CN116293440A

CN116293440A - Integrated mounting seat and conveying equipment and device

Info

Publication number: CN116293440A
Application number: CN202310262065.2A
Authority: CN
Inventors: 常军; 杨亚辉; 张露
Original assignee: Hongge Semiconductor Equipment Shanghai Co ltd
Current assignee: Hongge Semiconductor Equipment Shanghai Co ltd
Priority date: 2023-03-16
Filing date: 2023-03-16
Publication date: 2023-06-23

Abstract

The embodiment of the application provides an integrated mounting seat and conveying equipment and device, and relates to the technical field of gas or conveying. The integrated installation seat comprises a base and at least two bases, wherein the upper surface of the base is provided with a guide groove, each base can be embedded into the guide groove and is in counterpoint connection with the base, the inside of each base is provided with a conveying channel, the upper surface is provided with at least one butt joint port communicated with the channel, all bases are sequentially arranged side by side along the guide groove, and the conveying channels of all bases can be sequentially connected into a complete air channel through external equipment in butt joint with the butt joint port. The integrated mounting seat, the conveying equipment and the device are modularized, the connecting structure is convenient to install quickly, the combination forms are various, and the device is suitable for conveying different gases or liquids.

Description

Integrated mounting seat and conveying equipment and device

Technical Field

The application relates to the technical field of gas or liquid conveying, in particular to an integrated mounting seat, conveying equipment and a device.

Background

The ultra-high purity special gas conveying equipment belongs to a core module of a process machine, and is responsible for conveying ultra-high purity gas (purity is greater than 99.9999%) after particulate impurities are removed into a reaction cavity of the reaction equipment according to pressure and flow required by a process, so that micro-pollution control level, pressure control precision and flow control precision of the gas conveying equipment can directly influence the yield of a final product in the reaction equipment.

At present, the domestic traditional ultra-high purity special gas conveying equipment adopts a connection and sealing mode in a VCR mode to connect all pipelines and equipment together. Although the connection form can meet the technical requirement on the leakage rate, the connection mode is various and the operation is complex; and the whole occupied area is large, so that the construction investment and the running cost are increased.

Disclosure of Invention

The embodiment of the application aims to provide an integrated mounting seat, conveying equipment and device, which are modularized in connection structure, convenient to install quickly, various in combination form and suitable for different conveying requirements of gas or liquid; the integration degree is high, and the occupied area is small.

In a first aspect, embodiments of the present application provide an integrated mount, comprising:

the upper surface of the base is provided with a guide groove;

at least two bases, every base all can imbed in the guide slot, and counterpoint with the base and be connected, the inside of every base has conveying channel, and the upper surface is provided with at least one interface of counterpointing with the passageway intercommunication, all bases set up side by side in proper order along the guide slot, and the conveying channel of all bases can be through the external equipment with interface butt joint connect gradually into a complete air flue.

In the implementation process, various treatments (such as starting and stopping of air supply, air pressure, flow, adjustment of microparticles and the like) are usually needed in the ultra-high-purity special gas conveying process, so that the gases in the conveying process are needed to be treated through various external devices, the installation of various external devices can be realized by utilizing the integrated installation seat of the ultra-high-purity special gas conveying device, the ultra-high-purity gas conveying and treatment are realized, the ultra-high-purity special gas conveying requirement is met, and the conveying requirement of liquid can also be met. Specifically, the line type installation of different bases can be realized to the guide slot on the base, can also realize through the base that external equipment installs on the base, realizes the inside intercommunication of base and external equipment through the interface of base simultaneously, and this application is convenient for install fast with connection structure modularization, and whole integrated level is high, and area is little. The connection structure is modularized, the combination forms are various, and the gas or liquid can be conveyed and processed as long as conveying channels of all bases and external equipment are sequentially connected into a complete channel (air channel or liquid channel), so that different conveying requirements of the gas or liquid are met.

In one possible implementation, each base is selected from one of three structures:

a. the two ports of the conveying channel of the base penetrate through the upper surface and one side surface of the base, and the ports on the upper surface are butt joints;

b. two ports of the conveying channel of the base are positioned at two positions on the upper surface of the base, and the two ports positioned on the upper surface are butt-joint ports;

c. one end opening of the conveying channel of the base penetrates through one side surface of the base or two end openings penetrate through the opposite side surface of the base, and the upper surface is further provided with an opposite interface communicated with the conveying channel.

In the implementation process, the structure of the base is designed into three types, and the standardized base is utilized to meet the butt joint requirements of different external devices, so that different conveying requirements of gas or liquid are realized. Specifically, the base of the structure a can realize that gas or liquid is conveyed into external equipment in butt joint with a butt joint port from a source or is conveyed into final reaction equipment from the external equipment in butt joint with the butt joint port; the base of the structure b can realize that gas or liquid enters the external equipment which is in butt joint with the other butt joint from the external equipment which is in butt joint with the one butt joint; the base of the structure c realizes that different gases or liquids are conveyed into external equipment which is in butt joint with the butt joint under the condition that the precursors of the original gas or liquid conveying paths are not changed.

In one possible implementation, the bottom surface of the base is provided with a positioning hole, and the bottom surface of the guide groove is provided with a positioning pin matched with the positioning hole;

and/or the bottom surface of the base is provided with a countersunk hole for positioning.

In the implementation process, the positioning block of the base and the countersunk holes of the guide groove are mutually and correspondingly arranged together, so that the base is positioned and installed on the guide groove, and the installation is simple and convenient; the counter sunk hole on the bottom surface of the base is positioned and installed at a preset position by the base.

In one possible implementation, the base is flush with the upper surface of the base when in place.

In the implementation process, after the external equipment is fixed on the flush surface of the base and the base, the butt joint of the external equipment and the butt joint of the base is easy to realize, and meanwhile, the base can be fixed through the external equipment.

In one possible implementation, the base has a heating function.

In the realization process, the heating requirement of gas or liquid in the conveying process is met.

In a second aspect, an embodiment of the present application provides a conveying device, which includes at least one external device, and an integrated mounting seat provided in the first aspect, wherein an internal channel is formed inside each external device, two ends of the internal channel are located at different positions of a bottom surface of the external device to form an external port, the external device is fixedly mounted on a base, two external ports of the external device are respectively in butt joint with a butt joint interface of two bases below the external device, and conveying channels of all the bases are connected with the internal channels of all the external devices to form a complete air channel.

In the implementation process, the bases and the external devices are in butt joint, and the internal channel and the conveying channel are connected into a complete channel, so that the conveying of gas or liquid is realized, and the gas or liquid can be correspondingly processed through the external devices in sequence. The base and the external equipment are modularized, so that the rapid installation is convenient, the combination forms are various, and the device is suitable for different conveying requirements of gas or liquid; the integration degree is high, and the occupied area is small.

In one possible implementation, the external device and the base are respectively provided with a threaded hole, and the external device and the base are fixed together through bolts (the bolts need special treatment to prevent repeated disassembly and assembly from being blocked).

In the implementation process, the external equipment is firmly connected with the base, and the base between the external equipment and the base is fixed.

In one possible implementation, a gasket is provided between the external port of the external device and the docked docking port.

In the implementation process, the tightness of the gas or liquid conveying process is ensured.

In a third aspect, embodiments of the present application provide a conveying device, which includes a plurality of conveying apparatuses provided in the second aspect, bases of all the conveying apparatuses are arranged in parallel, and conveying channels of two bases on adjacent bases are communicated together.

In the implementation process, mixed transportation of different gases or liquids can be realized through different transportation equipment.

In one possible implementation, the structure of two bases on adjacent bases is: one port of the conveying channel of the base penetrates through one side surface of the base or two ports penetrate through the opposite side surfaces of the base, the upper surface is additionally provided with an opposite port communicated with the conveying channel, the opposite ports of the two bases on the side surfaces are in butt joint to realize the communication of the conveying channel, and the opposite port of each base is communicated with the internal channel of an external device above the opposite port.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a conveying apparatus according to an embodiment of the present application;

FIG. 2 is a schematic view of the integrated mounting base of FIG. 1;

FIG. 3 is a schematic view of the base of FIG. 1;

FIG. 4 is a schematic view of the structure of FIG. 3 from another perspective;

FIG. 5 is a schematic view of the first base in FIG. 1;

FIG. 6 is a schematic view of the structure of FIG. 5 from another perspective;

FIG. 7 is a schematic view of the second base in FIG. 1;

FIG. 8 is a schematic view of the structure of FIG. 7 from another perspective;

FIG. 9 is a schematic view of the third base in FIG. 1;

fig. 10 is a schematic view of the structure of fig. 9 from another view angle.

Icon: 110-a base; 111-a guide slot; 112-locating pins; 113-a threaded hole; 114-countersink; 121-a first base; 122-a first delivery channel; 123-pair interface; 124-a second base; 125-a second delivery channel; 126-a third base; 127-third delivery channel; 131-a first external device; 132-a second external device; 133-a third external device; 134-fourth external device; 135-a fifth external device; 136-a sixth external device; 137-seventh external device.

Detailed Description

The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Accordingly, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present application, it should be noted that, the azimuth or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship in which the product of the application is conventionally put in use, are merely for convenience of describing the present application and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

In the description of the present application, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

Referring to fig. 1, 2, 3 and 4, the gas conveying device provided in this embodiment includes at least one external device and an integrated mounting seat, the external devices are sequentially mounted on the integrated mounting seat, an internal channel is provided in each external device, the integrated mounting seat provides a conveying channel, and the conveying channel connects the internal channels of the external devices to form a complete air channel. Specifically, the integrated mounting base comprises a base 110 and at least two bases, and the upper surface of the base 110 is provided with a guide groove 111; each base can be embedded into the guide groove 111 and is in counterpoint connection with the base 110, a conveying channel is arranged in each base, at least one butt joint opening 123 communicated with the channel is arranged on the upper surface of each base, and all the bases are sequentially arranged side by side along the guide groove 111; the two ends of the internal channel of each external device are positioned at different positions of the bottom surface of the external device to form external ports, the external device is fixedly arranged on the base 110, the two external ports of the internal channel of the external device are respectively butted with the butt joint ports 123 of the two bases below the external device, and the conveying channels of all the bases are connected with the internal channels of all the external devices to form a complete air channel.

Referring to fig. 5-10 in combination, the present application provides a standardized design for the structure of the base, wherein each base structure is selected from one of the following three structures:

the first base 121 and two ports of the first conveying channel 122 of the base penetrate through the upper surface and one side of the base, and the ports on the upper surface are the butt joint ports 123;

the second pedestal 124 and the two ports of the second conveying channel 125 of the pedestal are positioned at two positions on the upper surface of the pedestal, and the two ports positioned on the upper surface are the butt joint ports 123;

the third base 126 and a port of the third conveying channel 127 of the base penetrate through a side surface of the base or two ports penetrate through an opposite side surface of the base, and a butt joint port 123 is further arranged on the upper surface and communicated with the third conveying channel 127.

The base is simple in model and few in variety, and other types of bases can be developed as required.

The external equipment is also subjected to standardized design, so that the external equipment can be quickly installed on the base 110 and is in butt joint communication with the butt joint interface 123 of the base while different functions are met.

Illustratively, the configuration of the external device is selected from one of the following:

first external device 131: the manual two-way shutoff valve is internally provided with a bent internal channel for gas circulation, two ends of the internal channel are positioned at different positions on the bottom surface of the valve and serve as two external ports, and the valve is opened for gas circulation supply and closed for gas supply;

the second external device 132: the pneumatic two-way shut-off valve is internally provided with a bent internal channel, the internal channel is used for gas circulation, two ends of the internal channel are positioned at different positions of the bottom surface of the valve to serve as two external ports, and the valve is opened for gas circulation supply and closed for gas supply.

Third external device 133: the pneumatic three-way shutoff valve is internally provided with a bent internal channel, the internal channel is used for gas circulation, two ends of the internal channel are positioned at different positions on the bottom surface of the valve and used as two external ports, the valve is opened for gas circulation supply, and the gas supply is stopped after the valve is closed; the middle position of the bottom surface is also provided with another external port which is communicated with the gas flow passage, and the purge gas flows in after the valve is opened.

Fourth interfacing device 134: the pressure reducing valve is internally provided with a bent internal channel, the internal channel is used for gas circulation, two ends of the internal channel are positioned at different positions of the bottom surface of the valve to serve as two external ports, and the valve is used for adjusting the gas supply pressure of the rear end (the external port for gas outflow).

Fifth external device 135: the plug is used for reserving an installation position, and is convenient for later-stage additional installation of components such as a pressure sensor.

Sixth external device 136: the mass flowmeter is provided with a bent internal channel inside, the internal channel is used for gas circulation, two ends of the internal channel are located at different positions of the bottom surface of the valve to serve as two external ports, and the flowmeter is used for accurately controlling gas supply flow.

Seventh external device 137: the gas filter is internally provided with a bent internal channel, the internal channel is used for gas circulation, two ends of the internal channel are positioned at different positions of the bottom surface of the valve and serve as two external ports, and the filter is used for filtering impurities such as particles of circulated gas.

As an implementation manner, in this embodiment, the arrangement and setting structure of the base of the gas delivery device and the external device are as follows:

the left end of the guide groove 111 of the base 110 is a gas inlet position, and the right end is a gas outlet position.

Seen from the left end to the right end of the guide groove 111, the guide groove 111 of the base 110 is provided with: the first base 121, the second base 124, the third base 126, the second base 124, the second dose, the second base 124 and the first base 121, 10 bases in total.

The base 110 is further provided with a first external device 131, a second external device 132, a third external device 133, a fourth external device 134, a fifth external device 135, a sixth external device 136, a seventh external device 137 and a second external device 132 in sequence, which are 8 external devices in total.

The external connection port at the front end of the first external connection device 131 is butted with the butt joint port 123 on the upper surface of the first base 121 below the external connection device, and the butt joint port 123 on the side surface of the first base 121 is used as a gas inlet; the external port at the rear end of the first external device 131 is communicated with the external port at the front end of the second external device 132 through the second base 124 below the external port (two butt joint ports 123 on the upper surface of the second base 124 are respectively butt joint with the external port at the rear end of the first external device 131 and the external port at the front end of the second external device 132); the external port at the rear end of the second external device 132 is communicated with the external port of the third external device 133 through the second base 124 below the external port; the external port in the middle of the third external device 133 is in butt joint with the butt joint port 123 on the upper surface of the third base 126 below the third external device 133, and the external port at the rear end of the third external device 133 is communicated with the external port at the front end of the fourth external device 134 through the second base 124 below the third external device 133; the external port at the rear end of the fourth external device 134 is communicated with the external port at the front end of the fifth external device 135 through the second base 124 below the external port; the external port at the rear end of the fifth external device 135 is communicated with the external port at the front end of the sixth external device 136 through the second base 124 below the external port; the external port at the rear end of the sixth external device 136 is communicated with the external port at the front end of the seventh external device 137 through the second base 124 below the external port; the external connection port at the rear end of the seventh external connection device 137 is communicated with the external connection port at the front end of the final second external connection device 132 through the second base 124 below the seventh external connection device, the external connection port at the rear end of the second external connection device 132 is butted with the butted joint 123 on the upper surface of the first base 121 below the second external connection device, and the butted joint 123 on the side surface of the first base 121 is used as a gas outlet, so that a complete air passage passing through the gas outlet from the gas inlet is formed.

In other embodiments, external devices can be combined and arranged according to requirements, all the external devices are communicated through the base, and finally a complete air passage is formed, so that the combined type is various and suitable for different gas conveying requirements.

The dimensional requirements of the application for each connection structure are as follows: the width of the base corresponds to the width of the guide groove 111, so that the base is embedded and installed in the guide groove 111, the widths and the heights of all bases in standardized design are the same, the installed bases are flush with the upper surface of the base 110, and the base 110 and the base are combined to form the upper surface convenient for external equipment installation.

In order to enable the base to be in quick positioning connection with the base 110, a positioning hole is formed in the edge of the bottom surface of the base, and a positioning pin 112 matched with the positioning hole is arranged on the bottom surface of the guide groove 111. To fix the base 110 in place, the bottom surface of the base 110 has a countersunk hole 114 for positioning.

In order to fix the external device to the base 110, the external device and the base 110 are respectively provided with screw holes 113, which are fixed together by bolts. A gasket is arranged between the external port of the external device and the butt joint port 123 for butt joint so as to ensure the tightness of butt joint. Various hole sites can be prefabricated on the base 110, so that different external devices can be installed according to different requirements.

In order to provide the gas delivery apparatus with a heating function, the base 110 may also be designed with heating and insulating functions: the base 110 is provided with a heating rod for heating; thermal insulation sheets are arranged on two sides of the base 110 for thermal insulation.

The specific assembly method of the gas conveying equipment comprises the following steps: the base is placed in the guide groove 111 of the base 110 according to the requirements (can be customized according to different requirements), and the positioning holes of the base are matched with the positioning pins 112 of the guide groove 111 during installation, so that the base can be positioned quickly; the washers are placed at the butt joint openings 123 on the upper surfaces of the bases and are placed in a concentric fit manner; and finally, installing the external equipment, so that an external port of the external equipment is butted with the butt joint port 123 of the base, fixing the external equipment on the base through a screw, and pressing the gasket to deform by the external equipment and the base while fastening, thereby achieving the sealing effect.

In addition, the gas conveying device provided in this embodiment includes a plurality of the gas conveying apparatuses, the bases 110 of all the gas conveying apparatuses are arranged in parallel, and conveying channels of two bases on adjacent bases 110 are communicated together. The structure of two bases on adjacent bases 110 is: one port of the conveying channel of the base penetrates through one side surface of the base or two ports penetrate through the opposite side surfaces of the base, the upper surface is additionally provided with a butt joint port 123 communicated with the conveying channel, the butt joint ports 123 of the two bases on the side surfaces are butted together to realize the communication of the first conveying channel 122, and the butt joint port of each base is communicated with the internal channel of an external device above the butt joint ports. As an implementation mode, the structure of each set of gas conveying equipment is identical, the third external equipment 133 of two adjacent sets of gas conveying equipment is communicated together through the third base 126 below the third external equipment, and other gases can be purged into the air passages of each set of gas conveying equipment through the third base 126.

To sum up, the integrated mount pad and gas delivery equipment and device of this application embodiment are with connection structure modularization, and the quick installation of being convenient for, and combination form is various, is fit for different gas delivery demands.

The foregoing is merely exemplary embodiments of the present application and is not intended to limit the scope of the present application, and various modifications and variations may be suggested to one skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An integrated mount, comprising:

the upper surface of the base is provided with a guide groove;

at least two bases, every the base homoenergetic is embedded in the guide slot, and with the base counterpoint is connected, every the inside of base has conveying channel, and the upper surface be provided with at least one with the interface of passageway intercommunication, all the base is followed the guide slot sets gradually side by side, and all the conveying channel of base can be through with the external equipment of docking is connected gradually into a complete air flue.

2. The integrated mount of claim 1, wherein each of the bases is selected from one of three structures:

a. the two ports of the conveying channel of the base penetrate through the upper surface and one side surface of the base, and the ports on the upper surface are butt-joint ports;

c. one port of the conveying channel of the base penetrates through one side surface or two ports of the base penetrates through the opposite side surface of the base, and the upper surface is further provided with an opposite port communicated with the conveying channel.

3. The integrated mount of claim 1, wherein a bottom surface of the base is provided with a locating hole, and a bottom surface of the guide slot is provided with a locating pin that mates with the locating hole;

4. The integrated mount of claim 1, wherein the base when in place is flush with an upper surface of the base.

5. The integrated mount of claim 1, wherein the base has a heating function.

6. The integrated installation seat of any one of claims 1 to 5, wherein each external device is internally provided with an internal channel, two ends of the internal channel are positioned at different positions of the bottom surface of the external device to form external ports, the external device is fixedly installed on the base, two external ports of the external device are respectively in butt joint with the butt joint ports of two bases below the external device, and the conveying channels of all the bases are connected with the internal channels of all the external devices to form a complete air channel.

7. The conveying apparatus as claimed in claim 6, wherein the external apparatus and the base are respectively provided with screw holes, and are fixed together by bolts.

8. The delivery device of claim 6, wherein a gasket is disposed between the external port of the external device and the docked docking port.

9. A conveying device, characterized in that the conveying device comprises a plurality of conveying equipment as claimed in claim 6, wherein the bases of all the conveying equipment are arranged in parallel, and conveying channels of two bases on adjacent bases are communicated together.

10. The conveyor apparatus of claim 9 wherein the two bases on adjacent bases are structured as follows: one port of the conveying channel of the base penetrates through one side surface of the base or two ports penetrate through the opposite side surface of the base, the upper surface is additionally provided with a butt joint port communicated with the conveying channel, the butt joints of the two base on the side surfaces are in butt joint to realize the communication of the conveying channel, and each butt joint port of the base is communicated with the internal channel of an external device above the butt joint port.