CN116300332A - High-flux optical fiber lattice imaging direct writing system - Google Patents

High-flux optical fiber lattice imaging direct writing system Download PDF

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CN116300332A
CN116300332A CN202310136507.9A CN202310136507A CN116300332A CN 116300332 A CN116300332 A CN 116300332A CN 202310136507 A CN202310136507 A CN 202310136507A CN 116300332 A CN116300332 A CN 116300332A
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optical fiber
lens
direct
direct writing
fiber
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匡翠方
魏震
周国尊
刘旭
孙琦
张凌民
罗昊
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Zhejiang University ZJU
Zhejiang Lab
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Zhejiang University ZJU
Zhejiang Lab
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays

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  • Optics & Photonics (AREA)
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Abstract

The invention discloses a high-flux optical fiber lattice imaging direct writing system, which comprises: the optical fiber optical system comprises a light source, an optical fiber modulator, an optical fiber array, a collimating lens, a tube lens I, a tube lens II, a direct writing objective lens, a high-precision displacement table and a control unit; the light source, the optical fiber array, the collimating lens, the first tube lens, the second tube lens and the direct writing objective lens are sequentially arranged with the optical axis, and each single-mode optical fiber in the optical fiber array is provided with an optical fiber modulator; the back focal plane of the collimating lens is overlapped with the front focal plane of the first tube lens, the collimating end of the first tube lens faces the collimating lens, the collimating end of the second tube lens faces the direct writing objective lens, the imaging planes of the first tube lens and the second tube lens are overlapped, the front focal plane of the second tube lens is overlapped with the entrance pupil of the direct writing objective lens, and the focal plane of the direct writing objective lens is overlapped with the upper surface of the high-precision displacement table; the control unit is used for controlling the optical fiber modulator and the high-precision displacement table to realize direct writing of the set pattern. The invention has simple structure, high direct writing efficiency and direct writing of any graph.

Description

High-flux optical fiber lattice imaging direct writing system
Technical Field
The invention relates to the field of optical engineering, in particular to a high-flux optical fiber lattice imaging direct writing system.
Background
The laser direct writing has the advantages of low cost, no need of vacuum environment, no need of mask plate and the like, provides a new method for micro-nano element processing, and particularly, the femtosecond laser direct writing technology mainly utilizes the nonlinear effect of materials and light, limits the two-photon absorption range of the materials to a high-energy area smaller than Airy spots at a focus, and can realize three-dimensional super-resolution direct writing with characteristic dimensions close to electron beam exposure level. In addition, the two-step absorption effect can realize super-resolution direct writing of continuous laser.
With the improvement of the laser direct-writing resolution, the application prospect of the laser direct-writing resolution is widely focused, but the direct-writing speed becomes a main factor limiting the application of the laser direct-writing resolution. The parallel laser direct writing technology adopts a multi-beam scheme, forms a multi-focus dot matrix on photoresist through an optical system, simultaneously exposes the photoresist, combines scanning path planning and independent light beam switching to realize high-speed random pattern direct writing, becomes an important flux improvement method, wherein multiple light beams can be generated through a digital micromirror array (DMD) and a Spatial Light Modulator (SLM), and document [ Nature Nanotechnology,5,637-640 (2010) ] realizes 250nm resolution multi-beam parallel direct writing by utilizing the DMD and a near field probe array, but a beam splitting system based on the DMD or the SLM is more complex and has higher requirements on the optical system; in addition, the near field probe requires strict control of the distance between the tip and the photoresist and is easily damaged. In the prior art, the number of dot matrixes formed by the SLM is not enough, and each path is difficult to realize independent switching in technology and devices.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the following technical scheme:
a high-throughput fiber lattice imaging direct-write system, comprising: the optical fiber optical system comprises a light source, an optical fiber modulator, an optical fiber array, a collimating lens, a tube lens I, a tube lens II, a direct writing objective lens, a high-precision displacement table and a control unit;
the light source, the optical fiber array, the collimating lens, the first tube lens, the second tube lens and the direct-writing objective lens are sequentially arranged with the optical axis, the central line of the optical fiber array coincides with the optical axis, and each single-mode optical fiber in the optical fiber array is provided with the optical fiber modulator for realizing the independent adjustment and switching of the light intensity of each single-mode optical fiber; the back focal plane of the collimating lens is overlapped with the front focal plane of the first tube lens, the collimating end of the first tube lens faces the collimating lens, the collimating end of the second tube lens faces the direct-writing objective lens, the imaging planes of the first tube lens and the second tube lens are overlapped, the front focal plane of the second tube lens is overlapped with the entrance pupil plane of the direct-writing objective lens, the focal plane of the direct-writing objective lens is overlapped with the upper surface of the high-precision displacement table, and the upper surface of the high-precision displacement table is coated with photoresist; the control unit is used for controlling the optical fiber modulator and the high-precision displacement table to realize direct writing of the set pattern.
Further, the photoresist is exposed to light with a wavelength of 350nm to 550nm.
Further, the optical fiber array is composed of a plurality of single-mode optical fibers with the same specification, the single-mode optical fibers are arrayed in a row at equal intervals, and the single-mode optical fibers are symmetrically distributed on two sides of the central line.
Further, the optical fiber array is composed of a plurality of single-mode optical fibers with the same specification, the single-mode optical fibers are equidistantly arranged into a row, the single-mode optical fibers are equidistantly arranged into an array by a plurality of rows, and the single-mode optical fibers are symmetrically distributed on two sides of the central line.
Further, the numerical aperture of the collimating lens is larger than that of the optical fiber array, and the image space view field of the collimating lens is larger than the size of the optical fiber array.
Further, the fiber laser is a continuous laser with the wavelength of 380nm-550nm.
Further, the optical fiber laser is a femtosecond laser with the wavelength of 380nm-550nm.
Further, the focal length of the collimating lens isf 1 The focal length of the first tube mirror is f 2 The focal length of the second tube mirror is f 3 And f 2 >f 1 >f 3 The total imaging multiplying power of the high-flux optical fiber lattice imaging direct writing system is f 3 /f 1 。
Further, the maximum number of optical fibers in a single row of the optical fiber array and the field of view W of the write-through objective lens 3 Focal length f of the write-through objective lens 3 The view field W of the collimating mirror 1 Focal length f of the collimator lens 1 Related to the distance d between adjacent single-mode fibers in the optical fiber array, and W 1 ≥W 3 *(f 1 /f 3 ) The specific expression is as follows:
fiber number=w 3 *(f 1 /f 3 )/d。
Further, the mode field diameter of the single-mode fiber output beam is 4.6 μm, and the beam diameter at the position L from the single-mode fiber output end is D f ＝2NA f L, where NA f Is the numerical aperture of a single-mode fiber.
The beneficial effects of the invention are as follows:
(1) The invention only uses two objective lenses and two tube lenses to form an optical imaging system, the optical fiber array light spots are projected and imaged on the surface of the photoresist, and the high-flux optical fiber array imaging direct writing system has the advantages of less optical elements, simple and symmetrical structure and small system phase difference.
(2) The invention independently adjusts and switches the light intensity of each optical fiber image point through the optical fiber modulator, thereby combining a direct writing algorithm and a high-precision displacement table to realize direct writing of any graph.
(3) The invention realizes the number of the lattices of tens or even hundreds through the optical fiber array, greatly improves the direct writing efficiency, and is suitable for direct writing of any graph.
Drawings
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples are not representative of all implementations consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present application as detailed in the accompanying claims.
The block diagrams depicted in the figures are merely functional entities and do not necessarily correspond to physically separate entities. That is, the functional entities may be implemented in software, or in one or more hardware modules or integrated circuits, or in different networks and/or processor devices and/or microcontroller devices.
The flow diagrams depicted in the figures are exemplary only, and do not necessarily include all of the elements and operations/steps, nor must they be performed in the order described. For example, some operations/steps may be decomposed, and some operations/steps may be combined or partially combined, so that the order of actual execution may be changed according to actual situations.
FIG. 1 is a schematic diagram of the optical path of the high-throughput fiber lattice imaging write-through system of the present invention.
Fig. 2 is a plot of the output of a single fiber beam.
Fig. 3 is a plot of the light beam exiting the fiber array.
Fig. 4 is a schematic view of a 50-fold write-through field of view of a write-through objective lens (na=0.95, f) 1 ＝36mm)。
Fig. 5 is a schematic view of a 60-fold oil immersion write-through objective (na=1.4, f 1 ＝36mm)。
Fig. 6 is a schematic diagram of a 60-fold oil immersion write-through objective write-through field of view (na=1.4, f 1 ＝45mm)。
Fig. 7 is a dot pattern diagram of the 1 st to 10 th optical fibers and the 20 th optical fiber (the edge-most optical fibers) from the optical axis when the number of optical fibers in the optical fiber array is 40.
Fig. 8 is a graph of the MTF at the image point of the 1 st to 10 th optical fibers and the 20 th optical fiber (the edge-most optical fiber) from the optical axis when the number of optical fibers in the optical fiber array is 40.
Fig. 9 shows the difference in wavefront of the image point of the 20 th optical fiber (the edge-most optical fiber) from the optical axis when the number of optical fibers in the optical fiber array is 40.
FIG. 10 is a graph of field curvature and F-Theta distortion for a high throughput fiber optic lattice imaging write-through system of the present invention.
In the figure, an optical fiber array 1, a collimating mirror 2, a first tube mirror 3, a tube mirror sleeve 4, a second tube mirror 5, a reflecting mirror 6, a direct writing objective lens 7, a high-precision displacement table 8, an optical fiber laser 9, an optical fiber beam splitter 10, an optical fiber modulator 11, a control unit 12, a focal plane A, a relay imaging plane B, a focal plane C and a direct writing objective lens imaging plane D.
Detailed Description
The terminology used in the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. As used in this application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.
It should be understood that although the terms first, second, third, etc. may be used herein to describe various information, these information should not be limited by these terms. These terms are only used to distinguish one type of information from another. For example, a first message may also be referred to as a second message, and similarly, a second message may also be referred to as a first message, without departing from the scope of the present application. The word "if" as used herein may be interpreted as "at … …" or "at … …" or "responsive to a determination", depending on the context.
Also to be described is: reference to "a plurality" in this application means two or more than two. "and/or" describes an association relationship of an association object, meaning that there may be three relationships, e.g., a and/or B may represent: a exists alone, A and B exist together, and B exists alone. The character "/" generally indicates that the context-dependent object is an "or" relationship.
As shown in fig. 1, the high-throughput fiber lattice imaging direct-write system includes: the optical fiber array comprises an optical fiber array 1, a collimating lens 2, a first tube lens 3, a tube lens sleeve 4, a second tube lens 5, a reflecting lens 6, a direct writing objective lens 7, a high-precision displacement table 8, an optical fiber laser 9, an optical fiber beam splitter 10, an optical fiber modulator 11 and a control unit 12. The first tube mirror 3, the second tube mirror 4 and the second tube mirror 5 form a relay imaging unit, and the relay imaging unit is used for solving the problem that the back focal plane of the collimating mirror 2 and the entrance pupil plane of the direct writing objective 7 are both inside the objective and the two sides cannot coincide.
The laser emitted by the fiber laser 9 is output by the fiber array 1 after being split by the fiber beam splitter 10, and the center line of the fiber array 1 coincides with the optical axis of the system; the optical fiber array 1, the collimating lens 2, the first tube lens 3, the tube lens sleeve 4, the second tube lens 5, the reflecting lens 6 and the direct writing objective lens 7 are sequentially arranged with the same optical axis. Wherein, the back focal plane of the collimating mirror 2 and the front focal plane of the tube mirror 3 are coincident, and the coincident focal plane is the focal plane A in FIG. 1. The tube mirror sleeve 4 is used for fixing the tube mirror I3 and the tube mirror II 5 to keep the distance stable, the collimation end of the tube mirror I3 faces the collimation mirror 2, the collimation end of the tube mirror II 5 faces the direct writing objective 7, the back focal plane of the tube mirror I3 and the back focal plane of the tube mirror II 5 are overlapped, the overlapped focal plane is a relay imaging plane B of the optical fiber lattice image, the local enlarged image B-1 shows that light lattices which are arrayed at equal intervals are formed on the imaging plane B, and all light rays between the tube mirror I3 and the tube mirror II 5 are parallel to each other. The front focal plane of the tube lens II 5 is coincident with the entrance pupil plane of the write-through objective 7, the coincident plane is the focal plane C in fig. 1, the focal plane of the write-through objective 7, namely the imaging plane D of the write-through objective, is coincident with the upper surface of the high-precision displacement table 8, and the upper surface of the high-precision displacement table 8 is coated with photoresist and can be exposed under the irradiation of light with the wavelength of 350nm-550 nm.
The fiber laser 9 is a continuous laser or a femtosecond laser with the wavelength of 380nm-550nm. The optical fiber array 1 is composed of tens or even hundreds of single-mode fibers with the same specification, a plurality of single-mode fibers are equidistantly arranged into a row, or a plurality of rows are equidistantly arranged into an array, and the single-mode fibers are symmetrically distributed on two sides of a central line. Each single-mode fiber is provided with an optical fiber modulator 11, and the optical fiber modulator 11 is an electro-optic crystal modulator or an acousto-optic modulator and is used for realizing the independent adjustment and switching of the light intensity of each single-mode fiber. The control unit 12 controls the optical fiber modulator 11 and the high-precision displacement table 8 to realize direct writing of the set pattern, and when the optical fiber laser 9 is a femtosecond laser or photoresist has a two-step absorption effect, the direct writing resolution can reach 100nm.
As shown in FIG. 2, the mode field diameter of the single-mode fiber output beam is 4.6 μm, and the beam diameter at the exit end L from the single-mode fiber is D f ＝2NA f L, where NA f Numerical aperture, NA, of a single-mode optical fiber f =0.1 to 0.12. The diameter of the fiber core of the single-mode fiber is 9-10 mu m, and the diameters of the fiber core and the cladding of the single-mode fiber are 125-127 mu m.
As shown in fig. 3, after coating layers are removed from a plurality of single-mode fibers, the single-mode fibers are closely arranged at equal intervals to form an optical fiber array 1, and then the light beams are emitted into a light trace graph. In general, the size of a single-row optical fiber array formed by 40 single-mode optical fibers is 4.953mm, and the size of a single-row optical fiber array formed by 50 single-mode optical fibers is 6.223mm.
The light beam output by the optical fiber array 1 is collimated into parallel light by the collimator lens 2, and the light emitted by the single-mode optical fiber on the optical axis is collimated into parallel light parallel to the optical axis, and the light emitted by the single-mode optical fiber on the optical axis is collimated into parallel light inclined at different angles relative to the optical axis. Forming a primary dot matrix image on the relay imaging surface B after the parallel light rays with angles mutually pass through the first lens 3; the primary lattice image passes through a tube mirror II 5 and is collimated into parallel light which is mutually angled to enter a direct writing objective 7; all parallel light incident on the write-through objective lens 7 is overlapped at the plane C, and the write-through objective lens 7 is incident at different angles, and is focused on the focal plane of the write-through objective lens 7, namely the imaging plane D of the write-through objective lens, so as to form a secondary lattice image.
Focal length f 1 And the focal length f is f 2 The tube mirror 3 of the imaging device forms a magnification-enlarging imaging unit, and the imaging magnification is f 2 /f 1 And f 2 >f 1 Wherein the numerical aperture NA of the collimator lens 2 O Numerical aperture NA greater than that of single mode fiber f The image space view field of the collimating mirror 2 is larger than the size of the optical fiber array 1; focal length f 2 Tube mirror two 5 and focal length f 3 The direct-writing objective lens 7 of (1) forms a reduced-magnification imaging unit, and the imaging magnification is f 3 /f 2 And f 2 >f 3 The method comprises the steps of carrying out a first treatment on the surface of the The total imaging multiplying power of the high-flux optical fiber lattice imaging direct writing system is f 3 /f 1 And f 1 >f 3 . In this embodiment, the optical fiberThe array 1 is imaged on the imaging surface 8 of the direct writing objective lens to form a secondary lattice image with the single point size of 400nm-500nm and the single row lattice number of 40-50, and the laser direct writing flux is improved by tens or hundreds of times.
Single-row maximum optical fiber number N of optical fiber array 1 of high-flux optical fiber lattice imaging direct writing system and field of view W of direct writing objective lens 7 3 And focal length f 3 The field of view W of the collimator lens 2 1 And focal length f 1 The specific expression related to the single-mode fiber distance d is as follows: fiber number=w 3 *(f 1 /f 3 ) /d, and W 1 ≥W 3 *(f 1 /f 3 )。
When the parameters of the collimator lens 2 and the write-through objective lens 7 take different values, the calculation result of the number of optical fibers is as follows:
(1) When d=0.127 mm, the numerical aperture NA of the direct write objective 7 O =0.95, field of view W 3 =0.53 mm, focal length f 3 =3.6mm, field of view W of collimator mirror 2 1 =5.3 mm, focal length f 1 At=36 mm, the write-through field of view of the write-through objective lens 7 of 50 times is shown in fig. 4. At this time, the number of optical fibers=41, but considering symmetry, the actual number of optical fibers is 40, and the system magnification is 1/10. The remaining parameters are detailed in table 1.
(2) When d=0.127 mm, the numerical aperture NA of the direct write objective 7 O =1.4, field of view W 3 =0.44 mm, focal length f 3 =3mm, field of view W of collimator mirror 2 1 =5.3 mm, focal length f 1 At=36 mm, the write-through field of view of the write-through objective lens 7 of 60 times is shown in fig. 5. At this time, the number of optical fibers=41, but considering symmetry, the actual number of optical fibers is 40, and the system magnification is 1/12. The remaining parameters are detailed in table 1.
(3) When d=0.127 mm, the numerical aperture NA of the direct write objective 7 O =1.4, field of view W 3 =0.44 mm, focal length f 3 =3mm, field of view W of collimator mirror 2 1 =6.625 mm, focal length f 1 At=45 mm, the write-through field of view of the write-through objective lens 7 of 60 times is shown in fig. 6. At this time, the number of optical fibers=51, but considering symmetry, the actual number of optical fibers is 50, and the system magnification is 1/15. The remaining parameters are detailed in table 1.
Table 1 collimator and write-through objective parameter table
Figure BDA0004085929900000051
In the table, P is the entrance pupil diameter of the write-through objective lens 7.
As shown in fig. 7, when the number of optical fibers in the optical fiber array 1 is 40, the image point patterns of the 1 st to 10 th optical fibers and the 20 th optical fibers symmetrical along the optical axis are obtained from the optical axis, and it is clear that the aberration is extremely small in all the image point patterns. Wherein the 1 st to 10 th optical fibers have a far smaller Yu Aili spot size and the 20 th optical fibers and-20 th optical fibers have a spot size close to but not larger than the airy disk size. When the spot size is smaller than Yu Aili spot size, the image point has good imaging quality and the spot size reaches the physical optical diffraction limit, which is a guarantee of resolution direct writing.
As shown in fig. 8, when 40 optical fibers are taken as the number of optical fibers in the optical fiber array 1, the MTF curves of the image points of the 1 st to 10 th optical fibers, the 20 th optical fiber and the-20 th optical fiber are all close to the diffraction limit, and the resolution is high. At mtf=0.3, the spatial frequency is greater than 1900 cycles/mm, i.e. the resolution is better than 263nm.
As shown in fig. 9, when 40 is taken as the number of fibers in the optical fiber array 1, the image point wavefront difference of the 20 th fiber (i.e., the edge-most fiber) from the optical axis is 0.1877 λ, and the image point wavefront differences of the 1 st to 19 th fibers from the optical axis are all better than this value.
As shown in fig. 10, the optical system field curvature and F-Theta distortion of the high-throughput optical fiber lattice imaging direct writing system are only 0.0021%, which shows that the imaging effect of the system is good. Wherein the curvature of the sagittal field is 100nm and the curvature of the meridional field is 200nm. In the optical fiber array system, the vertical distance between the edge image point and the central image point is 100nm-200nm. F-Theta distortion to
Figure BDA0004085929900000061
Where h is the actual image height, f is the system focus, and θ is the scan angle. F-Theta distortion of the optical fiber array system is only 0.0021%, and the image height and the field angle are basically linear positiveWhen the object lens field of view is 0.3mm, the aberration between the actual image height of the edge and the ideal image height is only 6.3nm.
The high-flux optical fiber lattice imaging direct writing system has the advantages of simple optical path structure, less optical elements, symmetrical structure and small system phase difference; the control unit controls the optical fiber modulator and the high-precision displacement table to realize high-speed direct writing and gray direct writing of any pattern. In this embodiment, a 532nm femtosecond laser (or a 405nm continuous laser) is used as the fiber laser, and sub-50 nm direct writing resolution is realized through a two-photon absorption effect when the femtosecond laser interacts with the material or through a two-step absorption effect when the continuous laser interacts with the material. The invention can be applied to rapid processing and manufacturing of microlens arrays, diffractive optical elements, photoetching mask plates and the like.
It will be appreciated by persons skilled in the art that the foregoing description is a preferred embodiment of the invention, and is not intended to limit the invention, but rather to limit the invention to the specific embodiments described, and that modifications may be made to the technical solutions described in the foregoing embodiments, or equivalents may be substituted for elements thereof, for the purposes of those skilled in the art. Modifications, equivalents, and alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (10)

1. A high-throughput fiber optic lattice imaging direct-write system, comprising: the optical fiber optical system comprises a light source, an optical fiber modulator, an optical fiber array, a collimating lens, a tube lens I, a tube lens II, a direct writing objective lens, a high-precision displacement table and a control unit;
the light source, the optical fiber array, the collimating lens, the first tube lens, the second tube lens and the direct-writing objective lens are sequentially arranged with the optical axis, the central line of the optical fiber array coincides with the optical axis, and each single-mode optical fiber in the optical fiber array is provided with the optical fiber modulator for realizing the independent adjustment and switching of the light intensity of each single-mode optical fiber; the back focal plane of the collimating lens is overlapped with the front focal plane of the first tube lens, the collimating end of the first tube lens faces the collimating lens, the collimating end of the second tube lens faces the direct-writing objective lens, the imaging planes of the first tube lens and the second tube lens are overlapped, the front focal plane of the second tube lens is overlapped with the entrance pupil plane of the direct-writing objective lens, the focal plane of the direct-writing objective lens is overlapped with the upper surface of the high-precision displacement table, and the upper surface of the high-precision displacement table is coated with photoresist; the control unit is used for controlling the optical fiber modulator and the high-precision displacement table to realize direct writing of the set pattern.
2. The high-throughput fiber lattice imaging direct write system of claim 1, wherein the photoresist is exposed to light of wavelengths of 350nm-550 nm.
3. The high-throughput optical fiber lattice imaging direct writing system of claim 1, wherein the optical fiber array is composed of a plurality of single-mode optical fibers with the same specification, the plurality of single-mode optical fibers are equidistantly arranged in a column, and the single-mode optical fibers are symmetrically distributed on two sides of the center line.
4. The high-throughput optical fiber lattice imaging direct writing system according to claim 1, wherein the optical fiber array is composed of a plurality of single-mode optical fibers with the same specification, the plurality of single-mode optical fibers are equidistantly arranged into a column, the plurality of single-mode optical fibers are equidistantly arranged into an array, and the single-mode optical fibers are symmetrically distributed on two sides of the central line.
5. The high-throughput fiber lattice imaging write-through system of claim 1, wherein a numerical aperture of said collimator is larger than a numerical aperture of said fiber array, and an image-side field of view of said collimator is larger than a size of said fiber array.
6. The high-throughput fiber lattice imaging direct-write system of claim 1, wherein the fiber laser is a continuous laser with a wavelength of 380nm-550nm.
7. The high-throughput fiber lattice imaging direct-write system of claim 1, wherein the fiber laser is a femtosecond laser with a wavelength of 380nm-550nm.
8. The high-throughput fiber lattice imaging direct-write system of claim 1, wherein the focal length of the collimating mirror is f 1 The focal length of the first tube mirror is f 2 The focal length of the second tube mirror is f 3 And f 2 >f 1 >f 3 The total imaging multiplying power of the high-flux optical fiber lattice imaging direct writing system is f 3 /f 1 。
9. The high-throughput fiber lattice imaging write-through system of claim 1, wherein the maximum number of fibers in a single row of the fiber array and the field of view W of the write-through objective lens 3 Focal length f of the write-through objective lens 3 The view field W of the collimating mirror 1 Focal length f of the collimator lens 1 Related to the distance d between adjacent single-mode fibers in the optical fiber array, and W 1 ≥W 3 *(f 1 /f 3 ) The specific expression is as follows:
fiber number=w 3 *(f 1 /f 3 )/d。
10. The high-throughput optical fiber lattice imaging direct writing system of claim 3 or claim 4, wherein the mode field diameter of the single-mode optical fiber output beam is 4.6 μm, and the beam diameter at the exit end L from the single-mode optical fiber is D f ＝2NA f L, where NA f Is the numerical aperture of a single-mode fiber.
CN202310136507.9A 2023-02-20 2023-02-20 High-flux optical fiber lattice imaging direct writing system Pending CN116300332A (en)

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