CN116198037A

CN116198037A - Semiconductor device slicing device

Info

Publication number: CN116198037A
Application number: CN202211645830.0A
Authority: CN
Inventors: 于泳
Original assignee: Xi'an Shunhui Electronic Technology Co ltd
Current assignee: Xi'an Shunhui Electronic Technology Co ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-06-02

Abstract

The invention discloses a slicing device for a semiconductor device, which relates to the technical field of semiconductor processing and comprises a bottom plate, wherein the upper surface of the bottom plate is fixedly connected with a fixed plate, the outer surface of the fixed plate is provided with a cooler, the inside of the fixed plate is provided with a cavity, the upper surface of the fixed plate is provided with a water filling port, the inner wall of the cavity is provided with a flow guide pipe, and one end of the flow guide pipe is fixedly connected with the outer surface of the cooler. It can be fixed through setting up fixture's effect, can carry out the centre gripping to not unidimensional semiconductor, avoids frequently changing the fixed semiconductor of mould, causes semiconductor machining efficiency slow, realizes the practicality of semiconductor device section device, through setting up stop gear's effect, can dismantle the base, the die cutter fast, be convenient for change the die cutter of different models to operating is simple, can change it fast, realizes the convenience of semiconductor device section device.

Description

Semiconductor device slicing device

Technical Field

The invention relates to the technical field of semiconductor processing, in particular to a slicing device for a semiconductor device.

Background

The semiconductor chip is a semiconductor device which is manufactured by etching and wiring a semiconductor sheet and can realize a certain function. Not only silicon chips, but also semiconductor materials such as gallium arsenide and germanium are common. To meet the demand of mass production, the electrical properties of semiconductors must be predictable and stable, and therefore, both the purity of the dopants and the quality of the semiconductor lattice structure must be critical. The most common method currently used to produce high purity single crystal semiconductor materials is known as the Czochralski method, where semiconductor chips are manufactured by performing a die cutting operation on a die using a die cutter.

Chinese patent according to application No. 202021371042.3 discloses a die-cut die for semiconductor chips. Including the workstation, the upper end of workstation is connected with the support, and the upper end of workstation installs the mould seat, one side of support is provided with the crossbearer, the lower extreme of crossbearer is connected with the cross cutting rule, the inside of mould seat is provided with the cavity, and one side of mould seat is provided with cooling module, cooling module includes honeycomb duct, water supply pipe, cold water tank and water pump, wherein, the cold water tank is installed to the upper end of workstation, the water pump is installed in the outside of cold water tank, and one side of cold water tank is connected with the honeycomb duct.

In the scheme, the chip is directly placed in the groove of the grinding tool seat, and the groove in the die in the scheme is of a fixed size and cannot fix semiconductors of different sizes, so that the die cutting of the semiconductor chip can only be of a fixed size, and the working efficiency is greatly reduced; to this end, we provide a semiconductor device dicing apparatus that solves the above problems.

Disclosure of Invention

The invention aims to make up the defects of the prior art and provides a semiconductor device slicing device.

In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a semiconductor device section device, includes the bottom plate, the last fixed surface of bottom plate is connected with the fixed plate, the surface mounting of fixed plate has the cooler, the cavity has been seted up to the inside of fixed plate, the last surface mounting of fixed plate has the water filling port, the honeycomb duct is installed to the inner wall of cavity, the one end fixed connection of honeycomb duct is in the surface of cooler, the upper surface of fixed plate is provided with fixture, the last fixed surface of bottom plate is connected with two symmetrical risers, two symmetrical slides have all been seted up to the surface of riser.

Further, two equal sliding connection of inner wall of slide has the connecting rod, the surface fixedly connected with lifter plate of connecting rod, two the surface fixedly connected with roof of riser, the upper surface fixedly connected with pneumatic cylinder of roof, the below of roof is equipped with the roof, the output of pneumatic cylinder runs through in the upper surface of roof and extends to the surface of mount, and fixedly connected with in the surface of mount.

Further, the surface fixed connection of mount is in the upper surface of lifter plate, the surface of mount is provided with two symmetrical stop gear, lifter plate's inner wall sliding connection has the base, the die cutter is installed to the bottom surface of base.

Further, fixture includes the assembly piece, the bottom surface fixed connection of assembly piece is in the upper surface of fixed plate, the standing groove has been seted up to the surface of assembly piece, two symmetrical assembly chambeies have been seted up to the inner wall of standing groove, two equal threaded connection of inner wall in assembly chamber has the threaded rod.

Further, two symmetrical moving blocks are connected to the outer surfaces of the threaded rods in a threaded mode, the outer surfaces of the two moving blocks are connected to the inner wall of the assembly cavity in a sliding mode, and two symmetrical rotating discs are arranged outside the assembly block.

Further, one end of the threaded rod, which is far away from the inner wall of the assembly cavity, penetrates through the inner wall of the assembly cavity to extend to the outer surface of the rotary table, and is fixedly connected to the outer surface of the rotary table, the outer surfaces of the two moving blocks are fixedly connected with moving plates, and one side surface, which is close to each other, of the moving plates is fixedly connected with a protection pad.

Further, stop gear includes two spacing holes and two slide holes, two the surface in the base is all seted up to the inner wall in spacing hole, two the surface in the mount is all seted up to the inner wall in slide hole, two the equal fixedly connected with gag lever post of inner wall in slide hole, two the equal fixedly connected with hand-pulled plate of surface of gag lever post.

Further, two the surface of gag lever post is all sliding connection in the inner wall in spacing hole, the surface fixedly connected with baffle of gag lever post, the surface fixedly connected with elastic component of baffle, the one end fixedly connected with in the surface of mount of baffle surface is kept away from to elastic component.

Compared with the prior art, the semiconductor device slicing device has the following beneficial effects:

1. the clamping mechanism is arranged to clamp and fix semiconductors with different sizes, so that the problem that the semiconductor processing efficiency is low due to frequent replacement of a die to fix the semiconductors is avoided, and the practicability of the semiconductor device slicing device is realized.

2. According to the invention, through the effect of the limiting mechanism, the base and the die cutters can be quickly disassembled and assembled, so that the die cutters with different types can be conveniently replaced, the operation process is simple, the die cutters can be quickly replaced, and the convenience of the slicing device of the semiconductor device is realized.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of the internal structure of the present invention;

FIG. 3 is a schematic view of the internal structure of the clamping mechanism of the present invention;

fig. 4 is a schematic view of the internal structure of the limiting mechanism of the present invention.

In the figure: 1. a bottom plate; 2. a fixing plate; 3. a cooling machine; 4. a water filling port; 5. a cavity; 6. a flow guiding pipe; 7. a clamping mechanism; 701. a module block; 702. a placement groove; 703. a module cavity; 704. a threaded rod; 705. a moving block; 706. a turntable; 707. a moving plate; 708. a protective pad; 8. a riser; 9. a slideway; 10. a connecting rod; 11. a lifting plate; 12. a top plate; 13. a hydraulic cylinder; 14. a fixing frame; 15. a limiting mechanism; 1501. a limiting hole; 1502. a slide hole; 1503. a limit rod; 1504. a hand pulling plate; 1505. a baffle plate; 1506. an elastic component; 16. a base; 17. and (5) a die cutter.

Detailed Description

The principles and features of the present invention are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the invention and are not to be construed as limiting the scope of the invention.

The embodiment provides a semiconductor device slicing device, and this fixing device is used for fixing semiconductor in the fixed process of different size semiconductors, through setting up fixture 7's effect, can carry out the centre gripping to the semiconductor of different sizes and fix, avoids frequently changing the fixed semiconductor of mould, causes the semiconductor machining efficiency slow, realizes the practicality of semiconductor device slicing device.

Referring to fig. 1 to 4, a slicing device for semiconductor devices comprises a bottom plate 1, wherein a fixing plate 2 is fixedly connected to the upper surface of the bottom plate 1, a cooler 3 is arranged on the outer surface of the fixing plate 2, a cavity 5 is formed in the fixing plate 2, a water filling port 4 is arranged on the upper surface of the fixing plate 2, and a flow guide pipe 6 is arranged on the inner wall of the cavity 5.

The cooling machine 3 cools the cooling liquid in the guide pipe 6, the guide pipe 6 cools the clean water in the cavity 5, and the temperature in the cavity 5 is always kept low, so that the mold is cooled.

One end of the flow guide pipe 6 is fixedly connected to the outer surface of the cooler 3, and a clamping mechanism 7 is arranged on the upper surface of the fixed plate 2.

Referring to fig. 1, 2 and 3, the clamping mechanism 7 includes a component block 701, the bottom surface of the component block 701 is fixedly connected to the upper surface of the fixed plate 2, a placement groove 702 is formed on the outer surface of the component block 701, two symmetrical component cavities 703 are formed on the inner wall of the placement groove 702, and threaded rods 704 are connected to the inner walls of the two component cavities 703 in a threaded manner.

Here, the assembly chamber 703 limits the moving block 705 such that the moving block 705 cannot rotate along with the threaded rod 704, and moves laterally on the inner wall of the assembly chamber 703.

The outer surfaces of the two threaded rods 704 are in threaded connection with two symmetrical moving blocks 705, the outer surfaces of the two moving blocks 705 are in sliding connection with the inner wall of the assembly cavity 703, and two symmetrical rotary discs 706 are arranged outside the assembly block 701.

In this embodiment, the turntable 706 is manually turned to drive the threaded rod 704 to rotate, the moving block 705 to move, and the moving plate 707 and the protection pad 708 to move, so as to clamp and fix the molds with different sizes.

One end of the threaded rod 704 far away from the inner wall of the assembly cavity 703 penetrates through the inner wall of the assembly cavity 703 to extend to the outer surface of the rotary disc 706, and is fixedly connected to the outer surface of the rotary disc 706, the outer surfaces of the two moving blocks 705 are fixedly connected with moving plates 707, and one side surface, close to each other, of the two moving plates 707 is fixedly connected with a protection pad 708.

The material of the protection pad 708 is preferably rubber, so as to avoid damage to the mold caused by excessive clamping force when the mold is clamped and fixed.

The upper surface of the bottom plate 1 is fixedly connected with two symmetrical vertical plates 8, and two symmetrical slide ways 9 are respectively arranged on the outer surfaces of the two vertical plates 8.

Through the cooperation of riser 8, slide 9, connecting rod 10, can carry out spacingly to lifter plate 11, make it stable reciprocate.

The inner walls of the two slide ways 9 are both connected with a connecting rod 10 in a sliding manner, the outer surface of the connecting rod 10 is fixedly connected with a lifting plate 11, the outer surface of the two vertical plates 8 is fixedly connected with a top plate 12, the upper surface of the top plate 12 is fixedly connected with a hydraulic cylinder 13, the top plate 12 is arranged below the top plate 12, and the output end of the hydraulic cylinder 13 penetrates through the upper surface of the top plate 12 to extend to the outer surface of a fixed frame 14 and is fixedly connected to the outer surface of the fixed frame 14.

The outer surface of the fixed frame 14 is fixedly connected to the upper surface of the lifting plate 11, and two symmetrical limiting mechanisms 15 are arranged on the outer surface of the fixed frame 14.

Referring to fig. 1 and 4, the limiting mechanism 15 includes two limiting holes 1501 and two sliding holes 1502, the inner walls of the two limiting holes 1501 are all formed on the outer surface of the base 16, the inner walls of the two sliding holes 1502 are all formed on the outer surface of the fixing frame 14, the inner walls of the two sliding holes 1502 are all fixedly connected with limiting rods 1503, and the outer surfaces of the two limiting rods 1503 are all fixedly connected with hand pulling plates 1504.

Under the cooperation of the stopper rod 1503 and the stopper hole 1501, the base 16 can be fixed in a stopper manner after the stopper rod 1503 is inserted into the stopper hole 1501.

The surface of two gag lever posts 1503 all sliding connection is in the inner wall of spacing hole 1501, and the surface fixedly connected with baffle 1505 of gag lever post 1503.

Through the effect of baffle 1505, can carry out spacingly to gag lever post 1503, make it avoid directly pulling out when pulling hand pulling board 1504, cause unable spacing.

The outer surface of baffle 1505 is fixedly connected with elastic component 1506, and the one end of elastic component 1506 that is kept away from the outer surface of baffle 1505 is fixedly connected to the outer surface of mount 14.

Here, the elastic member 1506 is always in a pushing state, so that it pushes the baffle 1505 to move the stop lever 1503, and the base 16 is limited after the stop lever 1503 is inserted into the limiting hole 1501.

The inner wall of the lifting plate 11 is connected with a base 16 in a sliding manner, and a die cutter 17 is arranged on the bottom surface of the base 16.

Working principle: when the embodiment is used, firstly, the rotary table 706 is manually rotated to drive the threaded rod 704 to rotate to drive the moving block 705 to move, and the moving block 705 is limited by the component cavity 703, so that the moving block 705 cannot rotate along with the threaded rod 704 when the threaded rod 704 rotates, therefore, the moving block 705 moves on the surface of the threaded rod 704, the moving block 705 moves and drives the moving plate 707 and the protection pad 708 to move, semiconductor chips with different sizes can be clamped and fixed, then, cold water flowing in the guide pipe 6 can cool clean water in the cavity 5 by utilizing the cooperation between the cooler 3, the cavity 5 and the guide pipe 6, and when the guide pipe 6 passes through the cooling of the cooler 3, the cooling loop is formed, the temperature in the cavity 5 is always kept low, the die is cooled, finally, the hand pull plate 1504 is manually pulled to drive the limiting rod 1503 to move, after the limiting rod 1503 slides out of the inner wall of the limiting hole 1501, the base 16 can be released under the action of gravity, the die cut 17 falls, and when the hand pull plate 1505 is required to be pulled, the baffle plate 1505 is pulled on two sides, and the baffle plate 1505 is pushed by the hand pull plate 1505 to push the base 16, and the limiting plate 1505 is elastically pushed by the elastic baffle plate 1506 to be pushed to be inserted into the limiting plate 1506, and the limiting plate is released, and the limiting plate is elastically pushed by the baffle plate 1503 is pushed by the baffle plate 1503 to be pushed by the baffle plate when the baffle plate is pushed.

The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims

1. A semiconductor device dicing apparatus comprising a base plate (1), characterized in that: the utility model discloses a cooling device for a water heater, including bottom plate (1), fixed plate (2) and riser (8), fixed plate (2) are installed to the upper surface fixedly connected with fixed plate (2), cavity (5) have been seted up to the surface mounting of fixed plate (2), water filling port (4) have been installed to the upper surface of fixed plate (2), honeycomb duct (6) are installed to the inner wall of cavity (5), the one end fixedly connected with of honeycomb duct (6) in the surface of cooler (3), the upper surface of fixed plate (2) is provided with fixture (7), the upper surface fixedly connected with of bottom plate (1) two symmetrical riser (8), two symmetrical slide (9) have all been seted up to the surface of riser (8).

2. A semiconductor device dicing apparatus according to claim 1, wherein: the inner walls of two slide ways (9) are all sliding connection has connecting rod (10), the surface fastening of connecting rod (10) is connected with lifter plate (11), two the surface fastening of riser (8) is connected with roof (12), the upper surface fastening of roof (12) is connected with pneumatic cylinder (13), the below of roof (12) is equipped with roof (12), the output of pneumatic cylinder (13) runs through in the upper surface of roof (12) and extends to the surface of mount (14), and fixed connection in the surface of mount (14).

3. A semiconductor device dicing apparatus according to claim 2, wherein: the outer surface fixed connection of mount (14) is in the upper surface of lifter plate (11), the surface of mount (14) is provided with two symmetrical stop gear (15), the inner wall sliding connection of lifter plate (11) has base (16), die cutter (17) are installed to the bottom surface of base (16).

4. A semiconductor device dicing apparatus according to claim 1, wherein: the clamping mechanism (7) comprises a component block (701), the bottom surface of the component block (701) is fixedly connected to the upper surface of the fixed plate (2), a placing groove (702) is formed in the outer surface of the component block (701), two symmetrical component cavities (703) are formed in the inner wall of the placing groove (702), and threaded rods (704) are connected to the inner walls of the component cavities (703) in a threaded mode.

5. A semiconductor device dicing apparatus according to claim 4, wherein: the outer surfaces of the two threaded rods (704) are in threaded connection with two symmetrical moving blocks (705), the outer surfaces of the two moving blocks (705) are in sliding connection with the inner wall of the assembly cavity (703), and two symmetrical rotary discs (706) are arranged outside the assembly block (701).

6. A semiconductor device dicing apparatus according to claim 5, wherein: one end of the threaded rod (704) far away from the inner wall of the assembly cavity (703) penetrates through the inner wall of the assembly cavity (703) and extends to the outer surface of the rotary table (706), the threaded rod is fixedly connected to the outer surface of the rotary table (706), the outer surfaces of the two moving blocks (705) are fixedly connected with moving plates (707), and one side surface, close to each other, of each moving plate (707) is fixedly connected with a protection pad (708).

7. A semiconductor device dicing apparatus according to claim 2, wherein: stop gear (15) are including two spacing holes (1501) and two slide hole (1502), two the surface in base (16) is all seted up to the inner wall in spacing hole (1501), two the surface in mount (14) is all seted up to the inner wall in slide hole (1502), two the equal fixedly connected with gag lever post (1503) of inner wall in slide hole (1502), two the surface of gag lever post (1503) is all fixedly connected with hand pulling plate (1504).

8. A semiconductor device dicing apparatus according to claim 8, wherein: the outer surfaces of the two limit rods (1503) are both connected to the inner wall of the limit hole (1501) in a sliding mode, a baffle plate (1505) is fixedly connected to the outer surface of the limit rod (1503), an elastic component (1506) is fixedly connected to the outer surface of the baffle plate (1505), and one end, away from the outer surface of the baffle plate (1505), of the elastic component (1506) is fixedly connected to the outer surface of the fixing frame (14).