CN116243636A - Intelligent control method and system for radio frequency power supply - Google Patents

Intelligent control method and system for radio frequency power supply Download PDF

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Publication number
CN116243636A
CN116243636A CN202310049423.1A CN202310049423A CN116243636A CN 116243636 A CN116243636 A CN 116243636A CN 202310049423 A CN202310049423 A CN 202310049423A CN 116243636 A CN116243636 A CN 116243636A
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target
signal
preset
power supply
trigger circuit
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CN116243636B (en
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朱培文
尹巧星
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Jiangsu Shenzhou Semi Technology Co ltd
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Jiangsu Shenzhou Semi Technology Co ltd
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/36Means for starting or stopping converters
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423Input/output
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/0003Details of control, feedback or regulation circuits
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/32Means for protecting converters other than automatic disconnection
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/25Pc structure of the system
    • G05B2219/25257Microcontroller

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Inverter Devices (AREA)

Abstract

The invention discloses an intelligent control method and system of a radio frequency power supply, which relate to the technical field of computer application, and the method comprises the following steps: obtaining a target synchronous signal of a target radio frequency power supply through a feedback quantity detection module; analyzing and judging whether the target radio frequency power supply reaches a preset state requirement or not; if yes, calling a preset control scheme, extracting a first preset control scheme, and performing starting control on the target thyristor to obtain a steadily rising voltage; extracting a second preset control scheme when the preset rated voltage is reached; performing starting control on the target current to obtain a current control result; determining a target trigger circuit; and starting and controlling the target radio frequency power supply. The intelligent control device solves the problems that the intelligent degree is low and the power control is unstable in the existing control of the radio frequency power supply. The intelligent degree of the radio frequency power supply starting control is improved, the soft starting control is achieved, the impact of the high-voltage circuit on the electronic tube and surrounding circuits is reduced, and the damage to components is reduced.

Description

Intelligent control method and system for radio frequency power supply
Technical Field
The invention relates to the technical field of computer application, in particular to an intelligent control method and system of a radio frequency power supply.
Background
The modern machining industry, especially the laser machining industry, is increasingly not separated from high-power lasers, and is quite widely applied in metal welding, cutting, surface machining and other aspects. The high-frequency laser has various kinds according to different applications, wherein the radio-frequency power supply can generate sine wave voltage with fixed frequency, the frequency is in a radio-frequency range (about 3 KHz-300 GHz) and has a certain power, and the corresponding radio-frequency laser is the most widely applied radio-frequency laser applying gas and has the characteristics of large output frequency, high electro-optic efficiency and stronger energy. When the prior radio frequency power supply is started and controlled, the problems of impact on surrounding circuits and electron tubes exist, and in addition, the problem of influence on the normal operation of a laser due to unstable power supply caused by poor power supply control effect. Exemplary components are damaged at the moment of starting the radio frequency power supply, and the service life of the components is influenced. Therefore, the starting of the radio frequency power supply is intelligently controlled by utilizing a computer technology, and the control automation degree and the control stability of the radio frequency power supply are improved.
However, in the prior art, the control of the radio frequency power supply has low control intelligence, so that the power supply is unstable, and meanwhile, the problem that a high-voltage circuit impacts an electron tube and surrounding circuits to damage electronic devices exists at the moment of starting.
Disclosure of Invention
The invention aims to provide an intelligent control method and system for a radio frequency power supply, which are used for solving the problems that in the prior art, the control of the radio frequency power supply is low in intelligent degree, so that the power supply is unstable, and meanwhile, a high-voltage circuit impacts an electronic tube and surrounding circuits to damage electronic devices at the moment of starting.
In view of the above problems, the present invention provides an intelligent control method and system for a radio frequency power supply.
In a first aspect, the present invention provides an intelligent control method for a radio frequency power supply, where the method is implemented by an intelligent control system for a radio frequency power supply, and the method includes: obtaining a target synchronous signal of a target radio frequency power supply through a feedback quantity detection module; analyzing the target synchronous signal, and judging whether the target radio frequency power supply reaches a preset state requirement according to an analysis result; if yes, calling a preset control scheme, extracting a first preset control scheme in the preset control scheme, and performing starting control on a target thyristor to obtain a steadily rising voltage; if the steadily rising voltage reaches a preset rated voltage, extracting a second preset control scheme in the preset control schemes; starting control is carried out on the target current based on the second preset control scheme, and a current control result is obtained; determining a target trigger circuit according to the current control result, and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result; and starting and controlling the target radio frequency power supply based on the target trigger circuit preprocessing result.
In a second aspect, the present invention further provides an intelligent control system for a radio frequency power supply, configured to perform an intelligent control method for a radio frequency power supply according to the first aspect, where the system includes: the intelligent acquisition module is used for acquiring a feedback quantity detection module and acquiring a target synchronous signal of a target radio frequency power supply through the feedback quantity detection module; the intelligent judging module is used for analyzing the target synchronous signal and judging whether the target radio frequency power supply reaches a preset state requirement or not according to an analysis result; the first control execution module is used for calling a preset control scheme if yes, extracting a first preset control scheme in the preset control scheme, and performing starting control on the target thyristor to obtain a steadily-rising voltage; the intelligent extraction module is used for extracting a second preset control scheme in the preset control schemes if the steadily-rising voltage reaches a preset rated voltage; the second control execution module is used for performing starting control on the target current based on the second preset control scheme to obtain a current control result; the intelligent processing module is used for determining a target trigger circuit according to the current control result and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result; and the third control execution module is used for performing starting control on the target radio frequency power supply based on the target trigger circuit preprocessing result.
One or more technical schemes provided by the invention have at least the following technical effects or advantages:
obtaining a target synchronous signal of a target radio frequency power supply through a feedback quantity detection module; analyzing the target synchronous signal, and judging whether the target radio frequency power supply reaches a preset state requirement according to an analysis result; if yes, calling a preset control scheme, extracting a first preset control scheme in the preset control scheme, and performing starting control on a target thyristor to obtain a steadily rising voltage; if the steadily rising voltage reaches a preset rated voltage, extracting a second preset control scheme in the preset control schemes; starting control is carried out on the target current based on the second preset control scheme, and a current control result is obtained; determining a target trigger circuit according to the current control result, and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result; and starting and controlling the target radio frequency power supply based on the target trigger circuit preprocessing result. The technical aim of improving the intelligent degree of the starting control of the radio frequency power supply is achieved, the soft starting control of the radio frequency power supply is achieved, the impact of a high-voltage circuit on an electronic tube and surrounding circuits is further reduced, and the technical effect of reducing damage to components is achieved.
The foregoing description is only an overview of the present invention, and is intended to be implemented in accordance with the teachings of the present invention in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present invention more readily apparent.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described below, it being obvious that the drawings in the description below are only exemplary and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of an intelligent control method of a radio frequency power supply of the invention;
FIG. 2 is a flow chart of judging whether the target RF power supply reaches a preset state requirement based on the target output result in the intelligent control method of the RF power supply of the present invention;
FIG. 3 is a schematic flow chart of the second screening result as the target signal data set in the intelligent control method of the radio frequency power supply according to the present invention;
FIG. 4 is a schematic flow chart of the target trigger circuit pretreatment result obtained in the intelligent control method of the radio frequency power supply of the invention;
fig. 5 is a schematic structural diagram of an intelligent control system of a radio frequency power supply according to the present invention.
Reference numerals illustrate:
the intelligent acquisition module M100, the intelligent judgment module M200, the first control execution module M300, the intelligent extraction module M400, the second control execution module M500, the intelligent processing module M600 and the third control execution module M700.
Detailed Description
The invention provides an intelligent control method and system for a radio frequency power supply, which solve the problems that in the prior art, the control of the radio frequency power supply is low in intelligent degree, so that the power supply is unstable, and meanwhile, a high-voltage circuit impacts an electronic tube and surrounding circuits to damage electronic devices at the moment of starting. The technical aim of improving the intelligent degree of the starting control of the radio frequency power supply is achieved, the soft starting control of the radio frequency power supply is achieved, the impact of a high-voltage circuit on an electronic tube and surrounding circuits is further reduced, and the technical effect of reducing damage to components is achieved.
The technical scheme of the invention obtains, stores, uses, processes and the like the data, which all meet the relevant regulations of national laws and regulations.
In the following, the technical solutions of the present invention will be clearly and completely described with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present invention, but not all embodiments of the present invention, and that the present invention is not limited by the exemplary embodiments described herein. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. It should be further noted that, for convenience of description, only some, but not all of the drawings related to the present invention are shown.
Example 1
Referring to fig. 1, the invention provides an intelligent control method of a radio frequency power supply, wherein the method is applied to an intelligent control system of the radio frequency power supply, and the method specifically comprises the following steps:
step S100: a feedback quantity detection module is obtained, and a target synchronous signal of a target radio frequency power supply is obtained through the feedback quantity detection module;
specifically, the intelligent control method of the radio frequency power supply is applied to an intelligent control system of the radio frequency power supply, and the intelligent control system can be used for performing soft start intelligent control on the target radio frequency power supply, so that impact of a high-voltage circuit on an electronic tube and surrounding circuits is reduced, and the safety of components is ensured. Firstly, the target radio frequency power supply is detected in real time through a feedback quantity detection module in the intelligent control system, so that a real-time signal of the target radio frequency power supply, namely the target synchronous signal, is obtained. The target radio frequency power supply is any radio frequency power supply which is started and controlled by the intelligent control system, and is exemplified by a certain high-power radio frequency power supply in the laser processing industry. The feedback quantity detection module is embedded in the intelligent control system and is used for detecting the radio frequency power supply automatically controlled by the intelligent control system, related electric signals, voltage signals, current signals and the like in the circuit of the radio frequency power supply in real time. And by detecting the target synchronous signal, a signal basis is provided for the subsequent determination of the starting control decision of the target radio frequency power supply.
Step S200: analyzing the target synchronous signal, and judging whether the target radio frequency power supply reaches a preset state requirement according to an analysis result;
further, as shown in fig. 2, step S200 of the present invention includes:
step S210: obtaining a target signal time sequence based on the target synchronous signal;
step S220: screening the target signal time sequence to obtain a target signal data set;
step S230: constructing a synchronous signal support vector machine, and inputting the target signal data set into the synchronous signal support vector machine to obtain a target output result;
further, the invention comprises the following steps:
step S231: acquiring a historical synchronous signal time sequence;
step S232: screening the historical synchronous signal time sequence to obtain a historical signal data set;
step S233: extracting first historical signal data in the historical signal data set, and analyzing the first historical signal data to obtain a first state label;
step S234: obtaining a historical state tag group based on the first state tag, wherein the historical state tag group corresponds to the historical signal data group one by one;
step S235: combining the historical state tag set with the historical signal data set to obtain training data;
step S236: and constructing the synchronous signal support vector machine based on the training data.
Step S240: and judging whether the target radio frequency power supply reaches a preset state requirement or not based on the target output result.
Specifically, after the intelligent control system detects the target synchronous signal, the intelligent control system analyzes and judges the target synchronous signal so as to determine whether to start and control the target radio frequency power supply.
Firstly, based on a target synchronous signal of the target radio frequency power supply, sequencing and sorting the target synchronous signal by time characteristics of each signal, namely, a time sequence when the signal is detected, so as to obtain a target signal time sequence. And screening the target signal time sequence, and removing part of redundant signal data to obtain a target signal data set. And then, carrying out sorting analysis on the historical synchronous signals, further training to obtain the synchronous signal support vector machine, and further inputting the target signal data set into the synchronous signal support vector machine to obtain a target output result of the synchronous signal support vector machine. Specifically, firstly, a historical synchronous signal time sequence is acquired based on big data, and the historical synchronous signal time sequence is screened, so that a historical signal data set is obtained. The history signal data set is used for training the synchronous signal support vector machine. And then extracting first historical signal data in the historical signal data set, and manually analyzing the first historical signal data to obtain the state condition of the target radio frequency power supply corresponding to the first historical signal data, namely, the state condition is used as the first state label. And obtaining a historical state label set based on the first state label, wherein the historical state label set corresponds to the historical signal data set one by one, and finally combining the historical state label set with the historical signal data set to obtain training data. And finally constructing the synchronous signal support vector machine based on the training data. And finally judging whether the target radio frequency power supply reaches a preset state requirement or not based on the target output result. The preset state requirement is that the target radio frequency power supply is in a starting state.
By constructing the synchronous signal support vector machine, the technical aim of providing a model foundation for intelligently analyzing the target synchronous signal of the target radio frequency power supply is achieved, the intelligent degree of signal analysis is improved, and the technical effects of improving the reliability and accuracy of state judgment of the target radio frequency power supply are achieved.
Further, as shown in fig. 3, step S220 of the present invention includes:
step S221: obtaining a signal screening processor, wherein the signal screening processor comprises a first screening layer and a second screening layer;
step S222: screening the target signal time sequence through the first screening layer to obtain a first screening result;
further, the invention comprises the following steps:
step S2221: extracting a first signal in the target signal time sequence, wherein the first signal has a first time sequence characteristic;
step S2222: determining a first adjacent time sequence and a second adjacent time sequence based on the first time sequence characteristic;
step S2223: sequentially matching the first adjacent signal of the first adjacent time sequence and the second adjacent signal of the second adjacent time sequence;
step S2224: calculating a first adjacent signal difference based on the first adjacent signal and the first signal, and calculating a second adjacent signal difference based on the second adjacent signal and the first signal;
step S2225: judging whether the first adjacent signal difference and the second adjacent signal difference meet a preset signal difference threshold value or not;
step S2226: if not, adding the first signal to the first screening result.
Step S223: extracting a preset lattice hopping scheme in the second screening layer, and carrying out secondary screening on the first screening result based on the preset lattice hopping scheme to obtain a second screening result;
step S224: and taking the second screening result as the target signal data set.
Specifically, before screening the target signal sequence, a signal screening processor is first constructed for intelligently screening and analyzing the target signal sequence. The signal screening processor comprises a first screening layer and a second screening layer.
And screening the target signal time sequence through the first screening layer in the signal screening processor to obtain the first screening result. And then taking the first screening result as input information of the second screening layer, intelligently screening by the second screening layer to obtain the second screening result, and taking the second screening result as a final processing result of the signal screening processor, namely, the target signal data set. When the first screening layer performs screening, each signal in the target signal time sequence is sequentially subjected to comparison analysis, for example, the first signal in the target signal time sequence is randomly extracted, meanwhile, the first time sequence characteristic of the first signal is extracted, further, based on the first time sequence characteristic, a corresponding previous time sequence, namely, a first adjacent time sequence and a corresponding next time sequence, namely, the second adjacent time sequence, then = a first adjacent signal and a second adjacent signal which are sequentially matched with the first adjacent time sequence, the first adjacent signal and the first signal are compared, further, a first adjacent signal difference is obtained through calculation, the second adjacent signal and the first signal are compared, and further, a second adjacent signal difference is obtained through calculation. And finally, judging whether the first adjacent signal difference and the second adjacent signal difference meet a preset signal difference threshold value. The preset signal difference threshold is a maximum difference range between signals obtained by continuous signal detection which is determined by analysis in advance based on historical signal data and operation experience of related technicians. And when the judging result shows that the first adjacent signal difference and the second adjacent signal difference do not meet the preset signal difference threshold, indicating that the extracted first signal has larger variation, and adding the first signal to the first screening result for an analysis basis of an intelligent control system.
Further, when the second screening layer performs secondary screening on the first screening result, a preset tab scheme in the second screening layer is called first, and then the second screening result is subjected to secondary screening based on the preset tab scheme, so that the second screening result is obtained. The preset tab scheme refers to the minimum interval times between extracting abnormal signals. Exemplary, for example, after the signal a is added to the first filtering result, a signal B also meets the condition of being added to the first filtering result, so that the number of intervals between the signal B and the signal a is calculated, and when the corresponding number of intervals is smaller than the number of intervals in the preset tab scheme, the signal B is removed. And finally, taking the second screening result obtained after the secondary screening as the target signal data set.
The target signal data set is obtained through screening, so that the aim of providing an input data basis for the subsequent intelligent analysis of the support vector machine is fulfilled, and the technical effects of improving the system processing efficiency and the system performance are achieved.
Step S300: if yes, calling a preset control scheme, extracting a first preset control scheme in the preset control scheme, and performing starting control on a target thyristor to obtain a steadily rising voltage;
step S400: if the steadily rising voltage reaches a preset rated voltage, extracting a second preset control scheme in the preset control schemes;
step S500: starting control is carried out on the target current based on the second preset control scheme, and a current control result is obtained;
specifically, after the system intelligently judges that the current state of the target radio frequency power supply meets the preset state requirement, the intelligent control system automatically invokes a preset control scheme, extracts a first preset control scheme in the preset control scheme, and performs starting control on the target thyristor to obtain a steadily rising voltage. Further, when the steadily rising voltage rises to meet the preset rated voltage, the system automatically extracts a second preset control scheme in the preset control schemes, and starts and controls the target current based on the second preset control scheme to obtain a current control result. For example, if a certain thyristor module is connected between a power frequency power supply and a transformer, when a main circuit is started, a thyristor can control voltage output, the voltage output by the thyristor can gradually rise, and along with the rising of the output voltage of the thyristor, the voltage of the transformer gradually rises until the thyristor is completely conducted. When the high-voltage transformer works at rated voltage, smooth starting can be realized. Thereby reducing the starting current and avoiding the tripping of the starting current. The soft start target of the target radio frequency power supply is realized, the heating phenomenon of the system is slowed down, and the control safety of the system is improved.
Step S600: determining a target trigger circuit according to the current control result, and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result;
further, as shown in fig. 4, the invention comprises the following steps:
step S610: obtaining a pulse transformer, wherein the pulse transformer comprises a transistor, a voltage stabilizing tube and a diode;
step S620: and isolating the target trigger circuit through the transistor, the voltage stabilizing tube and the diode to obtain a target trigger circuit preprocessing result.
Specifically, to ensure safe and stable operation of the trigger circuit, the trigger circuit and the main circuit are generally separated, and a low-voltage direct-current power supply in the trigger circuit is relatively independently supplied. And analyzing the current control result to determine a current trigger circuit of the intelligent control system, namely the target trigger circuit, so as to preprocess the target trigger circuit and obtain a target trigger circuit preprocessing result. Firstly, a pulse transformer is called, and the target trigger circuit is isolated through a transistor, a voltage stabilizing tube and a diode in the pulse transformer, namely, the interference factors of the trigger circuit and a control circuit are reduced through electric isolation, so that the target trigger circuit preprocessing result is obtained. The transistor is used for preventing high voltage breakdown at the moment of switching off the transistor, and the diode is used for preventing high voltage secondarily induced by the pulse transformer from being loaded to the grid electrode of the transistor when the transistor is switched off.
Step S700: and starting and controlling the target radio frequency power supply based on the target trigger circuit preprocessing result.
Further, step S700 of the present invention includes:
step S710: the target trigger circuit is detected in real time through the feedback quantity detection module, and the real-time state of the trigger circuit is obtained;
step S720: the trigger circuit real-time state comprises trigger circuit real-time voltage and trigger circuit real-time current;
step S730: judging and analyzing the trigger circuit real-time voltage and the trigger circuit real-time current to obtain real-time judgment information;
step S740: and starting control is carried out on the target radio frequency power supply based on the real-time judgment information.
Specifically, when the target radio frequency power supply is started and controlled based on the target trigger circuit preprocessing result, the target trigger circuit is detected in real time through the feedback quantity detection module, and the real-time state of the trigger circuit is obtained. And then sequentially extracting the trigger circuit real-time voltage and the trigger circuit real-time current in the trigger circuit real-time state, further judging and analyzing the trigger circuit real-time voltage and the trigger circuit real-time current, judging whether the trigger circuit real-time voltage is in a preset voltage range or not, judging whether the trigger circuit real-time current is in a preset current range or not, and finally obtaining the real-time judgment information. When the real-time judgment information shows that the real-time voltage of the trigger circuit and the real-time current of the trigger circuit are in the preset normal range, the system starts and controls the target radio frequency power supply, so that potential safety hazards caused by voltage or current overload in the trigger circuit are effectively avoided, and the control stability of the system is improved.
In summary, the intelligent control method of the radio frequency power supply provided by the invention has the following technical effects:
obtaining a target synchronous signal of a target radio frequency power supply through a feedback quantity detection module; analyzing the target synchronous signal, and judging whether the target radio frequency power supply reaches a preset state requirement according to an analysis result; if yes, calling a preset control scheme, extracting a first preset control scheme in the preset control scheme, and performing starting control on a target thyristor to obtain a steadily rising voltage; if the steadily rising voltage reaches a preset rated voltage, extracting a second preset control scheme in the preset control schemes; starting control is carried out on the target current based on the second preset control scheme, and a current control result is obtained; determining a target trigger circuit according to the current control result, and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result; and starting and controlling the target radio frequency power supply based on the target trigger circuit preprocessing result. The technical aim of improving the intelligent degree of the starting control of the radio frequency power supply is achieved, the soft starting control of the radio frequency power supply is achieved, the impact of a high-voltage circuit on an electronic tube and surrounding circuits is further reduced, and the technical effect of reducing damage to components is achieved.
Example two
Based on the same inventive concept as the intelligent control method of a radio frequency power supply in the foregoing embodiment, the present invention further provides an intelligent control system of a radio frequency power supply, referring to fig. 5, the system includes:
the intelligent acquisition module M100 is used for acquiring a feedback quantity detection module and acquiring a target synchronous signal of a target radio frequency power supply through the feedback quantity detection module;
the intelligent judging module M200 is used for analyzing the target synchronous signal and judging whether the target radio frequency power supply reaches a preset state requirement according to an analysis result;
the first control execution module M300 is used for calling a preset control scheme if yes, extracting a first preset control scheme in the preset control scheme, and performing starting control on a target thyristor to obtain a stable rising voltage;
the intelligent extraction module M400 is used for extracting a second preset control scheme in the preset control schemes if the steadily-rising voltage reaches a preset rated voltage;
the second control execution module M500 is configured to perform start control on the target current based on the second preset control scheme, so as to obtain a current control result;
the intelligent processing module M600 is used for determining a target trigger circuit according to the current control result and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result;
and a third control execution module M700, configured to perform start control on the target radio frequency power supply based on the target trigger circuit preprocessing result.
Further, the intelligent judgment module M200 in the system is further configured to:
obtaining a target signal time sequence based on the target synchronous signal;
screening the target signal time sequence to obtain a target signal data set;
constructing a synchronous signal support vector machine, and inputting the target signal data set into the synchronous signal support vector machine to obtain a target output result;
and judging whether the target radio frequency power supply reaches a preset state requirement or not based on the target output result.
Further, the intelligent judgment module M200 in the system is further configured to:
acquiring a historical synchronous signal time sequence;
screening the historical synchronous signal time sequence to obtain a historical signal data set;
extracting first historical signal data in the historical signal data set, and analyzing the first historical signal data to obtain a first state label;
obtaining a historical state tag group based on the first state tag, wherein the historical state tag group corresponds to the historical signal data group one by one;
combining the historical state tag set with the historical signal data set to obtain training data;
and constructing the synchronous signal support vector machine based on the training data.
Further, the intelligent judgment module M200 in the system is further configured to:
obtaining a signal screening processor, wherein the signal screening processor comprises a first screening layer and a second screening layer;
screening the target signal time sequence through the first screening layer to obtain a first screening result;
extracting a preset lattice hopping scheme in the second screening layer, and carrying out secondary screening on the first screening result based on the preset lattice hopping scheme to obtain a second screening result;
and taking the second screening result as the target signal data set.
Further, the intelligent judgment module M200 in the system is further configured to:
extracting a first signal in the target signal time sequence, wherein the first signal has a first time sequence characteristic;
determining a first adjacent time sequence and a second adjacent time sequence based on the first time sequence characteristic;
sequentially matching the first adjacent signal of the first adjacent time sequence and the second adjacent signal of the second adjacent time sequence;
calculating a first adjacent signal difference based on the first adjacent signal and the first signal, and calculating a second adjacent signal difference based on the second adjacent signal and the first signal;
judging whether the first adjacent signal difference and the second adjacent signal difference meet a preset signal difference threshold value or not;
if not, adding the first signal to the first screening result.
Further, the intelligent processing module M600 in the system is further configured to:
obtaining a pulse transformer, wherein the pulse transformer comprises a transistor, a voltage stabilizing tube and a diode;
and isolating the target trigger circuit through the transistor, the voltage stabilizing tube and the diode to obtain a target trigger circuit preprocessing result.
Further, the third control execution module M700 in the system is further configured to:
the target trigger circuit is detected in real time through the feedback quantity detection module, and the real-time state of the trigger circuit is obtained;
the trigger circuit real-time state comprises trigger circuit real-time voltage and trigger circuit real-time current;
judging and analyzing the trigger circuit real-time voltage and the trigger circuit real-time current to obtain real-time judgment information;
and starting control is carried out on the target radio frequency power supply based on the real-time judgment information.
In this description, each embodiment is described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the foregoing method and specific example for controlling an rf power supply in the first embodiment of fig. 1 are also applicable to the foregoing system for controlling an rf power supply in this embodiment, and by the foregoing detailed description of the method for controlling an rf power supply, those skilled in the art may clearly know the system for controlling an rf power supply in this embodiment, so that, for brevity of description, no detailed description will be given here. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the present invention and the equivalent techniques thereof, the present invention is also intended to include such modifications and variations.

Claims (8)

1. An intelligent control method of a radio frequency power supply is characterized by comprising the following steps:
a feedback quantity detection module is obtained, and a target synchronous signal of a target radio frequency power supply is obtained through the feedback quantity detection module;
analyzing the target synchronous signal, and judging whether the target radio frequency power supply reaches a preset state requirement according to an analysis result;
if yes, calling a preset control scheme, extracting a first preset control scheme in the preset control scheme, and performing starting control on a target thyristor to obtain a steadily rising voltage;
if the steadily rising voltage reaches a preset rated voltage, extracting a second preset control scheme in the preset control schemes;
starting control is carried out on the target current based on the second preset control scheme, and a current control result is obtained;
determining a target trigger circuit according to the current control result, and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result;
and starting and controlling the target radio frequency power supply based on the target trigger circuit preprocessing result.
2. The intelligent control method according to claim 1, wherein the analyzing the target synchronization signal and determining whether the target rf power source reaches a preset state requirement according to an analysis result includes:
obtaining a target signal time sequence based on the target synchronous signal;
screening the target signal time sequence to obtain a target signal data set;
constructing a synchronous signal support vector machine, and inputting the target signal data set into the synchronous signal support vector machine to obtain a target output result;
and judging whether the target radio frequency power supply reaches a preset state requirement or not based on the target output result.
3. The intelligent control method according to claim 2, wherein the constructing a synchronization signal support vector machine includes:
acquiring a historical synchronous signal time sequence;
screening the historical synchronous signal time sequence to obtain a historical signal data set;
extracting first historical signal data in the historical signal data set, and analyzing the first historical signal data to obtain a first state label;
obtaining a historical state tag group based on the first state tag, wherein the historical state tag group corresponds to the historical signal data group one by one;
combining the historical state tag set with the historical signal data set to obtain training data;
and constructing the synchronous signal support vector machine based on the training data.
4. The intelligent control method according to claim 2, wherein the step of screening the target signal timing sequence to obtain a target signal data set includes:
obtaining a signal screening processor, wherein the signal screening processor comprises a first screening layer and a second screening layer;
screening the target signal time sequence through the first screening layer to obtain a first screening result;
extracting a preset lattice hopping scheme in the second screening layer, and carrying out secondary screening on the first screening result based on the preset lattice hopping scheme to obtain a second screening result;
and taking the second screening result as the target signal data set.
5. The intelligent control method according to claim 4, wherein the step of screening the target signal timing sequence by the first screening layer to obtain a first screening result includes:
extracting a first signal in the target signal time sequence, wherein the first signal has a first time sequence characteristic;
determining a first adjacent time sequence and a second adjacent time sequence based on the first time sequence characteristic;
sequentially matching the first adjacent signal of the first adjacent time sequence and the second adjacent signal of the second adjacent time sequence;
calculating a first adjacent signal difference based on the first adjacent signal and the first signal, and calculating a second adjacent signal difference based on the second adjacent signal and the first signal;
judging whether the first adjacent signal difference and the second adjacent signal difference meet a preset signal difference threshold value or not;
if not, adding the first signal to the first screening result.
6. The intelligent control method according to claim 1, wherein determining a target trigger circuit according to the current control result, and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result, comprises:
obtaining a pulse transformer, wherein the pulse transformer comprises a transistor, a voltage stabilizing tube and a diode;
and isolating the target trigger circuit through the transistor, the voltage stabilizing tube and the diode to obtain a target trigger circuit preprocessing result.
7. The intelligent control method according to claim 6, wherein after the target trigger circuit is isolated by the transistor, the regulator tube, and the diode, the target trigger circuit pretreatment result is obtained, further comprising:
the target trigger circuit is detected in real time through the feedback quantity detection module, and the real-time state of the trigger circuit is obtained;
the trigger circuit real-time state comprises trigger circuit real-time voltage and trigger circuit real-time current;
judging and analyzing the trigger circuit real-time voltage and the trigger circuit real-time current to obtain real-time judgment information;
and starting control is carried out on the target radio frequency power supply based on the real-time judgment information.
8. An intelligent control system for a radio frequency power supply, the intelligent control system comprising:
the intelligent acquisition module is used for acquiring a feedback quantity detection module and acquiring a target synchronous signal of a target radio frequency power supply through the feedback quantity detection module;
the intelligent judging module is used for analyzing the target synchronous signal and judging whether the target radio frequency power supply reaches a preset state requirement or not according to an analysis result;
the first control execution module is used for calling a preset control scheme if yes, extracting a first preset control scheme in the preset control scheme, and performing starting control on the target thyristor to obtain a steadily-rising voltage;
the intelligent extraction module is used for extracting a second preset control scheme in the preset control schemes if the steadily-rising voltage reaches a preset rated voltage;
the second control execution module is used for performing starting control on the target current based on the second preset control scheme to obtain a current control result;
the intelligent processing module is used for determining a target trigger circuit according to the current control result and preprocessing the target trigger circuit to obtain a target trigger circuit preprocessing result;
and the third control execution module is used for performing starting control on the target radio frequency power supply based on the target trigger circuit preprocessing result.
CN202310049423.1A 2023-02-01 2023-02-01 Intelligent control method and system for radio frequency power supply Active CN116243636B (en)

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