CN116221159B - Gas impact testing device - Google Patents
Gas impact testing device Download PDFInfo
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- CN116221159B CN116221159B CN202211695045.6A CN202211695045A CN116221159B CN 116221159 B CN116221159 B CN 116221159B CN 202211695045 A CN202211695045 A CN 202211695045A CN 116221159 B CN116221159 B CN 116221159B
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- molecular pump
- piece
- gas impact
- tool
- joint
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/08—Shock-testing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a gas impact testing device which is used for testing molecular pump impact and comprises a tool component, a switch piece, a flow guide channel, a plugging piece and a pressure detection piece, wherein the tool component comprises a tool body, at least two circulating parts are formed on the tool body in a penetrating way, and at least any two circulating parts have different section calibers; the blocking piece is arranged corresponding to the circulating part, and the blocking piece and the circulating part are configured to be detachably connected. The gas impact testing device with the structure forms different flow paths through the cooperation of the plugging piece and the tool component, simulates the testing conditions that the molecular pump is under different pressure working conditions, is simple to operate, and can provide reliable reference for the external gas impact resistance of the molecular pump.
Description
Technical Field
The invention relates to the technical field of molecular pump testing, in particular to a gas impact testing device.
Background
The molecular pump is a common vacuum obtaining device, which uses a rotor rotating at a high speed to transmit momentum to gas molecules so as to obtain a directional speed, thereby being compressed and driven to an exhaust port and then being pumped away by a front stage. In recent years, molecular pumps are applied to the industrial field in a large scale, in the use process of the molecular pumps, inlet and outlet gas impact is common, the molecular pumps are sometimes unstable when the gas impacts, so that the phenomenon of turbine fracture is caused, and the molecular pumps are irreversibly influenced, so that the gas impact resistance of the molecular pumps is very necessary to test, and conditions are provided for safe use of the molecular pumps. In the prior art, a testing device for a molecular pump under different impact working conditions is lacking, and the gas impact simulation test before delivery of the molecular pump is difficult to flexibly adapt.
For this reason, it is desirable to provide a gas impact testing apparatus to solve the above problems.
Disclosure of Invention
The invention aims to solve the technical problems that a testing device for a molecular pump under different impact working conditions is lacked in the prior art, and the testing device is difficult to flexibly adapt to the defect of gas impact simulation test before delivery of the molecular pump.
The invention provides a gas impact testing device, which is used for testing molecular pump impact and comprises the following components:
the tool component comprises a tool body, at least two circulating parts are formed in a penetrating mode on the tool body, the circulating parts are arranged in parallel at intervals, and at least any two circulating parts have different section calibers;
the switch piece is provided with one end which is connected with the tool component in a sealing way, and the other end of the switch piece is communicated with outside air;
the flow guide channel is in fluid connection between the inner cavity of the molecular pump and the tool component;
the plugging pieces are arranged corresponding to the circulating parts and are detachably connected with the circulating parts, and the plugging pieces are used for plugging the circulating parts so as to adjust the cross section from the tool component to the circulating path of the molecular pump;
and the pressure detection piece is used for measuring the pressure of the inner cavity of the molecular pump.
Optionally, the circulation portion includes connecting hole and the circulation hole that the adjacency set up, the connecting hole with the circulation hole is linked together and is set up, the connecting hole sets up the frock body is close to one side of switch spare, the shutoff piece is at least partly worn to locate in the connecting hole.
Optionally, the axial directions of the connecting holes of the plurality of circulating parts are parallel, and any connecting hole and the circulating hole are coaxially arranged.
Optionally, the connecting hole is of a threaded structure, and the plugging piece is of a threaded piece; and/or
The connecting hole is a clamping hole, and the blocking piece is a clamping piece.
Optionally, the gas impact testing device further comprises a first connector and a second connector, the tool body is fixedly configured between the first connector and the second connector, the first connector is in fluid connection with the output port of the switch element, and one side, far away from the tool body, of the second connector is in fluid connection with the diversion channel.
Optionally, the tool component is a revolving body structure, and the tool body, the first connector and the second connector are coaxially arranged; and/or
Either joint is a connecting flange.
Optionally, the molecular pump has import and the export of intercommunication molecular pump inner chamber, the import sets up the molecular pump is towards one side of frock component, the import with the water conservancy diversion passageway is kept away from the one end of frock component is connected, the import with the export looks interval sets up.
Optionally, the above gas impact testing device further comprises a testing cover plate, the molecular pump comprises a driving mechanism, the testing cover plate is installed on the driving mechanism, and one end of the flow guiding channel, which is close to the molecular pump, is fixedly connected with the testing cover plate.
Optionally, the gas impact testing device further comprises a controller, and the controller is electrically connected with the molecular pump.
Optionally, the above gas impact testing device further comprises a detection channel, the detection channel and the diversion channel are arranged at intervals, one end of the detection channel is in sealing connection with the pressure detection piece, and the other end of the detection channel is in sealing communication with the inner cavity of the molecular pump.
The technical scheme provided by the invention has the following advantages:
1. the invention provides a gas impact testing device, which is used for testing molecular pump impact and comprises a tool component, a switch piece, a flow guide channel, a plugging piece and a pressure detection piece, wherein the tool component comprises a tool body, at least two circulating parts are formed on the tool body in a penetrating way, the circulating parts are arranged in parallel at intervals, and at least any two circulating parts have different section calibers; one end of the switch piece is connected with the tool component in a sealing way, and the other end of the switch piece is communicated with outside air; the diversion channel is in fluid connection between the inner cavity of the molecular pump and the tool component; the plugging pieces are arranged in the circulation part and are correspondingly arranged with the circulation part, the plugging pieces and the circulation part are detachably connected, and the plugging pieces are used for plugging the inside of the circulation part so as to adjust the section of the flow path from the tool component to the molecular pump; the pressure detection piece is used for measuring the pressure of the inner cavity of the molecular pump.
The molecular pump is vacuumized, then a switch piece is started to enable external gas to enter the testing device, the external gas flows through the switch piece, the tool component and the molecular pump, and the pressure change of the inner cavity of the molecular pump is measured through a pressure detecting piece; the flow part of the tool body is plugged through the plugging piece, the section of the flow path from the tool component to the molecular pump is regulated by the external gas, the impact pressure change is obtained through the pressure detection piece, so that the molecular pump forms flow paths with different sections through the plugging piece matched with the tool component when operating in a vacuum state, the working condition that the molecular pump is subjected to external impact action with different pressure intensity when operating in vacuum is simulated, at least any two flow parts are configured to have different section calibers by the device, the section of the tool component for flow is flexibly configured, the testing condition of different pressure working conditions is met, the testing process is simple, and reliable reference can be provided for the molecular pump to external gas impact resistance.
2. According to the gas impact testing device provided by the invention, the circulating part comprises the connecting hole and the circulating hole which are adjacently arranged, the connecting hole is communicated with the circulating hole, the connecting hole is arranged at one side of the tool body close to the switch piece, and the plugging piece at least partially penetrates through the connecting hole.
The connecting holes are matched and connected with the blocking pieces to seal the circulation parts, the blocking pieces are arranged in part of the circulation parts, and the connection or separation between the plurality of circulation parts and the plurality of blocking pieces is correspondingly adjusted, so that the testing device can be configured to form circulation paths with different sections; after the molecular pump is in a vacuum state and the switch piece is started, the blocking piece can be sealed and sealed on the circulation part through the gas contact action blocking piece led into the tool component, so that the effective sealing performance of the circulation part is ensured, the gas circulates from the planned circulation path of the tool component, and the accuracy of the test is facilitated.
3. The invention provides a gas impact testing device, wherein a molecular pump is provided with an inlet and an outlet which are communicated with an inner cavity of the molecular pump, the inlet is arranged on one side of the molecular pump facing towards a tool component, the inlet is connected with one end of a flow guide channel far away from the tool component, and the inlet and the outlet are arranged at intervals. The molecular pump is provided with an inlet and an outlet, when the molecular pump works in a vacuum state, the inlet and the outlet can have gas impact, and in specific implementation, when the outlet is subjected to gas impact test, the outlet can be correspondingly provided with a tool component and a switch piece, so that the practicability of the device is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a gas impact testing apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a tooling member and a closure member in a gas impact testing apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view of the construction of a tooling member in a gas impact testing apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating connection between a tool member and a plugging member in a gas impact test apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view of a tooling member in a gas impact testing apparatus provided in an embodiment of the present invention;
FIG. 6 is a schematic diagram showing the connection of a molecular pump and a controller in a gas impact test apparatus according to an embodiment of the present invention;
FIG. 7 is a schematic view of a test cover plate in a gas impact test apparatus according to an embodiment of the present invention;
reference numerals illustrate:
1-a molecular pump; 11-inlet; 12-outlet; 13-a drive mechanism;
2-a tooling component; 21-a tool body; 211-a first flow-through section; 211 a-first connection holes; 211 b-a second flow aperture; 212-a second flow-through section; 212 a-a second connection hole; 212 b-a second flow aperture; 22-first joint; 23-a second linker;
3-a switch member; 4-a diversion channel;
51-a first closure; 52-a second closure;
6-an air pressure detecting member; 7-detection channel;
8-testing a cover plate; 9-controller.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Examples
The embodiment provides a gas impact testing device for testing the impact of a molecular pump 1, as shown in fig. 1 to 4, the testing device comprises a tool component 2, a switch component 3, a diversion channel 4, a plugging component and a pressure detection component, wherein the diversion channel 4 is in fluid connection between the inner cavity of the molecular pump 1 and the tool component 2, and the pressure detection component is used for measuring the pressure of the inner cavity of the molecular pump 1.
One end of the switch piece 3 is connected with the tool component 2 in a sealing way, and the other end of the switch piece 3 is communicated with outside air. When the molecular pump 1 works to extract vacuum, the switch piece 3 is in a closed state; after the molecular pump 1 works and pumps out the vacuum, when the impact test is needed, the switch piece 3 is started, so that the external gas enters the device through the switch piece 3.
The molecular pump 1 is provided with an inlet 11 and an outlet 12 which are communicated with the inner cavity of the molecular pump 1, as shown in fig. 6, the inlet 11 is arranged on one side of the molecular pump 1 facing the tool component 2, the inlet 11 is connected with one end of the diversion channel 4 far away from the tool component 2, and the inlet 11 and the outlet 12 are arranged at intervals. When the molecular pump 1 works in a vacuum state, the inlet 11 and the outlet 12 may have gas impact, and in a specific implementation, when the outlet 12 is subjected to gas impact test, the outlet 12 can correspondingly configure the tooling component 2 and the switch component 3, so as to improve the practicability of the device.
As shown in fig. 2 to 4, the tooling member 2 comprises a tooling body 21, at least two circulating parts are formed on the tooling body 21 in a penetrating manner, the circulating parts are arranged in parallel and at intervals, and at least any two circulating parts have different section calibers; wherein, the shutoff piece is provided with a plurality of, and the shutoff piece sets up corresponding with the circulation portion, and the shutoff piece is configured to detachable connection with the circulation portion, and the shutoff piece is used for the shutoff to set up in the circulation portion to adjust the cross-section of frock component 2 to molecular pump 1 flow path.
The gas impact testing device provided by the embodiment, the circulation part comprises a connecting hole and a circulation hole which are adjacently arranged, the connecting hole and the circulation hole are communicated, the connecting hole is arranged on one side, close to the switch piece 3, of the tool body 21, and the plugging piece at least partially penetrates through the connecting hole. The connecting holes are matched and connected with the blocking pieces to seal the circulation parts, the blocking pieces are arranged in part of the circulation parts, and the connection or separation between the plurality of circulation parts and the plurality of blocking pieces is correspondingly adjusted, so that the testing device can be configured to form circulation paths with different sections; after the molecular pump 1 is in a vacuum state and the switch piece 3 is started, the blocking piece can be sealed and sealed by the gas which is led into the tooling component 2 to act on the blocking piece, so that the effective sealing performance of the circulating part is ensured, the gas circulates from a circulating path planned by the tooling component 2, and the accuracy of the test is facilitated.
In some embodiments, the axial directions of the connecting holes of the plurality of flow parts are parallel, and any connecting hole and the flow holes are coaxially arranged, so that the gas flow direction is ensured to be along the axial direction of the flow holes, and the flow resistance is avoided, and the bad vibration caused by different gas impact flow directions and influence on the testing environment are avoided.
In this embodiment, as shown in fig. 4 and 5, six circulation portions are formed on the tool body 21 in a penetrating manner, where the six circulation portions are arranged at intervals, and taking the first circulation portion 211 and the second circulation portion 212 as examples, the first circulation portion 211 includes a first connection hole 211a and a first circulation hole 211b, and the second circulation portion 212 includes a second connection hole 212a and a second circulation hole 212b; the first and second flow holes 211b and 212b have different inner diameters. Six plugging members can be correspondingly arranged, and taking the first plugging member 51 and the second plugging member 52 as examples, the first plugging member 51 can be detachably connected with the first connecting hole 211a, the second plugging member 52 can be detachably connected with the second connecting hole 212a, and corresponding plugging operation can be performed, so that the device forms different flow paths at the tooling component 2 by adjusting the connecting holes or separating the connecting holes of the plugging members, further forms different pressure working conditions, and can simulate the pressure from 10 -5 Pa is increased to 10 5 The gas impact working condition of Pa magnitude is measured by the change condition of pressure, and the resistance of the molecular pump 1 to the gas impact is measured.
The connecting hole is of a threaded structure, and the plugging piece is of a threaded piece; the screw thread structure sets up in the frock body 21 and is close to the one side of switch piece 3, can be convenient for the assembly and the dismantlement between shutoff piece and the connecting hole. In this embodiment, the hole diameters of the connection holes are configured to be 1mm, 1.5mm, 2mm, 3mm, 4mm, and 5mm, the lengths of the connection holes are configured to be 17mm, and the lengths of the flow holes are configured to be 5mm.
In other embodiments, the connecting hole is a clamping hole, the blocking piece is a clamping piece, and the clamping piece is matched with the clamping hole to be clamped or detached, so that the clamping piece can seal or separate the clamping hole, and accordingly, the circulation path is adjusted accordingly.
As shown in fig. 2, the gas impact testing device further includes a first connector 22 and a second connector 23, where the tool body 21 is fixedly disposed between the first connector 22 and the second connector 23, the first connector 22 is in fluid connection with the output port of the switch element 3, and one side of the second connector 23 away from the tool body 21 is in fluid connection with the diversion channel 4.
In some embodiments, the tooling member 2 is a solid of revolution structure, and the tooling body 21, the first joint 22, and the second joint 23 are coaxially disposed.
In some embodiments, the first connector 22 is configured as a KF40 flange, and the second connector 23 is configured as a CF40 flange, which is convenient to assemble and disassemble, simple to install and operate, and capable of ensuring good sealing performance.
In some embodiments, the first joint 22 and the second joint 23 are configured as connecting flanges, and the connecting flanges are provided with assembly holes for assembly positioning for sealing connection.
The embodiment provides a gas impact testing device, as shown in fig. 7, further including a testing cover plate 8, the molecular pump 1 includes a driving mechanism 13, the cavity of the molecular pump 1 is formed by sealing and enclosing a pump shell, a bottom cover and the testing cover plate 8 together, the testing cover plate 8 is mounted on the driving mechanism 13, and one end of the flow guiding channel 4 close to the molecular pump 1 is fixedly connected with the testing cover plate 8.
As shown in fig. 6, the test device further comprises a controller 9, which is electrically connected to the molecular pump 1, and controls the starting and closing processes of the molecular pump 1 through the controller.
The embodiment provides a gas impact testing device, as shown in fig. 1, further includes a detection channel 7, the detection channel 7 and the diversion channel 4 are spaced apart, one end of the detection channel 7 is connected with a pressure detection piece in a sealing manner, and the other end of the detection channel 7 is communicated with the inner cavity of the molecular pump 1 in a sealing manner. The switch 3 is then actuated again while the molecular pump 1 is maintained in a stable vacuum state, so that the pressure detecting means detects the pressure of the gas impact in the molecular pump 1.
In this embodiment, the test cover plate 8 is provided with three connection interfaces, and the three connection interfaces are respectively connected with the molecular pump 1, the diversion channel 4 and the detection channel 7.
In some embodiments, the switch 3 is configured as a butterfly valve; the pressure detecting member is configured as a vacuum gauge.
It should be noted that, the testing device may simulate the working condition of the molecular pump 1 when operating under high vacuum, when the inlet 11 and the outlet 12 are suddenly exposed to gas or when a large amount of process gas is introduced, the pressure is suddenly increased, and the external gas may be configured as the atmosphere. The device can simulate the corresponding working condition that the inlet 11 and the outlet 12 encounter gas impact, and the gas connected with the input end of the switch piece 3 is adaptively adjusted according to the testing requirement.
According to the gas impact testing device provided by the embodiment, vacuum is pumped through the molecular pump 1, then the switch piece 3 is started, so that external gas enters the testing device, the external gas flows through the switch piece 3, the tool component 2 and the molecular pump 1, and the pressure change of the inner cavity of the molecular pump 1 is measured through the pressure detection piece; the flow-through part of the tool body 21 is plugged by the plugging piece, the section of the flow-through path from the tool component 2 to the molecular pump 1 is regulated by the external gas, and the impact pressure change is obtained by the pressure detection piece, so that the molecular pump 1 forms the flow-through paths with different sections by matching with the tool component 2 when operating in a vacuum state, the working conditions of the molecular pump 1 under the external impact action of different pressure intensity when operating in vacuum are simulated and tested, the flow-through paths of the gas entering the different caliber sections are correspondingly switched, the different impact working conditions are met, the gas impact simulation test of the molecular pump 1 before leaving a factory can be flexibly adapted, the test process is simple, and reliable reference can be provided for the external gas impact resistance of the molecular pump 1.
The invention provides a gas impact testing device, taking the gas impact operation of an inlet 11 of a molecular pump 1 as an example, the using method is as follows:
s1: assembling the tooling component 2 between the switch piece 3 and the diversion channel 4;
s2: the first blocking member 51 is connected to the first connection hole 211a to close the first communicating portion 211, the second blocking member 52 is separated from the second connection hole 212a to connect the second communicating portion 212, and the preparation is completed;
s3: starting the molecular pump 1, after the rotation speed of the molecular pump 1 is increased to the rated rotation speed and the molecular pump is stably operated, forming a vacuum state in the inner cavity of the molecular pump 1, and starting the test work when the actual pressure detected by the pressure detecting piece is matched with the expected pressure;
s4: opening the switch part 3, detecting the pressure of the inner cavity of the molecular pump 1 in real time through the pressure detection part, and recording the pressure change value;
s5: after the group of tests are completed, the connection state of the plugging piece and the connection hole is adjusted, the first plugging piece 51 is separated from the first connection hole 211a, the first communicating part 211 is in a communicating state, the second plugging piece 52 is connected with the second connection hole 212a, the second communicating part 212 is in a closed state, and after preparation work is completed; the operation steps of S3 and S4 are repeated, so that pressure data of the actual operation of the molecular pump 1 when the inlet 11 leaks is obtained, and the capability of the molecular pump 1 for resisting the impact of external gas is quantified.
When the gas impact test is carried out on the outlet 12 of the molecular pump 1, the tooling component 2 is assembled between the switch piece 3 and the connecting pipeline at the outlet 12; the steps S2 to S5 are then performed to obtain the pressure data of the actual operation of the molecular pump 1 when the outlet 12 leaks, and to quantify the capability of the molecular pump 1 to resist the impact of external gas.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (10)
1. A gas impact testing device for testing molecular pump (1) impact, comprising:
the tool comprises a tool body (21), wherein at least two circulating parts are formed in a penetrating mode on the tool body (21), the circulating parts are arranged in parallel at intervals, and at least any two circulating parts have different section calibers;
the switch piece (3), one end of the switch piece (3) is connected with the tool component (2) in a sealing way, and the other end of the switch piece (3) is communicated with outside air;
a diversion channel (4), wherein the diversion channel (4) is in fluid connection between the inner cavity of the molecular pump (1) and the tool component (2);
the plugging pieces are arranged corresponding to the circulating parts and are detachably connected with the circulating parts, and the plugging pieces are used for plugging the circulating parts so as to adjust the section of the circulating path from the tool component (2) to the molecular pump (1);
and a pressure detection member for measuring the internal cavity pressure of the molecular pump (1).
2. The gas impact testing device according to claim 1, wherein the flow-through part comprises a connecting hole and a flow-through hole which are adjacently arranged, the connecting hole and the flow-through hole are communicated, the connecting hole is arranged on one side of the tool body (21) close to the switch piece (3), and the plugging piece at least partially penetrates into the connecting hole.
3. The gas impact testing device according to claim 2, wherein the axial directions of the connection holes of the plurality of flow-through portions are arranged in parallel, and any one of the connection holes and the flow-through hole is arranged coaxially.
4. The gas impact test device according to claim 2, wherein the connection hole is a screw structure, and the blocking member is a screw member; and/or
The connecting hole is a clamping hole, and the blocking piece is a clamping piece.
5. The gas impact testing device according to claim 1, further comprising a first joint (22) and a second joint (23), wherein the tool body (21) is fixedly arranged between the first joint (22) and the second joint (23), the first joint (22) is in fluid connection with the output port of the switch element (3), and the side of the second joint (23) away from the tool body (21) is in fluid connection with the flow guiding channel (4).
6. The gas impact test device according to claim 5, wherein the tool member (2) is a solid of revolution structure, and the tool body (21), the first joint (22) and the second joint (23) are coaxially arranged; and/or
Either joint is a connecting flange.
7. A gas impact testing device according to any one of claims 1-6, wherein the molecular pump (1) has an inlet (11) and an outlet (12) communicating with the interior cavity of the molecular pump (1), the inlet (11) being arranged at a side of the molecular pump (1) facing the tool member (2), the inlet (11) being connected to an end of the flow guiding channel (4) remote from the tool member (2), the inlet (11) and the outlet (12) being arranged at intervals.
8. The gas impact test device according to claim 7, further comprising a test cover plate (8), wherein the molecular pump (1) comprises a driving mechanism (13), the test cover plate (8) is mounted on the driving mechanism (13), and one end of the flow guide channel (4) close to the molecular pump (1) is fixedly connected with the test cover plate (8).
9. The gas impact test device according to claim 8, further comprising a controller (9), wherein the controller (9) is electrically connected to the molecular pump (1).
10. The gas impact test device according to any one of claims 1-6, further comprising a detection channel (7), wherein the detection channel (7) and the diversion channel (4) are arranged at intervals, one end of the detection channel (7) is in sealing connection with the pressure detection member, and the other end of the detection channel (7) is in sealing communication with the inner cavity of the molecular pump (1).
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| CN202211695045.6A CN116221159B (en) | 2022-12-28 | 2022-12-28 | Gas impact testing device |
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|---|---|---|---|
| CN202211695045.6A CN116221159B (en) | 2022-12-28 | 2022-12-28 | Gas impact testing device |
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| CN116221159A CN116221159A (en) | 2023-06-06 |
| CN116221159B true CN116221159B (en) | 2023-08-04 |
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| CN212250548U (en) * | 2020-05-21 | 2020-12-29 | 天津飞旋科技有限公司 | Magnetic suspension molecular pump atmosphere intrusion test system |
| CN212454920U (en) * | 2020-07-27 | 2021-02-02 | 中国科学院合肥物质科学研究院 | Molecular pump fault diagnosis prediction system |
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2022
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| JP2003148384A (en) * | 2001-11-08 | 2003-05-21 | Mitsubishi Heavy Ind Ltd | Abnormality detector of turbo-molecular pump |
| CN104179706A (en) * | 2013-05-27 | 2014-12-03 | 山东亿家能太阳能有限公司 | Molecular pump pumping speed tester |
| WO2015039443A1 (en) * | 2013-09-18 | 2015-03-26 | 北京北仪创新真空技术有限责任公司 | Atmospheric impact resistant molecular pump |
| CN212250548U (en) * | 2020-05-21 | 2020-12-29 | 天津飞旋科技有限公司 | Magnetic suspension molecular pump atmosphere intrusion test system |
| CN212454920U (en) * | 2020-07-27 | 2021-02-02 | 中国科学院合肥物质科学研究院 | Molecular pump fault diagnosis prediction system |
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