CN116256238A

CN116256238A - Film mechanical property detection system and detection method

Info

Publication number: CN116256238A
Application number: CN202310199945.XA
Authority: CN
Inventors: 姚佳; 刘科海; 郑跃滨; 尚俊峰; 陈镔; 刘开辉; 王恩哥
Original assignee: Yang Sheng Tang Co Ltd; Songshan Lake Materials Laboratory
Current assignee: Yang Sheng Tang Co Ltd; Songshan Lake Materials Laboratory
Priority date: 2023-03-02
Filing date: 2023-03-02
Publication date: 2023-06-13

Abstract

The invention relates to a film mechanical property detection system and a detection method, wherein the detection system comprises a pressure sensing mechanism, a gas control mechanism and a data acquisition and processing mechanism, the pressure sensing mechanism is provided with an air cavity, when a film body to be detected is fixed on the pressure sensing mechanism, the film body to be detected is sealed at an opening of the air cavity, the gas control mechanism comprises a positive pressure unit, a negative pressure unit and a flow controller, the positive pressure unit and the negative pressure unit are communicated with the air cavity through the flow controller, and the data acquisition and processing mechanism is communicated with the air cavity; according to the film mechanical property detection system, the film body to be detected is fixed through the pressure sensing mechanism, gas is injected into or pumped out of the air cavity through the gas control mechanism, the film body to be detected deforms under pressure change, and meanwhile, the air injection rate of the positive pressure unit and the air extraction rate of the negative pressure unit are regulated and controlled through the flow controller, so that the air cavity reaches dynamic balance of air inlet and air leakage, and then the air tightness problem cannot influence the detection effect.

Description

Film mechanical property detection system and detection method

Technical Field

The invention relates to the technical field of detection, in particular to a system and a method for detecting mechanical properties of a film.

Background

The film structure has wide application in the fields of machinery, electronics, bioengineering and the like. Due to the influences of various factors such as temperature and humidity, a manufacturing process and the like, certain prestress exists in the manufactured film body to be tested, and the existence of the prestress can change the mechanical behavior of the film structure, so that the film body to be tested needs to be measured.

The existing detection device can impact the film through gas to deform the film, and then the mechanical property of the film is calculated according to the deformation amount of the film and the pressure of the given gas. The flow of the gas is controlled by the flow controller, the flow controller with a larger range can enable the transported gas to have a larger regulation and control range, and the flow controller with a higher precision can enable the transported gas to have a larger regulation and control precision.

However, the control accuracy of the conventional flow rate controller with a measuring range of 100mL/min is 1mL, and the control accuracy of the flow rate controller with a measuring range of 10mL/min is 0.1mL. That is, the conventional flow controller has a problem that the control range and the control accuracy cannot be simultaneously considered.

Disclosure of Invention

Based on the above, it is necessary to provide a system and a method for detecting mechanical properties of a thin film, which are not capable of simultaneously satisfying both the control range and the control accuracy.

A thin film mechanical property detection system comprising:

the pressure sensing mechanism is provided with an air cavity, and after the film body to be detected is fixed on the pressure sensing mechanism, the film body to be detected is sealed at the opening of the air cavity;

the air control mechanism comprises a positive pressure unit, a negative pressure unit and a flow controller, wherein the positive pressure unit and the negative pressure unit are communicated with the air cavity through the flow controller, the flow controller is used for regulating and controlling the air injection quantity of the positive pressure unit and the air extraction quantity of the negative pressure unit so as to regulate and control the pressure in the air cavity, the flow controller comprises a first flow control unit and a second flow control unit with different precision, the positive pressure unit is communicated with the air cavity through the first flow control unit, and the negative pressure unit is communicated with the air cavity through the first flow control unit;

the data acquisition and processing mechanism is communicated with the air cavity and is used for acquiring the pressure value in the air cavity and the state information of the film body to be detected in real time so as to obtain the mechanical property of the film body to be detected.

According to the film mechanical property detection system, the film body to be detected is fixed through the pressure sensing mechanism, gas is injected into or extracted from the air cavity through the gas control mechanism, the film body to be detected is deformed under pressure change, meanwhile, the gas injection rate of the positive pressure unit and the gas extraction rate of the negative pressure unit are regulated and controlled through the flow controller, the air cavity achieves dynamic balance of gas inlet and gas leakage, the flow rate and the flow rate of the injected gas and the flow rate of the extracted gas are respectively controlled through the first flow control unit and the second flow control unit with different accuracies, so that the flow controller not only can have a larger regulation and control range, but also can have higher regulation and control accuracy, then the pressure value in the air cavity and the state information of the film body to be detected are collected in real time through the data collection and processing mechanism, and the mechanical properties such as prestress and the like of the film body to be detected are calculated according to corresponding mechanical formulas.

In one embodiment, the gas control mechanism further comprises a gas flow stabilizing unit, and the flow controller is communicated with the gas cavity through the gas flow stabilizing unit.

In the above embodiment, the air flow entering the air cavity is stabilized by the air flow stabilizing unit, so that transient air flow jitter caused by the moment when the positive pressure unit and the negative pressure unit are started and the moment when the flow controller is switched is avoided.

In one embodiment, the data acquisition and processing mechanism comprises a differential pressure measurement assembly, a displacement measurement assembly and a data processing module, wherein the differential pressure measurement assembly is communicated with the air cavity and used for detecting a pressure value in the air cavity, the displacement measurement assembly is arranged above the air cavity and used for measuring the deformation of the film body to be measured, and the data processing module is in signal connection with the differential pressure measurement assembly and the displacement measurement assembly.

In the above embodiment, the pressure value in the air cavity can be measured by the differential pressure measurement assembly, and the deformation amount of the film body to be measured can be measured by the displacement measurement assembly, so that the data processing module can bring the measured pressure value in the air cavity and the deformation amount of the film body to be measured into corresponding mechanical formulas, and further can calculate and obtain the mechanical properties such as prestress and the like of the film body to be measured.

In one embodiment, the pressure sensing mechanism comprises a main body, a sealing member, a membrane body assembly, a pressing member, a cover body and a pressure supplementing assembly, wherein the air cavity is arranged in the main body, the cover body is connected with the main body, the cover body is positioned on one side, far away from the air cavity, of the membrane body assembly, the cover body is provided with a detection opening which is correspondingly arranged with the membrane body assembly, the pressing member is detachably arranged between the membrane body assembly and the cover body, and the sealing member is arranged between the membrane body assembly and the main body.

In one embodiment, the system for detecting mechanical properties of a thin film further comprises a detection table, wherein a plurality of pressure sensing mechanisms and the displacement measuring assemblies are arranged on the detection table, and a plurality of pressure sensing mechanisms are arranged on the detection table.

In the embodiment, the membrane body to be measured on the pressure sensing mechanisms is measured through the displacement measuring assemblies, so that the detection efficiency is improved.

The detection method applied to the mechanical property detection system comprises the following steps of:

the method comprises the steps of obtaining a film body to be detected, and fixing the film body to be detected on a pressure sensing mechanism, so that the film body to be detected and the pressure sensing mechanism are matched to form an air cavity;

Driving the positive pressure unit to inject gas into the pressure sensing mechanism, and driving the negative pressure unit to extract gas from the pressure sensing mechanism so as to regulate and control the pressure in the air cavity;

driving a flow controller to regulate and control the air injection quantity of the positive pressure unit and the air extraction quantity of the negative pressure unit, so that the air cavity achieves dynamic balance of air inlet and air leakage;

and driving a data acquisition and processing mechanism to measure and obtain the pressure value in the air cavity and the state information of the film body to be measured, and calculating to obtain the mechanical property of the film body to be measured.

In the above embodiment, after the film body to be measured is fixed by the pressure sensing mechanism, the positive pressure unit may be used to inflate the pressure sensing mechanism to increase the pressure value in the air cavity, and the negative pressure unit may be used to pump out the air in the pressure sensing mechanism to reduce the pressure value in the air cavity, and the flow rate and flow rate of the injected air and the pumped air may be controlled by the flow controller simultaneously or respectively, so that the air cavity may achieve the dynamic balance of the air intake and the air leakage, and the pressure value in the air cavity may be flexibly adjusted to deform under the pressure change, and then the pressure value in the air cavity and the deformation of the film body to be measured may be measured by the data acquisition processing mechanism, and the mechanical properties such as the prestress of the film body to be measured may be obtained according to the corresponding mechanical formulas.

In one embodiment, the flow controller, when regulating the air injection amount of the positive pressure unit and the air extraction amount of the negative pressure unit, includes the following steps:

driving a first flow control unit with a first range and a first precision to regulate and control the gas injection quantity of the positive pressure unit;

and driving a second flow control unit with a second measuring range and second precision to regulate and control the pumping quantity of the negative pressure unit.

In the above embodiment, the flow rates and the flow rates of the injected gas and the extracted gas can be controlled by the first flow control unit and the second flow control unit with different ranges and accuracies, respectively, so that the flow controller can have a larger measurement range and higher measurement accuracy.

In one embodiment, the flow controller further includes the following steps after adjusting the air injection amount of the positive pressure unit and the air extraction amount of the negative pressure unit:

the air flow stabilizing unit is driven to stabilize the flow of the air entering the air cavity from the flow controller.

In the above embodiment, the air flow stabilizing unit performs maintenance on the air flow entering the air cavity, so as to avoid transient air flow jitter caused by the moment when the positive pressure unit and the negative pressure unit are opened and the moment when the flow controller is switched.

In one embodiment, when the driving data acquisition and processing mechanism measures and obtains the pressure value in the air cavity and the state information of the film body to be measured, and calculates and obtains the mechanical property of the film body to be measured, the driving data acquisition and processing mechanism comprises the following steps:

driving a differential pressure measuring assembly to measure and obtain the pressure value in the air cavity;

driving a displacement measurement assembly to measure and obtain the deformation of the film body to be measured;

and the driving data processing module brings the measured pressure value in the air cavity and the deformation of the film body to be measured into corresponding mechanical formulas, and calculates the mechanical properties of the film body to be measured.

In the above embodiment, the pressure value in the air cavity is measured by the differential pressure measurement assembly, and the deformation amount of the film body to be measured is measured by the displacement measurement assembly, so that the data processing module can bring the measured pressure value in the air cavity and the deformation amount of the film body to be measured into corresponding mechanical formulas, and further can calculate and obtain the mechanical properties such as prestress and the like of the film body to be measured.

Drawings

FIG. 1 is a schematic structural diagram of a system for detecting mechanical properties of a thin film according to some embodiments of the present application;

FIG. 2 is a schematic diagram of a pressure sensing mechanism according to some embodiments of the present application;

fig. 3 is a schematic structural diagram of a pressure sensing mechanism and a detection table according to some embodiments of the present disclosure.

Reference numerals:

1. a pressure sensing mechanism;

11. a main body; 111. an air cavity; 111a, a first section; 111b, a second section; 112. an opening; 113. an abutting portion; 114. a limit groove; 115. a first connection structure;

12. a seal;

13. a membrane assembly; 131. a support ring; 132. a film body to be measured; 133. a through hole;

14. a pressing member; 141. a pressing part; 142. a limit part;

15. a cover body; 151. a detection port; 152. a body portion; 153. a handle portion; 154. a second connection structure;

16. a pressure supplementing assembly;

2. a gas control mechanism;

21. a positive pressure unit; 22. a negative pressure unit; 23. a flow controller;

3. a data acquisition and processing mechanism;

31. a differential pressure measurement assembly; 32. a displacement measurement assembly; 33. a data processing module;

4. an air flow stabilizing unit;

5. a connecting pipeline;

6. and a detection table.

Detailed Description

In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

At present, most of methods for testing mechanical properties such as film tension, prestress, interface binding force and the like can cause irreversible damage to film samples, so that the film cannot be tested for multiple times. In addition, most of the existing methods for testing the mechanical properties of the film can only test the tension/prestress or interface binding force of the film, and cannot simultaneously measure various mechanical properties.

The existing mode that the film cannot be damaged is a pneumatic method, namely, the film is deformed through impact of gas on the film, and then the mechanical property of the film is calculated according to the deformation amount of the film and the air pressure given to the gas. However, the detection device for realizing the method controls the flow of the conveying gas through the flow controller, the flow controller with a larger range can enable the conveying gas to have a larger regulation and control range, and the flow controller with a higher precision can enable the conveying gas to have a larger regulation and control precision. However, the existing flow controllers have the problem that the regulation range and the regulation precision cannot be simultaneously considered.

Referring to fig. 1, an embodiment of the present invention provides a system for detecting mechanical properties of a thin film to solve the above-mentioned problems. The film mechanical property detection system comprises a pressure sensing mechanism 1, a gas control mechanism 2 and a data acquisition and processing mechanism 3. The pressure sensing mechanism 1 is used for fixing the membrane 132 to be measured. The gas control mechanism 2 is used for injecting and/or extracting set gas into the pressure sensing mechanism 1 so as to regulate and control the pressure in the air cavity 111 and deform the membrane 132 to be tested. The data acquisition and processing mechanism 3 is used for acquiring the pressure value in the air cavity 111 and the state information of the film 132 to be detected in real time so as to obtain the mechanical property of the film 132 to be detected.

The pressure sensing mechanism 1 is provided with an air cavity 111, and after the film 132 to be measured is fixed on the pressure sensing mechanism 1, the film 132 to be measured is sealed at an opening 112 of the air cavity 111.

Specifically, the opening 112 of the air chamber 111 is located at the top surface of the pressure sensing mechanism 1. After the film 132 to be measured is fixed on the pressure sensing mechanism 1, a part of the bottom surface of the film 132 to be measured is abutted against the top surface of the pressure sensing mechanism 1, and the other part of the bottom surface of the film 132 to be measured is sealed at the opening 112 of the air cavity 111. When the air pressures received by the two opposite sides of the film 132 to be tested are different, the film 132 to be tested is deformed. That is, when the air pressure in the air chamber 111 located below the film 132 to be measured is greater than or less than the atmospheric pressure located above the film 132 to be measured, the film 132 to be measured is deformed.

The gas control mechanism 2 comprises a positive pressure unit 21, a negative pressure unit 22 and a flow controller 23, wherein the positive pressure unit 21 and the negative pressure unit 22 are communicated with the air cavity 111 through the flow controller 23, and the flow controller 23 is used for regulating and controlling the gas injection amount of the positive pressure unit 21 and the gas extraction amount of the negative pressure unit 22 so as to regulate and control the pressure in the air cavity 111. That is, the air chamber 111 can be inflated by the positive pressure unit 21, and the pressure value in the air chamber 111 can be increased. The air in the air chamber 111 can be drawn out by the negative pressure unit 22, and the pressure value in the air chamber 111 can be reduced. Simultaneously, the flow rate and the flow rate of the injected gas and the pumped gas can be simultaneously controlled through the flow controller 23, so that the pressure value in the air cavity 111 can be flexibly adjusted.

When the gas control mechanism 2 is specifically operated, the gas control mechanism 2 drives the positive pressure unit 21 to inflate the air chamber 111, and simultaneously drives the negative pressure unit 22 to pump out the gas in the air chamber 111. When the inflation amount of the positive pressure unit 21 is larger than the air extraction amount of the negative pressure unit 22, the film 132 to be tested is generally shown to generate convex deformation, and the differential pressure measuring assembly 31 acquires a positive differential pressure; when the inflation amount of the positive pressure unit 21 is smaller than the air extraction amount of the negative pressure unit 22, the film 132 to be tested is generally deformed in a concave manner, and the differential pressure measuring assembly 31 acquires a negative differential pressure.

The differential pressure measurement assembly 31 measures the actual pressure value acting on the membrane 132 under test in both cases, and the displacement measurement assembly 32 measures the deformation of the membrane 132 under test corresponding to the pressure.

In a specific arrangement, the positive pressure unit 21 is a gas cylinder or an air compressor. In this embodiment, the positive pressure unit 21 is a gas cylinder, and a pressure reducing valve is provided on the gas cylinder. A first pipeline is arranged between the positive pressure unit 21 and the flow controller 23, two ends of the first pipeline are respectively communicated with the pressure reducing valve and the flow controller 23, and gas in the gas cylinder can be sequentially injected into the pressure sensing mechanism 1 through the pressure reducing valve, the first pipeline and the flow controller 23 to realize positive pressure difference in the gas cavity 111.

The negative pressure unit 22 is a vacuum pump or other pumping device. In the present embodiment, the negative pressure unit 22 is a vacuum pump, and the vacuum pump is communicated with the flow controller 23 through a second pipeline, and the gas in the pressure sensing mechanism 1 is controlled by the flow controller 23 and pumped out through the vacuum pump through the second pipeline to realize a negative pressure difference in the air chamber 111.

Further, the flow controller 23 has a first control unit and a second control unit. The positive pressure unit 21 communicates with the first control unit so that the first control unit can set the flow rate and the flow velocity of the gas injected into the pressure sensing mechanism 1 via the positive pressure unit 21. The negative pressure unit 22 communicates with the second control unit so that the second control unit can set the flow rate and the flow velocity of the gas drawn from the pressure sensing mechanism 1 by the negative pressure unit 22.

Specifically, the greater the range of the flow controller 23, the greater the minimum accuracy with which it can be adjusted. Namely, a differential pressure gauge with a measuring range of megapascals has an adjustable minimum accuracy of 1Pa, and a differential pressure gauge with an adjustable minimum accuracy of 0.1Pa has a measuring range of up to kilopascals.

The flow controller 23 of the present application includes a first flow control unit and a second flow control unit which are different in accuracy, the positive pressure unit 21 communicates with the air chamber 111 through the first flow control unit, and the negative pressure unit 22 communicates with the air chamber 111 through the second flow control unit. The flow rate and the flow rate of the injected gas and the extracted gas are respectively controlled by the first flow control unit and the second flow control unit with different accuracies, so that the flow controller 23 can have a larger measuring range and higher measuring accuracy.

For example, to realize high-precision positive pressure control on the membrane 132 to be measured, the first flow control unit may be a flow control unit with a precision of 100mL/min (precision of 1 mL), the second flow control unit may be a flow control unit with a precision of 10mL/min (precision of 0.1 mL), and the flow controller 23 may realize flow control with a dynamic range of 0-100mL/min (precision of 0.1 mL).

Specifically, for a wide-range flow controller of 1-100mL/min, the control accuracy can only reach 1mL, i.e. the flow of the injected gas or the pumped gas controlled by the wide-range flow controller can only reach 1mL, so that the pressure perceived by the film ranges from tens to hundreds Pa. For a small-range flow controller with the flow rate of 1-10mL/min, the control precision can reach 0.1mL, namely the flow rate of the injected gas or the pumped gas controlled by the flow controller can only reach 0.1mL, so that the pressure sensed by the film can reach mPa or mu Pa. Therefore, when a wide-range flow controller of 1-100mL/min and a small-range flow controller of 1-10mL/min are adopted simultaneously, the pressure range perceived by the film is larger, and the pressure perceived by the film can be accurate to mPa or mu Pa.

The data acquisition and processing mechanism 3 is communicated with the air cavity 111 and is used for measuring the pressure value in the air cavity 111 and the state information of the film 132 to be measured so as to obtain the mechanical property of the film 132 to be measured.

In one embodiment, the data acquisition and processing mechanism 3 includes a differential pressure measurement assembly 31, a displacement measurement assembly 32, and a data processing module 33. The differential pressure measurement assembly 31 communicates with the air chamber 111 for detecting a pressure value within the air chamber 111. The displacement measuring assembly 32 is disposed above the pressure sensing mechanism 1 and is used for measuring the deformation amount of the film 132 to be measured. The data processing module 33 is in signal connection with the differential pressure measuring assembly 31 and the displacement measuring assembly 32, and is used for bringing the measured pressure value in the air cavity 111 and the deformation of the membrane 132 to be measured into corresponding mechanical formulas, and further calculating to obtain mechanical properties such as prestress of the membrane 132 to be measured.

After the film 132 to be measured is fixed on the pressure sensing mechanism 1, the central area of the film 132 to be measured is in a suspended state, the top surface of the central area of the film 132 to be measured contacts air to sense the atmospheric pressure, the bottom surface of the central area of the film 132 to be measured contacts the air cavity 111 to sense the air pressure in the air cavity 111. The differential pressure measuring component 31 is used for detecting the differential pressure of the two components, and the displacement measuring component 32 is used for measuring the displacement of the central area of the membrane 132 to be measured caused by the differential pressure.

More specifically, the displacement measurement assembly 32 may employ a laser displacement rangefinder or other measurement assembly that senses the amount of change in diaphragm displacement. When the film 132 to be measured is fixed on the pressure sensing mechanism 1, the orthographic projection of the displacement measurement assembly 32 on the pressure sensing mechanism 1 is located in the central area of the film 132 to be measured, so that the displacement measurement assembly 32 can accurately measure the displacement of the central area of the film 132 to be measured.

The differential pressure measuring component 31 can adopt a multi-channel switchable differential pressure meter, and the differential pressure measuring component 31 is communicated with the pressure sensing mechanism 1 through the connecting pipeline 5. The differential pressure measurement assembly 31 can determine from the readings whether the air chamber 111 has reached dynamic balance between intake air and blow-by. That is, when the flow controller 23 sets a certain fixed flow rate, the speed of detecting the system leak at that flow rate is also constant. When the reading of the differential pressure measurement assembly 31 is maintained constant, the intake and leakage of the detection system can be considered to be in dynamic balance, and the differential pressure is constant.

According to the film mechanical property detection system, the film 132 to be detected is fixed through the pressure sensing mechanism 1, gas is injected into or pumped out of the air cavity 111 through the gas control mechanism 2, so that the film 132 to be detected deforms under pressure change, meanwhile, the gas injection rate of the positive pressure unit 21 and the gas extraction rate of the negative pressure unit 22 are regulated and controlled through the flow controller 23, the air cavity 111 achieves dynamic balance of gas inlet and gas leakage, further, the air tightness problem cannot affect the detection effect, then the pressure value in the air cavity 111 and the deformation of the film 132 to be detected are respectively measured through the pressure difference measurement assembly 31 and the displacement measurement assembly 32, and the prestress of the film 132 to be detected is calculated by the data processing module 33 according to corresponding mechanical formulas. In addition, in the process, the flow rate and the flow rate of the injected gas and the extracted gas are respectively controlled by the first flow control unit and the second flow control unit with different accuracies, so that the flow controller not only has a larger regulation and control range, but also has higher regulation and control accuracy. In another embodiment, the data acquisition processing mechanism 3 includes a differential pressure measurement assembly 31, an image acquisition assembly, and a data processing module 33. The differential pressure measurement assembly 31 communicates with the air chamber 111 for detecting a pressure value within the air chamber 111. The image acquisition component is arranged above the pressure sensing mechanism 1 and is used for acquiring image information of the film body 132 to be detected. The data processing module 33 is in signal connection with the differential pressure measuring assembly 31 and the image acquisition assembly, and is configured to bring the pressure value measured by the differential pressure measuring assembly 31 into a corresponding mechanical formula when the membrane 132 to be measured is separated from the pressure sensing mechanism 1, so as to calculate and obtain the interfacial bonding force between the membrane 132 to be measured and the pressure sensing mechanism 1.

After the film 132 to be measured is fixed on the pressure sensing mechanism 1, the central area of the film 132 to be measured is in a suspended state, the top surface of the central area of the film 132 to be measured contacts air to sense the atmospheric pressure, the bottom surface of the central area of the film 132 to be measured contacts the air cavity 111 to sense the air pressure in the air cavity 111. The differential pressure measuring component 31 is used for detecting the differential pressure of the two components, and the image acquisition component is used for acquiring an image of the film 132 to be detected under the action of the differential pressure so as to determine the time when the film 132 to be detected is separated from the pressure sensing mechanism 1.

More specifically, the image acquisition component may employ a camera imager or other imaging component that can acquire images. When the film 132 to be measured is fixed on the pressure sensing mechanism 1, the orthographic projection of the image acquisition component on the pressure sensing mechanism 1 is located in the central area of the film 132 to be measured, so as to ensure the acquisition effect of the image acquisition component on the image of the film 132 to be measured.

According to the film mechanical property detection system, the film 132 to be detected is fixed through the pressure sensing mechanism 1, gas is injected into or pumped out of the air cavity 111 through the gas control mechanism 2, so that the film 132 to be detected deforms under pressure change, meanwhile, the gas injection rate of the positive pressure unit 21 and the gas extraction rate of the negative pressure unit 22 are regulated and controlled through the flow controller 23, the air cavity 111 achieves dynamic balance of gas inlet and gas leakage, and further the air tightness problem cannot affect the detection effect, then the pressure value in the air cavity 111 and the image of the film 132 to be detected are acquired through the pressure difference measurement assembly 31 and the image acquisition assembly respectively, and when the film 132 to be detected is separated from the pressure sensing mechanism 1, the data processing module 33 calculates and obtains the interface binding force between the film 132 to be detected and the pressure sensing mechanism 1 according to corresponding mechanical formulas.

Transient oscillations in the air flow are caused by the instant the positive pressure unit 21 and the negative pressure unit 22 are on, and by the instant the flow controller 23 switches. The gas control mechanism 2 of the present application thus further comprises a gas flow stabilizing unit 4, through which gas flow stabilizing unit 4 the flow controller 23 communicates with the gas chamber 111. The air flow entering the air chamber 111 is stabilized by the air flow stabilizing unit 4.

Specifically, the differential pressure measurement assembly 31 and the air flow stabilization unit 4 are both in communication with the pressure sensing mechanism 1 via the connecting line 5.

More specifically, the connecting pipeline 5 comprises a three-way valve and three independent pipelines, one ends of the three independent pipelines are respectively communicated with three interfaces of the three-way valve, and the other ends of the three independent pipelines are respectively communicated with the differential pressure measuring component 31, the airflow stabilizing unit 4 and the pressure sensing mechanism 1.

Referring to fig. 2, in one embodiment, the pressure sensing mechanism 1 includes a main body 11, a sealing member 12, a membrane body assembly 13, a pressing member 14, a cover body 15 and a pressure compensating assembly 16, the air cavity 111 is disposed in the main body 11, the cover body 15 is connected with the main body 11, the cover body 15 is located at a side of the membrane body assembly 13 away from the air cavity 111, the cover body 15 is provided with a detection port 151 corresponding to the membrane body assembly 13, the pressing member 14 is detachably disposed between the membrane body assembly 13 and the cover body 15, and the sealing member 12 is disposed between the membrane body assembly 13 and the main body 11.

Specifically, an air cavity 111 for filling air is provided in the main body 11, and the membrane module 13 is hermetically disposed at an opening 112 of the air cavity 111. The membrane module 13 includes a support ring 131 and a membrane 132 to be tested. The supporting ring 131 is provided with a through hole 133, and the film 132 to be tested is disposed on the connection surface of the supporting ring 131 and covers the through hole 133. When the pressure sensing mechanism 1 performs the air pressure detecting operation, the air pressure to be detected acts on the film body 132 to be detected covered at the through hole 133. Because the air pressure in the air cavity 111 has a difference value with the air pressure to be detected, the film 132 to be detected can displace, and the value of the air pressure to be detected can be measured by detecting the displacement of the film 132 to be detected.

In some embodiments, the body 11 is provided with an abutment 113 on the inner wall of the air cavity 111. The abutting portion 113 may abut against the membrane module 13. The abutting portion 113 can be used for limiting the membrane body assembly 13 conveniently, ensuring the position of the membrane body assembly 13 and ensuring that the membrane body 132 to be tested has sufficient displacement space in the air cavity 111.

The abutment 113 may be circumferentially disposed along the inner wall of the air chamber 111 of the main body 11. The arrangement mode can enable the contact area between the abutting part 113 and the membrane body assembly 13 to be large, so that the membrane body assembly 13 and the abutting part 113 can be connected in a sealing mode, and the membrane body assembly 13 and the main body 11 can be connected in a sealing mode.

In some embodiments, the air cavity 111 may include a first section 111a and a second section 111b that are in communication, where the first section 111a and the second section 111b are disposed along an opening 112 of the air cavity 111 to a bottom of the cavity. Wherein the diameter of the first section 111a may be larger than the diameter of the second section 111 b. Wherein the diameter of the second section 111b of the air cavity 111 may be the same as the diameter of the through hole 133 of the support ring 131. The diameter of the first section 111a of the air cavity 111 may be slightly larger than the outer diameter of the ring body of the support ring 131.

The junction between the side wall of the first section 111a and the side wall of the second section 111b forms a step structure, which is the abutting portion 113. The membrane module 13 is disposed in the first section 111a, and the membrane module 13 is connected with the step structure in a sealing manner. The difficulty of installing the membrane body assembly 13 can be reduced through the arrangement, and the membrane body assembly 13 is arranged at the corresponding position when the pressure sensing mechanism 1 is assembled each time, so that the deviation of detection results caused by the deviation of the installation position of the membrane body assembly 13 is reduced.

In some embodiments, the cover 15 is provided with a detection port 151, and the detection port 151 is provided corresponding to the through hole 133. The cover 15 may be detachably connected with the main body 11, so that a user can replace the membrane module 13, and further replace the membrane 132 to be tested with different measuring ranges, or replace the damaged membrane module 13.

When the pressure sensing mechanism 1 is assembled, the membrane module 13 can be tightly abutted against the abutting part 113 in the air cavity 111 through the cover body 15, so that the condition that the air cavity 111 leaks air due to gaps between the abutting part 113 and the membrane module 13 is reduced. In addition, the cover 15 may facilitate securing the membrane module 13 at the opening 112 of the air cavity 111. In the case of pressure detection, the outside air acts on one side of the membrane module 13 through the detection port 151, and the air in the air chamber 111 acts on the other side of the membrane module 13. The pressure difference exists on two sides of the film 132 to be detected, and the film 132 to be detected moves under the action of the pressure difference, so that the external air pressure is detected.

It will be appreciated that in some other embodiments, the pressure sensing mechanism 1 may fix the membrane module 13 to the opening 112 of the air cavity 111 by other fixing members, such as a compression buckle.

In some embodiments, the body 11 may be provided with a first connection structure 115 and the cover 15 may be provided with a mating second connection structure 154. The detachable connection of the body 11 and the cover 15 is achieved by the first connection structure 115 and the second connection structure 154.

The first connection structure 115 and the second connection structure 154 may be correspondingly disposed screw structures. Specifically, the outer wall of the cover 15 is provided with an external thread structure, and the inner wall of the first section 111a of the main body 11 is provided with an internal thread structure. When the cover 15 is closed relative to the main body 11, at least a portion of the cover 15 is accommodated in the first section 111a, the membrane module 13 is located between the cover 15 and the abutment portion 113, and the membrane module 13 is sealed with the main body 11.

It will be appreciated that in some other embodiments, the first connection structure 115 may be a clip slot and the second connection structure 154 may be a clip. The clasp may cooperate with the slot to allow removable connection of the cover 15 relative to the body 11.

In addition to the above connection method, the cover 15 and the main body 11 may be connected by other connection methods, and may be adjusted according to actual situations.

In some embodiments, the cover 15 includes a main body 152 and a handle 153, the handle 153 is disposed on the main body 152, and the main body 152 is provided with the detection opening 151. Wherein the body portion 152 may be detachably connected with the main body 11. The outer wall of the main body 11 is provided with the aforementioned first connection structure 115. By providing the handle portion 153, the body portion 152 can be easily attached to or detached from the main body 11 or adjusted during attachment and detachment.

In some embodiments, the compression member 14 may include a compression portion 141 and a limit portion 142. The main body 11 is provided with a limit groove 114. The limiting portion 142 is movable relative to the limiting groove 114. The pressing portion 141 is used to abut against the membrane module 13. The pressing member 14 abuts against the membrane module 13 through the pressing portion 141, thereby realizing that the membrane module 13 abuts against the main body 11 more tightly. When the limiting part 142 is arranged to enable the cover body 15 to rotate relative to the main body 11, the pressing piece 14 cannot rotate relative to the main body 11, and further the film body assembly 13 cannot move relative to the main body 11.

In some embodiments, the sealing member 12 may be disposed between the membrane module 13 and the main body 11 to increase the sealing effect between the membrane module 13 and the main body 11, and reduce leakage of the gas from the connection between the membrane module 13 and the main body 11, which may cause deviation of the test results.

The seal 12 may be a seal ring, and the seal ring may abut against the abutting portion 113. In some embodiments, the abutment 113 may be provided with a mounting groove (not shown) for receiving the sealing ring. The sealing ring may be partially protruded from the mounting groove. In other embodiments, the sealing ring may directly abut against the abutment 113, thereby achieving a sealed connection between the membrane module 13 and the main body 11.

In some embodiments, the pressure make-up assembly 16 has an airway. The pressure compensating assembly 16 is connected to the main body 11, and the air passage communicates with the air chamber 111. In the actual assembly process, a poor sealing state between the membrane module 13 and the main body 11 may occur, so that air leakage exists between the membrane module 13 and the main body 11. By providing the pressure compensating assembly 16, the air within the air chamber 111 can be replenished.

Referring to fig. 3, in one embodiment, the system for detecting mechanical properties of a thin film further includes a detecting table 6, and the pressure sensing mechanisms 1 and the displacement measuring assemblies 32 are provided in plurality, and the plurality of pressure sensing mechanisms 1 are provided on the detecting table 6. The membrane 132 to be measured on the pressure sensing mechanisms 1 is measured through the displacement measuring assemblies 32 at the same time, so that the detection efficiency is improved.

Specifically, the pressure sensing mechanism 1 is detachably provided on the inspection table 6 for maintenance replacement. The top surface of the detection platform 6 is uniformly provided with a plurality of fixing clamping positions, and the pressure sensing mechanisms 1 are respectively clamped and fixed on the plurality of fixing clamping positions, so that the detachable connection between the pressure sensing mechanisms 1 and the detection platform 6 is realized.

More specifically, the fixing clips are provided in an array on the top surface of the inspection table 6. That is, a fixing clamp is provided in the central area of the top surface of the detecting table 6, and a plurality of fixing clamps are uniformly provided in the peripheral area of the top surface of the detecting table 6 with the fixing clamp as an axis. By being uniformly arranged at the fixing clamping positions, the pressure sensing mechanism 1 can be uniformly arranged on the detection table 6.

The embodiment of the application also provides a detection method applied to the mechanical property detection system, which comprises the following steps:

the film 132 to be measured is obtained, and the film 132 to be measured is fixed on the pressure sensing mechanism 1, so that the film 132 to be measured is matched with the pressure sensing mechanism 1 to form the air cavity 111.

Specifically, the film 132 to be measured is attached to the support ring 131, and the attached support ring 131 is placed in the main body 11, and the two axial sides of the seal member 12 are respectively abutted against the main body 11 and the support ring 131. And then the pressing piece 14 is arranged in the main body 11, the positioning of the pressing part 141 is realized through the limiting part 142, the cover body 15 is finally arranged in the main body 11, the bottom surface of the cover body 15 is abutted with the top surface of the pressing piece 14, the pressing piece 14 is fixed through the dead weight of the cover body 15, and then the film 132 to be tested is fixed on the pressure sensing mechanism 1.

The positive pressure unit 21 is driven to inject gas into the pressure sensing mechanism 1, and the negative pressure unit 22 is driven to extract gas from the pressure sensing mechanism 1 so as to regulate the pressure in the air cavity 111.

Specifically, the gas cylinder is controlled to inject the gas therein into the pressure sensing mechanism 1 via the pressure reducing valve, the first pipeline and the flow controller 23 in order, thereby realizing the positive pressure difference in the gas chamber 111. In addition, the gas in the pressure sensing mechanism 1 is controlled by the flow controller 23 to be pumped out by the vacuum pump via the second pipeline to realize a negative pressure difference in the air chamber.

The driving flow controller 23 regulates and controls the air injection amount of the positive pressure unit 21 and the air extraction amount of the negative pressure unit 22, so that the air cavity 111 achieves dynamic balance of air intake and air leakage.

Specifically, the flow controller 23 sets the flow rate and the flow velocity of the gas injected into the pressure sensing mechanism 1 via the positive pressure unit 21, and also sets the flow rate and the flow velocity of the gas extracted from the pressure sensing mechanism 1 by the negative pressure unit 22.

The data acquisition and processing mechanism 3 is driven to measure and obtain the pressure value in the air cavity and the state information of the film body 132 to be measured, and the mechanical property of the film body 132 to be measured is calculated.

Specifically, in one embodiment, the data acquisition and processing mechanism 3 includes a differential pressure measurement assembly 31, a displacement measurement assembly 32, and a data processing module 33.

The data acquisition and processing mechanism 3 is operated to control the differential pressure measurement assembly 31 to measure the pressure value in the air cavity 111. The displacement measuring assembly 32 is controlled to measure the deformation amount of the film body 132 to be measured. The control data processing module 33 brings the measured pressure value in the air cavity 111 and the deformation of the film 132 to be measured into corresponding mechanical formulas, and calculates to obtain mechanical properties such as prestress of the film 132 to be measured.

More specifically, the mechanical property to be detected of the film 132 to be detected is prestress, and the corresponding mechanical formula is:

Wherein E is Young's modulus, v is Poisson's ratio, r is radius of the film body 132 to be measured, t is thickness of the film body 132 to be measured, and sigma ₀ For prestressing, q is the measured pressure value and ω is the measured deformation.

In the above embodiment, after the film 132 to be measured is fixed by the pressure sensing mechanism 1, the pressure sensing mechanism 1 may be inflated by the positive pressure unit 21 to increase the pressure value in the air cavity, and the air in the pressure sensing mechanism 1 may be pumped out by the negative pressure unit 22 to reduce the pressure value in the air cavity 111, and the flow rate and flow rate of the injected air and the pumped-out air may be controlled by the flow controller 23 simultaneously or respectively, so that the dynamic balance between the air intake and the air leakage of the air cavity 111 is achieved, and the pressure value in the air cavity 111 may be flexibly adjusted, so that the film 132 to be measured may be deformed under the pressure change, and then the pressure value in the air cavity 111 and the deformation amount of the film 132 to be measured may be measured by the data acquisition and processing mechanism 3, and the mechanical properties such as the prestress of the film 132 to be measured may be obtained according to the corresponding mechanical formula.

In another embodiment, the data acquisition processing mechanism 3 includes a differential pressure measurement assembly 31, an image acquisition assembly, and a data processing module 33.

The data acquisition and processing mechanism 3 controls the differential pressure measurement assembly 31 to detect the pressure value in the air cavity 111 during operation, and controls the image acquisition assembly to acquire the image information of the film body 132 to be detected. When the film 132 to be measured is separated from the pressure sensing mechanism 1, the control data processing module 33 brings the pressure value measured by the pressure difference measuring assembly 31 into a corresponding mechanical formula, and calculates to obtain mechanical properties such as interfacial bonding force of the film 132 to be measured.

More specifically, the mechanical property to be detected is the interfacial bonding force between the film body 132 to be detected and the pressure sensing mechanism 1, and the corresponding mechanical formula is: p=f/S.

Wherein F is the interfacial bonding force between the membrane 132 to be measured and the pressure sensing mechanism 1, i.e. the force applied when the membrane 132 to be measured is separated from the supporting ring 131. P is the pressure acting on the membrane 132 to be measured, i.e. the pressure value measured by the differential pressure measuring assembly 31. S is the substrate open area, i.e., the aperture area of the through-hole 133.

According to the film mechanical property detection system, the film 132 to be detected is fixed through the support ring 131 in the pressure sensing mechanism 1, gas is injected into or pumped out of the air cavity 111 through the gas control mechanism 2, so that the film 132 to be detected deforms under pressure change, meanwhile, the gas injection rate of the positive pressure unit 21 and the gas extraction rate of the negative pressure unit 22 are regulated and controlled through the flow controller 23, the air cavity 111 achieves dynamic balance of gas inlet and gas leakage, further, the air tightness problem cannot affect the detection effect, then the pressure value in the air cavity 111 and the image of the film 132 to be detected are acquired through the pressure difference measurement assembly 31 and the image acquisition assembly respectively, and when the film 132 to be detected is separated from the support ring 131, the data processing module 33 calculates and obtains the interface binding force between the film 132 to be detected and the pressure sensing mechanism 1 according to corresponding mechanical formulas.

In one embodiment, the flow controller 23, when regulating the air injection amount of the positive pressure unit 21 and the air extraction amount of the negative pressure unit 22, includes the following steps:

the first flow control unit having the first range and the first accuracy is driven to regulate the gas injection amount of the positive pressure unit 21.

Specifically, the first flow control unit with a driving range of 100mL/min and an accuracy of 1mL regulates the gas injection amount of the positive pressure unit 21.

The second flow control unit having the second range and the second accuracy is driven to regulate the pumping amount of the negative pressure unit 22.

Specifically, the driving range is 10mL/min, and the second flow control unit with the accuracy of 0.1mL regulates the pumping quantity of the negative pressure unit 22.

In the above embodiment, the flow rates and the flow rates of the injected gas and the extracted gas can be controlled by the first flow control unit and the second flow control unit having different ranges and accuracies, respectively, so that the flow controller 23 can have a larger measurement range and higher measurement accuracy.

In one embodiment, the flow controller 23 further includes the following steps after adjusting the air injection amount of the positive pressure unit 21 and the air extraction amount of the negative pressure unit 22:

the air flow stabilizing unit 4 is driven to stabilize the flow of the air entering the air chamber from the flow controller 23. The air flow entering the air cavity 111 is stabilized by the air flow stabilizing unit 4, so that transient air flow shaking caused by the moment when the positive pressure unit 21 and the negative pressure unit 22 are started and the moment when the flow controller 23 is switched is avoided.

The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The foregoing examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims

1. A thin film mechanical property detection system, comprising:

And part of the data acquisition and processing mechanism is communicated with the air cavity and is used for acquiring the pressure value in the air cavity and the state information of the film body to be detected in real time so as to obtain the mechanical property of the film body to be detected.

2. The system for detecting mechanical properties of a thin film according to claim 1, wherein the data acquisition and processing mechanism comprises a differential pressure measurement assembly, an image acquisition assembly and a data processing module, the differential pressure measurement assembly is communicated with the air cavity and is used for detecting the pressure value of the air cavity, the image acquisition assembly is arranged above the film body to be detected and is used for acquiring image information of the film body to be detected, and the data processing module is in signal connection with the differential pressure measurement assembly and the image acquisition assembly.

3. The system for detecting mechanical properties of a thin film according to claim 1, wherein the data acquisition and processing mechanism comprises a differential pressure measuring assembly, a displacement measuring assembly and a data processing module, the differential pressure measuring assembly is communicated with the air cavity and is used for detecting a pressure value of the air cavity, the displacement measuring assembly is arranged above the air cavity and is used for measuring deformation of the film body to be detected, and the data processing module is in signal connection with the differential pressure measuring assembly and the displacement measuring assembly.

4. The thin film mechanical property detection system according to claim 1, wherein the pressure sensing mechanism comprises a main body, a sealing member, a film body component, a pressing member, a cover body and a pressure supplementing component, the air cavity is arranged in the main body, the cover body is connected with the main body, the cover body is positioned on one side of the film body component far away from the air cavity, the cover body is provided with a detection opening which is arranged corresponding to the film body component, the pressing member is detachably arranged between the film body component and the cover body, and the sealing member is arranged between the film body component and the main body.

5. The thin film mechanical property detection system according to claim 3, further comprising a detection stage, wherein the pressure sensing mechanism and the displacement measurement assembly are each provided in plurality, and wherein the pressure sensing mechanism is each provided on the detection stage in plurality.

6. A method for detecting mechanical properties of a film, applied to a mechanical property detection system according to any one of claims 1 to 5, comprising the steps of:

obtaining a film body to be measured, and fixing the film body to be measured on a pressure sensing mechanism to enable the film body to be measured to be sealed at an opening of an air cavity;

and the driving data acquisition and processing mechanism acquires the pressure value in the air cavity and the state information of the film body to be detected, and calculates the mechanical property of the film body to be detected.

7. The method for detecting mechanical properties of a thin film according to claim 6, wherein the flow controller, when regulating the gas injection amount of the positive pressure unit and the gas extraction amount of the negative pressure unit, comprises the steps of:

8. The method for detecting mechanical properties of a thin film according to claim 6, wherein the flow controller adjusts the gas injection amount of the positive pressure unit and the gas extraction amount of the negative pressure unit, further comprising the steps of:

9. The method for detecting mechanical properties of a film according to claim 6, wherein the driving data collecting and processing mechanism is configured to collect the pressure value in the air cavity and the state information of the film to be detected, and calculate the mechanical properties of the film to be detected, and the method comprises the following steps:

and driving the data processing module to bring the measured pressure value in the air cavity and the deformation of the film body to be measured into corresponding mechanical formulas, and calculating to obtain the prestress of the film body to be measured.

10. The method for detecting mechanical properties of a film according to claim 6, wherein the driving data collecting and processing mechanism is configured to collect the pressure value in the air cavity and the state information of the film to be detected, and calculate the mechanical properties of the film to be detected, and the method comprises the following steps:

driving an image acquisition component to acquire image information of a film body to be detected;

when the film body to be detected is separated from the pressure sensing mechanism, the driving data processing module brings the pressure value measured by the pressure difference measuring assembly into a corresponding mechanical formula, and the interface binding force of the film body to be detected is calculated.