CN116222361A - Implementation method, structure and working method of absolute type linear displacement sensor - Google Patents
Implementation method, structure and working method of absolute type linear displacement sensor Download PDFInfo
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Abstract
The invention discloses an implementation method, a structure and a working method of an absolute linear displacement sensor, wherein the implementation method combines two incremental linear displacement sensors, and the periods of the two incremental linear displacement sensors are prime numbers, so that absolute displacement measurement is realized by utilizing the unique corresponding relation of the traveling wave phase relation and the space displacement respectively output by the two incremental linear displacement sensors; the two incremental linear displacement sensors share one induction signal interface, and the working states of the two incremental linear displacement sensors are controlled according to the requirements, so that the power consumption is reduced and the hardware system is simplified under the condition of meeting the use function. The design is simple in structure, low in manufacturing requirement and manufacturing cost, capable of realizing absolute displacement measurement, free of accumulated measurement errors, compact/miniaturized in product, suitable for installation in more narrow spaces and capable of reducing power consumption.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to an implementation method, a structure and a working method of an absolute linear displacement sensor.
Background
The displacement sensor is also called a linear sensor and is an induction device, and is used for converting a measured physical quantity into electric quantity, and the displacement sensor can be divided into a linear displacement sensor and an angular displacement sensor according to a motion mode, and the distance of linear displacement and the angle of circumferential displacement are respectively converted into electric signals. Currently, the displacement sensors on the market are mainly divided into absolute displacement sensors and incremental displacement sensors according to the measurement mode. Compared with an absolute displacement sensor, the incremental displacement sensor has the advantages of being capable of realizing absolute displacement measurement, free of accumulated measurement errors and the like, and is widely applied. There are various types of sensors currently available for realizing absolute displacement measurement, and the wide application of the sensors includes capacitive absolute displacement sensors and grating scale absolute displacement sensors.
The capacitive absolute displacement sensor generally has the advantages of strong anti-interference capability, simple structure, low manufacturing cost and the like, but because the capacitive absolute displacement sensor uses an electric field as a sensing medium, the capacitive absolute displacement sensor is influenced by an edge effect and parasitic capacitance, so that the further improvement of the measurement precision of the sensor is limited. The absolute displacement sensor of the grating ruler has the advantages of being long in service life, high in anti-interference capability, high in resolution and the like, is widely used as a positioning sensor to be applied to the high-precision measurement fields of high-performance numerical control machine tools and the like, but the measurement precision of the grating is dependent on the grating spacing, the measurement range is dependent on the manufacturing size of the grating ruler, and the higher the precision of the grating ruler is, the more precise the requirements of a carved grating line are. With the increase of the size, the manufacturing difficulty increases, and in addition, the absolute grating ruler also needs to combine a more complex coding technology and a graphic processing technology for decoding to realize absolute positioning. Therefore, it is highly desirable to provide a method for realizing an absolute linear displacement sensor, which has low manufacturing difficulty and manufacturing cost, and also has high measurement accuracy, and can realize absolute displacement measurement.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to solve the technical problems that: how to provide an absolute linear displacement sensor which has simple structure, low manufacturing requirement and manufacturing cost, low power consumption, and can realize absolute displacement measurement without accumulated measurement error.
In order to solve the technical problems, the invention adopts the following technical scheme:
the method combines two incremental linear displacement sensors, and the periods of the two incremental linear displacement sensors are prime numbers, so that the absolute displacement measurement is realized by utilizing the unique corresponding relation between the traveling wave phase relation and the spatial displacement output by the two incremental linear displacement sensors respectively.
The working principle of the invention is as follows: the scheme utilizes two incremental linear displacement sensors with the periods being prime numbers to respectively output traveling wave signals U O1 And U O2 Then, the corresponding phase values are obtained respectively through phase processing
And->
Determining an absolute cycle number by the phase relation of the two incremental linear displacement sensors, wherein the absolute cycle number refers to the cycle number based on a set zero point; then determining the displacement in the absolute cycle number according to the single incremental linear displacement sensor; and finally, integrating the absolute cycle number and the displacement in the absolute cycle number to realize the absolute displacement measurement of the absolute linear displacement sensor.
In summary, the scheme adopts two incremental linear displacement sensors to realize absolute displacement measurement, and has the advantages of simple structure, low manufacturing requirement and low manufacturing cost. And secondly, respectively taking two incremental linear displacement sensors with measurement cycle numbers being prime numbers as components of the absolute linear displacement sensor, and calculating to obtain an absolute displacement value by using an absolute positioning method by utilizing the phase relation of traveling wave signals output by the two incremental linear displacement sensors. Meanwhile, the two incremental linear displacement sensors adopt a time-division working method, so that high-precision displacement measurement can be ensured, and meanwhile, the power consumption of the whole sensor circuit is effectively reduced. In addition, the two incremental linear displacement sensors are combined and share one group of induction signal processing interfaces, so that one group of induction signal processing devices can be reduced, and the cost and the circuit space are reduced.
An absolute linear displacement sensor structure comprises an excitation module, a first incremental linear displacement sensor, a second incremental linear displacement sensor, a switching circuit and an induction signal processing module, wherein the first incremental linear displacement sensor comprises a first movable rule and a first fixed rule which are arranged in parallel and are opposite to each other, a gap is reserved between the first movable rule and the first fixed rule, the first movable rule comprises a first movable rule base body and a first induction electrode assembly arranged on the first movable rule base body, the first fixed rule comprises a first fixed rule base body, and a first excitation electrode assembly which is arranged on the first fixed rule base body and has N measuring periods, signal coupling is carried out between the first excitation electrode assembly and the first induction electrode assembly, the second incremental linear displacement sensor comprises a second movable rule and a second fixed rule which are arranged in parallel and opposite to each other, a gap is reserved between the second movable rule and the second fixed rule, the second movable rule comprises a second movable rule base body, and a first induction electrode assembly arranged on the first movable rule base body, a second induction electrode assembly is arranged on the second movable rule base body, the second excitation electrode assembly is connected with the second induction electrode assembly and the first induction electrode assembly in a shared mode, the first excitation electrode assembly is connected with the first induction electrode assembly and the first induction electrode assembly in a signal processing mode, the first excitation electrode assembly is connected with the second induction electrode assembly in a signal processing mode, the first excitation electrode assembly is connected with the first induction assembly in a signal processing mode, the signal processing module is connected with the first excitation electrode assembly in a signal processing mode, and the first excitation module is connected with the first excitation module in a signal input mode, signal is respectively, and realizing absolute displacement measurement.
In this way, when the absolute linear displacement sensor structure of the invention works, the excitation module inputs sinusoidal excitation signals to the second excitation electrode assembly (or the first excitation electrode assembly) of the second incremental linear displacement sensor (or the first incremental linear displacement sensor), and the second induction electrode assembly (or the first induction electrode assembly) is directly coupled with the second excitation electrode assembly (or the first excitation electrode assembly) in a signal way, so that the second induction electrode assembly (or the first induction electrode assembly) generates second induction signals (or first induction signals) and inputs the second induction signals to the induction signal processing module; the excitation module inputs sinusoidal excitation signals to a first excitation electrode assembly (or a second excitation electrode assembly) of the first incremental linear displacement sensor (or the second incremental linear displacement sensor), and the first induction electrode assembly (or the second induction electrode assembly) generates first induction signals (or second induction signals) due to the electric field coupling effect and inputs the first induction signals (or the second induction signals) to the induction signal processing module; the sensing signal processing module processes the first sensing signal and the second sensing signal to obtain absolute displacement data, so that the purpose of absolute displacement measurement is achieved. The sensing electrode assemblies of the two incremental linear displacement sensors share one group of sensing signal processing interfaces, so that one group of sensing signal processing devices can be reduced, and the cost and the circuit space are reduced.
Preferably, the first excitation electrode assembly includes a plurality of first excitation electrodes having a width W 1 The interval distance between two adjacent first excitation electrodes is I 1 And four adjacent first excitation electrodes sequentially form a first measurement period, the length W of the first measurement period T1 The calculation formula is as follows: w (W) T1 ＝4*W 1 +4*I 1 The total length of the first excitation electrode component of the first incremental linear displacement sensor is L 1 And L is 1 ＝W T1 *N＝(4*W 1 +4*I 1 )*N；
The second excitation electrode assembly comprises a plurality of second excitation electrodes, the width of the second excitation electrodes is W 2 Distance between two adjacent second excitation electrodesIs I 2 And four adjacent second excitation electrodes sequentially form a second measurement period, the length W of the second measurement period T2 The calculation formula is as follows: w (W) T2 ＝4*W 2 +4*I 2 The total length of the second excitation electrode component of the second incremental linear displacement sensor is L 2 And L is 2 ＝W T2 *M＝(4*W 2 +4*I 2 )*M；
And L is 1 ＝L 2 ；
The first sensing electrode assembly comprises two double-sine-shaped first sensing electrodes, and the widths of the two double-sine-shaped first sensing electrodes are W T1 2, the heights are H 1 And the interval distance between the central lines of the two double sine-shaped first induction electrodes is W T1 /2；
The second induction electrode assembly comprises two double-sine-shaped second induction electrodes, and the widths of the two double-sine-shaped second induction electrodes are W T2 2, the heights are H 2 And the interval distance between the central lines of the two double sine-shaped second induction electrodes is W T2 /2。
Preferably, the two double-sinusoidal first sensing electrodes form a differential structure, and the sensing signals output by the two double-sinusoidal first sensing electrodes differ by pi in phase, so that the sensing signals output by the two double-sinusoidal first sensing electrodes are differenced to obtain an output signal U O1 And U is as follows O1 The calculation formula is as follows:
wherein: m is M 1 The traveling wave signal amplitude value of the first incremental linear displacement sensor;
x 1 the relative displacement value of the first movable ruler and the first fixed ruler in a single measuring period is used for the first incremental linear displacement sensor;
W T1 the length of a first measurement period of the first incremental linear displacement sensor;
omega is the angular frequency of the excitation signal sent by the excitation module;
t is time.
Therefore, the differential structure can double the strength of the sensing signal while eliminating common-mode interference, so that the signal-to-noise ratio is improved.
Preferably, the two double-sinusoidal second sensing electrodes form a differential structure, and the sensing signals output by the two double-sinusoidal second sensing electrodes differ by pi in phase, so that the sensing signals output by the two double-sinusoidal second sensing electrodes are differenced to obtain an output signal U O2 And U is as follows O2 The calculation formula is as follows:
wherein: m is M 2 The traveling wave signal amplitude value of the second incremental linear displacement sensor;
x 2 the relative displacement value of the second movable ruler and the second fixed ruler in a single measuring period is used for the second incremental linear displacement sensor;
W T2 the length of a second measurement period for a second incremental linear displacement sensor;
omega is the angular frequency of the excitation signal sent by the excitation module;
t is time.
The working method of the absolute linear displacement sensor adopts the absolute linear displacement sensor structure and comprises the following steps:
step 1), the excitation module inputs a sinusoidal excitation signal to a second excitation electrode assembly of the second incremental linear displacement sensor, the second induction electrode assembly is directly coupled with the second excitation electrode assembly in a signal manner, and the second induction electrode assembly generates a second induction signal and inputs the second induction signal to the induction signal processing module;
step 2) the excitation module inputs a sinusoidal excitation signal to a first excitation electrode assembly of the first incremental linear displacement sensor through the switching circuit, the first induction electrode assembly is directly coupled with the first excitation electrode assembly in a signal manner, and the first induction electrode assembly generates a first induction signal and inputs the first induction signal to the induction signal processing module;
And 3) the induction signal processing module processes the first induction signal and the second induction signal to obtain absolute displacement data.
Preferably, the excitation module inputs sinusoidal excitation signals to the first incremental linear displacement sensor and the second incremental linear displacement sensor in a mode of applying excitation in a time-sharing mode;
in the step 1), when the excitation module inputs a sinusoidal excitation signal to a second excitation electrode assembly of the second incremental linear displacement sensor, the first incremental linear displacement sensor does not work;
in the step 2), when the excitation module inputs a sinusoidal excitation signal to the first excitation electrode assembly of the first incremental linear displacement sensor through the switching circuit, the second incremental linear displacement sensor does not work.
Preferably, the first excitation electrode assembly includes a plurality of first excitation electrodes, adjacent four of the first excitation electrodes sequentially form a first measurement period, and the 4 n-th 1 +1 first excitation electrode passing A 1 Phase excitation signal lines are connected in a group to form A 1 Excitation phase, 4n 1 +2 first excitation electrode passing through B 1 Phase excitation signal lines are connected in a group to form B 1 Excitation phase, 4n 1 +3 first excitation electrode passing through C 1 Phase excitation signal lines are connected in a group to form C 1 Excitation phase, 4n 1 +4 first excitation electrode passing through D 1 Phase excitation signal lines are connected in a group to form D 1 Excitation phase, where n 1 Sequentially taking all integers from 0 to N;
the second excitation electrode assembly comprises a plurality of second excitation electrodes, and four adjacent second excitation electrodes sequentially form a second measurement period; and 4n 2 +1 second excitation electrode passing A 2 Phase excitation signal lines are connected in a group to form A 2 ExcitationPhase, 4n 2 +2 second excitation electrode passing through B 2 Phase excitation signal lines are connected in a group to form B 2 Excitation phase, 4n 2 +3 second excitation electrode through C 2 Phase excitation signal lines are connected in a group to form C 2 Excitation phase, 4n 2 +4 second excitation electrode passing through D 2 Phase excitation signal lines are connected in a group to form D 2 Excitation phase, where n 2 Sequentially taking all integers from 0 to M;
in the step 1), the excitation module inputs 4 sinusoidal excitation signals with pi/2 phase difference to a second excitation electrode assembly of the second incremental linear displacement sensor, and A 1 The excitation phase inputs a sinusoidal excitation signal U S+ ，B 1 The excitation phase inputs a sinusoidal excitation signal U C+ ，C 1 The excitation phase inputs a sinusoidal excitation signal U S- ，D 1 The excitation phase inputs a sinusoidal excitation signal U C- And U is as follows S+ ＝Esinωt，U C+ ＝Ecosωt，U S- ＝-Esinωt，U C- ＝-Ecosωt；
In the step 2), the excitation module inputs 4 sinusoidal excitation signals with pi/2 phase difference to the first excitation electrode assembly of the first incremental linear displacement sensor, and A 2 The excitation phase inputs a sinusoidal excitation signal U S+ ，B 2 The excitation phase inputs a sinusoidal excitation signal U C+ ，C 2 The excitation phase inputs a sinusoidal excitation signal U S- ，D 2 The excitation phase inputs a sinusoidal excitation signal U C- 。
Preferably, in step 3), when the excitation module inputs a sinusoidal excitation signal to the second excitation electrode assembly of the second incremental linear displacement sensor and the first incremental linear displacement sensor is not operating, the induction signal processing module processes the induction signal of the second incremental linear displacement sensor to obtain and store a second phase value
When the excitation module is used for exciting the first increment type linear displacement sensor through a switching circuitWhen the electrode assembly inputs a sine excitation signal and the second incremental linear displacement sensor does not work, the induction signal processing module processes the induction signal of the first incremental linear displacement sensor to obtain and store a first phase value- >
The induction signal processing module is according to the second phase value +.>
And a first phase value->
And calculating to obtain an absolute displacement value.
Compared with the prior art, the invention has the following advantages:
1. the invention combines the two incremental linear displacement sensors, adopts the mode that the cycle numbers are prime numbers, obtains the absolute cycle number through the phase relation of the two incremental linear displacement sensors, and then obtains the displacement in the absolute cycle number according to the single incremental linear displacement sensor, thereby realizing absolute displacement measurement by utilizing the unique corresponding relation between the traveling wave phase relation and the space displacement output by the two incremental linear displacement sensors. Therefore, the linear displacement sensor can be suitable for more occasions, and the universality is greatly improved.
2. According to the invention, the first induction electrode assembly of the first incremental linear displacement sensor and the second induction electrode assembly of the second incremental linear displacement sensor share an induction signal processing interface and are connected with the same induction signal processing module, so that a group of induction signal processing modules is reduced, the circuit space is reduced, and the installation of more narrow spaces is adapted. Meanwhile, the first incremental linear displacement sensor and the second incremental linear displacement sensor work in a time-sharing mode, so that the second incremental linear displacement sensor can be prevented from being excited in real time, and power consumption is reduced.
3. In the invention, the first incremental linear displacement sensor adopts a correlation signal transmission mode, namely the first excitation electrode assembly and the first induction electrode assembly are used for directly coupling signals, and the second incremental linear displacement sensor also adopts a correlation signal transmission mode, namely the second excitation electrode assembly and the second induction electrode assembly are used for directly coupling signals, so that the signals are not reflected by an additional sensing structure, the coupling signal strength can be effectively improved, the signal to noise ratio is improved, and the anti-interference capability is enhanced.
4. In the invention, the two double sine-shaped first induction electrodes of the first incremental linear displacement sensor form a differential structure, and the two double sine-shaped second induction electrodes of the second incremental linear displacement sensor also form a differential structure, so that the differential structure can double the strength of a sensing signal while eliminating common-mode interference, thereby improving the signal-to-noise ratio.
5. According to the invention, the first incremental linear displacement sensor and the second incremental linear displacement sensor adopt a positioning method of mutual quality of the cycle numbers, so that under the condition that the cycle number N of the first incremental linear displacement sensor is unchanged, the cycle number M of the second incremental linear displacement sensor can be properly reduced as long as the cycle number N of the first incremental linear displacement sensor and the cycle number M of the second incremental linear displacement sensor are prime numbers, and the positioning error limit is increased, so that the sensor can more easily realize absolute positioning while keeping high precision.
Drawings
FIG. 1 is a schematic diagram showing the connection of an absolute linear displacement sensor structure according to the present invention;
FIG. 2 is a schematic diagram of a first incremental linear displacement sensor in the structure of an absolute linear displacement sensor according to the present invention;
FIG. 3 is a schematic diagram of a second incremental linear displacement sensor in the structure of the absolute linear displacement sensor according to the present invention;
fig. 4 is a schematic diagram of the structure of the absolute linear displacement sensor of the present invention.
Reference numerals illustrate: a first excitation electrode 1, a first induction electrode 2, a second excitation electrode 3, and a second induction electrode 4.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without creative efforts, based on the described embodiments of the present invention fall within the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs.
The terms "first," "second," and the like in the description and in the claims, are not used for any order, quantity, or importance, but are used for distinguishing between different elements. Also, unless the context clearly indicates otherwise, singular forms "a," "an," or "the" and similar terms do not denote a limitation of quantity, but rather denote the presence of at least one. The terms "comprises," "comprising," or the like are intended to cover a feature, integer, step, operation, element, and/or component recited as being present in the element or article that "comprises" or "comprising" does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. "up", "down", "left", "right" and the like are used only to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed accordingly.
First,: in this embodiment, an implementation method of an absolute linear displacement sensor is provided, two incremental linear displacement sensors are combined, and the number of cycles of the two incremental linear displacement sensors is prime (two non-zero natural numbers with a common factor of only 1 are prime), so that absolute displacement measurement is implemented by using a traveling wave phase relationship and a spatial displacement unique corresponding relationship which are respectively output by the two incremental linear displacement sensors.
The working principle of the invention is as follows: the scheme utilizes two incremental linear displacement sensors with the periods being prime numbers to respectively output traveling wave signals U O1 And U O2 Then, the corresponding phase values are obtained respectively through phase processing
And->
Determining an absolute cycle number by the phase relation of the two incremental linear displacement sensors, wherein the absolute cycle number refers to the cycle number based on a set zero point; then determining the displacement in the absolute cycle number according to the single incremental linear displacement sensor; and finally, integrating the absolute cycle number and the displacement in the absolute cycle number to realize the absolute displacement measurement of the absolute linear displacement sensor.
In summary, the scheme adopts two incremental linear displacement sensors to realize absolute displacement measurement, and has the advantages of simple structure, low manufacturing requirement and low manufacturing cost. And secondly, respectively taking two incremental linear displacement sensors with measurement cycle numbers being prime numbers as components of the absolute linear displacement sensor, and calculating to obtain an absolute displacement value by using an absolute positioning method by utilizing the phase relation of traveling wave signals output by the two incremental linear displacement sensors. Meanwhile, the two incremental linear displacement sensors adopt a time-division working method, so that high-precision displacement measurement can be ensured, and meanwhile, the power consumption of the whole sensor circuit is effectively reduced. In addition, the two incremental linear displacement sensors are combined and share one group of induction signal processing interfaces, so that one group of induction signal processing devices can be reduced, and the cost and the circuit space are reduced.
In addition, in this embodiment, an absolute linear displacement sensor structure is further provided, as shown in fig. 1, which includes an excitation module, a first incremental linear displacement sensor, a second incremental linear displacement sensor, a switching circuit, and an inductive signal processing module, as shown in fig. 2, the first incremental linear displacement sensor includes a first movable rule and a first fixed rule which are disposed in parallel and opposite to each other, a gap d is formed between the first movable rule and the first fixed rule, the first movable rule includes a first movable rule base, and a first inductive electrode assembly disposed on the first movable rule base, the first fixed rule includes a first fixed rule base, and a first excitation electrode assembly disposed on the first fixed rule base for N measurement periods, signal coupling is performed between the first excitation electrode assembly and the first inductive electrode assembly, as shown in fig. 3, the second incremental linear displacement sensor comprises a second movable rule and a second fixed rule which are arranged in parallel and opposite to each other, a gap is reserved between the second movable rule and the second fixed rule, the second movable rule comprises a second movable rule base body and a second induction electrode assembly arranged on the second movable rule base body, the second fixed rule comprises a second fixed rule base body and a second excitation electrode assembly arranged on the second fixed rule base body for M measuring periods, signal coupling is carried out between the second excitation electrode assembly and the second induction electrode assembly, N and M are prime numbers, the first fixed rule and the second fixed rule can be positioned on the same base body or can be positioned on different base bodies, the first movable rule and the second movable rule can be positioned on the same base body or can be positioned on different base bodies, the excitation module respectively inputs excitation signals to the first excitation electrode assembly and the second excitation electrode assembly through a switching circuit, the first induction electrode assembly and the second induction electrode assembly share a group of induction signal processing interfaces and are connected with the induction signal processing module, and the induction signal processing module is used for receiving induction signals from the first induction electrode assembly and the second induction electrode assembly so as to obtain absolute displacement data according to the received induction signals and realize absolute displacement measurement.
In this way, when the absolute linear displacement sensor structure of the invention works, the excitation module firstly inputs sinusoidal excitation signals to the second excitation electrode assembly (the first excitation electrode assembly) of the second incremental linear displacement sensor (the first incremental linear displacement sensor), and the second induction electrode assembly (the first induction electrode assembly) and the second excitation electrode assembly (the first excitation electrode assembly) are directly coupled with each other in a signal way, so that the second induction electrode assembly (the first induction electrode assembly) generates second induction signals (the first induction signals) and inputs the second induction signals to the induction signal processing module; the excitation module inputs sinusoidal excitation signals to a first excitation electrode assembly (a second excitation electrode assembly) of a first incremental linear displacement sensor (a second incremental linear displacement sensor), and a first induction signal (a second induction signal) is generated by the first induction electrode assembly (the second induction electrode assembly) due to the electric field coupling effect and is input to the induction signal processing module; the sensing signal processing module processes the first sensing signal and the second sensing signal to obtain absolute displacement data, so that the purpose of absolute displacement measurement is achieved.
As also shown in fig. 2, in the present embodiment, the first excitation electrode assembly includes a plurality of first excitation electrodes 1, and the first excitation electrodes 1 have a width W 1 The distance between two adjacent first excitation electrodes 1 is I 1 And four adjacent first excitation electrodes 1 sequentially form a first measurement period, the length W of the first measurement period T1 The calculation formula is as follows: w (W) T1 ＝4*W 1 +4*I 1 The method comprises the steps of carrying out a first treatment on the surface of the The total length of the first excitation electrode component of the first incremental linear displacement sensor is L 1 And L is 1 ＝W T1 *N＝(4*W 1 +4*I 1 )*N；
The first sensing electrode assembly comprises two double-sine-shaped first sensing electrodes 2, and the widths of the two double-sine-shaped first sensing electrodes 2 are W T1 2, the heights are H 1 And the distance between the central lines of the two double sine-shaped first induction electrodes 2 is W T1 /2；
As also shown in fig. 3, the second excitation electrode assembly includes a plurality of second excitation electrodes 3, the second excitation electrodes 3 having a width W 2 The distance between two adjacent second excitation electrodes 3 is I 2 And four adjacent second excitation electrodes 3 sequentially form a second measurement period, the length W of the second measurement period T2 The calculation formula is as follows: w (W) T2 ＝4*W 2 +4*I 2 The method comprises the steps of carrying out a first treatment on the surface of the The total length of the second excitation electrode component of the second incremental linear displacement sensor is L 2 And L is 2 ＝W T2 *M＝(4*W 2 +4*I 2 ) M; and L is 1 ＝L 2 ；
The second sensing electrode assembly comprises two double sine-shaped second sensing electrodes 4, and the widths of the two double sine-shaped second sensing electrodes 4 are W T2 2, the heights are H 2 And the distance between the central lines of the two double sine-shaped second induction electrodes 4 is W T2 /2。
In the present embodiment, the two double-sinusoidal first sensing electrodes 2 form a differential structure, and the sensing signals outputted from the two double-sinusoidal first sensing electrodes 2 differ by pi in phase, if the interference E caused by external factors and the interference E caused by inconsistent potential intensities generated by the first excitation electrodes 1 at different positions are considered S (x 1 ) sin ωt and E C (x 1 ) cos ωt, and the output signals of the two first sensing electrodes 2 are U respectively 01+ And U O1- Then:
the introduction of such disturbances can lead or lag the phase of the sensor output signal, thereby creating a large intra-period error. In order to solve the problem, a differential induction electrode structure is proposed, i.e. a first induction electrode 2 is added on the basis of the original structure, and the spatial positions of the two first induction electrodes 2 are different by W T1 And/2, the phase difference pi of the output sensing signals, the sensing signals U output by the two double sine-shaped first sensing electrodes 2 01+ And U O1- Obtaining an output signal U by taking the difference O1 And U is as follows O1 The calculation formula is as follows:
wherein: m is M 1 The traveling wave signal amplitude value of the first incremental linear displacement sensor;
x 1 the relative displacement value of the first movable ruler and the first fixed ruler in a single measuring period is used for the first incremental linear displacement sensor;
W T1 The length of a first measurement period of the first incremental linear displacement sensor;
omega is the angular frequency of the excitation signal sent by the excitation module;
t is time.
From the above formula, it can be known that the differential structure formed by the two double sine-shaped first sensing electrodes 2 can double the strength of the sensing signal while eliminating common-mode interference, and improve the signal-to-noise ratio.
In the present embodiment, the two double sinusoidal second sensing electrodes 4 form a differential structure, and the sensing signals outputted from the two double sinusoidal second sensing electrodes 4 are out of phase by pi, if the interference E caused by external factors and the interference E caused by inconsistent potential intensities generated by the second excitation electrodes 3 at different positions are considered S (x 2 ) sin ωt and E C (x 2 ) cos ωt, and the output signals of the two second sensing electrodes 4 are U respectively 02+ And U O2- Then:
the introduction of such disturbances can lead or lag the phase of the sensor output signal, thereby creating a large intra-period error. In order to solve the problem, a differential induction electrode structure is proposed, that is, a second induction electrode 4 is added on the basis of the original structure, and the spatial positions of the two second induction electrodes 4 are different by W T2 2, the output induction signalThe number phase is pi different, the two double sine-shaped second sensing electrodes 4 output sensing signals U 02+ And U O2- Obtaining an output signal U by taking the difference O2 And U is as follows O2 The calculation formula is as follows:
wherein: m is M 2 The traveling wave signal amplitude value of the second incremental linear displacement sensor;
x 2 the relative displacement value of the second movable ruler and the second fixed ruler in a single measuring period is used for the second incremental linear displacement sensor;
W T2 the length of a second measurement period for a second incremental linear displacement sensor;
omega is the angular frequency of the excitation signal sent by the excitation module;
t is time.
Therefore, the differential structure can double the strength of the sensing signal while eliminating common-mode interference, so that the signal-to-noise ratio is improved.
Finally, the embodiment also provides a working method of the absolute linear displacement sensor, which adopts the absolute linear displacement sensor structure and comprises the following steps:
step 1), an excitation module inputs sinusoidal excitation signals to a second excitation electrode assembly of a second incremental linear displacement sensor, the second induction electrode assembly is directly coupled with the second excitation electrode assembly in a signal way, and the second induction electrode assembly generates second induction signals and inputs the second induction signals to an induction signal processing module;
step 2) an excitation module inputs sinusoidal excitation signals to a first excitation electrode assembly of a first incremental linear displacement sensor through a switching circuit, the first induction electrode assembly is directly coupled with the first excitation electrode assembly in a signal way, and the first induction electrode assembly generates first induction signals and inputs the first induction signals to an induction signal processing module;
And 3) the induction signal processing module processes the first induction signal and the second induction signal to obtain absolute displacement data. In a specific operation, step 1) may input a sinusoidal excitation signal to the first excitation electrode assembly of the first incremental linear displacement sensor, and step 2) may input a sinusoidal excitation signal to the second excitation electrode assembly of the second incremental linear displacement sensor. The first and second in this embodiment are only used to distinguish between two incremental linear displacement sensors, and are not specific references to an incremental linear displacement sensor.
In the embodiment, the excitation module inputs sinusoidal excitation signals to the first incremental linear displacement sensor and the second incremental linear displacement sensor in a mode of applying excitation in a time-division manner;
in the step 1), when the excitation module inputs a sinusoidal excitation signal to a second excitation electrode assembly of a second incremental linear displacement sensor, the first incremental linear displacement sensor does not work;
in the step 2), when the excitation module inputs a sinusoidal excitation signal to the first excitation electrode assembly of the first incremental linear displacement sensor through the switching circuit, the second incremental linear displacement sensor does not work.
In the present embodiment, the first excitation electrode assembly includes a plurality of first excitation electrodes 1, adjacent four first excitation electrodes 1 sequentially form a first measurement period, and the 4 n-th 1 The +1 first excitation electrode 1 passes through A 1 Phase excitation signal lines are connected in a group to form A 1 Excitation phase, 4n 1 +2 first excitation electrode 1 passing through B 1 Phase excitation signal lines are connected in a group to form B 1 Excitation phase, 4n 1 +3 first excitation electrode 1 passing through C 1 Phase excitation signal lines are connected in a group to form C 1 Excitation phase, 4n 1 +4 first excitation electrode 1 passes through D 1 Phase excitation signal lines are connected in a group to form D 1 Excitation phase, where n 1 Sequentially taking all integers from 0 to N;
the second excitation electrode assembly comprises a plurality of second excitation electrodes 3, and four adjacent second excitation electrodes 3 sequentially form a second measurement period; and 4n 2 The +1 second excitation electrode 3 passes through A 2 Phase excitation signal lines are connected in a group to form A 2 Excitation phase, 4n 2 +2 second excitation electrode 3 passing through B 2 Phase excitation signal lines are connected in a group to form B 2 Excitation phase, 4n 2 +3 second excitation electrode 3 passing through C 2 Phase excitation signal lines are connected in a group to form C 2 Excitation phase, 4n 2 +4 second excitation electrode 3 through D 2 Phase excitation signal lines are connected in a group to form D 2 Excitation phase, where n 2 Sequentially taking all integers from 0 to M;
in the step 1), the excitation module inputs 4 sinusoidal excitation signals with pi/2 phase difference to the second excitation electrode assembly of the second incremental linear displacement sensor, and A 1 The excitation phase inputs a sinusoidal excitation signal U S+ ，B 1 The excitation phase inputs a sinusoidal excitation signal U C+ ，C 1 The excitation phase inputs a sinusoidal excitation signal U S- ，D 1 The excitation phase inputs a sinusoidal excitation signal U C- And U is as follows S+ ＝Esinωt，U C+ ＝Ecosωt，U S- ＝-Esinωt，U C- ＝-Ecosωt；
In the step 2), the excitation module inputs 4 sinusoidal excitation signals with pi/2 phase difference to the first excitation electrode assembly of the first incremental linear displacement sensor, and A 2 The excitation phase inputs a sinusoidal excitation signal U S+ ，B 2 The excitation phase inputs a sinusoidal excitation signal U C+ ，C 2 The excitation phase inputs a sinusoidal excitation signal U S- ，D 2 The excitation phase inputs a sinusoidal excitation signal U C- 。
In the embodiment, in step 3), when the excitation module inputs a sinusoidal excitation signal to the second excitation electrode assembly of the second incremental linear displacement sensor and the first incremental linear displacement sensor is not in operation, the induction signal processing module processes the induction signal of the second incremental linear displacement sensor to obtain and store a second phase value
When the excitation module passes through the switching circuit to the first incremental linear displacement sensor When the sinusoidal excitation signal is input to the first excitation electrode assembly and the second incremental linear displacement sensor does not work, the induction signal processing module processes the induction signal of the first incremental linear displacement sensor to obtain and store a first phase value->
The induction signal processing module is used for processing the induction signal according to the second phase value +.>
And a first phase value->
And calculating to obtain an absolute displacement value.
The specific working principle of the scheme is that, as shown in figure 4, the output signals of the first incremental linear displacement sensor and the second incremental linear displacement sensor (the sensor in figure 4) are both input into an induction signal processing module for processing, the induction signal processing module comprises a subtracting circuit, a filtering shaping circuit and an FPGA signal processing system, and the induction signals of the first induction electrode assembly and the second induction electrode assembly are transmitted to Q through leads 1 And Q 2 The interface is then input to a subtracting circuit of the induction signal processing module, and the subtracting circuit obtains output signals U of the first induction electrode assembly respectively O1 And an output signal U of the second sensing electrode assembly O2 And U is combined with O1 And U O2 Outputting to a filter shaping circuit, converting the sinusoidal signal into a square wave signal by the filter shaping circuit by using a zero-crossing comparator, and outputting to an FPGA signal processing system, wherein the FPGA signal processing system comprises phase measurement, and the phase measurement is used for obtaining a first phase value according to the square wave signal 
And a second phase value +.>
Then the time difference of each square wave signal is measured by using a high-frequency clock pulse interpolation methodAnd finally, accurately obtaining an absolute displacement value through unit conversion and outputting the absolute displacement value so as to realize measurement of the absolute displacement value.
The invention combines the two incremental linear displacement sensors, adopts the mode that the cycle numbers are prime numbers, obtains the absolute cycle number through the phase relation of the two incremental linear displacement sensors, and then obtains the displacement in the absolute cycle number according to the single incremental linear displacement sensor, thereby realizing absolute displacement measurement by utilizing the unique corresponding relation between the traveling wave phase relation and the space displacement output by the two incremental linear displacement sensors. Therefore, the linear displacement sensor can be suitable for more occasions, and the universality is greatly improved. In the invention, the first induction electrode component of the first incremental linear displacement sensor and the second induction electrode component of the second incremental linear displacement sensor share an induction signal processing interface and are connected with the same induction signal processing module, thereby reducing a group of induction signal processing modules and further reducing the circuit space. Meanwhile, the first incremental linear displacement sensor and the second incremental linear displacement sensor work in a time-sharing mode, so that the second incremental linear displacement sensor can be prevented from being excited in real time, and power consumption is reduced. In the invention, the first incremental linear displacement sensor adopts a correlation signal transmission mode, namely the first excitation electrode assembly and the first induction electrode assembly are used for directly coupling signals, and the second incremental linear displacement sensor also adopts a correlation signal transmission mode, namely the second excitation electrode assembly and the second induction electrode assembly are used for directly coupling signals, so that the signals are not reflected by an additional sensing structure, the coupling signal strength can be effectively improved, the signal to noise ratio is improved, and the anti-interference capability is enhanced. In the invention, the two double sine-shaped first induction electrodes 2 of the first incremental linear displacement sensor form a differential structure, the two double sine-shaped second induction electrodes 4 of the second incremental linear displacement sensor also form a differential structure, and the differential structure can double the strength of a sensing signal while eliminating common-mode interference, so that the signal-to-noise ratio is improved. According to the invention, the first incremental linear displacement sensor and the second incremental linear displacement sensor adopt a positioning method of mutual quality of the cycle numbers, so that under the condition that the cycle number N of the first incremental linear displacement sensor is unchanged, the cycle number M of the second incremental linear displacement sensor can be properly reduced as long as the cycle number N of the first incremental linear displacement sensor and the cycle number M of the second incremental linear displacement sensor are prime numbers, and the positioning error limit is increased, so that the sensor can more easily realize absolute positioning while keeping high precision.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the technical solution, and those skilled in the art should understand that modifications and equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the present invention, and all such modifications and equivalents are included in the scope of the claims.
Claims (10)
1. The method is characterized in that two incremental linear displacement sensors are combined, the periods of the two incremental linear displacement sensors are prime numbers, and absolute displacement measurement is achieved by utilizing the traveling wave phase relation and the space displacement unique corresponding relation which are respectively output by the two incremental linear displacement sensors.
2. The absolute linear displacement sensor structure is characterized by comprising an excitation module, a first incremental linear displacement sensor, a second incremental linear displacement sensor, a switching circuit and an induction signal processing module, wherein the first incremental linear displacement sensor comprises a first movable rule and a first fixed rule which are arranged in parallel and opposite to each other, a gap is reserved between the first movable rule and the first fixed rule, the first movable rule comprises a first movable rule base body and a first induction electrode assembly arranged on the first movable rule base body, the first fixed rule comprises a first fixed rule base body and a first excitation electrode assembly arranged on the first fixed rule base body for N measurement periods, signal coupling is carried out between the first excitation electrode assembly and the first induction electrode assembly, the second incremental linear displacement sensor comprises a second movable rule and a second fixed rule which are arranged in parallel and opposite to each other, the second moving rule comprises a second moving rule base body and a second induction electrode assembly arranged on the second moving rule base body, the second moving rule comprises a second fixed rule base body and a second excitation electrode assembly arranged on the second fixed rule base body for M measuring periods, signal coupling is carried out between the second excitation electrode assembly and the second induction electrode assembly, N and M are prime numbers, the excitation module respectively inputs excitation signals to the first excitation electrode assembly and the second excitation electrode assembly through the switching circuit, the first induction electrode assembly and the second induction electrode assembly share a group of induction signal processing interfaces and are connected with the induction signal processing module, and the induction signal processing module obtains absolute displacement data according to the received induction signal and realizes absolute displacement measurement.
3. The absolute linear displacement sensor structure of claim 2, wherein the first excitation electrode assembly comprises a plurality of first excitation electrodes having a width W 1 The interval distance between two adjacent first excitation electrodes is I 1 And four adjacent first excitation electrodes sequentially form a first measurement period, the length W of the first measurement period T1 The calculation formula is as follows: w (W) T1 ＝4*W 1 +4*I 1 The total length of the first excitation electrode component of the first incremental linear displacement sensor is L 1 And L is 1 ＝W T1 *N＝(4*W 1 +4*I 1 )*N；
The second excitation electrode assembly comprises a plurality of second excitation electrodes, the width of the second excitation electrodes is W 2 The interval distance between two adjacent second excitation electrodes is I 2 And four adjacent second excitation electrodes sequentially form a second measurement period, the length W of the second measurement period T2 Calculation formulaThe formula is: w (W) T2 ＝4*W 2 +4*I 2 The total length of the second excitation electrode component of the second incremental linear displacement sensor is L 2 And L is 2 ＝W T2 *M＝(4*W 2 +4*I 2 )*M；
And L is 1 ＝L 2 。
4. An absolute linear displacement sensor structure according to claim 3 in which said first sensing electrode assembly comprises two double sinusoidal first sensing electrodes, both of which have a width W T1 2, the heights are H 1 And the interval distance between the central lines of the two double sine-shaped first induction electrodes is W T1 /2；
The second induction electrode assembly comprises two double-sine-shaped second induction electrodes, and the widths of the two double-sine-shaped second induction electrodes are W T2 2, the heights are H 2 And the interval distance between the central lines of the two double sine-shaped second induction electrodes is W T2 /2。
5. The structure of claim 4, wherein the two double-sinusoidal first sensing electrodes form a differential structure, and the sensing signals outputted from the two double-sinusoidal first sensing electrodes differ by pi, and the sensing signals outputted from the two double-sinusoidal first sensing electrodes are differenced to obtain an output signal U O1 And U is as follows O1 The calculation formula is as follows:
wherein: m is M 1 The traveling wave signal amplitude value of the first incremental linear displacement sensor;
x 1 the relative displacement value of the first movable ruler and the first fixed ruler in a single measuring period is used for the first incremental linear displacement sensor;
W T1 the length of a first measurement period of the first incremental linear displacement sensor;
omega is the angular frequency of the excitation signal sent by the excitation module;
t is time.
6. The structure of claim 4, wherein the two double-sinusoidal second sensing electrodes form a differential structure, and the sensing signals outputted from the two double-sinusoidal second sensing electrodes differ by pi, and the sensing signals outputted from the two double-sinusoidal second sensing electrodes are differenced to obtain an output signal U O2 And U is as follows O2 The calculation formula is as follows:
wherein: m is M 2 The traveling wave signal amplitude value of the second incremental linear displacement sensor;
x 2 the relative displacement value of the second movable ruler and the second fixed ruler in a single measuring period is used for the second incremental linear displacement sensor;
W T2 the length of a second measurement period for a second incremental linear displacement sensor;
omega is the angular frequency of the excitation signal sent by the excitation module;
t is time.
7. An absolute linear displacement sensor working method, characterized in that the absolute linear displacement sensor structure as claimed in claim 2 is adopted, comprising the following steps:
step 1), the excitation module inputs a sinusoidal excitation signal to a second excitation electrode assembly of the second incremental linear displacement sensor, the second induction electrode assembly is directly coupled with the second excitation electrode assembly in a signal manner, and the second induction electrode assembly generates a second induction signal and inputs the second induction signal to the induction signal processing module;
step 2) the excitation module inputs a sinusoidal excitation signal to a first excitation electrode assembly of the first incremental linear displacement sensor through a switching circuit, the first induction electrode assembly is directly coupled with the first excitation electrode assembly in a signal manner, and the first induction electrode assembly generates a first induction signal and inputs the first induction signal to the induction signal processing module;
And 3) the induction signal processing module processes the first induction signal and the second induction signal to obtain absolute displacement data.
8. The method according to claim 7, wherein the excitation module inputs sinusoidal excitation signals to the first and second incremental linear displacement sensors by applying excitation at intervals;
in the step 1), when the excitation module inputs a sinusoidal excitation signal to a second excitation electrode assembly of the second incremental linear displacement sensor, the first incremental linear displacement sensor does not work;
in the step 2), when the excitation module inputs a sinusoidal excitation signal to the first excitation electrode assembly of the first incremental linear displacement sensor through the switching circuit, the second incremental linear displacement sensor does not work.
9. The method of claim 7, wherein the first excitation electrode assembly includes a plurality of first excitation electrodes, adjacent four of the first excitation electrodes sequentially form a first measurement period, and the 4 n-th excitation electrode assembly includes a first excitation electrode assembly 1 +1 first excitation electrode passing A 1 Phase excitation signal lines are connected in a group to form A 1 Excitation phase, 4n 1 +2 first excitation electrode passing through B 1 Phase excitation signal lines are connected in a group to form B 1 Excitation phase, 4n 1 +3 first excitation electrode passing through C 1 Phase excitation signal lines are connected in a group to form C 1 Excitation phase, 4n 1 +4 first excitation electrode passing through D 1 Phase excitation signal lines are connected in a group to form D 1 Excitation phase, where n 1 Sequentially taking all integers from 0 to N;
the second excitation electrode assembly comprises a plurality of second excitation electrodes, and four adjacent second excitation electrodes sequentially form a second measurement period; and 4n 2 +1 second excitation electrode passing A 2 Phase excitation signal lines are connected in a group to form A 2 Excitation phase, 4n 2 +2 second excitation electrode passing through B 2 Phase excitation signal lines are connected in a group to form B 2 Excitation phase, 4n 2 +3 second excitation electrode through C 2 Phase excitation signal lines are connected in a group to form C 2 Excitation phase, 4n 2 +4 second excitation electrode passing through D 2 Phase excitation signal lines are connected in a group to form D 2 Excitation phase, where n 2 Sequentially taking all integers from 0 to M;
in the step 1), the excitation module inputs 4 sinusoidal excitation signals with pi/2 phase difference to a second excitation electrode assembly of the second incremental linear displacement sensor, and A 1 The excitation phase inputs a sinusoidal excitation signal U S+ ，B 1 The excitation phase inputs a sinusoidal excitation signal U C+ ，C 1 The excitation phase inputs a sinusoidal excitation signal U S- ，D 1 The excitation phase inputs a sinusoidal excitation signal U C- And U is as follows S+ ＝Esinωt，U C+ ＝Ecosωt，U S- ＝-Esinωt，U C- ＝-Ecosωt；
In the step 2), the excitation module inputs 4 sinusoidal excitation signals with pi/2 phase difference to the first excitation electrode assembly of the first incremental linear displacement sensor, and A 2 The excitation phase inputs a sinusoidal excitation signal U S+ ，B 2 The excitation phase inputs a sinusoidal excitation signal U C+ ，C 2 The excitation phase inputs a sinusoidal excitation signal U S- ，D 2 The excitation phase inputs a sinusoidal excitation signal U C- 。
10. The method of operating an absolute linear displacement sensor of claim 7, wherein the steps ofIn step 3), when the excitation module inputs a sinusoidal excitation signal to the second excitation electrode assembly of the second incremental linear displacement sensor and the first incremental linear displacement sensor is not operating, the induction signal processing module processes the induction signal of the second incremental linear displacement sensor to obtain and store a second phase value
When the excitation module inputs a sinusoidal excitation signal to a first excitation electrode assembly of the first incremental linear displacement sensor through a switching circuit and the second incremental linear displacement sensor does not work, the induction signal processing module processes the induction signal of the first incremental linear displacement sensor to obtain and store a first phase value- >
The induction signal processing module is according to the second phase value +.>
And a first phase value->
And calculating to obtain an absolute displacement value. />
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