CN116288666A

CN116288666A - Crystal shaking stable clamping device of single crystal furnace

Info

Publication number: CN116288666A
Application number: CN202211104885.0A
Authority: CN
Inventors: 曹建伟; 傅林坚; 朱亮; 叶钢飞; 倪军夫; 石明智; 李玉刚
Original assignee: Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Current assignee: Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Priority date: 2022-09-09
Filing date: 2022-09-09
Publication date: 2023-06-23

Abstract

The application relates to the field of single crystal furnaces, in particular to a crystal shaking stable clamping device of a single crystal furnace, which comprises: the fixture, fixture has two sets of at least, fixture is central symmetry with the axis of single crystal growing furnace and arranges, and every fixture of group all includes: the first rod is positioned in the inner cavity of the single crystal furnace and is connected to the inner wall of the single crystal furnace; the first rods are provided with clamping parts, a clamping area is formed between the clamping parts of each first rod, and the clamping area is used for accommodating the flexible shaft, so that the flexible shaft is limited by the clamping area. The technical problem that the crystal is easy to shake and fall in the drawing process is solved, and the possible technical effect of reducing the crystal to shake and fall in the drawing process is achieved.

Description

Crystal shaking stable clamping device of single crystal furnace

Technical Field

The application relates to the field of single crystal furnaces, in particular to a crystal shaking stable clamping device of a single crystal furnace.

Background

The main production method of silicon single crystal is Czochralski method, in which a piece of single crystal silicon having a desired crystal orientation is used as a seed crystal, and silicon in a silicon melt is grown on the seed crystal. The silicon single crystal is formed in a Czochralski single crystal furnace and is mainly formed by the processes of material melting, seeding, shouldering, isodiametric, ending, cooling and the like. In the forming process, crucible rotation (crucible rotation speed), crystal rotation (silicon crystal rotation speed), growth speed, temperature compensation and other technological parameters are all important factors influencing the quality of the silicon single crystal.

In the prior art, a steel wire rope is generally used for suspending seed crystals to draw crystal bars in molten liquid silicon, and as crystals shake to a certain extent in the rotating process, the possibility of falling of the crystals in the drawing process can be increased along with the increase of the rotating speed of the crystals in a single crystal furnace, so that equipment damage and even casualties are caused.

Therefore, the technical problems of the prior art are: the crystal is easy to shake and fall in the drawing process.

Disclosure of Invention

The utility model provides a single crystal growing furnace crystal shakes stable clamping device has solved the crystal and has rocked the technical problem who falls easily in drawing process, reaches the possible technical effect that reduces the crystal and rock easily in drawing process and fall.

The utility model provides a single crystal growing furnace brilliant clamping device that shakes adopts following technical scheme:

a crystal shaking stable clamping device of a single crystal furnace comprises: the fixture, fixture has two sets of at least, fixture is central symmetry with the axis of single crystal growing furnace and arranges, and every fixture of group all includes: the first rod is positioned in the inner cavity of the single crystal furnace and is connected to the inner wall of the single crystal furnace; the first rods are provided with clamping parts, a clamping area is formed between the clamping parts of each first rod, and the clamping area is used for accommodating the flexible shafts or crystals, so that the flexible shafts or crystals are limited by the clamping areas.

Preferably, the clamping mechanism has at least three sets such that the first bars of each set of clamping mechanisms form a closed clamping zone therebetween.

Preferably, the first rod is rotatably connected to an inner wall of the single crystal furnace, and each group of clamping mechanisms further comprises: and the driving assembly is connected with and acts on the first rods, and drives the first rods to rotate so that the clamping areas are formed between the clamping parts by the first rods.

Preferably, the driving assembly includes: the second rod is positioned in the inner cavity of the single crystal furnace, the first end of the second rod is rotationally connected to the first rod, the second end of the second rod is slidingly connected to the inner wall of the single crystal furnace, and the second rod has a rotational degree of freedom relative to the inner wall of the single crystal furnace; the driving piece is connected with and acts on the second rod, so that the second end of the second rod slides, and the first rod is driven to horizontally rotate.

Preferably, the driving member includes: the first magnet is positioned in the inner cavity of the single crystal furnace, connected to the second end of the second rod, and slidingly connected to the inner wall of the single crystal furnace; the second magnet is positioned outside the single crystal furnace, the height of the second magnet is flush with that of the first magnet, the second magnet is used for being in magnetic attraction fit with the first magnet, and the second magnet is connected to the outside of the single crystal furnace in a sliding manner; and the first driving part is fixedly connected to the outside of the single crystal furnace and is used for driving the second magnet to horizontally move.

Preferably, the first driving unit includes: the rotary cylinder is fixedly connected to the outside of the single crystal furnace, and the output end of the rotary cylinder is vertically arranged; the gear is fixedly connected to the output end of the rotary cylinder; and the rack is in a circular arc shape corresponding to the sliding track of the second magnet, the rack is fixedly connected to the second magnet, and the rack is meshed with the gear, so that the first magnet is driven by the rotary cylinder to horizontally slide.

Preferably, the inner wall of the single crystal furnace is fixedly connected with a first extension plate, the first extension plate is annular, and the first extension plate is rotationally connected with the first rod; the first extension plate is provided with a first guide groove, and the first magnet is slidably connected in the first guide groove.

Preferably, the outer ring of the single crystal furnace is fixedly connected with a second extension plate, the second extension plate is annular, a second guide groove is formed in the second extension plate, and the second magnet is slidably connected in the second guide groove.

Preferably, the first guide groove and the second guide groove are each arranged in a circular arc shape.

Preferably, the clamping part of the first rod is provided with a circular arc-shaped notch, the notches on the clamping parts of the plurality of first rods form the clamping area, and the edge of the clamping area is circular arc-shaped.

Preferably, the driving assembly further comprises: the second driving part is fixedly connected to the outside of the single crystal furnace and is used for driving the second magnet to drive the first magnet to lift.

Preferably, the second driving unit includes: the output rod of the direct pushing cylinder is vertically arranged and fixedly connected with the second magnet, so that the second magnet is driven by the cylinder to vertically lift.

In summary, the present application includes at least one of the following beneficial technical effects:

1. according to the crystal pulling device, the clamping mechanisms are arranged in the single crystal furnace in a central symmetry mode, the clamping areas are formed between the clamping mechanisms, the flexible shaft is limited in the clamping areas, the movement range of the flexible shaft is limited, the shaking amplitude of the flexible shaft and the crystal bar connected to the bottom of the flexible shaft is reduced, the technical problem that crystals are easy to shake and fall in the pulling process is solved, and the possible technical effect that the crystals shake and fall easily in the pulling process is reduced is achieved.

2. The crystal clamping device can be used for clamping the crystal in the auxiliary furnace chamber after the crystal pulling is completed, the clamping mechanism is folded inwards to stably clamp the crystal, the crystal is directly acted on the outer wall of the crystal, and the crystal shaking is reduced.

3. The restriction stabilizing effect on the flexible shaft is improved through the clamping mechanisms with multiple groups of central symmetry, and meanwhile, the three-rod balancing principle and the principle of the central symmetry structure are utilized, so that each clamping mechanism has small and uniform interference on fluid, a stable three-rod mutual supporting plane is built, turbulence is avoided due to gas flow, and the problem of crystal shaking in the crystal pulling process of the single crystal furnace is further solved.

4. The first rod is controlled to rotate in a magnetic attraction driving mode inside and outside the single crystal furnace, the original structure of the single crystal furnace is not required to be damaged, the air tightness effect of the single crystal furnace is improved, and meanwhile, the processing cost is reduced.

Drawings

FIG. 1 is a schematic view of a clamping device as described herein;

FIG. 2 is a front cross-sectional view of FIG. 1;

FIG. 3 is a first top view of the clamping device of the present application;

FIG. 4 is a second top view of the clamping device of the present application;

FIG. 5 is an enlarged view of A in FIG. 4;

FIG. 6 is an external schematic view of a drive assembly of the clamping device of the present application;

FIG. 7 is an internal schematic view of a drive assembly of the clamping device of the present application;

fig. 8 is a schematic view of a guide plate of the clamping device described in the present application.

Reference numerals illustrate: 100. an auxiliary furnace chamber; 110. a first extension plate; 111. a guide plate; 112. a first guide groove; 120. a second extension plate; 121. a second guide groove; 200. a clamping mechanism; 210. a first lever; 211. a clamping part; 212. a clamping area; 213. a notch; 220. a drive assembly; 221. a second lever; 2211. a first end; 2212. a second end; 222. a first driving section; 2221. a first seat; 2222. a rotary cylinder; 2223. a gear; 2224. a rack; 2225. a first magnet; 2226. and a second magnet.

Detailed Description

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated. In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or refer to an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

The embodiment of the application provides a single crystal furnace crystal shaking stable clamping device, solves the technical problem that crystals are easy to shake and fall in the drawing process, and achieves the technical effect of reducing the possibility that crystals are easy to shake and fall in the drawing process.

In order to better understand the above technical solutions, the following detailed description will refer to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.

The principle of the single crystal furnace is that after a seed crystal is dotted with molten silicon material, the seed crystal is pulled and driven to rotate through a flexible shaft, and the silicon material is adsorbed on the seed crystal to form a crystal bar.

Therefore, in order to solve the shaking problem in the crystal pulling process, centering clamping of the tungsten wire rope is one of key technologies for effectively solving the shaking problem. In the research and development process of the applicant, in the technology of stabilizing the crystal shaking problem by clamping the tungsten wire rope in a non-contact manner, the position of the tungsten wire rope is clamped by a clamp which extends out of the cantilever, and in the position of extending out of the cantilever, the cantilever blocks air flow, so that air flow disturbance is easily formed near the clamping, the tungsten wire rope is disturbed, and further the crystal shaking is aggravated; in addition, when the chuck fails, the problem associated with the tungsten wire rope is easily caused, so that the crystal bar is severely rocked or even broken, and safety risks and economic losses are generated. Thus, in order to solve the problem of crystal shaking during the crystal pulling process, a stable and effective clamping device is needed.

The utility model provides a crystal shaking stabilizing and clamping device of a single crystal furnace, as shown in fig. 1, is used for clamping a flexible shaft or a crystal of the single crystal furnace, and comprises a clamping mechanism 200, wherein the clamping mechanism 200 is arranged on the single crystal furnace, specifically, the clamping mechanism 200 is connected in a secondary furnace chamber 100 of the single crystal furnace, the clamping mechanism 200 is provided with a plurality of groups, and the groups of clamping mechanisms 200 are arranged in a central symmetry manner with the central axis of the secondary furnace chamber 100; each group of clamping mechanisms 200 comprises a first rod 210 and a driving assembly 220, wherein the first rod 210 is used for limiting a flexible shaft or a crystal; the driving assembly 220 is used to drive the first rod 210 to rotate.

As shown in fig. 2 to 5, the first rod 210 has a clamping portion 211 thereon, and the clamping portion 211 acts on and clamps the flexible shaft or crystal; in one embodiment, the clamping mechanism 200 has at least two groups, taking two groups of clamping mechanisms 200 as an example, the two groups of clamping mechanisms 200 are arranged in central symmetry with the central axis of the auxiliary furnace chamber 100, the clamping portions 211 on the first rods 210 of the two groups of clamping mechanisms 200 are parallel to each other, the two groups of clamping portions 211 are clamped on the flexible shaft, an opposite open clamping area 212 is formed between the two groups of clamping portions 211, and the flexible shaft is limited between the two clamping portions 211 and is accommodated in the clamping area 212, so as to reduce the shake of the flexible shaft.

In other embodiments, the clamping mechanisms 200 have at least three groups, taking three groups of clamping mechanisms 200 as an example, the three groups of clamping mechanisms 200 are arranged symmetrically with respect to the central axis of the auxiliary furnace chamber 100; the clamping portions 211 on the first rods 210 of the three groups of clamping mechanisms 200 are in contact connection with adjacent ones, the three groups of clamping portions 211 are clamped on the flexible shaft, a closed clamping area 212 is formed among the three groups of clamping portions 211, and the flexible shaft is limited among the three clamping portions 211 and is accommodated in the clamping area 212, so that shaking of the flexible shaft is reduced. Preferably, the number of the clamping mechanisms 200 in the present embodiment is three as an example.

It should be noted that, as shown in fig. 2, an annular first extension plate 110 is disposed in the auxiliary furnace chamber 100, the first extension plate 110 is horizontally disposed, and the first extension plate 110 is fixed on an inner ring of the auxiliary furnace chamber 100; the outer side of the auxiliary furnace chamber 100 is provided with an annular second extension plate 120, the second extension plate 120 is horizontally arranged, and the second extension plate 120 is fixedly connected to the outer ring of the auxiliary furnace chamber 100; wherein the first extension panel 110 and the second extension panel 120 are located at the same height.

The first rod 210, as shown in fig. 2-5, the first rod 210 is used for flexible shaft restraint. The first rod 210 is located inside the auxiliary furnace chamber 100, specifically, the first rod 210 is connected to the inner wall of the auxiliary furnace chamber 100, the first rod 210 is horizontally arranged, wherein the first rod 210 of each clamping mechanism 200 is located on the same horizontal plane, in one embodiment, the first rod 210 is arranged in a linear shape, the first rod 210 and the auxiliary furnace chamber 100 are eccentrically arranged, specifically, one end of the first rod 210 is connected to the inner wall of the auxiliary furnace chamber 100, specifically, the first rod 210 can be connected to the first extension plate 110, and a non-perpendicular included angle is formed between the tangent line of the connection point of the first rod 210 and the auxiliary furnace chamber 100, so that the other end of the first rod 210 extends to the inner cavity of the auxiliary furnace chamber 100 and does not pass through the central axis of the auxiliary furnace chamber 100; further, the first rods 210 are provided with clamping portions 211 at one end near the central axis of the auxiliary furnace chamber 100, the three groups of clamping mechanisms 200 are arranged in a central symmetry manner by the inclined arrangement of the first rods 210, in two adjacent first rods 210, the end portion of one clamping portion 211 is abutted against the other first rod 210, and the three first rods 210 are matched with each other, so that the clamping portions 211 on the first rods 210 of the three clamping mechanisms 200 form a closed triangular structure, namely a clamping area 212, the clamping area 212 is positioned on the central axis of the single crystal furnace (or the center of the clamping area 212 is coaxial with the central axis of the single crystal furnace), the clamping area 212 is used for accommodating a flexible shaft, and the flexible shaft is limited in the clamping area 212 in the process of pulling the crystal, thereby limiting the flexible shaft from shaking.

In other embodiments, as shown in fig. 4, the first rods 210 may be arranged in a circular arc shape, and a closed triangle structure can be formed by two-to-two matching of three circular arc-shaped first rods 210, so that the three first rods 210 are matched two by two, which is different from the above-mentioned method only in that the edge of the triangle structure is circular arc-shaped, the clamping area 212 is located on the central axis of the single crystal furnace (or the center of the clamping area 212 is coaxial with the central axis of the single crystal furnace), the clamping area 212 is used for accommodating the flexible shaft, and the flexible shaft is limited in the clamping area 212 during the crystal pulling process, thereby playing a role of limiting the shake of the flexible shaft.

Further, in order to improve the clamping and limiting effect on the flexible shaft, as shown in fig. 5, a circular arc-shaped notch 213 is formed in the clamping portion 211 of the first rod 210, and the opening direction of the notch 213 is toward the center of the auxiliary furnace chamber 100, so that circular clamping is formed between the first rods 210 of the three groups of clamping mechanisms 200.

It will be appreciated that, regarding the connection between the first rods 210 and the auxiliary furnace chamber 100, as shown in fig. 6 and 7, in one embodiment, the first rods 210 are fixedly connected to the first extension plate 110 of the auxiliary furnace chamber 100, so that a clamping area 212 with an unadjustable size is formed between the three first rods 210, and the flexible shaft and the seed crystal need to pass through the clamping area 212 before pulling, and then pulling is performed, so that after gradually elongating the ingot, there may be interference between the top of the ingot and the first rods 210, and therefore, in order to obtain an ingot with a longer length, preferably, the first rods 210 are movably connected to the first extension plate 110 of the auxiliary furnace chamber 100; in other embodiments, the first rod 210 is rotatably connected to the inner wall of the auxiliary furnace chamber 100, specifically, the first rod 210 is horizontally arranged, the first rod 210 is horizontally rotatably connected to the inner wall of the auxiliary furnace chamber 100, and the first rod 210 is driven by the driving component 220 to horizontally rotate, that is, the first rod 210 horizontally turns to the center axis of the auxiliary furnace chamber 100 to approach or separate from the center axis of the auxiliary furnace chamber 100, so as to form the clamping area 212 or cancel the clamping area 212; further, in order to reduce the rotational wear of the first extension plate 110, a guide plate 111 having a circular arc shape is fixedly connected to the first extension plate 110, and one end of the first rod 210 near the inner wall of the auxiliary furnace chamber 100 is rotatably connected to the guide plate 111 through a rotation shaft.

The driving assembly 220, as shown in fig. 6 and 7, the driving assembly 220 is used to drive the first rod 210 to rotate. The driving assembly 220 drives the first bars 210 to horizontally rotate, thereby forming clamping areas 212 between the first bars 210 of the three sets of clamping mechanisms 200; the driving assembly 220 includes a second lever 221 and a driving member, the second lever 221 being connected between the driving member and the first lever 210, for acting as a transmission member for driving the first lever 210; the driving member is used for driving the second rod 221 to move so as to drive the first rod 210 to rotate; the second rod 221 is located in the inner cavity of the auxiliary furnace chamber 100, the second rod 221 is arranged in a straight line or in a circular arc shape, the second rod 221 is provided with a first end 2211 and a second end 2212, the first end 2211 and the second end 2212 are respectively two ends of the second rod 221, the first end 2211 of the second rod 221 is hinged on the first rod 210 through a rotating shaft, the second end 2212 of the second rod 221 is slidably connected on the inner wall of the auxiliary furnace chamber 100, specifically, the second end 2212 of the second rod 221 is slidably connected on the guide plate 111 located on the first extension plate 110, and the connection relationship between the second rod 221 and the guide plate 111 is specifically as follows: the guide plate 111 is provided with a first guide groove 112 with a circular arc shape, of course, the first guide groove 112 can also be directly formed on the first extension plate 110, the first guide groove 112 is in the same circular arc shape as the guide plate 111, the second end 2212 of the second rod 221 is rotationally connected with a sliding block, the sliding block is slidingly connected in the first guide groove 112, so that the second end 2212 of the second rod 221 can slide along the first guide groove 112 in the first guide groove 112, and the second end 2212 of the second rod 221 can also rotate while sliding, in one embodiment, the setting direction of the first guide groove 112 can also be in a straight line arrangement; thus, the first end 2211 of the second rod 221 is hinged to the first rod 210, the second end 2212 of the second rod 221 is slidingly connected to the first guide groove 112 through the sliding block, and the driving member slides in the first guide groove 112 by driving the second end 2212 of the second rod 221, so that the included angle between the second rod 221 and the auxiliary furnace chamber 100 is changed, and the first end 2211 of the second rod 221 pulls the first rod 210 to rotate towards the inner wall of the auxiliary furnace chamber 100 or towards the center of the auxiliary furnace chamber 100.

The driving member, as shown in fig. 6-8, is used to drive the second rod 221 to move so as to rotate the first rod 210. The drive comprises a first magnet 2225, a second magnet 2226 and a first drive part 222, wherein the first magnet 2225 is located in the inner cavity of the secondary oven chamber 100, and the second magnet 2226 and the first drive part 222 are located outside the secondary oven chamber 100. The first magnet 2225 and the second magnet 2226 are magnets that are magnetically coupled to each other, the first magnet 2225 is connected to the second end 2212 of the second rod 221, and in one embodiment, the slider may be used as the first magnet 2225, that is, the second end 2212 of the second rod 221 is slidingly connected to the first guide groove 112 through the second magnet 2226; the second magnet 2226 is located outside the auxiliary furnace chamber 100, the height of the second magnet 2226 is flush with the height of the first magnet, so that the second magnet 2226 can form a magnetic attraction fit with the first magnet 2225, wherein the second magnet 2226 is slidingly connected to the second extension plate 120, it is worth noting that the second extension plate 120 is provided with a second guide groove 121, the second guide groove 121 is in a ring shape coaxial with the second extension plate 120, and the second magnet 2226 is slidingly connected in the second guide groove 121; the first driving part 222 is used for controlling the horizontal sliding of the second magnet 2226; in this way, the second magnet 2226 is magnetically engaged with the first magnet 2225, and during the sliding process of the second magnet 2226 along the second guide groove 121, the first magnet 2225 slides along the first guide groove 112 inside the auxiliary furnace chamber 100, so that the included angle between the second rod 221 and the auxiliary furnace chamber 100 changes, and the first end 2211 of the second rod 221 pulls the first rod 210 to rotate toward the inner wall of the auxiliary furnace chamber 100 or toward the center of the auxiliary furnace chamber 100.

The first driving part 222, as shown in fig. 6 and 7, the first driving part 222 is used to control the horizontal slip of the second magnet 2226. The first driving part 222 is located outside the auxiliary furnace chamber 100, specifically, the first driving part 222 is located above the second magnet 2226, the first driving part 222 drives the second magnet 2226 to slide in a downward transmission manner, the first driving part 222 comprises a first seat 2221, a rotary cylinder 2222, a gear 2223 and a rack 2224, the first seat 2221 is located above the second magnet 2226, and the first seat 2221 is fixedly connected to the outer wall of the auxiliary furnace chamber 100; the rotary cylinder 2222 is fixedly connected below the first seat 2221, and the output end of the rotary cylinder 2222 is vertically arranged; the gear 2223 is fixedly connected to the output end of the rotary cylinder 2222, such that the gear 2223 is driven to rotate by the rotary cylinder 2222; the rack 2224 is in a circular arc shape corresponding to the sliding track of the second magnet 2226, namely, the circular arc where the rack 2224 is positioned is coaxially arranged with the second guide groove 121, the rack 2224 is fixedly connected to the second magnet 2226, and the rack 2224 is meshed with the gear 2223; under the driving of the rotary cylinder 2222, the rotary cylinder 2222 drives the gear 2223 to rotate, and the gear 2223 drives the rack 2224 to drive, so that the second magnet 2226 slides in the second guide groove 121. Of course, in other embodiments, the first driving portion 222 may also be disposed below the second magnet 2226, and the first driving portion 222 drives the second magnet 2226 to slide in an upward transmission manner.

In this way, the second ends 2212 of the second rods 221 are driven by the three groups of clamping mechanisms 200 through the first driving parts 222 to slide along the first expansion plates 110, so as to drive the first rods 210 to rotate in the auxiliary furnace chamber 100, the first rods 210 of each group of clamping mechanisms 200 rotate towards the center of the auxiliary furnace chamber 100, the end part of one clamping part 211 is abutted against the other first rod 210, and the three first rods 210 are matched in pairs, so that the clamping parts 211 on the first rods 210 of the three clamping mechanisms 200 form a closed clamping area 212, and the flexible shaft is limited in the clamping area 212, so that the shaking problem in the flexible shaft pulling process is reduced; the first bars 210 of each set of clamping mechanisms 200 are rotated towards the inner wall of the secondary furnace chamber 100 such that the clamping zones 212 are relieved.

Further, the driving piece further includes a second driving portion, the second driving portion is connected to the outside of the single crystal furnace, and the second driving portion is used for driving the second magnet 2226 to drive the first magnet 2225 to vertically lift.

The second driving part, not shown, is used for driving the first magnet 2225 and the second magnet 2226 to lift, and is located outside the auxiliary furnace chamber 100, specifically, the second driving part is located below the second extension part, and is connected to the outer wall of the auxiliary furnace chamber 100, and is used for acting on the second magnet 2226 upwards, so that the second magnet 2226 can lift or descend under the action of the second driving part. The second driving part comprises a second seat and a straight pushing cylinder, the second seat is positioned below the second extension plate 120 and is connected to the outer wall of the auxiliary furnace chamber 100 in a sliding horizontal sliding manner, the sliding direction and the sliding track of the second seat are the same as those of the second magnet 2226, the straight pushing cylinder is fixedly connected to the second seat, the straight pushing cylinder is vertically arranged, the output end of the straight pushing cylinder passes through the second extension plate 120 and is fixedly connected with the second magnet 2226, and it is worth to say that in order to enable the straight pushing cylinder and the second magnet 2226 to slide synchronously, an arc-shaped groove for accommodating the output end of the straight pushing cylinder is formed in the second extension plate 120; in this way, the second magnet 2226 is driven by the direct-pushing cylinder to realize lifting, the first magnet 2225 is magnetically matched with the second magnet 2226, when the direct-pushing cylinder drives the second magnet 2226 to lift, the first magnet 2225 positioned in the auxiliary furnace chamber 100 is synchronously lifted by the magnetic attraction, the first magnet 2225 is lifted to drive the second rod 221 to lift, and it is worth noting that the first magnet 2225 is lifted but not separated from the first guide groove 112, so that the second rod 221 is not separated from the first guide groove 112; the first rod 210 is rotatably connected with the guide plate 111, and the second rod 221 is lifted to drive one end of the first rod 210 away from the inner wall of the auxiliary furnace chamber 100 to be lifted upwards, so that the first rod 210 is in an inclined state as a whole, namely, is inclined upwards from one end connected with the guide plate 111 to the other end.

It can be understood that, in the process of rotating and folding the first rods 210 of the three groups of clamping mechanisms 200 towards the center of the auxiliary furnace chamber 100, under the action of the second driving part, the direct pushing cylinder drives the second magnet 2226 to lift so that the second rods 221 drive the first rods 210 to tilt upwards (the first rods 210 are not rigidly and horizontally connected with the guide plates 111 in a rotating way, and the first rods 210 have a certain longitudinal movement range), at this time, the three groups of first rods 210 form a non-contact lifting and folding state, and the three groups of first rods 210 rotate inwards until the three connecting rods are folded; the direct pushing cylinder descends to drive the second magnet 2226 to descend and drive the first magnet 2225 to descend, and the first magnet 2225 drives the second rods 221 and the first rods 210 to press down, so that the three groups of second rods 221 are mutually buckled to form a clamping area 212 of a stable and centered triangular bracket structure.

In other embodiments, the second driving portion may also be disposed above the second magnet 2226, and the direct-pushing cylinder acts downward on the second magnet 2226 to drive the second magnet 2226 to lift.

It can be understood that the three groups of clamping mechanisms can also be applied to clamping the crystal in the auxiliary furnace chamber after the crystal pulling is completed, the clamping mechanisms fold inwards to stably clamp the crystal, and the clamping mechanisms directly act on the outer wall of the crystal to reduce crystal shaking.

Working principle/steps:

first, the flexible shaft descends through the auxiliary furnace chamber 100;

next, the three groups of clamping mechanisms 200 simultaneously perform driving, in the first driving part 222 of each group of clamping mechanisms 200, the rotary cylinder 2222 drives the gear 2223 to rotate, the gear 2223 drives the rack 2224 and the second magnet 2226 to slide along the second guide groove 121, the second magnet 2226 is in magnetic attraction fit with the first magnet 2225, the first magnet 2225 slides on the first guide groove 112 in a direction away from the connection point of the first rod 210, and as the second rod 221 is hinged with the first rod 210, the first end 2211 of the second rod 221 pushes the first rod 210 to rotate in a direction approaching the center of the auxiliary furnace chamber 100 as the second end 2212 of the second rod 221 slides in the first guide groove 112;

meanwhile, the second driving part performs driving, the direct-pushing air cylinder drives the second magnet 2226 to ascend, the first magnet 2225 is driven by the ascending of the second magnet 2226, the second rod 221 is lifted to drive one end of the first rod 210 far away from the inner wall of the auxiliary furnace chamber 100 to ascend, so that the whole first rod 210 is in an inclined state, at the moment, three groups of first rods 210 form a non-contact ascending and folding state, and the three groups of first rods 210 rotate inwards until three connecting rods are folded;

finally, the direct pushing cylinder descends to drive the second magnet 2226 to descend and drive the first magnet 2225 to descend, the first magnet 2225 drives the second rod 221 and the first rod 210 to press down, so that the three groups of second rods 221 are mutually buckled to form a clamping area 212 of a stable and centered triangular bracket structure, and the flexible shaft is clamped in the clamping area 212.

The technical effects are as follows:

1. according to the crystal pulling device, the clamping mechanisms 200 are arranged in the single crystal furnace in a central symmetry mode, the clamping areas 212 are formed between the clamping mechanisms 200, the flexible shafts are limited in the clamping areas 212, the movement range of the flexible shafts is limited, accordingly, the shaking amplitude of the flexible shafts and crystal bars connected to the bottoms of the flexible shafts is reduced, the technical problem that crystals are easy to shake and fall in the pulling process is solved, and the technical effect that the crystals are easy to shake and fall in the pulling process is achieved.

3. The limiting and stabilizing effects on the flexible shafts are improved through the multiple groups of the central symmetrical clamping mechanisms 200, and meanwhile, the three-rod balancing principle and the central symmetrical structure principle are utilized, so that each clamping mechanism 200 has small and uniform fluid resistance, a stable three-rod mutual supporting plane is built, turbulence caused by gas flow is avoided, and the problem of crystal shaking in the crystal pulling process of the single crystal furnace is further solved.

4. The first rod 210 is controlled to rotate in a magnetic attraction driving mode inside and outside the single crystal furnace, the original structure of the single crystal furnace is not required to be damaged, the air tightness effect of the single crystal furnace is improved, and meanwhile, the processing cost is reduced.

While preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the application.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present application without departing from the spirit or scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims and the equivalents thereof, the present application is intended to cover such modifications and variations.

Claims

1. Crystal shaking stable clamping device of single crystal furnace, which is characterized by comprising:

the fixture (200), fixture (200) have two sets of at least, fixture (200) are central symmetry with the axis of single crystal growing furnace and are arranged, and every fixture (200) of group all includes:

a first rod (210), wherein the first rod (210) is positioned in an inner cavity of the single crystal furnace, and the first rod (210) is connected to the inner wall of the single crystal furnace;

wherein the first rods (210) are provided with clamping parts (211), a clamping area (212) is formed between the clamping parts (211) of each first rod (210), and the clamping area (212) is used for accommodating flexible shafts or crystals, so that the flexible shafts or crystals are limited by the clamping area (212).

2. A crystal stabilizing clamping device for a single crystal furnace according to claim 1, characterized in that the clamping mechanism (200) has at least three groups such that the clamping zones (212) are closed between the first bars (210) of each group of clamping mechanisms (200).

3. The crystal growth and stabilization clamping device of a single crystal furnace according to claim 1 or 2, wherein the first rod (210) is rotatably connected to an inner wall of the single crystal furnace, and each group of clamping mechanisms (200) further comprises:

-a drive assembly (220), the drive assembly (220) being connected to and acting on the first bars (210), the drive assembly (220) driving the first bars (210) in rotation such that each first bar (210) forms the clamping zone (212) between clamping portions (211).

4. A crystal growth apparatus as set forth in claim 3 wherein said drive assembly (220) comprises:

a second rod (221), wherein the second rod (221) is positioned in the inner cavity of the single crystal furnace, a first end (2211) of the second rod (221) is rotationally connected to the first rod (210), a second end (2212) of the second rod (221) is slidingly connected to the inner wall of the single crystal furnace, and the second rod (221) has a rotational degree of freedom relative to the inner wall of the single crystal furnace;

the driving piece is connected with and acts on the second rod (221) to enable the second end (2212) of the second rod (221) to slide, so that the first rod (210) is driven to horizontally rotate.

5. The crystal holding fixture of claim 4, wherein the driving member comprises:

a first magnet (2225), wherein the first magnet (2225) is positioned in the inner cavity of the single crystal furnace, the first magnet (2225) is connected to the second end (2212) of the second rod (221), and the first magnet (2225) is slidingly connected to the inner wall of the single crystal furnace;

a second magnet (2226), the second magnet (2226) being located outside the single crystal furnace, and the second magnet (2226) having a height that is flush with the height of the first magnet (2225), the second magnet (2226) being for magnetic attraction fitting with the first magnet (2225), the second magnet (2226) being slidingly connected to the outside of the single crystal furnace; and

the first driving part (222), the first driving part (222) is fixedly connected to the outside of the single crystal furnace, and the first driving part (222) is used for driving the second magnet (2226) to move horizontally.

6. The crystal growth and stabilization clamping device of single crystal furnace of claim 5, wherein the first driving portion (222) comprises:

the rotary air cylinder (2222), the rotary air cylinder (2222) is fixedly connected to the outside of the single crystal furnace, and the output end of the rotary air cylinder (2222) is vertically arranged;

a gear (2223), the gear (2223) being fixedly connected to the output end of the rotary cylinder (2222); and

the rack (2224), rack (2224) be with second magnet (2226) slide the corresponding convex of orbit, rack (2224) fixed connection in on second magnet (2226), rack (2224) with gear (2223) meshing makes first magnet (2225) receive revolving cylinder (2222) drive and horizontal slip.

7. The crystal shaking stabilizing and clamping device of the single crystal furnace according to claim 5, wherein a first extension plate (110) is fixedly connected to the inner wall of the single crystal furnace, the first extension plate (110) is annular, and the first rod (210) is rotatably connected to the first extension plate (110); the first extension plate (110) is provided with a first guide groove (112), and the first magnet (2225) is slidably connected in the first guide groove (112).

8. The crystal shaking stabilizing and clamping device of the single crystal furnace according to claim 7, wherein a second extension plate (120) is fixedly connected to an outer ring of the single crystal furnace, the second extension plate (120) is annular, a second guide groove (121) is formed in the second extension plate (120), and the second magnet (2226) is slidably connected to the second guide groove (121).

9. The crystal shaking stabilizing and clamping device of the single crystal furnace according to claim 8, wherein the first guide groove (112) and the second guide groove (121) are arranged in a circular arc shape.

10. The crystal rocking stabilization clamping device for single crystal furnaces according to any one of claims 1 or 2, characterised in that the clamping portion (211) of the first rod (210) has a circular arc-shaped notch (213), the notches (213) on the clamping portions (211) of a plurality of the first rods (210) form the clamping area (212), and the edge of the clamping area (212) is circular arc-shaped.