CN116380326A

CN116380326A - Pressure sensor

Info

Publication number: CN116380326A
Application number: CN202310398113.0A
Authority: CN
Inventors: 张锋; 牟昌华; 赵迪; 胡蕾; 随辰; 王圻; 栗晓; 李召兴; 杨庆利; 彭振; 邓博文; 阮向娟
Original assignee: Beijing Sevenstar Flow Co Ltd
Current assignee: Beijing Sevenstar Flow Co Ltd
Priority date: 2023-04-13
Filing date: 2023-04-13
Publication date: 2023-07-04

Abstract

The invention provides a pressure sensor, which comprises a first fixing seat, a second fixing seat, a conductive film and a fixed electrode, and comprises: the device comprises a first fixing seat, a second fixing seat, a conductive film and a fixed electrode; the fixed electrode is arranged in the first fixed seat; the conductive film is clamped and fixed between the first fixing seat and the second fixing seat and is arranged opposite to the fixed electrode; one of the end surfaces of the first fixing seat and the second fixing seat, which are contacted with the conductive film, is provided with a convex part, the other one is provided with a concave part, and the convex part and the concave part are matched to tension the conductive film; or the conductive film tensioning device further comprises a pressing part, wherein at least one of the end faces of the first fixing seat and the second fixing seat, which are in contact with the conductive film, is provided with a containing concave part for containing the pressing part, and the pressing part is matched with the containing concave part to tension the conductive film. According to the invention, the conductive film is stretched and flattened through the structure between the end surfaces of the first fixing seat and the second fixing seat, so that the detection precision and stability of the pressure sensor are improved.

Description

Pressure sensor

Technical Field

The invention relates to the field of semiconductor process equipment, in particular to a pressure sensor.

Background

In the fields of semiconductors, photovoltaics and the like, when chips are produced by etching and the like, high-precision monitoring of the pressure of process gas is required so as to accurately control parameters such as the pressure, the flow and the like of the gas, and further ensure the quality of products.

In the prior art, high-precision pressure detection is often realized through a capacitance film type pressure sensor, specifically, the pressure sensor comprises an upper seat, a lower seat, a fixed polar plate and a movable membrane, wherein the fixed polar plate is arranged in the upper seat, the peripheral edge of the movable membrane is clamped between the upper seat and the lower seat, one side of the movable membrane is opposite to the fixed polar plate, and the other side of the movable membrane is communicated with gas to be detected through the lower seat. When the pressure of the gas to be measured changes, the deformation of the movable membrane also changes, so that the capacitance between the fixed polar plate and the movable membrane changes, and the pressure of the gas to be measured can be determined by detecting the capacitance.

However, the existing pressure sensor often has unstable detection results, and it is difficult to ensure the accuracy of gas flow and pressure control. Therefore, how to improve the detection accuracy and stability of the pressure sensor is a technical problem to be solved in the art.

Disclosure of Invention

The embodiment of the invention aims to provide a pressure sensor which is high in detection precision and good in stability.

To achieve the above object, an embodiment of the present invention provides a pressure sensor including: the device comprises a first fixing seat, a second fixing seat, a conductive film and a fixed electrode;

the fixed electrode is arranged in the first fixed seat;

the conductive film is clamped and fixed between the first fixing seat and the second fixing seat and is arranged opposite to the fixed electrode;

one of the end face of the first fixing seat, which is contacted with the conductive film, and the end face of the second fixing seat, which is contacted with the conductive film, is provided with a protruding part, the other one is provided with a recessed part, and the protruding part and the recessed part are matched to tension the conductive film; or alternatively

The pressure sensor further comprises a pressing part, wherein a containing concave part for containing the pressing part is formed on at least one of the end face, contacted with the conductive film, of the first fixing seat and the end face, contacted with the conductive film, of the second fixing seat, and the pressing part is matched with the containing concave part to tension the conductive film.

Optionally, the first fixing seat and the second fixing seat are cylindrical, the first fixing seat and the second fixing seat are coaxial, and the end face shape of the first fixing seat corresponds to the end face shape of the second fixing seat;

the protruding portion comprises a first conical surface coaxial with the axis, the recessed portion comprises a second conical surface coaxial with the axis, and the conductive film is clamped between the first conical surface and the second conical surface.

Optionally, the end face of the first fixing seat and the end face of the second fixing seat further include guiding planes, the guiding planes of the end faces of the first fixing seat correspond to the guiding planes of the end faces of the second fixing seat, and the conductive film is clamped between the two guiding planes.

Optionally, the outer edge of the first conical surface and the outer edge of the second conical surface are respectively connected with the corresponding guiding plane, and a first transverse distance value of the connection part of the outer edge of the second conical surface and the guiding plane at any circumferential position along the direction away from the axis beyond the connection part of the outer edge of the first conical surface and the guiding plane at the same circumferential position meets L1< tan (alpha/2) ×t;

Wherein L1 is the first transverse distance value, alpha is the included angle between the generatrix of the second conical surface and the guiding plane, and T is the thickness of the conductive film.

Optionally, the inner edge of the first conical surface and the inner edge of the second conical surface are respectively connected with the corresponding guiding plane, and a second transverse distance value exceeding the inner edge of the first conical surface in the direction away from the axis at the joint of any circumferential position and the guiding plane at the joint of the inner edge of the second conical surface and the guiding plane at the same circumferential position meets L2> tan (alpha/2) x T;

wherein L2 is the second transverse distance value, alpha is the included angle between the generatrix of the second conical surface and the guiding plane, and T is the thickness of the conductive film.

Optionally, the protruding portion is formed on the second fixing seat, the recessed portion is formed on the first fixing seat, the outer edge of the first conical surface and the outer edge of the second conical surface are respectively connected with the corresponding guiding plane, the inner edge of the first conical surface is connected with the inner side wall of the second fixing seat, and the inner edge of the second conical surface is connected with the inner side wall of the first fixing seat;

A communication hole is formed in the second fixing seat, and the communication hole penetrates through the protruding part and communicates the space between the guide plane on the second fixing seat and the conductive film with the interior of the second fixing seat; and/or

And a communication groove is formed on the second conical surface, and the communication groove communicates the space between the guide plane on the first fixing seat and the conductive film with the inside of the first fixing seat.

Optionally, the protruding portion is formed on the first fixing seat, the recessed portion is formed on the second fixing seat, the outer edge of the first conical surface and the outer edge of the second conical surface are respectively connected with the corresponding guiding plane, the inner edge of the first conical surface is connected with the inner side wall of the first fixing seat, and the inner edge of the second conical surface is connected with the inner side wall of the second fixing seat;

a communication hole is formed in the first fixing seat, and the communication hole penetrates through the protruding part and communicates the space between the guide plane on the first fixing seat and the conductive film with the interior of the first fixing seat; and/or

And a communication groove is formed on the second conical surface, and the communication groove communicates the space between the guide plane on the second fixing seat and the conductive film with the inside of the second fixing seat.

Optionally, the second fixing seat is cylindrical, and the end face shape of the first fixing seat corresponds to the end face shape of the second fixing seat;

the protruding part is an annular protruding part extending around the axis of the second fixing seat, or

The number of the protruding parts is a plurality, and the plurality of the protruding parts are distributed around the axis.

Optionally, the end face of the first fixing seat and the end face of the second fixing seat further include a guiding plane, and the guiding plane of the first fixing seat corresponds to the guiding plane of the second fixing seat.

Optionally, the top of protruding portion has first centre gripping plane, the bottom of depressed part has the second centre gripping plane, just first centre gripping plane with the second centre gripping plane respectively with the inside wall of corresponding first fixing base or the inside wall of second fixing base meets.

Optionally, the protruding portion is formed on the second fixing base, and the recessed portion is formed on the first fixing base;

And a communication groove is formed on the second clamping plane, and the communication groove communicates the space between the guide plane and the conductive film on the first fixing seat with the inside of the first fixing seat.

Optionally, the protruding portion is formed on the first fixing base, and the recessed portion is formed on the second fixing base;

And a communication groove is formed on the second clamping plane, and the communication groove communicates the space between the guide plane and the conductive film on the second fixing seat with the inside of the second fixing seat.

Optionally, the top of the cross section of the protruding portion is provided with a convex first arc, the bottom of the cross section of the recessed portion is provided with a concave second arc, the maximum depth of the recessed portion is larger than the height of the protruding portion, and the maximum width of the recessed portion is larger than the maximum width of the protruding portion.

Optionally, the end face of the first fixing seat and the end face of the second fixing seat further include a guide plane, and the guide plane of the first fixing seat corresponds to the guide plane of the second fixing seat; the convex portions and the concave portions are respectively formed on the corresponding guide planes.

the second fixing seat is also provided with a first communication hole, and the first communication hole penetrates through the protruding part and communicates the space between the guide plane on the second fixing seat and the conductive film with the interior of the second fixing seat; and/or

The first fixing seat is also provided with a second communication hole, and the second communication hole communicates the concave part with the inside of the first fixing seat.

the first fixing seat is also provided with a first communication hole which penetrates through the protruding part and communicates the space between the guide plane on the first fixing seat and the conductive film with the interior of the first fixing seat; and/or

The second fixing seat is also provided with a second communication hole, and the second communication hole communicates the concave part with the inside of the second fixing seat.

Optionally, the cross-sectional profile shape of the pressing portion is a circle, and a sum of a cross-sectional diameter of the pressing portion and a thickness of the conductive film is greater than a sum of a depth of the accommodation recess on the end face of the first fixing base and a depth of the accommodation recess on the end face of the second fixing base.

Optionally, the bottom of the cross section of the accommodating recess part is provided with a third concave arc, and the difference between the radius of the third arc and the radius of the cross section of the pressing part is larger than the thickness of the conductive film.

Optionally, a communication hole is further formed in at least one of the first fixing seat and the second fixing seat, and the communication hole communicates the corresponding accommodating recess portion with the interior of the corresponding first fixing seat or the second fixing seat.

Optionally, the end face of the first fixing seat is formed with the accommodating recess, the first fixing seat is further formed with the communication hole, the end face of the second fixing seat is formed with a first communication groove, one end of the first communication groove is communicated with the interior of the second fixing seat, and the other end of the first communication groove extends to the outer side of the accommodating recess.

Optionally, the accommodating recess is formed on the end face of the second fixing seat, the communication hole is further formed in the second fixing seat, a first communication groove is formed on the end face of the first fixing seat, one end of the first communication groove is communicated with the inside of the first fixing seat, and the other end of the first communication groove extends to the outer side of the accommodating recess.

In the pressure sensor provided by the embodiment of the invention, the bottom end of the first fixing seat and the top end of the second fixing seat are not used for clamping the edge of the conductive film in a mode that the planes are close to each other, but are used for extruding the conductive film through the matching of the convex part on one of the first fixing seat and the second fixing seat and the concave part on the other, or are used for extruding the conductive film through the matching of the pressing part between the two and the containing concave part on at least one. In the process that the edge of the conductive film is extruded into the concave part by the convex part or is extruded into the accommodating concave part by the pressing part, the conductive film is gradually deformed by the original leveling structure, and the part extruded into the concave part or the accommodating concave part applies traction stress to the surrounding materials, so that the central area of the conductive film is stretched and leveled under the action of the tension of the surrounding deformation parts. According to the invention, the structure between the first fixing seat end face and the second fixing seat end face is used for automatically applying the pretightening force to the conductive film in the assembly process to enable the conductive film to be stretched and flattened, and the conductive film is not required to be tensioned by adopting a complex process, so that the detection precision and stability of the pressure sensor are improved while the manufacturing process of the pressure sensor is simplified.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate the invention and together with the description serve to explain, without limitation, the invention. In the drawings:

FIG. 1 is a schematic diagram of a pressure sensor according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of a pressure sensor according to another embodiment of the present invention;

FIG. 3 is a schematic view of a part of the structure of a pressure sensor according to an embodiment of the present invention;

FIG. 4 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 5 is an enlarged partial schematic view of the structure of FIG. 4 at area A;

FIG. 6 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 7 is a schematic view of the structure of FIG. 6 in a partial enlarged view in region B;

FIG. 8 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 9 is an enlarged partial schematic view of the structure of FIG. 8 at region C;

FIG. 10 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 11 is a schematic view of the structure of FIG. 10 at another perspective;

FIG. 12 is a schematic view of the structure of FIG. 11 in partial enlargement at region D;

FIG. 13 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 14 is an enlarged partial schematic view of the structure of FIG. 13 at region E;

FIG. 15 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 16 is an enlarged partial schematic view of the structure of FIG. 15 at region F;

FIG. 17 is a schematic view of a portion of a pressure sensor according to another embodiment of the present invention;

FIG. 18 is a partially enlarged schematic illustration of the structure of FIG. 17 in region G;

FIG. 19 is a schematic view showing a partial structure of a pressure sensor according to another embodiment of the present invention;

FIG. 20 is an enlarged partial schematic view of the structure of FIG. 19 in region H;

FIG. 21 is a schematic diagram of a situation where a first fixing seat and a second fixing seat are matched in a pressure sensor according to an embodiment of the present invention;

FIG. 22 is a schematic diagram of another situation where the first fixing base and the second fixing base are matched in the pressure sensor according to the embodiment of the present invention;

fig. 23 is a schematic diagram of another situation in which the first fixing base and the second fixing base are matched in the pressure sensor according to the embodiment of the present invention.

Reference numerals illustrate:

110: the first fixing base 111: fixing cylinder

112: top cover 120: second fixing seat

130: the boss 140: recess portion

141: the accommodating recess 150: communication hole

151: first communication hole 152: a second communication hole

160: the communication groove 161: first communicating groove

200: compression section 300: conductive film

400: fixed electrode assembly 410: fixed electrode

411: fixing plate 412: electrode plate

420: connection structure 421: connecting rod

422: sealing sleeve 430: connecting wire

A1: first conical surface A2: a second conical surface

B: guide plane

Detailed Description

The following describes specific embodiments of the present invention in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.

In the related technical scheme, in order to make the movable membrane better sense the pressure change, the thickness of the movable membrane is made as thin as possible, so that the movable membrane cannot be kept flat by the structural strength of the movable membrane. The existing pressure sensor is usually simply arranged between the upper seat and the lower seat in the assembly process, so that after the periphery of the movable membrane is clamped by the upper seat and the lower seat, the parts, which are not clamped by the upper seat and the lower seat, of the center are loose and uneven, so that the state of the pressure sensor is unstable when the pressure sensor works, and the stability and the precision of the detection result of the pressure sensor are poor.

To solve the above-mentioned problems, as shown in fig. 1 and 2, the pressure sensor according to the embodiment of the present invention includes a first fixed base 110 (including a fixed cylinder 111), a second fixed base 120, a conductive film 300 (also referred to as a dynamic film), and a fixed electrode assembly 400, wherein the fixed electrode assembly 400 includes a fixed electrode 410, and the fixed electrode 410 is disposed in the first fixed base 110.

The conductive film 300 is clamped and fixed between the first fixing base 110 and the second fixing base 120, and is disposed opposite to the fixed electrode 410.

As shown in fig. 2 to 16 (only the fixing cylinder 111 of the first fixing base 110 is shown in the drawings), one of the end surface of the first fixing base 110 contacting the conductive film 300 and the end surface of the second fixing base 120 contacting the conductive film 300 is formed with a protrusion 130, the other is formed with a recess 140, and the protrusion 130 and the recess 140 cooperate to tension the conductive film 300;

alternatively, as shown in fig. 17 to 20 (only the fixing cylinder 111 of the first fixing base 110 is shown in the drawings), the pressure sensor further includes a pressing part 200, and at least one of an end surface of the first fixing base 110 contacting the conductive film 300 and an end surface of the second fixing base 120 contacting the conductive film 300 is formed with a receiving recess 141 receiving the pressing part 200, and the pressing part 200 and the receiving recess 141 cooperate to tension the conductive film 300.

In the embodiment of the invention, the bottom end of the first fixing base 110 and the top end of the second fixing base 120 do not clamp the edge of the conductive film 300 by means of plane-to-plane approaching, but press the conductive film 300 by means of the convex portion 130 on one of the first fixing base 110 and the second fixing base 120 and the concave portion 140 on the other, or press the conductive film 300 by means of the pressing portion 200 therebetween and the accommodating concave portion 141 on at least one.

In the process that the edge of the conductive film 300 is extruded into the concave portion 140 by the convex portion 130 or into the accommodating concave portion 141 by the pressing portion 200, the conductive film 300 is gradually deformed from the original flat structure, and the portion extruded into the concave portion 140 or the accommodating concave portion 141 applies a traction stress to the surrounding material, so that the central area of the conductive film 300 is stretched and flattened under the tension of the surrounding deformed portion.

According to the embodiment of the invention, the structure between the end face of the first fixing seat 110 (bottom end) and the end face of the second fixing seat 120 (top end) is adopted, so that the pre-tightening force is automatically applied to the conductive film 300 in the assembly process, the conductive film 300 is stretched and flattened, and the conductive film 300 is not required to be tensioned by adopting a complex process, so that the manufacturing process of the pressure sensor is simplified, and meanwhile, the detection precision and stability of the pressure sensor are improved.

In the embodiment of the present invention, the words of upper and lower relationship such as top and bottom are consistent with the vertical direction in the drawings of the specification.

Optionally, the pressure sensor further includes a detection module, which is electrically connected to (the conductive portion of) the fixed electrode assembly 400 and the conductive film 300, and is configured to detect a capacitance between the fixed electrode 410 and the conductive film 300, and determine a pressure of the fluid to be measured (i.e. a fluid pressure in a fluid environment connected to the bottom end of the second fixing base 120) according to the capacitance value.

In order to ensure the detection accuracy of the pressure sensor, as shown in fig. 1 and 2, as a preferred implementation manner of the embodiment of the present invention, the first fixing seat 110 includes a fixing cylinder 111 and a top cover 112, the fixing electrode 410 is fixedly disposed in the fixing cylinder 111, the top cover 112 seals the top end of the fixing cylinder 111, so as to prevent external impurities, dust or corrosive gas from entering into the fixing cylinder 111 to contact with the fixing electrode 410 and affect the electrical parameters thereof, thereby ensuring the detection accuracy of the pressure sensor, or form a closed cavity together with the fixing cylinder 111 and the movable membrane 300, so as to provide a reference cavity with constant pressure.

As some alternative implementations of the embodiment of the present invention, as shown in fig. 1, the fixed electrode 410 includes a fixed plate 411 and an electrode plate 412, the fixed plate 411 is fixedly disposed in the fixed cylinder 111, the electrode plate 412 is fixedly disposed on the fixed plate 411, and the electrode plate 412 is disposed opposite to the conductive film 300.

Alternatively, as shown in fig. 1, an annular step surrounding the second fixing base 120 is formed on the inner wall of the fixing cylinder 111, and the fixing plate 411 is fixedly disposed on the annular step.

To further secure the detection accuracy of the pressure sensor, as a preferred implementation of the embodiment of the present invention, as shown in fig. 1, the fixed electrode assembly 400 further includes a connection structure 420 and a connection wire 430, the connection structure 420 being fixedly disposed on the top cover 112, the connection wire 430 being electrically connected between the connection structure 420 and the fixed electrode 410.

In the embodiment of the invention, the connection structure 420 and the fixed electrode 410 of the fixed electrode assembly 400 are respectively and fixedly arranged on the top cover 112 and in the first fixed seat 110 and are connected through the connecting wire 430, so that when the fixed electrode 410 is connected with an external circuit (such as a detection module) through the connection structure 420, vibration and stress changes caused by connector plugging are not transmitted to the fixed electrode 410, the stability of the position of the fixed electrode 410 in the first fixed seat 110 is ensured, and the detection precision of the pressure sensor is further ensured.

As some optional implementations of the embodiment of the present invention, as shown in fig. 1, the connection structure 420 includes a connection rod 421 and a sealing sleeve 422, the sealing sleeve 422 is sleeved on the connection rod 421, the top end of the connection rod 421 passes through the avoidance hole on the top cover 112 to the outside of the first fixing seat 110, the bottom end of the connection rod 421 is electrically connected with (the electrode plate 412 of) the fixed electrode 410 through a connection wire 430, and the sealing sleeve 422 seals the avoidance hole on the top cover 112.

To simplify the structure of the first fixing base 110 and the fixed electrode assembly 400, as some alternative implementations of the embodiment of the present invention, as shown in fig. 2, the fixed cylinder 111 and the top cover 112 may be formed as one body, the fixed electrode assembly 400 includes a fixed electrode 410 and a connecting rod 421, the connecting rod 421 is formed as one body with the fixed electrode 410, and the top end of the connecting rod 421 passes through the avoiding hole on the top cover 112 to the outside of the first fixing base 110.

Alternatively, the conductive film 300 may be made of metal, or may be formed by attaching a layer of metal material to the insulating film.

Alternatively, the electrode plate 412 may be made of metal, or may be formed by attaching a layer of metal material to the surface of an insulating material (e.g., ceramic).

As some optional implementations of the embodiments of the present invention, as shown in fig. 1 and 2, the first fixing seat 110 and the second fixing seat 120 are cylindrical, the first fixing seat 110 and the second fixing seat 120 are coaxial, and the shape of an end face of the first fixing seat 110 (the end face of the bottom end of the fixing cylinder 111 in the figure) corresponds to the shape of the end face of the second fixing seat 120;

as shown in fig. 3 to 9, the protrusion 130 includes a first tapered surface A1 coaxial with the axis, the recess 140 includes a second tapered surface A2 coaxial with the axis, and the conductive film 300 is sandwiched between the first tapered surface A1 and the second tapered surface A2 (the conductive film 300 is omitted in fig. 3 to 20 for facilitating the observation of the structure near the conductive film 300).

In the embodiment of the invention, the protruding portion 130 has a first conical surface A1, the recessed portion 140 has a second conical surface A2, and the corresponding annular region at the edge of the conductive film 300 is deformed into a conical surface structure by the cooperation of the first conical surface A1 and the second conical surface A2, so that the central region of the conductive film 300 is pulled from the periphery, and the conductive film 300 is stretched and flattened.

As some optional implementations of the embodiments of the present invention, the outer edge of the first conical surface A1 and the outer edge of the second conical surface A2 are respectively connected to the outer side wall of the corresponding first fixing seat 110 or the outer side wall of the second fixing seat 120, and the inner edge of the first conical surface A1 and the inner edge of the second conical surface A2 are respectively connected to the inner side wall of the corresponding first fixing seat 110 or the inner side wall of the second fixing seat 120. That is, the protrusion 130 covers the end surface of the corresponding first fixing seat 110 or the end surface of the second fixing seat 120, and one side of the recess 140 extends to be connected with the side wall of the corresponding first fixing seat 110 or second fixing seat 120.

For example, as shown in fig. 3, in the case where the protrusion 130 is formed on the second fixing base 120, the outer edge of the first tapered surface A1 is in contact with the outer sidewall of the second fixing base 120, the inner edge of the first tapered surface A1 is in contact with the inner sidewall of the second fixing base 120, the outer edge of the second tapered surface A2 is in contact with the outer sidewall of the first fixing base 110, and the inner edge of the second tapered surface A2 is in contact with the inner sidewall of the first fixing base 110. That is, the protrusion 130 covers the end surface of the second fixing base 120, and the inner side of the recess 140 extends to the inner side wall of the first fixing base 110.

As some alternative implementations of the embodiments of the present invention, the outer edge of the end surface of the first fixing seat 110 is welded to the outer edge of the end surface of the second fixing seat 120.

As some optional implementations of the embodiments of the present invention, the bottom end surface of the first fixing seat 110 and the top end surface of the second fixing seat 120 may further include a combined conical surface and plane structure, specifically, as shown in fig. 4 to 9, the end surface of the first fixing seat 110 and the end surface of the second fixing seat 120 further include a guiding plane B, the guiding plane B of the end surface of the first fixing seat 110 corresponds to the guiding plane B of the end surface of the second fixing seat 120, and the conductive film 300 is clamped between the two guiding planes B.

As some alternative implementations of the embodiments of the present invention, the outer edge of the first conical surface A1 and the outer edge of the second conical surface A2 respectively meet the corresponding guiding plane B (for example, in the case of fig. 4 to 7), or the inner edge of the first conical surface A1 and the inner edge of the second conical surface A2 respectively meet the corresponding guiding plane B (for example, in the case of fig. 8 to 9).

As some alternative implementations of the embodiments of the present invention, the bottom end surface of the first fixing base 110 and the top end surface of the second fixing base 120 include only a conical surface and a plane located at one side of the conical surface.

For example, as some alternative implementations of the embodiment of the present invention, in the case that the protruding portion 130 and the recessed portion 140 are located at the inner sides, as shown in fig. 4 to 7, the outer edge of the first conical surface A1 and the outer edge of the second conical surface A2 are respectively connected to the corresponding guiding plane B, and the inner edge of the first conical surface A1 and the inner edge of the second conical surface A2 are respectively connected to the corresponding inner side wall of the first fixing seat 110 or the inner side wall of the second fixing seat 120.

As another alternative implementation manner of the embodiment of the present invention, in the case that the protruding portion 130 and the recessed portion 140 are located at the outer side, as shown in fig. 4 to 7, the inner edge of the first conical surface A1 and the inner edge of the second conical surface A2 are respectively connected to the corresponding guiding plane B, and the outer edge of the first conical surface A1 and the outer edge of the second conical surface A2 are respectively connected to the corresponding outer side wall of the first fixing seat 110 or the outer side wall of the second fixing seat 120.

To ensure the integrity of the conductive film 300, as a preferred implementation of the embodiment of the present invention, the first conical surface A1 is in curved transitional connection with the corresponding guiding plane B; the second conical surface A2 is in curved surface transitional connection with the corresponding guide plane B.

In the embodiment of the invention, the first conical surface A1 and the second conical surface A2 are respectively connected with the corresponding guide plane B in a curved surface transitional manner, so that the conductive film 300 is prevented from being scratched by a sharp edge structure at the intersecting position of the two surfaces, the integrity of the conductive film 300 is ensured, and the stability of the pressure sensor is further ensured.

In the case that the bottom end surface of the first fixing base 110 and the top end surface of the second fixing base 120 are of a combined structure of conical surfaces and planes, the conductive film 300 is still deformed and tensioned by the matching relationship between the conical surfaces, and the fixing of the edge of the conductive film 300 is not necessarily performed by the first conical surface A1 and the second conical surface A2. In order to ensure the tension in the central region of the conductive film 300, it is preferable that the distance between the surfaces adjacent to the second fixing base 120 (i.e., between the inner side surfaces) is greater than the distance between the outer side surfaces when the bottom end surface of the first fixing base 110 is closed with the top end surface of the second fixing base 120.

Specifically, as some preferred implementations of the embodiments of the present invention, as shown in fig. 5, the outer edge of the first conical surface A1 and the outer edge of the second conical surface A2 are respectively connected to the corresponding guiding plane B, and the first lateral distance L1 of the junction a of the outer edge of the second conical surface A2 and the guiding plane B at any circumferential position beyond the junction B of the outer edge of the first conical surface A1 and the guiding plane B at the same circumferential position along the direction away from the axis satisfies L1< tan (α/2) ×t, where α is the angle between the generatrix of the second conical surface A2 and the guiding plane B, and T is the thickness of the conductive film 300.

It should be noted that, the positional relationship between the junction a of the outer edge of the second conical surface A2 and the guide plane B at any circumferential position and the junction B of the outer edge of the first conical surface A1 and the guide plane B at the same circumferential position determines the size relationship between the distance between the first conical surface A1 and the second conical surface A2 and the distance between the two guide planes B after the first fixing base 110 and the second fixing base 120 clamp the conductive film 300.

Specifically, as shown in fig. 21, after the first fixing base 110 and the second fixing base 120 clamp the conductive film 300, the distance between the first conical surface A1 and the second conical surface A2 is equal to the thickness T of the conductive film 300, and the distance between the two guiding planes B is also equal to the thickness T of the conductive film 300.

If the lateral distance between the junction a of the outer edge of the second conical surface A2 and the junction B of the first conical surface A1 and the guide plane B (i.e., the first lateral distance L1 that the a position exceeds the B position along the direction away from the second fixing base 120) is reduced, as shown in fig. 22, when the first fixing base 110 and the second fixing base 120 approach each other and clamp the conductive film 300, the distance between the first conical surface A1 and the second conical surface A2 is preferentially reduced to the thickness T of the conductive film 300, at this time, the first conical surface A1 and the second conical surface A2 clamp the conductive film 300, and the distance between the two guide planes B is still greater than the thickness T of the conductive film 300, and the two guide planes B cannot clamp the conductive film 300;

If the lateral distance L1 between the junction a of the outer edge of the second conical surface A2 and the junction B of the first conical surface A1 and the guide plane B increases, as shown in fig. 23, when the first fixing seat 110 and the second fixing seat 120 approach each other and clamp the conductive film 300, the distance between the two guide planes B is preferentially reduced to the thickness T of the conductive film 300, at this time, the two guide planes B clamp the conductive film 300, and the distance between the first conical surface A1 and the second conical surface A2 is still greater than the thickness T of the conductive film 300, and the first conical surface A1 and the second conical surface A2 cannot clamp the conductive film 300.

In contrast, referring to the above analysis, in order to ensure the tension in the central region of the conductive film 300, it is necessary to ensure that the distance between the inner surfaces is reduced to the thickness T of the conductive film 300 before the distance between the outer surfaces when the first fixing base 110 and the second fixing base 120 are close to each other, and thus, in the case that the first tapered surface A1 and the second tapered surface A2 are located at the inner side as shown in fig. 5, it is necessary to ensure that the lateral distance L1 between the junction a of the outer edge of the second tapered surface A2 and the guide plane B and the junction B of the first tapered surface A1 and the guide plane B is smaller than the critical condition as shown in fig. 21.

Referring to fig. 21, after the a position is perpendicular to the first conical surface A1 and perpendicular to the guiding plane B on the second fixing seat 120, the included angle between the two perpendicular lines is equal to the included angle α between the bus of the second conical surface A2 and the guiding plane B, and the connecting line between the a position and the B position is an angular bisector of the included angle between the two perpendicular lines, so that the included angle between the connecting line between the a position and the B position and any perpendicular line is equal to α/2. It is apparent from this that the first lateral distance value L1 and the thickness T of the conductive film 300 satisfy l1=tan (α/2) ×t.

Therefore, to ensure the tension in the central region of the conductive film 300, the first lateral distance L1 is preferably smaller than the critical value tan (α/2) x T, i.e., L1< tan (α/2) x T.

In order to ensure the connection strength between the first fixing base 110 and the second fixing base 120, as a preferred implementation of the embodiment of the present invention, the first lateral distance value L1 is greater than 0, that is, 0< L1< tan (α/2) ×t.

In the embodiment of the present invention, the first lateral distance value L1 has a minimum limit, so as to avoid that the distance between the two guiding planes B is too large due to the too small first lateral distance value L1, which affects the welding connection between the outer edge of the bottom end surface of the first fixing seat 110 and the outer edge of the top end surface of the second fixing seat 120, and ensure the connection strength between the first fixing seat 110 and the second fixing seat 120.

Accordingly, as further preferred embodiments of the present embodiment, as shown in fig. 9, the inner edge of the first conical surface A1 and the inner edge of the second conical surface A2 are respectively connected to the corresponding guiding plane B, and the second lateral distance L2 of the connection c between the inner edge of the second conical surface A2 and the guiding plane B at any circumferential position exceeds the connection d between the inner edge of the first conical surface A1 and the guiding plane B at the same circumferential position along the direction away from the axis, satisfies L2> tan (α/2) T, where α is the angle between the generatrix of the second conical surface A2 and the guiding plane B, and T is the thickness of the conductive film 300.

In the case that the first conical surface A1 and the second conical surface A2 are located at the outer side as shown in fig. 9, in order to reduce the distance between the two guiding planes B at the inner side to the thickness T of the conductive film 300 before the distance between the first conical surface A1 and the second conical surface A2 at the outer side when the first fixing seat 110 and the second fixing seat 120 are close to each other, it is necessary to ensure that the lateral distance (i.e., the second lateral distance value L2) between the junction c between the second conical surface A2 and the guiding plane B and the junction d between the first conical surface A1 and the guiding plane B is greater than the critical condition.

The derivation process is similar to the case that the first conical surface A1 and the second conical surface A2 are located on the inner side, and the calculated second lateral distance value L2 should be greater than the critical value tan (α/2) x T, i.e., L2> tan (α/2) x T.

In order to ensure the connection strength between the first fixing base 110 and the second fixing base 120, as a preferred implementation of the embodiment of the present invention, the second lateral distance value L2 is smaller than the thickness T of the conductive film 300, i.e., tan (α/2) T < L2< T.

In the embodiment of the present invention, the second lateral distance L2 has the maximum limit, so as to avoid that the excessive distance between the first conical surface A1 and the second conical surface A2 caused by the excessive second lateral distance L2 affects the welding connection between the outer edge of the bottom end surface of the first fixing seat 110 and the outer edge of the top end surface of the second fixing seat 120, thereby ensuring the connection strength between the first fixing seat 110 and the second fixing seat 120.

To ensure the detection accuracy of the pressure sensor, as a preferred implementation of the embodiment of the present invention, the hole and groove structures may be formed on the convex portion 130 and the second conical surface A2 of the concave portion 140, specifically:

as shown in fig. 4, 6 and 7, in the case that the protrusion 130 is formed on the second fixing seat 120, the recess 140 is formed on the first fixing seat 110, the outer edge of the first tapered surface A1 and the outer edge of the second tapered surface A2 are respectively connected with the corresponding guide plane B, the inner edge of the first tapered surface A1 is connected with the inner sidewall of the second fixing seat 120, and the inner edge of the second tapered surface A2 is connected with the inner sidewall of the first fixing seat 110, a communication hole 150 is further formed in the second fixing seat 120, and the communication hole 150 passes through the protrusion 130 and communicates the space between the guide plane B on the second fixing seat 120 and the conductive film 300 with the inside of the second fixing seat 120; and/or

The second taper surface A2 is further formed with a communication groove 160, and the communication groove 160 communicates the space between the guide plane B on the first fixing base 110 and the conductive film 300 with the inside of the first fixing base 110.

Similarly, in the case that the protrusion 130 is formed on the first fixing base 110, the recess 140 is formed on the second fixing base 120, the outer edge of the first tapered surface A1 and the outer edge of the second tapered surface A2 are respectively connected with the corresponding guide plane B, the inner edge of the first tapered surface A1 is connected with the inner sidewall of the first fixing base 110, and the inner edge of the second tapered surface A2 is connected with the inner sidewall of the second fixing base 120, the first fixing base 110 is further formed with a communication hole 150 therein, and the communication hole 150 passes through the protrusion 130 and communicates the space between the guide plane B on the first fixing base 110 and the conductive film 300 with the inside of the first fixing base 110; and/or

The second tapered surface A2 is formed with a communication groove 160, and the communication groove 160 communicates the space between the guide plane B on the second fixing base 120 and the conductive film 300 with the inside of the second fixing base 120.

In the semiconductor process, the inside of the first fixing seat 110 above the conductive film 300 can be vacuumized to be close to 0Pa according to the requirement, and a gas dead zone is formed between the conductive film 300 and the guiding plane B once a gap exists between the guiding plane B located on the outer side of the first conical surface A1 or the second conical surface A2 and the conductive film 300, so as to avoid that the gas in the dead zone is released into the first fixing seat 110 after the first fixing seat 110 is vacuumized to influence the internal pressure of the first fixing seat 110.

In addition, a gas dead zone can be formed between the guiding plane B of the second fixing base 120 and the conductive film 300, and the communication hole 150 or the communication groove 160 formed on the second fixing base 120 or the corresponding conical surface can also communicate the gas dead zone with the inner hole of the second fixing base 120, so as to avoid that the gas stored in the gas dead zone is released to the environment to be tested in the semiconductor process to affect the process effect.

As some optional implementations of the embodiment of the present invention, the second fixing base 120 is cylindrical, the end surface shape of the first fixing base 110 corresponds to the end surface shape of the second fixing base 120, the protruding portion 130 is an annular protrusion extending around the axis of the second fixing base 120 (as shown in fig. 3 to 12), or the number of protruding portions 130 is a plurality of protruding portions 130 distributed around the axis of the second fixing base 120.

As some alternative implementations of the embodiments of the present invention, as shown in fig. 10 to 12, the end surface of the first fixing seat 110 and the end surface of the second fixing seat 120 further include a guide plane B, and the guide plane B of the first fixing seat 110 corresponds to the guide plane B of the second fixing seat 120.

As some alternative implementations of the embodiment of the present invention, as shown in fig. 10 to 12, the top of the protruding portion 130 has a first clamping plane, the bottom of the recessed portion 140 has a second clamping plane, and the first clamping plane and the second clamping plane are respectively connected to the inner sidewall of the corresponding first fixing seat 110 or the inner sidewall of the second fixing seat 120.

In order to ensure the flatness of the conductive film 300, as a preferred embodiment of the present invention, as shown in fig. 12, the height H1 of the protrusion 130 is greater than the depth H2 of the recess 140, thereby ensuring that the conductive film 300 is clamped by the first clamping plane and the second clamping plane instead of the two guiding planes B, and the conductive film 300 is fixed by the two planes on the inner side, thereby ensuring the flatness of the conductive film 300, and further improving the detection accuracy of the pressure sensor.

In order to ensure the integrity of the conductive film 300, as shown in fig. 12, a third lateral distance L3 of the sidewall of the recess 140 beyond the sidewall of the protrusion 130 in a direction away from the second fixing base 120 is greater than the thickness of the conductive film 300, so as to avoid the sidewall of the recess 140 and the sidewall of the protrusion 130 from cutting off the conductive film 300.

To further ensure the integrity of the conductive film 300, as a preferred implementation of the embodiment of the present invention, as shown in fig. 10 to 12, the side surface of the protruding portion 130 is in curved transitional connection with the corresponding guiding plane B, and the side surface of the protruding portion 130 is in curved transitional connection with the first clamping plane; curved surface transitional connection is formed between the side wall of the concave part 140 and the corresponding guiding plane B, and curved surface transitional connection is formed between the side wall of the concave part 140 and the second clamping plane, so that the conductive film 300 is prevented from being scratched by sharp edge structures at the joint of the planes, and the detection precision of the pressure sensor is ensured.

As a preferred implementation of the embodiment of the present invention, as shown in fig. 10 to 12, in the case where the protrusion 130 is formed on the second fixing base 120, the depression 140 is formed on the first fixing base 110,

The second fixing base 120 is further formed therein with a communication hole 150, the communication hole 150 passing through the boss 130 and communicating a space between the guide plane B on the second fixing base 120 and the conductive film 300 with the inside of the second fixing base 120; and/or

The second clamping plane is further formed with a communication groove 160, and the communication groove 160 communicates a space between the guide plane B on the first fixing base 110 and the conductive film 300 with the inside of the first fixing base 110.

Or in case that the protrusion 130 is formed on the first fixing base 110, the depression 140 is formed on the second fixing base 120,

the first fixing base 110 is further formed therein with a communication hole 150, the communication hole 150 passing through the boss 130 and communicating a space between the guide plane B on the first fixing base 110 and the conductive film 300 with the inside of the first fixing base 110; and/or

The second clamping plane is further formed with a communication groove 160, and the communication groove 160 communicates the space between the guide plane B of the second fixing base 120 and the conductive film 300 with the inside of the second fixing base 120.

In the semiconductor process, the inside of the first fixing seat 110 above the conductive film 300 can be vacuumized to be close to 0Pa according to the requirement, and a gas dead zone is formed between the conductive film 300 and the guiding plane B located at the outer side of the protruding part 130 or the concave part 140 once a gap exists between the conductive film 300 and the guiding plane B, so as to avoid that the gas in the dead zone is released into the first fixing seat 110 after the first fixing seat 110 is vacuumized to influence the internal pressure of the first fixing seat 110.

In addition, a gas dead zone can be formed between the guide plane B of the second fixing base 120 and the conductive film 300, and the communication hole 150 or the communication groove 160 formed on the second fixing base 120 can also communicate the gas dead zone with the inner hole of the second fixing base 120, thereby preventing the gas stored in the gas dead zone from being released to the environmental impact process effect to be measured in the semiconductor process.

As some alternative implementations of the embodiments of the present invention, as shown in fig. 13 to 16, the top of the cross section of the protrusion 130 has a convex first arc, the bottom of the cross section of the recess 140 has a concave second arc, and the maximum depth of the recess 140 is greater than the height H1 of the protrusion 130, and the maximum width of the recess 140 is greater than the maximum width of the protrusion 130.

As some optional implementations of the embodiments of the present invention, as shown in fig. 14, the end surface of the first fixing seat 110 and the end surface of the second fixing seat 120 further include a guiding plane B, where the guiding plane B of the first fixing seat 110 corresponds to the guiding plane B of the second fixing seat 120; the protruding portion 130 and the recessed portion 140 are formed on the corresponding guide plane B, that is, the end surface of the first fixing seat 110 and the end surface of the second fixing seat 120 are both formed as stepped surfaces.

In order to ensure the integrity of the conductive film 300, as shown in fig. 14, the side surface of the protruding portion 130 is in curved surface transitional connection with the corresponding guiding plane B, and the side wall of the recessed portion 140 is in curved surface transitional connection with the corresponding guiding plane B, so as to avoid the conductive film 300 from being scratched by a sharp edge structure at the junction of the plane and the curved surface, and ensure the detection accuracy of the pressure sensor.

In order to ensure the flatness of the conductive film 300, as a preferred embodiment of the present invention, as shown in fig. 14, the difference between the maximum depth H2 of the concave portion 140 and the height H1 of the convex portion 130 is greater than the thickness T of the conductive film 300, i.e., H2-H1> T, so that the conductive film 300 is fixed by using the portions inside the two guide planes B, thereby ensuring the flatness of the conductive film 300 and further improving the detection accuracy of the pressure sensor.

To ensure the integrity of the conductive film 300, as a preferred implementation of the embodiment of the present invention, as shown in fig. 14, the difference between the maximum width W2 of the concave portion 140 and the maximum width W1 of the convex portion 130 is greater than twice the thickness T of the conductive film 300, i.e., W2-W1>2T, so as to avoid the sidewalls of the concave portion 140 and the sidewalls of the convex portion 130 from cutting the conductive film 300.

As a preferred implementation of the embodiment of the present invention, as shown in fig. 15 and 16, in the case where the protrusion 130 is formed on the second fixing base 120, the recess 140 is formed on the first fixing base 110,

the second fixing base 120 is further formed therein with a first communication hole 151, the first communication hole 151 penetrating the boss 130 and communicating a space between the guide plane B on the second fixing base 120 and the conductive film 300 with the inside of the second fixing base 120; and/or

The first fixing base 110 is further formed with a second communication hole 152, and the second communication hole 152 communicates the recess 140 with the inside of the first fixing base 110.

the first fixing base 110 is further formed therein with a first communication hole 151, the first communication hole 151 penetrating the boss 130 and communicating a space between the guide plane B on the first fixing base 110 and the conductive film 300 with the inside of the first fixing base 110; and/or

The second fixing base 120 is further formed with a second communication hole 152, and the second communication hole 152 communicates the recess 140 with the inside of the second fixing base 120.

In the semiconductor process, the inside of the first fixing seat 110 above the conductive film 300 may be vacuumized to be close to 0Pa according to the need, and a gas dead zone is formed between the conductive film 300 and the guiding plane B located outside the protruding portion 130 or the recessed portion 140 once there is a gap between the conductive film 300 and the guiding plane B, so as to avoid that the gas in the dead zone is released into the first fixing seat 110 after the first fixing seat 110 is vacuumized to affect the internal pressure of the first fixing seat 110.

In addition, a gas dead zone can be formed between the guide plane B of the second fixing base 120 and the conductive film 300, and the first communication hole 151 or the second communication hole 152 formed on the second fixing base 120 can also communicate the gas dead zone with the inner hole of the second fixing base 120, thereby avoiding that the gas stored in the gas dead zone is released to the environmental impact process effect to be measured in the semiconductor process.

As a preferred implementation of the embodiment of the present invention, as shown in fig. 17 to 18, the cross-sectional profile shape of the pressing part 200 is circular, and the sum of the cross-sectional diameter of the pressing part 200 (i.e., twice the cross-sectional radius Rr of the pressing part 200) and the thickness T of the conductive film 300 is greater than the sum of the depth H3 of the receiving recess 141 on the bottom end surface of the first fixing base 110 and the depth H4 of the receiving recess 141 on the top end surface of the second fixing base 120, i.e., 2rr+t > h3+h4, thereby ensuring close contact between the first fixing base 110, the second fixing base 120 and the pressing part 200.

In order to ensure the integrity of the conductive film 300, as shown in fig. 17 to 18, as a preferred implementation manner of the embodiment of the present invention, the inner edge and the outer edge of the at least one accommodating recess 141 are in curved surface transitional connection with the corresponding bottom end surface of the first fixing seat 110 or the top end surface of the second fixing seat 120, so as to avoid the sharp edge structure at the junction of the plane and the curved surface from scratching the conductive film 300, and ensure the detection precision of the pressure sensor.

To further secure the integrity of the conductive film 300, as shown in fig. 18, as a preferred embodiment of the present invention, the bottom of the cross section of the accommodating recess portion 141 (refer to a cross section passing through the axes of the first fixing base 110 and the second fixing base 120) has a third arc of concave shape, and the difference between the radius Rc of the third arc and the radius Rr of the cross section of the pressing portion 200 is greater than the thickness T of the conductive film 300, that is, rc-Rr > T, so as to avoid the accommodating recess portion 141 and the pressing portion 200 from pressing and cutting the conductive film 300.

As a preferred implementation of the embodiment of the present invention, as shown in fig. 17 to 20, a communication hole 150 is further formed in at least one of the first fixing seat 110 and the second fixing seat 120, and the communication hole 150 communicates the corresponding receiving recess 141 with the inside of the corresponding first fixing seat 110 or second fixing seat 120.

In the semiconductor process, the inside of the first fixing base 110 above the conductive film 300 may be evacuated to approximately 0Pa as required, and a gas dead zone is formed between the conductive film 300 and the guiding plane B located outside the protrusion 130 or the recess 140 once there is a gap between the guiding plane B and the conductive film 300. In order to avoid that the gas in the gas dead zone corresponding to the first fixing seat 110 is released into the first fixing seat 110 after the first fixing seat 110 is vacuumized to affect the internal pressure of the first fixing seat 110, or the gas stored in the gas dead zone corresponding to the second fixing seat 120 is released into the to-be-tested environmental impact process effect in the semiconductor process, in the embodiment of the invention, the communication hole 150 is preferably formed on the part with the accommodating concave part 141, and the gas dead zone is communicated with the inner hole of the first fixing seat 110 or the second fixing seat 120, so that the detection precision of the pressure sensor and the semiconductor process effect are ensured.

As a preferred implementation of the embodiment of the present invention, the hardness of the pressing part 200 is less than that of the first fixing base 110, and the hardness of the pressing part 200 is less than that of the second fixing base 120. In the embodiment of the invention, the compressing part 200 is small in volume and low in material cost, so that the compressing part 200 is preferably used as a consumable material, and when a matching error occurs in the pressing process of the first fixing base 110 and the second fixing base 120 due to the problems of thickness tolerance and the like of the conductive film 300, the compressing part 200 is preferably deformed, so that the end surfaces of the first fixing base 110 and the second fixing base 120 are prevented from being damaged, and only the compressing part 200 is replaced, thereby reducing the cost of the semiconductor process.

As a preferred implementation manner of the embodiment of the present invention, as shown in fig. 19 and 20, only one of the first fixing seat 110 and the second fixing seat 120 is formed with a receiving recess portion 141, the other end face is a plane (the case that the receiving recess portion 141 is formed on the first fixing seat 110 and the top end face of the second fixing seat 120 is a plane is shown in the drawings), and a first communicating groove 161 is formed on the guiding plane B where the receiving recess portion 141 is not formed, one end of the first communicating groove 161 communicates with the inner hole of the corresponding first fixing seat 110 or the second fixing seat 120, and the other end of the first communicating groove 161 extends to the outer side of the receiving recess portion 141, so that the gas dead zone communicates with the inner hole of the corresponding first fixing seat 110 or the second fixing seat 120.

Specifically, as shown in fig. 19 and 20, the first fixing base 110 has a receiving recess 141 formed on an end surface thereof, the first fixing base 110 has a communication hole 150 formed therein, the second fixing base 120 has a first communication groove 161 formed on an end surface thereof, one end of the first communication groove 161 communicates with the inside of the second fixing base 120, and the other end of the first communication groove 161 extends to the outside of the receiving recess 141.

Alternatively, the second fixing base 120 has a receiving recess 141 formed on an end surface thereof, the second fixing base 120 further has a communication hole 150 formed therein, the first fixing base 110 has a first communication groove 161 formed on an end surface thereof, one end of the first communication groove 161 communicates with the inside of the first fixing base 110, and the other end of the first communication groove 161 extends to the outside of the receiving recess 141.

As some alternative implementations of the embodiments of the present invention, the cross-sectional profile shape of the pressing portion 200 may also be a shape other than a circle, for example, may be rectangular (e.g., square), oval, or the like.

It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.

Claims

1. A pressure sensor, comprising: the device comprises a first fixing seat, a second fixing seat, a conductive film and a fixed electrode;

the fixed electrode is arranged in the first fixed seat;

2. The pressure sensor of claim 1, wherein the first and second holders are cylindrical, the first and second holders are coaxial, and the end shape of the first holder corresponds to the end shape of the second holder;

3. The pressure sensor of claim 2, wherein the end face of the first mount and the end face of the second mount further comprise guide planes, the guide planes of the end face of the first mount correspond to the guide planes of the end face of the second mount, and the conductive film is sandwiched between the two guide planes.

4. A pressure sensor according to claim 3, wherein the outer edges of the first and second conical surfaces meet the respective guide planes, and wherein a first lateral distance value at the junction of the outer edge of the second conical surface with the guide plane at any circumferential position, beyond the junction of the outer edge of the first conical surface with the guide plane at the same circumferential position away from the axis direction, meets L1< tan (α/2) × T;

5. A pressure sensor according to claim 3, wherein the inner edges of the first and second conical surfaces meet the respective guide planes, and wherein a second lateral distance value at the junction of the inner edge of the second conical surface with the guide plane at any circumferential position, beyond the junction of the inner edge of the first conical surface with the guide plane at the same circumferential position away from the axial direction, meets L2> tan (α/2) × T;

6. The pressure sensor of claim 3, wherein the protrusion is formed on the second fixing base, the recess is formed on the first fixing base, the outer edge of the first conical surface and the outer edge of the second conical surface are respectively connected with the corresponding guiding planes, the inner edge of the first conical surface is connected with the inner side wall of the second fixing base, and the inner edge of the second conical surface is connected with the inner side wall of the first fixing base;

7. The pressure sensor of claim 3, wherein the protrusion is formed on the first fixing seat, the recess is formed on the second fixing seat, the outer edge of the first conical surface and the outer edge of the second conical surface are respectively connected with the corresponding guiding planes, the inner edge of the first conical surface is connected with the inner side wall of the first fixing seat, and the inner edge of the second conical surface is connected with the inner side wall of the second fixing seat;

8. The pressure sensor of claim 1, wherein the second mount is cylindrical, the end shape of the first mount corresponding to the end shape of the second mount;

9. The pressure sensor of claim 8, wherein the end face of the first mount and the end face of the second mount further comprise a guide plane, the guide plane of the first mount corresponding to the guide plane of the second mount.

10. The pressure sensor of claim 9, wherein the top of the protrusion has a first clamping plane, the bottom of the recess has a second clamping plane, and the first clamping plane and the second clamping plane are respectively connected with the inner side wall of the corresponding first fixing seat or the inner side wall of the second fixing seat.

11. The pressure sensor of claim 10, wherein the boss is formed on the second mount and the recess is formed on the first mount;

12. The pressure sensor of claim 10, wherein the boss is formed on the first mount and the recess is formed on the second mount;

13. The pressure sensor of claim 8, wherein the cross-sectional top of the boss has a convex first arc, the cross-sectional bottom of the recess has a concave second arc, and the maximum depth of the recess is greater than the height of the boss, and the maximum width of the recess is greater than the maximum width of the boss.

14. The pressure sensor of claim 13, wherein the end face of the first mount and the end face of the second mount further comprise a guide plane, the guide plane of the first mount corresponding to the guide plane of the second mount; the convex portions and the concave portions are respectively formed on the corresponding guide planes.

15. The pressure sensor of claim 14, wherein the boss is formed on the second mount and the recess is formed on the first mount;

16. The pressure sensor of claim 14, wherein the boss is formed on the first mount and the recess is formed on the second mount;

17. The pressure sensor of claim 1, wherein the cross-sectional profile shape of the pinch portion is circular, and a sum of a cross-sectional diameter of the pinch portion and a thickness of the conductive film is greater than a sum of a depth of the accommodation recess on the end face of the first mount and a depth of the accommodation recess on the end face of the second mount.

18. The pressure sensor of claim 17, wherein a cross-sectional bottom of the accommodating recess has a third arc of concavity, a radius of the third arc differing from a cross-sectional radius of the pinch by more than a thickness of the conductive film.

19. The pressure sensor of claim 17, wherein at least one of the first and second holders further has a communication hole formed therein, the communication hole communicating the corresponding accommodation recess with the interior of the corresponding first or second holder.

20. The pressure sensor according to claim 19, wherein the accommodation recess is formed on the end face of the first holder, the communication hole is further formed in the first holder, a first communication groove is formed on the end face of the second holder, one end of the first communication groove communicates with the inside of the second holder, and the other end of the first communication groove extends to the outside of the accommodation recess.

21. The pressure sensor according to claim 19, wherein the accommodation recess is formed on the end face of the second holder, the communication hole is further formed in the second holder, a first communication groove is formed on the end face of the first holder, one end of the first communication groove communicates with the inside of the first holder, and the other end of the first communication groove extends to the outside of the accommodation recess.