CN116288150A - Coating for cutter, high-wear-resistance long-service-life coated cutter applicable to wide temperature range and preparation method of high-wear-resistance long-service-life coated cutter - Google Patents
Coating for cutter, high-wear-resistance long-service-life coated cutter applicable to wide temperature range and preparation method of high-wear-resistance long-service-life coated cutter Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 66
- 239000011248 coating agent Substances 0.000 title claims abstract description 63
- 238000002360 preparation method Methods 0.000 title abstract description 11
- 238000005520 cutting process Methods 0.000 claims abstract description 45
- 238000009498 subcoating Methods 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 21
- 239000011261 inert gas Substances 0.000 claims description 18
- 239000000956 alloy Substances 0.000 claims description 15
- 229910045601 alloy Inorganic materials 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 11
- 125000004429 atom Chemical group 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 6
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 6
- 239000010410 layer Substances 0.000 abstract description 33
- 239000011247 coating layer Substances 0.000 abstract description 13
- 239000006104 solid solution Substances 0.000 abstract description 3
- 238000005728 strengthening Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 4
- 229910010037 TiAlN Inorganic materials 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
- B23B2228/105—Coatings with specified thickness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/36—Multi-layered
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention provides a coated tool with a coating layer for a tool, a high wear-resistant long-service life coating layer applicable to a wide temperature range and a preparation method thereof, wherein the coated tool comprises a substrate and a double-layer coating layer deposited on the surface of the substrate by adopting a reaction magnetron sputtering method, and the double-layer coating layer comprises a Ti coating layer of an inner layer sub-coating layer and a Ti coating layer of an outer layer sub-coating layer a Nb b Hf c W d N coating, wherein a+b+c+d=1, 0.ltoreq.a.ltoreq. 0.34,0<b≤0.34,0<c≤0.34,0<d is less than or equal to 0.34. The coated cutting tool prepared by the invention has good wear resistance and service life at the temperature of 25-800 ℃. Outer partThe layered coating has excellent comprehensive mechanical properties through the solid solution strengthening effect, and the inner Ti coating is used for improving the bonding strength of the coated cutting tool.
Description
Technical Field
The invention relates to the technical field of cutter preparation, in particular to a coated cutter with high wear resistance and long service life, which is applicable to a coating layer and a wide temperature range of the cutter, and a preparation method thereof.
Background
Modern manufacturing industry puts a series of severe demands on the machining precision and the machining surface quality of mechanical parts. The machined surfaces of high performance parts are generally required to achieve sub-nanometer level surface roughness and nanometer level flatness without surface/sub-surface damage, which is difficult to meet with conventional cutting equipment and machining tools. There is an increasing demand for high-speed high-precision dry cutting. The local temperature of the tool exceeds 1000 ℃ during high-speed dry cutting, so that the tool is required to have good high-temperature oxidation resistance and wear resistance. The hard coating deposited on the surface of the cutter can effectively prolong the service life of the cutter and improve the processing quality, and is a common cutter strengthening method.
The common coating cutters mainly comprise TiN cutters, tiAlN cutters and the like. However, the TiN coating has poor thermal stability, so that the application range of the TiN tool is greatly limited. On the one hand, tiAlN cutters are decomposed in a banner at high temperature, so that the mechanical properties of the coating are enhanced; on the other hand, it is challenged to have poor performance over a long period of time. And the TiAlN coating also has the problems of difficult regulation and control of Al content, large internal stress of the coating, low bonding strength and the like.
Therefore, there is a need to develop new high wear resistant, long life coated tools suitable for wide temperature ranges. For the alloy material, the addition of the pre-transition group metal elements such as Nb, W and the like can effectively improve the high-temperature mechanical properties of the alloy material. In the TiN system, elements such as Nb, W and the like have chemical properties similar to those of Ti, can form face-centered cubic crystal Fcc with N, and part of Ti atoms in the crystal can be replaced by adding the elements into the TiN, so that the configuration entropy of the system is increased, and the thermal stability of the system is improved. At present, no report exists on the application of a TiNbHfWN coating system in a cutter, and the invention provides a novel method for using the TiNbHfWN coating as a cutter protective coating.
Disclosure of Invention
According to the TiN coating provided by the method, the thermal stability is poor, so that the application range of the TiN cutter is greatly limited; tiAlN cutting tools are challenged by poor long-time use performance, and TiAlN coating also faces the technical problems of difficult regulation and control of Al content, large internal stress of the coating, low bonding strength and the like, so that the coated cutting tools with high wear resistance and long service life, which are applicable to the cutting tools, are provided with the coating used for the cutting tools and the preparation method thereof. The invention mainly adopts a reaction magnetron sputtering method to lead the Ti coating of the inner layer sub-coating and the Ti of the outer layer sub-coating to be a Nb b Hf c W d And depositing an N coating on the surface of the substrate to prepare the coated cutting tool.
The invention adopts the following technical means:
a coating for a cutter comprises a double-layer coating deposited on the surface of a substrate of the cutter, wherein the double-layer coating comprises an inner layer sub-coating and an outer layer sub-coating which are sequentially arranged from inside to outside, the inner layer sub-coating is a Ti coating, and the outer layer sub-coating is Ti a Nb b Hf c W d N coating, wherein a+b+c+d=1, 0.ltoreq.a.ltoreq. 0.34,0<b≤0.34,0<c≤0.34,0<d≤0.34。
Further, the outer subcoat is a single-phase face-centered cubic structure, fcc-TiN, ti, nb, hf, W, etc. atoms occupy face-centered positions in the Fcc crystal and can be replaced with each other, with N atoms occupying vertex positions in the Fcc crystal.
Further, the outer layer sub-coating is one of TiNbN, tiHfN, tiWN, tiNbHfN, tiNbWN, tiHfWN or TiNbHfWN, and the thickness of the outer layer sub-coating is 0.5-6.5 mu m.
Further, the outer subcoat is TiNbWN.
Further, the outer subcoat has a thickness of 1.5 to 3.5 μm.
Further, the inner layer sub-coating is of a single-phase close-packed hexagonal structure hcp-Ti, and the thickness of the inner layer sub-coating is 0.1-1.5 mu m.
Further, the thickness of the inner sub-coating layer is 0.2-1.0 μm.
The invention also provides a high-wear-resistance long-service-life coated cutter applicable to a wide temperature range, which comprises the coating and a substrate, wherein the coating is arranged on the substrate.
The invention also provides a preparation method of the high-wear-resistance long-service-life coated cutter applicable to the wide temperature range, wherein the method adopts a reaction magnetron sputtering method, a Ti target and an alloy target are used, and a coating with set thickness is deposited on the surface of the etched cutter matrix, so that the coated cutter is obtained; the alloy target is one of a NbW target, a NbHf target, a HfW target or a NbHfW target.
Further, the method specifically comprises the following steps:
s1, introducing inert gas into a cavity, setting the bias voltage range to be-500 to-150V, and carrying out surface etching on a cutter substrate for a set time, wherein the etching time is 2-30 min;
s2, introducing inert gas into the cavity, keeping the gas flow speed between 10 and 100sccm, keeping the vacuum degree of the cavity between 0.05 and 1.5Pa, loading direct current voltage on the Ti target with the loading power of 50 to 450W, and depositing an inner sub-coating on the substrate for 5 to 150 minutes;
s3, introducing inert gas and nitrogen into the cavity, wherein the proportion of the nitrogen is 10-85%, the total gas flow rate is kept between 10-100 sccm, the vacuum degree of the cavity is kept between 0.05-1.5 Pa, the Ti target is loaded with direct current voltage with the loading power of 50-450W, the alloy target is loaded with intermediate frequency voltage with the loading power of 50-450W, the duty ratio is 10-80%, the deposition time of the outer sub-coating is controlled to be 5-500 min;
s4, heating the substrate on which the double-layer coating is deposited to 200-600 ℃ in the cavity, and preserving heat for 10-300 min to obtain the high-wear-resistance long-service-life coated cutting tool applicable to a wide temperature range.
Compared with the prior art, the invention has the following advantages:
1. the coated cutting tool with the high wear resistance and long service life, which is applicable to the coating of the cutting tool and the wide temperature range, and the preparation method thereof, provided by the invention, have good wear resistance and service life at the temperature of between 25 and 800 ℃. The outer layer sub-coating has excellent comprehensive mechanical properties through the solid solution strengthening effect, and the inner layer Ti coating is used for improving the bonding strength of the coated cutting tool.
2. According to the coating for the cutter, the high-wear-resistance long-service-life coated cutter applicable to the wide temperature range and the preparation method of the high-wear-resistance long-service-life coated cutter, the obtained coated cutter has good thermal stability, because TiNbHfWN can form a single-phase solid solution, and Ti, nb, hf and W are metal elements with higher melting points.
3. According to the coating for the cutter, the high-wear-resistance long-service-life coated cutter applicable to the wide temperature range and the preparation method of the high-wear-resistance long-service-life coated cutter, the obtained coated cutter can ensure the quality of the machined surface of a workpiece in a long working period by protecting the cutting edge from being worn.
In conclusion, the technical scheme of the invention can solve the problem that the TiN coating in the prior art is poor in heat stability, and greatly limits the application range of the TiN cutter; tiAlN cutters are challenged by poor long-time use performance, and TiAlN coatings also face the problems of difficult regulation and control of Al content, large internal stress of the coatings, low bonding strength and the like.
Based on the reasons, the invention can be widely popularized in the fields of cutter preparation and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to the drawings without inventive effort to a person skilled in the art.
FIG. 1 is a schematic diagram of a coating structure of a coated tool with high wear resistance and long service life, which is suitable for a wide temperature range according to an embodiment of the invention.
Fig. 2 shows flank wear as a function of cutting length for coated tools prepared in accordance with one or more embodiments of the present invention.
In the figure: 1. a base; 2. an inner sub-coating; 3. and (5) an outer sub-coating layer.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present invention. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be clear that the dimensions of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
As shown in the figure, the invention provides a coated cutting tool with high wear resistance and long service life, which is applicable in a wide temperature range, and comprises a substrate and a coating deposited on the surface of the substrate by adopting a reaction magnetron sputtering method, wherein the coating is a double-layer coating and comprises the following components: ti coating of inner layer sub-coating and Ti of outer layer sub-coating a Nb b Hf c W d N coating (a+b+c+d=1, 0.ltoreq.a.ltoreq. 0.34,0)<b≤0.34,0<c≤0.34,0<d≤0.34)。
As a preferred embodiment, the outer subcoat of the double-layered coated tool is a single-phase, cube-oriented structure of Fcc-TiN, wherein atoms such as Ti, nb, hf, W occupy face-centered positions in the Fcc crystal and can be interchanged, with N atoms occupying vertex positions in the Fcc crystal.
As a preferred embodiment, the outer subcoat of the double-layered coated tool is one of TiNbN, tiHfN, tiWN, tiNbHfN, tiNbWN, tiHfWN, tiNbHfWN, preferably TiNbWN, and the outer subcoat has a thickness of 0.5 to 6.5 μm, preferably 1.5 to 3.5 μm.
As a preferred embodiment, the inner subcoat of the double-layered coated tool is a single-phase close-packed hexagonal hcp-Ti, and the thickness of the inner subcoat is 0.1-1.5. Mu.m, preferably 0.2-1.0. Mu.m.
The invention also provides a method for preparing the double-layer coated cutting tool, which comprises the following steps:
using Ti targets and alloy targets to deposit a coating with set thickness on the surface of the etched cutter matrix by adopting a reaction magnetron sputtering method, so as to obtain a coated cutter; the alloy target is one of NbW target, nbHf target, hfW target and NbHfW.
The method specifically comprises the following steps:
(1) Introducing inert gas into a cavity (not shown in the figure in the prior art), setting the bias voltage range to-500 to-150V, and carrying out surface etching on the cutter matrix for a set time, wherein the etching time is 2-30 min;
(2) Introducing inert gas into the cavity, keeping the gas flow speed between 10 and 100sccm, keeping the vacuum degree of the cavity between 0.05 and 1.5Pa, loading direct current voltage on the Ti target with the loading power of 50 to 450W, depositing an inner sub-coating on the substrate, and controlling the deposition time to be 5 to 150 minutes;
(3) Introducing inert gas and nitrogen into the cavity, wherein the proportion of the nitrogen is set to be 10-85%, the total gas flow rate is kept between 10-100 sccm, the vacuum degree of the cavity is kept between 0.05-1.5 Pa, the Ti target is loaded with direct current voltage with the loading power of 50-450W, the alloy target is loaded with intermediate frequency voltage with the loading power of 50-450W, the duty ratio is 10-80%, the deposition time of the outer sub-coating is controlled to be 5-500 min;
(4) Heating the substrate to 200-600 ℃ in the cavity, and preserving heat for 10-300 min. Thereby obtaining the coated cutting tool with high wear resistance and long service life, which is applicable to a wide temperature range.
Example 1
As shown in FIG. 1, a coated cutting tool with high wear resistance and long service life, which is applicable to a wide temperature range, comprises a substrate 1, an inner layer sub-coating 2 and an outer layer sub-coating 3.
The substrate 1 may be made of one of cemented carbide, high-speed steel, diamond, etc.
In this embodiment, the outer subcoat may be of the formula Ti a Nb b W d N represents, wherein a+b+d=1, 0.ltoreq.a.ltoreq. 0.34,0<b≤0.34,0<d is less than or equal to 0.34. The outer subcoat is of single-phase face-centered cubic crystal structure Fcc-TiN, with Ti, nb, W atoms occupying the face-centered position and N atoms occupying the apex position, and with Ti, nb, W atoms being interchangeable with each other. The thickness of the outer subcoat was designed to be 2.5 μm.
In this example, the inner subcoat is of single-phase close-packed hexagonal hcp-Ti and the thickness of the inner subcoat is 0.2. Mu.m.
The embodiment 1 of the invention relates to a method for preparing a double-layer coated cutter, which comprises the following steps:
s1: depositing a coating with set thickness on the surface of the etched cutter substrate by adopting a reaction magnetron sputtering method by using a Ti target and a NbW alloy target;
s2: introducing inert gas into the cavity, setting bias voltage to be-350V, and carrying out surface etching on the cutter matrix for a set time, wherein the etching time is 12min;
s3: introducing inert gas into the cavity, keeping the gas flow speed between 35sccm, keeping the vacuum degree of the cavity at 0.75Pa, loading direct current voltage on the Ti target with the loading power of 320W, depositing an inner layer sub-coating, and controlling the deposition time to be 23min;
s4: introducing inert gas and nitrogen into the cavity, wherein the proportion of the nitrogen is set to be 35%, the total gas flow rate is kept at 52sccm, the vacuum degree of the cavity is kept between 0.42Pa, the Ti target is loaded with direct current voltage with the loading power of 320W, the NbW alloy target is loaded with intermediate frequency voltage with the loading power of 360W, the duty ratio is 30%, the outer sub-coating is deposited, and the deposition time is controlled to be 310min;
s5: heating the substrate to 405 ℃ in the cavity, and preserving heat for 180min to obtain the coated cutter.
Example 2
In contrast to example 1, in this example, the outer subcoat may be of the formula Ti a Nb b Hf c W d N represents, wherein a+b+c+d=1, 0.ltoreq.a.ltoreq. 0.34,0<b≤0.34,0<c≤0.34,0<d is less than or equal to 0.34. The outer subcoat is of single phase face centered cubic crystal structure Fcc-TiN, ti, nb, hf, W atoms occupy face centered positions and N atoms occupy vertex positions, with Ti, nb, hf, W atoms being interchangeable. The thickness of the outer subcoat was designed to be 3.2 μm.
In this example, the inner subcoat is of single-phase close-packed hexagonal hcp-Ti and the thickness of the inner subcoat is 0.34. Mu.m.
The embodiment 2 of the invention relates to a method for preparing a double-layer coated cutter, which comprises the following steps:
s1: depositing a coating with set thickness on the surface of the etched cutter substrate by adopting a reaction magnetron sputtering method by using a Ti target and an HfNbW alloy target;
s2: introducing inert gas into the cavity, setting bias voltage to be-350V, and carrying out surface etching on the cutter matrix for a set time, wherein the etching time is 12min;
s3: introducing inert gas into the cavity, keeping the gas flow speed between 35sccm, keeping the vacuum degree of the cavity at 0.75Pa, loading direct current voltage on the Ti target with the loading power of 320W, depositing an inner layer sub-coating, and controlling the deposition time to be 23min;
s4: introducing inert gas and nitrogen into the cavity, wherein the proportion of the nitrogen is set to be 35%, the total gas flow rate is kept at 52sccm, the vacuum degree of the cavity is kept between 0.42Pa, direct current voltage is loaded on a Ti target, the loading power is 280W, intermediate frequency voltage is loaded on an HfNbW alloy target, the loading power is 405W, the duty ratio is 24%, an outer sub-coating is deposited, and the deposition time is controlled to be 285min;
s5: heating the substrate to 320 ℃ in the cavity, and preserving heat for 210min to obtain the coated cutter.
Comparative example 1
Unlike example 1 and example 2, in comparative example 1, the outer sub-coating layer may be represented by TiN of general formula, the outer sub-coating layer has a single-phase face-centered cubic crystal structure, ti atoms occupy face-centered positions, and N atoms occupy vertex positions. The thickness of the outer subcoat was designed to be 1.8 μm.
The inner layer sub-coating is of a single-phase close-packed hexagonal structure hcp-Ti, and the thickness of the inner layer sub-coating is 0.12 mu m.
Comparative example 1 a method of preparing a double coated tool according to the present invention comprises the steps of:
s1: depositing a coating with set thickness on the surface of the etched cutter substrate by adopting a reaction magnetron sputtering method by using a Ti target;
s2: introducing inert gas into the cavity, setting bias voltage to be-350V, and carrying out surface etching on the cutter matrix for a set time, wherein the etching time is 12min;
s3: introducing inert gas into the cavity, keeping the gas flow speed between 35sccm, keeping the vacuum degree of the cavity at 0.75Pa, loading direct current voltage on the Ti target with the loading power of 320W, depositing an inner layer sub-coating, and controlling the deposition time to be 23min;
s4: introducing inert gas and nitrogen into the cavity, wherein the proportion of the nitrogen is set to be 35%, the total gas flow rate is kept at 52sccm, the vacuum degree of the cavity is kept between 0.42Pa, direct current voltage is loaded on the Ti target, the loading power is 280W, the outer sub-coating is deposited, and the deposition time is controlled to be 285min;
s5: heating the substrate to 300 ℃ in the cavity, and preserving heat for 140min to obtain the coated cutter.
Table 1 shows the comparison of the surface hardness properties of the coatings prepared in example 1, example 2 and comparative example 1 at different temperatures.
Table 1 comparison of surface hardness Properties at different temperatures (in GPa)
25℃ | 300 |
600 |
800℃ | |
Example 1 | 16.8 | 12.4 | 6.8 | 8.7 |
Example 2 | 14.1 | 10.9 | 8.4 | 5.6 |
Comparative example 1 | 12.5 | 9.1 | 6.4 | 3.3 |
As can be seen from the comparison of the data in Table 1, the surface hardness of the double-coated cutting tool prepared by the embodiment of the invention is better than that of the cutting tool coating of comparative example 1 in the temperature range of 25-800 ℃, which indicates that the double-coated cutting tool provided by the invention has applicability in a wider temperature range compared with the coated cutting tool in the prior art.
The hardness detection method comprises the following steps:
the surface of the substrate was polished to a mirror surface, and after the deposition of the coating, the coating was tested using a G200 nanoindenter (MTS Co.) with a diamond Borkvich indenter (Berkovich), and the depth of indentation was controlled to 1/3 of the thickness of the coating using a continuous stiffness method. The hardness was measured at 10 different points in total and averaged as the hardness of the coating.
Fig. 2 shows the change of the wear of the cutting surface of the coated cutting tool prepared in example 1, example 2 and comparative example 1 with the cutting length compared with the uncoated cutting tool. In fig. 2, reference numeral 4 indicates that the flank wear of the uncoated tool varies with the cutting length, reference numeral 5 indicates that the flank wear of the TiN coated tool varies with the cutting length, reference numeral 6 indicates that the flank wear of the TiNbWN coated tool varies with the cutting length, and reference numeral 7 indicates that the flank wear of the TiNbHfWN coated tool varies with the cutting length.
As can be seen from comparison of FIG. 2, the wear amount of the rear tool face of the coated tool prepared by the embodiment of the invention is smaller than that of other comparison samples and uncoated tools. The longer the cutting length, the more evident this advantage is seen from a comparison of example 1 with comparative example 1. These data fully demonstrate that the double-layer coated tool provided by the present invention has a significantly improved service life over prior art coated tools.
The cutting test method is as follows:
the processing mode is as follows: continuous dry cutting;
materials: spheroidal graphite cast iron;
cutter model: CCMT 09T3 08-MF S205;
cutting conditions: cutting speed is 150m/min, feeding is 0.1mm/z, and cutting depth is 0.1mm;
the wear VB (in μm) of the tool flank after cutting different lengths was measured using an OLYMPUS SZ61 optical super depth of field microscope with a graduated scale.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (10)
1. A coating for a cutter is characterized by comprising a double-layer coating deposited on the surface of a substrate of the cutter, wherein the double-layer coating comprises an inner layer sub-coating and an outer layer sub-coating which are sequentially arranged from inside to outside, the inner layer sub-coating is a Ti coating, and the outer layer sub-coating is Ti a Nb b Hf c W d N coating, wherein a+b+c+d=1, 0.ltoreq.a.ltoreq. 0.34,0<b≤0.34,0<c≤0.34,0<d≤0.34。
2. The coating for a tool according to claim 1, wherein the outer subcoating is a single phase face centered cubic structure of Fcc-TiN, ti, nb, hf, W atoms occupy face centered positions in the Fcc crystal and can be interchanged, N atoms occupying vertex positions in the Fcc crystal.
3. The coating for a tool according to claim 1 or 2, wherein the outer subcoat is one of TiNbN, tiHfN, tiWN, tiNbHfN, tiNbWN, tiHfWN or TiNbHfWN and the outer subcoat has a thickness of 0.5-6.5 μm.
4. A coating for a tool according to claim 3, wherein the outer subcoating is TiNbWN.
5. A coating for a tool according to claim 3, wherein the outer subcoat has a thickness of 1.5 to 3.5 μm.
6. The coating for a tool according to claim 1, wherein the inner subcoating is a single phase close-packed hexagonal structure hcp-Ti, and the inner subcoating has a thickness of 0.1-1.5 μm.
7. The coating for a tool according to claim 1 or 6, wherein the inner subcoat has a thickness of 0.2 to 1.0 μm.
8. A wide temperature range applicable high wear resistant long life coated cutting tool comprising the coating of any one of claims 1 to 7, further comprising a substrate, said coating being provided on said substrate.
9. A method for preparing the high wear-resistant long-life coated cutting tool applicable to the wide temperature range as claimed in claim 8, wherein the method adopts a reaction magnetron sputtering method, a Ti target and an alloy target are used, and a coating with set thickness is deposited on the surface of the cutting tool substrate subjected to etching treatment, so that a coated cutting tool is obtained; the alloy target is one of a NbW target, a NbHf target, a HfW target or a NbHfW target.
10. The method for preparing the high-wear-resistance long-life coated cutting tool applicable to wide temperature range as claimed in claim 9, which is characterized by comprising the following steps:
s1, introducing inert gas into a cavity, setting the bias voltage range to be-500 to-150V, and carrying out surface etching on a cutter substrate for a set time, wherein the etching time is 2-30 min;
s2, introducing inert gas into the cavity, keeping the gas flow speed between 10 and 100sccm, keeping the vacuum degree of the cavity between 0.05 and 1.5Pa, loading direct current voltage on the Ti target with the loading power of 50 to 450W, and depositing an inner sub-coating on the substrate for 5 to 150 minutes;
s3, introducing inert gas and nitrogen into the cavity, wherein the proportion of the nitrogen is 10-85%, the total gas flow rate is kept between 10-100 sccm, the vacuum degree of the cavity is kept between 0.05-1.5 Pa, the Ti target is loaded with direct current voltage with the loading power of 50-450W, the alloy target is loaded with intermediate frequency voltage with the loading power of 50-450W, the duty ratio is 10-80%, the deposition time of the outer sub-coating is controlled to be 5-500 min;
s4, heating the substrate on which the double-layer coating is deposited to 200-600 ℃ in the cavity, and preserving heat for 10-300 min to obtain the high-wear-resistance long-service-life coated cutting tool applicable to a wide temperature range.
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US20120114436A1 (en) * | 2009-06-01 | 2012-05-10 | Seco Tools Ab | Nanolaminated coated cutting tool |
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CN114921754A (en) * | 2022-05-30 | 2022-08-19 | 东北大学 | High-thermal-conductivity wear-resistant high-entropy coating for cutting tool and preparation method thereof |
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US20120114436A1 (en) * | 2009-06-01 | 2012-05-10 | Seco Tools Ab | Nanolaminated coated cutting tool |
CN103586520A (en) * | 2013-10-17 | 2014-02-19 | 厦门金鹭特种合金有限公司 | Coating cutting cutter and production method thereof |
CN104805404A (en) * | 2015-04-30 | 2015-07-29 | 山东大学 | Mo-W-S-C self-lubrication coating cutter and preparation technology thereof |
CN107177829A (en) * | 2017-07-03 | 2017-09-19 | 济宁学院 | AlNbC/AlNbCN laminations composite coating layer cutter and its preparation technology |
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