CN116243427A - Multichannel amplitude equalizer based on micro-ring resonator array - Google Patents
Multichannel amplitude equalizer based on micro-ring resonator array Download PDFInfo
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- 238000005253 cladding Methods 0.000 claims abstract description 46
- 230000001105 regulatory effect Effects 0.000 claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 16
- 230000008878 coupling Effects 0.000 claims description 40
- 238000010168 coupling process Methods 0.000 claims description 40
- 238000005859 coupling reaction Methods 0.000 claims description 40
- 230000000694 effects Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 5
- 230000005693 optoelectronics Effects 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 108
- 238000013461 design Methods 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 238000013528 artificial neural network Methods 0.000 abstract description 3
- 238000004364 calculation method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 15
- 239000010410 layer Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000033228 biological regulation Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 244000126211 Hericium coralloides Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/2934—Fibre ring resonators, e.g. fibre coils
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
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- G—PHYSICS
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- G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a multichannel amplitude equalizer based on a micro-ring resonator array. The invention comprises an upper cladding, a lower cladding, a bus input/output waveguide and N micro-ring resonator units; the bus input/output waveguide and the N micro-ring resonator units are arranged between the upper cladding and the lower cladding, the N micro-ring resonator units are arranged on the side of the bus input/output waveguide, and the N micro-ring resonator units are sequentially arranged at intervals along the transmission direction of the bus input/output waveguide. The multichannel wavelength signals are input from the bus waveguide, and the multichannel optical signals are output from the bus waveguide after being regulated and controlled simultaneously by the micro-ring resonator units, so that the amplitude balance of the multichannel optical signals is realized. The invention has compact structure, convenient design and high stability, realizes the simultaneous amplitude balance of the multipath wavelength signals by utilizing the inherent resonance characteristic of the micro-ring resonator, has lower energy consumption and extra loss, and is suitable for the fields of multichannel wavelength division multiplexing systems, optical calculation and neural networks and microwave photonics.
Description
Technical Field
The invention relates to a multichannel amplitude equalizer in the field of planar optical waveguide integrated devices, in particular to a multichannel amplitude equalizer based on a micro-ring resonator array.
Background
Today, the increasing data transmission capacity demands place higher demands on the development of optical communication systems, in particular wavelength division multiplexing networks. The multiplexed signals in the wavelength division multiplexing system need to be amplified by the erbium-doped fiber amplifier and then transmitted for a longer distance. It is necessary to monitor the power and dynamically equalize the multipath optical signals in a transmission system to maintain the spectral flatness. The amplitude equalizer can realize dynamic optical power regulation and control, and is widely applied to the power equalization of multiple channels in an optical transmission system. The uniformity of the power of the multichannel optical signal can also improve the optical signal-to-noise ratio and the error rate in a long-distance transmission system. In addition, for the optical frequency comb which has been widely studied at present, the amplitude equalizer is adopted to flexibly and independently regulate the output power of each comb tooth, so that the optical frequency comb can be more suitable for being used as a light source part in an optical computing and neural network system, and a power modulator is not required to be additionally added in each signal. Meanwhile, considering a multi-light source microwave photon filter in the field of microwave photonics, the output power of different wavelength sources can be regulated and controlled through an amplitude equalizer, and a specific sampling window function can be obtained, so that the regulation and control of the time response of the filter are realized.
The power regulation in a power equalization system is mainly dependent on the unit device of an optical power attenuator (VOA). Over the past years, some optical power attenuators built based on bulk elements have been put into commercial use, including microelectromechanical systems and liquid crystals. However, devices based on these principles still have insufficient mechanical stability and slow response times. A further crucial disadvantage is that it is difficult to achieve a compact design and integrate with other optical elements. In recent years, due to the advantages of high integration, low energy consumption, high bandwidth density, compatibility of semiconductor process technology and the like provided by silicon-based photonics, an optical power attenuator based on the technology can have small size, low cost and high response time, and is suitable for being integrated with other optical devices and used as a potential solution for large-scale all-optical signal processing in the future. The silicon-based optical power attenuator can be realized by using the free carrier absorption effect of the PN junction nanowire waveguide. Electroabsorption optical power attenuators naturally have response times on the order of nanoseconds, but are limited by saturated free carrier concentrations, making it difficult to achieve large amounts of attenuation in small device sizes, with device lengths typically on the order of millimeters. On the other hand, a scheme of implementing an optical power attenuator by using a thermo-optical effect has also been greatly advanced, such as a mach-zehnder interferometer (MZI) structure.
Considering multi-channel applications in wavelength division multiplexing systems, multiplexing/demultiplexing functions may typically be implemented by arrayed waveguide gratings with multi-wavelength interference characteristics. The amplitude equalization of each wavelength channel in the wavelength division multiplexing system can be realized by integrating the arrayed waveguide grating and the optical power attenuator of each channel. For multi-channel amplitude equalizers of such architecture, the power consumption per wavelength channel is typically around tens of milliwatts and the overall size is large. Due to the temperature sensitivity of the arrayed waveguide grating, heat accumulation of a plurality of wavelength channels and temperature change of the external environment of the optical power attenuator in the power attenuation implementation process can potentially influence the working wavelength of the arrayed waveguide grating, so that the working stability of the whole system is reduced. Compared with the system, the Micro Ring Resonator (MRR) has more compact occupied area and more flexible expansibility, and the natural resonance characteristic of the MRR is suitable for multiplexing and demultiplexing a plurality of wavelength channels. Moreover, the power consumed by tuning control of the micro-ring resonance peak is smaller, and the alignment of the wavelength position and the accurate regulation and control of the optical power can be ensured at the same time, so that the stability control of the system is considered in the dynamic working process. This is important for flexible amplitude equalization and monitoring of multiple wavelength channels in large-scale optical transmission networks.
Disclosure of Invention
In order to solve the problems in the background art, the present invention aims to provide a multichannel amplitude equalizer based on a micro-ring resonator array, the micro-ring resonators are adopted to independently regulate and control the amplitude of the optical signal of each path of wavelength channel, and the resonance peak position of each micro-ring resonator is tuned and controlled, so that the optical power at a specific wavelength is accurately regulated and controlled. The architecture has excellent expandability and tunability, is suitable for a reconfigurable multichannel wavelength division multiplexing system, and meets the requirement of low power consumption.
The technical scheme adopted by the invention is as follows:
the invention comprises an upper cladding, a lower cladding, a bus input/output waveguide and N micro-ring resonator units; the bus input/output waveguide and the N micro-ring resonator units are arranged between the upper cladding and the lower cladding, the N micro-ring resonator units are arranged at the side of the bus input/output waveguide, and are sequentially arranged at intervals along the transmission direction of the bus input/output waveguide.
Each micro-ring resonator unit comprises at least one micro-ring resonator, all micro-ring resonators are arranged between an upper cladding layer and a lower cladding layer in the current micro-ring resonator unit, if a plurality of micro-ring resonators exist, all micro-ring resonators are arranged on the same side of a bus input/output waveguide, all micro-ring resonators are sequentially arranged at intervals, and micro-ring resonators close to the bus input/output waveguide are arranged at intervals between the bus input/output waveguide and are in lateral evanescent wave coupling, and adjacent micro-ring resonators are also arranged at intervals and are in lateral evanescent wave coupling.
Micro-ring resonator units of the N micro-ring resonator units the number of ring resonators is the same or different.
Each micro-ring resonator unit further comprises an uploading and downloading waveguide, the uploading and downloading waveguide is arranged between the upper cladding and the lower cladding, all the micro-ring resonators are sequentially arranged at intervals between the bus input and output waveguide and the uploading and downloading waveguide, the micro-ring resonators close to the uploading and downloading waveguide are arranged at intervals between the uploading and downloading waveguide and are coupled with the uploading and downloading waveguide through lateral evanescent waves.
Tuning electrodes are embedded in an upper cladding or a lower cladding outside the micro-ring resonator, the power of the tuning electrodes is adjusted, the thermo-optical effect of the temperature of the micro-ring resonator is changed, the mode effective refractive index of the micro-ring resonator is changed, and the resonance peak position of the micro-ring resonator is regulated and controlled;
or forming a tuning electrode after doping type ions are injected into the micro-ring resonator, adjusting the voltage of the tuning electrode, changing the electro-optical effect of the carrier quantity in the micro-ring resonator, changing the mode effective refractive index of the micro-ring resonator, and adjusting and controlling the resonance peak position of the micro-ring resonator.
The bus input/output waveguide, the micro-ring resonator and the uploading/downloading waveguide are made of the same materials.
The micro-ring resonator is an annular waveguide with a perfect circle and the same waveguide width, an annular waveguide with a perfect circle and the gradually changed waveguide width, an annular waveguide with an elliptical shape and the same waveguide width, or an annular waveguide with an elliptical shape and the gradually changed waveguide width.
The waveguide at the coupling position of the bus input/output waveguide and the corresponding micro-ring resonator is a linear waveguide, and the waveguide and the corresponding coupling micro-ring resonator are curved waveguides with the same circle center or curved waveguides with different circle centers.
The waveguide at the coupling position of the uploading and downloading waveguide and the corresponding micro-ring resonator is a linear waveguide, and the waveguide and the corresponding coupling micro-ring resonator are curved waveguides with the same circle center or curved waveguides with different circle centers.
Waveguide widths of the bus input/output waveguide, the micro-ring resonator and the uploading/downloading waveguide are set according to requirements; the intervals among the bus input/output waveguide, the uploading/downloading waveguide and the micro-ring resonator are set according to the requirements;
the waveguide shape and the bending radius of each micro-ring resonator are set according to requirements, and the spacing between adjacent micro-ring resonators is set according to requirements.
The invention has the beneficial effects that:
the invention adopts the micro-ring resonator as the basic structural unit of the amplitude equalizer, and has the advantages of compact structure, convenient design and high stability.
The invention realizes the amplitude equalization of the optical signals at specific wavelength by tuning the resonance peak position of the micro-ring resonator, and the architecture of the micro-ring resonator array is adopted to realize the simultaneous equalization of the multipath wavelength signals only by a single bus waveguide compared with the scheme of integrating the array waveguide grating and the optical power attenuator, thereby having smaller device size, lower extra loss and energy consumption. The excellent expandability and tunability of the architecture make the architecture suitable for the fields of reconfigurable multichannel wavelength division multiplexing systems, optical computing and neural networks and microwave photonics.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic cross-sectional view of a microring resonator at a location.
Fig. 3 is a schematic diagram of a microring resonator in various embodiments.
Fig. 4 is a schematic structural diagram of a bus input/output waveguide, an upload/download waveguide, and a micro-ring resonator coupled as a linear waveguide.
Fig. 5 is a schematic structural diagram of a bus input/output waveguide, an uploading/downloading waveguide and a curved waveguide with the same center on the same side when being coupled.
Fig. 6 is a schematic structural diagram of a bus input/output waveguide, an uploading/downloading waveguide, and a curved waveguide with a micro-ring resonator as a center on different sides.
Fig. 7 is a schematic diagram of a micro-ring resonator unit that is an uploading-downloading type micro-ring resonator including a plurality of micro-ring resonators longitudinally cascaded and including an uploading-downloading waveguide.
Fig. 8 is a schematic structural diagram of a microring resonator unit as a pass-through microring resonator comprising a plurality of microring resonators longitudinally cascaded without an upload-download waveguide.
Fig. 9 is a schematic diagram showing the variation of the amplitude of the output optical signal at a certain operating wavelength of the amplitude equalizer according to the power of the tuning electrode according to the embodiment of the present invention.
Fig. 10 is a schematic diagram of the change of the transmission intensity of the output end of the bus input/output waveguide with respect to the wavelength under different working states in the amplitude equalizer according to the embodiment of the present invention.
Fig. 11 is a schematic diagram showing a change of transmission intensity of an output end of a bus input/output waveguide with wavelength when resonance peaks of a plurality of wavelength channels of the amplitude equalizer are coincident in an embodiment of the present invention.
In the figure: 1. bus input/output waveguide, 2, micro-ring resonator unit, 3, micro-ring resonator, 4, uploading/downloading waveguide, 5, tuning electrode, 6, upper cladding, 7, lower cladding, 8, straight waveguide coupling structure, 9, equidirectional bending waveguide coupling structure, 10, reverse bending waveguide coupling structure.
Detailed Description
The invention is further described below with reference to the drawings and examples.
As shown in fig. 1, the invention comprises an upper cladding layer 6, a lower cladding layer 7, a bus input/output waveguide 1 and N micro-ring resonator units 2, wherein the serial numbers of the N micro-ring resonator units 2 are sequentially recorded as 21, …,2N, … and 2N; the bus input/output waveguide 1 is used for transmitting multiple optical wavelength signals. The bus input/output waveguide 1 and the N micro-ring resonator units 2 are all arranged between the upper cladding 6 and the lower cladding 7, namely, the bus input/output waveguide 1 and the N micro-ring resonator units 2 are all covered by the upper cladding 6 and the lower cladding 7, the N micro-ring resonator units 2 are all arranged at the side of the bus input/output waveguide 1, the N micro-ring resonator units 2 can be all arranged at one side of the bus input/output waveguide 1 or part of the N micro-ring resonator units 2 are arranged at one side of the bus input/output waveguide 1 and the other part of the N micro-ring resonator units 2 are arranged at the other side of the bus input/output waveguide 1; the N micro-ring resonator units 2 are sequentially and alternately arranged along the transmission direction of the bus input/output waveguide 1, the transmission direction of the bus input/output waveguide 1 is determined by the axes at two ends of the bus input/output waveguide 1, each micro-ring resonator unit 2 regulates and controls the optical power amplitude of a corresponding channel, and the N micro-ring resonator units 2 can realize the simultaneous independent regulation and control of the optical power amplitude of N channels.
In the invention, a plurality of micro-ring resonator units 2 are transversely arranged in parallel and share the same bus input/output waveguide 1, and each micro-ring resonator unit 2 corresponds to one path of wavelength channel respectively; lateral evanescent wave coupling occurs between each micro-ring resonator 3 and the bus input/output waveguide 1 and between each micro-ring resonator 3 and the bus uploading/downloading carrier waveguide 4, so that optical field resonance is generated in the micro-ring resonator 3, and a resonance peak occurs at a specific position; the position of a resonance peak generated by the micro-ring resonator 3 is regulated and controlled to enable a corresponding wavelength signal to be positioned at a specific resonance peak position, so that the amplitude of the wavelength signal after being transmitted through the bus input/output waveguide 1 is regulated and controlled; the multichannel wavelength signals are input from the same bus input/output waveguide 1, and the multichannel optical signals are balanced in amplitude by simultaneously regulating and controlling the plurality of micro-ring resonator units 2 and outputting the multichannel wavelength signals from the same bus input/output waveguide 1.
In specific implementation, the multichannel amplitude equalizer is provided with two main ports, namely an input port and an output port of the bus input/output waveguide 1 for transmitting multichannel optical wavelength signals, and the two main ports are used for inputting and outputting the multichannel optical wavelength signals; in addition, the optical signal monitoring device is provided with N auxiliary ports, namely a download port of the uploading/downloading carrier 4 corresponding to each specific wavelength channel, and is used for monitoring the amplitude of the optical signal corresponding to the specific wavelength channel.
The input and output of the multipath optical wavelength signals pass through the same bus input/output waveguide 1; the multi-path optical wavelength signals are input from one side of the bus input/output waveguide 1 and output from the other side; through the tuning action of the micro-ring resonator 3 corresponding to the specific wavelength channel, a certain path of optical signal corresponding to the specific wavelength channel input from one side of the bus input/output waveguide 1 is subjected to evanescent wave coupling of the micro-ring resonator 3, the amplitude of the optical signal at the wavelength is subjected to power tuning of the resonance peak of the micro-ring resonator 3 at a specific position, and the optical power shows a specific attenuation when the optical signal passes through the micro-ring resonator 3 and is output from the other side of the bus input/output waveguide 1; meanwhile, through evanescent wave coupling of the micro-ring resonator 3, optical signals with specific intensity are output from the download ports of the corresponding uploading and downloading carrier conductors 4.
The effective refractive index of the mode of the micro-ring resonator 3 is changed by the thermo-optical effect or the electro-optical effect caused by applying power or voltage to the tuning electrode 5, and the resonance peak position of the micro-ring resonator 3 is regulated, so that the optical power amplitude of an optical signal output from the bus input/output waveguide 1 at a specific wavelength is regulated.
In this way, when one optical signal of the multiple optical wavelength signals input from one side of the bus input/output waveguide 1 is subjected to the power tuning action when the resonance peak of the corresponding micro-ring resonator 3 is at a specific position, after the optical signal passes through the micro-ring resonator 3, the amplitude of the optical signal can show a specific attenuation amount when the optical signal is output from the other side of the bus input/output waveguide 1 because the resonance peak at the specific position corresponds to the specific power attenuation amount; each optical signal of the multiple optical wavelength signals is subjected to the power tuning action of a corresponding micro-ring resonator 3, and is output from the other side of the bus input/output waveguide 1.
As shown in fig. 7, each micro-ring resonator unit 2 includes at least one micro-ring resonator 3, in which all micro-ring resonators 3 are disposed between an upper cladding layer 6 and a lower cladding layer 7, and if there are a plurality of micro-ring resonators 3, in which all micro-ring resonators 3 are disposed on the same side of a bus input output waveguide 1, all micro-ring resonators 3 are sequentially spaced apart, micro-ring resonators 3 close to the bus input output waveguide 1 are spaced apart from the bus input output waveguide 1 and are laterally evanescent coupled with the bus input output waveguide 1, and adjacent micro-ring resonators 3 are also spaced apart from each other and are laterally evanescent coupled, so that optical field resonance is generated in the micro-ring resonators 3. The spacing between two microring resonators 3 in different microring resonator units is large so that no lateral evanescent coupling occurs between the two microring resonators 3. The number of micro-ring resonators 3 in the N micro-ring resonator units 2 is the same or different.
Each micro-ring resonator unit 2 further includes an upload-download waveguide 4, the upload-download waveguide 4 being disposed between the upper cladding 6 and the lower cladding 7, the upload-download waveguide being for uploading and downloading signals corresponding to a specific wavelength channel. All micro-ring resonators 3 are sequentially arranged at intervals between the bus input/output waveguide 1 and the uploading and downloading carrier 4, and the micro-ring resonators 3 close to the uploading and downloading carrier 4 are arranged at intervals between the uploading and downloading carrier 4 and are in lateral evanescent wave coupling with the uploading and downloading carrier 4. In particular, microring resonator unit 2, which includes an upload-download waveguide 4, is referred to as upload-download microring resonator unit 2, as shown in fig. 7. The microring resonator unit 2 that does not contain the uploading lower carrier 4 is denoted as a pass-through microring resonator unit 2 as shown in fig. 8.
or the tuning electrode 5 is formed after doping type ions are injected into a certain region inside and on both sides of the micro-ring resonator 3, and the tuning electrode 5 region may include part or all of the micro-ring resonator 3. The voltage of the tuning electrode 5 is adjusted, the electro-optical effect of the number of carriers in the micro-ring resonator 3 is changed, the mode effective refractive index of the micro-ring resonator 3 is changed, and the resonance peak position of the micro-ring resonator 3 is regulated, so that the optical power amplitude of an optical signal output from the bus input/output waveguide 1 at a corresponding specific wavelength is regulated.
The bus input/output waveguide 1, the micro-ring resonator 3 and the uploading/downloading waveguide 4 are made of the same material, and can be a single-mode or multi-mode waveguide composed of silicon, doped silicon dioxide, silicon nitride, lithium niobate and other materials. The bus input/output waveguide 1, the micro-ring resonator 3 and the upper cladding 6 of the uploading/downloading waveguide 4 are made of the same material, and the bus input/output waveguide 1, the micro-ring resonator 3 and the lower cladding 7 of the uploading/downloading waveguide 4 are made of the same material. The upper cladding 6 and the lower cladding 7 are all surrounding cladding media, and are specifically silicon dioxide.
The micro ring resonator 3 is a circular waveguide having a perfect circle and the same waveguide width, a circular waveguide having a perfect circle and a gradual waveguide width, a circular waveguide having an ellipse and the same waveguide width, or a circular waveguide having an ellipse and a gradual waveguide width, as shown in (a) to (d) of fig. 3, respectively. The waveguide shape, bending radius, waveguide width of each micro-ring resonator 3 are set as required, and the spacing between adjacent micro-ring resonators 3 is set as required.
The waveguides where the bus input/output waveguides 1 are coupled with the corresponding micro-ring resonators 3 are linear waveguides, namely, a straight waveguide coupling structure 8 is formed, as shown in fig. 4, a curved waveguide on the same side as the center of the corresponding coupled micro-ring resonators 3 is formed, namely, a curved waveguide coupling structure 9 in the same direction is formed, as shown in fig. 5, or a curved waveguide on different sides as shown in fig. 6, corresponding to the center of the coupled micro-ring resonators 3 is formed, namely, a reverse curved waveguide coupling structure 10 is formed.
The waveguides where the uploading and the downloading carrier wave 4 are coupled with the corresponding micro-ring resonator 3 are linear waveguides, namely a straight waveguide coupling structure 8 is formed, as shown in fig. 4, curved waveguides which are on the same side with the center of the corresponding coupling micro-ring resonator 3, namely a same-direction curved waveguide coupling structure 9 is formed, as shown in fig. 5, or curved waveguides which are on different sides with the center of the corresponding coupling micro-ring resonator 3, namely a reverse curved waveguide coupling structure 10 is formed, as shown in fig. 6. The curved waveguide and the micro-ring resonator 3 in the same-direction curved waveguide coupling structure 9 form a concentric circle structure or a non-concentric circle structure, and the coupling length of the coupling area is variable, namely the surrounding angle is variable.
Waveguide widths of the bus input/output waveguide 1, the micro-ring resonator 3 and the uploading/downloading waveguide 4 are set according to requirements; the intervals among the bus input/output waveguide 1, the uploading/downloading waveguide 4 and the micro-ring resonator 3 are set according to the requirement.
The working process and principle of the invention are as follows:
in the multichannel amplitude equalizer, the amplitude of each optical signal in the multichannel optical signals is regulated and controlled by a corresponding micro-ring resonator unit 2. The multichannel optical signals are input by the input end of the bus input/output waveguide 1, are subjected to power tuning of each corresponding micro-ring resonator unit 2, and are output from the output end of the bus input/output waveguide 1, so that the simultaneous amplitude equalization of the multichannel optical signals is completed. The effective refractive index of the mode of the micro-ring resonator 3 is changed by applying a thermal-optical effect of changing the temperature of the micro-ring resonator 3 through the power to the tuning electrode 5 or by applying a photoelectric effect of changing the number of carriers of the waveguide in the micro-ring resonator 3 through the voltage to the tuning electrode 5, and the resonance peak position of the micro-ring resonator 3 is regulated, so that the amplitude of the optical power after the optical signal is output from the bus input/output waveguide 1 at a specific wavelength is regulated.
The initial state of the multichannel amplitude equalizer is a non-attenuated state. At this time, the optical wavelength signals of each channel and the resonance peak of the micro-ring resonator 3 in the corresponding micro-ring resonator unit 2 are in a completely detuned state, that is, the resonance peak position and the wavelength channel are mutually staggered, and the staggered distance is half of the channel interval. In the completely detuned state, the optical signals at each wavelength channel do not meet the phase matching condition of the lateral evanescent coupling between the micro-ring resonator 3 and the bus input/output waveguide 1 and between the optical signals and the uploading/downloading carrier 4, the optical signals can pass through the micro-ring resonator unit 2 without damage and are output from the output end of the bus input/output waveguide 1, and the amplitude of the optical signals is not attenuated.
When the state of the tuning electrode 5 is changed through the thermo-optical effect or the electro-optical effect, and the resonance peak of the micro-ring resonator 3 in each micro-ring resonator unit 2 moves to the corresponding wavelength channel, the optical signal at the wavelength channel gradually meets the phase matching condition of the lateral evanescent wave coupling, the wavelength is gradually positioned at the resonance peak position of the micro-ring resonator 3 and gradually moves to a larger attenuation position, and the attenuation corresponding to the optical signal output from the output end of the bus input/output waveguide 1 is gradually increased after passing through the micro-ring resonator unit 2; when the shift amount of the resonance peak of the micro-ring resonator 3 reaches half of the channel interval, the resonance peak of the micro-ring resonator 3 coincides with the corresponding wavelength channel, the optical signal at the wavelength channel completely meets the phase matching condition of the lateral evanescent coupling, and is selected to be output from the downloading end of the uploading and downloading carrier 4, so that the attenuation amount is the maximum when the output end of the bus input and output waveguide 1 is output, namely the maximum attenuation state. When the resonance peak of the micro-ring resonator 3 in the micro-ring resonator unit 2 is shifted within a half channel interval between the two positions by changing the state of the tuning electrode 5, the attenuation amount when the optical signal is output from the output end of the bus input/output waveguide 1 can be changed from zero loss to maximum loss. When the multichannel optical signals are input into the multichannel amplitude equalizer at the same time, the simultaneous amplitude equalization of the multichannel optical signals can be realized by controlling the resonance peak positions of the micro-ring resonators 3 in each micro-ring resonator unit 2, wherein different resonance peak positions correspond to different amplitude attenuation amounts.
The resonance peaks of the micro-ring resonators 3 in the plurality of adjacent micro-ring resonator units 2 of the multi-channel amplitude equalizer can be adjusted to coincide with each other and with the position of a certain wavelength channel. At this time, the common resonance and amplitude attenuation action of the resonance peaks on the same wavelength channel can enable the wavelength channel to achieve larger attenuation, and the attenuation of the optical signal of the wavelength channel when the optical signal is output from the output end of the bus input/output waveguide 1 can be larger.
Specific embodiments of the invention are as follows:
the present example selects a silicon nanowire optical waveguide based on Silicon On Insulator (SOI) material, the core layer material is silicon, the thickness is 220nm, the refractive index is 3.4744, the surrounding cladding layer material is silicon dioxide, the refractive index is 1.444, and the communication C-band in the range of 1530nm to 1565nm is considered. The mode effective refractive index of the micro-ring resonator 3 is changed by applying a thermal-optical effect of changing the temperature of the micro-ring resonator 3 by applying power to the tuning electrode 5, and the resonance peak position of the micro-ring resonator 3 is regulated, so that the optical power amplitude of an optical signal output from the bus input/output waveguide 1 at a specific wavelength is regulated.
Fig. 2 shows a schematic cross-sectional view of the micro-ring resonator 3 at its location. The tuning electrode 5 is made of titanium/chromium metal and is arranged in the upper cladding 6 above the micro-ring resonator 3, and only covers a partial area of the micro-ring resonator 3, so that the translational regulation and control precision of the resonance peak of the micro-ring resonator 3 is improved. The tuning electrode 5 generates joule heat by applying electric power and is conducted to the micro-ring resonator 3 through the upper cladding, the temperature of the micro-ring resonator 3 is changed, and the mode effective refractive index of the micro-ring resonator 3 is changed by using the thermo-optical effect.
The micro-ring resonator 3 is in a specific form of an elliptical annular waveguide with gradually changed waveguide width. The two elliptical short axes of the micro-ring resonator 3 are the coupling areas of the micro-ring resonator, the bus input/output waveguide 1 and the uploading/downloading waveguide 4, the curvature radius is the largest, the waveguide width is the narrowest, and the micro-ring resonator is used for realizing high-efficiency and low-loss coupling; the two elliptical major axes of the microring resonator 3 are non-coupling regions where the radius of curvature is the smallest and where the waveguide width is the widest, for reducing microring length to increase the free spectral range of the microring resonator 3 while reducing transmission losses within the microring resonator 3.
The coupling structure of the micro-ring resonator 3 and the bus input/output waveguide 1, and the uploading/downloading waveguide 4 can adopt a straight waveguide coupling structure 8, a mutually same-directional curved waveguide coupling structure 9 or a mutually opposite curved waveguide coupling structure 10, and in this example, all adopt the straight waveguide coupling structure 8.
In the device structure of the embodiment, the waveguide widths of the bus input/output waveguide 1 and the uploading/downloading carrier 4Degree of W bus =400 nm. The micro-ring resonator 3 is an elliptical annular waveguide with gradually changed waveguide width, and the long axis of the annular waveguide is L a =4μm, where the waveguide width is the widest, W a =650 nm; its minor axis is L b =3.5 μm, where the waveguide width is narrowest, W b =450 nm, the waveguide widths all meet the single mode transmission condition. In the coupling structure of the bus input/output waveguide 1, the uploading/downloading waveguide 4 and the micro-ring resonator 3, the waveguide spacing of the coupling area is W gap =220 nm. The amplitude equalizer includes 8 wavelength channels in total, the channel interval between the wavelength channels is 200GHz, and in order to keep the interval between the resonance peaks of the micro-ring resonators 3 in each micro-ring resonator unit 2 consistent with this channel interval, the long axis and the short axis of the micro-ring resonator 3 between adjacent wavelength channels are each set to a difference of 6.4nm for providing the interval between the resonance peaks of the adjacent micro-ring resonators 3.
Fig. 9 shows a schematic diagram of the amplitude of the output optical signal at a certain operating wavelength of the amplitude equalizer according to the power of the tuning electrode 5 in the embodiment. The optical signal at the working wavelength is input from the input end of the bus input/output waveguide 1, the amplitude of the optical signal is changed after the power tuning of the corresponding micro-ring resonator unit 2, and the optical signal is output from the output end of the bus input/output waveguide 1. The left-most corresponding multichannel amplitude equalizer of the curve is in an initial unattenuated state, and at this time, the optical wavelength signal of the channel and the resonance peak of the micro-ring resonator 3 in the corresponding micro-ring resonator unit 2 are in a completely detuned state, that is, the resonance peak position and the wavelength channel are mutually dislocated, and the dislocated distance is half of the channel interval. The optical signal can pass through the microring resonator unit 2 substantially without loss in this state, with an additional loss of less than 0.5dB, as shown by the star marks. When the power of the tuning electrode 5 is gradually increased, the resonance peak of the micro-ring resonator 3 in the micro-ring resonator unit 2 gradually approaches the wavelength channel, the attenuation amount of the signal corresponding to the wavelength at the output end of the bus input/output waveguide 1 is gradually increased, and the amplitude of the optical signal is reduced; when the power of the tuning electrode 5 is increased to about 8mW, the translational distance of the resonance peak of the micro-ring resonator 3 in the micro-ring resonator unit 2 is half of the channel interval and coincides with the wavelength channel, the attenuation of the optical signal at the output end of the bus input/output waveguide 1 corresponding to the wavelength channel reaches the maximum, about 16dB, and the amplitude of the optical signal is reduced to the minimum; as the power of the tuning electrode 5 continues to increase, the resonance peak of the micro-ring resonator 3 in the micro-ring resonator unit 2 gradually gets away from the wavelength channel, the attenuation amount of the optical signal at the output end of the bus input-output waveguide 1 corresponding to the wavelength signal gradually decreases, and the amplitude of the optical signal increases. As can be seen from fig. 9, the power variation applied to the tuning electrode 5 can cause a variation in the amplitude of the optical signal of the corresponding wavelength channel.
Fig. 10 shows a schematic diagram of the change of the transmission intensity of the output end of the bus input/output waveguide 1 with respect to the wavelength under different working conditions in the amplitude equalizer according to the embodiment. FIG. a is a transmission spectrum of 8 channels of tuning electrodes 5 without power applied, there is non-uniformity in the spacing between the resonant peaks of the microring resonators 3 in each microring resonator unit 2 due to process preparation errors; fig. b is a diagram of adjusting tuning electrodes 5 of 8 channels to make an amplitude equalizer in an initial non-attenuation state, wherein at this time, optical wavelength signals of each channel and resonance peaks of micro-ring resonators 3 in corresponding micro-ring resonator units 2 are in a completely detuned state, that is, positions of resonance peaks are offset from wavelength channels, the offset distance is half channel interval, and each optical signal can basically pass through the corresponding micro-ring resonator unit 2 without loss; FIG. c is a graph of adjusting only the tuning electrode 5 of the 1 st channel to maximize the attenuation of the optical signal amplitude of the corresponding channel based on the initial unattenuated state; FIG. d is a graph of adjusting only tuning electrodes 5 of the 1 st and 3 rd channels to maximize the attenuation of the optical signal amplitude of the corresponding channel based on the initial unattenuated state; FIG. e is a graph of adjusting only tuning electrodes 5 of 1 st, 3 rd and 5 th channels to maximize the attenuation of the optical signal amplitude of the corresponding channel based on the initial unattenuated state; fig. f shows that only tuning electrodes 5 of 1 st, 3 rd, 5 th and 7 th channels are adjusted to maximize the attenuation of the optical signal amplitude of the corresponding channel based on the initial non-attenuation state. As can be seen from fig. 10, the amplitude equalizer in the embodiment can implement simultaneous amplitude modulation and equalization on multiple optical signals.
Fig. 11 shows a schematic diagram of the change of the transmission intensity of the output end of the bus input/output waveguide 1 with the wavelength when the resonance peaks of the micro-ring resonators 3 in the plurality of adjacent micro-ring resonator units 2 of the amplitude equalizer are coincident in the embodiment. FIG. a is a graph showing that the resonance peaks of the micro-ring resonators 3 in the 7 th and 8 th channels of micro-ring resonator units 2 are tuned to coincide based on the initial unattenuated state, so that the attenuation of the optical signal amplitude of the 8 th wavelength channel is greater; FIG. b is a diagram showing the tuning of the resonance peaks of the microring resonator 3 in the microring resonator unit 2 of the 1 st, 2 nd, 7 th and 8 th channels to coincide based on the initial unattenuated state, so that the attenuation of the optical signal amplitudes of the 2 nd and 8 th wavelength channels is greater; FIG. c is a diagram showing the tuning of the resonance peaks of the microring resonator 3 in the microring resonator unit 2 of the 1 st, 2 nd, 3 rd, 7 th, 8 th channels to overlap based on the initial unattenuated state, so that the attenuation of the optical signal amplitudes of the 3 rd, 8 th wavelength channels is greater; FIG. d is a graph of tuning the resonance peaks of the micro-ring resonator 3 in the micro-ring resonator unit 2 of the 1 st, 2 nd, 3 rd and 4 th channels and the 7 th and 8 th channels to coincide based on the initial unattenuated state, so that the attenuation of the optical signal amplitudes of the 4 th and 8 th wavelength channels is larger; fig. e shows that the resonance peaks of the microring resonator 3 in the microring resonator unit 2 of the 1 st, 2 nd, 3 rd, 4 th, 5 th, 6 th, 7 th and 8 th channels are tuned to coincide on the basis of the initial unattenuated state, so that the attenuation amounts of the optical signal amplitudes of the 2 nd, 5 th and 8 th wavelength channels are larger. As can be seen from fig. 11, in the embodiment, the resonance peaks of the micro-ring resonators 3 in the plurality of adjacent micro-ring resonator units 2 of the amplitude equalizer may be adjusted to coincide with each other and with the position of a certain wavelength channel, so as to provide a greater amplitude attenuation for the wavelength channel, and the attenuation may be greater than 50dB.
Therefore, the micro-ring resonator is adopted as a basic structural unit of the amplitude equalizer, and the micro-ring equalizer has the advantages of simple and compact structure, convenience in design and high stability. The amplitude equalization of the optical signals at the specific wavelength is realized by regulating and controlling the resonance peak position of the micro-ring resonator, the simultaneous equalization of the multipath wavelength signals can be realized by only a single bus waveguide, the device size is smaller, the extra loss and the energy consumption are lower, and the remarkable technical effect is achieved.
The above-described embodiments are intended to illustrate the present invention, not to limit it, and any modifications and variations made thereto are within the spirit of the invention and the scope of the appended claims.
Claims (10)
1. A multichannel amplitude equalizer based on a micro-ring resonator array, which is characterized by comprising an upper cladding (6), a lower cladding (7), a bus input/output waveguide (1) and N micro-ring resonator units (2); the bus input/output waveguide (1) and the N micro-ring resonator units (2) are arranged between the upper cladding (6) and the lower cladding (7), the N micro-ring resonator units (2) are arranged on the side of the bus input/output waveguide (1), and the N micro-ring resonator units (2) are sequentially arranged at intervals along the transmission direction of the bus input/output waveguide (1).
2. A multi-channel amplitude equalizer based on a micro-ring resonator array according to claim 1, characterized in that each micro-ring resonator unit (2) comprises at least one micro-ring resonator (3), in the current micro-ring resonator unit (2), all micro-ring resonators (3) are arranged between an upper cladding layer (6) and a lower cladding layer (7), if there are a plurality of micro-ring resonators (3), in the current micro-ring resonator unit (2), all micro-ring resonators (3) are arranged on the same side of a bus input output waveguide (1), all micro-ring resonators (3) are arranged in sequence at intervals, micro-ring resonators (3) close to the bus input output waveguide (1) are arranged at intervals and lateral evanescent coupling occurs between the bus input output waveguide (1), and adjacent micro-ring resonators (3) are also arranged at intervals and lateral evanescent coupling occurs.
3. A multi-channel amplitude equalizer based on an array of micro-ring resonators according to claim 2, characterized in that the number of micro-ring resonators (3) in the N micro-ring resonator units (2) is the same or different.
4. A multi-channel amplitude equalizer based on micro-ring resonator array according to claim 2, wherein each micro-ring resonator unit (2) further comprises an uploading/downloading waveguide (4), the uploading/downloading waveguide (4) is arranged between the upper cladding (6) and the lower cladding (7), all micro-ring resonators (3) are sequentially arranged at intervals between the bus input/output waveguide (1) and the uploading/downloading waveguide (4), and the micro-ring resonators (3) close to the uploading/downloading waveguide (4) are arranged at intervals between the uploading/downloading waveguide (4) and are coupled with side evanescent waves between the uploading/downloading waveguide (4).
5. The multichannel amplitude equalizer based on the micro-ring resonator array according to claim 2, characterized in that a tuning electrode (5) is embedded in an upper cladding (6) or a lower cladding (7) outside the micro-ring resonator (3), the tuning electrode (5) is adjusted in power, the thermo-optical effect of the temperature of the micro-ring resonator (3) is changed, the mode effective refractive index of the micro-ring resonator (3) is changed, and the resonance peak position of the micro-ring resonator (3) is regulated;
or a tuning electrode (5) is formed after doping type ions are injected into the micro-ring resonator (3), the voltage of the tuning electrode (5) is adjusted, the electro-optical effect of the carrier number in the micro-ring resonator (3) is changed, the mode effective refractive index of the micro-ring resonator (3) is changed, and the resonance peak position of the micro-ring resonator (3) is regulated.
6. A multi-channel amplitude equalizer based on micro-ring resonator array according to claim 2, characterized in that the bus input-output waveguide (1), micro-ring resonator (3) and upload-download waveguide (4) are of the same material.
7. A multichannel amplitude equalizer based on micro-ring resonator array according to claim 2, characterized in that the micro-ring resonator (3) is a circular waveguide with the same waveguide width, an elliptical waveguide with the same waveguide width, or a circular waveguide with the same waveguide width.
8. A multi-channel amplitude equalizer based on micro-ring resonator array according to claim 2, characterized in that the waveguide where the bus input output waveguide (1) is coupled to the corresponding micro-ring resonator (3) is a straight waveguide (8), a curved waveguide (9) on the same side as the center of the corresponding coupled micro-ring resonator (3), or a curved waveguide (10) on a different side than the center of the corresponding coupled micro-ring resonator (3).
9. A multi-channel amplitude equalizer based on micro-ring resonator array according to claim 2, characterized in that the waveguide where the uploading and downloading waveguide (4) is coupled to the corresponding micro-ring resonator (3) is a straight waveguide (8), a curved waveguide (9) on the same side as the center of the corresponding coupled micro-ring resonator (3), or a curved waveguide (10) on a different side from the center of the corresponding coupled micro-ring resonator (3).
10. A multi-channel amplitude equalizer based on micro-ring resonator array according to claim 2, characterized in that the waveguide widths of the bus input/output waveguide (1), micro-ring resonator (3) and uploading/downloading waveguide (4) are set according to the requirements; the intervals among the bus input/output waveguide (1), the uploading/downloading waveguide (4) and the micro-ring resonator (3) are set according to the requirements;
the waveguide shape and the bending radius of each micro-ring resonator (3) are set according to requirements, and the spacing between adjacent micro-ring resonators (3) is set according to requirements.
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