CN116197164A - Pre-cleaning equipment and cleaning process for electrode processing - Google Patents

Abstract

The invention relates to the technical field of cleaning equipment, and particularly discloses pre-cleaning equipment and a cleaning process for electrode processing, wherein the pre-cleaning equipment comprises a cleaning box; the cleaning box is provided with a first cavity for containing the treatment fluid; a shower nozzle is fixedly connected on the inner side wall of the first cavity; the outer side wall of the shower nozzle is fixedly connected with a spray head; a top plate is arranged at the top of the cleaning box; an electric push rod is arranged on the bottom surface of the top plate; the electric push rod is arranged on the top surface of the cleaning box, and the output end of the electric push rod is connected with the bottom surface of the top plate; the side wall of the top plate is connected with a connecting plate; the end part of the connecting plate is fixedly connected with a backing plate which can extend into the first cavity; the bottom surface of the base plate is provided with a clamping component; the outer side wall of the cleaning box is provided with an infusion mechanism which can convey the treatment liquid in the first cavity into the shower pipe; the film layer on the surface of the mask is removed by combining the immersion cleaning and the shower cleaning, so that the possibility of secondary pollution caused by the fact that the fallen impurities are attached to the surface of the mask again is reduced.

Description

Pre-cleaning equipment and cleaning process for electrode processing

Technical Field

The invention relates to the technical field of cleaning equipment, in particular to pre-cleaning equipment and cleaning technology for electrode processing.

Background

In the production process of the electrode, the evaporation material is required to be evaporated and deposited on the target substrate through the vacuum evaporation equipment, in the long-term use process of the evaporation equipment, the evaporation material is deposited on the fine metal mask, and when the film layer sputtered on the mask reaches a certain thickness, normal production can be influenced, so that the mask needs to be cleaned regularly through the cleaning equipment, and the film layer on the surface of the mask is removed.

Most of the cleaning equipment in the prior art is used for cleaning the mask plate by soaking the mask plate in a cleaning tank, and a large treatment liquid is placed in the cleaning tank to dissolve the film layer on the mask plate, so that the film layer deposited on the mask plate can fall off to form impurities, but the impurity falling off and suspended in the treatment liquid is easily deposited on the surface of the mask plate again by the cleaning mode, so that secondary pollution of the mask plate is caused.

Disclosure of Invention

The application provides a pre-cleaning equipment for electrode processing has the mode that combines together through pickling and drenching and spouting the washing and get rid of the rete on mask version surface, reduces the impurity that drops and adheres to the possibility that causes secondary pollution on mask version surface again.

The application provides a pre-cleaning equipment and cleaning process for electrode processing, adopts following technical scheme:

the pre-cleaning equipment for electrode processing comprises a cleaning box; the cleaning box is provided with a first cavity for containing the treatment fluid; a shower nozzle is fixedly connected to the inner side wall, close to the top surface, of the first cavity; the outer side wall of the shower nozzle is fixedly connected with a spray head communicated with the inside of the shower nozzle; a top plate is arranged at the top of the cleaning box; an electric push rod is arranged on the bottom surface of the top plate; the electric push rod is arranged on the top surface of the cleaning box, and the output end of the electric push rod is connected with the bottom surface of the top plate; the side wall of the top plate is connected with a connecting plate; the end part of the connecting plate, which is far away from the top plate, is fixedly connected with a backing plate which can extend into the first cavity; the bottom surface of the base plate is provided with a clamping assembly capable of fixing the mask plate; the outer side wall of the cleaning box is provided with an infusion mechanism which can convey the treatment liquid in the first cavity into the shower pipe.

Through adopting above-mentioned technical scheme, place the mask that will wait to clean in the backing plate bottom, carry out the centre gripping to the mask through the centre gripping subassembly, and drive roof and connecting plate through the electricity push rod and move down, make the mask submergence in the treatment fluid in the first cavity, promote the rete of mask surface deposit to drop through the treatment fluid, when the mask shifts out from the treatment fluid gradually, carry the treatment fluid in the first cavity to drenching the spray tube through infusion mechanism, and spray the treatment fluid blowout to the mask through the shower nozzle and spout the treatment, make the difficult secondary pollution that adheres to on the mask again of dirt that washs to drop, the cleaning performance has been optimized.

Preferably, a baffle is fixedly connected to the inner side wall of the first cavity; an opening is formed in the baffle; a filter screen is fixedly connected to the inner side wall of the opening; the infusion mechanism comprises a pump body; the pump body is arranged on the outer side wall of the cleaning box, the input end of the pump body is fixedly connected with a liquid inlet pipe, and the output end of the pump body is fixedly connected with a liquid outlet pipe; the end part of the liquid inlet pipe, which is far away from the pump body, penetrates through the side wall of the cleaning box and the baffle plate and extends to the bottom of the baffle plate; the end part of the liquid outlet pipe far away from the pump body is communicated with the inside of the shower pipe.

Through adopting above-mentioned technical scheme, start the pump body and carry the treatment fluid in the first cavity by feed liquor pipe and drain pipe and spray in the pipe to spray the washing to the mask after the pickling, the filter screen that sets up on the baffle is used for filtering the dirt that drops from the mask, makes the dirt be difficult for spraying to mask surface again after spraying the pipe by the feed liquor pipe entering, reduces the possibility that causes secondary pollution to the mask.

Preferably, the clamping assembly comprises a clamping block; the clamping block is fixedly connected to the bottom surface of the base plate, and a slot is formed in the bottom surface of the clamping block; the inner side wall of the slot is provided with a threaded through hole; and the inner side wall of the threaded through hole is connected with a fastening screw in a threaded manner.

Through adopting above-mentioned technical scheme, insert the mask version that waits to wash in establishing the slot of grip block bottom, rotate fastening screw and make fastening screw fix the mask version to realize that the grip block is fixed to the centre gripping of mask version, the mounting means is simple convenient, is convenient for realize the installation and the dismantlement of mask version on the grip block.

Preferably, a second cavity is arranged on the cleaning box; a chute is arranged on the outer side wall of the top plate, and one end of the top plate is provided with a first motor; the output end of the first motor is fixedly connected with a screw rod extending into the chute; the outside of the screw rod is sleeved with a sliding block which is in sliding fit with the inner side wall of the sliding groove; the sliding block is in threaded transmission fit with the screw rod; the end part of the connecting plate, which is far away from the backing plate, is fixedly connected with the sliding block.

Through adopting above-mentioned technical scheme, let in the clear water to the second cavity, after the mask version is washd through the treatment fluid, drive roof and mask version through the electricity push rod and upwards move to wasing the case top, start first motor and drive the lead screw and rotate for the slider passes through the connecting plate and drives the mask version and remove to the second cavity top, the rethread electricity push rod drives the mask version and move down to the second cavity in, makes clear water wash the remaining treatment fluid in mask version surface, and then makes the mask version keep clean.

Preferably, a second motor is arranged on the bottom surface of the cleaning box; the output end of the second motor is fixedly connected with a first rotating shaft which extends into the second cavity; and the outer side wall of the first rotating shaft is fixedly connected with a stirring plate.

Through adopting above-mentioned technical scheme, start the second motor after submerging the mask in the clear water in the second cavity, the second motor drives first pivot and stirring board and rotates, and stirring board rotates in-process and drives clear water and move to improve the cleaning performance of clear water to the mask, reduce the possibility that treatment fluid remained on the mask.

Preferably, a through hole is formed in the inner side wall of the bottom end of the first cavity; a sliding plate is connected to the inner side wall of the through hole in a sliding manner; the top end of the sliding plate extends into the first cavity, and an impact block capable of impacting the bottom surface of the baffle plate is fixedly connected to the end part of the sliding plate extending into the first cavity; the bottom surface of the cleaning box is fixedly connected with a concave shell positioned at the bottom of the through hole; the end part of the sliding plate, which is far away from the impact block, extends into the concave shell; an extrusion mechanism capable of extruding the slide plate to move upwards is arranged in the concave shell; a straight plate is fixedly connected to the side wall of the sliding plate; the top surface of the straight plate is connected with the bottom surface of the cleaning box through a first spring.

By adopting the technical scheme, when the extrusion mechanism extrudes the sliding plate to slide upwards and compress the first spring, the impact block at the top of the sliding plate impacts the bottom surface of the baffle plate, so that the baffle plate and the filter screen vibrate, and dirt adhered to the filter screen slides along the surface of the filter screen when the filter screen vibrates, thereby reducing the possibility of blocking the filter screen by the dirt; when the extrusion mechanism does not extrude the sliding plate, the straight plate drives the sliding plate to move downwards to the initial position under the action of the elastic force of the first spring, so that the extrusion mechanism can conveniently extrude the sliding plate in a reciprocating manner, and further, the impact block can conveniently impact the baffle in a reciprocating manner.

Preferably, the pressing mechanism comprises a push block; the pushing block is connected to the inner side wall of the concave shell in a sliding manner, the end face, close to the sliding plate, of the pushing block is connected with the inner side wall of the concave shell through a second spring, and a round corner is arranged on the end face, close to the sliding plate, of the pushing block; the end part of the sliding plate extending into the concave shell is provided with an inclined plane which can be in contact fit with the round angle; the end part of the push block, which is far away from the second spring, extends out of the concave shell, and an arc surface is arranged on the end surface of the push block, which extends out of the concave shell; the bottom surface of the cleaning box is rotatably connected with a second rotating shaft; the cam capable of extruding the pushing block is fixedly connected to the outer side wall of the second rotating shaft; the cam is matched with the cambered surface; the first rotating shaft is fixedly connected with a first belt wheel on the outer side wall of the bottom of the cleaning box; the belt is sleeved outside the first belt pulley; a second belt wheel is fixedly connected to the outer side wall of the second rotating shaft; the end part of the belt, which is far away from the first belt wheel, is sleeved outside the second belt wheel, and the belt enables the first belt wheel and the second belt wheel to be linked.

By adopting the technical scheme, in the rotating process of the first rotating shaft, the first rotating shaft drives the second rotating shaft to rotate through the cooperation of the first belt pulley, the second belt pulley and the second belt pulley, the second rotating shaft contacts with the cambered surface on the side wall of the push block in the rotating process, the cam extrudes the push block to slide towards the direction of compressing the second spring through the cooperation of the cam and the cambered surface, and the push block extrudes the slide plate to slide upwards under the cooperation of the round angle and the inclined plane so as to promote the impact block to impact the baffle plate; when the cam and the pushing block lose contact, the pushing block slides back to the initial position under the action of the elastic force of the second spring, so that the cam can conveniently squeeze the pushing block again, and the impact block can conveniently impact the baffle plate in a reciprocating manner.

Preferably, a sealing ring tightly attached to the outer side wall of the sliding plate is fixedly connected to the inner side wall of the through hole.

Through adopting above-mentioned technical scheme, the setting of sealing washer makes through-hole department have good sealed effect for the slider is gliding in-process from top to bottom, and the difficult clearance that passes through between slide and the through-hole inside wall of treatment fluid flows, reduces the possibility that the treatment fluid takes place to leak.

Preferably, an ultrasonic generating device is arranged on the outer side wall of the cleaning box.

Through adopting above-mentioned technical scheme, when wasing the mask version, ultrasonic wave generating device is through wasing the lateral wall of case with ultrasonic wave radiation to the treatment fluid in the first cavity, and the microbubble in the treatment fluid keeps vibrating under the acoustic wave effect, promotes rete and filth to drop from the mask version surface, promotes the cleaning performance of treatment fluid to the mask version.

The cleaning process for the electrode machining is based on the pre-cleaning equipment for the electrode machining, and comprises the following steps of:

s1: fixing and clamping the mask plate: clamping the mask to be cleaned through the clamping block, so that the mask is kept stable in the cleaning process;

s2: cleaning a film layer: immersing the mask plate in the treatment liquid for immersion cleaning, and spraying the treatment liquid to the mask plate through a spray head for shower-spraying and flushing;

s3: cleaning treatment fluid: immersing the mask plate cleaned by the treatment liquid in clear water, and removing the residual treatment liquid on the surface of the mask plate.

In summary, the present application has the following beneficial effects:

1. the mask is clamped and fixed through the clamping block, the top plate and the mask are driven to move downwards through the electric push rod, so that the mask is immersed in the treatment liquid, the film layer on the surface of the mask is promoted to be dissolved and fall off, when the mask is moved out of the solution, the treatment liquid is sprayed on the mask through the spray head through the pump body, so that the mask is subjected to spray treatment, the cleaning work of the mask is realized through a mode of combining soaking and spray flushing, the cleaning effect of the mask is optimized, dirt and impurities suspended in the treatment liquid in the soaking process are not easy to be attached to the mask again to cause secondary pollution, and the cleanliness of the mask after the mask is ensured;

2. the mask plate is immersed in clear water in the second cavity, and the residual treatment liquid on the surface of the mask plate is cleaned, so that the residual treatment liquid on the surface of the mask plate is not easy to damage the mask plate; when the mask plate is immersed in clear water, the second motor is started to drive the first rotating shaft and the stirring plate to rotate, and the clear water is driven to move in the rotation process of the stirring plate, so that the cleaning effect of the clear water on the mask plate is improved;

3. the first rotating shaft rotates to drive the second rotating shaft and the cam to rotate, the cam drives the pushing block to extrude the sliding plate to move upwards in the rotating process, so that the impact block at the top of the sliding plate impacts the bottom surface of the baffle, the baffle and the filter screen are driven to vibrate, dirt adhered on the filter screen is driven to slide onto the baffle along the surface of the filter screen, the possibility that the filter screen is blocked is reduced, the frequency of cleaning the filter screen is further reduced, and the working efficiency of cleaning work is improved.

Drawings

FIG. 1 is a schematic view of a pre-cleaning apparatus for electrode processing;

FIG. 2 is a schematic illustration of the mating structure of the top plate, slider and clamping assembly of the present application;

FIG. 3 is a schematic cross-sectional view of the purge bin of the present application;

fig. 4 is an enlarged view at a in fig. 3;

fig. 5 is a schematic view of the mating structure of the concave shell, push block, slide plate and strike block of the present application.

Reference numerals: 1. a cleaning box; 11. a first cavity; 111. a through hole; 112. a seal ring; 12. a baffle; 121. an opening; 13. a filter screen; 14. a second cavity; 15. a second motor; 151. a first rotating shaft; 152. a stirring plate; 16. a slide plate; 161. an impact block; 162. a straight plate; 163. a first spring; 164. an inclined plane; 17. a concave shell; 18. an ultrasonic wave generating device; 2. a shower nozzle; 21. a spray head; 3. a top plate; 31. an electric push rod; 32. a chute; 33. a first motor; 34. a screw rod; 35. a slide block; 4. a connecting plate; 41. a backing plate; 5. a clamping assembly; 51. a clamping block; 511. a slot; 512. a threaded through hole; 52. a fastening screw; 6. an infusion mechanism; 61. a pump body; 62. a liquid inlet pipe; 63. a liquid outlet pipe; 7. an extrusion mechanism; 71. a pushing block; 711. a second spring; 712. round corners; 713. a cambered surface; 72. a second rotating shaft; 721. a cam; 73. a first pulley; 74. a belt; 75. and a second pulley.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings. Wherein like parts are designated by like reference numerals. It should be noted that the words "front", "back", "left", "right", "upper", "lower", "bottom" and "top" used in the following description refer to directions in the drawings, and the words "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.

The invention discloses pre-cleaning equipment for electrode processing, which is shown in fig. 1 and 2, and comprises a cleaning box 1, a pair of electric push rods 31, a top plate 3, a first motor 33 and a pair of clamping assemblies 5 capable of fixing a mask; the pair of electric push rods 31 are fixedly connected to two side walls of the top surface of the cleaning box 1, which are mutually far away, the top plate 3 is fixedly connected to the output ends of the pair of electric push rods 31, and the outer side wall of the top plate 3 is provided with a sliding groove 32; the first motor 33 is arranged on the outer side wall of one end of the top plate 3, a screw rod 34 extending into the sliding groove 32 is fixedly connected to the output end of the first motor 33, the screw rod 34 is in running fit with the inner side wall of the sliding groove 32, a sliding block 35 in sliding fit with the inner side wall of the sliding groove 32 is sleeved on the outer side wall of the screw rod 34, and the sliding block 35 is in threaded transmission fit with the screw rod 34; a connecting plate 4 positioned outside the top plate 3 is fixedly connected to the side wall of the slide block 35, and a backing plate 41 is fixedly connected to the end part of the connecting plate 4 away from the slide block 35; the pair of clamping assemblies 5 are arranged at the bottom of the backing plate 41, the clamping assemblies 5 comprise clamping blocks 51 and fastening screws 52, the clamping blocks 51 are fixedly connected to the bottom surface of the backing plate 41, slots 511 are formed in the bottom surface of the clamping blocks 51, threaded through holes 512 are formed in the inner side walls of the slots 511, and the fastening screws 52 are connected to the inner side walls of the threaded through holes 512 in a threaded mode; the top surface of the cleaning tank 1 is provided with a first cavity 11 for containing the treatment liquid and a second cavity 14 for containing the clean water in sequence along the moving direction of the slide block 35.

When the mask is cleaned, the mask to be cleaned is inserted into the slot 511 on the bottom surface of the pair of clamping blocks 51, the clamping screw 52 clamps the mask by rotating the clamping screw 52, so that the clamping block 51 clamps and fixes the mask, then the top plate 3 and the mask are driven to move downwards by starting the electric push rod 31, the mask is immersed in the treatment liquid, and the film layer and dirt deposited on the surface of the mask are caused to fall off by the treatment liquid; after the mask plate is cleaned by the treatment liquid, the electric push rod 31 drives the top plate 3 and the mask plate to move up to the top of the cleaning box 1, the first motor 33 drives the screw rod 34 to rotate, the sliding block 35 drives the mask plate to move to the top of the second cavity 14, then the electric push rod 31 drives the top plate 3 and the mask plate to move downwards, the mask plate is immersed in clean water to remove the treatment liquid remained on the surface, and then the cleaning work of the mask plate is completed.

As shown in fig. 1 and 3, a shower pipe 2 in a shape of a loop is fixedly connected to the inner side wall of the first cavity 11 close to the top surface, a plurality of spray heads 21 communicated with the inside of the shower pipe 2 are fixedly connected to the outer side wall of the shower pipe 2, and the spray heads 21 incline towards the inner side wall of the bottom end of the first cavity 11; a baffle 12 which is obliquely arranged is fixedly connected on the inner side wall of the first cavity 11 close to the bottom; an opening 121 is arranged in the center of the top surface of the baffle 12, and a filter screen 13 for filtering dirt is fixedly connected to the inner side wall of the opening 121; an infusion mechanism 6 capable of conveying the treatment liquid to the shower pipe 2 is arranged on the outer side wall of the cleaning box 1; the infusion mechanism 6 comprises a pump body 61, a liquid inlet pipe 62 and a liquid outlet pipe 63; the pump body 61 is arranged on the outer side wall of the cleaning tank 1; the liquid inlet pipe 62 is fixedly connected to the input end of the pump body 61, and the end part of the liquid inlet pipe 62, which is far away from the pump body 61, penetrates through the side wall of the cleaning box 1 and the baffle 12 and then extends to the bottom of the baffle 12; the liquid outlet pipe 63 is fixedly connected to the output end of the pump body 61, the end part of the liquid outlet pipe 63, which is far away from the pump body 61, is fixedly connected to the side wall of the shower pipe 2, and the liquid outlet pipe 63 is communicated with the inside of the shower pipe 2; an ultrasonic wave generating device 18 capable of emitting ultrasonic waves into the first cavity 11 is arranged on the outer side wall of the cleaning tank 1.

When the mask is immersed in the treatment liquid to clean the film, the ultrasonic generating device 18 is started to radiate ultrasonic into the treatment liquid, microbubbles in the treatment liquid keep vibrating under the action of sound waves, so that the treatment liquid can clean the film and dirt on the surface of the mask better, the cleaning effect of the treatment liquid on the mask is improved; the filter screen 13 is used for filtering dirt falling off from the mask plate, so that the dirt is not easy to enter the liquid inlet pipe 62, and the shower-spray flushing effect is ensured.

As shown in fig. 3, the bottom surface of the cleaning tank 1 is provided with a second motor 15 positioned at the bottom of the second cavity 14, the output end of the second motor 15 is fixedly connected with a first rotating shaft 151 extending into the second cavity 14, and the outer side wall of the first rotating shaft 151 positioned in the second cavity 14 is fixedly connected with a pair of stirring plates 152.

When the mask is immersed in the clear water in the second cavity 14 for cleaning, the second motor 15 is started to drive the first rotating shaft 151 and the stirring plate 152 to rotate, the clear water is driven to flow through the stirring effect of the stirring plate 152, so that the clear water can clean the mask better, the cleaning effect of residual treatment fluid on the surface of the mask is improved, and the possibility that the treatment fluid is remained on the mask is reduced.

As shown in fig. 3, 4 and 5, a through hole 111 is formed in the inner side wall of the bottom end of the first cavity 11, and a sliding plate 16 is slidably connected to the inner side wall of the through hole 111; a sealing ring 112 tightly attached to the outer side wall of the sliding plate 16 is fixedly connected to the inner side wall of the through hole 111, the top end of the sliding plate 16 extends into the first cavity 11, an impact block 161 capable of impacting the bottom surface of the baffle plate 12 is fixedly connected to the top end of the sliding plate 16, and a concave shell 17 capable of being horizontally arranged at the bottom of the through hole 111 is fixedly connected to the bottom surface of the cleaning box 1; the end part of the sliding plate 16 far away from the impact block 161 penetrates through the top side wall of the concave shell 17 and extends into the concave shell 17, a straight plate 162 is fixedly connected to the outer side wall of the sliding plate 16, which is positioned at the outer bottom of the cleaning box 1, a pair of first springs 163 positioned at two sides of the sliding plate 16 are fixedly connected to the top surface of the straight plate 162, the end part of the first springs 163 far away from the straight plate 162 is fixedly connected with the bottom surface of the cleaning box 1, and an extrusion mechanism 7 which is driven by a first rotating shaft 151 and can extrude the sliding plate 16 to move upwards is arranged in the concave shell 17.

The first rotating shaft 151 can drive the extrusion mechanism 7 to push the sliding plate 16 to move upwards in the rotating process, and the sliding plate 16 drives the impact block 161 to impact the bottom of the baffle 12 when moving upwards, so that the baffle 12 and the filter screen 13 vibrate, dirt adhered to the surface of the filter screen 13 is driven to slide onto the baffle 12 along the surface of the filter screen 13, and the possibility that the meshes of the filter screen 13 are blocked by the dirt is reduced; when the pressing mechanism 7 loses the pressing effect on the slide plate 16, the slide plate 16 returns to the initial position under the action of the elastic force of the first spring 163, so that the impact block 161 can impact the baffle plate 12 again.

As shown in fig. 3, 4 and 5, the pressing mechanism 7 includes a push block 71, a second rotating shaft 72, a first pulley 73, a second pulley 75 and a belt 74; the end face of the push block 71, which is close to the sliding plate 16, is fixedly connected with a second spring 711, the end part of the second spring 711, which is far away from the push block 71, is fixedly connected with the inner side wall of the concave shell 17, and the side wall of the end face of the push block 71, which is close to the sliding plate 16, is provided with a round angle 712; the end of the sliding plate 16 extending into the concave shell 17 is provided with an inclined plane 164 matched with the round angle 712, the end of the push block 71 away from the second spring 711 extends out of the concave shell 17, and the end of the push block 71 extending out of the concave shell 17 is provided with an arc surface 713; the second rotating shaft 72 is rotatably connected to the bottom surface of the cleaning box 1, a cam 721 capable of extruding the push block 71 is fixedly connected to the outer side wall of the second rotating shaft 72, and the end part of the cam 721 far away from the second rotating shaft 72 is matched with the cambered surface 713; the first belt pulley 73 is fixedly connected to the outer side wall of the first rotating shaft 151 positioned at the bottom of the cleaning box 1, the second belt pulley 75 is fixedly connected to the outer side wall of the second rotating shaft 72, the belt 74 is sleeved outside the first belt pulley 73 and the second belt pulley 75, and the belt 74 enables the first belt pulley 73 and the second belt pulley 75 to be linked.

Under the transmission action of the first belt pulley 73, the second belt pulley 75 and the belt 74, the first rotating shaft 151 drives the second rotating shaft 72 and the cam 721 to rotate in the rotating process, the push block 71 is driven to move towards the direction of compressing the second spring 711 under the cooperation of the cam 721 and the cambered surface 713, and the push block 71 is driven to press the sliding plate 16 to move upwards under the cooperation of the round angle 712 and the inclined surface 164; when the cam 721 and the push block 71 lose contact, the push block 71 slides back to the initial position under the action of the elastic force of the second spring 711, so that the cam 721 is convenient to squeeze the push block 71 again, and therefore the impact block 161 at the top of the sliding plate 16 performs reciprocating impact operation on the bottom of the baffle 12 in the rotation process of the first rotating shaft 151, and the meshes of the filter screen 13 are kept smooth.

A cleaning process for electrode processing, the cleaning process comprising the steps of:

s1: fixing and clamping the mask plate: inserting the mask plate into a slot 511 at the bottom of a clamping block 51, and locking and fixing the mask plate to be cleaned by rotating a fastening screw 52, so that the mask plate is kept stable in the cleaning process;

s2: cleaning a film layer: the electric push rod 31 is started to drive the top plate 3 and the mask plate to move downwards, so that the mask plate is immersed in the treatment liquid in the first cavity 11, the ultrasonic generating device 18 is started to enable the treatment liquid to dissolve and remove a film layer on the surface of the mask plate, when the mask plate is moved out of the treatment liquid, the pump body 61 is started to convey the treatment liquid into the spraying pipe 2, so that the treatment liquid is sprayed onto the mask plate through the spray head 21, spraying and flushing of the mask plate are realized, and the possibility that dirt and impurities are attached to the mask plate again is reduced;

s3: cleaning treatment fluid: the first motor 33 is started to drive the screw rod 34 to rotate, the sliding block 35 drives the connecting plate 4 and the backing plate 41 to move to the top of the second cavity 14, the electric push rod 31 drives the top plate 3 and the mask plate to move downwards, the mask plate is immersed in clean water in the second cavity 14, and therefore cleaning of mask plate surface treatment liquid is achieved, damage caused by excessive residual treatment liquid on the mask plate is avoided, and then the cleaned mask plate is taken down from the clamping block 51.

Working principle: when the mask is cleaned, the mask is inserted into the slot 511 at the bottom of the clamping block 51, the fastening screw 52 is rotated to fix the mask, so that the mask is kept stable at the bottom of the clamping block 51, then the electric push rod 31 is started to drive the top plate 3 to move downwards, the mask at the bottom of the clamping block 51 is immersed in the treatment liquid in the first cavity 11, the film layer on the surface of the mask is cleaned through the treatment liquid, and the film layer is promoted to fall off; the ultrasonic generating device 18 arranged on the outer side wall of the cleaning box 1 is started in the cleaning process, and microbubbles in the treatment fluid vibrate under the action of sound waves, so that the cleaning effect of the treatment fluid on the mask surface film layer is improved;

the electric push rod 31 is started to drive the top plate 3 and the mask plate to move upwards, so that the mask plate is gradually moved out of the treatment liquid, the pump body 61 is started to convey the treatment liquid into the shower pipe 2 through the liquid inlet pipe 62 and the liquid outlet pipe 63, the treatment liquid is sprayed to the outside of the mask plate through the spray head 21 to shower and clean the mask plate, and dirt falling off from the mask plate is not easy to adhere to the mask plate again to cause secondary pollution to the mask plate; the filter screen 13 filters the cleaning sucked by the liquid inlet pipe 62, reduces the possibility that dirt enters the shower pipe 2, and ensures the cleaning effect of the shower work on the mask;

when the mask is moved out of the treatment liquid, the first motor 33 is started to drive the screw rod 34 to rotate, so that the slide block 35 drives the connecting plate 4 and the backing plate 41 to move to the top of the second cavity 14, and the electric push rod 31 drives the top plate 3 and the mask to move downwards, so that the mask is immersed in clean water in the second cavity 14, and the residual treatment liquid on the surface of the mask is cleaned; when the mask is immersed in clear water, the second motor 15 is started to drive the first rotating shaft 151 and the stirring plate 152 to rotate, and the clear water is driven to move in the rotating process of the stirring plate 152, so that the cleaning effect of the clear water on the mask is improved;

the first rotating shaft 151 drives the second rotating shaft 72 and the cam 721 to rotate through the transmission action of the first belt pulley 73, the second belt pulley 75 and the belt 74 in the rotating process, the cam 721 presses the push block 71 to slide towards the direction of compressing the second spring 711 through the cooperation of the cam 721 and the cambered surface 713 in the rotating process of the cam 721, the push block 71 presses the slide plate 16 to move upwards under the cooperation of the round angle 712 and the inclined surface 164, the impact block 161 at the top of the slide plate 16 impacts the bottom surface of the baffle plate 12, the baffle plate 12 and the filter screen 13 are caused to vibrate, dirt adhered on the filter screen 13 is further caused to slide onto the baffle plate 12 along the surface of the filter screen 13, and the possibility that the filter screen 13 is blocked is reduced;

when the cam 721 gradually loses the pressing effect on the push block 71, the push block 71 is restored under the elastic force of the second spring 711, and the slide plate 16 is restored to the initial position under the elastic force of the first spring 163, so that the cam 721 is facilitated to press the push block 71 again, so that the impact block 161 can perform reciprocating impact on the barrier 12.

The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims (10)

1. The utility model provides an electrode processing is with pre-cleaning equipment which characterized in that: comprises a cleaning box (1); a first cavity (11) for containing the treatment fluid is arranged on the cleaning box (1); the inner side wall, close to the top surface, of the first cavity (11) is fixedly connected with a shower pipe (2); a spray head (21) communicated with the inside of the spray pipe (2) is fixedly connected to the outer side wall of the spray pipe (2); a top plate (3) is arranged at the top of the cleaning box (1); an electric push rod (31) is arranged on the bottom surface of the top plate (3); the electric push rod (31) is arranged on the top surface of the cleaning box (1), and the output end of the electric push rod (31) is connected with the bottom surface of the top plate (3); a connecting plate (4) is connected to the side wall of the top plate (3); the end part of the connecting plate (4) far away from the top plate (3) is fixedly connected with a base plate (41) which can extend into the first cavity (11); the bottom surface of the backing plate (41) is provided with a clamping assembly (5) capable of fixing the mask; the outer side wall of the cleaning box (1) is provided with an infusion mechanism (6) which can convey the treatment liquid in the first cavity (11) into the shower pipe (2).

2. The pre-cleaning apparatus for electrode processing according to claim 1, wherein: a baffle plate (12) is fixedly connected to the inner side wall of the first cavity (11); an opening (121) is formed in the baffle plate (12); a filter screen (13) is fixedly connected to the inner side wall of the opening (121); the infusion mechanism (6) comprises a pump body (61); the pump body (61) is arranged on the outer side wall of the cleaning box (1), the input end of the pump body (61) is fixedly connected with a liquid inlet pipe (62), and the output end of the pump body (61) is fixedly connected with a liquid outlet pipe (63); the end part of the liquid inlet pipe (62) far away from the pump body (61) penetrates through the side wall of the cleaning box (1) and the baffle plate (12) and then extends to the bottom of the baffle plate (12); the end part of the liquid outlet pipe (63) far away from the pump body (61) is communicated with the inside of the shower pipe (2).

3. The pre-cleaning apparatus for electrode processing according to claim 1, wherein: the clamping assembly (5) comprises a clamping block (51); the clamping block (51) is fixedly connected to the bottom surface of the base plate (41), and a slot (511) is formed in the bottom surface of the clamping block (51); the inner side wall of the slot (511) is provided with a threaded through hole (512); the inner side wall of the threaded through hole (512) is connected with a fastening screw (52) in a threaded manner.

4. The pre-cleaning apparatus for electrode processing according to claim 2, wherein: a second cavity (14) is arranged on the cleaning box (1); a chute (32) is formed in the outer side wall of the top plate (3), and a first motor (33) is arranged at one end of the top plate (3); the output end of the first motor (33) is fixedly connected with a screw rod (34) extending into the chute (32); a sliding block (35) which is in sliding fit with the inner side wall of the sliding groove (32) is sleeved outside the screw rod (34); the sliding block (35) is in threaded transmission fit with the screw rod (34); the end part of the connecting plate (4) far away from the backing plate (41) is fixedly connected with the sliding block (35).

5. The pre-cleaning apparatus for electrode processing according to claim 4, wherein: a second motor (15) is arranged on the bottom surface of the cleaning box (1); the output end of the second motor (15) is fixedly connected with a first rotating shaft (151) extending into the second cavity (14); and a stirring plate (152) is fixedly connected to the outer side wall of the first rotating shaft (151).

6. The pre-cleaning apparatus for electrode processing according to claim 5, wherein: a through hole (111) is formed in the inner side wall of the bottom end of the first cavity (11); a sliding plate (16) is connected to the inner side wall of the through hole (111) in a sliding manner; the top end of the sliding plate (16) extends into the first cavity (11), and an impact block (161) capable of impacting the bottom surface of the baffle plate (12) is fixedly connected to the end part of the sliding plate (16) extending into the first cavity (11); the bottom surface of the cleaning box (1) is fixedly connected with a concave shell (17) positioned at the bottom of the through hole (111); the end part of the sliding plate (16) far away from the impact block (161) extends into the concave shell (17); an extrusion mechanism (7) capable of extruding the sliding plate (16) to move upwards is arranged in the concave shell (17); a straight plate (162) is fixedly connected to the side wall of the sliding plate (16); the top surface of the straight plate (162) is connected with the bottom surface of the cleaning box (1) through a first spring (163).

7. The pre-cleaning apparatus for electrode processing according to claim 6, wherein: the extrusion mechanism (7) comprises a push block (71); the pushing block (71) is slidably connected to the inner side wall of the concave shell (17), the end face, close to the sliding plate (16), of the pushing block (71) is connected with the inner side wall of the concave shell (17) through a second spring (711), and a round corner (712) is arranged on the end face, close to the sliding plate (16), of the pushing block (71); the end part of the sliding plate (16) extending into the concave shell (17) is provided with an inclined surface (164) which can be in contact fit with the round angle (712); the end part of the push block (71) far away from the second spring (711) extends out of the concave shell (17), and an arc surface (713) is arranged on the end surface of the push block (71) extending out of the concave shell (17); the bottom surface of the cleaning box (1) is rotatably connected with a second rotating shaft (72); a cam (721) capable of extruding the pushing block (71) is fixedly connected to the outer side wall of the second rotating shaft (72); the cam (721) is matched with the cambered surface (713); the first rotating shaft (151) is positioned on the outer side wall of the bottom of the cleaning box (1) and fixedly connected with a first belt wheel (73); a belt (74) is sleeved outside the first belt wheel (73); a second belt wheel (75) is fixedly connected to the outer side wall of the second rotating shaft (72); the end part of the belt (74) far away from the first belt pulley (73) is sleeved outside the second belt pulley (75), and the belt (74) enables the first belt pulley (73) to be in linkage with the second belt pulley (75).

8. The pre-cleaning apparatus for electrode processing according to claim 6, wherein: and a sealing ring (112) tightly attached to the outer side wall of the sliding plate (16) is fixedly connected to the inner side wall of the through hole (111).

9. The pre-cleaning apparatus for electrode processing according to claim 1, wherein: an ultrasonic generating device (18) is arranged on the outer side wall of the cleaning box (1).

10. A cleaning process for electrode processing based on a pre-cleaning apparatus for electrode processing according to any one of claims 1 to 9, characterized in that: the cleaning process comprises the following steps:

s1: fixing and clamping the mask plate: clamping the mask to be cleaned through a clamping block (51) so that the mask is kept stable in the cleaning process;

s2: cleaning a film layer: immersing the mask plate in a first treatment liquid for immersion cleaning, and spraying the treatment liquid through a spray head (21) to spray and wash the mask plate;

s3: cleaning treatment fluid: immersing the mask plate cleaned by the treatment liquid in clear water, and removing the residual treatment liquid on the surface of the mask plate.

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