CN116344572A - Micro LED structure and its preparation method - Google Patents

Abstract

The disclosure relates to a Micro LED structure and a preparation method thereof, and belongs to the technical field of Micro LED display; the Micro LED structure comprises a light emitting component, a first substrate, a waveguide transmission layer and an optical coupling component; the light-emitting component is arranged on one side of the first substrate; the waveguide transmission layer and the optical coupling component are arranged on one side of the first substrate, which is away from the light emitting component, and the optical coupling component is arranged in alignment with the light emitting component and embedded on one side of the waveguide transmission layer, which is close to the light emitting component; the first substrate is at least used for transmitting the light emitted by the light emitting component to the light coupling component; the optical coupling assembly is used for controlling the rotation angle of the light so that the light is transmitted according to a preset direction, and the waveguide transmission layer is used for transmitting the light in the preset direction to the diffraction optical waveguide. Therefore, the size of the Micro LED structure is reduced, and miniaturization of products is facilitated.

Description

Micro LED structure and its preparation method

technical field

The present disclosure relates to the technical field of Micro LED display, in particular to a Micro LED structure and a preparation method thereof.

Background technique

At present, most of the existing Micro LED display technologies use the mechanical mass transfer technology to pick and place the LEDs on the drive substrate. Due to the limitations of mechanical precision and manufacturing yield, the spacing between Micro LED pixels is usually large, and After the LED is prepared, it needs to be bonded with a large-sized collimator lens module and other structures and packaged, which greatly increases the size of the entire Micro LED structure, which is not conducive to the miniaturization of the product.

Contents of the invention

In order to solve the above technical problems or at least partly solve the above technical problems, the present disclosure provides a Micro LED structure and a manufacturing method thereof.

The present disclosure provides a Micro LED structure, the Micro LED structure is matched with a diffractive optical waveguide; the Micro LED structure includes a light-emitting component, a first substrate, a waveguide transmission layer, and an optical coupling component;

The light-emitting component is disposed on one side of the first substrate; the waveguide transmission layer and the optical coupling component are both disposed on the side of the first substrate away from the light-emitting component, and the optical coupling component is connected to the light-emitting component. The light-emitting component is arranged in alignment, and embedded in the waveguide transmission layer on the side close to the light-emitting component;

The first substrate is at least used to transmit the light emitted by the light-emitting component to the optical coupling component; the optical coupling component is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer is used for The light in the predetermined direction is transmitted to the diffractive optical waveguide.

Optionally, the optical coupling component includes a light collimation component and a tilted grating;

The inclined grating is arranged on the side of the light collimating component away from the light-emitting component;

The light collimating component is used to collimate the light; the tilted grating is used to control the collimated light to exit from the tilted grating at a preset rotation angle.

Optionally, the Micro LED structure also includes a second substrate;

The second substrate is disposed on a side of the waveguide transmission layer away from the first substrate;

The first substrate and the second substrate are jointly used to guide the light to transmit in a preset direction based on the total reflection of the light at the corresponding interface;

Wherein, the corresponding interface includes an interface corresponding to the first substrate and the waveguide transmission layer, and an interface corresponding to the second substrate and the waveguide transmission layer.

Optionally, the refractive index of the tilted grating is greater than the refractive index of the waveguide transmission layer, and the refractive index of the waveguide transmission layer is greater than the refractive index of the first substrate or the refractive index of the second substrate;

Wherein, the refractive index of the first substrate is equal to the refractive index of the second substrate.

Optionally, the Micro LED structure further includes a black matrix; the light emitting assembly includes LEDs arranged in an array;

The black matrix and the LEDs are arranged alternately;

The black matrix is used to prevent crosstalk of light emitted by adjacent LEDs.

Optionally, the Micro LED structure also includes a driving substrate;

The driving substrate is arranged on the backlight side of the light-emitting component;

The driving substrate is used to drive and light up the light-emitting component.

Optionally, the Micro LED structure further includes a waveguide butt layer;

The waveguide butt layer is disposed between the driving substrate and the first substrate;

Wherein, the waveguide docking layer and the second substrate are provided with corresponding grooves to connect with the diffractive optical waveguide.

The present disclosure also provides a method for preparing a Micro LED structure, which is used to prepare any one of the Micro LED structures described above; the method includes:

forming a light emitting component on one side of the first substrate;

forming the waveguide transmission layer and the optical coupling component on a side of the first substrate away from the light-emitting component;

Wherein, the optical coupling component is arranged in alignment with the light emitting component, and is embedded in a side of the waveguide transmission layer close to the light emitting component; the first substrate is at least used to transmit the light emitted by the light emitting component Light to the optical coupling component; the optical coupling component is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer is used to transmit the light in a preset direction to the diffractive optical waveguide.

Optionally, the method also includes:

A second substrate is formed on a side of the waveguide transmission layer away from the first substrate.

Optionally, the method also includes:

Provide drive substrate;

The driving substrate and the light-emitting component are electrically connected by hybrid bonding.

Compared with the prior art, the technical solutions provided by the embodiments of the present disclosure have the following advantages:

The Micro LED structure provided by the embodiments of the present disclosure includes a light-emitting component, a first substrate, a waveguide transmission layer, and an optical coupling component; the light-emitting component is arranged on one side of the first substrate; On one side of the light-emitting component, the optical coupling component is arranged in alignment with the light-emitting component, and embedded in the waveguide transmission layer on the side close to the light-emitting component; the first substrate is at least used to transmit the light emitted by the light-emitting component to the optical coupling component; the optical coupling The component is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer is used to transmit the light in the preset direction to the diffractive optical waveguide. In this way, by arranging the light-emitting component and the optical coupling component on opposite sides of the first substrate, and embedding the optical coupling component in the waveguide transmission layer, the size of the Micro LED structure is reduced, which is beneficial to the miniaturization of the product.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description serve to explain the principles of the disclosure.

In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, In other words, other drawings can also be obtained from these drawings without paying creative labor.

FIG. 1 is a schematic structural diagram of a Micro LED structure provided by the prior art;

FIG. 2 is a schematic structural diagram of a Micro LED structure provided by an embodiment of the present disclosure;

FIG. 3 is a schematic structural diagram of another Micro LED structure provided by an embodiment of the present disclosure;

FIG. 4 is a schematic structural diagram of a Micro LED structure connected to a diffractive optical waveguide provided by an embodiment of the present disclosure;

FIG. 5 is a schematic flowchart of a method for fabricating a Micro LED structure provided by an embodiment of the present disclosure.

Among them, prior art: 110, diffractive optical waveguide; 120, transparent glue; 130, collimating lens module; 140, LED array structure;

This solution: 110. Diffraction optical waveguide; 210. Light emitting component; 211. LED; 220. First substrate; 230. Waveguide transmission layer; 240. Optical coupling component; The second substrate; 260, the black matrix; 270, the driving substrate.

Detailed ways

In order to more clearly understand the above objects, features and advantages of the present disclosure, the solutions of the present disclosure will be further described below. It should be noted that, in the case of no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other.

In the following description, many specific details are set forth in order to fully understand the present disclosure, but the present disclosure can also be implemented in other ways than described here; obviously, the embodiments in the description are only some of the embodiments of the present disclosure, and Not all examples.

Firstly, in combination with the related background, the defects in the prior art and the improvement points of the present application are described.

In the field of Micro LED display technology, LEDs are usually formed on the driving substrate by means of mechanical transfer. For example, the mechanical precision can be more than 500nm, or even more than 1μm, resulting in a relatively large spacing between Micro LED pixels. For example, the pixel pitch is usually 20um and above, and in the follow-up process, LEDs and collimating lens modules and other structures will be bonded and packaged to achieve conventional functions. Then it is matched and connected with the diffractive optical waveguide to increase the overall size. Exemplarily, FIG. 1 is a schematic structural diagram of a Micro LED structure provided in the prior art. Referring to FIG. 1 , it is shown in FIG. 1 that the LED array structure 140 is bonded to one side of the collimator lens module 130 through the transparent glue 120 , and the other side of the collimator lens module 130 is bonded to the diffractive optical waveguide 110 through the transparent glue 120 . The light emitted by the LED array structure 140 is collimated by the collimating lens module 130 , and then the collimated light is transmitted to the diffractive optical waveguide 110 . It should be noted that, on the basis of the bonding and assembly process of the prior art, in order to achieve a good collimation effect, the collimating lens module 130 usually includes 5 to 10 resin lenses, resulting in the collimating lens module 130 The length is longer and the size is larger, which is not conducive to the miniaturization of the product.

Aiming at at least one of the above defects, an embodiment of the present disclosure provides a Micro LED structure, including a light-emitting component, a first substrate, a waveguide transmission layer, and an optical coupling component; the light-emitting component is arranged on one side of the first substrate; the waveguide transmission layer The optical coupling component and the light-emitting component are both arranged on the side of the first substrate away from the light-emitting component. The emitted light is sent to the optical coupling component; the optical coupling component is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer is used to transmit the light in the preset direction to the diffractive optical waveguide. In this way, by integrating the light-emitting component and the optical coupling component on the same substrate, that is, the first substrate, compared with the Micro LED structure obtained by traditional discrete manufacturing and then bonding the collimating lens module, the Micro LED structure provided by the embodiments of the present disclosure The overall volume and size are smaller, which is conducive to the miniaturization of products.

The structure of the Micro LED provided by the embodiments of the present disclosure and the manufacturing method thereof are exemplarily described below with reference to the accompanying drawings.

Exemplarily, in some embodiments, FIG. 2 is a schematic structural diagram of a Micro LED structure provided by an embodiment of the present disclosure. Referring to FIG. 2 , the Micro LED structure is matched with the diffractive optical waveguide 110 . The Micro LED structure includes a light emitting component 210 , a first substrate 220 , a waveguide transmission layer 230 and an optical coupling component 240 ; the light emitting component 210 is disposed on the first substrate 220 One side: the waveguide transmission layer 230 and the optical coupling component 240 are both arranged on the side of the first substrate 220 away from the light emitting component 210, the optical coupling component 240 is arranged in alignment with the light emitting component 210, and is embedded in the waveguide transmission layer 230 close to the light emitting component 210; the first substrate 220 is at least used to transmit the light emitted by the light-emitting component 210 to the optical coupling component 240; the optical coupling component 240 is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer 230 is used The light in the predetermined direction is transmitted to the diffractive optical waveguide 110 .

Wherein, the first substrate 220 is a substrate for forming the light emitting component 210 , the waveguide transmission layer 230 and the optical coupling component 240 . Exemplarily, taking the orientation and structure shown in FIG. One side of the first substrate 220 is flush; on this basis, the optical coupling component 240 and the waveguide transmission layer 230 can be formed under the first substrate 220, and the optical coupling component 240 and the light emitting component 210 are arranged in alignment and transmitted by the waveguide. The layer 230 covers, so that the light emitted by the light-emitting component 210 above can be transmitted to the optical coupling component 240 through the first substrate 220, so as to facilitate the transmission of light to the diffractive optical waveguide 110 through the waveguide transmission layer 230. Here, the light-emitting component 210 The specific setting position of the light-emitting component 210 is not limited, and it only needs to ensure that the light-emitting component 210 and the optical coupling component 240 are set in alignment.

It should be noted that by setting the optical coupling component 240 on the surface below the first substrate 220, that is, embedded in the waveguide transmission layer 230 on the side close to the light-emitting component 210, the light transmitted by the first substrate 220 can be directly rotated. Angle control, for example, the light transmitted from the first substrate 220 can be collimated first, and then the rotation angle of the collimated light can be controlled, such as controlling the rotation angle of the light to be an angle inclined to the left or an angle inclined to the right, Therefore, the collimated light is transmitted to the left or to the right along the waveguide transmission layer 230, which facilitates subsequent entry into the diffractive optical waveguide 110 that is matched and connected to the Micro LED structure, and facilitates the diffractive optical waveguide 110 to project light based on its own diffraction characteristics. To the human eye, thus realizing the application in technical fields such as augmented reality (Augmented Reality, AR).

Wherein, the preset direction is the direction in which light enters the diffractive optical waveguide 110 from the waveguide transmission layer 230 . Specifically, referring to FIG. 2, when the right side of the light-emitting component 210 is flush with the right side of the first substrate 220, the diffractive optical waveguide 110 can be matched and connected to the left side of the light-emitting component 210 in the Micro LED structure, thereby utilizing optical coupling The component 240 controls the rotation angle of the light to be an angle inclined to the left, so that the light is transmitted to the left side along the waveguide transmission layer 230 to the diffractive optical waveguide 110, and the corresponding preset direction can be set according to the specific connection position of the diffractive optical waveguide, here The rotation angle of the light is not specifically limited.

The Micro LED structure provided by the embodiment of the present disclosure includes a light-emitting component 210, a first substrate 220, a waveguide transmission layer 230, and an optical coupling component 240; the light-emitting component 210 is disposed on one side of the first substrate 220; the waveguide transmission layer 230 and the optical coupling component 240 are all arranged on the side of the first substrate 220 away from the light-emitting component 210, the optical coupling component 240 is arranged in alignment with the light-emitting component 210, and embedded in the waveguide transmission layer 230 on the side close to the light-emitting component 210; the first substrate 220 is at least It is used to transmit the light emitted by the light emitting component 210 to the optical coupling component 240; the optical coupling component 240 is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer 230 is used to transmit the light in the preset direction to the diffracted light waveguide 110. In this way, by disposing the light-emitting component 210 and the optical coupling component 240 on opposite sides of the first substrate 220, and embedding the optical coupling component in the waveguide transmission layer 230, the size of the Micro LED structure is reduced, which is beneficial to the miniaturization of products.

In some embodiments, FIG. 3 is a schematic structural diagram of another Micro LED structure provided by an embodiment of the present disclosure. On the basis of FIG. 2 , referring to FIG. 3 , the optical coupling assembly 240 includes a light collimation component 241 and an inclined grating 242; for collimating the light; the inclined grating 242 is used for controlling the collimated light to exit from the inclined grating at a preset rotation angle.

Wherein, taking the orientation and structure shown in FIG. 3 as an example, the light collimating component 241 is located on the surface below the first substrate 220, and the inclined grating 242 is located below the light collimating component 241, that is, the light collimating component 241 faces away from the light emitting component 210. side. Exemplarily, on the basis that the light collimating component 241 is arranged between the first substrate 220 and the tilted grating 242, the light collimating component 241 first collimates the light transmitted from the first substrate 220, so that the light is irradiated vertically to Tilt grating 242, and then use tilt grating 242 to control the rotation angle of the collimated light, so that the light exits from the tilt grating at a preset rotation angle, for example, the preset rotation angle can be 45° to the left, 50° to the left Or other rotation angles, to ensure that the light emitted by the tilted grating 242 can be transmitted to the diffractive optical waveguide along the preset direction by the waveguide transmission layer 230, and the specific size of the preset rotation angle is not limited here.

Exemplarily, the light collimation component 241 can be a light collimation component such as a metasurface collimation structure or a quantum crystal structure. When the light collimation component 241 is a metasurface collimation structure, its preparation material can include tin-doped indium oxide ( Indium Tin Oxide, ITO), aluminum and gold and other materials, and the formed thickness is relatively thin, such as less than 5um. In other implementation manners, there may also be other types of components for collimating light known to those skilled in the art, which are not limited herein.

In some embodiments, referring to FIG. 3 , the Micro LED structure further includes a second substrate 250; the second substrate 250 is disposed on the side of the waveguide transmission layer 230 away from the first substrate 220; the first substrate 220 and the second substrate 250 Commonly used to guide the light to transmit in a preset direction based on the total reflection of light at the corresponding interface; where the corresponding interface includes the interface corresponding to the first substrate 220 and the waveguide transmission layer 230, and the second substrate 250 and the waveguide transmission layer 230 corresponds to the interface.

Wherein, taking the orientation and structure shown in FIG. 3 as an example, the second substrate 250 is disposed below the waveguide transmission layer 230 , that is, the side of the waveguide transmission layer 230 away from the first substrate 220 . Specifically, since the waveguide transmission layer 230 and the optical coupling component 240 are disposed between the first substrate 220 and the second substrate 250, the interface corresponding to the first substrate 220 and the waveguide transmission layer 230 and the second substrate 250 and the waveguide are formed. The interface corresponding to the transmission layer 230 enables the light emitted by the inclined grating 242 to flow in the waveguide transmission layer 230 according to the predetermined Assuming that the direction is transmitted to the left, to ensure that the light transmitted by the waveguide transmission layer 230 can exit to the diffractive optical waveguide, the refractive index difference between the inclined grating 242, the waveguide transmission layer 230, the first substrate 220 and the second substrate 250 is An example will be described later.

It is not difficult to understand that when the diffractive optical waveguide is matched and connected to the left side of the light-emitting component 210 in the Micro LED structure, since the refractive index of the waveguide transmission layer 230 and the first substrate 220 are different, at the same time the waveguide transmission layer 230 and the second substrate 250 different refractive indices, the light emitted from the inclined grating 242 will be totally reflected at the interface corresponding to the first substrate 220 and the waveguide transmission layer 230, and at the interface corresponding to the second substrate 250 and the waveguide transmission layer 230, and will go to the left side transmission to a diffractive optical waveguide.

In some embodiments, referring to FIG. 3 , the refractive index of the inclined grating 242 is greater than the refractive index of the waveguide transmission layer 230, and the refractive index of the waveguide transmission layer 230 is greater than the refractive index of the first substrate 220 or the refractive index of the second substrate 250; Wherein, the refractive index of the first substrate 220 is equal to the refractive index of the second substrate 250 .

Specifically, since the refractive index of the inclined grating 242 is greater than that of the waveguide transmission layer 230, the inclined grating 242 can couple the collimated light to the waveguide transmission layer 230 at a preset rotation angle; correspondingly, since the waveguide transmission layer 230 The refractive index is greater than the refractive index of the first substrate 220 or the refractive index of the second substrate 250, so that the light of the preset rotation angle emitted by the tilted grating 242 will be on the interface corresponding to the first substrate 220 and the waveguide transmission layer 230, and the second Total reflection occurs at the interface corresponding to the second substrate 250 and the waveguide transmission layer 230 . It should be noted that when the refractive index of the waveguide transmission layer 230 is much greater than the refractive index of the first substrate 220 or the second substrate 250, the requirements for the refractive index of the inclined grating 242 can be lowered, for example, the refractive index of the inclined grating 242 can be negligible. The refractive index is greater than the refractive index of the waveguide transmission layer 230 , so that the light emitted from the tilted grating 242 can be transmitted in the waveguide transmission layer 230 according to a preset direction without rotating too many angles.

Exemplarily, the preparation material of the tilted grating 242 may be silicon nitride, silicon oxide or other materials with a higher refractive index, which is not limited herein.

Wherein, since the refractive index of the first substrate 220 is equal to the refractive index of the second substrate 250, the first substrate 220 and the second substrate 250 can be substrates of the same material, for example, the first substrate 220 and the second substrate 250 can be both A silicon substrate, a sapphire substrate or a substrate of other materials is not limited herein. It is not difficult to understand that since the number of Micro LED screens prepared using a silicon substrate is greater than the number of Micro LED screens prepared using a sapphire substrate, and the preparation cost of a silicon substrate is lower, preferably, the embodiment of the present disclosure can use a silicon substrate. The substrate serves as the first substrate 220 or the second substrate 250 .

In some embodiments, referring to FIG. 3 , the Micro LED structure further includes a black matrix 260; the light emitting assembly 210 includes LEDs 211 arranged in an array; the black matrix 260 and the LED 211 are arranged alternately; the black matrix 260 is used to block adjacent LEDs The emitted light undergoes crosstalk.

Wherein, the black matrix 260 may be referred to as BM (black matrix) for short, which is an opaque structure for shielding the light emitted by the LED 211 , so as to prevent light leakage from the LED 211 and cause light crosstalk between adjacent LEDs. In view of this, the black matrix 260 is at least located in the space between adjacent LEDs. For example, the black matrix 260 can be located in the space between adjacent LEDs and the left and right sides of the light emitting component 210. According to the light-shielding effect required by the Micro LED structure The specific position and size of the black matrix 260 are not limited here.

In some embodiments, referring to FIG. 3 , the Micro LED structure further includes a driving substrate 270 ; the driving substrate 270 is disposed on the backlight side of the light emitting component 210 ; the driving substrate 270 is used to drive the light emitting component 210 to light up.

Wherein, taking the orientation and structure shown in FIG. 3 as an example, the driving substrate 270 is disposed above the light-emitting component 210 , that is, on the backlight side, so as to control whether the LED 211 is turned on or not by using an internal driving circuit. Exemplarily, the drive substrate 270 can be electrically connected to the underlying light-emitting component 210 via internal wiring, and for the subsequent connection of the Micro LED structure with the diffractive optical waveguide, the length of the drive substrate 270 in the horizontal direction must be shorter than that of the first substrate 220 in the horizontal direction. In order to avoid affecting the subsequent connection of the Micro LED structure with the diffractive optical waveguide, the horizontal length of the driving substrate 270 is not limited here.

In some embodiments, referring to FIG. 3 , the Micro LED structure further includes a waveguide butt joint layer 280; the waveguide butt joint layer 280 is disposed between the driving substrate 270 and the first substrate 220; wherein, the waveguide butt joint layer 280 and the second substrate 250 Corresponding grooves are provided to connect with the diffractive optical waveguide.

Exemplarily, taking the orientation and structure shown in FIG. 3 as an example, the groove of the waveguide docking layer 280 and the groove of the second substrate 250 are arranged in alignment, and the shape of the groove can be a cube, a cylinder or other docking shapes, Provide aiming for the subsequent assembly of the diffractive optical waveguide. Correspondingly, the diffractive optical waveguide has a corresponding convex structure, so that the matching connection between the diffractive optical waveguide and the Micro LED structure can be realized through the engagement of the convex structure and the groove. Here, according to The specific shape of the protruding structure of the diffractive optical waveguide is provided with a corresponding groove, and the shape of the groove is not specifically limited.

It is not difficult to understand that, in order to facilitate the matching connection between the diffractive optical waveguide and the Micro LED structure, the interface reserved between the waveguide docking layer 280 and the second substrate 250 , that is, the corresponding grooves are arranged near the sides of the Micro LED structure. Exemplarily, when the light-emitting component 210 is arranged on the upper right side of the first substrate 220, the right side of the light-emitting component 210 can be flush with the right side of the first substrate 220, and the optical coupling component 240 is arranged in alignment with the light-emitting component 210 and is located on the first The bottom right of the substrate 220, on this basis, the waveguide butt layer 280 and the left side of the second substrate 250 can be provided with corresponding grooves; When the light-emitting component 210 is aligned and located at the lower left of the first substrate 220, the right side of the waveguide interface layer 280 and the second substrate 250 can be provided with a corresponding groove, and the waveguide can be set according to the position of the coupling component 240 and the light-emitting component 210 The grooves of the butt layer 280 and the second substrate 250 are not limited here.

Exemplarily, FIG. 4 is a structural schematic diagram of a connection between a Micro LED structure and a diffractive optical waveguide provided by an embodiment of the present disclosure. On the basis of FIG. 3 , referring to FIG. 4 , corresponding grooves are provided on the left side of the waveguide butt joint layer 280 and the second substrate 250 in the Micro LED structure, so that the waveguide butt joint layer 280 and the second substrate 250 can be integrated with the diffractive optical waveguide 110. matching connections. It should be noted that the actual size of the diffractive optical waveguide 110 is larger than the size of the Micro LED structure, and the actual size of the diffractive optical waveguide 110 will not be repeated here.

On the basis of the above embodiments, the embodiments of the present disclosure also provide a method for preparing a Micro LED structure, which is used to prepare any one of the Micro LED structures provided in the above embodiments, and has corresponding beneficial effects.

In some embodiments, FIG. 5 is a schematic flowchart of a method for fabricating a Micro LED structure provided by an embodiment of the present disclosure. With reference to Fig. 5 on the basis of Fig. 4, this preparation method comprises the steps:

S310, forming a light emitting component on one side of the first substrate.

Wherein, taking the structure shown in FIG. 4 as an example, the light emitting component 210 is formed on the upper right or upper left of the first substrate 220 . Exemplarily, when the first substrate 220 is a silicon substrate, the silicon substrate epitaxy can be used to form the light-emitting component 210, and the LEDs 211 arranged in an array are etched on the silicon substrate, and the preparation method of the LEDs 211 is not limited here. .

S320, forming a waveguide transmission layer and an optical coupling component on a side of the first substrate away from the light-emitting component.

Wherein, the optical coupling component 240 is arranged in alignment with the light emitting component 210, and is embedded in the waveguide transmission layer 230 near the side of the light emitting component 210; the first substrate 220 is at least used to transmit the light emitted by the light emitting component 210 to the optical coupling component 240 The optical coupling component 240 is used to control the rotation angle of the light so that the light is transmitted in a preset direction, and the waveguide transmission layer 230 is used to transmit the light in a preset direction to the diffractive optical waveguide 110 .

Wherein, taking the structure shown in FIG. 4 as an example, the waveguide transmission layer 230 and the optical coupling component 240 are both formed under the first substrate 220 . Exemplarily, first the first substrate 220 can be ground and thinned to a preset thickness, and then the optical collimation component 241 and the tilted grating 242 can be sequentially formed by photolithography and etching, and then chemical vapor deposition (Chemical Vapor Deposition, CVD) process to form the waveguide transmission layer 230 covering the optical coupling component 240 , and the specific preparation process of the waveguide transmission layer 230 and the optical coupling component 240 is not limited here.

The preparation method of the Micro LED structure provided by the embodiment of the present disclosure, respectively arranges the light emitting component 210 and the optical coupling component 240 on the opposite sides of the first substrate 220, and embeds the optical coupling component 240 in the waveguide transmission layer 230, thereby reducing the The size of the Micro LED structure is conducive to the miniaturization of products.

In some embodiments, on the basis of FIG. 5 , the preparation method further includes: forming a second substrate on a side of the waveguide transmission layer away from the first substrate.

Wherein, the second substrate 250 is formed under the waveguide transmission layer 230 . Exemplarily, the second substrate 250 with mechanical support can be formed under the waveguide transmission layer 230 by hybrid bonding, and at the same time, the redundant part on the second substrate 250 is removed by etching to reserve For the interface where the waveguide 110 is engaged, the process of other interfaces will be exemplarily described later.

In some embodiments, on the basis of Figure 5, the preparation method further includes the following steps:

Step 1: providing a driving substrate.

Wherein, when the light-emitting component 210 is formed on one side of the first substrate 220, the waveguide butt joint layer 280 that has not reserved an interface can be formed at the same time, and the black matrix 260 is filled in the space between the LEDs 211. On this basis, the driving substrate 270 is electrically connected to the light emitting component 210 .

Exemplarily, the preparation material of the waveguide butt joint layer 280 may be silicon, and in other implementation manners, it may also be other hard materials known to those skilled in the art, which is not limited herein.

Step 2: Form an electrical connection between the driving substrate and the light-emitting component by using a hybrid bonding method.

Among them, when the whole surface of the light-emitting component is bonded to the driving substrate by the hybrid bonding method to form an electrical connection, the alignment accuracy is relatively high, for example, the alignment accuracy can reach 50nm.

Wherein, on the basis of forming an electrical connection between the driving substrate 270 and the light-emitting component 210, the optical coupling component 240, the waveguide transmission layer 230, and the second interface that has not been reserved for the interface can be sequentially formed under the first substrate 220 by using a hybrid bonding method. For the second substrate 250, compared with the error of 5um and above caused by mechanical alignment in the traditional lamination method, the semiconductor process provided by the embodiment of the present disclosure has reached a precision of 100nm or below. After that, the waveguide butt joint layer 280 and the second The redundant part of the second substrate 250 is used to form a groove, thereby obtaining a complete Micro LED structure.

It should be noted that, in the process of forming an electrical connection between the driving substrate and the light-emitting component, the driving substrate 270 whose size is smaller than the first substrate 220 can be directly bonded to the first substrate 220, and the size at this time does not need to affect It is docked with the subsequent diffractive optical waveguide 110; or, the driving substrate with the same size as the first substrate 220 can also be bonded to the first substrate 220, and the redundant waveguide docking layer 280 and the second substrate 250 can be removed later. The specific size of the driving substrate 270 is not limited here.

It should be noted that in this article, relative terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these No such actual relationship or order exists between entities or operations. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements of or also include elements inherent in such a process, method, article, or device. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element.

The above descriptions are only specific implementation manners of the present disclosure, so that those skilled in the art can understand or implement the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present disclosure. Therefore, the present disclosure will not be limited to the embodiments described herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. The Micro LED structure is characterized in that the Micro LED structure is connected with the diffraction optical waveguide in a matching way; the Micro LED structure comprises a light emitting component, a first substrate, a waveguide transmission layer and an optical coupling component;

the light-emitting component is arranged on one side of the first substrate; the waveguide transmission layer and the optical coupling component are arranged on one side of the first substrate, which is away from the light-emitting component, and the optical coupling component is arranged in alignment with the light-emitting component and embedded on one side of the waveguide transmission layer, which is close to the light-emitting component;

the first substrate is at least used for transmitting the light emitted by the light emitting component to the optical coupling component; the optical coupling assembly is used for controlling the rotation angle of light so as to enable the light to be transmitted according to a preset direction, and the waveguide transmission layer is used for transmitting the light in the preset direction to the diffraction optical waveguide.

2. The Micro LED structure of claim 1, wherein the light coupling assembly comprises a light collimating component and a tilted grating;

the inclined grating is arranged on one side of the light collimation component, which faces away from the light-emitting component;

the light collimation component is used for collimating light; the inclined grating is used for controlling the collimated light to exit from the inclined grating at a preset rotation angle.

3. The Micro LED structure of claim 2, further comprising a second substrate;

the second substrate is arranged on one side of the waveguide transmission layer, which is away from the first substrate;

the first substrate and the second substrate are jointly used for guiding light to transmit according to a preset direction based on total reflection of the light at the corresponding interface;

the interface surfaces of the first substrate and the waveguide transmission layer are corresponding to each other, and the interface surfaces of the second substrate and the waveguide transmission layer are corresponding to each other.

4. The Micro LED structure of claim 3, wherein the refractive index of the tilted grating is greater than the refractive index of the waveguide transport layer, which is greater than the refractive index of the first substrate or the refractive index of the second substrate;

wherein the refractive index of the first substrate is equal to the refractive index of the second substrate.

5. The Micro LED structure of claim 1, further comprising a black matrix; the light emitting assembly comprises LEDs arranged in an array;

the black matrix and the LEDs are alternately arranged;

the black matrix is used for blocking crosstalk of light emitted by adjacent LEDs.

6. The Micro LED structure of claim 3, further comprising a driving substrate;

the driving substrate is arranged on the backlight side of the light-emitting component;

the driving substrate is used for driving and lighting the light emitting assembly.

7. The Micro LED structure of claim 6, further comprising a waveguide interface layer;

the waveguide butt joint layer is arranged between the driving substrate and the first substrate;

the waveguide butt joint layer and the second substrate are respectively provided with a corresponding groove so as to be connected with the diffraction optical waveguide.

8. A method for preparing a Micro LED structure, characterized by being used for preparing a Micro LED structure according to any one of claims 1-7; the method comprises the following steps:

forming a light emitting assembly on one side of a first substrate;

forming the waveguide transmission layer and the optical coupling assembly on one side of the first substrate away from the light emitting assembly;

the optical coupling component and the light emitting component are arranged in an alignment manner and embedded in one side, close to the light emitting component, of the waveguide transmission layer; the first substrate is at least used for transmitting the light emitted by the light emitting component to the optical coupling component; the optical coupling assembly is used for controlling the rotation angle of light so as to enable the light to be transmitted according to a preset direction, and the waveguide transmission layer is used for transmitting the light in the preset direction to the diffraction optical waveguide.

9. The method as recited in claim 8, further comprising:

and forming a second substrate on one side of the waveguide transmission layer, which is away from the first substrate.

10. The method as recited in claim 8, further comprising:

providing a driving substrate;

and forming electrical connection between the driving substrate and the light-emitting component by using a hybrid bonding mode.

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