CN116146517A - Intelligent monitoring system and method for magnetic suspension molecular pump - Google Patents
Intelligent monitoring system and method for magnetic suspension molecular pump Download PDFInfo
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 79
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention discloses an intelligent monitoring system and method for a magnetic suspension molecular pump, wherein the system comprises the following components: the magnetic suspension molecular pump monitoring device and the cloud server; the magnetic suspension molecular pump monitoring device is established on the magnetic suspension molecular pump body, includes: a controller and a monitor processor; the controller controls the molecular pump to stably run, acquires real-time state information and transmits the real-time state information to the monitoring processor and the cloud server; the monitoring processor analyzes the state information to generate early warning information and fault processing decisions and sends the early warning information and fault processing decisions to the cloud server and the controller; the cloud server receives real-time state information, early warning information and fault processing decisions of all magnetic suspension molecular pumps in the factory, displays the information on a client to monitor the running states of all the molecular pumps, controls abnormal molecular pumps and related equipment to perform corresponding operation when the molecular pumps are abnormal, sends out early warning signals and provides fault processing suggestions to remind operators to perform preventive detection and maintenance or corresponding fault processing, and ensures safe and stable running of the molecular pumps.
Description
Technical Field
The invention relates to the technical field of monitoring of vacuum obtaining equipment, in particular to an intelligent monitoring system and method for a magnetic suspension molecular pump.
Background
The magnetic suspension molecular pump is a novel high-performance molecular pump which utilizes a magnetic bearing to generate electromagnetic force to suspend a rotor in the air, so that no mechanical contact between the rotor and a stator is realized, and the position of the rotor can be actively controlled. The vacuum pump has the advantages of no friction, no need of lubrication, no pollution, high speed and long service life, and is widely applied to the fields of scientific research, surface analysis, accelerators, industrial coating, ion implantation, silicon etching and the like, and is used for obtaining a high-cleanliness vacuum environment in a working cavity.
However, in the working process of the magnetic suspension molecular pump, polymers can be continuously produced in the equipment cavity and accumulated on the molecular pump blades, so that unbalanced mass of the rotor is remarkably increased, vibration of the rotor is increased, centrifugal force effect is increased, and the risk of failure of the magnetic suspension molecular pump exists. Secondly, in industrial coating and semiconductor technology manufacturing processes, high temperature state is maintained in many equipment cavities all the time, and 7×24 hours of continuous operation are needed, and the temperature rise of an external high Wen Diejia molecular pump can lead to deformation of a molecular pump blade, so that the gap between a dynamic piece and a static piece of the molecular pump is reduced, the collision of the blade is increased, and the risk of pump breakage exists. How to realize the intelligent monitoring of the state of the magnetic suspension molecular pump, and to pre-judge the abnormality of equipment and timely process the abnormality is a current problem to be solved urgently.
Disclosure of Invention
Therefore, the invention provides the intelligent monitoring system and the intelligent monitoring method for the magnetic suspension molecular pump, which can realize intelligent monitoring of the magnetic suspension molecular pump, and analyze and generate early warning information and fault processing decisions based on the real-time state information of the magnetic suspension molecular pump so as to remind operators of preventive detection and maintenance or corresponding fault processing, thereby ensuring safe and stable operation of the magnetic suspension molecular pump and solving the problems in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
in a first aspect, an embodiment of the present invention provides an intelligent monitoring system for a magnetic suspension molecular pump, including:
the magnetic suspension molecular pump monitoring device and the cloud server are communicated through a wireless network;
magnetic suspension molecular pump monitoring device sets up on the magnetic suspension molecular pump body, includes: a controller and a monitor processor;
the controller is used for controlling the magnetic suspension molecular pump to safely and stably operate, acquiring real-time state information of the magnetic suspension molecular pump and sending the information to the monitoring processor and the cloud server;
the monitoring processor is connected with the controller through a cable and is used for analyzing the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault processing decisions, sending the early warning information and the fault processing decisions to the cloud server and sending the fault processing decisions to the controller to control the magnetic suspension molecular pump to safely and stably operate;
the cloud server is used for receiving real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displaying the information on the client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, controlling the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, and sending early warning signals and providing fault processing suggestions.
Optionally, the controller includes: the magnetic bearing controller module, the motor controller module, the switching power supply module and the information interaction module;
the magnetic bearing controller module is used for detecting the state of a magnetic bearing system in the magnetic suspension molecular pump and stabilizing suspension control;
the motor controller module is used for detecting the state of a motor in the magnetic suspension molecular pump and driving the motor;
the switching power supply module is used for detecting the state of a switching power supply in the magnetic suspension molecular pump and supplying power to the system;
and the information interaction module is used for information interaction of each module in the controller and information interaction between the cloud server and the monitoring processor respectively.
Optionally, the status information includes: the magnetic bearing system state information, the motor state information and the switching power supply state information are all obtained through corresponding sensors;
magnetic bearing system status information, comprising: the displacement signals of five degrees of freedom of the upper radial X, the upper radial Y, the lower radial X, the lower radial Y and the axial Z of the rotor;
motor status information, comprising: three-phase winding voltage, current and rotation speed signals of the motor;
switching power supply state information, comprising: each power supply voltage and switch power supply temperature signal of the switch power supply.
Optionally, the monitoring processor includes: the system comprises a state information processing module and an Internet of things module;
the state information processing module is used for analyzing and generating early warning information and fault processing decisions according to the real-time state information of the magnetic suspension molecular pump;
and the internet of things module is used for sending the real-time state information and the early warning information of the magnetic suspension molecular pump to the cloud server for real-time monitoring, and sending the fault processing decision of the magnetic suspension molecular pump to the controller for the controller to process the fault of the magnetic suspension molecular pump in real time.
Optionally, the process of the information interaction function includes: and displaying and early warning the local state of the magnetic suspension molecular pump based on the early warning information and fault processing decisions sent by the monitoring processor, or forwarding a command issued by an operator to control the magnetic suspension molecular pump and other related equipment modules of the factory to respond to corresponding actions.
Optionally, a main control chip of the magnetic bearing controller module adopts a dual-core processor architecture, including: ARM core+DSP core or FPGA core+DSP core;
a DSP core for controlling the magnetic bearing controller module;
and the ARM core or the FPGA core is used for information interaction and monitoring processing of the magnetic bearing system.
In a second aspect, an embodiment of the present invention provides an intelligent monitoring method for a magnetic suspension molecular pump, including:
the controller acquires real-time state information of the magnetic suspension molecular pump and sends the real-time state information to the monitoring processor and the cloud server;
the monitoring processor analyzes the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault processing decisions, the early warning information and the fault processing decisions are sent to the cloud server, and the fault processing decisions are sent to the controller to control the magnetic suspension molecular pump to safely and stably operate;
the cloud server receives real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displays the information on the client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, controls the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, and sends out early warning signals and provides fault processing suggestions.
Optionally, the monitoring processor also monitors basic stability and pre-judges suspension stability of the magnetic suspension molecular pump;
the basic stability monitoring functions include: comparing the real-time state information of the monitoring magnetic suspension molecular pump rotor, the motor and the switching power supply with a preset working safety threshold value respectively, and judging the stability according to a comparison result;
the suspension stability prejudging function comprises the following steps: performing fast Fourier transform on displacement signals of five degrees of freedom of the magnetic suspension molecular pump rotor to obtain real-time displacement spectrum information of each path, identifying key vibration peaks and recording change rules of the displacement spectrum information, comparing the key vibration peaks with a preset factory safety threshold, and judging the suspension stability according to a comparison result.
Optionally, the corresponding operations include: and (3) the magnetic suspension molecular pump in the fault process section is in a speed reducing or stopping operation, and the related equipment of other process sections associated with the fault process section is in a disconnection operation.
Optionally, the process of early warning signals and providing fault handling advice includes: when the magnetic suspension molecular pump is abnormal, an early warning signal is sent out to the abnormality of the magnetic suspension molecular pump which is potentially threatening, and operators are reminded to carry out preventive detection and maintenance; and performing fault treatment on the abnormality which threatens the safety or the process requirement of the magnetic suspension molecular pump, and controlling the magnetic suspension molecular pump to run safely and stably.
The technical scheme of the invention has the following advantages:
the invention provides an intelligent monitoring system and method for a magnetic suspension molecular pump, wherein the system comprises the following components: the magnetic suspension molecular pump monitoring device and the cloud server communicate through a wireless network; magnetic suspension molecular pump monitoring device sets up on the magnetic suspension molecular pump body, includes: a controller and a monitor processor; the controller is used for controlling the magnetic suspension molecular pump to safely and stably operate, acquiring real-time state information of the magnetic suspension molecular pump and sending the real-time state information to the monitoring processor and the cloud server; the monitoring processor analyzes the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault processing decisions, sends the early warning information and the fault processing decisions to the cloud server, and sends the fault processing decisions to the controller to control the magnetic suspension molecular pump to safely and stably operate; the cloud server receives real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displays the information on the client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, controls the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, and sends out early warning signals and provides fault processing suggestions. The invention can realize intelligent monitoring of the magnetic suspension molecular pump, and can analyze and generate early warning information and fault processing decisions based on the real-time state information of the magnetic suspension molecular pump so as to remind operators to perform preventive detection and maintenance or corresponding fault processing, thereby ensuring the normal and stable operation of the magnetic suspension molecular pump.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of an intelligent monitoring system for a magnetic suspension molecular pump according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a specific structure of an intelligent monitoring system for a magnetic levitation molecular pump according to an embodiment of the present invention;
fig. 3 is a flowchart of a method for intelligently monitoring a magnetic suspension molecular pump according to an embodiment of the present invention.
Detailed Description
In order to make the present invention better understood by those skilled in the art, the following description will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments, but not intended to limit the scope of the present disclosure. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The embodiment of the invention provides an intelligent monitoring system for a magnetic suspension molecular pump, as shown in fig. 1, comprising: the magnetic suspension molecular pump monitoring device and the cloud server are communicated through a wireless network;
magnetic suspension molecular pump monitoring device sets up on the magnetic suspension molecular pump body, includes: a controller and a monitor processor;
the controller is used for controlling the magnetic suspension molecular pump to safely and stably operate, acquiring real-time state information of the magnetic suspension molecular pump and sending the information to the monitoring processor and the cloud server;
the monitoring processor is connected with the controller through a cable and is used for analyzing the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault processing decisions, sending the early warning information and the fault processing decisions to the cloud server and sending the fault processing decisions to the controller to control the magnetic suspension molecular pump to safely and stably operate;
the cloud server is used for receiving real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displaying the information on the client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, controlling the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, and sending early warning signals and providing fault processing suggestions.
The controller in this embodiment, as shown in fig. 2, includes: the device comprises a magnetic bearing controller module, a motor controller module, a switching power supply module and an information interaction module. The state information of the magnetic suspension molecular pump acquired by the controller comprises: the state information of the magnetic bearing system, the state information of the motor and the state information of the switching power supply are all obtained through corresponding sensors.
In this embodiment, the magnetic bearing controller module is used for detecting the state of the magnetic bearing system in the magnetic suspension molecular pump and stabilizing the suspension control. Specifically, the magnetic bearing system state information acquired by the magnetic bearing controller module includes: the displacement signals of five degrees of freedom of the rotor in the radial direction X, the upper radial direction Y, the lower radial direction X, the lower radial direction Y and the axial direction Z.
In this embodiment, the motor controller module is used for detecting the motor state and driving the motor in the magnetic levitation molecular pump. Specifically, the motor state information acquired by the motor controller module includes: three-phase winding voltage, current and rotation speed signals of the motor.
In this embodiment, the switching power supply module is used for detecting the state of the switching power supply in the magnetic levitation molecular pump and supplying power to the system. Specifically, the switching power supply state information acquired by the switching power supply module includes: each power supply voltage and switch power supply temperature signal of the switch power supply.
In this embodiment, the information interaction module is configured to interact information of each module in the controller, and interact information with the cloud server and the monitoring processor respectively. Specifically, the process of the information interaction function includes: and displaying and early warning the local state of the magnetic suspension molecular pump based on the early warning information and fault processing decisions sent by the monitoring processor, or forwarding a command issued by an operator to control the magnetic suspension molecular pump and other related equipment modules of the factory to respond to corresponding actions.
The monitor processor in this embodiment, as shown in fig. 2, includes: the system comprises a state information processing module and an Internet of things module. The state information processing module is used for analyzing and generating early warning information and fault processing decisions according to the real-time state information of the magnetic suspension molecular pump; and the internet of things module is used for sending the real-time state information and the early warning information of the magnetic suspension molecular pump to the cloud server for real-time monitoring, and sending the fault processing decision of the magnetic suspension molecular pump to the controller for the controller to process the fault of the magnetic suspension molecular pump in real time.
In this embodiment, a dual-core processor architecture is adopted in a main control chip of a magnetic bearing controller module of a controller, including: ARM core+DSP core or FPGA core+DSP core. Wherein, the DSP core is used for controlling the magnetic bearing controller module; and the ARM core or the FPGA core is used for information interaction and monitoring processing of the magnetic bearing system.
Specifically, in order to ensure the control instantaneity, the state information transmission instantaneity and the fault early warning timeliness of the magnetic suspension molecular pump, a processor architecture is adopted to be an ARM core and DSP core or an FPGA core and DSP core dual-core embedded processor, namely the ARM core and the DSP core or the FPGA core and the DSP core are packaged in one chip at the same time. The dual cores are high-speed processors and share memory among the dual cores, so that high-speed real-time data transmission among the dual cores can be realized.
In this embodiment, the main control chip of the motor controller module of the controller is a motor control chip, and any high-speed embedded processor meeting the design requirement, for example, a DSP, ARM, FPGA high-speed embedded processor, is only used as an example, but not limited thereto.
In one embodiment, the monitoring process of the monitoring processor includes: the method comprises the steps of obtaining magnetic bearing system state information from a DSP core of a magnetic bearing main control chip, obtaining motor state information from a motor main control chip, obtaining switching power supply information from a sensor in a switching power supply, sending the information to an ARM core or an FPGA core of the magnetic bearing main control chip, comprehensively judging fault conditions, and giving a processing decision to the existing faults.
In a specific embodiment, the information interaction of the ARM core or the FPGA core of the magnetic bearing main control chip comprises: and the information communication of each module of the controller is coordinated, so that the man-machine interaction function of the controller is realized.
In this embodiment, the internet of things module adopts an embedded ethernet chip or a WIFI chip with low power consumption and high integration to realize network communication, and transmits the real-time status information, the early warning information and the fault processing decision of the magnetic suspension molecular pump to the cloud server.
The invention provides an intelligent monitoring system for a magnetic suspension molecular pump, which can realize real-time intelligent monitoring and early warning or fault handling of the magnetic suspension molecular pump and ensure the stable and safe operation of the magnetic suspension molecular pump.
Example 2
The embodiment of the invention provides an intelligent monitoring method for a magnetic suspension molecular pump, as shown in fig. 3, comprising the following steps:
step S1: the controller acquires real-time state information of the magnetic suspension molecular pump and sends the information to the monitoring processor and the cloud server.
Step S2: the monitoring processor analyzes the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault handling decisions, sends the early warning information and the fault handling decisions to the cloud server, and sends the fault handling decisions to the controller to control the magnetic suspension molecular pump to safely and stably operate.
In this embodiment, the monitoring processor further performs basic stability monitoring and suspension stability pre-judging on the magnetic suspension molecular pump. Wherein the basic stability monitoring comprises: and comparing the real-time state information of the monitoring magnetic suspension molecular pump rotor, the motor and the switching power supply with a preset working safety threshold value respectively, and judging the stability according to a comparison result.
Specifically, the stability monitoring process of the magnetic levitation molecular pump rotor comprises the following steps: the monitoring processor tracks the five-degree-of-freedom displacement signals of the rotor in real time to see whether the displacement signals exceed a preset working safety threshold or not, so that whether the magnetic suspension molecular pump needs to be stopped immediately or not is judged; when the machine is required to be stopped, the fault condition and the stopping state of the magnetic suspension molecular pump are simultaneously sent to the cloud server, and operators are reminded to process the fault condition and the stopping state of the magnetic suspension molecular pump in time. In one embodiment, the preset working safety threshold of the magnetic suspension molecular pump rotor is that the rotor vibration exceeds 20% of the air gap between the stator and the rotor, which is only used as an illustration, but not a limitation, and the magnetic suspension molecular pump rotor is adaptively adjusted according to the practical application scene.
Specifically, the motor stability monitoring process: the monitoring processor monitors the voltages, currents and rotating speeds of three windings of the motor in real time, if the rising or falling speed of the voltage and the current of a winding of a certain phase of the motor exceeds a safety threshold, the condition that the air pressure in the cavity is obviously abnormal is indicated, or the winding of the motor and the motor controller are obviously abnormal, an alarm signal is immediately sent at the moment to request an operator to check the cause of the problem, and whether the motor is immediately stopped is judged according to the running state of the subsequent motor. In a specific embodiment, the working safety thresholds corresponding to the voltages, currents and rotational speeds of the three windings of the motor are respectively determined according to actual technological processes, and the working safety thresholds obtained in different technological processes are different.
Specifically, the switching power supply stability monitoring process: the monitoring processor monitors the stability of each path of voltage of the switching power supply and the stability of the temperature of the switching power supply in real time, if the change rate of each path of power supply voltage compared with the rated value exceeds a working safety threshold, the rotating speed of the magnetic suspension molecular pump is required to be limited, faults are sent to the cloud server, and an operator is informed of timely processing. In one embodiment, the rate of change of the power supply voltage of each path compared with the rated value is 10% of the rate of change of the working safety threshold, which is only used as an example, and the power supply voltage is not limited by the rate of change, and is adaptively adjusted according to the actual application scene. When the temperature of the switching power supply exceeds the working safety threshold, the switching power supply is considered to exceed the safety threshold, the rotating speed of the magnetic suspension molecular pump is required to be limited, faults are sent to the cloud server, and an operator is informed of timely processing. In one embodiment, the working safety threshold of the switching power supply temperature is 60 degrees, which is only used as an example, and is not limited thereto, and the switching power supply temperature is adaptively adjusted according to the practical application scenario.
In this embodiment, the suspension stability pre-determination includes: carrying out fast Fourier transform on displacement signals of five degrees of freedom (radial X, upper radial Y, lower radial X, lower radial Y and axial Z on the rotor) of the magnetic suspension molecular pump rotor to obtain real-time displacement spectrum information of each path, carrying out identification of key vibration peaks and record of change rules on the displacement spectrum information, comparing the key vibration peaks with a preset factory safety threshold, and judging the suspension stability according to a comparison result.
Specifically, when ARM core or FPGA in the magnetic bearing main control chip verifies, the five-degree-of-freedom displacement signals of the rotor are called, and fast Fourier transform is carried out on each path of displacement to obtain each path of real-time displacement frequency spectrum. And the ARM core or the FPGA checks each path of displacement frequency spectrum to identify key vibration peak positions and record a transformation rule. Wherein, key vibration peaks include: the key vibration peaks can be identified before the magnetic suspension molecular pump leaves the factory and the peak frequency range and the peak threshold safety threshold range are recorded in the internal memory of the controller. When there is sediment on the impeller or the temperature of the impeller is high, the key vibration peak changes. For example, increased impeller deposition can result in increased rotor imbalance and increased rotor co-frequency peak amplitude; the temperature of the impeller is increased, the amplitude of the same-frequency vibration peak of the rotor is increased, the peak frequency range or the amplitude of a certain layer of blade peak can be changed, the ARM core or the FPGA core records the peak frequency change and the peak threshold change of a key vibration peak, and whether a certain key vibration peak has a continuous growth trend is observed, so that the situation that what vibration possibly occurs in the future exceeds a safety threshold value is prejudged, a safety early warning is sent to a cloud server in advance, and an operator is reminded to carry out preventive detection or inform a molecular pump manufacturer of preventive maintenance.
Step S3: the cloud server receives real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displays the information on the client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, controls the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, and sends out early warning signals and provides fault processing suggestions.
In this embodiment, the corresponding operations include: and (3) the magnetic suspension molecular pump in the fault process section is in a speed reducing or stopping operation, and the related equipment of other process sections associated with the fault process section is in a disconnection operation.
In this embodiment, the process of early warning signals and providing fault handling advice includes: when the magnetic suspension molecular pump is abnormal, an early warning signal is sent out to the abnormality of the magnetic suspension molecular pump which is potentially threatening, and operators are reminded to carry out preventive detection and maintenance; and performing fault treatment on the abnormality which threatens the safety or the process requirement of the magnetic suspension molecular pump, and controlling the magnetic suspension molecular pump to run safely and stably.
In a specific embodiment, the cloud server can monitor the running states of all the magnetic suspension molecular pumps in the whole factory in real time, including: vacuum performance indexes (such as vacuum degree and pumping speed) of each magnetic suspension molecular pump, overall power loss, switch power supply state information (such as output voltage and internal temperature signals of each path of the switch power supply), rotor suspension state (such as displacement signals of each degree of freedom of a rotor), motor driving stability indexes (such as voltage, current and rotating speed signals of three windings of the motor) and suspension stability indexes (such as the ratio of a characteristic vibration peak to a threshold value of the motor), wherein the characteristic vibration peak comprises a rotor same-frequency vibration peak and a rotor blade peak). When an abnormal situation possibly occurs to a certain magnetic suspension molecular pump, on one hand, the magnetic suspension molecular pump can automatically perform fault treatment and early warning, so that the safety of the molecular pump is ensured; on the other hand, the client of the cloud server simultaneously sends out an early warning signal, and gives out fault handling suggestions of operators by combining the technical process characteristics of the section where the abnormal magnetic suspension molecular pump is located.
In a specific embodiment, a certain process section is simultaneously provided with a plurality of magnetic suspension molecular pumps, when a certain magnetic suspension molecular pump in the process section fails and stops, in order to ensure stable operation of the process, the cloud server firstly controls the standby pump of the process section to start, and meanwhile, the fault type and the fault removal working steps of the fault pump are displayed on the cloud server.
In a specific embodiment, in order to ensure the safety of the magnetic suspension molecular pump of a certain process section under the condition of large-flow air leakage, the cloud server firstly closes the vacuum valve between the fault process section and other process sections, so that the work of other process sections is prevented from being influenced; then controlling the molecular pump with overload in the failure process section to slow down or stop; and meanwhile, the cloud server sends out a fault alarm to prompt operators to process fault conditions as soon as possible.
The intelligent monitoring method for the magnetic suspension molecular pump can comprehensively monitor and analyze each state information of the magnetic suspension molecular pump, and conduct fault pre-judgment and current fault processing according to analysis results, so that safe and stable operation of the magnetic suspension molecular pump is ensured.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (10)
1. An intelligent monitoring system for a magnetic suspension molecular pump, comprising:
the magnetic suspension molecular pump monitoring device and the cloud server are communicated through a wireless network;
the magnetic suspension molecular pump monitoring device sets up on the magnetic suspension molecular pump body, includes: a controller and a monitor processor;
the controller is used for controlling the magnetic suspension molecular pump to safely and stably operate, acquiring the real-time state information of the magnetic suspension molecular pump and sending the real-time state information to the monitoring processor and the cloud server;
the monitoring processor is connected with the controller through a cable and is used for analyzing the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault processing decisions, sending the early warning information and the fault processing decisions to the cloud server and sending the fault processing decisions to the controller to control the magnetic suspension molecular pump to safely and stably run;
the cloud server is used for receiving real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displaying the real-time state information, the early warning information and the fault processing decisions on a client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, and controlling the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, sending early warning signals and providing fault processing suggestions.
2. The intelligent monitoring system of a magnetic molecular pump according to claim 1, wherein the controller comprises: the magnetic bearing controller module, the motor controller module, the switching power supply module and the information interaction module;
the magnetic bearing controller module is used for detecting the state of a magnetic bearing system in the magnetic suspension molecular pump and stabilizing suspension control;
the motor controller module is used for detecting the state of a motor in the magnetic suspension molecular pump and driving the motor;
the switching power supply module is used for detecting the state of a switching power supply in the magnetic suspension molecular pump and supplying power to the system;
the information interaction module is used for information interaction of all modules in the controller and information interaction between the cloud server and the monitoring processor respectively.
3. The intelligent monitoring system of a magnetic molecular pump according to claim 2, wherein the status information comprises: the magnetic bearing system state information, the motor state information and the switching power supply state information are all obtained through corresponding sensors;
the magnetic bearing system state information includes: the displacement signals of five degrees of freedom of the upper radial X, the upper radial Y, the lower radial X, the lower radial Y and the axial Z of the rotor;
the motor status information includes: three-phase winding voltage, current and rotation speed signals of the motor;
the switching power supply state information includes: each power supply voltage and switch power supply temperature signal of the switch power supply.
4. A magnetic molecular pump intelligent monitoring system according to claim 3, wherein the monitoring processor comprises: the system comprises a state information processing module and an Internet of things module;
the state information processing module is used for analyzing and generating early warning information and fault processing decisions according to the real-time state information of the magnetic suspension molecular pump;
the Internet of things module is used for sending the real-time state information and the early warning information of the magnetic suspension molecular pump to the cloud server for real-time monitoring, and sending the fault processing decision of the magnetic suspension molecular pump to the controller for the controller to process the fault of the magnetic suspension molecular pump potentially threatening in real time.
5. The intelligent monitoring system of a magnetic levitation molecular pump according to claim 4, wherein the process of the information interaction function comprises: and displaying and early warning the local state of the magnetic suspension molecular pump based on the early warning information and fault processing decisions sent by the monitoring processor, or forwarding a command issued by an operator to control the magnetic suspension molecular pump and other related equipment modules of the factory to respond to corresponding actions.
6. The intelligent monitoring system of claim 5, wherein the master control chip of the magnetic bearing controller module adopts a dual-core processor architecture, comprising: ARM core+DSP core or FPGA core+DSP core;
the DSP core is used for controlling the magnetic bearing controller module;
the ARM core or the FPGA core is used for information interaction and monitoring processing of the magnetic bearing system.
7. The intelligent monitoring method for the magnetic suspension molecular pump is characterized by comprising the following steps of:
the controller acquires real-time state information of the magnetic suspension molecular pump and sends the real-time state information to the monitoring processor and the cloud server;
the monitoring processor analyzes the real-time state information of the magnetic suspension molecular pump to generate early warning information and fault processing decisions, the early warning information and the fault processing decisions are sent to the cloud server, and the fault processing decisions are sent to the controller to control the magnetic suspension molecular pump to safely and stably operate;
the cloud server receives real-time state information, early warning information and fault processing decisions of all the magnetic suspension molecular pumps in the factory, displays the information on the client side to monitor the running states of all the magnetic suspension molecular pumps in the whole factory, controls the abnormal magnetic suspension molecular pumps and associated equipment to perform corresponding operations when the abnormal magnetic suspension molecular pumps are monitored, and sends out early warning signals and provides fault processing suggestions.
8. The intelligent monitoring method of the magnetic suspension molecular pump according to claim 7, wherein the monitoring processor further performs basic stability monitoring and suspension stability pre-judging on the magnetic suspension molecular pump;
the basic stability monitoring includes: comparing the real-time state information of the monitoring magnetic suspension molecular pump rotor, the motor and the switching power supply with a preset working safety threshold value respectively, and judging the stability according to a comparison result;
the suspension stability pre-judgment comprises the following steps: performing fast Fourier transform on displacement signals of five degrees of freedom of the magnetic suspension molecular pump rotor to obtain real-time displacement spectrum information of each path, identifying key vibration peaks and recording change rules of the displacement spectrum information, comparing the key vibration peaks with a preset factory safety threshold, and judging the suspension stability according to a comparison result.
9. The method of claim 7, wherein the corresponding operations include: and (3) the magnetic suspension molecular pump in the fault process section is in a speed reducing or stopping operation, and the related equipment of other process sections associated with the fault process section is in a disconnection operation.
10. The intelligent monitoring method of the magnetic suspension molecular pump according to claim 7, wherein the process of pre-warning signals and providing fault handling advice comprises the following steps: when the magnetic suspension molecular pump is abnormal, an early warning signal is sent out to the abnormality of the magnetic suspension molecular pump which is potentially threatening, and operators are reminded to carry out preventive detection and maintenance; and performing fault treatment on the abnormality which threatens the safety or the process requirement of the magnetic suspension molecular pump, and controlling the magnetic suspension molecular pump to run safely and stably.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117028299A (en) * | 2023-10-10 | 2023-11-10 | 苏州中科科仪技术发展有限公司 | Magnetic suspension molecular pump turbine vermicular expansion test fixture |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202954952U (en) * | 2012-12-04 | 2013-05-29 | 苏州捷奥瑞康物联科技有限公司 | Remote water pump monitoring and anti-theft system |
| CN110486381A (en) * | 2019-07-22 | 2019-11-22 | 苏州百狮腾电气有限公司 | A kind of tele-control system of magnetic suspension bearing |
| CN112128108A (en) * | 2019-06-24 | 2020-12-25 | 长鑫存储技术有限公司 | Molecular pump monitoring system and molecular pump monitoring method |
| CN112628159A (en) * | 2020-12-21 | 2021-04-09 | 北京航空航天大学 | Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification |
| CN215109546U (en) * | 2021-03-19 | 2021-12-10 | 潍坊职业学院 | Real-time monitoring system of electric submersible pump with micro-signal alarm function |
-
2022
- 2022-12-21 CN CN202211648062.4A patent/CN116146517B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202954952U (en) * | 2012-12-04 | 2013-05-29 | 苏州捷奥瑞康物联科技有限公司 | Remote water pump monitoring and anti-theft system |
| CN112128108A (en) * | 2019-06-24 | 2020-12-25 | 长鑫存储技术有限公司 | Molecular pump monitoring system and molecular pump monitoring method |
| CN110486381A (en) * | 2019-07-22 | 2019-11-22 | 苏州百狮腾电气有限公司 | A kind of tele-control system of magnetic suspension bearing |
| CN112628159A (en) * | 2020-12-21 | 2021-04-09 | 北京航空航天大学 | Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification |
| CN215109546U (en) * | 2021-03-19 | 2021-12-10 | 潍坊职业学院 | Real-time monitoring system of electric submersible pump with micro-signal alarm function |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117028299A (en) * | 2023-10-10 | 2023-11-10 | 苏州中科科仪技术发展有限公司 | Magnetic suspension molecular pump turbine vermicular expansion test fixture |
| CN117028299B (en) * | 2023-10-10 | 2023-12-01 | 苏州中科科仪技术发展有限公司 | Magnetic suspension molecular pump turbine vermicular expansion test fixture |
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