CN116294017A - Ventilation and dust removal device for workshop production of semiconductor factory - Google Patents
Ventilation and dust removal device for workshop production of semiconductor factory Download PDFInfo
- Publication number
- CN116294017A CN116294017A CN202310069384.1A CN202310069384A CN116294017A CN 116294017 A CN116294017 A CN 116294017A CN 202310069384 A CN202310069384 A CN 202310069384A CN 116294017 A CN116294017 A CN 116294017A
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- fixedly connected
- ventilating
- dust
- plates
- plate
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- 239000000428 dust Substances 0.000 title claims abstract description 63
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000009423 ventilation Methods 0.000 title claims description 18
- 238000004140 cleaning Methods 0.000 claims abstract description 69
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 21
- 230000000694 effects Effects 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000005056 compaction Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910000746 Structural steel Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/48—Removing dust other than cleaning filters, e.g. by using collecting trays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/68—Regeneration of the filtering material or filter elements inside the filter by means acting on the cake side involving movement with regard to the filter elements
- B01D46/681—Regeneration of the filtering material or filter elements inside the filter by means acting on the cake side involving movement with regard to the filter elements by scrapers, brushes or the like
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/90—Cleaning of purification apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a ventilating dust removing device for workshop production of a semiconductor factory, which relates to the field of ventilating ducts and comprises a ventilating duct body, wherein an embedded filter screen is embedded in the front surface of the ventilating duct body, a dust cleaning mechanism and an auxiliary cleaning mechanism are arranged on the front surface of the ventilating duct body, the dust cleaning mechanism comprises an electromagnet, and the electromagnet is fixedly connected to the top of the ventilating duct body.
Description
Technical Field
The invention relates to the technical field of ventilation pipelines, in particular to a ventilation and dust removal device for workshop production of a semiconductor factory.
Background
The ventilating duct is a metal or composite pipeline for ventilation and air conditioning engineering of industrial and civil buildings, and is a municipal infrastructure for reducing the concentration of harmful gases in order to circulate air. The tuber pipe is mainly applied in industry and building engineering, and the application mainly relates to: the electronic industry dust-free factory building clean system, medical food aseptic workshop clean system, hotel, market hospital, mill and office building's central air conditioning system. The processing technology can be divided into angle iron flange air pipes and common plate flange air pipes.
At present, the existing semiconductor ventilation dust removal pipeline can ventilate in the process of using, but because the impurity and dust that wrap up in the air are more, so most dust will be attached to the inside of ventilation pipeline by ventilation in-process, the time has long required artifical periodic cleaning, it is very laborious to waste time, and can also cause the dust to splash in disorder at the in-process of cleaning, cause staff's nose and throat uncomfortable, belong to low-efficient work, can not utilize effective time, consequently, need further improvement.
Therefore, a ventilating and dust removing device for the production of a semiconductor factory workshop which is strong in design practicality and prevents dust adhesion is necessary.
Disclosure of Invention
The invention aims to provide a ventilation and dust removal device for workshop production of a semiconductor factory, which aims to solve the problems in the background technology.
In order to solve the technical problems, the invention provides the following technical scheme: the ventilating and dust removing device for the production of the semiconductor factory workshop comprises a ventilating duct body, wherein an embedded filter screen is embedded in the front of the ventilating duct body, and a dust cleaning mechanism and an auxiliary cleaning mechanism are arranged in the front of the ventilating duct body;
the dust cleaning mechanism comprises an electromagnet, the electromagnet is fixedly connected to the top of the ventilating duct body, two sliding connecting blocks are arranged on the front face of the ventilating duct body, movable connecting plates are arranged on the front faces of the two sliding connecting blocks, a fixed connecting rod is fixedly connected to the top of the movable connecting plates, and cleaning brushes are fixedly connected to the rear sides of the movable connecting plates;
the auxiliary cleaning mechanism comprises an L-shaped connecting plate, the L-shaped connecting plate is fixedly connected to the top of the movable connecting plate, two restoring springs are fixedly connected to two sides of the top of the L-shaped connecting plate, two arc-shaped connecting plates are fixedly connected to the tops of the restoring springs, connecting columns are fixedly connected to the outer parts of the arc-shaped connecting plates, connecting clamping plates are fixedly connected between the connecting columns, a plurality of rubber arc plates are arranged at the bottoms of the connecting clamping plates, and guide arc plates are arranged at the bottoms of the cleaning brushes.
According to the technical scheme, the sliding connection grooves are formed in the two sides of the front face of the ventilating duct body, the two sliding connection blocks respectively extend into the sliding connection grooves and are in sliding connection with the sliding connection grooves, and sliding operation of the movable connection plates can be conveniently driven through sliding of the sliding connection blocks.
According to the technical scheme, the discharging groove is formed in the movable connecting plate, the rear side of the cleaning hairbrush is in contact with the front surface of the embedded filter screen, dust can be discharged conveniently through the discharging groove, and the cleaning hairbrush can clean the filter screen conveniently.
According to the technical scheme, the two movable connecting plates are fixedly connected with the two sides of the rear part of the fixed connecting rod, and the fixed connecting rod is made of iron, so that the fixed connecting rod and the electromagnet can be conveniently attracted.
According to the technical scheme, the bottom of the electromagnet extends to the inside of the ventilating duct body, and the L-shaped connecting plate is arranged at the rear side of the fixed connecting rod, so that the electromagnet can conveniently drive the fixed connecting rod to attract each other.
According to the technical scheme, through grooves are formed in two sides of the inner portion of the L-shaped connecting plate, and the two connecting columns penetrate through the two through grooves respectively, so that the connecting columns can move conveniently.
According to the technical scheme, a plurality of cleaning grooves are formed in the connecting clamping plate, and the cleaning grooves are respectively fixedly connected with the outer parts of the rubber arc plates, so that the rubber arc plates can be conveniently and fixedly connected.
According to the technical scheme, one side of the guide arc plate is fixedly connected with one side of the movable connecting plate, and the restoring spring is in a stretched state, so that the follow-up restoring spring can work conveniently.
Compared with the prior art, the invention has the following beneficial effects: according to the invention, through the design of matching the dust cleaning mechanism and the auxiliary cleaning mechanism, the sliding connecting block can be synchronously driven to slide in the sliding connecting groove in the upward moving process of the movable connecting plate, and the cleaning hairbrush can be synchronously driven to slide in the upward sliding process of the movable connecting plate, so that the cleaning hairbrush can synchronously clean dust adhered on the outer surface of the embedded filter screen, and through the design of the L-shaped connecting plate, dust suppression can be carried out in the cleaning process of the cleaning hairbrush on the outer surface of the embedded filter screen, and the condition that the ventilation effect is poor due to the fact that the dust is exposed in the air again can be prevented.
Compared with the prior art, the invention has the following beneficial effects: according to the invention, through the design of matching the dust cleaning mechanism and the auxiliary cleaning mechanism, when the rubber arc plate is contacted with the cleaning brush, the rubber arc plate can clean and scrape the impurities adhered on the outer surface of the cleaning brush, and then the dust automatically falls into the guide arc plate, so that the cleaning brush can be cleaned, the condition of poor cleaning effect of the embedded filter screen caused by a large amount of dust adhered on the surface of the cleaning brush is prevented, the using effect is ensured, and the working process of manually cleaning is omitted.
Compared with the prior art, the invention has the following beneficial effects: according to the invention, through the design of matching the dust cleaning mechanism and the auxiliary cleaning mechanism, dust scraped by the rubber arc plate can be scraped into the guide arc plate again in the downward sliding process of the cleaning brush, then the connecting clamping plate and the rubber arc plate can carry out falling compaction on the dust at the top of the guide arc plate through the self weight, and through the design of the rubber arc plate, the rubber arc plate can be enabled to be firmer in dust pressure through deformation in the extrusion process of the falling connecting clamping plate, so that stable compaction on the dust is achieved, the dust is connected together, and no splashing is caused.
Compared with the prior art, the invention has the following beneficial effects: according to the invention, through the design of matching the dust cleaning mechanism and the auxiliary cleaning mechanism, when the movable connecting plate moves upwards, the connecting clamping plate and the rubber arc plate are separated from the top of the guide arc plate, so that the compacted dust strips can automatically fall off through slopes of the guide arc plate and the discharge chute, and the dust recycling device can facilitate subsequent dust recycling work of workers.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an enlarged view of the invention at A in FIG. 1;
FIG. 3 is a schematic rear cross-sectional view of the vent body of the present invention;
FIG. 4 is an enlarged view of the invention at B in FIG. 3;
FIG. 5 is an enlarged view of the invention at C in FIG. 3;
FIG. 6 is a schematic cross-sectional view of the overall structure of the articulating board of the invention;
FIG. 7 is an overall schematic of the auxiliary cleaning mechanism of the present invention;
fig. 8 is an enlarged view of the invention at D in fig. 7.
In the figure: 1. a ventilation duct body; 2. an embedded filter screen; 3. a dust cleaning mechanism; 301. an electromagnet; 302. a sliding connection block; 303. a movable connecting plate; 304. fixing the connecting rod; 305. cleaning a hairbrush; 4. an auxiliary cleaning mechanism; 401. an L-shaped connecting plate; 402. a return spring; 403. an arc-shaped connecting plate; 404. a connecting column; 405. the connecting clamping plate; 406. a rubber arc plate; 407. and guiding the arc plate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, the present invention provides the following technical solutions: the ventilating and dust removing device for the production of the semiconductor factory workshop comprises a ventilating duct body 1, wherein an embedded filter screen 2 is embedded in the front surface of the ventilating duct body 1, and a dust cleaning mechanism 3 and an auxiliary cleaning mechanism 4 are arranged in the front surface of the ventilating duct body 1;
the dust cleaning mechanism 3 comprises an electromagnet 301, the electromagnet 301 is fixedly connected to the top of the ventilating duct body 1, two sliding connection blocks 302 are arranged on the front surface of the ventilating duct body 1, a movable connection plate 303 is arranged on the front surface of the two sliding connection blocks 302, a fixed connection rod 304 is fixedly connected to the top of the movable connection plate 303, and a cleaning brush 305 is fixedly connected to the rear side of the movable connection plate 303;
the auxiliary cleaning mechanism 4 comprises an L-shaped connecting plate 401, wherein the L-shaped connecting plate 401 is fixedly connected to the top of the movable connecting plate 303, recovery springs 402 are fixedly connected to two sides of the top of the L-shaped connecting plate 401, arc-shaped connecting plates 403 are fixedly connected to the tops of the two recovery springs 402, connecting columns 404 are fixedly connected to the outsides of the two arc-shaped connecting plates 403, a connecting clamping plate 405 is fixedly connected between the two connecting columns 404, a plurality of rubber arc plates 406 are arranged at the bottom of the connecting clamping plate 405, and guide arc plates 407 are arranged at the bottom of the cleaning hairbrush 305.
The two sides of the front surface of the ventilating duct body 1 are provided with sliding connecting grooves, and two sliding connecting blocks 302 respectively extend into the sliding connecting grooves and are in sliding connection with the sliding connecting grooves.
A discharge chute is arranged in the movable connecting plate 303, and the rear side of the cleaning hairbrush 305 is contacted with the front surface of the embedded filter screen 2.
The front surfaces of the two movable connecting plates 303 are fixedly connected with two sides of the rear part of the fixed connecting rod 304, and the fixed connecting rod 304 is made of iron.
The bottom of the electromagnet 301 extends into the ventilation pipeline body 1, and the L-shaped connecting plate 401 is arranged at the rear side of the fixed connecting rod 304.
Through grooves are formed in two inner sides of the L-shaped connecting plate 401, and two connecting columns 404 penetrate through the through grooves respectively.
A plurality of cleaning grooves are formed in the connecting clamping plate 405, and the cleaning grooves are fixedly connected with the outer parts of the rubber arc plates 406 respectively.
The guide arc plate 407 is fixedly connected with the movable connecting plate 303, and the restoring spring 402 is in a stretched state.
When the ventilating duct is used, when the ventilation duct body 1 is required to be ventilated, a worker firstly starts a fan connected with the outside, then the fan works to exhaust air in the ventilating duct body 1, so that dust in the air in a semiconductor workshop can be adsorbed, and the dust can be conveniently subjected to subsequent treatment and removal;
when the above work is completed, dust will be adsorbed on the outer surface of the embedded filter screen 2, at this time, the worker starts the electromagnet 301, the electromagnet 301 will fully magnetic after being started, then the fixed connecting rod 304 will attract the electromagnet 301 through its own characteristics, in the process, the fixed connecting rod 304 will continuously drive the movable connecting rod 303 to move upwards, the movable connecting rod 303 will synchronously drive the sliding connecting block 302 to slide in the sliding connecting groove in the process of moving upwards, because the movable connecting plate 303 also synchronously drives the cleaning brush 305 to slide in the process of sliding upwards, the cleaning brush 305 will synchronously clean and sweep the dust adhered on the outer surface of the embedded filter screen 2, and through the design of the L-shaped connecting plate 401, dust suppression work can be performed in the process of cleaning the outer surface of the embedded filter screen 2 by the cleaning brush 305, thus preventing bad ventilation effect caused by dust exposure to air again;
in the working process, the movable connecting plate 303 moves upwards, so that the L-shaped connecting plate 401 is synchronously driven to move upwards, in the process, the L-shaped connecting plate 401 synchronously drives the restoring spring 402, the arc-shaped connecting plate 403 and the connecting cylinder 404 to move upwards, when the top of the arc-shaped connecting plate 403 is contacted with the inside of the ventilating duct body 1, the arc-shaped connecting plate 403 is extruded and drives the restoring spring 402 to compress, the connecting cylinder 404 to move downwards, the connecting cylinder 404 synchronously drives the connecting clamping plate 405 to move downwards in the process of moving downwards, the connecting clamping plate 405 synchronously drives the rubber arc plate 406 to move downwards when moving, when the rubber arc plate 406 contacts with the cleaning brush 305, the rubber arc plate 406 automatically drops into the guide arc plate 407, so that the cleaning of the cleaning brush 305 can be achieved, the condition that the effect of the embedded filter screen 2 is poor due to the fact that a large amount of dust is adhered to the surface of the cleaning brush is prevented, and the cleaning process of manual cleaning is omitted is ensured;
after the above work is finished, the cleaning brush 305 cleans dust in a number completely, so that at the moment, the worker turns off the electromagnet 301, magnetism between the electromagnet 301 and the fixed connecting rod 304 is lost, the restoring spring 402 drives the arc-shaped connecting plate 403 and the connecting clamping plate 405 to restore in the process, the movable connecting plate 303 starts to drive the fixed connecting rod 304 to slide downwards through self weight, the fixed connecting rod 304 synchronously drives the cleaning brush 305 to slide downwards in the sliding process, the cleaning brush 305 scrapes dust scraped by the rubber arc plate 406 into the guide arc plate 407 again in the sliding process, then the connecting clamping plate 405 and the rubber arc plate 406 can carry out the work of falling compaction on dust at the top of the guide arc plate 407 through self weight, and the rubber arc plate 406 can be enabled to press dust more firmly through deformation in the extrusion process of the falling connecting clamping plate 405 so as to achieve the stable compaction work on dust, and the dust is connected together and not splashed everywhere;
after the above work is completed, when the work of cleaning the embedded filter screen 2 is needed again, the above working principle is repeated, and after the movable connecting plate 303 moves upwards, the connecting clamping plate 405 and the rubber arc plate 406 are separated from the top of the guide arc plate 407, so that the compacted dust strips automatically fall out through the slopes of the guide arc plate 407 and the discharge chute, thereby being convenient for the subsequent work of recycling dust by staff.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a semiconductor mill workshop production is with ventilation dust collector, includes air pipe body (1), its characterized in that: an embedded filter screen (2) is embedded in the front of the ventilation pipeline body (1), and a dust cleaning mechanism (3) and an auxiliary cleaning mechanism (4) are arranged in the front of the ventilation pipeline body (1);
the dust cleaning mechanism (3) comprises an electromagnet (301), the electromagnet (301) is fixedly connected to the top of the ventilating duct body (1), two sliding connecting blocks (302) are arranged on the front face of the ventilating duct body (1), movable connecting plates (303) are arranged on the front faces of the two sliding connecting blocks (302), fixed connecting rods (304) are fixedly connected to the tops of the movable connecting plates (303), and cleaning brushes (305) are fixedly connected to the rear sides of the movable connecting plates (303);
the auxiliary cleaning mechanism (4) comprises an L-shaped connecting plate (401), the L-shaped connecting plate (401) is fixedly connected to the top of the movable connecting plate (303), two restoring springs (402) are fixedly connected to the two sides of the top of the L-shaped connecting plate (401), arc-shaped connecting plates (403) are fixedly connected to the tops of the restoring springs (402), connecting columns (404) are fixedly connected to the outer portions of the arc-shaped connecting plates (403), connecting clamping plates (405) are fixedly connected between the connecting columns (404), a plurality of rubber arc plates (406) are arranged at the bottoms of the connecting clamping plates (405), and guide arc plates (407) are arranged at the bottoms of the cleaning brushes (305).
2. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: the two sides of the front surface of the ventilating duct body (1) are provided with sliding connecting grooves, and the two sliding connecting blocks (302) respectively extend into the sliding connecting grooves and are in sliding connection with the sliding connecting grooves.
3. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: the inside blown down tank that has seted up of movable connection board (303), clearance brush (305) rear side and embedded filter screen (2) openly contact.
4. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: the front faces of the two movable connecting plates (303) are fixedly connected with two sides of the rear part of the fixed connecting rod (304), and the fixed connecting rod (304) is made of iron.
5. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: the bottom of the electromagnet (301) extends into the ventilation pipeline body (1), and the L-shaped connecting plate (401) is arranged at the rear side of the fixed connecting rod (304).
6. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: through grooves are formed in two sides of the inner portion of the L-shaped connecting plate (401), and two connecting columns (404) penetrate through the two through grooves respectively.
7. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: a plurality of cleaning grooves are formed in the connecting clamping plate (405), and the cleaning grooves are fixedly connected with the outer parts of the rubber arc plates (406) respectively.
8. The ventilating and dust removing device for workshop production of a semiconductor factory according to claim 1, wherein: one side of the guide arc plate (407) is fixedly connected with one side of the movable connecting plate (303), and the restoring spring (402) is in a stretching state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310069384.1A CN116294017B (en) | 2023-02-06 | 2023-02-06 | Ventilation and dust removal device for workshop production of semiconductor factory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310069384.1A CN116294017B (en) | 2023-02-06 | 2023-02-06 | Ventilation and dust removal device for workshop production of semiconductor factory |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116294017A true CN116294017A (en) | 2023-06-23 |
| CN116294017B CN116294017B (en) | 2023-12-22 |
Family
ID=86778813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310069384.1A Active CN116294017B (en) | 2023-02-06 | 2023-02-06 | Ventilation and dust removal device for workshop production of semiconductor factory |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116294017B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2141421A1 (en) * | 2008-06-30 | 2010-01-06 | Mitsubishi Electric Corporation | Ceiling-embedded type air-conditioner with automatic filter cleaning |
| EP3587942A1 (en) * | 2018-06-27 | 2020-01-01 | Mitsubishi Heavy Industries Thermal Systems, Ltd. | Filter cleaning unit and air conditioner |
| CN111174253A (en) * | 2020-01-10 | 2020-05-19 | 刘红亮 | Oil-removing and rust-preventing range hood |
| CN111672299A (en) * | 2020-06-09 | 2020-09-18 | 李明锋 | Efficient waste gas recycling's empty device of straining of automatically cleaning |
| CN111974715A (en) * | 2020-08-28 | 2020-11-24 | 梧州无量科技有限公司 | Scavenger fan cleaning device based on principle is inhaled to magnetism |
| CN213090035U (en) * | 2020-09-10 | 2021-04-30 | 南京艾可顿环境设备有限公司 | Purifying device for constant temperature and humidity air conditioner |
| CN113280428A (en) * | 2021-05-10 | 2021-08-20 | 浙江天和建筑设计有限公司 | High-rise building is with high-efficient clean ventilation structure |
| WO2022197409A1 (en) * | 2021-03-19 | 2022-09-22 | Bissell Inc. | Air purifier |
-
2023
- 2023-02-06 CN CN202310069384.1A patent/CN116294017B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2141421A1 (en) * | 2008-06-30 | 2010-01-06 | Mitsubishi Electric Corporation | Ceiling-embedded type air-conditioner with automatic filter cleaning |
| EP3587942A1 (en) * | 2018-06-27 | 2020-01-01 | Mitsubishi Heavy Industries Thermal Systems, Ltd. | Filter cleaning unit and air conditioner |
| CN111174253A (en) * | 2020-01-10 | 2020-05-19 | 刘红亮 | Oil-removing and rust-preventing range hood |
| CN111672299A (en) * | 2020-06-09 | 2020-09-18 | 李明锋 | Efficient waste gas recycling's empty device of straining of automatically cleaning |
| CN111974715A (en) * | 2020-08-28 | 2020-11-24 | 梧州无量科技有限公司 | Scavenger fan cleaning device based on principle is inhaled to magnetism |
| CN213090035U (en) * | 2020-09-10 | 2021-04-30 | 南京艾可顿环境设备有限公司 | Purifying device for constant temperature and humidity air conditioner |
| WO2022197409A1 (en) * | 2021-03-19 | 2022-09-22 | Bissell Inc. | Air purifier |
| CN113280428A (en) * | 2021-05-10 | 2021-08-20 | 浙江天和建筑设计有限公司 | High-rise building is with high-efficient clean ventilation structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116294017B (en) | 2023-12-22 |
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Denomination of invention: A ventilation and dust removal device for production in semiconductor factory workshops Granted publication date: 20231222 Pledgee: Nantong Jiangsu rural commercial bank Limited by Share Ltd. Pledgor: Jiangsu Chenda Semiconductor Technology Co.,Ltd. Registration number: Y2024980002093 |