CN116191809A - Array voice coil motor suitable for uniformity correction - Google Patents
Array voice coil motor suitable for uniformity correction Download PDFInfo
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- CN116191809A CN116191809A CN202211099270.3A CN202211099270A CN116191809A CN 116191809 A CN116191809 A CN 116191809A CN 202211099270 A CN202211099270 A CN 202211099270A CN 116191809 A CN116191809 A CN 116191809A
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- 238000001816 cooling Methods 0.000 claims description 10
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 9
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 5
- 102200116209 rs387906935 Human genes 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 description 18
- 239000010959 steel Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 16
- 238000004804 winding Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000007664 blowing Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/22—Optical devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/64—Electric machine technologies in electromobility
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- Microelectronics & Electronic Packaging (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
An array type voice coil motor suitable for uniformity correction, comprising: a permanent magnet assembly, a coil assembly, and a rail assembly; the permanent magnet assembly includes: the magnetic yoke, the top fixing plate, the bottom fixing plate, the edge permanent magnets and a plurality of middle permanent magnets; the magnetic yoke is arranged opposite to the two end parts of the top fixing plate and the bottom fixing plate; the edge permanent magnet is arranged opposite to the inner side of the magnetic yoke; the plurality of middle permanent magnets are arranged between the top fixing plate and the bottom fixing plate at intervals; the coil assembly comprises a plurality of coils and a plurality of coil brackets; the top fixing plate and the bottom fixing plate are respectively provided with a through hole for the coil to penetrate through, so that the middle permanent magnet is multiplexed between the adjacent coils; the guide rail component comprises a guide rail fixing bracket, and further comprises a sliding block, a guide rail and a guide rail bracket which are matched with the coil bracket; the coil moves relative to the middle permanent magnet under the condition of electrifying and drives the coil bracket, the guide rail bracket and the guide rail to slide relative to the sliding block. The array voice coil motor has the characteristics of compact structure and small volume.
Description
Technical Field
The invention relates to the technical field of motors, in particular to an array voice coil motor suitable for uniformity correction.
Background
The array voice coil motor is a key component in the uniformity correction assembly, and mainly drives a plurality of correction fingers to extend into or withdraw from the edge of the illumination light field, and shields the edge light rays of the correction fingers, so that the purpose of correcting the illumination uniformity is realized. The uniformity correction assembly comprises 58 correction fingers which are divided into an upper group and a lower group, and 29 correction fingers are respectively driven by 29 groups of voice coil motor arrays to meet the motion requirements of the correction fingers. At present, the thinnest of a single commercial voice coil motor is 15mm, the design space constraint is greatly exceeded, and how to design an array voice coil motor with multi-axis motion, compact structure and small volume is a key technical point that the array voice coil motor meets the requirement of a uniformity correction assembly.
Disclosure of Invention
To array voice coil motor's space constraint problem among the homogeneity correction assembly, this application provides an array voice coil motor suitable for homogeneity correction, and this array voice coil motor has multiaxis motion, compact structure, small's characteristics.
The invention adopts the following technical scheme:
the invention provides an array voice coil motor suitable for uniformity correction, comprising: a permanent magnet assembly, a coil assembly, and a rail assembly;
the permanent magnet assembly includes: the magnetic yoke, the top fixing plate, the bottom fixing plate, the edge permanent magnets and a plurality of middle permanent magnets;
the magnetic yoke is arranged opposite to the two end parts of the top fixing plate and the bottom fixing plate, is fixedly connected with the top fixing plate and the bottom fixing plate respectively and is used for supporting the top fixing plate and the bottom fixing plate;
the edge permanent magnet is arranged opposite to the inner side of the magnetic yoke and is fixedly connected with the magnetic yoke;
the plurality of middle permanent magnets are arranged between the top fixed bottom and the bottom fixed plate at intervals and positioned between the edge permanent magnets at the two ends;
the coil assembly comprises a plurality of coils and a plurality of coil brackets, and the coils are fixedly connected with the coil brackets;
through holes for the coils to penetrate through are respectively formed between the top fixing plate and the bottom fixing plate and between the middle permanent magnet and the edge permanent magnet which are opposite to the adjacent middle permanent magnets, so that the middle permanent magnets are multiplexed between the adjacent coils;
the guide rail assembly comprises a guide rail fixing bracket, and further comprises a sliding block, a guide rail and a guide rail bracket which are matched with the coil bracket; the coil support is fixedly connected with the guide rail through the guide rail support, and the sliding block is fixedly connected with the magnetic yoke of the permanent magnet assembly through the guide rail fixing support; the coil moves relative to the middle permanent magnet under the condition of electrifying and drives the coil support, the guide rail support and the guide rail to slide relative to the sliding block.
Further preferably, the coaxial air gap in the permanent magnet assembly at least comprises two sequences of magnets with opposite polarities, and the polarities of the magnets in the same sequence face the same direction.
Further preferably, at most P-1 coils are arranged in the coaxial air gap, wherein P is the number of magnet sequences in the coaxial air gap, and P is more than or equal to 2.
Further preferably, the thickness of the middle permanent magnet is 1mm-3mm, the thickness of the edge permanent magnet is 3 times that of the middle permanent magnet, the length of an air gap between adjacent middle permanent magnets is the sum of the thickness of a coil and a unilateral movement adjusting gap of the coil, and the unilateral movement adjusting gap is 0.2mm-0.8mm.
Further preferably, the edge permanent magnet and the middle permanent magnet are respectively higher than a high brand number N52M in the NdFeB M series or higher than a high brand number N50H in the NdFeB H series.
Further preferably, the top fixing plate and the bottom fixing plate are respectively provided with limiting grooves between two ends corresponding to the middle permanent magnets, and the middle permanent magnets are respectively limited between the top fixing plate and the bottom fixing plate through the limiting grooves.
Further preferably, the limit groove is in a V-shaped structure.
Further preferably, the thickness of the coil is 0.8mm to 1.5mm.
Further preferably, the device further comprises a grating component and a grating ruler signal lumped board;
the grating assembly comprises a reading head fixing bracket, and further comprises a grating ruler matched with the coil, a grating ruler fixing bracket, a reading head and a reading head welding plate;
the reading head fixing support is fixedly connected with the magnetic yoke of the permanent magnet assembly through the guide rail fixing support, and the grating ruler signal lumped plate is fixedly connected with the reading head fixing support;
the grating ruler is connected and fixed on the guide rail through a grating ruler fixing support and moves along with the guide rail, the reading head is welded on the reading head welding plate relative to the grating ruler, the reading head welding plate is fixedly connected on the reading head fixing support, and feedback signals of the reading head are summarized to the grating ruler signal lumped plate through a flexible cable.
Further preferably, the coil support further comprises a power line lumped board, wherein the power line lumped board is located below the bottom fixed board, and the power line lumped board is connected with the coil support through a flexible cable.
Further preferably, the coil cooling device further comprises a cooling mechanism, wherein the cooling mechanism is arranged perpendicular to the movement direction of the coil and is used for radiating heat of the coil.
According to the array type voice coil motor of the embodiment, the intermediate permanent magnets are multiplexed between the adjacent coils, so that the design space of the array type voice coil motor is greatly saved, and the array type voice coil motor has the advantages of compact structure, small volume, simple process and easiness in implementation.
Furthermore, the array voice coil motor is high in magnetic steel consumption and distributed in a smaller space range, in order to prevent the magnetic steel from demagnetizing in the assembly process or the motor operation, the magnetic steel is high in coercivity, the high coercivity magnetic steel has strong demagnetizing resistance, and meanwhile, in order to enable the motor to output high moment performance, the remanence and magnetic energy product of the magnetic steel are as large as possible, so that the magnetic steel in the application adopts the NdFeB N52M mark.
Drawings
FIG. 1 is a schematic diagram of an array voice coil motor;
FIG. 2 is a schematic illustration of a permanent magnet assembly;
FIG. 3 is a cross-sectional view of FIG. 2;
FIG. 4 is a schematic diagram of the cooperation of the middle permanent magnet and the V-shaped limiting groove;
FIG. 5 is a schematic diagram of two sequences of magnets with coaxial air gaps;
FIG. 6 is a schematic diagram of two sequences of magnets in use with a single coil;
FIG. 7 is a schematic of a coaxial air gap three sequence magnet;
FIG. 8 is a schematic diagram of a three-sequence magnet in use with two coils;
FIG. 9 is a schematic diagram of a coaxial air gap four sequence magnet;
FIG. 10 is a schematic diagram of a four-sequence magnet in use with a three-coil;
FIG. 11 is a schematic diagram of a coaxial air gap multi-sequence magnet;
FIG. 12 is a schematic diagram of a multi-sequence magnet in use with multiple coils;
FIG. 13 is a schematic diagram showing the connection of two coils when the winding directions of two adjacent coils are opposite;
FIG. 14 is a schematic diagram showing a connection mode of two coils when the winding directions of two adjacent coils are the same;
FIG. 15 is a schematic diagram of an array voice coil motor magnet polarity arrangement;
FIG. 16 is a schematic diagram of a magnetic circuit structure of an array voice coil motor;
FIG. 17 is a schematic diagram of a multiplexed magnet for two adjacent voice coil motors in an array voice coil motor;
FIG. 18 is a schematic diagram of the mating structure of the coil assembly and the rail assembly;
fig. 19 is a schematic diagram of heat dissipation of an array voice coil motor.
Detailed Description
The invention will be described in further detail below with reference to the drawings by means of specific embodiments.
The application provides an array voice coil motor suitable for homogeneity is rectified, and its structure is as shown in fig. 1 and 2, includes: permanent magnet assembly 100, coil assembly 200, and rail assembly 300.
As shown in fig. 2 and 3, the permanent magnet assembly 100 includes a yoke 101, a top fixing plate 102, a bottom fixing plate 103, an edge permanent magnet 104, and a number of intermediate permanent magnets 105.
The yoke 101 is disposed opposite to both end portions of the top and bottom fixing plates 102 and 103 and fixedly connected to the top and bottom fixing plates 102 and 103, respectively, for supporting the top and bottom fixing plates 102 and 103. The edge permanent magnet 104 is disposed opposite to the inner side of the yoke 101 and fixedly connected to the yoke 101, for example, the edge permanent magnet 104 is directly connected to the yoke 101 by gluing. A plurality of intermediate permanent magnets 105 are arranged between the top fixing plate 102 and the bottom fixing plate 103 at intervals and are positioned between the edge permanent magnets 104 at the two ends.
Further, the top fixing plate 102 and the bottom fixing plate 103 are respectively provided with a limiting groove 106 between the two ends corresponding to each intermediate permanent magnet 105, and each intermediate permanent magnet 105 is respectively limited between the top fixing plate 102 and the bottom fixing plate 103 by each limiting groove 106. For example, the limiting groove 106 is in a V-shaped structure, two ends of the middle permanent magnet 105 are also in a V-shaped structure, the V-shaped structures at two ends of the middle permanent magnet 105 are respectively positioned in the corresponding V-shaped grooves of the top fixing plate 102 and the bottom fixing plate 103, the top fixing plate 102 and the bottom fixing plate 103 are fixed with the yokes 101 at two ends through screws, and the middle permanent magnet 105 is compressed.
The middle permanent magnet 105 and the limit groove 106 are matched and limited through a V-shaped structure, as shown in fig. 4, and the device has the following characteristics:
1. the installation matching position of the permanent magnet and the fixed plate is easy to form line contact, and the permanent magnet and the fixed plate are installed more tightly;
2. the middle permanent magnet can be firmly installed through V-shaped matching limit, the left side and the right side of the permanent magnet can be completely restrained, the permanent magnet cannot slide left and right in the air gap direction, and the consistency of the air gap size is ensured;
3. through V type cooperation is spacing, unilateral cell body structural strength is higher, and is more firm, non-deformable.
At least two sequences of magnets with different polarities are included in the coaxial air gap in the permanent magnet assembly 100, and the polarities of the magnets in the same sequence face the same direction, for example, the coaxial air gap includes P magnets with different polarities, and at most P-1 coils are arranged in the coaxial air gap, wherein P is equal to or greater than 2.
The number of magnet sequences included in the coaxial air gap and the number of coils provided are illustrated below.
As shown in fig. 5 and 6, two series of magnets are disposed in the coaxial air gap and cooperate with a single coil.
As shown in fig. 7 and 8, three sequential magnets are disposed in the coaxial air gap and cooperate with two coils.
As shown in fig. 9 and 10, four sequential magnets are disposed in the coaxial air gap and cooperate with three coils.
As shown in fig. 11 and 12, a multi-sequence magnet is disposed in the coaxial air gap and is used in conjunction with a plurality of coils.
As can be seen from the above-listed case of using multiple-sequence magnets with multiple coils, when the coaxial air-gap multi-piece permanent magnet sequence is used with coils, the constraint relationship between the permanent magnets and the coils is: when the permanent magnet sequence is P pieces, the number of the corresponding coil sequences is at most P-1, and P is more than or equal to 2.
Further, when a plurality of coils are arranged, the current direction constraint relation between the coils is that the current directions of any two adjacent coils are opposite (the current direction means clockwise circulation or anticlockwise circulation), and in order to ensure that the current directions between the two coils are opposite, the connection mode between the coils is as follows:
1) When the winding directions of two adjacent coils are opposite, the two coil terminals are connected end to end, as shown in fig. 13;
2) When the winding directions of two adjacent coils are the same, the two coil terminals are connected end to end, as shown in fig. 14.
In practical application, according to the characteristics of the array voice coil motor, the appropriate permanent magnet sequence and coil matching can be selected in combination with application requirements: in the same-layer air gap, (1) if the number of coils (including the number of turns or the number of coils) is unchanged and the number of permanent magnet sequences is increased, the torque performance output by the motor is not changed, and the stroke of a rotor of the motor coil is improved; (2) if the permanent magnet sequence is unchanged, the number of coils is increased, the thrust of the motor is increased, and the stroke is shortened; (3) if the permanent magnet sequence is unchanged and the number of turns of the coil is increased, the thrust of the motor is increased and the stroke is unchanged.
Preferably, the array voice coil motor of the present application employs two sequences of magnets, and the yoke 101 of the present application has a structure similar to an "i" shape for convenience and clarity in viewing the polarity of each sequence of magnets.
As shown in fig. 15, for example, the magnetic circuit structure of the array voice coil motor is shown in fig. 16, in which the magnets having two sequences of opposite polarities are arranged with the upper and lower sequences of magnets having opposite polarities.
The coil assembly 200 comprises a number of coils 201 and a number of coil supports 202, the coils 201 being fixedly connected to the coil supports 202, e.g. the coils 201 being connected to the coil supports 202 by means of glue joints. In order to reduce the space of the array voice coil motor, the application designs multiplexing magnets between adjacent coils 201, specifically, through holes for the coils to penetrate are respectively formed between the top fixing plate 102 and the bottom fixing plate 103 and between the middle permanent magnet 105 and the edge permanent magnet 104 which are opposite to each other, so that the middle permanent magnet 105 is multiplexed between the adjacent coils 210; the single voice coil motor is composed of two magnets with one coil sandwiched therebetween, so that two adjacent voice coil motors reuse one magnet, as shown in fig. 17, wherein the magnet a is both a left side permanent magnet of the voice coil motor 1 and a right side permanent magnet of the voice coil motor 2.
The guide rail assembly 300 comprises a guide rail fixing support 301, a sliding block 302 matched with the coil support 202, a guide rail 303 and a guide rail support 304, wherein the coil support 202 is fixedly connected with the guide rail 303 through the guide rail support 304, and the sliding block 302 is fixedly connected with the magnetic yoke 101 of the permanent magnet assembly 100 through the guide rail fixing support 301. The specific matching structure of the coil assembly 200 and the guide rail assembly 300 is shown in fig. 18, the coil 201 moves relative to the middle permanent magnet 105 under the condition of power on, and drives the coil bracket 202, the guide rail bracket 304 and the guide rail 303 to slide relative to the sliding block 302, and in the application, the guide rail 303 moves together with the coil 201, and the movement stroke is 12mm.
In the application, the thickness of the middle permanent magnet is 1mm-3mm, the thickness of the edge permanent magnet is 3 times of the thickness of the middle permanent magnet, the length of an air gap between adjacent middle permanent magnets is the sum of the thickness of a coil and the unilateral movement adjusting gap of the coil, the unilateral movement adjusting gap is 0.2mm-0.8mm, and the thickness of the coil is 0.8mm-1.5mm; for example, the thickness of the intermediate permanent magnet 105 is 1.7mm, the thickness of the edge permanent magnet 104 is 5.1mm, the thickness of the coil 201 is 1.3mm, the single-side movement adjustment gap is 0.5mm, and the length of the air gap between adjacent intermediate permanent magnets 105 is 2.3mm. Because the array voice coil motor of this application in magnet steel quantity more, and distribute in less space scope, in order to prevent that magnet steel from taking place the demagnetizing phenomenon in assembly process or motor operation, the magnet steel is to select for use high coercivity magnet steel, high coercivity magnet steel has stronger anti-demagnetizing ability, simultaneously for making the motor output higher moment performance, the remanence and the magnetic energy product of magnet steel need be as far as possible, so edge permanent magnet and middle permanent magnet in this application are respectively more than the high grade N52M in the neodymium iron boron M series, or more than the high grade N50H in the neodymium iron boron H series, for example, the magnet adopts neodymium iron boron N52M grade.
In this application, each set of motors moves independently, so each set of motors needs to be configured with a feedback system, specifically, the array voice coil motor of this application further includes a grating assembly 400 and a grating ruler signal lumped board 500, please continue to refer to fig. 18, the grating assembly 400 includes a reading head fixing support 401, and further includes a grating ruler 402, a grating ruler fixing support 403, a reading head 404, and a reading head welding board 405, which are matched with the coil 201; wherein, the reading head fixing support 401 is fixedly connected with the magnetic yoke 101 of the permanent magnet assembly 100 through the guide rail fixing support 301, and the grating ruler signal lumped plate 500 is fixedly connected with the reading head fixing support; the grating ruler 402 is connected and fixed on the guide rail 303 through the grating ruler fixing support 403, moves along with the guide rail 303, the reading head 404 is welded on the reading head welding plate 405 relative to the grating ruler 402, the reading head welding plate 405 is fixedly connected on the reading head fixing support 401, and feedback signals of the reading head 404 are collected on the grating ruler signal lumped board 500 through flexible cables.
In order to supply power to each coil 201, further, the array voice coil motor of the present application further includes a power line lumped board 600, the power line lumped board 600 is located below the bottom fixing board 103, the power line lumped board 600 is connected with the coil support 202 through a flexible cable, please continue to refer to fig. 18, the flexible cable (power line) is connected to the power line lumped board 600 of the motor from the end of the coil support 202, the power line lumped board 600 is located at the bottom of the motor, fixed with the permanent magnet assembly 100, and connected with the external interface boards of the uniformity correction assembly from both sides respectively using FPC cables.
Further, in order to dissipate heat of the coil 201, the array voice coil motor of the present application further includes a cooling mechanism 700, and the cooling mechanism 700 is disposed perpendicular to the moving direction of the coil 201, for dissipating heat of the coil 201. As shown in fig. 19, the front and rear sides of the array voice coil motor are provided with cooling means 700, for example, a gas cooling flange 701 is provided on one side, a gas blowing hole is provided on the gas cooling flange 701, cooling gas is blown into the coil winding of the array voice coil motor through the gas blowing hole, heat dissipation can be performed for the coil winding, and a gas collecting flange 702 is provided on the other side for collecting gas passing through the coil winding.
The array voice coil motor of the application sets up grating assembly 400 and grating ruler signal lumped plate 500 in array voice coil motor's top, and power line lumped plate 600 sets up in array voice coil motor's bottom, and multiplexing magnet between the adjacent voice coil motor, has greatly saved array voice coil motor's design space, makes array voice coil motor have compact structure, small, simple process, easily realizes.
Furthermore, the array voice coil motor is high in magnetic steel consumption and distributed in a smaller space range, in order to prevent the magnetic steel from demagnetizing in the assembly process or the motor operation, the magnetic steel is high in coercivity, the high coercivity magnetic steel has strong demagnetizing resistance, and meanwhile, in order to enable the motor to output high moment performance, the remanence and magnetic energy product of the magnetic steel are as large as possible, so that the magnetic steel in the application adopts the NdFeB N52M mark.
The array voice coil motor of the application has the following advantages:
1. the array voice coil motor can realize multi-axis motion, and has high moment constant and high power density;
2. the array voice coil motor has the advantages of large movement range, compact structure and small volume; the process is simple and easy to realize; the assembly and adjustment are convenient, and the maintainability is strong.
The foregoing description of the invention has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the invention pertains, based on the idea of the invention.
Claims (10)
1. An array voice coil motor adapted for uniformity correction, comprising: a permanent magnet assembly, a coil assembly, and a rail assembly;
the permanent magnet assembly includes: the magnetic yoke, the top fixing plate, the bottom fixing plate, the edge permanent magnets and a plurality of middle permanent magnets;
the magnetic yoke is arranged opposite to the two end parts of the top fixing plate and the bottom fixing plate, is fixedly connected with the top fixing plate and the bottom fixing plate respectively and is used for supporting the top fixing plate and the bottom fixing plate;
the edge permanent magnet is arranged opposite to the inner side of the magnetic yoke and is fixedly connected with the magnetic yoke;
the plurality of middle permanent magnets are arranged between the top fixing plate and the bottom fixing plate at intervals and positioned between the edge permanent magnets at the two ends;
the coil assembly comprises a plurality of coils and a plurality of coil brackets, and the coils are fixedly connected with the coil brackets;
through holes for the coils to penetrate through are respectively formed between the top fixing plate and the bottom fixing plate and between the middle permanent magnet and the edge permanent magnet which are opposite to the adjacent middle permanent magnets, so that the middle permanent magnets are multiplexed between the adjacent coils;
the guide rail assembly comprises a guide rail fixing bracket, and further comprises a sliding block, a guide rail and a guide rail bracket which are matched with the coil bracket; the coil support is fixedly connected with the guide rail through the guide rail support, and the sliding block is fixedly connected with the magnetic yoke of the permanent magnet assembly through the guide rail fixing support; the coil moves relative to the middle permanent magnet under the condition of electrifying and drives the coil support, the guide rail support and the guide rail to slide relative to the sliding block.
2. The array voice coil motor of claim 1, wherein the coaxial air gap in the permanent magnet assembly comprises at least two sequences of magnets of opposite polarity, and wherein the polarities of the magnets in the same sequence are oriented in the same direction.
3. The array voice coil motor of claim 2, wherein at most P-1 coils are disposed in the coaxial air gap, wherein P is the number of magnet sequences in the coaxial air gap, and P is greater than or equal to 2.
4. The array voice coil motor of claim 1, wherein the thickness of the middle permanent magnet is 1mm-3mm, the thickness of the edge permanent magnet is 3 times the thickness of the middle permanent magnet, the length of the air gap between adjacent middle permanent magnets is the sum of the thickness of the coil and the single-side movement adjustment gap thereof, and the single-side movement adjustment gap is 0.2mm-0.8mm.
5. The array voice coil motor of claim 1, wherein the edge permanent magnets and the intermediate permanent magnets are respectively higher than a high number N52M in the neodymium-iron-boron M series or higher than a high number N50H in the neodymium-iron-boron H series.
6. An array voice coil motor according to any one of claims 1 to 5, wherein the top and bottom fixing plates are provided with respective limit grooves between both ends, respectively, corresponding to the respective intermediate permanent magnets, and the respective intermediate permanent magnets are respectively limited between the top and bottom fixing plates by the respective limit grooves.
7. The array voice coil motor of claim 6, wherein the limiting groove has a V-shaped structure.
8. The arrayed voice coil motor of claim 1, further comprising a grating assembly and a grating scale signal lumped plate;
the grating assembly comprises a reading head fixing bracket, and further comprises a grating ruler matched with the coil, a grating ruler fixing bracket, a reading head and a reading head welding plate;
the reading head fixing support is fixedly connected with the magnetic yoke of the permanent magnet assembly through the guide rail fixing support, and the grating ruler signal lumped plate is fixedly connected with the reading head fixing support;
the grating ruler is connected and fixed on the guide rail through a grating ruler fixing support and moves along with the guide rail, the reading head is welded on the reading head welding plate relative to the grating ruler, the reading head welding plate is fixedly connected on the reading head fixing support, and feedback signals of the reading head are summarized to the grating ruler signal lumped plate through a flexible cable.
9. The arrayed voice coil motor of claim 1, further comprising a power line lumped plate located below the bottom dead plate, the power line lumped plate being connected to the coil support by a flexible cable.
10. The arrayed voice coil motor of claim 1, further comprising a cooling mechanism disposed perpendicular to a direction of movement of the coil, the cooling mechanism configured to dissipate heat from the coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211099270.3A CN116191809B (en) | 2022-09-07 | 2022-09-07 | Array voice coil motor suitable for uniformity correction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211099270.3A CN116191809B (en) | 2022-09-07 | 2022-09-07 | Array voice coil motor suitable for uniformity correction |
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| Publication Number | Publication Date |
|---|---|
| CN116191809A true CN116191809A (en) | 2023-05-30 |
| CN116191809B CN116191809B (en) | 2024-04-09 |
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| CN202211099270.3A Active CN116191809B (en) | 2022-09-07 | 2022-09-07 | Array voice coil motor suitable for uniformity correction |
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| CN111277108A (en) * | 2020-02-27 | 2020-06-12 | 中国科学院宁波材料技术与工程研究所 | Driving and guiding integrated device |
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