CN116300334A - Multichannel laser direct writing control system and method - Google Patents
Multichannel laser direct writing control system and method Download PDFInfo
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- CN116300334A CN116300334A CN202310169179.2A CN202310169179A CN116300334A CN 116300334 A CN116300334 A CN 116300334A CN 202310169179 A CN202310169179 A CN 202310169179A CN 116300334 A CN116300334 A CN 116300334A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D10/00—Energy efficient computing, e.g. low power processors, power management or thermal management
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Abstract
The invention discloses a multichannel laser direct writing control system and a multichannel laser direct writing control method, and relates to the technical field of laser direct writing. According to the multichannel laser direct writing control system and method, the driving rod is driven by the cam to drive the exhaust pipes to rotate downwards around the rotating shaft of the driving rod, the guide wheels at the bottom end of the driving rod roll along the top of the lifting plate and simultaneously press the lifting plate, when the cam rotates by a certain angle, the spring jacks up the lifting plate by utilizing elasticity, so that the driving rod drives the exhaust pipes to restore to the original positions, due to inertia, the exhaust pipes still swing upwards by a certain angle after restoring to the original positions, and the air inlet assembly is reciprocated in such a way, so that the air inlet assembly has the capability of adjusting the longitudinal blowing angle of air flow, so that air blown from the exhaust pipes is uniformly discharged from all angles, the aim of uniformly radiating and cooling is fulfilled, the situation of local overhigh temperature is avoided, and the control precision is improved.
Description
Technical Field
The invention relates to the technical field of laser direct writing, in particular to a multichannel laser direct writing control system and method.
Background
The laser direct writing system is also called image direct projection system, and can be used in research, development and production of semiconductor, PCB and plane imaging field. The prior multichannel laser direct-writing control system has high requirements on the working environment of the internal cavity of the equipment, the working environment comprises ultrahigh cleanliness and relatively stable temperature, the multichannel laser direct-writing control system mainly adopts an air cooling mode to control the temperature, the air blowing angle of a fan is fixed, and the air blowing angle cannot be adjusted, so that the conditions of overhigh local temperature and poor temperature control precision caused by heat dissipation and cooling at different positions of the multichannel laser direct-writing control system cannot be met.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a multichannel laser direct-writing control system and a multichannel laser direct-writing control method, which solve the problems that a fan for cooling the multichannel laser direct-writing control system cannot adjust the blowing angle, so that the heat dissipation and cooling of different positions of the multichannel laser direct-writing control system cannot be satisfied, and further the local temperature is too high and the temperature control precision is poor.
In order to achieve the above purpose, the invention is realized by the following technical scheme: the utility model provides a multichannel laser direct-write control system, includes multichannel laser direct-write control system body, multichannel laser direct-write control system body back is fixed to be provided with the heat dissipation case, the inside radiating cooling mechanism that is used for multichannel laser direct-write control system body that is provided with of heat dissipation case, fixedly on the heat dissipation case outer wall be provided with the fan that is connected with cooling mechanism, and the inside from the top down of heat dissipation case is fixed respectively and is provided with motor support plate and spacing diaphragm, has seted up rectangular square through-hole on the spacing diaphragm, fixedly in the motor support plate is provided with servo motor, fixedly on the servo motor output shaft be provided with be used for driving cooling mechanism luffing cam, cooling mechanism includes the air distribution pipe and sets up at the U-shaped frame of air distribution pipe one side and evenly fix the air inlet subassembly of setting on the air distribution pipe outer wall, all air inlet subassembly's inside is provided with the actuating lever jointly, the actuating lever bottom rotates and is provided with the leading wheel, the inside slip of leading chute is provided with the lifter plate on the inside relative lateral wall of U-shaped frame, fixedly between lifter plate bottom and the leading chute, fixedly be provided with the spring, the setting up between the lifter plate bottom and the leading chute.
Preferably, the U-shaped frame is fixedly arranged at the bottom of the cavity of the heat dissipation box, and the top end of the driving rod penetrates through the rectangular through hole and extends to the position right below the cam.
Preferably, the air inlet subassembly includes exhaust pipe and air filter case and sets up the breach on the exhaust pipe outer wall, the inside wind direction adjusting part that is used for changing the wind direction that is provided with of exhaust pipe, and is provided with the bulb through first support arm is fixed on the exhaust pipe outer wall, just be located the air filter case inside through second support arm fixedly connected with arc brush board on the bulb outer wall, the fixed bulb cover that is provided with on the air filter case outer wall, and the air filter case inside is fixedly provided with arc filter, bulb cover rotates the cover and establishes on the bulb outer wall, the air filter case bottom both sides are all fixedly provided with L shape stop collar, two the inside common slip of L shape stop collar is provided with the dust collection box.
Preferably, the air inlet and the air outlet are respectively arranged on the outer wall of the air filtering box, the air inlet is connected with the air distribution pipe through a first pipeline, the air outlet is connected with the exhaust pipe through a second pipeline, and the second pipeline is a hose.
Preferably, the wind direction adjusting assembly comprises a plurality of evenly distributed air deflectors and worm wheels fixedly arranged at the bottoms of the air deflectors, one sides of the worm wheels are meshed with worms, transmission shafts are fixedly connected inside the worms, one ends of the transmission shafts are fixedly provided with gears, and one sides of the gears are meshed with arc racks.
Preferably, the arc rack is fixedly arranged on the inner wall of the radiating box through the supporting rod, and the air deflector is rotatably arranged on the inner wall of the exhaust pipe through the rotating shaft.
Preferably, the both sides of exhaust pipe outer wall are all fixed to be provided with the pivot, and the pivot rotates to set up on the radiating box inner wall.
Preferably, the driving rod is rotatably connected with the inner wall of the notch through a rotating shaft.
The invention also provides a heat dissipation method of the multichannel laser direct writing control system, which comprises the following steps:
step one, air impurity removal: the fan sucks outside air into the air distribution pipe, the air is dispersed into the air inlet assemblies to be discharged by the air distribution pipe, and dust and other impurities in the air are filtered through the filtering structure in the air inlet assemblies.
Step two, adjusting the longitudinal blowing angle of the airflow: the output end of the servo motor drives the cam to rotate, so that the cam intermittently pushes the driving rod to move downwards, the air inlet assembly is driven by the driving rod, the air outlet of the air inlet assembly swings up and down, and air can be uniformly blown out.
Step three, adjusting the transverse air flow blowing angle: utilize the inside wind direction transverse adjustment structure that sets up of air inlet subassembly, can realize the inside wind direction transverse blowout angle's regulation when the reciprocal swing up and down of air inlet subassembly.
Preferably, the range of the up-down swing angle of the air inlet assembly is within sixty degrees.
Advantageous effects
The invention provides a multichannel laser direct writing control system and a multichannel laser direct writing control method. Compared with the prior art, the method has the following beneficial effects:
1. a multichannel laser direct writing control system and a multichannel laser direct writing control method are characterized in that a plurality of exhaust pipes are driven to rotate downwards around a rotating shaft of the multichannel laser direct writing control system through a driving rod after being driven by a cam, a guide wheel at the bottom end of the driving rod rolls along the top of a lifting plate and simultaneously presses down the lifting plate, so that a spring is compressed, after the cam rotates by a certain angle, the lifting plate is jacked up by the spring through elasticity, and due to inertia, the exhaust pipes still swing upwards by a certain angle after returning to the original position, so that the air inlet assembly has the capability of adjusting the longitudinal blowing angle of air flow, so that air blown out from the exhaust pipes is uniformly discharged from all angles, the air can be blown to all positions inside a multichannel laser direct writing control system body, the aim of uniform heat dissipation and cooling is fulfilled, the situation that local temperature is too high is avoided, and the control precision is improved.
2. A multichannel laser direct writing control system and a multichannel laser direct writing control method are characterized in that in the process of up-and-down swing of an exhaust pipe, an arc brush plate is fixedly connected between a bulb and the exhaust pipe through a first supporting arm, the bulb is rotationally arranged inside a bulb sleeve, the bulb sleeve is used as a fulcrum when the exhaust pipe swings up and down, the arc brush plate is driven to swing up and down synchronously, long bristles on the surface of the arc brush plate clean filter holes on the surface of an arc filter plate, and dust attached to the filter holes is swept down due to the fact that the long bristles can penetrate through the filter holes and falls into a dust collecting box to be collected in a concentrated mode under the action of gravity.
3. The utility model provides a multichannel laser direct-write control system and method, through exhaust pipe up-and-down swing in-process, can drive the gear synchronous motion, because gear and arc rack mesh, receive arc rack drive and take place to rotate in the gear swing in-process, because worm and worm wheel mesh, therefore worm pivoted drives the worm wheel rotation simultaneously, the aviation baffle can reciprocating swing, make the air that blows out from the exhaust pipe evenly discharge from each angle, can sweep each position inside the multichannel laser direct-write control system body, realize even heat dissipation refrigerated purpose, avoid appearing the too high condition of local temperature, thereby improve control accuracy.
4. A multichannel laser direct writing control system and a multichannel laser direct writing control method are characterized in that air is uniformly dispersed into a plurality of air filter boxes after passing through an air distribution pipe, dust and other impurities mixed in the air are filtered after passing through an arc-shaped filter plate, so that clean air entering an exhaust pipe is ensured, the inside of a multichannel laser direct writing control system body is ensured to be clean, dust is prevented from being covered on electrical equipment to hinder heat dissipation, and the service life of the multichannel laser direct writing control system is prolonged.
Drawings
FIG. 1 is a first overall perspective view of the present invention;
FIG. 2 is a schematic diagram of a second overall perspective structure of the present invention;
FIG. 3 is a schematic view of an exploded perspective view of the present invention;
FIG. 4 is an enlarged perspective view of the portion A of the present invention;
FIG. 5 is a schematic perspective view of a heat dissipating mechanism according to the present invention;
FIG. 6 is an enlarged perspective view of part B of the present invention;
FIG. 7 is a schematic cross-sectional view of an air intake assembly of the present invention;
FIG. 8 is an enlarged schematic view of the portion C of the present invention;
FIG. 9 is an enlarged schematic view of the portion D of the present invention;
FIG. 10 is a schematic perspective view of a wind direction adjusting assembly according to the present invention;
fig. 11 is an enlarged perspective view of the part E of the present invention.
In the figure: 1. a multichannel laser direct writing control system body; 2. a heat radiation box; 3. a heat dissipation mechanism; 31. an air distribution pipe; 32. a U-shaped frame; 34. an air inlet assembly; 341. an exhaust pipe; 342. an air filtration box; 343. a notch; 344. a wind direction adjustment assembly; 3441. an air deflector; 3442. a worm wheel; 3443. a worm; 3444. a transmission shaft; 3445. a gear; 3446. an arc-shaped rack; 345. ball head; 346. arc brush plate; 347. a ball sleeve; 348. arc-shaped filter plates; 349. an L-shaped limit sleeve; 3410. a dust collection box; 35. a driving rod; 36. a guide wheel; 37. a lifting plate; 38. a spring; 4. a blower; 5. a servo motor; 6. a cam.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides three technical schemes:
a first embodiment is shown in fig. 1-6: the multichannel laser direct writing control system comprises a multichannel laser direct writing control system body 1, a heat dissipation box 2 is fixedly arranged on the back of the multichannel laser direct writing control system body 1, a heat dissipation mechanism 3 used for heat dissipation in the multichannel laser direct writing control system body 1 is arranged in the heat dissipation box 2, a fan 4 connected with the heat dissipation mechanism 3 is fixedly arranged on the outer wall of the heat dissipation box 2, a motor support plate and a limiting diaphragm are respectively and fixedly arranged in the heat dissipation box 2 from top to bottom, a rectangular square through hole is formed in the limiting diaphragm, a servo motor 5 is fixedly arranged on the motor support plate, a cam 6 used for driving the heat dissipation mechanism 3 to swing up and down is fixedly arranged on an output shaft of the servo motor 5, the heat dissipation mechanism 3 comprises a wind distribution pipe 31, a U-shaped frame 32 arranged on one side of the wind distribution pipe 31 and an air inlet assembly 34 uniformly and fixedly arranged on the outer wall of the wind distribution pipe 31, the range of the up-down swing angle of the air inlet assembly 34 is within sixty degrees, a driving rod 35 is arranged in the air inlet assembly 34, a guide wheel 36 is rotatably arranged at the bottom of the driving rod 35, guide sliding grooves are formed in opposite side walls in the U-shaped frame 32, a lifting plate 37 is slidably arranged in the guide sliding grooves, a spring 38 is fixedly arranged between the bottom of the lifting plate 37 and the guide sliding grooves, the guide wheel 36 is arranged at the top of the lifting plate 37 in a rolling manner, a ball is rotatably arranged at the contact part of the lifting plate 37 and the inner wall of the guide sliding grooves, the friction between the lifting plate 37 and the guide sliding grooves is reduced, the spring 38 is used for jacking the lifting plate 37 by self elasticity after the driving rod 35 moves downwards, so that the driving rod 35 returns to the original position, an air inlet for air inlet is formed in the back of the multi-channel laser direct writing control system body 1, the U-shaped frame 32 is fixedly arranged at the bottom of the cavity of the heat dissipation box 2, the driving rod 35 top runs through rectangular square through-hole and extends to under the cam 6, and the fixed atress board that is provided with in driving rod 35 top for accept the thrust of cam 6, rectangular square through-hole's inside width and driving rod 35 width looks adaptation, so that driving rod 35 receives the downward movement of cam 6 thrust and can be along rectangular square through-hole to one side skew simultaneously.
The second embodiment, shown in fig. 7-9, differs from the first embodiment primarily in that: the multi-channel laser direct writing control system comprises an air inlet assembly 34, an air outlet tube 341, an air filtering box 342 and a notch 343 arranged on the outer wall of the air outlet tube 341, wherein the air outlet tube 341 is internally provided with an air direction adjusting assembly 344 for changing the air direction, the outer wall of the air outlet tube 341 is fixedly provided with a ball head 345 through a first supporting arm, the outer wall of the ball head 345 is fixedly connected with an arc brush plate 346 through a second supporting arm, the outer wall of the air filtering box 342 is fixedly provided with a ball head sleeve 347, the inner part of the air filtering box 342 is fixedly provided with an arc filter plate 348, the ball head sleeve 347 is rotatably sleeved on the outer wall of the ball head 345, both sides of the bottom of the air filtering box 342 are fixedly provided with L-shaped limiting sleeves 349, dust collecting boxes 3410 are jointly arranged in the two L-shaped limiting sleeves 349 in a sliding manner, the bottom of a cavity of the air filtering box 342 is provided with a dust discharging port communicated with the dust collecting boxes 3410, the air filter box 342 is divided into two spaces by the arc filter plates 348, outside air is introduced into one side of the arc filter plates 348, clean air is discharged from the other side of the arc filter plates 348 through filtering, the arc brush plates 346 are positioned on one side of the arc filter plates 348, long bristles on the surfaces of the arc brush plates 346 are propped against the outer walls of the arc filter plates 348, the long bristles can penetrate through filter holes on the surfaces of the arc filter plates 348 to clean the filter holes, an air inlet and an air outlet are respectively formed in the outer walls of the air filter boxes 342, the air inlet is connected with the air distribution pipe 31 through a first pipeline, the air outlet is connected with the air outlet pipe 341 through a second pipeline, the second pipeline is a hose, two sides of the outer wall of the air outlet pipe 341 are fixedly provided with rotating shafts, the rotating shafts are rotatably arranged on the inner wall of the heat dissipation box 2, the driving rod 35 is rotatably connected with the inner wall of the notch 343 through a rotating shaft.
The third embodiment is shown in fig. 10-11, and differs from the second embodiment mainly in that: a multichannel laser direct writing control system, wind direction adjusting component 344 includes a plurality of evenly distributed aviation baffle 3441 and fixed worm wheel 3442 that sets up in aviation baffle 3441 bottom, and worm wheel 3442 one side meshing has worm 3443, and worm 3443 inside fixedly connected with transmission shaft 3444, transmission shaft 3444 one end fixedly provided with gear 3445, gear 3445 one side meshing has arc rack 3446, and arc rack 3446 passes through the bracing piece fixed setting on the inner wall of heat dissipation case 2, and aviation baffle 3441 rotates through the pivot and sets up on exhaust pipe 341 inner wall.
The embodiment of the invention also provides a heat dissipation method of the multichannel laser direct writing control system, which comprises the following steps:
step one, air impurity removal: the fan 4 pumps outside air into the air distribution pipe 31, the air is dispersed into the air distribution pipes 31 to be discharged out of the air inlet assemblies 34, dust and other impurities in the air are filtered through the filtering structure in the air inlet assemblies 34, the air is uniformly dispersed into the air filtering boxes 342 after passing through the air distribution pipes 31, dust and other impurities mixed in the air are filtered after passing through the arc-shaped filter plates 348, clean air enters the exhaust pipe 341 through the second pipeline, enters the inside of the multichannel laser direct writing control system body 1 through the air outlet of the exhaust pipe 341, and is discharged out through the air outlet arranged on the side wall of the multichannel laser direct writing control system body 1.
Step two, adjusting the longitudinal blowing angle of the airflow: the output end of the servo motor 5 drives the cam 6 to rotate, thereby the cam 6 intermittently pushes the driving rod 35 to move downwards, the air inlet assembly 34 is driven by the driving rod 35 to enable the air outlet of the air inlet assembly to swing up and down, and air is uniformly blown out, as the driving rod 35 is rotationally connected with the notch 343 and the exhaust pipes 341 and the inner wall of the heat dissipation box 2 through the rotating shafts, the driving rod 35 is driven by the cam 6 to drive the exhaust pipes 341 to rotate downwards around the rotating shafts, the driving rod 35 moves downwards and is influenced by the swinging angle of the exhaust pipes 341, the driving rod 35 moves along a certain radian in a anticlockwise direction, the rectangular square through hole can meet the space required by the moving process of the driving rod 35, the guide wheel 36 at the bottom end of the driving rod 35 rolls down along the top of the lifting plate 37 while the lifting plate 37 is pressed down, so that the spring 38 is compressed and generates elastic deformation, when the cam 6 rotates by a certain angle, the lifting plate 37 is jacked up by the spring 38 by utilizing the elasticity, so that the driving rod 35 drives the exhaust pipe 341 to restore to the original position, and the exhaust pipe 341 still swings upwards by a certain angle after restoring to the original position due to the action of inertia, so that the air inlet assembly 34 has the capability of adjusting the longitudinal blowing angle of the air flow, meanwhile, in the process of swinging the exhaust pipe 341 up and down, as the ball head 345 and the exhaust pipe 341 are fixedly connected through the first supporting arm, and the arc brush plate 346 is connected through the second supporting arm, the ball head 345 is rotatably arranged in the ball head sleeve 347, so that the exhaust pipe 341 swings up and down and simultaneously drives the arc brush plate 346 to swing up and down by taking the ball head sleeve 347 as a supporting point, long bristles on the surface of the arc brush plate 346 clean the filtering holes on the surface of the arc filter plate 348, and the long bristles can penetrate the filtering holes, the dust adhering to the filter holes is swept down and falls down by gravity into the dust collection box 3410 to be collected intensively.
Step three, adjusting the transverse air flow blowing angle: by utilizing the wind direction transverse adjusting structure arranged in the air inlet assembly 34, the air inlet assembly 34 can reciprocate up and down and simultaneously can realize the adjustment of the transverse blowing angle of the internal wind direction, the gear 3445 can be driven to synchronously move in the process of the up and down swinging of the air exhaust pipe 341, the gear 3445 is meshed with the arc-shaped rack 3446, and the gear 3445 is driven by the arc-shaped rack 3446 to rotate in the swinging process of the gear 3445, so that the transmission shaft 3444 is driven to synchronously rotate, and the worm 3443 is meshed with the worm wheel 3442, so that the worm 3443 rotates and simultaneously drives the worm wheel 3442 to rotate, and the air deflector 3441 can reciprocate.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a multichannel laser write through control system, includes multichannel laser write through control system body (1), its characterized in that: the multi-channel laser direct-writing control system comprises a multi-channel laser direct-writing control system body (1), wherein a heat dissipation box (2) is fixedly arranged on the back of the multi-channel laser direct-writing control system body (1), a heat dissipation mechanism (3) used for dissipating heat inside the multi-channel laser direct-writing control system body (1) is arranged inside the heat dissipation box (2), a fan (4) connected with the heat dissipation mechanism (3) is fixedly arranged on the outer wall of the heat dissipation box (2), a motor support plate and a limiting diaphragm are fixedly arranged inside the heat dissipation box (2) from top to bottom respectively, a rectangular square through hole is formed in the limiting diaphragm, a servo motor (5) is fixedly arranged on the motor support plate, a cam (6) used for driving the heat dissipation mechanism (3) to swing up and down is fixedly arranged on an output shaft of the servo motor (5), the heat dissipation mechanism (3) comprises a cloth air pipe (31) and a U-shaped frame (32) arranged on one side of the cloth air pipe (31) and an air inlet assembly (34) uniformly and fixedly arranged on the outer wall of the cloth air pipe (31), a driving rod (35) is jointly arranged inside the air inlet assembly (34), a guide wheel (36) is rotatably arranged at the bottom of the heat dissipation box (2), a guide wheel (36) is fixedly arranged on the inner side wall of the U-shaped frame (31), a guide plate (37) and a guide chute (37) is arranged on the inner side of the guide rail (37), the guide wheel (36) is arranged at the top of the lifting plate (37) in a rolling way.
2. The multi-channel laser direct write control system of claim 1, wherein: the U-shaped frame (32) is fixedly arranged at the bottom of the cavity of the radiating box (2), and the top end of the driving rod (35) penetrates through the rectangular square through hole and extends to the position right below the cam (6).
3. The multi-channel laser direct write control system of claim 1, wherein: the utility model provides an air inlet subassembly (34) is including exhaust pipe (341) and air filter case (342) and offer breach (343) on exhaust pipe (341) outer wall, exhaust pipe (341) inside is provided with wind direction adjustment subassembly (344) that are used for changing the wind direction, and is provided with bulb (345) through first support arm is fixed on exhaust pipe (341) outer wall, just be located air filter case (342) inside through second support arm fixedly connected with arc brush board (346) on the outer wall, fixed be provided with bulb cover (347) on air filter case (342) outer wall, and air filter case (342) inside fixed be provided with arc filter board (348), bulb cover (347) rotate the cover and establish on bulb (345) outer wall, all fixed L shape stop collar (349) that are provided with in air filter case (342) bottom both sides, two inside the common slip of L shape stop collar (349) is provided with dust collection box (3410).
4. A multi-channel laser direct write control system as claimed in claim 3 wherein: an air inlet and an air outlet are respectively formed in the outer wall of the air filtering box (342), the air inlet is connected with the air distribution pipe (31) through a first pipeline, the air outlet is connected with the exhaust pipe (341) through a second pipeline, and the second pipeline is a hose.
5. A multi-channel laser direct write control system as claimed in claim 3 wherein: wind direction adjusting part (344) are including a plurality of evenly distributed aviation baffle (3441) and fixed worm wheel (3442) that sets up in aviation baffle (3441) bottom, worm wheel (3442) one side meshing has worm (3443), worm (3443) inside fixedly connected with transmission shaft (3444), transmission shaft (3444) one end is fixed to be provided with gear (3445), gear (3445) one side meshing has arc rack (3446).
6. The multi-channel laser direct write control system of claim 5, wherein: the arc-shaped racks (3446) are fixedly arranged on the inner wall of the radiating box (2) through support rods, and the air deflector (3441) is rotatably arranged on the inner wall of the exhaust pipe (341) through a rotating shaft.
7. A multi-channel laser direct write control system as claimed in claim 3 wherein: the two sides of the outer wall of the exhaust pipe (341) are fixedly provided with rotating shafts, and the rotating shafts are rotatably arranged on the inner wall of the heat dissipation box (2).
8. A multi-channel laser direct write control system as claimed in claim 3 wherein: the driving rod (35) is rotationally connected with the inner wall of the notch (343) through a rotating shaft.
9. A heat dissipation method for the multichannel laser direct write control system of claim 1, characterized by: the method comprises the following steps:
step one, air impurity removal: the fan (4) sucks outside air into the air distribution pipe (31), the air is dispersed into the air inlet assemblies (34) to be discharged by the air distribution pipe (31), and dust and other impurities in the air are filtered through the filtering structure in the air inlet assemblies (34);
step two, adjusting the longitudinal blowing angle of the airflow: the output end of the servo motor (5) drives the cam (6) to rotate, so that the cam (6) intermittently pushes the driving rod (35) to move downwards, the air inlet assembly (34) is driven by the driving rod (35) to enable the air outlet of the air inlet assembly to swing up and down, and air can be uniformly blown out;
step three, adjusting the transverse air flow blowing angle: the wind direction transverse adjusting structure arranged inside the air inlet assembly (34) can realize the adjustment of the transverse blowing angle of the wind direction inside the air inlet assembly (34) while the air inlet assembly (34) swings up and down in a reciprocating manner.
10. The heat dissipation method of a multichannel laser direct writing control system according to claim 9, wherein: the range of the up-down swing angle of the air inlet assembly (34) is within sixty degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310169179.2A CN116300334A (en) | 2023-02-27 | 2023-02-27 | Multichannel laser direct writing control system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310169179.2A CN116300334A (en) | 2023-02-27 | 2023-02-27 | Multichannel laser direct writing control system and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118017768A (en) * | 2024-04-08 | 2024-05-10 | 江苏中奕和创智能科技有限公司 | Generator set with wrapped direct-current outlet air cooling mechanism |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118017768A (en) * | 2024-04-08 | 2024-05-10 | 江苏中奕和创智能科技有限公司 | Generator set with wrapped direct-current outlet air cooling mechanism |
| CN118017768B (en) * | 2024-04-08 | 2024-06-04 | 江苏中奕和创智能科技有限公司 | Generator set with wrapped direct-current outlet air cooling mechanism |
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