CN116200701A - TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating and preparation method thereof - Google Patents

TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating and preparation method thereof Download PDF

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Publication number
CN116200701A
CN116200701A CN202211719323.7A CN202211719323A CN116200701A CN 116200701 A CN116200701 A CN 116200701A CN 202211719323 A CN202211719323 A CN 202211719323A CN 116200701 A CN116200701 A CN 116200701A
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crzrn
alloy
coating
solid solution
resistant
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缪强
吴宇婷
梁文萍
赵慧
刘睿翔
臧恺
李静丽
徐健晏
姚巍
张猛
闫荣学
董美静
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Nanjing University Of Aeronautics And Astronautics Wuxi Research Institute
Nanjing University of Aeronautics and Astronautics
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Nanjing University Of Aeronautics And Astronautics Wuxi Research Institute
Nanjing University of Aeronautics and Astronautics
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0084—Producing gradient compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a wear-resistant CrZrN solid solution ceramic coating on the surface of a TC4 alloy and a preparation method thereof, and belongs to the field of TC4 alloy surface treatment, wherein the coating is prepared by adopting a double-glow plasma surface metallurgical technology on the surface of the TC4 alloy, and comprises a deposition layer and a diffusion layer, wherein the Cr, zr, N, ti content in the diffusion layer is in gradient change, so that the coating failure caused by component mutation and property difference is relieved; compared with the CrZrN binary coating, the CrZrN ceramic coating prepared by the method has the advantages of realizing solid solution strengthening, refining grains, realizing metallurgical bonding between the coating and a matrix, effectively prolonging the service life of the TC4 alloy matrix, and being applicable to the protection of wear-resistant parts in the fields of aviation industry, ship industry and the like.

Description

TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating and preparation method thereof
Technical Field
The invention belongs to the field of TC4 alloy surface treatment, and particularly relates to a TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating and a preparation method thereof.
Background
The ocean strategy in China is advanced to a new depth and breadth, and the requirements for developing key sea tools for ocean engineering are increasingly urgent. Most of sea tools are made of metal materials, and moving parts bearing loads are prone to abrasion, damage and failure in complex sea environments. TC4 alloy is widely applied to ocean engineering due to the advantages of small density, high specific strength, good corrosion resistance and the like, and is known as ocean metal. However, TC4 has low surface hardness and high friction coefficient, and is easy to generate adhesive wear in the process of counter-grinding, so that the application range and the service life of the counter-grinding machine are severely limited. Among various coping strategies, coating technology has been widely applied to titanium alloy surface modification as the most direct, effective and economically viable way to improve the alloy surface hardness, wear resistance. The transition metal nitride has high strength, high hardness and good wear resistance, is a common wear-resistant coating material, and the CrN coating with excellent corrosion resistance is considered as a potential protection material of a mechanical component for long-term use of a ship, but the CrN coating has pinholes, pores, columnar structures and the like in the deposition process, so that solution erosion can be accelerated, and the performance of the coating is reduced.
Disclosure of Invention
The invention provides a TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating and a preparation method thereof, which solve the problem of poor wear resistance of TC4 alloy in the service process, namely, the preparation of a CrZrN infiltration coating on the TC4 alloy surface, greatly improves the wear resistance of a matrix, and simultaneously realizes metallurgical bonding, avoids the problem of coating failure caused by coating spalling, thereby having the effect of prolonging the service life of a TC4 alloy matrix.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the method comprises the steps of obtaining a CrZrN gradient coating deposited on the surface of a matrix TC4 alloy by adopting a double-glow plasma surface metallurgical technology, wherein the CrZrN gradient coating comprises a diffusion layer close to the side of the matrix and a CrZrN deposition layer on the outermost layer; the thickness of the diffusion layer is about 1 μm, and the thickness of the deposition layer is 6 μm; crN, zrN, zr is formed in the deposited layer 7 Cr 3 N 10 、Zr 3 Cr 7 N 10 Solid solutions; in the diffusion layer, cr, zr and N elements diffuse from the coating to the inside of the matrix, and Ti elements diffuse from the matrix to the coating.
The preparation method of the TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating comprises the following steps:
step 1, preprocessing a matrix and a target material
Preparing a matrix TC4 alloy, sequentially polishing by using 180# abrasive paper, 360# abrasive paper, 600# abrasive paper, 800# abrasive paper, 1# abrasive paper, 3# abrasive paper and 5# abrasive paper, mechanically polishing to a smooth mirror surface by using flannelette and diamond polishing paste, sequentially polishing the target material by using 800# abrasive paper and 1500# abrasive paper to remove a surface oxide film, ultrasonically cleaning in absolute ethyl alcohol, and drying for later use;
step 2, vacuum chamber cleaning and workpiece placement
Sequentially polishing the inner wall of a vacuum chamber and a stage protection cover by using No. 800 sand paper and No. 1500 sand paper to remove surface oxidation films and impurities, then dipping absolute ethyl alcohol by using dust-free cloth to scrub until no obvious stains, placing a target material and a pretreated TC4 alloy after cleaning, taking Cr and Zr grid targets as source electrodes and taking the TC4 alloy as a workpiece electrode;
step 3, vacuumizing
Opening a mechanical pump, pumping gas in a vacuum chamber, continuously introducing argon when the gas pressure reaches 0.1Pa, cleaning the gas three to four times within the range of 20-100Pa, ensuring that other gases in the furnace are discharged, avoiding the influence of gas impurities on the coating preparation process as much as possible, adjusting the gas pressure to 20Pa after the gas cleaning is finished, and keeping the continuous introduction of the argon in the coating preparation process;
step 4, starting
After the bias power cabinet is started for 15 minutes and the glow is stable, the voltage of the workpiece is slowly regulated to 300V, ar ion bombardment is respectively carried out on the workpiece and the target for 30 minutes and 10 minutes, and the cleaning and preheating effects are achieved;
step 5, preparing CrZrN solid solution ceramic coating by using double-glow plasma surface metallurgy technology
A grid target is adopted, and a high-purity chromium target with the purity of 99.95 percent and a zirconium target are used as target materials; adjusting the space between the TC4 alloy matrix and the target material to 15-16mm, the pressure in the furnace chamber to 30-35 Pa, the source voltage to 800-1000V, the workpiece voltage to 400-500V, sputtering for 3h, and then introducing N 2 Sputtering for 4 hours to obtain a CrZrN solid solution ceramic coating;
step 6, closing the equipment
After the heat preservation is finished, slowly reducing the source voltage and the workpiece electrode voltage to 300V, and closing N 2 Continuously introducing Ar 2 After the heat preservation is carried out for half an hour, the two voltages are directly adjusted to 0, and the power supply is turned off.
As a modification, the source voltage and the workpiece voltage described in step 6 were reduced by 300V at a rate of 50V and 20V, respectively, every 5 minutes.
The application of the TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating on ship or aviation materials.
The beneficial effects are that: according to the wear-resistant CrZrN solid solution ceramic coating on the surface of the TC4 alloy and the preparation method thereof, the prepared CrZrN solid solution ceramic coating is subjected to diffusion plating combination by using a double-glow plasma surface metallurgical technology, so that the coating and the TC4 alloy form metallurgical combination, the Cr, zr, N, ti content in a diffusion layer is in gradient change, the coating failure caused by component mutation and property difference is relieved, the combination property is good, the problem of coating failure caused by coating spalling is avoided, the service life of a TC4 alloy substrate can be effectively prolonged, grains can be thinned by adding Zr element, cr atoms are replaced to form (Cr, X) N solid solution, solid solution strengthening is realized, the performance of the coating is further improved, the wear resistance of the substrate can be greatly improved, and under a friction environment, the substrate material can be effectively protected, and the coating can be applied to the protection of wear-resistant parts in the fields of aviation industry, ship industry and the like.
Drawings
FIG. 1 is a schematic representation of the surface microtopography of the coating prepared in example 1;
FIG. 2 is a schematic representation of the surface microtopography of the coating prepared in comparative example 1;
FIG. 3 is a cross-sectional view of the coating prepared in example 1;
FIG. 4 is a schematic representation of the surface XRD of the coating prepared in example 1;
FIG. 5 is a graph showing the friction coefficient curves of the substrates of example 1, comparative example 1 and TC 4;
FIG. 6 is a graphical representation of the three-dimensional wear scar morphology comparison at a 2.2N load for example 1 and comparative example 1, wherein (a) is example 1; (b) is comparative example 1;
fig. 7 is a comparative schematic of the wear profiles of example 1 and comparative example 1.
Detailed Description
The invention is described in detail below with reference to the attached drawings and the specific embodiments:
as shown in figures 1-5, the invention provides a TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating, wherein a grid target process of a double-glow plasma surface metallurgy technology is adopted in the preparation of the coating, and the purity of targets, specifically a chromium target and a zirconium target, is 99.95%.
The present invention will be described in further detail by way of specific embodiments.
Example 1
A TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating is obtained by adopting a double-layer glow plasma metallurgical technology, the coating is smooth, flat and compact as shown in figure 1, no obvious defects such as gaps, pits and the like appear, the CrZrN solid solution ceramic coating comprises a Cr, zr, N, ti diffusion layer and a CrZrN deposition layer which are outwards arranged on the surface of a matrix, the Cr, zr and N content in the diffusion layer gradually decreases from the surface of the diffusion layer to the inside of the TC4 alloy, the Ti content gradually decreases from the inside of the TC4 alloy to the surface of the diffusion layer as shown in figure 4, and CrN, zrN, zr is formed in the deposition layer 7 Cr 3 N 10 、Zr 3 Cr 7 N 10 Solid solutions.
The preparation method of the coating comprises the following steps:
step 1, pretreatment of a matrix material
Preparing a matrix TC4 alloy sample with the size of 15 multiplied by 4 mm, sequentially polishing step by using 180# coarse sand paper, 360# coarse sand paper, 600# coarse sand paper, 800# coarse sand paper, 1# metallographic sand paper, 3# metallographic sand paper and 5# metallographic sand paper, mechanically polishing to a smooth mirror surface, placing the mirror surface in absolute ethyl alcohol, ultrasonically cleaning the mirror surface, and drying the mirror surface for later use;
step 2, vacuum chamber cleaning and workpiece placement
Sequentially polishing the target material, the inner wall of the vacuum chamber and the objective table protective cover by using No. 800 and No. 1500 abrasive paper to remove surface oxide films and impurities, then dipping absolute ethyl alcohol by using dust-free cloth to scrub until no obvious stains exist, placing the target material and the pretreated TC4 alloy after cleaning, taking Cr and Zr grid targets as source electrodes and taking the TC4 alloy as a workpiece electrode;
step 3, vacuumizing
Opening a mechanical pump, pumping gas in a vacuum chamber, continuously introducing argon when the gas pressure reaches 0.1Pa, cleaning the gas three to four times within the range of 20-100Pa, ensuring that other gases in the furnace are discharged, avoiding the influence of gas impurities on the coating preparation process as much as possible, adjusting the gas pressure to 20Pa after the gas cleaning is finished, and keeping the continuous introduction of the argon in the coating preparation process;
step 4, starting
After the bias power cabinet is started for 15 minutes and the glow is stable, the voltage of the workpiece is slowly regulated to 300V, ar ion bombardment is respectively carried out on the workpiece and the target for 30 minutes and 10 minutes, and the cleaning and preheating effects are achieved;
step 5, preparing CrZrN solid solution ceramic coating by using double-glow plasma surface metallurgy technology
A grid target is adopted, and a high-purity chromium target with the purity of 99.95 percent and a zirconium target are used as target materials; adjusting the space between the TC4 alloy matrix and the target material to 15-16mm, the pressure in the furnace chamber to 30-35 Pa, the source voltage to 800-1000V, the workpiece voltage to 400-500V, sputtering for 3h, and then introducing N 2 Sputtering for 4 hours to obtain a CrZrN solid solution ceramic coating;
step 6, closing the equipment
After the heat preservation is finished, the source voltage and the workpiece voltage are respectively reduced to 300V at the speed of reducing 50V and 20V every 5 minutes, and N is closed 2 Continuously introducing Ar 2 After the heat preservation is carried out for half an hour, the two voltages are directly adjusted to 0, and the power supply is turned off.
Comparative example 1
The comparative example 1 differs from the coating preparation step shown in example 1 in that:
step 5, preparing CrN solid solution ceramic coating by using double-glow plasma surface metallurgy technology
The high-purity chromium target with the purity of 99.95% is used as a target, the interval between a TC4 alloy matrix and the target is regulated to be 12-16mm, the pressure in a furnace chamber is 20-35 Pa, the source voltage is 800-1000V, the workpiece voltage is 400-500V, N2 is introduced after sputtering for 3 hours, and the CrN binary ceramic coating is prepared after sputtering for 4 hours, wherein obvious island growth appears on the surface of the coating, the surface roughness is higher, and the coating is not uniform and smooth enough.
The coatings prepared in example 1 and comparative example 1 were subjected to frictional wear test, the worn morphology was observed, and the wear behavior of the coatings in a real environment was studied by using a rotary frictional wear instrument, and the specific operations were as follows: placing the sample on a stage, fixing with a clamp, and selecting Si with diameter of 5 mm as friction pair 3 N 4 The pellet temperature was 25 ℃, the rotational speed was 560 r/min, the load was 2.2N, the friction radius was 2 mm, and the wear time was 15 min.
The experimental results show that:
as shown in fig. 5-7, the coefficient of friction of example 1 was reduced, the wear profile was greatly reduced, and the wear volume was greatly reduced, as compared to the comparative example, indicating an improvement in the wear resistance of the example.
In conclusion, the CrZrN solid solution ceramic coating prepared by the method disclosed by the invention realizes the diffusion bonding by using a double-glow plasma surface metallurgical technology, so that the coating and TC4 alloy form metallurgical bonding, the components realize continuous gradient change from outside to inside from the surface of the coating, the bonding performance is good, and the matrix material can be effectively protected in a friction environment.
The foregoing is merely a preferred embodiment of the present invention, and it will be understood by those skilled in the art that the technical solutions described in the foregoing embodiments may be modified or some or all of the technical features may be replaced by the same modifications or all of the features, and the essence of the corresponding technical solutions should not deviate from the scope of the technical solutions of the embodiments of the present invention, which should be covered in the protection scope of the present invention.

Claims (9)

1. The wear-resistant CrZrN solid solution ceramic coating on the surface of the TC4 alloy is characterized in that the coating is a CrZrN gradient coating deposited on the surface of the TC4 alloy of a matrix, and the CrZrN coating comprises a diffusion layer close to the side of the matrix and a CrZrN deposition layer on the outermost layer; cr, zr and N elements in the diffusion layer diffuse from the coating to the inside of the matrix, and Ti elements diffuse from the matrix to the coating; crN, zrN, zr is formed in the deposited layer 7 Cr 3 N 10 、Zr 3 Cr 7 N 10 Solid solutions.
2. The TC4 alloy surface wear resistant CrZrN solid solution ceramic coating of claim 1 wherein said diffusion layer has a thickness of 1 μm.
3. The TC4 alloy surface wear resistant CrZrN solid solution ceramic coating according to claim 1 or 2 wherein the deposit thickness is 6 μm.
4. A method for preparing a wear-resistant CrZrN solid solution ceramic coating on the surface of a TC4 alloy according to any one of claims 1 to 3, comprising the steps of:
step 1: after a TC4 alloy matrix, a target material and a reaction chamber are treated, placing the matrix and the target material in the reaction chamber, and taking Cr and Zr grid targets as source electrodes and TC4 alloy as a workpiece electrode;
step 2: after the reaction chamber is subjected to gas cleaning to remove gas impurities, ar ion bombardment is respectively carried out on the workpiece and the target for 30 minutes and 10 minutes, so that the cleaning and preheating effects are realized;
step 3: adjusting the space between the TC4 alloy matrix and the target material to 15-16mm, the pressure in the furnace chamber to 30-35 Pa, the source voltage to 800-1000V, the workpiece voltage to 400-500V, sputtering for 3h, and then introducing N 2 Sputtering for 4 hours to obtain a CrZrN solid solution ceramic coating;
step 4: after the end, slowly reducing the source voltage and the workpiece electrode voltage to 300V, closing N 2 Continuously introducing Ar 2 After the heat preservation is carried out for half an hour, the two voltages are directly adjusted to 0, and the power supply is turned off.
5. The method for preparing the TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating according to claim 4, wherein the treatment process of the substrate in the step 1 is as follows: preparing a matrix TC4 alloy, sequentially polishing step by using 180# coarse sand paper, 360# coarse sand paper, 600# coarse sand paper, 800# coarse sand paper, 1# metallographic sand paper, 3# metallographic sand paper and 5# metallographic sand paper, and mechanically polishing to a smooth mirror surface by using flannelette and diamond polishing paste; the processing process for the target material is as follows: sequentially polishing the surface oxide films by using No. 800 sand paper and No. 1500 sand paper, placing the surface oxide films in absolute ethyl alcohol for ultrasonic cleaning, and drying for later use; the treatment process of the reaction chamber is as follows: sequentially polishing the inner wall of the vacuum chamber and the object stage protective cover by using No. 800 sand paper and No. 1500 sand paper to remove surface oxide films and impurities, and then dipping absolute ethyl alcohol by using dust-free cloth to scrub until no obvious stains exist.
6. The method for preparing the TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating according to claim 4 or 5, wherein the targets are high-purity chromium targets and zirconium targets with purity of 99.95%.
7. The method for preparing the wear-resistant CrZrN solid solution ceramic coating on the surface of the TC4 alloy according to claim 4, wherein the gas cleaning process in the step 2 is as follows: and (3) starting a mechanical pump, pumping gas in a vacuum chamber, continuously introducing argon when the gas pressure reaches 0.1Pa, cleaning the gas three to four times within the range of 20-100Pa, ensuring that other gases in the furnace are discharged, avoiding the influence of gas impurities on the coating preparation process as much as possible, adjusting the gas pressure to 20Pa after the gas cleaning is finished, and keeping the continuous introduction of the argon in the coating preparation process.
8. The method for preparing the wear-resistant CrZrN solid solution ceramic coating on the surface of the TC4 alloy according to claim 4 or 7, wherein the cleaning and preheating processes of the workpiece and the target in the step 2 are as follows: after the bias power cabinet is started for 15 minutes and the glow is stable, the voltage of the workpiece is slowly regulated to 300V, and Ar ion bombardment is respectively carried out on the workpiece and the target for 30 minutes and 10 minutes.
9. The method for preparing a wear-resistant CrZrN solid solution ceramic coating on a TC4 alloy surface according to claim 4, wherein the source voltage and the workpiece voltage in step 4 are reduced by 300V at a rate of 50V and 20V, respectively, every 5 minutes.
CN202211719323.7A 2022-12-30 2022-12-30 TC4 alloy surface wear-resistant CrZrN solid solution ceramic coating and preparation method thereof Pending CN116200701A (en)

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