CN116228861A

CN116228861A - Probe station marker positioning method, probe station marker positioning device, electronic equipment and storage medium

Info

Publication number: CN116228861A
Application number: CN202310155471.9A
Authority: CN
Inventors: 蔡超鹏; 陈思乡; 杨奉利; 梁思文; 戴啟辉
Original assignee: Hangzhou Changchuan Technology Co Ltd
Current assignee: Hangzhou Changchuan Technology Co Ltd
Priority date: 2023-02-17
Filing date: 2023-02-17
Publication date: 2023-06-06

Abstract

The application discloses a probe station marker positioning method, probe station marker positioning device, electronic equipment and storage medium, belongs to marker positioning technical field, wherein, probe station marker positioning method includes: acquiring a binary image of the probe station marker; judging whether a connected domain conforming to the circular characteristic exists in the binary image; if yes, positioning a probe station marker based on the connected domain conforming to the circular characteristic; if not, judging whether the connected domain conforming to the circular arc characteristic exists in the binary image, and if so, positioning the probe station marker based on the connected domain conforming to the circular arc characteristic. The method is characterized in that a circular probe station marker is subjected to secondary identification, firstly, the probe station marker with higher integrity can be identified through circular features, and secondly, the probe station marker with lower integrity can be identified through circular arc features.

Description

Probe station marker positioning method, probe station marker positioning device, electronic equipment and storage medium

Technical Field

The application belongs to the technical field of marker positioning, and particularly relates to a method and a device for positioning a marker on a probe station, electronic equipment and a storage medium.

Background

The probe station is mainly applied to testing of semiconductor industry, photoelectric industry, integrated circuits and packages. The test process mainly carries out the puncture test on the bare chips on the wafer by taking the probe card as a test interface, and carries out signal transmission by connecting the tester and the chips so as to test the parameters of the chips. Since the die on the wafer is very small, typically on the order of microns, this requires very high positioning accuracy for the probe station, and many factors affect the positioning accuracy of the probe station, such as mechanical accuracy, image pixel accuracy, and the like. To ensure accurate positioning of the probe station system, we typically need to calibrate the vision system, which involves pixel calibration and camera calibration. The conversion ratio of the image coordinates and the physical coordinates can be determined through pixel calibration, the physical coordinates are converted into the physical coordinates according to the ratio through the pixel coordinates in the image, the physical position of the target in the image is determined, and the positioning accuracy between the vision system and the mechanical system is ensured. The positional relationship among a plurality of cameras can be determined through camera calibration, so that the positioning accuracy among vision systems is ensured, for example, one camera shoots the surface of a wafer, the other camera shoots a probe, the vision system on the surface of the wafer and the vision system of the probe are respectively two independent vision systems, the probe needs to be pricked into the wafer for testing, and the camera calibration can establish connection to ensure the positioning accuracy of needle insertion.

The conventional vision system is calibrated by adopting a calibration plate, and the calibration plate occupies a large space, so that the calibration calculation efficiency is low and is not flexible enough. Through increasing the marker on the camera light path, adopt the mode of marker discernment to carry out automatic calibration, can effectual increase vision calibration's flexibility, promote calibration efficiency and recognition rate. There are many forms of markers, and different marker form recognition modes have differences, and circular markers are most commonly used, but the circular marker recognition has no set of disclosed recognition method with stronger robustness.

Disclosure of Invention

The application aims to provide a probe station marker positioning method, a probe station marker positioning device, electronic equipment and a storage medium so as to solve the problem of low identification rate of the existing probe station marker.

According to a first aspect of embodiments of the present application, there is provided a probe station marker positioning method, which may include:

acquiring a binary image of the probe station marker;

judging whether a connected domain conforming to a circular characteristic exists in the binary image;

if yes, positioning the probe station marker based on the connected domain conforming to the circular characteristic;

if not, judging whether a connected domain conforming to the circular arc characteristics exists in the binary image, and if so, positioning the probe station marker based on the connected domain conforming to the circular arc characteristics.

In some optional embodiments of the present application, determining whether a connected domain conforming to a circular feature exists in the binary image includes:

acquiring a first specific connected domain from the binary image;

extracting the outline convex hull of the first specific connected domain;

fitting a circle to the outline convex hull to obtain a first fitting circle center pixel value and a first fitting radius;

judging whether the first fitting circle center pixel value is in a first preset pixel interval or not to obtain a first judgment result;

judging whether the first fitting radius is in a first preset radius interval or not to obtain a second judgment result;

and if the first judgment result and the second judgment result are both yes, the first specific connected domain accords with the circular characteristic.

In some optional embodiments of the present application, obtaining the first specific connected domain from the binary image includes:

acquiring a first initial connected domain of which the pixel area is in a first preset area interval from the binary image;

acquiring a first minimum surrounding moment of the first initial connected domain;

and taking the first initial connected domain with the aspect ratio of the first minimum surrounding moment smaller than a first preset ratio as the first specific connected domain.

In some optional embodiments of the present application, determining whether a connected domain conforming to the circular arc feature exists in the binary image includes:

judging whether a connected domain conforming to the arc position feature exists in the binary image, if so, further judging whether the connected domain conforming to the arc position feature conforms to the arc morphological feature, and if so, the connected domain conforming to the arc morphological feature conforms to the arc feature.

In some optional embodiments of the present application, determining whether a connected domain conforming to the circular arc position feature exists in the binary image includes:

acquiring a second specific connected domain from the binary image;

drawing an arc retrieval graph based on the second specific connected domain;

dividing the circular arc search graph along the second specific connected domain to obtain independent blocks;

obtaining a center sampling point and an angle sampling point from the circular arc retrieval graph, wherein the angle sampling point comprises an upper left angle sampling point, a lower left angle sampling point, an upper right angle sampling point and a lower right angle sampling point;

and judging whether the second specific connected domain accords with the circular arc position characteristic or not based on the number of the independent blocks, the position distribution of the central sampling point and the position distribution of the angular sampling point.

In some optional embodiments of the present application, determining whether the second specific connected domain meets the circular arc position feature based on the number of independent blocks, the position distribution of the center sampling point, and the position distribution of the angle sampling point includes:

when the number of the independent blocks is two, the second specific connected domain accords with the circular arc position characteristic;

when the number of the independent blocks is three, if the circular arc search map simultaneously meets the following conditions, the second specific connected domain accords with the circular arc position characteristics: the largest independent block in the circular arc retrieval graph comprises the center sampling point and no more than one angle sampling point, and the rest independent blocks respectively comprise one angle sampling point;

when the number of the independent blocks is four, if the circular arc search map simultaneously meets the following conditions, the second specific connected domain accords with the circular arc position characteristics: the largest independent block in the circular arc retrieval graph comprises the center sampling point and one angle sampling point, and the rest independent blocks respectively comprise one angle sampling point;

when the number of the independent blocks is less than two or greater than four, the second specific connected domain does not accord with the circular arc position characteristic.

In some optional embodiments of the present application, obtaining the second specific connected domain from the binary image includes:

carrying out morphological expansion on the binary image to obtain an expansion image;

acquiring a second initial connected domain of which the pixel area is in a second preset area interval from the expansion map;

acquiring a second minimum surrounding moment of the second initial connected domain;

acquiring the length of a long side and the length of a short side of the second minimum surrounding moment;

acquiring the area ratio of the second initial connected domain to the second minimum surrounding moment;

and taking the second initial connected domain with the length of the long side being greater than the length of the preset long side, the length of the short side being greater than the length of the preset short side and the area ratio being greater than the area ratio as the second specific connected domain.

In some optional embodiments of the present application, further determining whether the connected domain conforming to the circular arc position feature conforms to a circular arc morphological feature includes:

performing edge detection on the binary image to obtain an edge detection image;

mapping the connected domain conforming to the circular arc position characteristics to the edge detection graph for positioning, and obtaining an edge point set of the connected domain conforming to the circular arc position characteristics;

Fitting a circle to the edge point set to obtain a second fitting circle center pixel value and a second fitting radius;

judging whether the second fitting circle center pixel value is in a second preset pixel interval or not to obtain a third judgment result;

judging whether the second fitting radius is in a second preset radius interval or not to obtain a fourth judgment result;

and if the third judging result and the fourth judging result are both yes, the connected domain conforming to the circular arc position characteristic conforms to the circular arc morphological characteristic.

In some optional embodiments of the present application, performing a fitting circle process on the set of edge points includes:

and obtaining the fitting circle function of the edge point set by adopting a least square method.

In some alternative embodiments of the present application, obtaining a binary map of probe station markers comprises:

graying treatment is carried out on the probe station marker image to obtain a probe station marker gray scale image;

and carrying out threshold segmentation on the probe station marker gray level graph to obtain the binary graph.

In some optional embodiments of the present application, the threshold segmentation uses any one of the following segmentation methods: a local self-adaptive threshold segmentation method, an Ojin method, a maximum entropy threshold segmentation method and an iterative threshold segmentation method.

In some optional embodiments of the present application, before determining whether the connected domain conforming to the circular feature exists in the binary image, the method further includes:

and filtering noise points in the binary image through median filtering.

According to a second aspect of embodiments of the present application, there is provided a probe station marker positioning device, comprising:

the acquisition module is used for acquiring a binary image of the probe station marker;

the data processing module is used for judging whether a connected domain conforming to the circular characteristic exists in the binary image;

According to a third aspect of embodiments of the present application, there is provided an electronic device, which may include:

a processor;

a memory for storing processor-executable instructions;

wherein the processor is configured to execute instructions to implement a probe station marker localization method as shown in any of the embodiments of the first aspect.

According to a fourth aspect of embodiments of the present application, there is provided a storage medium, which when executed by a processor of an information processing apparatus or a server, causes the information processing apparatus or the server to implement a probe station marker positioning method as shown in any one of the embodiments of the first aspect.

The technical scheme of the application has the following beneficial technical effects:

the probe station marker positioning method provided by the embodiment of the application is to secondarily identify the round probe station marker, wherein the probe station marker with higher integrity can be identified through the round feature, and the probe station marker with lower integrity can be identified through the circular arc feature.

Drawings

FIG. 1 is a flow chart of a method for positioning a marker on a probe station according to an exemplary embodiment of the present application;

FIG. 2 is a flow chart of step S101 in an exemplary embodiment of the present application;

FIG. 3 is a grey scale view of a probe station marker in an exemplary embodiment of the present application;

FIG. 4 is a binary view of a probe station marker in an exemplary embodiment of the present application;

fig. 5 is a schematic flow chart of step S501 in an exemplary embodiment of the present application;

FIG. 6 is a median filtered bin marker binary map in an exemplary embodiment of the present application;

FIG. 7 is a flow chart of step S102 in an exemplary embodiment of the present application;

fig. 8 is a first specific connected domain in an exemplary embodiment of the present application;

FIG. 9 is a contour convex hull of a first particular connected domain in an exemplary embodiment of the present application;

fig. 10 is a flowchart of step S1021 in an exemplary embodiment of the present application;

FIG. 11 is a flow chart of step S104 in an exemplary embodiment of the present application;

fig. 12 is a flowchart illustrating step S1042 in an exemplary embodiment of the present application;

fig. 13 is a second specific connected domain in an exemplary embodiment of the present application;

FIG. 14 is a diagram of a search of arcs after inversion in an exemplary embodiment of the present application;

fig. 15 is a flowchart of step S10421 in an exemplary embodiment of the present application;

FIG. 16 is a flow chart of step S10425 in an exemplary embodiment of the present application;

FIG. 17 is a diagram of a second specific connected domain that is independently partitioned into two in an exemplary embodiment of the present application;

FIG. 18 is a second particular connected domain that is independently blocked by three in an exemplary embodiment of the present application;

FIG. 19 is a second particular connected domain independently blocked by four in an exemplary embodiment of the present application;

fig. 20 is a flowchart illustrating step S1042 in an exemplary embodiment of the present application;

FIG. 21 is a connected domain conforming to the arc location feature in an exemplary embodiment of the present application;

FIG. 22 is a set of edge points in an exemplary embodiment of the present application;

Fig. 23 is a flowchart of step S10423 in an exemplary embodiment of the present application;

FIG. 24 is a schematic view of a probe station marker positioning device according to an exemplary embodiment of the present application;

FIG. 25 is a schematic diagram of an electronic device in an exemplary embodiment of the present application;

fig. 26 is a schematic diagram of a hardware structure of an electronic device in an exemplary embodiment of the present application.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail below with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present application. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present application.

A layer structure schematic diagram according to an embodiment of the present application is shown in the drawings. The figures are not drawn to scale, wherein certain details may be exaggerated and some details may be omitted for clarity. The shapes of the various regions, layers and relative sizes, positional relationships between them shown in the drawings are merely exemplary, may in practice deviate due to manufacturing tolerances or technical limitations, and one skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions as actually required.

It will be apparent that the embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

In the description of the present application, it should be noted that the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In addition, the technical features described below in the different embodiments of the present application may be combined with each other as long as they do not collide with each other.

The research shows that the imaging of the circular marker is influenced by the uniformity of illumination, the phenomenon of circular edge defect can possibly exist, the conventional circular identification method usually detects the edge of a circle to directly fit the circle, the circular edge defect can cause fitting failure to find the circle, and further marker identification failure or identification deviation is caused, meanwhile, the conventional circular marker identification only identifies the circle, and the circle is not screened, so that false identification can be caused, and in order to solve the problem, the application provides a probe station marker positioning method, a probe station marker positioning device, electronic equipment and a storage medium.

The probe station marker positioning method, the probe station marker positioning device, the electronic equipment and the storage medium provided by the embodiment of the application are described in detail below by means of specific embodiments and application scenes thereof with reference to the accompanying drawings.

As shown in fig. 1, in a first aspect of embodiments of the present application, a probe station marker positioning method is provided, which may include:

step S101: acquiring a binary image of the probe station marker;

step S102: judging whether a connected domain conforming to the circular characteristic exists in the binary image;

step S103: step S102, if the judgment result is yes, positioning the probe station marker based on the connected domain conforming to the circular characteristic;

step S104: step S102, judging whether a connected domain conforming to the arc characteristic exists in the binary image or not if the judging result is negative;

step S105: and step S104, if the judgment result is yes, positioning the probe station marker based on the connected domain conforming to the circular arc characteristic.

Step S106: and step S104, if the judgment result is negative, returning a positioning failure prompt.

The probe station marker positioning method provided by the embodiment is used for calibrating a probe station camera, when the probe station marker positioning method is used, a round probe station marker is arranged on a camera optical path, an image of the probe station marker is acquired through the camera, and a binary image obtained by converting the image of the probe station marker consists of a first pixel value and a second pixel value. Wherein the first pixel value is greater than the second pixel value. The first pixel value may be 255 and the second pixel value may be 0. In the binary image, the pixel value is the first pixel value, and the connected pixel points form connected domains, and the number of the connected domains can be multiple. The connected domain in this example was used to characterize the probe station markers. Firstly, circular connected domains are screened from a binary diagram through circular feature recognition, a probe station marker with higher integrity is obtained, and coordinates of a circle center are output to finish positioning of the probe station marker. When the circular feature identification fails, the fact that a complete circle does not exist in the binary image is indicated, the circular arc connected domain is further screened from the binary image through circular arc feature identification, the probe station marker with lower integrity is obtained, and the circle center coordinates of the circular arc are output to complete positioning of the probe station marker. According to the probe station marker positioning method, the robustness of the recognition algorithm is improved through secondary recognition, and under the condition that the circular edge defect exists in probe station marker imaging, the probe station marker can still be positioned through the circular arc feature, so that the robustness of the positioning algorithm is enhanced, and the success rate of positioning the probe station marker is improved.

As described in fig. 2, in some embodiments, step S101 may include:

step S1011: graying treatment is carried out on the probe station marker image to obtain a probe station marker gray scale image;

step S1012: and carrying out threshold segmentation on the probe station marker gray level graph to obtain a binary graph.

In this embodiment, a circular probe station marker image is acquired by a probe station camera, and as shown in fig. 3, the probe station marker image is subjected to graying processing to obtain a probe station marker gray scale image, and in this embodiment, the operation of converting a color image into a gray scale image is referred to as image graying. As shown in fig. 4, a binary image can be obtained by threshold segmentation. The binary image is used for representing the outline of the marker, the binary image is a black-and-white image, and the pixel value of each point in the binary image is 0 or 255. The embodiment can select any one of the following existing threshold segmentation methods, for example, an oxford method, a maximum entropy threshold segmentation method and an iterative threshold segmentation method according to the actual use scene. The threshold segmentation method in the embodiment is a local self-adaptive threshold segmentation method, and the local self-adaptive threshold segmentation method is adopted to segment the darker region on the probe station marker image, so that the adaptability to illumination change and the resistance to dirt interference are improved, the extracted probe station marker profile is enabled to be plumter, and the stability and the accuracy of probe station marker identification are improved.

As shown in fig. 5, in some embodiments, step S102 further includes:

step S501: and filtering noise points in the binary image through median filtering.

In this embodiment, the median filtering is a nonlinear smoothing technique, as shown in fig. 6, the gray value of each pixel point in the binary image is set as the median value of all the gray values of pixels in a certain neighborhood window of the point, so as to obtain a binary image after median filtering, and the binary image after median filtering is used as the binary image for subsequent processing. In the embodiment, noise interference can be removed through median filtering, the probability of false identification of a circle or an arc is reduced in subsequent processing, the identification accuracy of the circle or the arc is improved, and the positioning accuracy of the marker of the probe station is further improved.

As shown in fig. 7, in some embodiments, step S102 may include:

step S1021: acquiring a first specific connected domain from the binary image;

step S1022: extracting a contour convex hull of the first specific connected domain;

step S1023: fitting a circle to the outline convex hull to obtain a first fitting circle center pixel value and a first fitting radius;

step S1024: judging whether the first fitting circle center pixel value is in a first preset pixel interval or not to obtain a first judgment result;

Step S1025: judging whether the first fitting radius is in a first preset radius interval or not to obtain a second judgment result;

step S1026: and if the first judgment result and the second judgment result are both yes, the first specific connected domain accords with the circular characteristic.

As shown in fig. 8, in this embodiment, the first specific connected domain is a possibly circular connected domain, which is used to characterize a circular probe station marker. As shown in fig. 9, a contour convex hull is extracted for the first specific connected domain, and the meaning of the convex hull is: let S be any subset of euclidean space, the smallest convex set containing S be called the convex hull of S. In this embodiment, the contour convex hull is extracted to help repair the round defect. And extracting points on the contour convex hull as fitting circle function calculation points, and calculating the radius and the circle center of the fitted circle function. The method for fitting the circle is not limited in this embodiment, and an existing method for fitting the circle can be selected according to actual use situations, and the optional circle fitting method includes but is not limited to: least square method, least interval method, least outer method, maximum inner method, fixed radius method, RANSAC. The first preset pixel interval is used for representing a pixel value of the marker center of the probe station, and the first pixel interval can be less than 180. The first preset radius interval is used for representing the radius of the probe station marker, and the first preset radius interval can be the radius of the probe station marker plus or minus 4 pixels. And if the first judgment result and the second judgment result are both yes, the first specific connected domain simultaneously meets two recognition conditions of the radius and circle center pixels, and the first specific connected domain meets the circular characteristic.

As shown in fig. 10, in some embodiments, step S1021 may include:

step S10211: acquiring a first initial connected domain of which the pixel area is in a first preset area interval from a binary image;

step S10212: acquiring a first minimum surrounding moment of a first initial connected domain;

step S10213: and taking the first initial connected domain with the aspect ratio of the first minimum surrounding moment smaller than a first preset ratio as a first specific connected domain.

In this embodiment, the pixel area is the number of white pixels in the binary image, and the first initial connected domain is a region formed by the connected white pixels in the binary image. The first preset area interval is used for representing the area of the probe station marker, and in this embodiment, the first preset area interval may be 200±10 pixels. Based on the first preset area interval, discontinuous noise interference can be eliminated, and continuous probe station markers can be extracted. In this embodiment, the first minimum surrounding moment is the minimum rotation surrounding moment, the longer side for obtaining the minimum rotation surrounding moment is the long side, the shorter side is the short side, and the ratio of the long side to the short side is the aspect ratio. The aspect ratio is 1 when the length of the long side is the same as that of the short side. In this embodiment, the closer the aspect ratio is to 1, the closer the first initial communicating region is to a circular shape. The first preset ratio may be 1.1, and the first initial connected domain may be circular when the aspect ratio is smaller than the first preset ratio. According to the embodiment, the first initial connected domain which is possibly circular can be primarily screened based on the aspect ratio of the first minimum surrounding moment, so that the operand of subsequent screening is reduced, and the circular identification efficiency is improved.

As shown in fig. 11, in some embodiments, step S104 may include:

step S1041: judging whether a connected domain conforming to the circular arc position characteristics exists in the binary image;

step S1042: if yes, the judgment result of the step S1041 is that whether the connected domain conforming to the circular arc position feature conforms to the circular arc morphological feature is further judged;

step S1043: and step S1042, if yes, the connected domain conforming to the arc morphological feature conforms to the arc feature.

Step S1044: if the determination result in step S1041 or step S1042 is no, a positioning failure reminder is returned.

The probe station marker positioning method provided by the embodiment carries out arc identification in two steps based on the arc position features and the arc morphological features, and the efficiency and the accuracy of arc identification can be improved through secondary screening.

As shown in fig. 12, in some embodiments, step S1042 may include:

step S10421: acquiring a second specific connected domain from the binary image;

step S10422: drawing an arc retrieval graph based on the second specific connected domain;

step S10423: dividing the circular arc search graph along the second specific connected domain to obtain independent blocks;

step S10424: obtaining a center sampling point and an angle sampling point from the circular arc retrieval graph, wherein the angle sampling point comprises an upper left angle sampling point, a lower left angle sampling point, an upper right angle sampling point and a lower right angle sampling point;

Step S10425: and judging whether the second specific connected domain accords with the circular arc position characteristic or not based on the number of the independent blocks, the position distribution of the central sampling points and the position distribution of the angular sampling points.

In this embodiment, as shown in fig. 13, a connected domain that may be an arc is extracted from the binary map as a second specific connected domain. The edge of the circular arc search graph is the minimum surrounding moment of the second specific connected domain, and the circular arc search graph only comprises two pixel values of 0 and 255, wherein the second specific connected domain is a white region with the pixel value of 255. In this embodiment, as shown in fig. 14, the arc search map may be inverted, and in the inverted arc search map, the area formed by the continuous white pixels is an independent block. In some embodiments, the method further comprises preprocessing the independent blocks, and deleting the independent blocks with pixel areas smaller than 100 to obtain preprocessed independent blocks. The interference of small noise points can be eliminated by preprocessing. Further, whether the second specific connected domain is likely to be an arc can be judged based on the number of independent blocks, the position distribution of the center sampling points and the position distribution of the angle sampling points.

As shown in fig. 15, in some embodiments, step S10421 may include:

Step S104211: carrying out morphological expansion on the binary image to obtain an expansion image;

step S104212: acquiring a second initial connected domain with the pixel area in a second preset area interval from the expansion map;

step S104213: acquiring a second minimum surrounding moment of a second initial connected domain;

step S104214: acquiring the length of a long side and the length of a short side of the second minimum surrounding moment;

step S104215: acquiring the area ratio of the second initial connected domain to the second minimum surrounding moment;

step S104216: and taking the second initial connected domain with the length of the long side being greater than the length of the preset long side, the length of the short side being greater than the length of the preset short side and the area ratio being greater than the area ratio as a second specific connected domain.

In this embodiment, the broken arc can be connected as much as possible through morphological expansion, so as to repair the arc, and facilitate the subsequent arc identification. The second preset area interval may be 400±10 pixels. The pixel area is the number of white pixels in the second initial connected domain, and the second initial connected domain consists of the white pixels connected in the binary image. The longer side of the second minimum surrounding moment is the long side, and the shorter side is the short side. The number of the pixel points in the second initial connected domain is the area of the second initial connected domain, and the product of the long side and the short side is the area of the second minimum surrounding moment. In this embodiment, the preset long side length may be 80 pixels, the preset short side length may be 20 pixels, and the preset area ratio may be 0.4. The second initial connected region having a long side length greater than the preset long side length, a short side length greater than the preset short side length, and an area ratio greater than the preset area ratio may be an arc. According to the embodiment, through screening the connected domains through morphological expansion according to the size and the morphology, the second specific connected domain which is possibly an arc can be screened out preliminarily, the calculation amount of subsequent screening is reduced, and the arc identification efficiency is improved.

As shown in fig. 16, in some embodiments, step S10425 may include:

step S104251: when the number of the independent blocks is two, the second specific connected domain accords with the circular arc position characteristic;

step S104252: when the number of the independent blocks is three, if the circular arc search map simultaneously meets the following conditions, the second specific connected domain accords with the circular arc position characteristics: the largest independent block in the circular arc retrieval graph comprises a center sampling point and no more than one angle sampling point, and the rest independent blocks respectively comprise one angle sampling point;

step S104253: when the number of the independent blocks is four, if the circular arc search map simultaneously meets the following conditions, the second specific connected domain accords with the circular arc position characteristics: the largest independent block in the circular arc retrieval graph comprises a center sampling point and an angle sampling point, and the rest independent blocks respectively comprise an angle sampling point;

step S104254: when the number of the independent blocks is less than two or more than four, the second specific connected domain does not accord with the circular arc position characteristics.

In this embodiment, when the second specific connected domain is an arc, as shown in fig. 17, it can be directly determined that the second specific connected domain is an arc when the number of independent blocks is two, where the center sampling point a is located on a larger independent block, each independent block includes one angular sampling point B, and the remaining two angular sampling points B are located on the second specific connected domain. As shown in fig. 18, when the number of independent blocks is three, the center sampling point a is on the largest independent block, and there are 1 or 0 angular sampling points B on the largest independent block, and the other blocks each include one angular sampling point B, so that it can be determined that the second specific connected domain is an arc, and the remaining one angular sampling point B is on the second specific connected domain. As shown in fig. 19, when the number of independent blocks is four, the center sampling point a is on the largest independent block, and each independent block includes one angular sampling point B, so that it can be determined that the second specific connected domain is a circular arc. When the above three conditions are not met, it can be determined that the second specific connected domain is not a circular arc.

As shown in fig. 20, in some embodiments, step S1042 may include:

step S10421: performing edge detection on the binary image to obtain an edge detection image;

step S10422: mapping the connected domain conforming to the circular arc position characteristics onto an edge detection graph for positioning, and obtaining an edge point set of the connected domain conforming to the circular arc position characteristics;

step S10423: fitting a circle to the edge point set to obtain a second fitting circle center pixel value and a second fitting radius;

step S10424: judging whether the second fitting circle center pixel value is in a second preset pixel interval or not to obtain a third judgment result;

step S10425: judging whether the second fitting radius is in a second preset radius interval or not to obtain a fourth judgment result;

step S10426: and if the third judging result and the fourth judging result are both yes, the connected domain conforming to the circular arc position characteristics conforms to the circular arc morphological characteristics.

In this embodiment, as shown in fig. 21, the connected domain conforming to the circular arc position feature is an expanded circular arc region, and the expanded circular arc region corresponds to the circular arc contour coordinate on the edge detection map, so that the positioning can be performed based on the connected domain conforming to the circular arc position feature, and as shown in fig. 22, only the edge point set, that is, the white pixel point, located on the connected domain conforming to the circular arc position feature is extracted. In this embodiment, the second preset radius interval is used to represent the radius of the probe station marker, the circle center pixel value is used to represent the circle center pixel value of the probe station marker, the second preset radius interval may be ± 4 pixels of the radius of the probe station marker, and the circle center pixel value may be 180. And when the third judging result and the fourth judging result are both yes, the fact that the round probe station marker is identified is indicated, and the second fitting circle center is the coordinates of the probe station marker.

As shown in fig. 23, in some embodiments, step S10423 may include:

step S104231: and obtaining a fitting circle function of the edge point set by adopting a least square method.

According to the probe station marker positioning method, when primary circle identification fails, a judging rule is set to detect arcs, incomplete arcs are re-fitted, new circle centers and new radii are obtained and judged, and the success rate and stability of probe station marker identification are remarkably improved.

In a second aspect of embodiments of the present application, there is provided a probe station marker positioning device, as shown in fig. 24, comprising:

an obtaining module 241, configured to obtain a binary image of the probe station marker;

the data processing module 242 is configured to determine whether a connected domain conforming to a circular feature exists in the binary image;

if yes, positioning a probe station marker based on the connected domain conforming to the circular characteristic;

if not, judging whether the connected domain conforming to the circular arc characteristic exists in the binary image, and if so, positioning the probe station marker based on the connected domain conforming to the circular arc characteristic.

The probe station marker positioning device in the embodiment of the application can also be a component, an integrated circuit or a chip in the terminal. The device may be a mobile electronic device or a non-mobile electronic device. By way of example, the mobile electronic device may be a cell phone, tablet computer, notebook computer, palm computer, vehicle-mounted electronic device, wearable device, ultra-mobile personal computer (ultra-mobile personal computer, UMPC), netbook or personal digital assistant (personal digital assistant, PDA), etc., and the non-mobile electronic device may be a server, network attached storage (Network Attached Storage, NAS), personal computer (personal computer, PC), television (TV), teller machine or self-service machine, etc., and the embodiments of the present application are not limited in particular.

The probe station marker positioning device provided in the embodiment of the present application can implement each process implemented by the probe station marker positioning method provided in any one of the embodiments, and in order to avoid repetition, a description is omitted here.

Optionally, as shown in fig. 25, the embodiment of the present application further provides an electronic device 1100, including a processor 1101, a memory 1102, and a program or an instruction stored in the memory 1102 and capable of running on the processor 1101, where the program or the instruction implements each process of the embodiment of the probe station marker positioning method when executed by the processor 1101, and the same technical effects can be achieved, and for avoiding repetition, a detailed description is omitted herein.

The electronic device in the embodiment of the application includes the mobile electronic device and the non-mobile electronic device described above.

Fig. 26 is a schematic hardware structure of an electronic device implementing an embodiment of the present application.

The electronic device 1200 includes, but is not limited to: radio frequency unit 1201, network module 1202, audio output unit 1203, input unit 1204, sensor 1205, display unit 1206, user input unit 1207, interface unit 1208, memory 1209, and processor 1210.

Those skilled in the art will appreciate that the electronic device 1200 may also include a power source (e.g., a battery) for powering the various components, which may be logically connected to the processor 1210 by a power management system, such as to perform functions such as managing charging, discharging, and power consumption by the power management system. The electronic device structure shown in fig. 26 does not constitute a limitation of the electronic device, and the electronic device may include more or less components than those shown in the drawings, or may combine some components, or may be arranged in different components, which will not be described in detail herein.

It should be understood that in the embodiment of the present application, the input unit 1204 may include a graphics processor (Graphics Processing Unit, GPU) 12041 and a microphone 12042, and the graphics processor 12041 processes image data of still pictures or videos obtained by an image capturing device (such as a camera) in a video capturing mode or an image capturing mode. The display unit 1206 may include a display panel 12061, and the display panel 12061 may be configured in the form of a liquid crystal display, an organic light emitting diode, or the like. The user input unit 1207 includes a touch panel 12071 and other input devices 12072. The touch panel 12071 is also called a touch screen. The touch panel 12071 may include two parts, a touch detection device and a touch controller. Other input devices 12072 may include, but are not limited to, a physical keyboard, function keys (e.g., volume control keys, switch keys, etc.), a trackball, a mouse, a joystick, and so forth, which are not described in detail herein. Memory 1209 may be used to store software programs as well as various data including, but not limited to, application programs and an operating system. Processor 1210 may integrate an application processor that primarily processes operating systems, user interfaces, applications, etc., with a modem processor that primarily processes wireless communications. It will be appreciated that the modem processor described above may not be integrated into processor 1210.

The embodiment of the application further provides a readable storage medium, on which a program or an instruction is stored, where the program or the instruction realizes each process of the above embodiment of the probe station marker positioning method when executed by a processor, and the same technical effect can be achieved, so that repetition is avoided, and no detailed description is given here.

Wherein the processor is a processor in the electronic device described in the above embodiment. The readable storage medium includes a computer readable storage medium such as a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk or an optical disk, and the like.

The embodiment of the application further provides a chip, the chip includes a processor and a communication interface, the communication interface is coupled with the processor, the processor is used for running a program or an instruction, implementing each process of the above embodiment of the probe station marker positioning method, and achieving the same technical effect, so as to avoid repetition, and no further description is provided here.

It should be understood that the chips referred to in the embodiments of the present application may also be referred to as system-on-chip chips, chip systems, or system-on-chip chips, etc.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. Furthermore, it should be noted that the scope of the methods and apparatus in the embodiments of the present application is not limited to performing the functions in the order shown or discussed, but may also include performing the functions in a substantially simultaneous manner or in an opposite order depending on the functions involved, e.g., the described methods may be performed in an order different from that described, and various steps may also be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

From the above description of the embodiments, it will be clear to those skilled in the art that the above-described embodiment method may be implemented by means of software plus a necessary general hardware platform, but of course may also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solutions of the present application may be embodied essentially or in a part contributing to the prior art in the form of a computer software product stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk), comprising several instructions for causing a terminal (which may be a mobile phone, a computer, a server, or a network device, etc.) to perform the methods described in the embodiments of the present application.

The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are also within the protection of the present application.

Claims

1. A method of positioning a probe station marker, comprising:

acquiring a binary image of the probe station marker;

2. The method for positioning a probe station marker according to claim 1, wherein determining whether a connected domain conforming to a circular feature exists in the binary image comprises:

acquiring a first specific connected domain from the binary image;

Extracting the outline convex hull of the first specific connected domain;

3. The method of claim 2, wherein obtaining a first specific connected domain from the binary image comprises:

4. The method for positioning a probe station marker according to claim 1, wherein determining whether a connected domain conforming to an arc feature exists in the binary image comprises:

5. The method of claim 4, wherein determining whether a connected domain meeting the circular arc position feature exists in the binary image comprises:

acquiring a second specific connected domain from the binary image;

drawing an arc retrieval graph based on the second specific connected domain;

6. The probe station marker positioning method according to claim 5, wherein determining whether the second specific connected domain meets an arc position feature based on the number of independent segments, the position distribution of the center sampling point, and the position distribution of the angle sampling point comprises:

7. The method of claim 5, wherein obtaining a second specific connected domain from the binary image comprises:

8. The method for positioning a probe station marker according to any one of claims 4 to 7, wherein further determining whether the connected domain conforming to the circular arc position feature conforms to the circular arc morphology feature comprises:

9. The method of claim 8, wherein fitting the set of edge points to a circle comprises:

10. The method of claim 1, wherein obtaining a binary map of probe station markers comprises:

11. The method for positioning a probe station marker according to claim 10, wherein the threshold segmentation is performed by any one of the following segmentation methods: a local self-adaptive threshold segmentation method, an Ojin method, a maximum entropy threshold segmentation method and an iterative threshold segmentation method.

12. The method for positioning a probe station marker according to claim 1, wherein before judging whether a connected domain conforming to a circular feature exists in the binary image, further comprises:

and filtering noise points in the binary image through median filtering.

13. A probe station marker positioning device, comprising:

14. An electronic device, comprising: a processor, a memory and a program or instruction stored on the memory and executable on the processor, which when executed by the processor implements a probe station marker positioning method according to any of claims 1 to 12.

15. A readable storage medium having stored thereon a program or instructions which when executed by a processor implements a probe station marker positioning method according to any of claims 1-12.