selecting a corresponding target filter from the filter component based on the filter parameter information, wherein the target filter is used for carrying out filter processing of a specific wave band on the cathode fluorescence signal.

Here, based on motor control, a corresponding optical filter can be selected to perform optical filtering treatment so as to meet the requirement of free switching of the optical filter.

Third aspect: for hyperspectral analysis mode, the cathode fluorescence signal acquired here may be the cathode fluorescence signal of each target scan point scanned under the acquired electron beam scanning operation.

For each target scanning point, the spectrum analysis for the scanning point can be realized according to the spectrum analysis scheme, namely, for any target scanning point, the spectrum waveform diagram corresponding to the target scanning point is obtained based on the spectrum signal intensity values of the target scanning point in different wave band intervals.

Considering that in practical applications, it is often intended to determine a cathode fluorescence image corresponding to each target scanning point or a target scanning area composed of each target scanning point, so as to determine a shading difference of the sample by image characteristics, where the shading difference may reflect different light emission characteristics of the sample.

Although the aim of rapidly acquiring the cathode fluorescence image can be achieved by utilizing the photomultiplier (Photomultiplier Tube, PMT), the spectrum information of each pixel point in the image cannot be acquired simultaneously while the cathode fluorescence image is acquired, namely, after the imaging based on PMT, the optical signal is utilized, so that the spectrum analysis can not be performed any more, on the basis of which the cathode fluorescence image can be restored based on the point-by-point spectrum analysis without utilizing PMT to still achieve the aim of cathode fluorescence imaging, and the spectrum analysis can be performed specifically according to the following steps:

step one, aiming at any target scanning point, carrying out superposition average operation on the basis of the spectrum signal intensity values of the target scanning point in different wave band intervals to obtain an average spectrum intensity value corresponding to the target scanning point;

and step two, collecting average spectrum intensity values corresponding to all the target scanning points, and determining a spectrum intensity graph corresponding to each target scanning point or a target scanning area formed by each target scanning point.

The average spectral intensity values here are used to characterize the gray scale characteristics of the image, and in the case of a plurality of sets of gray scale values, a cathode fluorescence image (i.e. a spectral intensity map) can be obtained. The plurality of target scanning points may be directed to a specific target scanning window, that is, within one target scanning window, may be subjected to spectral analysis based on scanning of specific discontinuous points, may be subjected to spectral analysis based on scanning of specific continuous points, and may form line segments, rectangular areas, or the like.

The rectangular scanning analysis can help a user to acquire the map data in any region, the point scanning analysis can help the user to acquire the map data of any pixel point, the line scanning analysis can help the user to analyze the map data on any line, and the function is convenient for the user to analyze in different forms.

In practical application, the user can set various scanning parameter values, precalculating the whole lattice coordinates of the electron beam scanning is realized, the coordinate information is sent to the high-speed board card for caching, and the clock is utilized to synchronously start the sending lattice and the receiving spectrum intensity image (namely the cathode fluorescence image).

The scan parameter values include, but are not limited to, scan area type, scan point number, two-point distance, selected area pixel width, selected area height, etc. The scan area type is used to indicate different scan functions and the number of scan points is used to indicate the number of points available for scanning, which may be determined based on the available memory storage space. In addition, parameter values including CCD temperature control parameters, a spectrometer slit width, an optical filter wave band, exposure time length and the like can be set.

In any scanning operation, under the condition of determining an initial spectrum analysis result of spectrum signal intensity values of target scanning points in different wave bands, spectrum analysis can be further performed, wherein, on one hand, for any target scanning point, superposition average operation can be performed on the basis of spectrum signal intensity values of the target scanning points in different wave band intervals to obtain spectrum intensity values corresponding to the target scanning points, and spectrum intensity values corresponding to all the target scanning points can be aggregated to determine a spectrum intensity map corresponding to the whole target scanning window.

In practical applications, the embodiment of the disclosure may utilize an electron beam control system to control electron beam point-by-point scanning, the cathode fluorescent signal obtained by scanning each point is finally received by a CCD through a spectrometer, and then integrated by spectrum analysis software, photon signal count is given out in the form of gray value, finally, the cathode fluorescent image (i.e. spectrum intensity diagram) is drawn again in the form of gray value of each point pixel, and the spectrum diagram is obtained by superposing the spectrum curves (i.e. spectrum waveform diagrams) of each scanning point, so that the processing and analysis of large data volume with resolution such as 2048×1536 can be realized, thus, the spectrum data of each scanning point can be obtained while the whole cathode fluorescent image is obtained, and the applicability is significantly improved.

Based on the spectrum analysis method provided by the embodiment of the disclosure, under the condition that spectrum analysis results corresponding to each detection sample are obtained, the luminescence peak positions corresponding to each detection sample can be determined according to each spectrum analysis result, and the luminescence peak positions can be used for characterizing the characteristics of the sample to a great extent.

The spectrum analysis result may be an analysis result of integrating the above modes, for example, performing a hyperspectral line scan from top to bottom on some samples, so as to obtain blue shift and red shift information of specific peak positions, obtain different peak position information of top and bottom of the samples, and further analyze the cause of peak position difference of different positions of the samples.

The peak position analysis scheme provided by the embodiment of the disclosure has very important significance for detecting the defects of the sample, wherein the mapping relation between the luminescence peak position of each detected sample and various defect types can be established in advance, and then the defect types of various samples to be detected are determined based on the mapping relation.

In practical application, automatic peak searching of the luminescence peak position can be finished, the resolution of the peak position is detected, then, a luminescence peak position database of different samples and defects is gradually built, and here, the peak position information of different samples can be calibrated according to the database, and the calibration rate is given.

And finally, analyzing information such as possible defect types through the calibrated peak position information.

In the description of the present specification, reference to the terms "some possible embodiments," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiments or examples is included in at least one embodiment or example of the present disclosure. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples described in this specification and the features of the various embodiments or examples may be combined and combined by those skilled in the art without contradiction.

With respect to the method flow diagrams of the disclosed embodiments, certain operations are described as distinct steps performed in a certain order. Such a flowchart is illustrative and not limiting. Some steps described herein may be grouped together and performed in a single operation, may be partitioned into multiple sub-steps, and may be performed in an order different than that shown herein. The various steps illustrated in the flowcharts may be implemented in any manner by any circuit structure and/or tangible mechanism (e.g., by software running on a computer device, hardware (e.g., processor or chip implemented logic functions), etc., and/or any combination thereof).

It will be appreciated by those skilled in the art that in the above-described method of the specific embodiments, the written order of steps is not meant to imply a strict order of execution but rather should be construed according to the function and possibly inherent logic of the steps.

Based on the same inventive concept, the embodiments of the present disclosure further provide a spectrum analysis device corresponding to the spectrum analysis method, and since the principle of solving the problem by the device in the embodiments of the present disclosure is similar to that of the spectrum analysis method in the embodiments of the present disclosure, the implementation of the device may refer to the implementation of the method, and the repetition is omitted.

Referring to fig. 2, which is a schematic diagram of a spectrum analysis device according to an embodiment of the disclosure, the device includes: an acquisition module 201, a light splitting module 202 and an analysis module 203; wherein, the liquid crystal display device comprises a liquid crystal display device,

an acquisition module 201, configured to acquire a cathode fluorescence signal acquired by a cathode fluorescence detector;

the light splitting module 202 is configured to perform light splitting processing on the cathode fluorescent signal by using a grating light splitting component to obtain a spectrum signal;

and the analysis module 203 is configured to perform spectral analysis processing based on the spectral signal, so as to obtain a spectral analysis result.

By adopting the spectrum analysis device, under the condition that the cathode fluorescence signal collected by the cathode fluorescence detector is obtained, the grating light-splitting component can be utilized to carry out light-splitting treatment on the cathode fluorescence signal, and then spectrum analysis treatment is carried out on the basis of the spectrum signal, so that a spectrum analysis result is obtained. In consideration of the fact that the optical signals with different wavelengths have different spectral characteristics, the optical signals can be distinguished in terms of wavelength by the optical splitting treatment, and then the spectral characteristics of the luminous samples with different wavelengths or wave bands can be obtained based on further spectral analysis treatment, for example, spectral characteristic comparison analysis, spectral characteristic average analysis and the like can be carried out, so that the spectral analysis with higher precision and more dimensions is realized.

In a possible implementation manner, the analysis module 203 is configured to perform a spectral analysis process based on the spectral signal according to the following steps:

and determining a spectrum analysis result based on the spectrum signal intensity values respectively corresponding to the wave band intervals.

In a possible implementation manner, the analysis module 203 is configured to determine a spectral analysis result based on the spectral signal intensity values corresponding to the band intervals respectively according to the following steps:

determining a spectrum waveform diagram taking the wavelength as a horizontal axis and taking the photon number as a vertical axis based on spectrum signal intensity values respectively corresponding to each band interval;

the spectral waveform diagram is determined as a spectral analysis result.

In a possible implementation manner, the analysis module 203 is configured to determine the spectral signal intensity values corresponding to the band intervals respectively according to the following steps:

for a target band interval in each band interval, performing projection processing on the spectrum signals by using a charge coupled device, and determining a plurality of spectrum signal intensity values generated in the target band interval; the method comprises the steps of,

In one possible implementation, the light-splitting module 202 is configured to perform a light-splitting process on the cathode fluorescent signal by using the grating light-splitting component according to the following steps:

performing light filtering treatment on the cathode fluorescence signal in a specific wave band by utilizing a light filtering component to obtain a filtered cathode fluorescence signal;

In one possible embodiment, the filter means comprises a bandpass filter for allowing light signals of a wavelength band of 50nm to pass up and down a specific wavelength band and/or a highpass filter for allowing light signals above the specific wavelength band to pass.

In a possible embodiment, in case the filtering means comprises at least two filters, the above-mentioned device further comprises:

the selecting module 204 is configured to respond to the motor control instruction, and extract filter parameter information in the motor control instruction; and selecting a corresponding target optical filter from the optical filter component based on the optical filter parameter information, wherein the target optical filter is used for carrying out optical filter processing of a specific wave band on the cathode fluorescent signal.

In one possible embodiment, the obtaining module 201 is configured to obtain the cathode fluorescence signal collected by the cathode fluorescence detector according to the following steps:

aiming at any target scanning point, carrying out superposition average operation on the basis of the spectrum signal intensity values of the target scanning point in different wave band intervals to obtain an average spectrum intensity value corresponding to the target scanning point;

and collecting the average spectrum intensity values corresponding to the target scanning points, and determining a spectrum intensity map corresponding to each target scanning point or a target scanning area formed by each target scanning point.

In a possible embodiment, in the case that the spectrum analysis result is plural, after obtaining the spectrum analysis result, the apparatus further includes:

the establishing module 205 is configured to determine, according to each spectral analysis result, a luminescence peak position corresponding to each detection sample; and establishing a mapping relation between the luminescence peak positions of each detection sample and various defect types.

In one possible embodiment, the apparatus further includes:

the detection module 206 is used for determining the luminescence peak position of the sample to be detected based on the spectrum analysis result of the sample to be detected; and determining the defect type matched with the sample to be detected based on the established mapping relation.

It should be noted that, the apparatus in the embodiments of the present disclosure may implement each process of the foregoing embodiments of the method, and achieve the same effects and functions, which are not described herein again.

The embodiment of the disclosure further provides an electronic device, as shown in fig. 3, which is a schematic structural diagram of the electronic device provided by the embodiment of the disclosure, including: a processor 301, a memory 302, and a bus 303. The memory 302 stores machine-readable instructions executable by the processor 301 (e.g., execution instructions corresponding to the acquisition module 201, the spectroscopy module 202, the analysis module 203 in the apparatus of fig. 2, etc.), when the electronic device is running, the processor 301 and the memory 302 communicate through the bus 303, and when the machine-readable instructions are executed by the processor 301, the following processes are performed:

carrying out light-splitting treatment on the cathode fluorescence signal by utilizing a grating light-splitting component to obtain a spectrum signal;

The disclosed embodiments also provide a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the spectroscopic analysis method described in the method embodiments described above. Wherein the storage medium may be a volatile or nonvolatile computer readable storage medium.

Embodiments of the present disclosure further provide a computer program product, where the computer program product carries a program code, where instructions included in the program code may be used to perform steps of a spectrum analysis method described in the foregoing method embodiments, and specifically reference may be made to the foregoing method embodiments, which are not described herein.

Wherein the above-mentioned computer program product may be realized in particular by means of hardware, software or a combination thereof. In an alternative embodiment, the computer program product is embodied as a computer storage medium, and in another alternative embodiment, the computer program product is embodied as a software product, such as a software development kit (Software Development Kit, SDK), or the like.

The various embodiments in this disclosure are described in a progressive manner, and identical and similar parts of the various embodiments are all referred to each other, and each embodiment is mainly described as different from other embodiments. In particular, for apparatus, devices and computer readable storage medium embodiments, the description thereof is simplified as it is substantially similar to the method embodiments, as relevant points may be found in part in the description of the method embodiments.

The apparatus, the device, and the computer readable storage medium provided in the embodiments of the present disclosure are in one-to-one correspondence with the methods, and therefore, the apparatus, the device, and the computer readable storage medium also have similar advantageous technical effects as the corresponding methods, and since the advantageous technical effects of the methods have been described in detail above, the advantageous technical effects of the apparatus, the device, and the computer readable storage medium are not repeated herein.

It will be apparent to those skilled in the art that embodiments of the present disclosure may be provided as a method, apparatus (device or system), or computer readable storage medium. Accordingly, the present disclosure may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present disclosure may take the form of a computer-readable storage medium embodied in one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.

The present disclosure is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (devices or systems) and computer-readable storage media according to embodiments of the disclosure. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

In one typical configuration, a computing device includes one or more processors (CPUs), input/output interfaces, network interfaces, and memory.

The memory may include volatile memory in a computer-readable medium, random Access Memory (RAM) and/or nonvolatile memory, such as Read Only Memory (ROM) or flash memory (flash RAM). Memory is an example of computer-readable media.

Computer readable media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium, which can be used to store information that can be accessed by a computing device. Furthermore, although the operations of the methods of the present disclosure are depicted in the drawings in a particular order, this is not required to or suggested that these operations must be performed in this particular order or that all of the illustrated operations must be performed in order to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step to perform, and/or one step decomposed into multiple steps to perform.

While the spirit and principles of the present disclosure have been described with reference to several particular embodiments, it is to be understood that this disclosure is not limited to the particular embodiments disclosed nor does it imply that features in these aspects are not to be combined to benefit from this division, which is done for convenience of description only. The disclosure is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims

1. A method of spectroscopic analysis comprising:

2. The method of claim 1, wherein the performing a spectral analysis process based on the spectral signal comprises:

3. The method according to claim 2, wherein determining the spectral analysis result based on the spectral signal intensity values respectively corresponding to the band intervals comprises:

and determining the spectrum waveform diagram as the spectrum analysis result.

4. The method according to claim 2, wherein the spectral signal intensity values corresponding to the respective band intervals are determined by:

5. The method according to any one of claims 1 to 4, wherein the spectroscopic processing of the cathode fluorescence signal with a grating spectroscopic component comprises:

6. The method according to claim 5, wherein the filter means comprises a bandpass filter for allowing light signals of a wavelength band of 50nm to pass through, and/or a highpass filter for allowing light signals of a wavelength band above.

7. The method of claim 5, wherein in the case where the filter component includes at least two filters, the method further comprises:

8. The method of any one of claims 2 to 4, wherein the acquiring the cathode fluorescence signal acquired by the cathode fluorescence detector comprises:

9. The method of claim 8, wherein the performing a spectral analysis process based on the spectral signal comprises:

10. The method according to any one of claims 1 to 4, wherein in the case where the spectral analysis result is plural, the method further comprises, after obtaining the spectral analysis result:

11. The method according to claim 10, wherein the method further comprises:

12. A spectroscopic analysis device, comprising:

13. An electronic device, comprising: a processor, a memory and a bus, the memory storing machine-readable instructions executable by the processor, the processor and the memory in communication over the bus when the electronic device is running, the machine-readable instructions when executed by the processor performing the spectroscopic analysis method of any one of claims 1 to 11.

14. A computer-readable storage medium, characterized in that it has stored thereon a computer program which, when executed by a processor, performs the spectroscopic analysis method as claimed in any one of claims 1 to 11.