CN116281979A - Graphene flaming furnace based on double cooling temperature control - Google Patents

Graphene flaming furnace based on double cooling temperature control Download PDF

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Publication number
CN116281979A
CN116281979A CN202211540728.4A CN202211540728A CN116281979A CN 116281979 A CN116281979 A CN 116281979A CN 202211540728 A CN202211540728 A CN 202211540728A CN 116281979 A CN116281979 A CN 116281979A
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layer
stainless steel
furnace body
graphene
cold water
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CN116281979B (en
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于葛亮
科思厗厓
孙正乾
唐阳
金湛
葛奇
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Wuxi Feiman Technology Co ltd
Wuxi Menuo Semiconductor Technology Co ltd
Chongqing Nuoying 2d Materials Research Institute Co ltd
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Wuxi Feiman Technology Co ltd
Wuxi Menuo Semiconductor Technology Co ltd
Chongqing Nuoying 2d Materials Research Institute Co ltd
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/184Preparation
    • C01B32/186Preparation by chemical vapour deposition [CVD]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/184Preparation

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  • Nanotechnology (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

The invention relates to the technical field of graphene growth, and discloses a graphene flame spraying furnace based on double cooling and temperature control, which comprises a furnace body supported by a bracket and graphene growth quartz cavities, wherein the left and right ports of the furnace body are both provided with closed flanges, the graphene growth quartz cavities penetrate through the furnace body through the two flanges, the two ends of the graphene growth quartz cavities are supported and positioned through positioning frames, corundum boats are arranged at the inner cavity parts of the furnace body, and copper foils are paved in the corundum boats. This graphite alkene flaming stove based on dual cooling accuse temperature is different from traditional electric stove resistance wire heating's mode, and the heat is direct effectual to be acted on the graphite alkene raw and other materials, improves the heating rate of heating of electric furnace body inner chamber, and the cooling effect is good for the stove body can reach real-time cooling, establishes the basis for blowout high temperature flaming seedling, can effectually carry out the accuse to the temperature in the stove body.

Description

Graphene flaming furnace based on double cooling temperature control
Technical Field
The invention relates to the technical field of graphene growth, in particular to a graphene flaming furnace based on double cooling and temperature control.
Background
Graphene (Graphene) is a kind of Graphene which is formed by sp 2 New materials with hybridized linked carbon atoms closely packed into a monolayer two-dimensional honeycomb lattice structure. The graphene has excellent optical, electrical and mechanical properties, has important application prospects in the aspects of material science, micro-nano processing, energy sources, biomedicine, drug delivery and the like, and is considered as a revolutionary material in the future. Common methods for producing graphene powder are a mechanical stripping method, a redox method and a SiC epitaxial growth method, and a thin film production method is a Chemical Vapor Deposition (CVD) method.
In the prior art, the electric furnace equipment is generally adopted to prepare graphene, the heating speed of a resistance wire heating mode in the electric furnace is slower, the resistance wire needs to heat the material in the inner tube of the furnace firstly, then the material in the inner tube of the furnace is heated by heat radiation, and an insulating layer is generally arranged between the furnace tube and the furnace body, more heat is accumulated in the insulating layer of the furnace body in the heating process of the resistance wire, so that the quick temperature rise of graphene raw materials is not facilitated, the temperature control precision of the electric furnace is lower, the cooling speed is low, the electric furnace is not suitable for the quick continuous expansion of graphene, after the growth of graphene is finished, a thermal field cannot quickly leave a vacuum quartz cavity, the quick cooling of the graphene material after the growth cannot be realized, and the production quality of graphene is reduced.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the invention provides a graphene flaming furnace based on double cooling and temperature control, which solves the problem that graphene prepared by traditional electric furnace equipment cannot be heated and cooled rapidly.
(II) technical scheme
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a graphite alkene flame projecting stove based on dual cooling accuse temperature, includes furnace body and graphite alkene growth quartz cavity by the support, sealed ring flanges are all installed to the left and right sides port of furnace body, and graphite alkene growth quartz cavity runs through the furnace body through two ring flanges, and graphite alkene growth quartz cavity's both ends are supported through the locating rack and are fixed a position, and graphite alkene growth quartz cavity is being located furnace body inner chamber part and is installed the corundum boat, has laid copper foil in the corundum boat, and graphite alkene growth air inlet joint and graphite alkene growth air outlet joint are installed respectively to graphite alkene growth quartz cavity's both ends mouth, and the chimney that is linked together with its inner chamber is installed at the top of furnace body.
The furnace body is composed of a first stainless steel layer, a second stainless steel layer, a third stainless steel layer and a fourth stainless steel layer from outside to inside in sequence, the inner layer and the outer layer of the furnace body are mutually fixed, the practical stability of the cooperation between structures is ensured, a cavity formed between the first stainless steel layer and the second stainless steel layer is an outer cold water layer, a cavity formed between the second stainless steel layer and the third stainless steel layer is a gas layer, a cavity formed between the third stainless steel layer and the fourth stainless steel layer is an inner cold water layer, the outer cold water layer, the gas layer and the inner cold water layer are independent cavities, the inner side wall of the fourth stainless steel layer is uniformly provided with gas spraying holes communicated with the gas layer, the gas spraying holes are communicated with the cavity of the gas layer through communicating pipes and are separated from the inner cavity of the inner cold water layer, the gas led out from the gas layer is prevented from overflowing into the inner cavity of the inner cold water layer, the stability that the cooperation was used between the guarantee structure, the bottom of furnace body has from left to right set gradually outer cold water layer leading-in connector, gas layer connects and interior cold water layer leading-in connector, outer cold water layer leading-in connector's end port is linked together with the inner chamber of outer cold water layer, gas layer connector's end port is linked together with the inner chamber of gas layer, interior cold water layer connector's end port is linked together with the inner chamber of interior cold water layer, the top of furnace body is provided with outer cold water discharge pipe and the interior cold water discharge pipe that are linked together with outer cold water layer and interior cold water layer respectively, outer cold water layer leading-in connector and interior cold water layer leading-in connector external cold water machine for cold water can leading-in outer cold water layer and interior cold water layer, the circulating water is discharged through interior cold water discharge pipe and outer cold water discharge pipe after carrying out heat transfer.
The end faces of the two sealing flanges are provided with air holes in annular arrays, the arrangement of the air holes ensures that fuel gas is thoroughly combusted in the inner cavity of the furnace body, the center positions of the two sealing flanges are provided with through holes for penetrating through the graphene growing quartz cavity, the graphene growing quartz cavity penetrates through the inner cavity of the furnace body through the through holes, an igniter for igniting the fuel gas is arranged in the air hole of one flange, and a temperature sensor for monitoring the temperature in real time is arranged in the air hole of the other flange.
Preferably, the outer cold water layer, the gas layer and the inner cold water layer which are formed by the first stainless steel layer, the second stainless steel layer, the third stainless steel layer and the fourth stainless steel layer are sealed and plugged through two sealing flanges, so that stable matching of fluid between the inner layer and the outer layer of the furnace body is ensured.
Preferably, the transverse line center line of the furnace body is coincident with the transverse center line of the graphene growing quartz cavity, so that the graphene growing quartz cavity is ensured to be heated uniformly in the furnace body.
Preferably, the bottom port of the chimney penetrates through the first stainless steel layer, the second stainless steel layer, the third stainless steel layer and the fourth stainless steel layer from top to bottom in sequence and is communicated with the combustion inner cavity of the furnace body, and after fuel gas is sprayed and combusted through the fuel gas spraying holes, generated flue gas is discharged through the chimney.
Preferably, the annular array of gas blowout hole sets up in the inner chamber of furnace body, and the inner port of gas blowout hole all faces the central line in furnace body inner chamber, and the flame that the assurance gas blowout hole sprayed out directly acts on the furnace body inner chamber, and the graphite alkene raw and other materials in the graphite alkene growth quartz cavity can even high temperature be heated and grow, effectively improves graphite alkene production quality.
Preferably, the temperature sensor adopts a contact thermocouple or an infrared sensor, and the setting of the temperature sensor can effectively monitor the heating temperature of the inner cavity of the furnace body in real time, so that relevant operators can conveniently carry out system adjustment operation.
(III) beneficial effects
The invention provides a graphene flaming furnace based on double cooling temperature control. The beneficial effects are as follows:
this graphite alkene flame projecting stove based on dual cooling accuse temperature, through setting up outer cold water layer, gas layer and interior cold water layer mutually support, when equipment carries out high temperature heating to the graphite alkene raw materials, gas layer passes through the gas blowout hole and directly heats the inner chamber of furnace body, be different from traditional electric stove resistance wire heating's mode, the direct effectual graphite alkene raw and other materials that acts on of heat, improve the heating rate of temperature in the electric furnace body inner chamber, lead in the joint and the external cold water machine of joint through outer cold water layer, the cold water machine is beaten and is circulated real-time takes away the wall temperature of furnace body inner wall, make furnace body flame temperature can heat up more and provide the basis to high temperature, ensure furnace body inner structure normal operating under high temperature environment, cooling system adopts outer cold water layer and interior cold water layer to cool off the furnace body simultaneously, the cooling effect is good, make the furnace body can reach real-time cooling, for blowout high temperature flame projecting basis, can effectually carry out the control to the temperature in the furnace body, make the highest temperature that the gas heats reach 2000 ℃ even higher temperature.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is an isometric view of the present invention;
FIG. 3 is a schematic view of the structure of the furnace body of the invention;
FIG. 4 is an isometric view of the internal structure of the furnace of the present invention;
FIG. 5 is a schematic diagram of the cooperation of the furnace body and the graphene grown quartz cavity;
FIG. 6 is a schematic view of a furnace according to the present invention.
In the figure: 1 furnace body, 1.1 stainless steel layer one, 1.2 stainless steel layer two, 1.3 stainless steel layer three, 1.4 stainless steel layer four, 1.5 gas spraying holes, 2 sealing flange plates, 2.1 air holes, 2.2 through holes, 3 graphene growing quartz cavities, 4 graphene growing air inlet joints, 5 graphene growing air outlet joints, 6 chimneys, 7 outer cold water layers, 8 gas layers, 9 inner cold water layers, 10 corundum boats, 11 copper foils, 12 outer cold water layer leading-in joints, 13 gas layer joints, 14 inner cold water layer leading-in joints, 15 inner cold water discharge pipes, 16 outer cold water discharge pipes, 17 igniters and 18 temperature sensors.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-6, the present invention provides a technical solution: the utility model provides a graphite alkene flame projecting stove based on dual cooling accuse temperature, including furnace body 1 and graphite alkene growth quartz cavity 3 by the support, horizontal line central line of furnace body 1 and graphite alkene growth quartz cavity 3 coincide, ensure graphite alkene growth quartz cavity 3 is evenly heated in furnace body 1, sealed ring flange 2 is all installed to the left and right sides port of furnace body 1, graphite alkene growth quartz cavity 3 runs through furnace body 1 through two ring flange 2, graphite alkene growth quartz cavity 3's both ends support the location through the locating rack, corundum boat 10 is installed in the portion that is located furnace body 1 inner chamber, copper foil 11 has been laid in the corundum boat 10, graphite alkene growth quartz cavity 2's both ends mouth is installed graphite alkene growth air inlet connection 4 and graphite alkene growth air outlet connection 5 respectively, chimney 6 that is linked together with its inner chamber is installed at the top of furnace body 1, the bottom port of chimney 6 runs through stainless steel layer 1.1 from top down in proper order, stainless steel layer two 1.2, stainless steel layer three 1.3 and stainless steel layer four 1.4 and produce through the combustion gas blowout hole through the chimney and the combustion gas blowout hole of 1.5, flue gas blowout is produced.
The furnace body 1 is composed of a first stainless steel layer 1.1, a second stainless steel layer 1.2, a third stainless steel layer 1.3 and a fourth stainless steel layer 1.4 from outside to inside in sequence, the inner layer and the outer layer of the furnace body 1 are mutually fixed, the practical stability of the cooperation between the structures is ensured, an outer cold water layer 7 composed of the first stainless steel layer 1.1, the second stainless steel layer 1.2, the third stainless steel layer 1.3 and the fourth stainless steel layer 1.4, a gas layer 8 and an inner cold water layer 9 are sealed and blocked through two sealing flanges 2, the stable fluid cooperation between the inner layer and the outer layer of the furnace body 1 is ensured, the cavity composed of the first stainless steel layer 1.1 and the second stainless steel layer 1.2 is the outer cold water layer 7, the cavity composed of the third stainless steel layer 1.2 and the third stainless steel layer 1.3 is the gas layer 8, the cavity composed of the third stainless steel layer 1.3 and the fourth stainless steel layer 1.4 is the inner cold water layer 9, the outer cold water layer 7, the gas layer 8 and the inner cold water layer 9 are independent cavities, the inner side wall of the stainless steel layer IV 1.4 is uniformly provided with gas spraying holes 1.5 communicated with the gas layer 8, the gas spraying holes 1.5 are communicated with the cavity of the gas layer 9 through a communicating pipe and are separated from the inner cavity of the inner cold water layer 9, so that gas led out by the gas layer 9 is prevented from overflowing into the inner cavity of the inner cold water layer 9, the stability of the matched use among structures is ensured, the annular array of the gas spraying holes 1.5 is arranged in the inner cavity of the furnace body 1, the inner ports of the gas spraying holes 1.5 face the central line of the inner cavity of the furnace body 1, the flame sprayed by the gas spraying holes 1.5 is ensured to directly act on the inner cavity of the furnace body 1, graphene raw materials in the graphene growth quartz cavity 3 can be uniformly heated and grown at high temperature, the production quality of graphene is effectively improved, the outer cold water layer leading-in connector 12, the gas layer connector 13 and the inner cold water layer leading-in connector 14 are sequentially arranged at the bottom of the furnace body 1 from left to right, the end port of the outer cold water layer leading-in connector 12 is communicated with the inner cavity of the outer cold water layer 7, the end port of the gas layer connector 13 is communicated with the inner cavity of the gas layer 8, the end port of the inner cold water layer connector 9 is communicated with the inner cavity of the inner cold water layer 9, the top of the furnace body 1 is respectively provided with an outer cold water discharge pipe 16 and an inner cold water discharge pipe 15 which are communicated with the outer cold water layer 7 and the inner cold water layer 9, the outer cold water layer leading-in connector 12 and the inner cold water layer leading-in connector 14 are externally connected with a cold water machine, so that cold water can be led in the outer cold water layer 7 and the inner cold water layer 9, and after heat exchange is carried out by circulating water, the circulating water is discharged through the inner cold water discharge pipe 15 and the outer cold water discharge pipe 16.
The air holes 2.1 are formed in the annular arrays on the end faces of the two closed flanges 2, the arrangement of the air holes 2.1 ensures that fuel gas is thoroughly combusted in the inner cavity of the furnace body 1, through holes 2.2 for penetrating through the graphene growing quartz cavity 2 are formed in the central positions of the two closed flanges 2, the graphene growing quartz cavity 2 penetrates through the inner cavity of the furnace body 1 through the through holes 2.2, an igniter 17 for igniting the fuel gas is arranged in the air hole 2.1 of one flange 2, a temperature sensor 18 for monitoring the temperature in real time is arranged in the air hole 2.1 of the other flange 2, the temperature sensor 18 adopts a contact thermocouple or an infrared sensor, the heating temperature of the inner cavity of the furnace body 1 can be effectively monitored in real time through the arrangement of the temperature sensor 18, and system adjustment operation of related operators is facilitated.
The electrical components appearing in the paper are all electrically connected with an external main controller and a mains supply, and the main controller can be a conventional known device for controlling a computer and the like.
To sum up, when the equipment is used, the gas layer joint 13 is externally connected with gas supply equipment, the graphene growth gas inlet joint 4 is externally connected with graphene raw material introducing equipment, the graphene growth gas outlet joint 5 is externally connected with graphene raw material recycling equipment, the gas introduced into the gas layer 8 is ignited through the igniter 17, the external cold water layer introducing joint 12 and the internal cold water layer introducing joint 14 are externally connected with a cold water machine, circulating water is discharged through the internal cold water discharge pipe 15 and the external cold water discharge pipe 16, the cold water machine is circulated to take away the wall temperature of the inner wall of the furnace body 1 in real time, and the temperature sensor 18 monitors the combustion temperature in the furnace body 1 in real time, so that the stability of high-temperature combustion of the gas is ensured.
The control mode of the invention is automatically controlled by the controller, the control circuit of the controller can be realized by simple programming of a person skilled in the art, the supply of power also belongs to common knowledge in the art, and the invention is mainly used for protecting a mechanical device, so the invention does not explain the control mode and circuit connection in detail.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a reference structure" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a graphite alkene flaming furnace based on dual cooling accuse temperature, includes furnace body and graphite alkene growth quartz cavity that is supported by the support, its characterized in that: the left and right ports of the furnace body are respectively provided with a closed flange, the graphene growth quartz cavity penetrates through the furnace body through the two flange plates, the two ends of the graphene growth quartz cavity are supported and positioned through a positioning frame, the graphene growth quartz cavity is provided with a corundum boat at the inner cavity part of the furnace body, copper foil is laid in the corundum boat, the two ports of the graphene growth quartz cavity are respectively provided with a graphene growth air inlet joint and a graphene growth air outlet joint, and the top of the furnace body is provided with a chimney communicated with the inner cavity of the furnace body;
the furnace body sequentially comprises a first stainless steel layer, a second stainless steel layer, a third stainless steel layer and a fourth stainless steel layer from outside to inside, wherein a cavity formed between the first stainless steel layer and the second stainless steel layer is an external cold water layer, a cavity formed between the second stainless steel layer and the third stainless steel layer is a gas layer, a cavity formed between the third stainless steel layer and the fourth stainless steel layer is an internal cold water layer, gas spraying holes communicated with the gas layer are uniformly formed in the inner side wall of the fourth stainless steel layer, an external cold water layer leading-in joint, a gas layer joint and an internal cold water layer leading-in joint are sequentially formed at the bottom of the furnace body from left to right, the end port of the external cold water layer leading-in joint is communicated with the inner cavity of the external cold water layer, the end port of the gas layer joint is communicated with the inner cavity of the gas layer, and the end port of the internal cold water layer joint is communicated with the inner cavity of the internal cold water layer;
the end faces of the two sealing flanges are provided with air holes in annular arrays, the center positions of the two sealing flanges are provided with through holes for penetrating through the graphene growing quartz cavity, the graphene growing quartz cavity penetrates through the inner cavity of the furnace body through the through holes, an igniter for igniting fuel gas is arranged in the air hole of one flange, and a temperature sensor for monitoring temperature in real time is arranged in the air hole of the other flange.
2. The graphene flaming furnace based on double cooling temperature control according to claim 1, wherein: and the outer cold water layer, the gas layer and the inner cold water layer which are formed by the first stainless steel layer, the second stainless steel layer, the third stainless steel layer and the fourth stainless steel layer are sealed and blocked through two sealing flanges.
3. The graphene flaming furnace based on double cooling temperature control according to claim 1, wherein: and the transverse line center line of the furnace body is overlapped with the transverse center line of the graphene growing quartz cavity.
4. The graphene flaming furnace based on double cooling temperature control according to claim 1, wherein: the bottom port of the chimney penetrates through the first stainless steel layer, the second stainless steel layer, the third stainless steel layer and the fourth stainless steel layer from top to bottom in sequence and is communicated with the combustion inner cavity of the furnace body.
5. The graphene flaming furnace based on double cooling temperature control according to claim 1, wherein: the annular array of gas blowout holes is arranged in the inner cavity of the furnace body, and the inner ports of the gas blowout holes face the central line of the inner cavity of the furnace body.
6. The graphene flaming furnace based on double cooling temperature control according to claim 1, wherein: the temperature sensor adopts a contact thermocouple or an infrared sensor.
CN202211540728.4A 2022-12-02 2022-12-02 Graphene flaming furnace based on double cooling temperature control Active CN116281979B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104860305A (en) * 2015-05-07 2015-08-26 安徽贝意克设备技术有限公司 Graphene device capable of achieving continuous growth
CN205709876U (en) * 2016-06-15 2016-11-23 郑斌 A kind of graphene growth device
CN106517163A (en) * 2016-09-27 2017-03-22 无锡格菲电子薄膜科技有限公司 Cold wall furnace for preparation of graphene through CVD method and continuous production method
CN213713974U (en) * 2020-11-30 2021-07-16 湖南红太阳光电科技有限公司 Rapid cooling furnace body
US20210348268A1 (en) * 2018-10-19 2021-11-11 Shenzhen Naso Tech Co., Ltd. Device and method for openly and continuously growing carbon nanomaterials

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104860305A (en) * 2015-05-07 2015-08-26 安徽贝意克设备技术有限公司 Graphene device capable of achieving continuous growth
CN205709876U (en) * 2016-06-15 2016-11-23 郑斌 A kind of graphene growth device
CN106517163A (en) * 2016-09-27 2017-03-22 无锡格菲电子薄膜科技有限公司 Cold wall furnace for preparation of graphene through CVD method and continuous production method
US20210348268A1 (en) * 2018-10-19 2021-11-11 Shenzhen Naso Tech Co., Ltd. Device and method for openly and continuously growing carbon nanomaterials
CN213713974U (en) * 2020-11-30 2021-07-16 湖南红太阳光电科技有限公司 Rapid cooling furnace body

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