CN116345956A - Auxiliary fixture for magnetic levitation device and magnetic levitation equipment - Google Patents
Auxiliary fixture for magnetic levitation device and magnetic levitation equipment Download PDFInfo
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- CN116345956A CN116345956A CN202310604336.8A CN202310604336A CN116345956A CN 116345956 A CN116345956 A CN 116345956A CN 202310604336 A CN202310604336 A CN 202310604336A CN 116345956 A CN116345956 A CN 116345956A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
- H02K15/0006—Disassembling, repairing or modifying dynamo-electric machines
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
- H02K21/12—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets
- H02K21/14—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets with magnets rotating within the armatures
Abstract
The invention relates to an auxiliary tool and magnetic suspension equipment for a magnetic suspension device, wherein the magnetic suspension equipment comprises a magnetic suspension device and an auxiliary tool, the magnetic suspension device comprises a magnetic suspension stator and a magnetic suspension rotor, the magnetic suspension stator generates a magnetic field to drive the magnetic suspension rotor to rotate and suspend, the magnetic suspension stator comprises at least one permanent magnet assembly, the permanent magnet assembly comprises two magnetic conduction pieces and a permanent magnet, and the permanent magnet is clamped between the two magnetic conduction pieces; the auxiliary tool comprises a magnetic conduction component, wherein the magnetic conduction component is configured to be switched between a first state and a second state, a part of magnetic field of the permanent magnet forms a first magnetic loop through the magnetic conduction component and the magnetic suspension rotor, a part of magnetic field of the permanent magnet forms a second magnetic loop through the magnetic conduction component, and the magnetic conduction component breaks the second magnetic loop in the second state. The invention can realize rapid and convenient loading and unloading of the rotor, avoid the rotor from offset collision in the loading and unloading process, facilitate the installation and maintenance, improve the installation and maintenance efficiency and reduce the labor cost.
Description
Technical Field
The invention relates to the technical field of magnetic suspension, in particular to an auxiliary tool for a magnetic suspension device and magnetic suspension equipment.
Background
The magnetic suspension device or the magnetic suspension rotary driver has the characteristics of high cleanliness, no precipitation, no particles, no dynamic seal and excellent performance, and has good application prospect in the field of ultra-pure driving such as biochemistry, medical treatment, semiconductor manufacturing and the like.
In semiconductor manufacturing, on the one hand, wafer cleanliness is important because wafer surface cleanliness affects the yield of subsequent semiconductor processes and products, and wafers of silicon or other semiconductor materials must be processed in a controlled ultra-clean atmosphere in order to achieve ultra-clean requirements. For example, in the fabrication of wafers, one fabrication step is annealing the wafer after ion implantation doping. Doping imparts strain on the crystal structure, which can lead to undesirable changes in the resistivity of the ion doping if the stress is not released quickly. Currently, rapid Thermal Processing (RTP) is commonly used for annealing. In yet another aspect, process uniformity of the wafer is important and, in order to produce uniformity, the wafer is typically rotated about a vertical or z-axis at the center of the wafer as it is processed. Spin is also used for other wafer processing such as chemical vapor deposition, thermal processing, ion implantation doping, and other techniques doping. In order to meet the severe requirements of ultra-clean and treatment uniformity in the manufacture of semiconductor technology, the semiconductor heat treatment equipment optimally adopts a non-contact rotary driving magnetic suspension device, and the magnetic suspension device comprises a magnetic suspension stator which is used for generating a magnetic field to drive a magnetic suspension rotor to rotate and suspend, wherein the magnetic suspension rotor drives a wafer to rotate in a closed cavity by virtue of a support column and a bearing disc.
Patent documents CN114221580B and CN114826025A each disclose a magnetic levitation device, wherein both comprise a rotor and a stator, the stator is arranged around the rotor or the rotor is arranged around the stator, wherein the stator comprises at least two magnetic stator substrates and a permanent magnet, and the permanent magnet is clamped between the two magnetic stator substrates in the axial direction of the stator for providing a permanent magnet bias magnetic field. The magnetic field acts on the rotor to create a magnetic attraction between the stator and the rotor, and a large magnetic attraction needs to be overcome when the rotor is assembled into or removed from the cavity of the stator. In particular, in the case of a rotor having a multi-layered flange structure, the magnetic attraction force of the permanent magnet bias magnetic field is particularly large, for example, in the case of the rotor having a 4-layered flange structure disclosed in patent document CN114826025a, since the rotor has a 4-layered flange structure disposed in the axial direction, and the corresponding stator includes four corresponding magnetic stator substrates and a first layer of permanent magnet sandwiched between the first magnetic stator substrate and the second magnetic stator substrate, and a second layer of permanent magnet sandwiched between the third magnetic stator substrate and the fourth magnetic stator substrate, both layers of permanent magnets jointly act on the rotor, and this magnetic attraction force can reach 400N, currently, manual loading and unloading of the rotor is generally employed to avoid the loss of cleanliness caused by mechanical equipment assembly, but, it is difficult for a single operator to take out the rotor from the cavity of the stator, and more than two operators are often required, resulting in lower assembly efficiency and higher labor cost and maintenance cost. In addition, the stator and the rotor are difficult to realize coaxial taking and placing in the loading and unloading process, so that the rotor is easy to deviate in the taking and placing process, the loading and unloading difficulty is further increased, the rotor is not easy to take out in the process of assembling and maintaining the rotor, the stator or the rotor is possibly worn due to collision, and the cleanliness of a semiconductor process is further affected.
Disclosure of Invention
In order to solve the technical problems, the invention provides an auxiliary tool for a magnetic suspension device and magnetic suspension equipment, which can realize rapid and convenient loading and unloading of a rotor, avoid offset collision of the rotor in the loading and unloading process, facilitate installation and maintenance, improve installation and maintenance efficiency and reduce labor cost.
According to one aspect of the invention, there is provided an auxiliary tool for a magnetic levitation device, the magnetic levitation device comprising a magnetic levitation stator and a magnetic levitation rotor, the magnetic levitation stator generating a magnetic field to drive the magnetic levitation rotor to rotate and levitate, the auxiliary tool being characterized in that the magnetic levitation stator comprises at least one permanent magnet assembly, the permanent magnet assembly comprises two magnetic conductive pieces and one permanent magnet, the permanent magnet is clamped between the two magnetic conductive pieces; the auxiliary tool comprises a magnetic conduction component, the magnetic conduction component is configured to be switched between a first state and a second state, in the first state, a part of magnetic field of the permanent magnet forms a first magnetic loop through the magnetic conduction component and the magnetic suspension rotor, a part of magnetic field of the permanent magnet forms a second magnetic loop through the magnetic conduction component, and in the second state, the magnetic conduction component breaks the second magnetic loop.
Further, the magnetic conduction component is configured as a magnetic conduction plate, in the first state, the magnetic field of the permanent magnet assembly forms the second magnetic loop through the magnetic conduction plate, and in the second state, the magnetic conduction plate breaks the second magnetic loop.
Further, the auxiliary tool further comprises an operation handle, and the operation handle is fixedly connected to one side of the magnetic conduction plate.
Further, the magnetic conduction plate breaks the second magnetic circuit in a rotating mode.
Further, the auxiliary tool further comprises a base, the magnetic conduction plate is rotatably installed on the base, and the base is detachably fixed on the magnetic suspension stator.
Further, the magnetic conductive parts are in one-to-one correspondence with the permanent magnet assemblies, each magnetic conductive part comprises at least two magnetic conductors, at least one of the at least two magnetic conductors is configured as a movable magnetic conductor, and the movable magnetic conductor is switched between the first state and the second state; in the first state, the magnetic field of the permanent magnet assembly forms the second magnetic loop through the at least two magnetizers, and in the second state, the movable magnetizers disconnect the second magnetic loop.
Further, the movable magnetizer breaks the second magnetic circuit in a rotating mode.
Further, the auxiliary tool further comprises a base, the magnetic conduction component comprises 3 magnetic conductors, the 3 magnetic conductors are configured to be movable magnetic conductors, and the 3 movable magnetic conductors are connected in sequence and rotatably mounted on the base; in the first state, the magnetic field of the permanent magnet sequentially passes through 3 movable magnetizers to form the second magnetic loop, and in the second state, the 3 movable magnetizers rotate to a position far away from the permanent magnet assembly one by one.
Further, the base comprises two substrates arranged at intervals and a connecting column fixedly connected between the two substrates, a rotating shaft is arranged between the two substrates, and the 3 movable magnetizers are all rotatably sleeved on the rotating shaft.
Further, the auxiliary fixture comprises two magnetic conduction parts, the two magnetic conduction parts are arranged between the two base plates, and 3 movable magnetic conductors of each magnetic conduction part are rotatably sleeved on the rotating shaft.
Further, the base comprises two connecting columns, one connecting column is configured as a baffle column, the other connecting column is configured as a base column, the rotating shaft is arranged between the base column and the baffle column and is close to the base column, one end of the movable magnetizer is rotatably sleeved on the rotating shaft, the other end of the movable magnetizer forms a stop body, and the stop body can be blocked against one side of the baffle column.
Furthermore, the stop body and the movable magnetizer are made of magnetic conductive materials and are integrally formed.
Further, the auxiliary tool further comprises a torque handle, wherein the torque handle is connected with the stop body, and the torque handle is configured to lengthen the force arm of the stop body relative to the rotating shaft.
Further, the moment handle is configured as a pry bar, one of the pry bar and the stop body is provided with a jack, the other one of the pry bar and the stop body is provided with a plunger, and the plunger is inserted into the jack.
Further, the base column is arranged near one end of the two substrates, the baffle column is arranged near the other opposite end of the two substrates, the base column is positioned on a path of the moving magnetizer rotating from the first state to the second state, the direction of the moving magnetizer rotating from the first state to the second state is defined as a disconnection direction, a first avoidance surface is formed on one side of the base column facing the disconnection direction, and a second avoidance surface is formed on one side of the moving magnetizer facing the first avoidance surface.
Further, the auxiliary fixture further comprises a reinforcing center pillar, the reinforcing center pillar is connected between the base pillar and the baffle pillar, one magnetic conduction component is arranged between the reinforcing center pillar and one base plate, the other magnetic conduction component is arranged between the reinforcing center pillar and the other base plate, and an operation handle is arranged on one side of the reinforcing center pillar, which faces away from the bayonet.
Furthermore, two base plates extend to the same side to form two joint parts, a bayonet is formed between the two joint parts, and the auxiliary tool can be clamped on the magnetic suspension stator through the bayonet.
Further, the auxiliary tool further comprises a base, the magnetic conduction component comprises 3 magnetic conductors, one of the 3 magnetic conductors is configured to be the movable magnetic conductor, the other two magnetic conductors are configured to be fixed magnetic conductors, the two fixed magnetic conductors are fixedly connected with the base, and the movable magnetic conductor is rotatably arranged on the base and clamped between the two fixed magnetic conductors; in the first state, the magnetic field of the permanent magnet sequentially passes through one fixed magnetizer, the movable magnetizer and the other fixed magnetizer to form the second magnetic loop, and in the second state, the movable magnetizer rotates to a position separated from the two fixed magnetizers.
Further, the base comprises two side plates arranged at intervals, the movable magnetizer is arranged between the two side plates, one end of the movable magnetizer is rotatably connected to one side plate through a rotating shaft, and the other end of the movable magnetizer is rotatably connected to the other side plate through the rotating shaft.
Further, the auxiliary tool comprises two magnetic conduction parts, and the two magnetic conduction parts are arranged between the two side plates.
Further, the auxiliary tool further comprises a rotating handle, and one rotating shaft penetrates through the shaft hole in the side plate and is fixedly connected with the rotating handle.
Further, one side of the fixed magnetizer facing the movable magnetizer and one side of the movable magnetizer facing the fixed magnetizer are provided with arc-shaped convex parts, and the other side of the fixed magnetizer is provided with arc-shaped concave parts, and the arc-shaped convex parts are in sliding fit with the arc-shaped concave parts.
Further, the base still includes backplate, roof and bottom plate, roof, two the curb plate with the bottom plate all install in the same side of backplate and enclose into the accommodation magnetic conduction part's accommodation space, the roof dorsad the backplate extends to form and surpasss the last joint plate of curb plate, the bottom plate dorsad the backplate extends to form and surpass the lower joint plate of curb plate, go up the joint plate with form the centre gripping mouth between the joint plate down, auxiliary fixtures can pass through the centre gripping mouth joint is in on the magnetic suspension stator.
Further, an operating handle is arranged on one side of the backboard, which is away from the side plate.
Further, in the first state, the magnetic conductive component is in direct contact with the magnetic conductive member or forms a first air gap, and a second air gap is formed between the magnetic conductive member and the magnetic suspension rotor, wherein the first air gap is not larger than the second air gap.
According to another aspect of the present invention, there is provided a magnetic levitation apparatus, comprising a magnetic levitation device, the magnetic levitation device comprising a magnetic levitation stator and a magnetic levitation rotor, the magnetic levitation stator generating a magnetic field to drive the magnetic levitation rotor to rotate and levitate, the magnetic levitation apparatus further comprising the auxiliary tool.
Further, the magnetic suspension rotor is an annular rotor, the magnetic suspension stator is arranged around the magnetic suspension rotor, the magnetic suspension stator comprises a plurality of auxiliary matching edges arranged along the circumferential direction, each auxiliary matching edge is provided with a permanent magnet assembly, permanent magnets at different auxiliary matching edges are connected end to form a permanent magnet ring, and an auxiliary tool is arranged corresponding to each auxiliary matching edge.
Further, the permanent magnets at the auxiliary matching edges are arranged at intervals, and the magnetic conduction pieces at the same side of the permanent magnets at different auxiliary matching edges are connected end to form a stator ring piece.
Compared with the prior art, the technical scheme of the invention has the following advantages: the invention provides an auxiliary tool for a magnetic suspension device, which is innovatively designed based on the structural characteristics of a permanent magnet assembly of the magnetic suspension device, and comprises a magnetic conduction component, wherein the magnetic conduction component is configured to be switched between a first state and a second state, a part of magnetic field of a permanent magnet forms a first magnetic loop through the magnetic conduction component and a magnetic suspension rotor in the first state, a part of magnetic field of the permanent magnet forms a second magnetic loop through the magnetic conduction component, and the magnetic conduction component breaks the second magnetic loop in the second state. Therefore, in the first state, the auxiliary tool is assembled on the magnetic suspension device, a magnetic loop is formed by the magnetic conduction component and the permanent magnet of the permanent magnet assembly, and the magnetic flux of the permanent magnet acting on the magnetic suspension rotor through the first magnetic loop can be split, so that the purpose of weakening the magnetic attraction between the magnetic suspension rotor and the magnetic suspension stator is achieved, the function of rapidly and conveniently assembling and disassembling the rotor is realized, the rotor is prevented from deviating and colliding in the assembling and disassembling process, the assembling and maintenance are facilitated, the assembling and maintenance efficiency is improved, and the labor cost is reduced.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
FIG. 1 is a schematic diagram of an embodiment of a magnetic levitation device according to the prior art;
FIG. 2 is a schematic diagram of another embodiment of a magnetic levitation device according to the prior art;
FIG. 3 is a schematic structural diagram of an auxiliary tool according to embodiment 1 of the present invention;
FIG. 4 is a schematic diagram of a magnetic levitation apparatus according to an embodiment of the present invention in a first state of configuring an auxiliary tool according to embodiment 1;
FIG. 5 is a schematic diagram illustrating a first state of configuring an auxiliary tool of embodiment 1 according to another embodiment of the magnetic levitation device of the present invention;
fig. 6 is a schematic structural diagram of an embodiment 2 of an auxiliary tool (the lower magnetic conductive plate is omitted) in the present invention;
fig. 7 is a schematic structural diagram of an embodiment of a magnetic conductive plate of an auxiliary tool embodiment 2 in the present invention;
FIG. 8 is a schematic diagram of a magnetic levitation apparatus according to an embodiment of the present invention in a first state of configuring an auxiliary tool according to embodiment 2;
FIG. 9 is a schematic view of an embodiment 3 of an auxiliary tool (omitting a lower movable magnetizer) according to the present invention;
FIG. 10 is a schematic view of an auxiliary tool according to another view angle of embodiment 3 of the present invention;
FIG. 11 is a schematic view of an auxiliary tool (omitting a lower movable magnetizer) according to another view angle of embodiment 3 of the present invention;
FIG. 12 is a schematic diagram of a magnetic levitation apparatus according to an embodiment of the present invention in a first state of configuring an auxiliary tool according to embodiment 3;
FIG. 13 is a schematic view of an angle of view of an auxiliary tool according to embodiment 4 of the present invention;
fig. 14 is a schematic structural diagram of an auxiliary tool according to another view angle of embodiment 4 of the present invention;
FIG. 15 is a cross-sectional view taken along line A-A of FIG. 14;
FIG. 16 is a schematic diagram showing a first state of configuring an auxiliary tool of embodiment 4 according to an embodiment of the magnetic levitation device of the present invention;
fig. 17 is a schematic diagram of a second state of configuring an auxiliary tool of embodiment 4 in an embodiment of a magnetic levitation device according to the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
In the description of the present invention, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top", "bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. The terms "comprises" and "comprising," and any variations thereof, in the description and claims of the invention and in the foregoing drawings, are intended to cover a non-exclusive inclusion, such that a system, article, or apparatus that comprises a list of elements is not necessarily limited to those elements expressly listed but may include other elements not expressly listed or inherent to such article or apparatus.
In the prior art, referring to fig. 1, an embodiment of a magnetic levitation apparatus includes a rotor 120 'and a stator 110', the stator 110 'is disposed around the rotor 120' or the rotor 120 'is disposed around the stator 110', the case of an inner rotor 120 'in which the stator 110' is disposed around the rotor 120 'is illustrated in fig. 1, the stator 110' includes at least two magnetic stator substrates 112 'and a permanent magnet 111', and the permanent magnet 111 'is sandwiched between the two magnetic stator substrates 112' in an axial direction of the stator for providing a permanent magnet bias magnetic field. The magnetic field acts on the rotor 120' to generate a magnetic attraction force between the stator 110' and the rotor 120', and a larger magnetic attraction force needs to be overcome when the rotor 120' is assembled into the cavity of the stator 110' or the rotor 120' is taken out from the cavity of the stator 110 '. In particular, the rotor having a multi-layered flange structure has a particularly large magnetic attraction force of the permanent magnet bias field. Referring to fig. 2, in another embodiment of the magnetic levitation device, the rotor 220 'having a 4-layer flange structure is illustrated in fig. 2, and since the rotor 220' has a 4-layer flange structure disposed along the axial direction, and the corresponding stator 210 'includes four corresponding magnetic stator substrates 212' and one permanent magnet 211 'sandwiched between the first magnetic stator substrate and the second magnetic stator substrate and one permanent magnet 211' sandwiched between the third magnetic stator substrate and the fourth magnetic stator substrate, the two permanent magnets 211 'jointly act on the rotor 220', and this magnetic attraction force can reach 400N, currently, manual loading and unloading of the rotor is generally used to avoid the loss of cleanliness caused by mechanical equipment assembly, however, it is difficult for a single operator to remove the rotor from the cavity of the stator, and more than two operators are often required, resulting in lower assembly efficiency and higher labor cost and maintenance cost. In addition, the stator and the rotor are difficult to realize coaxial taking and placing in the loading and unloading process, so that the rotor is easy to deviate in the taking and placing process, the loading and unloading difficulty is further increased, the rotor is not easy to take out in the process of assembling and maintaining the rotor, the stator or the rotor is possibly worn due to collision, and the cleanliness of a semiconductor process is further affected.
In order to solve the technical problems, the invention provides an auxiliary tool for a magnetic suspension device, which is applied to the magnetic suspension device and used as matched equipment of the magnetic suspension device. The magnetic levitation device generally comprises a magnetic levitation stator and a magnetic levitation rotor, wherein the magnetic levitation stator generates a magnetic field to drive the magnetic levitation rotor to rotate and levitate, the magnetic levitation device can have various types of changes according to different rotors, but the magnetic levitation device has a common characteristic that the magnetic levitation stator comprises at least one permanent magnet assembly, the permanent magnet assembly comprises two magnetic conduction pieces and a permanent magnet, and the permanent magnet is clamped between the two magnetic conduction pieces; the permanent magnet assembly may be an integral structure or a partial structure, for example, a magnetic levitation turntable or a wafer turntable applied to a semiconductor manufacturing process is taken as an example, and the magnetic levitation rotor is an annular rotor and comprises at least two layers of flange structures arranged along the axial direction, wherein the flanges are used as stator magnetic poles or stator iron cores and the like. The permanent magnet assembly of the magnetic suspension stator can be changed in various modes according to the different layers of the flange structure of the rotor. Corresponding to the rotor with the two-layer flange structure, the magnetic suspension stator comprises two layers of magnetic conduction rings and permanent magnet rings clamped between the two layers of magnetic conduction rings, or comprises two layers of segmented magnetic conduction pieces and a plurality of segmented permanent magnets clamped between the two layers of magnetic conduction pieces. Thus, when the permanent magnet assembly comprises a segmented permanent magnet and a segmented magnetically permeable member, the permanent magnet assembly can be understood as a unitary structure. When the permanent magnet assembly comprises a part of the magnetically conductive ring and a part of the corresponding permanent magnet ring, the permanent magnet assembly may be understood as a partial structure. Based on the structural characteristics of a permanent magnet assembly of a magnetic suspension device, in order to realize rapid and convenient loading and unloading of a rotor, avoid offset collision of the rotor in the loading and unloading process, facilitate loading and maintenance, improve loading and maintenance efficiency and reduce labor cost, the invention innovatively designs an auxiliary tool which comprises a magnetic conduction component, wherein the magnetic conduction component is configured to be switched between a first state and a second state, in the first state, a part of magnetic field of a permanent magnet forms a first magnetic loop through a magnetic conduction component and the magnetic suspension rotor, a part of magnetic field of the permanent magnet forms a second magnetic loop through the magnetic conduction component, and in the second state, the magnetic conduction component breaks the second magnetic loop. In the first state, the auxiliary tool is assembled on the magnetic suspension device, and the magnetic conduction component and the permanent magnet of the permanent magnet assembly form a magnetic loop, so that the magnetic flux of the permanent magnet acting on the magnetic suspension rotor through the first magnetic loop can be split, and the purpose of weakening the magnetic attraction between the magnetic suspension rotor and the magnetic suspension stator is achieved. The magnitude of the magnetic flux that the permanent magnet shunts to the second magnetic circuit may be controlled by the magnitude of the air gap between the magnetically permeable member and the permanent magnet, or by the material of the magnetically permeable member, such as a high permeability material that is greater than the magnetic permeability of the rotor.
The general inventive composition of the present invention will be described in detail below with reference to the attached drawings and specific examples.
Example 1
Referring to fig. 3, 4 and 5, an auxiliary tool 110 for a magnetic levitation device includes a magnetic conductive member and an operation handle 112, wherein the magnetic conductive member is configured as a magnetic conductive plate 111, and in a first state, a magnetic field of a permanent magnet 121 of a permanent magnet assembly forms a second magnetic loop H2 through the magnetic conductive plate 111, and in a second state, the magnetic conductive plate 111 breaks the second magnetic loop H2, and the magnetic conductive plate can be switched between a first state and a second state. In specific implementation, for example, when the magnetic suspension rotor 130 is taken out from the cavity of the magnetic suspension stator 120, the magnetic conduction plate 111 of the auxiliary tool 110 is attached to the side of the permanent magnet 121 of the magnetic suspension stator 120, which is opposite to the magnetic suspension rotor 130, and the magnetic conduction plate 111 can be smoothly adsorbed on the magnetic suspension stator 120 due to the magnetic attraction effect of the permanent magnet 121, at this time, the magnetic field of the permanent magnet 121 sequentially passes through the magnetic conduction piece 122 and the magnetic conduction plate 111 to form a second magnetic loop H2, and the second magnetic loop H2 can shunt the magnetic flux of the permanent magnet 121 acting on the magnetic suspension rotor 130 through the first magnetic loop H1, so as to achieve the purpose of weakening the magnetic attraction between the magnetic suspension rotor 130 and the magnetic suspension stator 120. At this time, the operator can easily take out the magnetic levitation rotor 130 from the chamber of the magnetic levitation stator 120. In the same way, when the magnetic suspension rotor 130 is assembled into the cavity of the magnetic suspension stator 120, the magnetic conduction plate 111 of the auxiliary tool 110 is firstly attached to one side, opposite to the magnetic suspension rotor 130, of the permanent magnet 121 of the magnetic suspension stator 120, at the moment, the magnetic field of the permanent magnet 121 acts on the magnetic conduction plate 111, and the leakage magnetic field in the cavity of the magnetic suspension stator 120 can be smaller, so that the magnetic suspension rotor 130 is easily assembled into the cavity of the magnetic suspension stator 120, the magnetic suspension stator 120 and the magnetic suspension rotor 130 are not required to be kept coaxial in the assembling and disassembling process, the rotor can be quickly and conveniently assembled and disassembled, offset collision of the rotor in the assembling and disassembling process is avoided, the assembling and maintaining are very convenient, the assembling and maintaining efficiency is greatly improved, and only one operator is required to finish the assembling and maintaining efficiency is greatly reduced.
The operating handle 112 is used for being conveniently held to operate the magnetic conduction plate 111, and the magnetic conduction plate 111 is aligned to a preset position of the magnetic suspension stator 120. The operating handle 112 and the magnetic conductive plate 111 can be directly locked together by a fastener. After the loading and unloading of the magnetic levitation rotor 130 are completed, an operator holds the operation handle 112 and overcomes the magnetic attraction force of the permanent magnet 121 to the magnetic conduction plate 111, so that the magnetic conduction plate 111 can be removed from the magnetic levitation stator 120. Preferably, in order to facilitate the removal of the magnetic conductive plate 111 from the magnetic levitation stator 120, the operation handle 112 may be designed in a U shape, and an acute angle is formed between the U-shaped operation handle 112 and the magnetic conductive plate 111, so as to overcome the magnetic attraction force of the permanent magnet in a rotating manner. However, in other embodiments, the operating handle 112 may be configured in other ways.
In this embodiment, the auxiliary tool is simple in structure and convenient to operate and implement, but because an operator is required to overcome the magnetic attraction force of the permanent magnet to take the auxiliary tool off the magnetic levitation stator, the auxiliary tool is preferably applied to an application scenario where the magnetic attraction force of the permanent magnet of the magnetic levitation stator is smaller, for example, a magnetic levitation device of a magnetic levitation rotor corresponding to a two-layer flange structure, see fig. 4. But not limited to this, the auxiliary tool of this embodiment may also be applied to a magnetic levitation device of a magnetic levitation rotor corresponding to a four-layer flange structure, see fig. 5, where the magnetic levitation device has two permanent magnet assemblies disposed along an axial direction, and the area of the magnetic conductive plate needs to cover the two permanent magnet assemblies to form respective second magnetic loops.
In this embodiment, the way of breaking the second magnetic circuit by the magnetic conductive plate is not limited, for example, the magnetic conductive plate can be separated from the magnetic suspension stator in a translational way or in a rotational way under the condition of allowing. Preferably, the second magnetic circuit is disconnected by the magnetic conduction plate in a rotating mode, and the magnetic attraction force of the permanent magnet is easier to overcome by rotating the magnetic conduction plate relative to a translational mode.
Example 2
Referring to fig. 6, an auxiliary tool 210 for a magnetic levitation device includes a magnetic conductive member and a base 212. The magnetic conductive component is configured as a magnetic conductive plate 211, the magnetic conductive plate 211 is rotatably mounted on a base 212, and the base 212 can be detachably fixed on the magnetic suspension stator. The present embodiment has the same or similar technical principles and effects as those of embodiment 1, except that the present embodiment can further improve the operation practicality of the auxiliary tool, so that the auxiliary tool can be more easily removed from the magnetic levitation device when the permanent magnetic assembly of the magnetic levitation device has a larger magnetic attraction force.
With continued reference to fig. 6, 7 and 8, in one embodiment, the base 212 includes two substrates 2121 disposed at intervals and a connecting post 2122 fixedly connected between the two substrates, a rotation shaft 2123 is disposed between the two substrates 2121, and the magnetic conductive plate 211 is rotatably sleeved on the rotation shaft 2123. Thus, by means of the structure of the base, the rotation function of the magnetic conductive plate can be realized, and when the rotor is assembled and disassembled, the base 212 is assembled to the preset position of the magnetic suspension stator 220, and the assembly and disassembly of the rotor can be rapidly completed based on the technical principle of embodiment 1. When the second magnetic circuit is disconnected, only the magnetic conduction plate 211 is required to be driven to rotate relative to the base 212, and the magnetic attraction force of the magnetic suspension stator 220 can be better overcome by means of rotation, so that the auxiliary tool 220 can be conveniently taken down from the magnetic suspension device. Preferably, one end of the magnetic conductive plate 211 is rotatably sleeved on the rotation shaft 2123, so that there is a longer moment arm when the other end of the magnetic conductive plate 211 is driven. The rotation direction of the magnetic conductive plate 211 relative to the base 212 is not limited, and the magnetic conductive plate 211 may rotate in a space coordinate system with x-axis, y-axis, and z-axis as axes, where the structure allows. Referring to fig. 1, since the magnetic levitation apparatus is generally flat, it is more preferable that one end of the magnetic plate 211 in the length direction is rotatably sleeved on the rotating shaft 2123, and the magnetic plate 211 rotates around the rotation axis direction of the magnetic levitation stator 220, i.e. the z-axis direction, so that the rotation function of the magnetic plate 211 is conveniently implemented, and the assembly of the base 212 to the magnetic levitation stator 220 is also facilitated.
In the embodiment, the detachable connection manner between the base 212 and the magnetic suspension stator 220 is not limited, and preferably, referring to fig. 6, two base plates 2121 extend to the same side to form two engaging portions 2124, a bayonet is formed between the two engaging portions 2124, and the auxiliary tool 210 can be clamped on the magnetic suspension stator 220 through the bayonet. That is, when the auxiliary tool 210 is assembled on the magnetic suspension stator 220, the auxiliary tool 210 is designed into a bayonet form by means of the planar structures at the top and the bottom of the magnetic suspension stator 220, so that the auxiliary tool 210 and the magnetic suspension stator 220 can be conveniently clamped and fixed.
According to the auxiliary tool, different variations can be provided according to different structures of the magnetic levitation device, and the magnetic levitation device of the magnetic levitation rotor corresponding to the four-layer flange structure is taken as an example. Fig. 6 illustrates a case where each permanent magnet assembly corresponds to one magnetic conductive plate, wherein one magnetic conductive plate 211 is omitted here for illustrating the rotation shaft 2123 and the joint 2124. Compared with the situation that two permanent magnet assemblies correspond to one magnetic conduction plate, each permanent magnet assembly corresponds to one magnetic conduction plate, the magnetic attraction force which needs to be overcome by single operation of the rotation of the magnetic conduction plate is greatly weakened, and the function of taking down the auxiliary tool from the magnetic suspension device can be realized.
With continued reference to fig. 6, in one embodiment, the base 212 includes two connection posts 2122, one connection post 2122 is configured as a blocking post, the other connection post 2122 is configured as a base post, the rotating shaft 2123 is disposed between the base post and the blocking post and is disposed near the base post, one end of the magnetic conductive plate 211 is rotatably sleeved on the rotating shaft 2123, the other end of the magnetic conductive plate 211 forms a stop body 2111, and the stop body 2111 can be blocked against one side of the blocking post. In this way, the magnetic plate 211 can rest on the stop post by means of the stop body 2111, and the stop post is used for limiting the rotation angle of the magnetic plate 211, so as to facilitate the use of the auxiliary tool 210. Preferably, the stop body 2111 and the magnetic conductive plate 211 are made of magnetic conductive material, and are integrally formed, i.e., the stop body 2111 is a part of the magnetic conductive plate 211. The rotation shaft 2123 is provided between the base and the stopper, and the rotation shaft 2123 is provided close to the base, so that the rotation force arm can be increased as much as possible.
Referring to fig. 7, in one embodiment, two magnetic arms 2113 are extended from one side of the magnetic plate 211, and a shaft sleeve 2114 is formed at one end of the magnetic plate 211, so that the magnetic plate 211 is rotatably connected to the rotational shaft 2123 through the shaft sleeve 2114. The magnetic conductive plate 211 is in direct contact with the two magnetic conductive pieces 222 of the permanent magnet assembly or forms a first air gap through the two magnetic conductive arms 2113. Thus, the magnetic field of the permanent magnet 221 of the permanent magnet assembly sequentially passes through one magnetic conduction piece 222, one magnetic conduction arm 2113, the magnetic conduction plate 211, the other magnetic conduction arm 2113 and the other magnetic conduction piece 222 to form a second magnetic loop H2, see fig. 8.
With continued reference to fig. 6, in one embodiment, base 212 further includes a reinforcing center post 2125, reinforcing center post 2125 is connected between two connecting posts 2122, one magnetic plate 211 is disposed between reinforcing center post 2125 and one base plate 2121, and the other magnetic plate 211 is disposed between reinforcing center post 2125 and the other base plate 2121. Strengthen the center pillar 2125 and connect two spliced poles 2122, can play the effect of increasing auxiliary fixtures structural strength, make auxiliary fixtures more firm durable. Preferably, the side of reinforcing center post 2125 facing away from the bayonet is provided with an operating handle 2126. Because the auxiliary fixtures mostly consist of magnetic conduction material, have certain weight, set up the operation handle 2126 and be convenient for operating personnel's operation.
With continued reference to FIG. 6, in one embodiment, the auxiliary tool 210 further includes a torque handle coupled to the stop body 2111, the torque handle configured to lengthen a moment arm of the stop body 2111 relative to the axis of rotation. In this way, the torque handle can further increase the turning force arm, and the operator can rotate the magnetically permeable plate 211 with less force. The shape and structure of the moment handle are not limited, and the moment handle can only increase the moment arm. Preferably, the torque handle is configured as a pry bar, one of which is provided with a socket 2112 and the other of which is provided with a plunger that mates with the socket 2122. Thus, the torque handle and the magnetic conduction plate are convenient to assemble and are connected in a mode of inserting holes and inserting posts, the assembly is convenient when the magnetic conduction plate is used, the magnetic conduction plate is convenient to disassemble when the magnetic conduction plate is not used, and larger space is not occupied.
With continued reference to fig. 6, the base post is disposed near one end of the two substrates 2121, the barrier post is disposed near the opposite end of the two substrates 2121, the base post is located on a path along which the magnetic conductive plate 211 rotates from the first state to the second state, and defines a direction in which the magnetic conductive plate rotates from the first state to the second state as a disconnection direction, a first avoidance surface 2127 is formed on a side of the base post facing the disconnection direction, and a second avoidance surface 2128 is formed on a side of the magnetic conductive plate 211 facing the first avoidance surface 2127. In this way, the rotation angle of the magnetic guide plate 211 is not transitionally limited by the engagement between the first and second avoidance surfaces 2127 and 2128.
The above embodiment 1, embodiment 2 and their variations can meet the needs of the magnetic levitation device with general magnetic attraction between the magnetic levitation stator and the magnetic levitation rotor, and can realize the function of rapidly assembling and disassembling the magnetic levitation rotor, and has simple structure and simple operation steps. However, for a magnetic levitation device with a larger magnetic attraction force between the magnetic levitation stator and the magnetic levitation rotor, for example, a magnetic levitation device corresponding to a magnetic levitation rotor with a four-layer flange structure, or/and a magnetic attraction force between a permanent magnet of a single permanent magnet assembly and the magnetic levitation rotor exists. For this situation, the auxiliary tool with the integral magnetic conductive plate structure, such as the case of embodiment 1, still requires a large force to break the second magnetic circuit, and after the assembly and disassembly of the magnetic suspension rotor are completed, it is difficult to easily remove the auxiliary tool from the magnetic suspension stator by only a single operator. In the case of embodiment 2, the auxiliary tool can be easily removed from the magnetic levitation stator, but a large force is required to break the second magnetic circuit. Therefore, the invention provides an auxiliary tool with a split magnetic conduction part, so as to more effectively meet the requirement of the difficult scene. Referring to fig. 9, 10, 11 and 12, the magnetic conductive members are in one-to-one correspondence with the permanent magnet assemblies, the magnetic conductive members include at least two magnetic conductors, at least one of the at least two magnetic conductors is configured as a moving magnetic conductor, and the moving magnetic conductor is switched between a first state and a second state; in the first state, the magnetic field of the permanent magnet assembly forms a second magnetic loop through at least two magnetizers, and in the second state, the movable magnetizers disconnect the second magnetic loop. Thus, compared with the above embodiments 1 and 2, only a part of the magnetizer of the magnetically conductive member needs to be moved to break the second magnetic circuit, i.e., the operator can break the second magnetic circuit with a small force. Compared with an auxiliary tool with an integral magnetic conduction plate structure, the auxiliary tool with the split magnetic conduction part is easier to implement.
As in the above-described embodiments 1 and 2, the manner in which the moving magnetizer opens the second magnetic circuit is not limited, for example, the moving magnetizer may open the second magnetic circuit in a translational manner or in a rotational manner, as the conditions allow. Preferably, the movable magnetizer breaks the second magnetic circuit in a rotating mode, and the magnetic attraction of the permanent magnet is easier to overcome by rotating the movable magnetizer relative to a translational mode.
The following describes a specific embodiment of the auxiliary tool for the split magnetic conductive component with reference to the drawings.
Example 3
Referring to fig. 9, 10, 11 and 12, the present embodiment provides an auxiliary tool 310 for a magnetic levitation device, which is an auxiliary tool 310 with a split magnetic conductive component, and the auxiliary tool 310 includes the magnetic conductive component and a base 312. In this embodiment, the magnetic conductive component includes 3 magnetic conductors, and the 3 magnetic conductors are configured such that the moving magnetic conductors 311,3 are sequentially connected to each other and rotatably mounted on the base 312; in the first state, the magnetic field of the permanent magnet 321 sequentially passes through the 3 moving magnetizers 311 to form a second magnetic circuit, and in the second state, the 3 moving magnetizers 311 are rotated to a position away from the permanent magnet assembly one by one. In this embodiment, the 3 magnetizers are all configured as movable magnetizers 311, and can rotate one by one when the second magnetic circuit is disconnected, so as to realize that the second magnetic circuit is disconnected with smaller force. In the second magnetic circuit, after one moving magnetizer 311 is opened, the gap of the second magnetic circuit is not large enough, and the magnetic field of the permanent magnet 321 can still act on other moving magnetizers 311 due to the existence of an air gap, so that after three moving magnetizers are arranged and are opened independently, the magnetic attraction of the magnetic field of the permanent magnet acting on the auxiliary tool is small, and at the moment, the auxiliary tool can be easily taken down from the magnetic suspension stator. Therefore, the embodiment has the dual advantages that on one hand, the second magnetic loop can be disconnected by only needing small force, and on the other hand, the auxiliary tool is easily taken off from the magnetic suspension stator.
In this embodiment, the magnetic conductive member includes 3 magnetic conductors, and the 3 magnetic conductors are configured as moving magnetic conductors, but not limited thereto, more magnetic conductors may be provided as needed, and more magnetic conductors may be configured as moving magnetic conductors. More magnetizers are arranged, and under the same space, the force for driving each magnetizer is smaller, but the operation times are more. Similarly, two magnetizers can be further arranged according to the requirement, the two magnetizers are configured to be movable magnetizers, and the two movable magnetizers are arranged, so that the number of times of operation is less under the same space, but the force for driving each magnetizer is larger, and the second magnetic circuit may not be easily disconnected. Therefore, in this embodiment, 3 magnetizers are set in combination with the characteristics of the magnetic suspension stator permanent magnet assembly, and the 3 magnetizers are configured as moving magnetizers, so as to realize the optimal configuration of operation times and driving force. Of course, fewer moving magnetizers may be configured among the 3 magnetizers, for example, 2 of the 3 moving magnetizers are configured as moving magnetizers or 1 moving magnetizer, while the other magnetizers are configured as fixed magnetizers. For this case, a detailed description will be given as another embodiment.
Referring to fig. 9 and 11, in order to implement the rotating function of the moving magnetizer, in an embodiment, the base 312 includes two substrates 3121 disposed at intervals and a connecting post 3122 fixedly connected between the two substrates 3124, and the rotating shaft 3123,3 moving magnetizers 311 are disposed between the two substrates 3121 and are all rotatably sleeved on the rotating shaft 3123. In this way, the 3 moving magnetizers 311 are simultaneously rotatably sleeved on the rotation shaft 3123, so that the rotation function of the moving magnetizers 311 is realized with a relatively simple structure, but the present invention is not limited thereto, and in other embodiments, a different rotation shaft may be provided for each moving magnetizer 311. In the present embodiment, the rotation shaft is provided between the two substrates, but the rotation shaft is not limited to this, and in other variations, the two substrates may be used as one base body together, and the rotation shaft may be provided at two opposite positions of the base body.
In the embodiment, the detachable connection manner between the base 312 and the magnetic suspension stator is not limited, and preferably, referring to fig. 9, the two substrates 3121 extend to the same side to form two engaging portions 3124, a bayonet is formed between the two engaging portions 3124, and the auxiliary tool 310 can be clamped on the magnetic suspension stator 320 through the bayonet, referring to fig. 12. Namely, when the auxiliary tool 310 is assembled on the magnetic suspension stator 320, the auxiliary tool is designed into a bayonet form by means of the plane structures at the top and the bottom of the magnetic suspension stator, so that the auxiliary tool and the magnetic suspension stator can be conveniently clamped and fixed.
Referring to fig. 9, 10 and 11, in an embodiment, the auxiliary tool includes two magnetic conductive members, the two magnetic conductive members are disposed between the two substrates 3121, and 3 moving magnetic conductors 311 of each magnetic conductive member are rotatably sleeved on the rotation shaft 3123. The two magnetic conduction components are arranged and can correspond to the two permanent magnet assemblies so as to meet the requirement of the magnetic suspension device of the magnetic suspension rotor corresponding to the four-layer flange structure, but the magnetic suspension device is not limited to the magnetic suspension device, and one group of magnetic conduction components is reduced when the magnetic suspension device of the magnetic suspension rotor corresponding to the two-layer flange structure is adopted. Fig. 9 and 10 and 11 illustrate a case where the auxiliary tool includes two magnetically conductive members, wherein one moving magnetic conductor 311 is omitted here for illustrating the rotation shaft 3123 and the joint 3124.
With continued reference to fig. 9, 10 and 11, in one embodiment, the base 312 includes two connection posts 3122, one connection post 3122 is configured as a blocking post, the other connection post 3122 is configured as a base post 312, the rotation shaft 3123 is disposed between the base post and the blocking post and is disposed near the base post 312, one end of the moving magnetizer 311 is rotatably sleeved on the rotation shaft 3123, the other end of the moving magnetizer 313 forms a blocking body 3111, and the blocking body 3111 can be blocked against one side of the blocking post. Thus, the 3 moving magnetizers 311 can be blocked against the blocking post by the aid of the blocking body 3111, and the blocking post is used for limiting the rotation angle of the moving magnetizers so as to facilitate the use of auxiliary tools. Preferably, the stop body and the movable magnetizer are made of magnetic conductive materials and are integrally formed, i.e. the stop body is a part of the movable magnetizer. The rotating shaft is arranged between the base column and the baffle column, and the rotating shaft is arranged close to the base column, so that the rotating force arm can be increased as much as possible.
Referring to fig. 12, in an embodiment, when 3 moving magnetic conductors 311 are assembled together, the structure is U-shaped, and similar to the structure of embodiment 2 in which two magnetic conductive arms 2113 are formed by extending one side of the magnetic conductive plate 211. The 3 movable magnetizers 311 are connected at the corners of the U shape, and each movable magnetizer 311 is in a flat plate shape, so that the whole processing and manufacturing are convenient. One end of each movable magnetizer 311 is formed with a bushing, so that the movable magnetizer 311 is rotatably connected with the rotating shaft through the bushing. The 2 moving magnetizers 311 located at both ends of the 3 moving magnetizers 311 are in direct contact with the two magnetic conductive pieces 322 of the permanent magnet assembly or form a first air gap. Thus, the magnetic field of the permanent magnet 321 of the permanent magnet assembly sequentially passes through one magnetic conductive member 322,3, the other magnetic conductive member 322, and forms a second magnetic loop H2, see fig. 12.
With continued reference to fig. 9, 10 and 11, in one embodiment, the base 312 further includes a reinforcing center post 3125, the reinforcing center post 3125 being connected between two connecting posts 3122, one magnetically permeable member being disposed between the reinforcing center post 3125 and one base plate 3121, the other magnetically permeable member being disposed between the reinforcing center post 3125 and the other base plate 4121. The reinforcing center column 3125 is connected with the two connecting columns 3122, which can play a role in increasing the structural strength of the auxiliary tool, so that the auxiliary tool is more firm and durable. Preferably, the side of the reinforcing center post 3125 facing away from the bayonet is provided with an operating handle 3126. Because the auxiliary fixtures mostly consist of magnetic conduction material, have certain weight, set up the operation 3126 handle and be convenient for operating personnel's operation.
With continued reference to fig. 9, 10 and 11, in one embodiment, the auxiliary tool 310 further includes a torque handle coupled to the stop body, the torque handle configured to lengthen the arm of force of the stop relative to the rotational axis. Thus, the torque handle can further increase the rotation force arm, and an operator can drive the magnetic conduction plate to rotate with smaller force. The shape and structure of the moment handle are not limited, and the moment handle can only increase the moment arm. Preferably, the torque handle is configured as a pry bar 313, one of the pry bar 313 and the stopper 3111 is provided with a jack 3112, and the other is provided with a plunger, and the plunger is inserted into the jack 3112. Thus, the torque handle and the magnetic conduction plate are convenient to assemble and are connected in a mode of inserting holes and inserting posts, the assembly is convenient when the magnetic conduction plate is used, the magnetic conduction plate is convenient to disassemble when the magnetic conduction plate is not used, and larger space is not occupied.
With continued reference to fig. 9 and 11, in one embodiment, a base is disposed near one end of the two substrates, a blocking post is disposed near the opposite end of the two substrates, the base is located on a path along which the moving magnetizer rotates from the first state to the second state, the direction in which the moving magnetizer rotates from the first state to the second state is defined as a disconnection direction, a first avoidance surface 3127 is formed on a side of the base facing the disconnection direction, and a second avoidance surface 3128 is formed on a side of the moving magnetizer 311 facing the first avoidance surface 3127. In this way, the rotation angle of the moving magnetizer is not excessively limited by the engagement between the first avoidance surface 3127 and the second avoidance surface 3128.
The above embodiment 3 and its modified examples describe in detail one type of implementation of the auxiliary tool with the split magnetic conductive member. Another important type of auxiliary tool with split magnetic conductive parts is described below with reference to the accompanying drawings.
Referring to fig. 16 and 17, the present embodiment provides an auxiliary tool 410 for a magnetic levitation device, which is an auxiliary tool with a split magnetic conductive component, and the auxiliary tool includes the magnetic conductive component and a base 412. The magnetic conduction component comprises 3 magnetic conductors, one of the 3 magnetic conductors is configured as a movable magnetic conductor 411, the other two magnetic conductors are configured as fixed magnetic conductors 411', the two fixed magnetic conductors 411' are fixedly connected with a base 412, and the movable magnetic conductor 411 is rotatably arranged on the base 412 and clamped between the two fixed magnetic conductors 411 '; in the first state, see fig. 16, the magnetic field of the permanent magnet 421 forms a second magnetic circuit through one fixed magnetizer 411', the movable magnetizer 411, and the other fixed magnetizer 411' in order, and in the second state, see fig. 17, the movable magnetizer 411 rotates to a position separated from the two fixed magnetizers 411 '. In this embodiment, one of the 3 magnetizers is set as a movable magnetizer 411, the other 2 magnetizers are set as fixed magnetizers 411', the movable magnetizer 411 is used for breaking the second magnetic loop H2, and the fixed magnetizer 411' is used for matching with the structural form of the permanent magnet assembly to guide the magnetic field of the magnetic conductive member of the permanent magnet assembly. When the second magnetic circuit is disconnected, the second magnetic circuit H2 may be disconnected by rotating the moving magnetizer 411. Because, in the second magnetic circuit, if the gap of the second magnetic circuit is not large enough, the magnetic field of the permanent magnet can still act on other fixed magnetizers if the gap is in the presence of an air gap after the movable magnetizer is disconnected, and the magnetic field can also act on the fixed magnetizer if the leakage magnetic field exists at other positions of the magnetic suspension stator, so that even if the movable magnetizer is disconnected from the fixed magnetizer. The fixed magnetizer may be also subjected to magnetic attraction of the magnetic suspension stator, so that the auxiliary tool is not easy to be taken down from the magnetic suspension stator. Therefore, in this embodiment, the movable magnetic conductor 411 is disposed between the two fixed magnetic conductors 411', and the movable magnetic conductor 411 can be simultaneously separated from the two fixed magnetic conductors 411' by rotating the movable magnetic conductor 411, so that the air gap between the two fixed magnetic conductors 411' and the movable magnetic conductor 411 after disconnection is as large as possible, so as to weaken the magnetic attraction of the magnetic suspension stator on the auxiliary tool. So that the auxiliary tool can be removed with less force.
Referring to fig. 13, 14 and 15, in order to implement the rotating function of the moving magnetizer 411, in an embodiment, the base 412 includes two side plates 4121 disposed at intervals, the moving magnetizer 411 is disposed between the two side plates 4121, one end of the moving magnetizer 411 is rotatably connected to one side plate 4121 through a rotating shaft 4122, and the other end of the moving magnetizer 411 is rotatably connected to the other side plate 4121 through the rotating shaft 4122. In this way, the movable magnetizer 411 is mounted on the two side plates 4121 through the rotating shaft 4122, so that the rotating function of the movable magnetizer 411 is realized, the two side plates 4121 are arranged along the z-axis direction with reference to the magnetic suspension stator 420, and the movable magnetizer 411 is arranged along the horizontal direction (such as the x-axis direction), so that the function of disconnecting with the two fixed magnetizers can be realized by rotating one movable magnetizer 411. In the present embodiment, the rotating shaft 4122 is provided between the two side plates, but the present invention is not limited thereto, and in other equivalent variations, the two side plates may be used as one base together, and the rotating shaft may be provided at two opposite positions of the base.
Referring to fig. 13, 14 and 15, in one embodiment, the auxiliary tool includes two magnetically permeable members, each of which is disposed between two side plates. The two magnetic conduction components are arranged and can correspond to the two permanent magnet assemblies so as to meet the requirement of the magnetic suspension device of the magnetic suspension rotor corresponding to the four-layer flange structure, but the magnetic suspension device is not limited to the magnetic suspension device, and one group of magnetic conduction components is reduced when the magnetic suspension device of the magnetic suspension rotor corresponding to the two-layer flange structure is adopted.
Referring to fig. 13 and 14, in an embodiment, the auxiliary tool 410 further includes a rotating handle 4123, and a rotating shaft 4122 is fixedly connected to the rotating handle 4123 after passing through a shaft hole in the side plate 4121. Thus, the rotating shaft 4122 and the moving magnetizer 411 can be driven to rotate by rotating the handle 4123, and the shape and structure of the rotating handle 4123 are not limited as long as the rotating shaft and the moving magnetizer can be driven to rotate. Preferably, the rotary handle is configured as a bar or plate perpendicular to the rotation axis, thus facilitating the operation of the rotary handle. The rod piece or the plate piece can be provided with a locking piece. Therefore, when the rotary handle rotates to the disconnection position, the locking piece locks, and the movable magnetizer is prevented from rotating accidentally under the action of magnetic attraction.
Referring to fig. 15, in one embodiment, one side of the fixed magnetizer 411 'facing the movable magnetizer 411 and one side of the movable magnetizer 411 facing the fixed magnetizer 411' are formed with an arc-shaped protrusion 4111, and the other is formed with an arc-shaped recess 4112, and the arc-shaped protrusion 4111 is slidably engaged with the arc-shaped recess 4112. Therefore, relative to the plane-to-plane contact or the line-to-plane contact between the movable magnetizer and the fixed magnetizer, the contact area between the movable magnetizer and the fixed magnetizer can be increased and the reliable contact between the movable magnetizer and the fixed magnetizer can be ensured by the cooperation of the arc-shaped convex part and the arc-shaped concave part while the rotation of the movable magnetizer relative to the fixed magnetizer is facilitated.
Referring to fig. 13, 14 and 15, in an embodiment, the base 412 further includes a back plate 4124, a top plate 4125 and a bottom plate 4126, where the top plate 4125, the two side plates 4121 and the bottom plate 4126 are all mounted on the same side of the back plate 4124 and enclose a receiving space for receiving the magnetic conductive component, the top plate 4125 extends away from the back plate 4124 to form an upper engagement plate 4127 beyond the side plate 4121, the bottom plate 4126 extends away from the back plate 4124 to form a lower engagement plate 4128 beyond the side plate 4121, and a clamping opening is formed between the upper engagement plate 4127 and the lower engagement plate 4128, and the auxiliary fixture 410 can be clamped on the magnetic suspension stator through the clamping opening. Thus, the back plate, the top plate, the bottom plate and the two side plates enclose a containing space, and the function of containing and fixing the magnetic conduction component can be achieved. And when the auxiliary tool is assembled on the magnetic suspension stator, the auxiliary tool is designed into a clamping opening (bayonet) mode by means of the plane structures at the top and the bottom of the magnetic suspension stator, so that the auxiliary tool and the magnetic suspension stator can be clamped and fixed very conveniently.
Referring to fig. 13, 14 and 15, the side of the back plate 4124 facing away from the side plate 4121 is provided with an operating handle 413. Because the auxiliary fixtures are mostly made of magnetic conductive materials, have certain weight, set up the operation handle 413 and be convenient for operating personnel to operate.
In the above embodiments, the magnetic conductive materials of the magnetic conductive plate, the movable magnetic conductive body and the fixed magnetic conductive body are not limited, and for example, soft magnetic materials having magnetic permeability far greater than vacuum magnetic permeability, examples of which include, but are not limited to, iron, cobalt, nickel and alloys thereof, carbon steel, silicon steel, electrical pure iron, and the like. Preferably, the base is a non-magnetically permeable material.
In each of the above embodiments, the magnetic conductive member is used to form the second magnetic circuit with the permanent magnet assembly of the magnetic suspension stator, and since the permanent magnet of the permanent magnet assembly is clamped between the two magnetic conductive members, it is preferable that the magnetic conductive member is used to form the magnetic circuit with the magnetic conductive members. More preferably, in the first state, the magnetic conductive member is in direct contact with the magnetic conductive member or forms a first air gap, and the magnetic conductive member and the magnetic suspension rotor form a second air gap, and the first air gap is not larger than the second air gap. In this way, since the first air gap is not greater than the second air gap, the magnetic flux of the permanent magnet acting on the first magnetic circuit is not greater than the magnetic flux of the second magnetic circuit, and the rotor can be more easily assembled and disassembled.
According to the embodiment of the invention, based on the same inventive concept, the invention also provides magnetic levitation equipment, which comprises a magnetic levitation device and the auxiliary tool in each embodiment, wherein the magnetic levitation device comprises a magnetic levitation stator and a magnetic levitation rotor, and the magnetic levitation stator generates a magnetic field to drive the magnetic levitation rotor to rotate and suspend. The magnetic suspension equipment is provided with the auxiliary tool, when the magnetic suspension rotor is assembled and disassembled, the auxiliary tool is assembled on the magnetic suspension stator, so that the rotor can be assembled and disassembled quickly and conveniently, the rotor is prevented from being offset and collided in the assembling and disassembling process, the assembling and maintenance are convenient, the assembling and maintenance efficiency is improved, and the labor cost is reduced.
The form of the rotor in the magnetic suspension device is not limited, the rotor can be an annular rotor or a solid rotor, preferably, in one embodiment, the magnetic suspension rotor is an annular rotor, the magnetic suspension stator is arranged around the magnetic suspension rotor, the magnetic suspension stator comprises a plurality of auxiliary matching edges arranged along the circumferential direction, each auxiliary matching edge is provided with a permanent magnet assembly, permanent magnets at different auxiliary matching edges are connected end to form a permanent magnet ring, and an auxiliary tool is arranged corresponding to each auxiliary matching edge. Because the magnetic suspension stator is an annular structure surrounding the magnetic suspension rotor, the magnetic suspension stator comprises a plurality of permanent magnet assemblies surrounding the periphery of the magnetic suspension rotor, and corresponding auxiliary tools are conveniently assembled on the magnetic suspension stator by arranging auxiliary matching edges in the circumferential direction of the magnetic suspension stator. In other embodiments, the number of auxiliary tools may be different from the number of auxiliary matching edges of the magnetic suspension stator, and specifically, the number of auxiliary tools may be adjusted according to the magnitude of the magnetic attraction force that needs to be overcome.
In the circumferential direction of the magnetic suspension stator, the permanent magnet of the permanent magnet assembly can be integrated (permanent magnet ring) or split, and the magnetic conduction piece of the permanent magnet assembly can be integrated (magnetic ring) or split. Preferably, the permanent magnets at the auxiliary matching edges are arranged at intervals, and the magnetic conduction pieces at the same side of the permanent magnets at different auxiliary matching edges are connected end to form a stator ring piece. Therefore, the magnetic suspension device can be better applied to a magnetic suspension turntable or a semiconductor turntable or a wafer turntable in the field of semiconductor manufacturing.
The magnetic levitation device is not limited to the magnetic levitation turntable, and can be a magnetic levitation rotary driver with large magnetic attraction for providing a permanent magnet bias magnetic field between other magnetic levitation stators and magnetic levitation rotors through permanent magnets.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (28)
1. The auxiliary tool for the magnetic levitation device comprises a magnetic levitation stator and a magnetic levitation rotor, wherein the magnetic levitation stator generates a magnetic field to drive the magnetic levitation rotor to rotate and suspend, and the auxiliary tool is characterized in that the magnetic levitation stator comprises at least one permanent magnet assembly, the permanent magnet assembly comprises two magnetic conduction pieces and a permanent magnet, and the permanent magnet is clamped between the two magnetic conduction pieces; the auxiliary tool comprises a magnetic conduction component, the magnetic conduction component is configured to be switched between a first state and a second state, in the first state, a part of magnetic field of the permanent magnet forms a first magnetic loop through the magnetic conduction component and the magnetic suspension rotor, a part of magnetic field of the permanent magnet forms a second magnetic loop through the magnetic conduction component, and in the second state, the magnetic conduction component breaks the second magnetic loop.
2. An auxiliary tool for a magnetic levitation apparatus according to claim 1, wherein: the magnetic conduction component is configured as a magnetic conduction plate, the magnetic field of the permanent magnet assembly forms the second magnetic loop through the magnetic conduction plate in the first state, and the magnetic conduction plate breaks the second magnetic loop in the second state.
3. An auxiliary tool for a magnetic levitation apparatus according to claim 2, wherein: the auxiliary tool further comprises an operation handle, and the operation handle is fixedly connected to one side of the magnetic conduction plate.
4. An auxiliary tool for a magnetic levitation apparatus according to claim 2, wherein: the magnetic conduction plate cuts off the second magnetic loop in a rotating mode.
5. An auxiliary tool for a magnetic levitation apparatus according to claim 4, wherein: the auxiliary tool further comprises a base, the magnetic conduction plate is rotatably installed on the base, and the base is detachably fixed on the magnetic suspension stator.
6. An auxiliary tool for a magnetic levitation apparatus according to claim 1, wherein: the magnetic conduction parts are in one-to-one correspondence with the permanent magnet assemblies, the magnetic conduction parts comprise at least two magnetic conductors, at least one of the at least two magnetic conductors is configured as a movable magnetic conductor, and the movable magnetic conductor is switched between the first state and the second state; in the first state, the magnetic field of the permanent magnet assembly forms the second magnetic loop through the at least two magnetizers, and in the second state, the movable magnetizers disconnect the second magnetic loop.
7. The auxiliary tool for a magnetic levitation apparatus according to claim 6, wherein: the movable magnetizer breaks the second magnetic circuit in a rotating mode.
8. An auxiliary tool for a magnetic levitation apparatus according to claim 7, wherein: the auxiliary tool further comprises a base, the magnetic conduction component comprises 3 magnetic conductors, the 3 magnetic conductors are configured to be the movable magnetic conductors, and the 3 movable magnetic conductors are connected in sequence and rotatably installed on the base; in the first state, the magnetic field of the permanent magnet sequentially passes through 3 movable magnetizers to form the second magnetic loop, and in the second state, the 3 movable magnetizers rotate to a position far away from the permanent magnet assembly one by one.
9. An auxiliary tool for a magnetic levitation apparatus according to claim 8, wherein: the base comprises two substrates arranged at intervals and a connecting column fixedly connected between the two substrates, a rotating shaft is arranged between the two substrates, and 3 movable magnetizers are rotatably sleeved on the rotating shaft.
10. An auxiliary tool for a magnetic levitation apparatus according to claim 9, wherein: the auxiliary fixture comprises two magnetic conduction parts, wherein the two magnetic conduction parts are arranged between the two base plates, and 3 movable magnetic conductors of each magnetic conduction part are rotatably sleeved on the rotating shaft.
11. An auxiliary tool for a magnetic levitation apparatus according to claim 10, wherein: the base comprises two connecting columns, one connecting column is configured as a baffle column, the other connecting column is configured as a base column, the rotating shaft is arranged between the base column and the baffle column and is close to the base column, one end of the movable magnetizer is rotatably sleeved on the rotating shaft, the other end of the movable magnetizer forms a stop body, and the stop body can be blocked against one side of the baffle column.
12. An auxiliary tool for a magnetic levitation apparatus according to claim 11, wherein: the stop body and the movable magnetizer are made of magnetic conductive materials and are integrally formed.
13. An auxiliary tool for a magnetic levitation apparatus according to claim 11, wherein: the auxiliary tool further comprises a moment handle, the moment handle is connected with the stop body, and the moment handle is configured to lengthen the moment arm of the stop body relative to the rotating shaft.
14. An auxiliary tool for a magnetic levitation apparatus according to claim 13, wherein: the moment handle is configured as a pry bar, one of the pry bar and the stop body is provided with a jack, the other one of the pry bar and the stop body is provided with a plunger, and the plunger is inserted into the jack.
15. An auxiliary tool for a magnetic levitation apparatus according to claim 11, wherein: the base column is arranged close to one ends of the two substrates, the baffle column is arranged close to the other opposite ends of the two substrates, the base column is positioned on a path of the moving magnetizer rotating from the first state to the second state and defines that the rotating direction of the moving magnetizer from the first state to the second state is a disconnection direction, a first avoidance surface is formed on one side of the base column facing to the disconnection direction, and a second avoidance surface is formed on one side of the moving magnetizer facing to the first avoidance surface.
16. An auxiliary tool for a magnetic levitation apparatus according to claim 11, wherein: the auxiliary fixture further comprises a reinforcing center column, the reinforcing center column is connected between the base column and the baffle column, one magnetic conduction component is arranged between the reinforcing center column and one base plate, the other magnetic conduction component is arranged between the reinforcing center column and the other base plate, and an operation handle is arranged on one side of the reinforcing center column.
17. An auxiliary tool for a magnetic levitation apparatus according to claim 9, wherein: the two base plates extend to the same side to form two joint parts, a bayonet is formed between the two joint parts, and the auxiliary fixture can be clamped on the magnetic suspension stator through the bayonet.
18. An auxiliary tool for a magnetic levitation apparatus according to claim 7, wherein: the auxiliary tool further comprises a base, the magnetic conduction component comprises 3 magnetic conductors, one of the 3 magnetic conductors is configured to be the movable magnetic conductor, the other two magnetic conductors are configured to be fixed magnetic conductors, the two fixed magnetic conductors are fixedly connected with the base, and the movable magnetic conductor is rotatably arranged on the base and clamped between the two fixed magnetic conductors; in the first state, the magnetic field of the permanent magnet sequentially passes through one fixed magnetizer, the movable magnetizer and the other fixed magnetizer to form the second magnetic loop, and in the second state, the movable magnetizer rotates to a position separated from the two fixed magnetizers.
19. An auxiliary tool for a magnetic levitation apparatus according to claim 18, wherein: the base comprises two side plates arranged at intervals, the movable magnetizer is arranged between the two side plates, one end of the movable magnetizer is rotatably connected to one side plate through a rotating shaft, and the other end of the movable magnetizer is rotatably connected to the other side plate through the rotating shaft.
20. An auxiliary tool for a magnetic levitation apparatus according to claim 19, wherein: the auxiliary tool comprises two magnetic conduction parts, and the two magnetic conduction parts are arranged between the two side plates.
21. An auxiliary tool for a magnetic levitation apparatus according to claim 19, wherein: the auxiliary tool further comprises a rotating handle, and one rotating shaft penetrates through the shaft hole in the side plate and is fixedly connected with the rotating handle.
22. An auxiliary tool for a magnetic levitation apparatus according to claim 18, wherein: one side of the fixed magnetizer facing the movable magnetizer and one side of the movable magnetizer facing the fixed magnetizer are provided with arc-shaped convex parts, the other side of the fixed magnetizer is provided with arc-shaped concave parts, and the arc-shaped convex parts are in sliding fit with the arc-shaped concave parts.
23. An auxiliary tool for a magnetic levitation apparatus according to claim 19, wherein: the base still includes backplate, roof and bottom plate, roof, two curb plate with the bottom plate all install in the same side of backplate encloses into the accommodation space of holding magnetic conduction part, the roof dorsad the backplate extends to form and surpasss the last joint plate of curb plate, the bottom plate dorsad the backplate extends to form and surpasss the lower joint plate of curb plate, go up the joint plate with form the centre gripping mouth down between the joint plate, auxiliary fixtures can pass through the centre gripping mouth joint is in on the magnetic suspension stator.
24. An auxiliary tool for a magnetic levitation apparatus according to claim 23, wherein: an operating handle is arranged on one side of the backboard, which is opposite to the side plate.
25. An auxiliary tool for a magnetic levitation device according to any of claims 1-24, wherein in the first state, the magnetically permeable member is in direct contact with the magnetically permeable member or forms a first air gap, and a second air gap is formed between the magnetically permeable member and the magnetically levitated rotor, and the first air gap is not greater than the second air gap.
26. A magnetic levitation apparatus comprising a magnetic levitation device comprising a magnetic levitation stator and a magnetic levitation rotor, the magnetic levitation stator generating a magnetic field to drive the magnetic levitation rotor to rotate and levitate, characterized in that the magnetic levitation apparatus further comprises an auxiliary tool according to any of claims 1-25.
27. The apparatus according to claim 26, wherein the magnetic levitation rotor is an annular rotor, the magnetic levitation stator is disposed around the magnetic levitation rotor, the magnetic levitation stator includes a plurality of auxiliary mating edges disposed along a circumferential direction, the permanent magnet assembly is disposed at each of the auxiliary mating edges, the permanent magnets at different auxiliary mating edges are connected end to form a permanent magnet ring, and one of the auxiliary fixtures is disposed corresponding to each of the auxiliary mating edges.
28. A magnetic levitation apparatus according to claim 27, wherein the permanent magnets at the plurality of auxiliary mating edges are spaced apart and the magnetically permeable members on the same side of the permanent magnets at different auxiliary mating edges are connected end-to-end to form a stator ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310604336.8A CN116345956B (en) | 2023-05-26 | 2023-05-26 | Auxiliary fixture for magnetic levitation device and magnetic levitation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310604336.8A CN116345956B (en) | 2023-05-26 | 2023-05-26 | Auxiliary fixture for magnetic levitation device and magnetic levitation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116345956A true CN116345956A (en) | 2023-06-27 |
| CN116345956B CN116345956B (en) | 2023-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310604336.8A Active CN116345956B (en) | 2023-05-26 | 2023-05-26 | Auxiliary fixture for magnetic levitation device and magnetic levitation equipment |
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| Country | Link |
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| CN (1) | CN116345956B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102118125A (en) * | 2010-01-01 | 2011-07-06 | 张玉宝 | Magnetic suspension supporting system, magnetic suspension bearing, compound magnetic suspension bearing, magnetic force centering bearing and rotor bias magnet gravity-reducing device |
| CN108400725A (en) * | 2018-01-21 | 2018-08-14 | 周小英 | Interior six faces magnetcisuspension floating body |
| CN114826025A (en) * | 2022-04-25 | 2022-07-29 | 苏州苏磁智能科技有限公司 | Magnetic levitation device and semiconductor processing equipment |
-
2023
- 2023-05-26 CN CN202310604336.8A patent/CN116345956B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102118125A (en) * | 2010-01-01 | 2011-07-06 | 张玉宝 | Magnetic suspension supporting system, magnetic suspension bearing, compound magnetic suspension bearing, magnetic force centering bearing and rotor bias magnet gravity-reducing device |
| CN108400725A (en) * | 2018-01-21 | 2018-08-14 | 周小英 | Interior six faces magnetcisuspension floating body |
| CN114826025A (en) * | 2022-04-25 | 2022-07-29 | 苏州苏磁智能科技有限公司 | Magnetic levitation device and semiconductor processing equipment |
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|---|---|
| CN116345956B (en) | 2023-08-11 |
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