CN116224570A - Tunable filter and semiconductor laser - Google Patents
Tunable filter and semiconductor laser Download PDFInfo
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- CN116224570A CN116224570A CN202310480417.1A CN202310480417A CN116224570A CN 116224570 A CN116224570 A CN 116224570A CN 202310480417 A CN202310480417 A CN 202310480417A CN 116224570 A CN116224570 A CN 116224570A
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- etalon
- optical fiber
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1092—Multi-wavelength lasing
Abstract
The application relates to the technical field of laser semiconductors, in particular to a tunable filter and a semiconductor laser; the tunable filter comprises a tunable F-P cavity, wherein the tunable F-P cavity comprises a first F-P etalon, a second F-P etalon and a movable component, the first F-P etalon and/or the second F-P etalon are arranged at intervals in parallel, the movable component is connected with the first F-P etalon and/or the second F-P etalon, a high reflection film is arranged on the opposite surface between the first F-P etalon and the second F-P etalon, and the movable component is used for moving the first F-P etalon and/or the second F-P etalon so as to adjust the interval between the first F-P etalon and the second F-P etalon; compared with the mode of a tunable F-P cavity which is realized by a precise and complex mechanical clamp in the prior art, the movable assembly is correspondingly configured for the corresponding F-P etalon, so that the complex mechanical clamp for fixing the optical fiber can be avoided, and the manufacturing complexity and cost of the device are effectively reduced.
Description
Technical Field
The present disclosure relates to the field of laser semiconductor technology, and in particular, to a tunable filter and a semiconductor laser.
Background
Fabry-Perot (Fabry-Perot) etalons, i.e., F-P etalons. The fabry-perot interferometer is an interferometer mainly composed of two flat glass or quartz plates. The inward surfaces of the two plates are respectively plated with a high-reflectivity partial transmission film and are parallel to each other; a parallel planar air layer is formed between the two plates. The light is repeatedly reflected between the air layers between the two coating surfaces to form a multi-beam equal-inclination interference ring.
The tunable Fabry-Perot filter based on the F-P etalon has the advantages of simple structure, low cost, high fineness, easy realization of wavelength tuning, controllable tuning range, high tuning speed and the like. In wavelength division multiplexing and signal demodulation systems in the fields of optical communication, optical fiber sensing, and the like, they are widely used as core devices; and is also one of the important implementation ways of wavelength tuning function in tunable lasers that are widely used in various fields.
The tunable F-P filter is used as a core device in an application system, and the performance quality and the use mode of the tunable F-P filter can directly influence the performance of the whole system.
The existing commonly used optical fiber tunable F-P filter forms a tunable F-P cavity through a coated end surface between two optical fibers, and the distance between the two optical fibers is controlled to realize wavelength tunability. However, since the diameter of the optical fiber is um-level, a precise mechanical clamp is required for coupling and fixing, so that the complexity and cost of manufacturing the device are greatly increased, and the technical problem needs to be solved.
Disclosure of Invention
In view of this, the tunable filter and the semiconductor laser provided in the present application aim to solve at least one problem including:
the tunable filter in the prior art needs a precise and complex mechanical clamp to realize a tunable F-P cavity, thereby greatly increasing the complexity and cost of manufacturing devices.
A first aspect of the present application provides a tunable filter, wherein the tunable filter comprises a tunable F-P cavity comprising a first F-P etalon, a second F-P etalon, and a movable assembly connected to the first F-P etalon and/or the second F-P etalon, spaced apart and arranged in parallel, wherein:
the opposite faces between the first F-P etalon and the second F-P etalon are respectively provided with a high reflection film, and the movable assembly is used for moving the first F-P etalon and/or the second F-P etalon so as to adjust the distance between the first F-P etalon and the second F-P etalon.
Optionally, opposite surfaces between the first F-P etalon and the second F-P etalon are provided with antireflection films.
Optionally, the tunable filter further includes a heat dissipating base, and the first F-P etalon, the second F-P etalon, and the movable component are all disposed on the heat dissipating base.
Optionally, the tunable filter further comprises a collimating lens and a coupling lens, wherein:
the collimating lens is arranged on the outer side of the surface, far away from the second F-P etalon, of the first F-P etalon, the coupling lens is arranged on the outer side of the surface, far away from the first F-P etalon, of the second F-P etalon, the collimating lens is used for collimating divergent light emitted by an input optical fiber into parallel light beams, the parallel light is sequentially input into the first F-P etalon and the second F-P etalon, and the coupling lens is used for coupling the parallel light emitted by the second F-P etalon into an output optical fiber device;
or alternatively, the process may be performed,
the collimating lens is arranged on the outer side of the face, far away from the first F-P etalon, of the second F-P etalon, the coupling lens is arranged on the outer side of the face, far away from the second F-P etalon, of the first F-P etalon, the collimating lens is used for collimating divergent light emitted by an input optical fiber into parallel light beams, the parallel light beams are sequentially input into the second F-P etalon and the first F-P etalon, and the coupling lens is used for coupling the parallel light emitted by the first F-P etalon into an output optical fiber device.
Optionally, the tunable filter further comprises an input fiber collimator and an output fiber collimator, wherein:
the input optical fiber collimator and the output optical fiber collimator are respectively arranged at two ends of the first F-P etalon and the second F-P etalon;
the input optical fiber collimator is used for inputting the output parallel light beams into the first F-P etalon;
the output optical fiber collimator is used for coupling out parallel light emitted by the second F-P etalon;
or alternatively, the process may be performed,
the input optical fiber collimator and the output optical fiber collimator are respectively arranged at two ends of the second F-P etalon and the first F-P etalon;
the input optical fiber collimator is used for inputting the output parallel light beams into the second F-P etalon;
the output optical fiber collimator is used for coupling out the parallel light emitted by the first F-P etalon.
Optionally, the tunable filter further comprises a first isolator and a second isolator, wherein:
the first isolator is arranged between the first F-P etalon and the collimating lens;
the second isolator is arranged between the second F-P etalon and the coupling lens;
or alternatively, the process may be performed,
the first isolator is arranged between the first F-P etalon and the coupling lens;
the second isolator is disposed between the second F-P etalon and the collimator lens.
Optionally, the tunable filter further comprises a device input for inputting an optical fiber and a device output for outputting an optical fiber, wherein:
the device input end and the device output end are respectively arranged at two ends of the first F-P etalon and the second F-P etalon;
or alternatively, the process may be performed,
the device input end and the device output end are respectively arranged at two ends of the second F-P etalon and the first F-P etalon.
Optionally, based on the input optical fiber, the first F-P etalon and the second F-P etalon parallel to each other further have a preset inclination angle with respect to a perpendicular plane of an incident optical axis of the input optical fiber, respectively.
Optionally, the tunable filter further comprises a package, the tunable filter being integrally packaged within the package.
A second aspect of the present application provides a semiconductor laser, wherein the semiconductor laser comprises a tunable filter as described in any of the first aspects of the present application above.
Compared with the prior art, the tunable filter of the application at least comprises the following beneficial effects:
the tunable filter is provided with high reflection films on the opposite surfaces between the first F-P etalon and the second F-P etalon, so that an F-P cavity is formed, and a movable component connected with the second F-P etalon is configured and used for adjusting the distance between the first F-P etalon and the second F-P etalon, and a narrow-band comb-shaped filter spectrum shown in fig. 1 is generated through the interference effect of the F-P cavity, so that the filtering effect is achieved. Compared with the mode of forming a tunable F-P cavity by coupling and fixing which is realized by a precise and complex mechanical clamp in the prior art, the tunable F-P filter has the advantages that the movable assembly is correspondingly configured for the corresponding F-P etalon, the complex mechanical clamp for fixing the optical fiber can be avoided, the structure of the tunable F-P filter can be effectively simplified, and the manufacturing complexity and cost of the device are effectively reduced.
Additional features and advantages of embodiments of the application will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of embodiments of the application. The objectives and other advantages of the embodiments of the application will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a filter characteristic spectrum of an F-P filter according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a tunable filter provided by an embodiment of the present invention;
FIG. 3 is another schematic diagram of a tunable filter provided by an embodiment of the present invention;
FIG. 4 is another schematic diagram of a tunable filter provided by an embodiment of the present invention;
FIG. 5 is another schematic diagram of a tunable filter provided by an embodiment of the present invention;
FIG. 6 is another schematic diagram of a tunable filter provided by an embodiment of the present invention;
fig. 7 is another schematic diagram of a tunable filter provided by an embodiment of the present invention.
Wherein, the following is the reference numeral description:
1-an input optical fiber;
2-a collimating lens;
3-a first F-P etalon;
4-a second F-P etalon;
5-a movable assembly;
6, a heat dissipation base;
7-coupling lenses;
8-an output optical fiber;
9-a first isolator;
10-a second separator;
11-an input fiber collimator;
12-output fiber collimator.
Detailed Description
Although the embodiments described above have been described in the text and drawings of the present application, the scope of the patent application is not limited thereby. All technical schemes generated by replacing or modifying equivalent structures or equivalent flows based on the essential idea of the application and by utilizing the contents recorded in the text and the drawings of the application, and the technical schemes of the embodiments are directly or indirectly implemented in other related technical fields, and the like, are included in the patent protection scope of the application.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
As described in the background art, the conventional fiber tunable F-P filter forms an F-P cavity through the coated end surface between two optical fibers, and the distance between the two optical fibers is controlled to realize wavelength tunability. However, since the diameter of the optical fiber is in um level, a precise mechanical clamp is required for coupling and fixing to form the tunable F-P cavity, so that the complexity and cost of manufacturing the device are greatly increased, and in order to solve the technical problems, the inventive concept of the present application is provided, and the following embodiments will be specifically described.
In a first aspect the present application provides a tunable filter comprising, in one embodiment, a tunable F-P cavity comprising a first F-P etalon 3, a second F-P etalon 4 spaced apart and arranged in parallel, and a movable assembly 5 connected to the first F-P etalon 3 and/or the second F-P etalon 4, the movable assembly 5 being a piezo-ceramic or other deformable device, the primary function of the movable assembly 5 being to be able to move the first F-P etalon 3 and/or the second F-P etalon 4 to vary the spacing between the first F-P etalon 3 and the second F-P etalon 4, as shown in fig. 2.
In a practical arrangement, the connected movable assembly 5 may be configured for the first F-P etalon 3 and the second F-P etalon 4, respectively, or the connected movable assembly 5 may also be configured for the first F-P etalon 3 alone or the second F-P etalon 4 alone.
The following embodiments are described with respect to the movable assembly 5 being connected in a configuration mainly for the second F-P etalon 4, and are not meant to be limiting, and the configuration may be selected according to the actual circumstances. That is, by fixing one of the two F-P etalons and moving the other of the two F-P etalons through the movable assembly 5, the cavity length of the F-P cavity formed between the two F-P etalons is adjusted, and the position of the filtering spectral peak is shifted, so that wavelength tunable narrow-band filtering is realized.
Wherein the opposing faces between the first F-P etalon 3 and the second F-P etalon 4 are each provided with a highly reflective film, and the movable assembly 5 is used to move the first F-P etalon 3 and/or the second F-P etalon 4 to adjust the spacing between the first F-P etalon 3 and the second F-P etalon 4 to control the cavity length of the tunable F-P cavity.
In the practical application scenario of the tunable filter configured in the above embodiment, an input optical signal passes through a tunable F-P cavity, for example, the input optical fiber 1 is used as the input optical signal, and the input optical fiber 1 is adjusted to be parallel to a light beam, and the tunable F-P cavity is perpendicular to the incident optical axis, so that the filtering effect shown in fig. 1 can be generated. Specifically, based on the first F-P etalon 3 and the second F-P etalon 4 which are arranged in parallel and at intervals, and the opposite surfaces between the first F-P etalon 3 and the second F-P etalon 4 are respectively provided with a high reflection film, an F-P cavity can be formed between the two parallel medium surfaces, multi-beam interference is generated when light propagates in the F-P cavity, a transmission spectrum and a reflection spectrum passing through the F-P cavity can show comb-shaped filtering spectral characteristics as shown in fig. 1, the transmission spectrum shows that with the change of wavelength, certain light with specific wavelengths at the transmission spectrum peak can be completely transmitted, and the light with other wavelengths can hardly transmit, so that the characteristic of narrow-band filtering is realized. The reflection spectrum is contrary, as the wavelength changes, light of some wavelengths is totally reflected, while light of other specific wavelengths is hardly reflected. The tunable F-P filter realizes the tuning function by controlling the cavity length or refractive index between two parallel medium surfaces to make the comb filter spectrum translate. In this embodiment, by configuring the first F-P etalon 3 and/or the second F-P etalon 4 with a movable element 5 connected thereto, the movable element 5 is used to adjust the distance between the first F-P etalon 3 and the second F-P etalon 4, and the narrow-band comb filter spectrum shown in fig. 1 is generated by the F-P cavity interference effect, so as to perform a filtering function, and then the filtered parallel light beam exits from the second F-P etalon 4 and is coupled into the output optical fiber 8 for outputting an optical signal. Compared with the mode of forming a tunable F-P cavity by coupling and fixing which is realized by a precise and complex mechanical clamp in the prior art, the tunable F-P filter has the advantages that the movable assembly 5 is correspondingly configured for the corresponding F-P etalon, the complex mechanical clamp for fixing the optical fiber can be avoided, the structure of the tunable F-P filter can be effectively simplified, and the manufacturing complexity and cost of the device are effectively reduced.
In addition, it is specifically noted that the tunable filter in the above embodiment may be used in both directions, that is, the input optical fiber 1 and the output optical fiber 8 may be interchanged, that is, the input optical fiber 1 may also be used as the device output end, and the output optical fiber 8 is the device input end, so that the same function may be achieved through the interchange, which is not described herein for avoiding redundancy.
Based on the above embodiments, the opposite faces between the first F-P etalon 3 and the second F-P etalon 4 are each provided with a highly reflective film, and in one embodiment, the opposite faces between the first F-P etalon 3 and the second F-P etalon 4 may also be provided with an anti-reflective film.
In the above embodiment, the anti-reflection films are disposed on the opposite surfaces of the first F-P etalon 3 and the second F-P etalon 4, so that the uniqueness of effective F-P cavity interference formed between the two surfaces of the plated high reflection films can be ensured, and interference caused by F-P interference formed between other cavity surfaces can be avoided, thereby improving the stability of the tunable filter.
In one embodiment, as shown in fig. 2-7, the tunable filter may further include a heat dissipation base 6, where the heat dissipation base 6 may be a semiconductor refrigerator TEC (Thermo Electric Cooler) or other temperature control device, and the heat dissipation base 6 is mainly used to provide heat dissipation for the first F-P etalon 3, the second F-P etalon 4, and the movable component 5; specifically, the first F-P etalon 3, the second F-P etalon 4, and the movable assembly 5 are all disposed on a heat dissipation base 6.
In the above embodiment, by configuring the heat dissipation base 6 and disposing the first F-P etalon 3, the second F-P etalon 4, and the movable component 5 on the heat dissipation base 6, the heat dissipation base 6 can provide heat dissipation for the first F-P etalon 3, the second F-P etalon 4, and the movable component 5, so that temperature control is performed, and stability of the tunable filter is improved.
In one embodiment, in order to eliminate the problem of the filter reflection spectrum filtering characteristic and only preserve the transmission spectrum filtering characteristic, as shown in fig. 3, based on the input optical fiber 1, the first F-P etalon 3 and the second F-P etalon 4, which are parallel to each other, also have a preset inclination angle θ with respect to the vertical plane of the input optical axis of the input optical fiber 1, respectively, which may be selected according to the actual scene, and is not particularly limited herein.
In the above embodiment, by eliminating the reflected light of the filter by means of the tilt-tunable F-P filter, it is ensured that the filter has only a transmission spectrum filtering characteristic, no reflection spectrum filtering characteristic, and can be used in both directions. In this embodiment, by placing the two parallel F-P etalons at an angle, according to the law of refraction of light, the optical axis direction of the transmitted light after passing through the two parallel F-P etalons by the light beam incident from either side of the parallel F-P etalons remains consistent with the incident optical axis, and only lateral translation occurs, without affecting the use of the transmission filter characteristics of the filter. However, the reflected light of the incident light beam on the F-P etalon will be reflected in a direction at an angle to the incident optical axis, and cannot return to the original optical path, i.e. the reflection spectrum filtering characteristic of the filter is eliminated. The same effect can be achieved by adding spacers on both sides of the F-P etalon, but the difference is that the parallel F-P etalon is obliquely arranged, the whole device can be used in two directions, and the device can only be used in one direction by adding spacers on both sides, and the embodiment for configuring the spacers is described in the following embodiment.
In the following description, a practical application scenario is described, in which an input optical fiber 1 inputs a beam of scattered light, the scattered light beam may be collimated by a collimating lens 2 into a parallel light beam, and after the parallel light beam passes through a tunable F-P cavity inclined to an incident optical axis, an outgoing optical axis direction of the transmitted light beam having a transmission spectrum characteristic shown in fig. 1 is consistent with the incident optical axis, but a lateral translation occurs, and then the transmitted light beam is coupled into an output optical fiber 8 via a coupling lens 7, and a reflected light beam having a reflection spectrum characteristic shown in fig. 1 is reflected at an angle to the incident optical axis, so that the reflected light beam cannot return to an original optical path, thereby eliminating a reflection spectrum of the F-P cavity.
In one embodiment, as shown in fig. 2-4, the tunable filter may further comprise a collimating lens 2 and a coupling lens 7, wherein:
the collimating lens 2 is arranged on the outer side of the surface of the first F-P etalon 3 far away from the second F-P etalon 4, the coupling lens 7 is arranged on the outer side of the surface of the second F-P etalon 4 far away from the first F-P etalon 3, the collimating lens 2 is used for collimating divergent light emitted by the input optical fiber 1 into parallel light beams, the parallel light beams are sequentially input into the first F-P etalon 3 and the second F-P etalon 4, and the coupling lens 7 is used for coupling the parallel light emitted by the second F-P etalon 4 into the output optical fiber 8 device.
Or alternatively, the process may be performed,
the collimating lens 2 is arranged on the outer side of the face, far away from the first F-P etalon 3, of the second F-P etalon 4, the coupling lens 7 is arranged on the outer side of the face, far away from the second F-P etalon 4, of the first F-P etalon 3, the collimating lens 2 is used for collimating divergent light emitted by the input optical fiber 1 into parallel light beams, the parallel light beams are sequentially input into the second F-P etalon 4 and the first F-P etalon 3, and the coupling lens 7 is used for coupling the parallel light emitted by the first F-P etalon 3 into the output optical fiber 8 device.
In the above embodiment, by configuring the corresponding collimator lens 2 and coupling lens 7, the efficiency of beam transmission can be improved, thereby improving the performance of the tunable filter.
In one embodiment, as shown in fig. 5-7, the tunable filter may further comprise an input fiber collimator 11 and an output fiber collimator 12, wherein:
the input optical fiber collimator 11 and the output optical fiber collimator 12 are respectively arranged at two ends of the first F-P etalon 3 and the second F-P etalon 4, and the input optical fiber collimator 11 is used for inputting the output parallel light beams into the first F-P etalon 3; the output optical fiber collimator 12 is used for coupling out the parallel light emitted by the second F-P etalon 4;
or alternatively, the process may be performed,
the input optical fiber collimator 11 and the output optical fiber collimator 12 are respectively arranged at two ends of the second F-P etalon 4 and the first F-P etalon 3; the input optical fiber collimator 11 is used for inputting the output parallel light beam into the second F-P etalon 4; the output fiber collimator 12 is used for coupling out the parallel light emitted through the first F-P etalon 3.
In the above embodiment, the optical fiber collimator is adopted to replace the input optical fiber 1, the collimating lens 2, the coupling lens 7 and other devices, so that the device structure can be effectively simplified, the device size can be reduced, and the device manufacturing difficulty can be reduced.
In one embodiment, as shown in fig. 7, the tunable filter may further comprise a first isolator 9 and a second isolator 10, wherein:
the first isolator 9 is arranged between the first F-P etalon 3 and the collimating lens 2;
the second isolator 10 is arranged between the second F-P etalon 4 and the coupling lens 7;
or alternatively, the process may be performed,
the first isolator 9 is arranged between the first F-P etalon 3 and the coupling lens 7;
the second isolator 10 is arranged between the second F-P etalon 4 and the collimator lens 2.
In the above embodiment, by configuring the corresponding isolators, the filter can be ensured to have only the transmission spectrum filtering characteristic and no reflection spectrum filtering characteristic by adopting a mode of placing the isolators on two sides of the tunable F-P filter. In an actual application scene, a first isolator 9 is arranged between the first F-P etalon 3 and the collimating lens 2; the second isolator 10 is disposed between the second F-P etalon 4 and the coupling lens 7 for example, as shown in fig. 7, by means of the first isolator 9, the parallel light beam emitted from the collimating lens 2 is transmitted unidirectionally after passing through the first isolator 9, so that the reflected light of the tunable F-P cavity cannot continue to propagate in the optical path after passing through the isolator, thereby eliminating the reflection spectrum of the filter, ensuring that the tunable F-P cavity does not resonate with other devices in the input optical path, and avoiding the introduction of interference of other interfering tunable F-P cavities. Through the second isolator 10, the transmission filter light beam emitted from the tunable F-P cavity is transmitted unidirectionally after passing through the second isolator 10, so that the light reflected in the backward light path cannot return to the tunable F-P cavity, the tunable F-P cavity is ensured not to resonate with other devices in the output light path, and other interference F-P interference is avoided.
In one embodiment, as shown in fig. 2-4, the tunable filter further comprises a device input for inputting the optical fiber 1 and a device output for outputting the optical fiber 8, wherein: the device input end and the device output end are respectively arranged at two ends of the first F-P etalon 3 and the second F-P etalon 4; alternatively, the device input and device output are provided at both ends of the second F-P etalon 4 and the first F-P etalon 3, respectively. The input optical fiber 1 in this embodiment can be understood as an input optical signal, and the output optical fiber 8 can be understood as an output optical signal; in this embodiment, by configuring the tunable filter with the corresponding device input terminal and device output terminal, the package can be made into an optical fiber using device, thereby improving the convenience of use of the tunable filter.
In one embodiment, the tunable filter may further include a package (not shown) within which the tunable filter is integrally packaged. In the embodiment, the tunable filter is integrally packaged in the tube shell, so that the tunable filter can be an optical fiber using device, free space optical coupling of the filter during use can be avoided, and the use difficulty of the filter is reduced.
The second aspect of the present application also provides a semiconductor laser, which in one embodiment comprises the tunable filter of any of the embodiments of the first aspect of the present application. Based on a plurality of beneficial effects of the tunable filter, the semiconductor laser also has corresponding beneficial effects, and in order to avoid redundancy, redundant description is omitted here.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
The above embodiments of the present invention do not limit the scope of the present invention. Any of various other corresponding changes and modifications made according to the technical idea of the present invention should be included in the scope of the claims of the present invention.
Claims (10)
1. A tunable filter comprising a tunable F-P cavity comprising a first F-P etalon, a second F-P etalon, and a movable assembly connected to the first F-P etalon and/or the second F-P etalon, spaced apart and disposed in parallel, wherein:
the opposite faces between the first F-P etalon and the second F-P etalon are respectively provided with a high reflection film, and the movable assembly is used for moving the first F-P etalon and/or the second F-P etalon so as to adjust the distance between the first F-P etalon and the second F-P etalon.
2. The tunable filter of claim 1, wherein opposing faces between the first F-P etalon and the second F-P etalon are each provided with an anti-reflection film.
3. The tunable filter of claim 1, further comprising a heat sink base, wherein the first F-P etalon, the second F-P etalon, and the movable component are all disposed on the heat sink base.
4. The tunable filter of claim 3, further comprising a collimating lens and a coupling lens, wherein:
the collimating lens is arranged on the outer side of the surface, far away from the second F-P etalon, of the first F-P etalon, the coupling lens is arranged on the outer side of the surface, far away from the first F-P etalon, of the second F-P etalon, the collimating lens is used for collimating divergent light emitted by an input optical fiber into parallel light beams, the parallel light is sequentially input into the first F-P etalon and the second F-P etalon, and the coupling lens is used for coupling the parallel light emitted by the second F-P etalon into an output optical fiber device;
or alternatively, the process may be performed,
the collimating lens is arranged on the outer side of the face, far away from the first F-P etalon, of the second F-P etalon, the coupling lens is arranged on the outer side of the face, far away from the second F-P etalon, of the first F-P etalon, the collimating lens is used for collimating divergent light emitted by an input optical fiber into parallel light beams, the parallel light beams are sequentially input into the second F-P etalon and the first F-P etalon, and the coupling lens is used for coupling the parallel light emitted by the first F-P etalon into an output optical fiber device.
5. The tunable filter of claim 3, further comprising an input fiber collimator and an output fiber collimator, wherein:
the input optical fiber collimator and the output optical fiber collimator are respectively arranged at two ends of the first F-P etalon and the second F-P etalon;
the input optical fiber collimator is used for inputting the output parallel light beams into the first F-P etalon;
the output optical fiber collimator is used for coupling out parallel light emitted by the second F-P etalon;
or alternatively, the process may be performed,
the input optical fiber collimator and the output optical fiber collimator are respectively arranged at two ends of the second F-P etalon and the first F-P etalon;
the input optical fiber collimator is used for inputting the output parallel light beams into the second F-P etalon;
the output optical fiber collimator is used for coupling out the parallel light emitted by the first F-P etalon.
6. The tunable filter of claim 4, further comprising a first isolator and a second isolator, wherein:
the first isolator is arranged between the first F-P etalon and the collimating lens;
the second isolator is arranged between the second F-P etalon and the coupling lens;
or alternatively, the process may be performed,
the first isolator is arranged between the first F-P etalon and the coupling lens;
the second isolator is disposed between the second F-P etalon and the collimator lens.
7. The tunable filter of claim 4, further comprising a device input for inputting an optical fiber and a device output for outputting an optical fiber, wherein:
the device input end and the device output end are respectively arranged at two ends of the first F-P etalon and the second F-P etalon;
or alternatively, the process may be performed,
the device input end and the device output end are respectively arranged at two ends of the second F-P etalon and the first F-P etalon.
8. The tunable filter of claim 4 or 5, wherein the first F-P etalon and the second F-P etalon, which are parallel to each other, further have a predetermined inclination angle with respect to a perpendicular plane of an incident optical axis of the input optical fiber, respectively, based on the input optical fiber.
9. The tunable filter of claim 3, further comprising a package, the tunable filter being integrally packaged within the package.
10. A semiconductor laser, characterized in that the semiconductor laser comprises a tunable filter according to any of claims 1-9.
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| JPH10104070A (en) * | 1996-09-30 | 1998-04-24 | Oyo Koden Kenkiyuushitsu:Kk | Frequency standard and method for forming selected standard frequency |
| US20020054614A1 (en) * | 2000-11-07 | 2002-05-09 | Hong Jin | Wavelength discretely tunable semiconductor laser |
| US20020172239A1 (en) * | 1999-07-27 | 2002-11-21 | Mcdonald Mark E. | Tunable external cavity laser |
| US7002696B1 (en) * | 2000-11-03 | 2006-02-21 | Optune Technologies | Band pass interferometer with tuning capabilities |
| US20080123104A1 (en) * | 2006-11-27 | 2008-05-29 | Roctest Ltee | High selectivity band-pass interferometer with tuning capabilities |
| CN104348076A (en) * | 2013-08-02 | 2015-02-11 | 福州高意通讯有限公司 | Tunable filtering structure and laser device |
| CN109950785A (en) * | 2017-12-21 | 2019-06-28 | 苏州旭创科技有限公司 | The outside cavity gas laser of tunable wave length |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10104070A (en) * | 1996-09-30 | 1998-04-24 | Oyo Koden Kenkiyuushitsu:Kk | Frequency standard and method for forming selected standard frequency |
| US20020172239A1 (en) * | 1999-07-27 | 2002-11-21 | Mcdonald Mark E. | Tunable external cavity laser |
| US7002696B1 (en) * | 2000-11-03 | 2006-02-21 | Optune Technologies | Band pass interferometer with tuning capabilities |
| US20020054614A1 (en) * | 2000-11-07 | 2002-05-09 | Hong Jin | Wavelength discretely tunable semiconductor laser |
| US20080123104A1 (en) * | 2006-11-27 | 2008-05-29 | Roctest Ltee | High selectivity band-pass interferometer with tuning capabilities |
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| CN109950785A (en) * | 2017-12-21 | 2019-06-28 | 苏州旭创科技有限公司 | The outside cavity gas laser of tunable wave length |
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