CN116299330A - Optical scanning MEMS micro-mirror laser radar system - Google Patents

Optical scanning MEMS micro-mirror laser radar system Download PDF

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Publication number
CN116299330A
CN116299330A CN202310200948.0A CN202310200948A CN116299330A CN 116299330 A CN116299330 A CN 116299330A CN 202310200948 A CN202310200948 A CN 202310200948A CN 116299330 A CN116299330 A CN 116299330A
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Prior art keywords
mems
mems micro
mirror
micro
rotary
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CN202310200948.0A
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Chinese (zh)
Inventor
李伟
徐静
赵旭东
黄雪钦
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Anhui Zhongkemi Microelectronics Technology Co ltd
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Anhui Zhongkemi Microelectronics Technology Co ltd
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Priority to CN202310200948.0A priority Critical patent/CN116299330A/en
Publication of CN116299330A publication Critical patent/CN116299330A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention provides a light scanning MEMS micro-mirror laser radar system, which is used for realizing the space scanning of a transmitting light beam and the receiving scanning of a return light speed in a laser radar by forming a MEMS micro-mirror array by a plurality of MEMS micro-mirrors, solving the requirements of the laser radar on the large rotation angle of the MEMS micro-mirrors and the large mirror surface size of a micro-light reflecting mirror so as to balance the design and reduce the manufacturing difficulty, thereby being beneficial to improving various performance indexes such as the precision, the detection distance, the angle of view, the power and the like of the laser radar; furthermore, the number, the positions and the like of the single MEMS micro-mirrors can be flexibly set according to design requirements, so that the optical scanning MEMS micro-mirror laser radar system has wider application range.

Description

Optical scanning MEMS micro-mirror laser radar system
Technical Field
The invention belongs to the technical field of micro-electro-mechanical systems, and relates to a light scanning MEMS micro-mirror laser radar system.
Background
The optical scanning MEMS micro-mirror can realize the functions of pointing deflection, graphical scanning, scanning imaging and the like of laser, can be used in the fields of laser radar, 3D sensing, automobile head-up display, medical imaging and the like, has the advantages of low power consumption, small volume, easy integration and the like, and has wide industrial utilization value.
The laser radar mainly comprises a light source, a light scanning assembly, a receiver and signal processing, wherein the light scanning mode of the light scanning assembly is usually four types of mechanical rotation, a prism, an MEMS micro-mirror and solid Flash. The micro-light reflecting mirror of the double-shaft MEMS micro-mirror can rotate in two orthogonal directions, the light source emits detection light signals, scanning within a certain view field range is achieved through the micro-light reflecting mirror, the receiver receives the light signals reflected from the target object, and relevant information of the target object such as parameters of target distance, azimuth, height, shape and the like can be obtained through comparing and processing the emitted light signals and the received light signals, so that the target object is detected, tracked and identified.
The optical scanning component is a core component in the laser radar system, and directly affects various performance indexes of the laser radar, such as precision, detection distance, angle of view, power and the like. Along with development and popularization of automatic driving, the requirements of the vehicle-mounted laser radar on the field angle and the detection distance are higher and higher, namely the requirements on the rotation angle of the MEMS micro mirror are larger, and meanwhile, the requirements on the mirror surface size of the micro mirror of the MEMS micro mirror are also larger, so that the design and manufacturing difficulty of the MEMS micro mirror are greatly increased.
Therefore, providing an optical scanning MEMS micro-mirror laser radar system to improve various performance indexes of the laser radar and to improve the above-mentioned drawbacks is a problem to be solved.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide an optical scanning MEMS micro-mirror lidar system, which is used for solving the problem of the requirement of the lidar system for the large rotation angle and the large mirror size of the MEMS micro-mirror in the prior art.
To achieve the above and other related objects, the present invention provides an optical scanning MEMS micro-mirror lidar system comprising:
a light source to provide an optical signal;
the MEMS micro-mirror array comprises a first rotary MEMS micro-mirror unit and a second rotary MEMS micro-mirror unit which are positioned on the same substrate, wherein the first rotary MEMS micro-mirror unit is used for scanning and reflecting optical signals emitted by the light source and reflecting the optical signals to a target object, and the second rotary MEMS micro-mirror unit is used for scanning and receiving optical signals reflected by the target object;
the controller is electrically connected with the MEMS micro-mirror array and is used for controlling the rotation of the MEMS micro-mirrors in the MEMS micro-mirror array;
and the receiver is used for receiving the optical signals reflected by the second rotary MEMS micro-mirror unit.
Optionally, the first rotary MEMS micro mirror unit is composed of a single MEMS micro mirror, and the second rotary MEMS micro mirror unit is composed of N MEMS micro mirrors, wherein N is greater than or equal to 2.
Optionally, the MEMS micromirrors in the MEMS micromirror array comprise uniaxial MEMS micromirrors or biaxial MEMS micromirrors.
Alternatively, the MEMS micro-mirror comprises one or a combination of an electrostatically driven MEMS micro-mirror, an electromagnetically driven MEMS micro-mirror, and a piezoelectrically driven MEMS micro-mirror.
Optionally, any MEMS micromirror in the MEMS micromirror array is independently disposed on the substrate and is independently electrically connected to the substrate.
Optionally, the controller is electrically connected to each MEMS micromirror in the MEMS micromirror array independently through the substrate.
Optionally, when dual-axis MEMS micro mirrors are adopted, the MEMS micro mirrors simultaneously and bidirectionally rotate along the orthogonal direction, and the controller controls the MEMS micro mirror array to respectively rotate at a first angle and a second angle along the orthogonal direction, wherein the first angle of the first rotating MEMS micro mirror unit and the first angle of the second rotating MEMS micro mirror unit are synchronous; the second angle of the first rotating MEMS micro-mirror unit is synchronized with the second angle of the second rotating MEMS micro-mirror unit.
Optionally, when dual-axis MEMS micromirrors are used, the MEMS micromirrors are all simultaneously rotated in two directions in orthogonal directions, the controller controls any MEMS micromirror in the MEMS micromirror array to rotate at a first angle at a first frequency, and simultaneously the controller controls any MEMS micromirror in the MEMS micromirror array to rotate at a second angle at a second frequency, and the second frequency is equal to the natural frequency of any MEMS micromirror in the MEMS micromirror array, and the second frequency is higher than the first frequency.
Optionally, any MEMS micromirror in the MEMS micromirror array is integrated with a position sensor for measuring the rotation angle; the controller is in communication with the position sensor, receives the position data information measured by the position sensor, and is used for feedback control of the MEMS micro mirror array.
Optionally, a collimator lens is also included between the light source and the first rotary MEMS micro-mirror unit.
As described above, the optical scanning MEMS micro-mirror laser radar system is used for realizing the spatial scanning of the emitted light beam and the receiving scanning of the return light speed in the laser radar by forming the MEMS micro-mirror array by a plurality of MEMS micro-mirrors, solving the requirements of the laser radar on the large rotation angle of the MEMS micro-mirror and the large mirror surface size of the micro-mirror, so as to balance the design and reduce the manufacturing difficulty, thereby being beneficial to improving various performance indexes such as the precision, the detection distance, the angle of view, the power and the like of the laser radar; furthermore, the number, the positions and the like of the single MEMS micro-mirrors can be flexibly set according to design requirements, so that the optical scanning MEMS micro-mirror laser radar system has wider application range.
Drawings
Fig. 1 is a schematic diagram of a structure of an optical scanning MEMS micro-mirror lidar system according to an embodiment.
Fig. 2 is a schematic diagram showing the structure of a MEMS micro-mirror array provided in the embodiment.
Fig. 3 is a schematic diagram showing the structure of another MEMS micro-mirror array provided in the embodiment.
Description of element reference numerals
100 MEMS micromirror array
110. First rotary MEMS micromirror unit
120. Second rotary MEMS micromirror unit
101 MEMS micro-mirror
200. Substrate board
300. Light source
400. Controller for controlling a power supply
500. Receiver with a receiver body
600. Target object
700. Collimator lens
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
As described in detail in the embodiments of the present invention, the cross-sectional view of the device structure is not partially enlarged to a general scale for convenience of explanation, and the schematic drawings are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
For ease of description, spatially relative terms such as "under", "below", "beneath", "above", "upper" and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures. Furthermore, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers or one or more intervening layers may also be present. As used herein, "between … …" is meant to include both endpoints.
In the context of this application, a structure described as a first feature being "on" a second feature may include embodiments where the first and second features are formed in direct contact, as well as embodiments where additional features are formed between the first and second features, such that the first and second features may not be in direct contact.
It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of each component in actual implementation may be changed at will, and the layout of the components may be more complex.
As shown in fig. 1, the present embodiment provides an optical scanning MEMS micro-mirror lidar system, which includes a light source 300, a MEMS micro-mirror array 100, a controller 400, and a receiver 500.
Wherein the light source 300 is configured to provide an optical signal; the MEMS micro-mirror array 100 includes a first rotating MEMS micro-mirror unit 110 and a second rotating MEMS micro-mirror unit 120 that are disposed on the same substrate 200, wherein the first rotating MEMS micro-mirror unit 110 is configured to scan and reflect the light signal emitted from the light source 300 and reflect the light signal to the target object 600, and the second rotating MEMS micro-mirror unit 120 is configured to scan and receive the light signal reflected by the target object 600; the controller 400 is electrically connected to the MEMS micro-mirror array 100, and is configured to control rotation of the MEMS micro-mirrors 101 in the MEMS micro-mirror array 100; the receiver 500 is configured to receive the optical signal reflected by the second rotary MEMS micro-mirror unit 120.
In particular, for a laser radar capable of detecting a long distance, such as a laser radar applied to an automobile, it is generally required that the larger the mirror surface of the MEMS micro-mirror is, the better the rotation angle of the MEMS micro-mirror is, but the larger the mirror surface of the MEMS micro-mirror and the large rotation angle make the manufacturing difficult or even difficult to achieve, so that the present embodiment compensates for the problem of the insufficient mirror surface and rotation angle by the MEMS micro-mirror array 100 composed of a plurality of the MEMS micro-mirrors 101 and the optical scanning MEMS micro-mirror laser radar system including the MEMS micro-mirror array 100.
In this embodiment, the light source 300 emits a detection light signal, the light signal is reflected by the first rotary MEMS micro-mirror unit 110, and the light signal can be transmitted to the target object 600, the second rotary MEMS micro-mirror unit 120 can scan and receive the light signal reflected by the target object 600, so that the MEMS micro-mirror array 100 can scan the target object 600 within a certain field of view, and the receiver 500 receives the light signal reflected by the target object 600 and reflected by the second rotary MEMS micro-mirror unit 120, and by comparing and processing the emitted light signal and the received light signal, relevant information of the target object 600, such as the target distance, azimuth, altitude, shape, etc., can be obtained, so as to detect, track and identify the target object 600.
In this embodiment, the MEMS micro mirrors 101 are configured into the MEMS micro mirror array 100, so as to realize spatial scanning of the emitted light beam and receiving scanning of the return light velocity in the laser radar, solve the requirement of the laser radar on the large rotation angle of the MEMS micro mirrors and the large mirror surface size of the micro mirror, balance the design, reduce the manufacturing difficulty, and further facilitate improving the precision, the detection distance, the angle of view, the power and other performance indexes of the laser radar.
As an example, the first rotating MEMS micro-mirror unit 110 is composed of a single MEMS micro-mirror 101, and the second rotating MEMS micro-mirror unit 120 is composed of N MEMS micro-mirrors, wherein N is equal to or greater than 2.
Specifically, as shown in fig. 1 and 2, in the present embodiment, the first rotary MEMS micro mirror unit 110 includes 1 MEMS micro mirror 101, the second rotary MEMS micro mirror unit 120 includes 4 MEMS micro mirrors 101, and the first rotary MEMS micro mirror unit 110 is located near to the light source 300, and the second rotary MEMS micro mirror unit 120 is located far from the light source 300, but the specific number, distribution, etc. of the MEMS micro mirrors 101 included in the first rotary MEMS micro mirror unit 110 and the second rotary MEMS micro mirror unit 120 is not limited thereto, and may be selected as required, for example, the number of the MEMS micro mirrors 101 in the first rotary MEMS micro mirror unit 110 may include 1, 2, 3, 4, etc., and the number of the MEMS micro mirrors 101 in the second rotary MEMS micro mirror unit 120 may include 2, 3, 4, 5, etc. Fig. 3 is a schematic structural diagram of the MEMS micro-mirror array 100 according to another embodiment, wherein the first rotating MEMS micro-mirror unit 110 is located at the center, and the second rotating MEMS micro-mirror unit 120 formed by 4 of the MEMS micro-mirrors 101 is located at the periphery of the first rotating MEMS micro-mirror unit 110.
As an example, the MEMS micro-mirrors 101 in the MEMS micro-mirror array 100 may comprise single axis MEMS micro-mirrors or dual axis MEMS micro-mirrors.
Specifically, in the present embodiment, the MEMS micro mirrors 101 in the first rotary MEMS micro mirror unit 110 and the second rotary MEMS micro mirror unit 120 are dual-axis MEMS micro mirrors having the same structure, but the present invention is not limited thereto, and the MEMS micro mirrors 101 in the first rotary MEMS micro mirror unit 110 and the second rotary MEMS micro mirror unit 120 may be single-axis MEMS micro mirrors, which is not limited herein.
By way of example, the MEMS micro-mirror 101 may comprise one or a combination of an electrostatically driven MEMS micro-mirror, an electromagnetically driven MEMS micro-mirror, and a piezoelectrically driven MEMS micro-mirror, and the specific type of the MEMS micro-mirror 101 may be selected as desired without undue limitation herein.
As an example, any one of the MEMS micromirrors 101 of the MEMS micromirror array 100 is independently disposed on the substrate 200 and is independently electrically connected to the substrate 200.
Specifically, when the MEMS micro-mirrors 101 are independently disposed on the substrate 200 and the MEMS micro-mirrors 101 are electrically connected to the substrate 200 independently, any MEMS micro-mirror 101 may be subjected to a convenient and flexible fine adjustment as required to obtain desired detection data, but is not limited thereto.
As an example, the controller 400 is electrically connected to each of the MEMS micromirrors 101 of the MEMS micromirror array 100 independently through the substrate 200.
Specifically, when the MEMS micro-mirrors 101 are independently disposed on the substrate 200 and the MEMS micro-mirrors 101 are independently electrically connected to the substrate 200, the controller 400 may be independently electrically connected to the MEMS micro-mirrors 101 through the substrate 200, so that any MEMS micro-mirror 101 may be conveniently and flexibly controlled, but is not limited thereto.
As an example, when dual-axis MEMS micromirrors are employed, the MEMS micromirrors 101 are all simultaneously rotated bi-directionally in orthogonal directions, and the controller 400 controls the MEMS micromirror array 100 to rotate by a first angle and a second angle in orthogonal directions, respectively, wherein the first angle of the first rotating MEMS micromirror unit 110 and the first angle of the second rotating MEMS micromirror unit 120 are synchronized; the second angle of the first rotary MEMS micro-mirror unit 110 and the second angle of the second rotary MEMS micro-mirror unit 120 are synchronized.
As an example, when dual-axis MEMS micromirrors are employed, the MEMS micromirrors 101 are all simultaneously rotated bi-directionally in orthogonal directions, the controller controls any one of the MEMS micromirrors 101 in the MEMS micromirror array 100 to perform a first angular rotation at a first frequency, while the controller 400 controls any one of the MEMS micromirrors 101 in the MEMS micromirror array 100 to perform a second angular rotation at a second frequency, and the second frequency is equal to the natural frequency of any one of the MEMS micromirrors 101 in the MEMS micromirror array 100, and the second frequency is higher than the first frequency.
Specifically, as shown in fig. 1, the MEMS micro-mirror 101 rotates at a first angle when rotated about the X-axis, and the MEMS micro-mirror 101 rotates at a second angle when rotated about the Y-axis.
When the optical scanning MEMS micro-mirror lidar system is applied, the first rotating MEMS micro-mirror 110 is configured to reflect the optical signal emitted by the optical source 300 at a first time, the second rotating MEMS micro-mirror array 120 is configured to receive the optical signal returned at a second time, and the position of the target object 600 relative to the MEMS micro-mirror array 100 is determined based on the difference between the first angle, the second angle, the first time, and the second time.
As an example, any one of the MEMS micromirrors 101 of the MEMS micromirror array 100 is integrated with a position sensor (not shown) for measuring a rotation angle; the controller 400 communicates with the position sensor, receives position data information measured by the position sensor, and is used for feedback control of the MEMS micro-mirror array 100.
Specifically, after any one of the MEMS micromirrors 101 is provided with the position sensor for measuring the rotation angle, the position information of the MEMS micromirror 101 can be obtained by the position sensor, and after the position information is fed back to the controller 400, the MEMS micromirror 101 can be controlled by the controller 400, so that the desired detection information can be obtained.
As an example, a collimator lens 700 is also included between the light source 300 and the first rotary MEMS micro-mirror unit 110.
Specifically, as shown in fig. 1, in the present embodiment, the collimator lens 700 is disposed between the light source 300 and the first rotary MEMS micro-mirror unit 110 to obtain a desired light beam, and the kind, number, etc. of the collimator lens 700 are not limited herein.
In summary, in the optical scanning MEMS micro-mirror laser radar system of the present invention, the MEMS micro-mirrors are formed into the MEMS micro-mirror array, so as to realize the spatial scanning of the emitted light beam and the receiving scanning of the return light velocity in the laser radar, solve the requirements of the laser radar on the large rotation angle of the MEMS micro-mirror and the large mirror surface size of the micro-mirror, so as to balance the design, reduce the manufacturing difficulty, and further facilitate the improvement of the precision, the detection distance, the field angle, the power and other performance indexes of the laser radar; furthermore, the number, the positions and the like of the single MEMS micro-mirrors can be flexibly set according to design requirements, so that the optical scanning MEMS micro-mirror laser radar system has wider application range.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims (10)

1. An optical scanning MEMS micro-mirror lidar system, the optical scanning MEMS micro-mirror lidar system comprising:
a light source to provide an optical signal;
the MEMS micro-mirror array comprises a first rotary MEMS micro-mirror unit and a second rotary MEMS micro-mirror unit which are positioned on the same substrate, wherein the first rotary MEMS micro-mirror unit is used for scanning and reflecting optical signals emitted by the light source and reflecting the optical signals to a target object, and the second rotary MEMS micro-mirror unit is used for scanning and receiving optical signals reflected by the target object;
the controller is electrically connected with the MEMS micro-mirror array and is used for controlling the rotation of the MEMS micro-mirrors in the MEMS micro-mirror array;
and the receiver is used for receiving the optical signals reflected by the second rotary MEMS micro-mirror unit.
2. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: the first rotary MEMS micro-mirror unit is composed of single MEMS micro-mirrors, and the second rotary MEMS micro-mirror unit is composed of N MEMS micro-mirrors, wherein N is more than or equal to 2.
3. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: the MEMS micromirrors in the MEMS micromirror array comprise uniaxial MEMS micromirrors or biaxial MEMS micromirrors.
4. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: the MEMS micro-mirror comprises one or a combination of an electrostatic driven MEMS micro-mirror, an electromagnetic driven MEMS micro-mirror and a piezoelectric driven MEMS micro-mirror.
5. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: any MEMS micromirror in the MEMS micromirror array is independently arranged on the substrate and is independently and electrically connected with the substrate.
6. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: the controller is electrically connected with each MEMS micromirror in the MEMS micromirror array independently through the substrate.
7. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: when the biaxial MEMS micro-mirrors are adopted, the MEMS micro-mirrors simultaneously and bidirectionally rotate along the orthogonal direction, and the controller controls the MEMS micro-mirror array to respectively rotate at a first angle and a second angle along the orthogonal direction, wherein the first angle of the first rotary MEMS micro-mirror unit and the first angle of the second rotary MEMS micro-mirror unit are synchronous; the second angle of the first rotating MEMS micro-mirror unit is synchronized with the second angle of the second rotating MEMS micro-mirror unit.
8. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: when biaxial MEMS micromirrors are adopted, the MEMS micromirrors simultaneously rotate in two directions along orthogonal directions, the controller controls any MEMS micromirror in the MEMS micromirror array to rotate at a first angle at a first frequency, and simultaneously controls any MEMS micromirror in the MEMS micromirror array to rotate at a second angle at a second frequency which is equal to the natural frequency of any MEMS micromirror in the MEMS micromirror array, and the second frequency is higher than the first frequency.
9. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: any MEMS micromirror in the MEMS micromirror array is integrated with a position sensor for measuring the rotation angle; the controller is in communication with the position sensor, receives the position data information measured by the position sensor, and is used for feedback control of the MEMS micro mirror array.
10. The optical scanning MEMS micro-mirror lidar system of claim 1, wherein: a collimator lens is also included between the light source and the first rotary MEMS micro-mirror unit.
CN202310200948.0A 2023-02-28 2023-02-28 Optical scanning MEMS micro-mirror laser radar system Pending CN116299330A (en)

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Application Number Priority Date Filing Date Title
CN202310200948.0A CN116299330A (en) 2023-02-28 2023-02-28 Optical scanning MEMS micro-mirror laser radar system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310200948.0A CN116299330A (en) 2023-02-28 2023-02-28 Optical scanning MEMS micro-mirror laser radar system

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CN116299330A true CN116299330A (en) 2023-06-23

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