CN116128444A - Processing method of process task and semiconductor process equipment - Google Patents
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Abstract
The embodiment of the invention provides a processing method of a process task and semiconductor process equipment, which are applied to the semiconductor process equipment, wherein the semiconductor process equipment is connected with a factory automation system.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a processing method of a process task and semiconductor process equipment.
Background
In the semiconductor Process equipment, the operation of the Process task (Job) is operated according to a corresponding Recipe file, and the automation of the factory is managed in the semiconductor FAB (manufacturing) factory, the automation of the semiconductor Process equipment is controlled and managed through a factory automation system, the semiconductor Process equipment is required to operate according to a specified Recipe file according to an instruction issued by the factory automation system, but the operation of the Process task with the Recipe file being a Route Recipe file (Route Recipe) can not be satisfied currently, the operation of the Process task in a mode of freely combining a Layout Recipe file (Layout Recipe) with a Process operation Recipe file (Process Recipe) cannot be satisfied, and some key Process parameter values of the Process operation Recipe file cannot be modified before the operation of the Process task.
Disclosure of Invention
In view of the foregoing, embodiments of the present invention have been developed to provide a method of processing a process task and a corresponding semiconductor processing apparatus that overcome, or at least partially solve, the foregoing problems.
In order to solve the above problems, an embodiment of the present invention discloses a processing method of a process task, which is applied to a semiconductor process device, wherein the semiconductor process device is connected with a factory automation system, and the method comprises:
receiving a process task sent by the factory automation system, and acquiring target parameter information of the process task, wherein the target parameter information comprises a formula control mode and a formula identifier;
judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment;
if the formula control mode is a unique formula control mode, the formula identification comprises a path formula file identification, a path formula file is searched according to the path formula file identification, and the path formula file comprises a layout formula file and a process operation formula file; executing the process task according to the layout formula file and the process operation formula file;
If the formula control mode is a formula adjustment control mode, the formula identifier comprises a path formula file identifier, the target parameter information further comprises a process variable list, variable parameters of a process operation formula file in a path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to a layout formula file of the path formula file and the modified process operation formula file;
if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information does not comprise a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; executing the process task according to the layout formula file and the process operation formula file;
if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information further comprises a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; modifying the variable parameters of the process operation recipe file according to the process variable list, and executing the process task according to the layout recipe file and the modified process operation recipe file.
Optionally, before the step of receiving the process task sent by the factory automation system, the method further includes:
receiving an instruction for starting the process task sent by the factory automation system;
acquiring initial parameter information of the process task according to the instruction; the initial parameter information includes: recipe control mode and recipe identification;
judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment;
if the formula control mode is a unique formula control mode, the formula identifier is a path formula file identifier, judging whether the path formula file identifier is valid, and if the path formula file identifier is valid, determining the formula control mode and the path formula file identifier as target parameter information;
if the formula control mode is a formula adjustment control mode, the formula identifier is a path formula file identifier, the initial parameter information further comprises a variable list, whether the path formula file identifier and the variable list are valid or not is judged, and if the path formula file identifier and the variable list are valid, the formula control mode, the path formula file identifier and a process variable list stored in the variable list are determined to be target parameter information;
If the formula control mode is a formula adjustment control mode, the formula identifier is a process operation formula file identifier and is effective, and the initial parameter information also comprises a variable list, judging whether a layout formula file identifier is stored in the variable list; if the variable list stores the layout recipe file identification, judging whether the layout recipe file identification is valid or not; if the layout recipe file identification is valid, judging whether the variable list is valid or not; if the variable list is valid, determining the recipe control mode, the layout recipe file identifier, the process operation recipe file identifier and a process variable list stored in the variable list as target parameter information; and if the variable list is invalid, determining the formula control mode, the layout formula file identification and the process operation formula file identification as target parameter information.
Optionally, the determining whether the path recipe file identifier is valid includes:
judging whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment or not;
and if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, determining that the path recipe file identifier is valid.
Optionally, the determining whether the layout recipe file identifier is valid includes:
judging whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment or not;
and if the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, determining that the layout recipe file identifier is valid.
Optionally, the determining whether the variable list is valid includes:
judging whether a process variable list is stored in the variable list and whether the process variable list is effective, wherein the process variable list is used for storing variable parameter values to be modified;
and if the process variable list is stored in the variable list and is valid, determining that the variable list is valid.
Optionally, the determining whether the process variable list is valid includes:
judging whether the variable parameter value in the process variable list is in a preset process parameter value range or not, and judging whether the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment or not;
and if the variable parameter value in the process variable list is in a preset process parameter value range and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, determining that the process variable list is effective.
Optionally, the variable parameters include: at least one of the process chamber room temperature, the gas flow, the duration of the process steps.
The invention also discloses a conductor process device, which comprises a controller, wherein the controller is used for receiving a process task sent by the factory automation system and obtaining target parameter information of the process task, and the target parameter information comprises a formula control mode and a formula identifier; judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment; if the formula control mode is a unique formula control mode, the formula identification comprises a path formula file identification, a path formula file is searched according to the path formula file identification, and the path formula file comprises a layout formula file and a process operation formula file; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identifier comprises a path formula file identifier, the target parameter information further comprises a process variable list, variable parameters of a process operation formula file in a path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to a layout formula file of the path formula file and the modified process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information does not comprise a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information further comprises a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; modifying the variable parameters of the process operation recipe file according to the process variable list, and executing the process task according to the layout recipe file and the modified process operation recipe file.
The embodiment of the invention has the following advantages:
the embodiment of the invention provides a processing method of a process task and semiconductor process equipment, which are applied to the semiconductor process equipment, wherein the semiconductor process equipment is connected with a factory automation system.
Drawings
FIG. 1 is a flow chart of steps of a method for processing a process task according to an embodiment of the present invention;
FIG. 2 is a flow chart of a system for determining target parameters according to an embodiment of the present invention;
fig. 3 is a block diagram of a semiconductor processing apparatus according to an embodiment of the present invention.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
In the prior art, the semiconductor process equipment can only meet the operation of a process task Job with a formula file as a path formula file, because the path formula file can only be provided with one layout formula file and one process operation formula file, the layout formula file and the process operation formula file cannot be started to operate in a free combination pairing mode according to the requirements of users; because the set value of the variable parameter in each process step is fixed in the process operation recipe file, and the process operation must be performed according to the set value, modification cannot be performed, and some key variable parameter values in the process operation recipe file cannot be modified before the process operation required by the factory automation system.
Based on this, one of the core ideas of the embodiment of the invention is that a processing method of a process task is provided, by receiving a process task sent by a factory automation system, then obtaining a target parameter from the process task, executing the process task according to a recipe control mode and a recipe identifier in the target parameter and whether the target parameter information further comprises a process variable list, and when the target parameter information further comprises the process variable list, modifying the variable parameters of a process operation recipe file, thereby realizing that different process tasks can be executed by setting different parameters in the target parameter, and meeting the recipe file control functions required by factory automation systems of different customers.
Referring to fig. 1, a step flow diagram of a processing method of a process task, where the method is applied to a semiconductor process device and the semiconductor process device is connected to a factory automation system, is shown in the embodiment of the present invention, where the method may include the following steps:
In the embodiment of the invention, the factory automation system refers to a system for automatically controlling and managing semiconductor equipment, and can send process tasks to the semiconductor process equipment, and after the semiconductor process equipment receives the process tasks, different process tasks can be executed according to target parameter information in the process tasks.
The recipe control mode refers to a mode of running process tasks, and can comprise a recipe unique control mode and a recipe adjustment control mode, wherein the recipe unique control mode can comprise a process task of executing only path recipe files, and the recipe adjustment control mode can comprise a process task of executing path recipe files containing modified process run recipe files, a process task of executing free combination of layout recipe files and process run recipe files, and a process task of executing free combination of layout recipe files and modified process run recipe files.
The recipe identifier refers to an identifier of a process file required by a process task, and an operation mode of the process task can be determined according to a recipe control mode and the recipe identifier at the same time.
In the embodiment of the invention, the semiconductor process equipment can judge that the recipe control mode is the unique recipe control mode or the recipe adjustment control mode according to the received recipe control mode identification, if the received recipe control mode identification is the RecipeOnly control mode, the recipe control mode is the unique recipe control mode, and if the received recipe control mode identification is the recipeturnning control mode, the recipe control mode is the recipe adjustment control mode.
In the embodiment of the invention, the Route report may include a fixed Layout report and a Process report, and in semiconductor Process equipment, the Route report is generally a fixed Recipe file, and flexible matching of the Layout report and the Process report cannot be performed, for example, the Route report includes a Layout report a and a Process report a; if the recipe control mode is Recipeery and the recipe mark is RouteRecipea, a corresponding path recipe file A can be searched according to RouteRecipea, and because the path recipe file A comprises a layout recipe file A and a process operation recipe file A, the process tasks are executed according to the layout recipe file A and the process operation recipe file A.
In the embodiment of the invention, the process variable list can store variable parameter values needing to be modified in the process operation recipe file, when the target parameter information also comprises the process variable list, the variable parameters of the process operation recipe file need to be modified, and when the target parameter information does not comprise the process variable list, the variable parameters of the process operation recipe file do not need to be modified.
If the recipe control mode is recipeTurning, the recipe identifier is a path recipe file identifier, and the target parameter information further includes a process variable list, then the semiconductor process equipment is described as executing the process task of the path recipe file containing the modified process run recipe file.
The Variable Table of the parameter Variable Table can be added in the process operation recipe file, the Variable parameter capable of being temporarily modified is set in the parameter Variable Table, when the Variable parameter value is actually required to be temporarily modified, the Variable parameter can be modified in the parameter Variable Table according to the modification value, for example, the temperature value of the room temperature zone of the process chamber required to be modified is 100 ℃, and the temperature value of the room temperature zone of the process chamber can be modified to be 100 ℃ in the parameter Variable Table.
In one example, the recipe control mode is a recipe adjustment control mode, the recipe is identified as Route recipe A, the variable parameter stored in the process variable list is that the temperature value of the room temperature area of the process chamber is 100 ℃, and because the recipe file corresponding to the Route recipe A is a path recipe file A, the path recipe file A comprises a layout recipe file A and a process operation recipe file A, the temperature of the room temperature area of the process chamber in the parameter variable list of the process operation recipe file A is modified to 100 ℃, and then the process task is executed according to the layout recipe file A and the modified process operation recipe file A.
In another example, the recipe control mode is a recipe adjustment control mode, the path recipe file is identified as path recipe file B, and the variable parameter values stored in the process variable list are: the time of the Process step 1 is 30min, the time of the Process step 2 is 20min, the time of the Process step 3 is 10min, the time of the Process step 1 in the parameter variable table in the Process Recipe B in the path Recipe file B is modified to 30min, the time of the Process step 2 is modified to 20min, and the time of the Process step 3 is modified to 10min; after the modification is completed, the semiconductor process equipment acquires a modified process operation recipe file B and a layout recipe file B from the path recipe file B, then the transmission of the Wafer in the process chamber is carried out according to the layout recipe file B, and the Wafer is processed according to the modified process operation recipe file B after the transmission is completed, wherein the time of a process step 1 is 30min, the time of a process step 2 is 20min, and the time of a process step 3 is 10min.
In the embodiment of the invention, if the Recipe control mode is recirculating, the Recipe identifier includes a Layout Recipe file identifier and a Process operation Recipe file identifier, and the target parameter information does not include a Process variable list, it is indicated that the semiconductor Process equipment executes a Process task in which the Layout Recipe file and the Process operation Recipe file are freely combined, and the Layout Recipe file and the Process operation Recipe file are freely combined, so that the Process task can be executed in a mode in which different Layout Recipe files and Process Recipe files are freely paired according to the user requirements, for example, the Process task can be executed in a mode in which Layout Recipe A and Process Recipe C are combined.
In an example, the recipe control mode is a control mode of recipe adjustment, and the recipe identifier is a Layout recipe file a and a Process recipe file C, and the corresponding Process operation recipe file C can be found according to the Layout recipe file a and the Process recipe file C, and then the Process task is executed according to the Process recipe file a and the Process operation recipe file C.
In the embodiment of the invention, if the recipe control mode is RecipeTurning, the recipe identifier includes a layout recipe file identifier and a process operation recipe file identifier, and the target parameter information further includes a process variable list, then the process task of freely combining the execution layout recipe file and the modified process operation recipe file is described.
In one example, the recipe control mode is a recipe adjustment control mode, the recipe is identified as Layout recipe a and Process recipe C, the variable parameter stored in the Process variable list is that the temperature value of the room temperature area of the Process chamber is 100 ℃, then the corresponding Layout recipe file a can be found according to the Layout recipe a, the corresponding Process operation recipe file C can be found according to the Process recipe C, then the temperature of the room temperature area of the Process operation recipe file C is modified to 100 ℃, the Process tasks are executed according to the Layout recipe file a and the modified Process operation recipe file C, that is, the semiconductor Process equipment performs the transmission of the Wafer in the Process chamber according to the Layout recipe file a, and the Wafer is processed according to the modified Process operation recipe file C after the transmission is completed, wherein the temperature of the room temperature area of the Process chamber is 100 ℃.
The invention executes the process task by receiving the process task sent by the factory automation system, then obtaining the target parameter from the process task, and executing the process task according to the formula control mode and the formula identifier in the target parameter and whether the target parameter information also comprises the process variable list, when the target parameter information also comprises the process variable list, the variable parameters of the process operation formula file can be modified, thereby realizing the control function of the formula file required by the factory automation system of different customers by setting different parameters in the target parameter.
In one embodiment of the present invention, before the step of receiving the process task sent by the factory automation system, the method may further include:
and receiving an instruction for starting the process task sent by the factory automation system.
In the embodiment of the invention, the semiconductor process equipment can receive the instruction for starting the process task sent by the factory automation system, and then verify the parameters contained in the process task according to the instruction so as to determine the target parameter information of the process task.
Acquiring initial parameter information of a process task according to the instruction; the initial parameter information includes: recipe control mode and recipe identification.
In the embodiment of the invention, the semiconductor process equipment can acquire the initial parameter information of the process task according to the instruction, and the initial parameter information can include the recipe control mode and the recipe identifier, which are explained before and are not described herein.
The control mode of the recipe is judged to be the only control mode of the recipe or the control mode of the recipe adjustment.
In the embodiment of the invention, the semiconductor process equipment can judge that the recipe control mode is the unique recipe control mode or the recipe adjustment control mode according to the received recipe control mode identification, if the received recipe control mode identification is the RecipeOnly control mode, the recipe control mode is the unique recipe control mode, and if the received recipe control mode identification is the recipeturnning control mode, the recipe control mode is the recipe adjustment control mode.
If the recipe control mode is the unique recipe control mode, the recipe identifier is a path recipe file identifier, whether the path recipe file identifier is valid is judged, and if the path recipe file identifier is valid, the recipe control mode and the path recipe file identifier are determined to be target parameter information.
In the embodiment of the invention, if the formula control mode is the unique formula control mode and the formula identifier is Route recipeB, the validity of the Route recipeB needs to be judged, so that the operation safety and the validity of the semiconductor process equipment are ensured, invalid operation is avoided, and the operation efficiency of the semiconductor process equipment is improved; when Route RecipeB is valid, the recipe control mode and the path recipe file identification can be determined as target parameter information.
In one embodiment of the present invention, determining whether the path recipe file identification is valid comprises:
judging whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment or not; if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, the path recipe file identifier is determined to be valid.
In the embodiment of the invention, if the path recipe file is identified as Route RecipeB, whether the path recipe file B corresponding to the Route RecipeB exists in the semiconductor process equipment or not can be judged, if the path recipe file B exists in the semiconductor process equipment, the Route RecipeB is determined to be valid, otherwise, if the path recipe file B does not exist in the semiconductor process equipment, the Route RecipeB is determined to be invalid.
If the recipe control mode is a recipe adjustment control mode, the recipe identifier is a path recipe file identifier, the initial parameter information further comprises a variable list, whether the path recipe file identifier and the variable list are valid or not is judged, and if the path recipe file identifier and the variable list are valid, the recipe control mode, the path recipe file identifier and the process variable list stored in the variable list are determined to be target parameter information.
In the embodiment of the invention, the variable list is used for storing the layout recipe file identifier and the process parameter variable list, when the recipe control mode is the recipe adjustment control mode, the recipe identifier is the path recipe file identifier, and the initial parameter information also comprises the variable list, the validity of the path recipe file identifier and the variable list needs to be judged, and the validity of the path recipe file identifier is judged and is described before and is not repeated here; judging the validity of the variable list, namely judging the validity of the process variable list in the variable list, and determining the process variable list stored in the recipe control mode, the path recipe file identifier and the variable list as target parameter information when determining that the path recipe file identifier and the variable list are valid.
In one example, the recipe control mode is identified as RecipeTurning, the recipe is identified as Route RecipeB, the process variable list is stored in the variable list, and both Route RecipeB and the variable list are valid, then RecipeTurning, route RecipeB and the process variable list can be determined as target parameter information.
If the formula control mode is a formula adjustment control mode, the formula identifier is a process operation formula file identifier and is effective, and the initial parameter information also comprises a variable list, judging whether the variable list stores a layout formula file identifier or not; if the variable list stores the layout recipe file identification, judging whether the layout recipe file identification is valid or not; if the layout formula file identification is valid, judging whether the variable list is valid or not; if the variable list is valid, determining the recipe control mode, the layout recipe file identification, the process operation recipe file identification and the process variable list stored in the variable list as target parameter information.
In the embodiment of the invention, the variable list can also set the Layout recipe file identification according to the requirement of the user so as to meet the requirement that the user uses the combination between different Layout recipe files and Process operation recipe files, if the recipe control mode is the retransmission recipe A and is effective, if the initial parameter information also comprises the variable list, whether the Layout recipe file identification is stored in the variable list can be judged, if the Layout recipe C is stored, whether the Layout recipe C is effective can be judged, if the Layout recipe C is effective, whether the variable list is effective can be judged so as to determine whether the variable parameters of the Process operation recipe file A are modified, and if the variable list is effective, the Process retransmission recipe A and the Layout recipe C Process variable list can be determined as target parameter information.
In one embodiment of the present invention, determining whether the layout recipe file identification is valid comprises:
judging whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment or not; if the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, the layout recipe file identifier is determined to be valid.
In the embodiment of the invention, when the Layout formula file identifier is the Layout recipe C, whether the Layout formula file C corresponding to the Layout recipe C exists in the semiconductor process equipment or not can be judged, and if so, the effective Layout formula file identifier is indicated; if not, the layout recipe file identification is invalid, that is, the instruction for starting the process task is invalid.
In one embodiment of the present invention, determining whether the variable list is valid includes:
judging whether a process variable list is stored in the variable list and whether the process variable list is effective, wherein the process variable list is used for storing variable parameter values to be modified; if the process variable list is stored in the variable list and the process variable list is valid, determining that the variable list is valid.
In the embodiment of the invention, whether the process parameter values in the process operation recipe file are modified can be determined by judging whether the process variable list is stored in the variable list and whether the process variable list is valid, if the process variable list exists and is valid, the variable list is determined to be valid, and if the process variable list does not exist or the process variable list is not valid, the variable list is determined to be invalid.
In one embodiment of the present invention, determining whether the process variable list is valid may include:
judging whether the variable parameter value in the process variable list is in a preset process parameter value range or not, and judging whether the process parameter corresponding to the variable parameter value exists in semiconductor process equipment or not; if the variable parameter value in the process variable list is in the preset process parameter value range and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, determining that the process variable list is effective.
In the embodiment of the invention, the preset process parameter value range refers to a normal interval range of process parameter values, the process parameter values set in the process list should be in the preset process parameter value range, and the process parameters corresponding to the process parameter values should also exist in the semiconductor process equipment, for example, the variable parameter values in the process variable list are 200 ℃ of the room temperature zone of the process chamber, but the preset process parameter value range is (100 ℃,180 ℃), and obviously 200 ℃ is not in the preset process parameter range, so that the process variable list is invalid; when the process parameter value is the heating time of 1h, but the corresponding heating time does not exist in the semiconductor process equipment, namely the corresponding process task does not need to be heated, the process variable list is invalid; conversely, if the variable parameter value in the process variable list is within the preset process parameter value range and the process parameter corresponding to the process parameter value exists in the semiconductor process equipment, determining that the process variable list is valid.
In one embodiment of the present invention, the variable parameters may include: at least one of the process chamber room temperature, the gas flow, the duration of the process steps.
In the embodiment of the invention, some variable parameters of the process operation recipe file can be modified according to the need, wherein the variable parameters refer to a series of basic data or indexes for completing the process task, that is, the basic parameters form the content of the whole process task flow, and the process parameters can comprise: at least one of the temperature of the room temperature region of the process chamber, the gas flow rate, and the time of the process steps can be other basic parameters related to the whole process task flow, and the process is not limited herein.
And if the variable list is invalid, determining the recipe control mode, the layout recipe file identification and the process operation recipe file identification as target parameter information.
In the embodiment of the invention, when the recipe control mode is identified as recirculating, the recipe is identified as Process RecipeA and valid, the variable list contains the Layout RecipeC and is valid, but the variable list is invalid, that is, when the Process variable list does not exist or is invalid, it is indicated that the variable parameters of the Process operation recipe file a do not need to be modified, and at the moment, the RecipeTurning, the Process RecipeA and the Layout RecipeC can be determined as target parameter information.
Referring to fig. 2, a flowchart of a system for determining a target parameter according to an embodiment of the present invention is shown, where a first mode is set as a control mode for recipe uniqueness, a second mode is set as a control mode for recipe adjustment, after receiving an instruction for starting a process task, a semiconductor process device obtains set initial parameter information from an operation instruction, and determines whether the mode for starting the process task is the first mode or the second mode according to the recipe control mode;
when the recipe mode is determined to be the first mode, judging whether a path recipe file corresponding to the recipe identifier exists in semiconductor process equipment (i.e. a machine table), if not, indicating that the recipe identifier is invalid, and failing to establish the process task; judging whether a process variable list in a variable list exists and is effective if a path recipe file corresponding to the recipe identifier exists in the semiconductor process equipment, if the process variable list in the variable list exists and is effective, indicating that the recipe identifier is effective, the variable list is effective, storing the path recipe file identifier and the process variable list, modifying variable parameter values of process operation recipe files in the path recipe files according to variable parameter values stored in the process variable list, and generating target parameters of Job according to the path recipe file identifier, a control mode of recipe adjustment and the process variable list; if the process variable list in the variable list does not exist or is invalid, the recipe identification is indicated to be valid, the path recipe file identification is saved, and the target parameter of Job is generated according to the path recipe file identification and the unique control mode of the recipe;
When the recipe mode is determined to be the second mode, judging whether the recipe identifier is a process operation recipe file identifier, when the recipe identifier is the process operation recipe file identifier, judging whether a process operation recipe file corresponding to the process operation recipe file identifier exists in the semiconductor process equipment, if the process operation recipe file corresponding to the process operation recipe file identifier exists in the semiconductor process equipment, judging whether a layout recipe file identifier is arranged in a variable list and the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, if the layout recipe file identifier is arranged in the variable list and the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, judging whether a process variable list in the variable list is valid and exists, if the process variable list in the variable list is valid, the recipe identifier is valid, and storing the name of the process operation recipe file, the name of the layout recipe file and the process variable list; if the process variable list in the variable list is not present or invalid, the process variable list indicates that the process operation recipe file is not required to be modified, the recipe identification is valid, the process operation recipe file identification and the layout recipe file identification are saved, and the target parameter information of Job is generated according to the process operation recipe file identification, the layout recipe file identification and the control mode of recipe adjustment.
The invention discloses a processing method of a process task, which is characterized in that the process task transmitted by a factory automation system is received, then a target parameter is obtained from the process task, the process task is executed according to a formula control mode and a formula identifier in the target parameter and whether a process variable list is further included in target parameter information, when the process variable list is further included in the target parameter information, the variable parameters of a process operation formula file can be modified, different process tasks can be executed by setting different parameters in the target parameter, and the control function of the formula file required by the factory automation system of different customers is met. The invention meets the recipe file control function required by factory automation systems of different clients, and the clients can achieve the required recipe file control function only by setting different target parameters in the instruction; the invention increases the judgment on the validity of the modification variable of the process recipe file, and ensures the safety of the process operation of the semiconductor process equipment; the invention increases the judgment of the validity of the recipe file identification and ensures the safety and the validity of the operation of the equipment.
It should be noted that, for simplicity of description, the method embodiments are shown as a series of acts, but it should be understood by those skilled in the art that the embodiments are not limited by the order of acts, as some steps may occur in other orders or concurrently in accordance with the embodiments. Further, those skilled in the art will appreciate that the embodiments described in the specification are presently preferred embodiments, and that the acts are not necessarily required by the embodiments of the invention.
Referring to fig. 3, there is shown a block diagram of a semiconductor processing apparatus 20, including a controller 201,
the controller 201 is configured to receive a process task sent by the factory automation system, and obtain target parameter information of the process task, where the target parameter information includes a recipe control mode and a recipe identifier; judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment; if the formula control mode is a unique formula control mode, the formula identification comprises a path formula file identification, a path formula file is searched according to the path formula file identification, and the path formula file comprises a layout formula file and a process operation formula file; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identifier comprises a path formula file identifier, the target parameter information further comprises a process variable list, variable parameters of a process operation formula file in a path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to a layout formula file of the path formula file and the modified process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information does not comprise a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information further comprises a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; modifying the variable parameters of the process operation recipe file according to the process variable list, and executing the process task according to the layout recipe file and the modified process operation recipe file.
In one embodiment of the present invention, the controller 201 is further configured to receive an instruction sent by the factory automation system to initiate the process task; acquiring initial parameter information of the process task according to the instruction; the initial parameter information includes: recipe control mode and recipe identification; judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment; if the formula control mode is a unique formula control mode, the formula identifier is a path formula file identifier, judging whether the path formula file identifier is valid, and if the path formula file identifier is valid, determining the formula control mode and the path formula file identifier as target parameter information; if the formula control mode is a formula adjustment control mode, the formula identifier is a path formula file identifier, the initial parameter information further comprises a variable list, whether the path formula file identifier and the variable list are valid or not is judged, and if the path formula file identifier and the variable list are valid, the formula control mode, the path formula file identifier and a process variable list stored in the variable list are determined to be target parameter information; if the formula control mode is a formula adjustment control mode, the formula identifier is a process operation formula file identifier and is effective, and the initial parameter information also comprises a variable list, judging whether a layout formula file identifier is stored in the variable list; if the variable list stores the layout recipe file identification, judging whether the layout recipe file identification is valid or not; if the layout recipe file identification is valid, judging whether the variable list is valid or not; if the variable list is valid, determining the recipe control mode, the layout recipe file identifier, the process operation recipe file identifier and a process variable list stored in the variable list as target parameter information; and if the variable list is invalid, determining the formula control mode, the layout formula file identification and the process operation formula file identification as target parameter information.
In one embodiment of the present invention, the controller 201 is further configured to determine whether a path recipe file corresponding to the path recipe file identifier exists in the semiconductor process device; and if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, determining that the path recipe file identifier is valid.
In one embodiment of the present invention, the controller 201 is further configured to determine whether a layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process device; and if the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, determining that the layout recipe file identifier is valid.
In one embodiment of the present invention, the controller 201 is further configured to determine whether a process variable list is stored in the variable list and the process variable list is valid, where the process variable list is used to store variable parameter values that need to be modified; and if the process variable list is stored in the variable list and is valid, determining that the variable list is valid.
In one embodiment of the present invention, the controller 201 is further configured to determine whether the variable parameter value in the process variable list is within a preset process parameter value range, and whether a process parameter corresponding to the variable parameter value exists in the semiconductor process device; and if the variable parameter value in the process variable list is in a preset process parameter value range and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, determining that the process variable list is effective.
In one embodiment of the present invention, the variable parameters include: at least one of the process chamber room temperature, gas flow, and time of the process step.
The invention discloses semiconductor process equipment, which comprises a controller, wherein the controller is used for receiving a process task sent by a factory automation system, acquiring target parameter information of the process task, and the target parameter information comprises a formula control mode and a formula identifier; judging the control mode of the formula as the unique control mode of the formula or the control mode of formula adjustment; if the formula control mode is a unique formula control mode, the formula identifier comprises a path formula file identifier, searching a path formula file according to the path formula file identifier, wherein the path formula file comprises a layout formula file and a process operation formula file; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identifier comprises a path formula file identifier, the target parameter information further comprises a process variable list, the variable parameters of the process operation formula file in the path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process tasks are executed according to the layout formula file of the path formula file and the modified process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information does not comprise a process variable list, searching the layout formula file according to the layout formula file identification, and searching the process operation formula file according to the process operation formula file identification; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information further comprises a process variable list, searching the layout formula file according to the layout formula file identification, and searching the process operation formula file according to the process operation formula file identification; modifying the variable parameters of the process operation recipe file according to the process variable list, and executing the process task according to the layout recipe file and the modified process operation recipe file. The invention meets the recipe file control function required by factory automation systems of different clients, and the clients can achieve the recipe file control function required by the clients only by setting different initial parameters in the instructions; the invention increases the judgment on the validity of the modification variable of the process recipe file, and ensures the safety of the operation of the equipment process; the invention increases the judgment of the validity of the recipe file identification and ensures the safety and the validity of the operation of the equipment.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described by differences from other embodiments, and identical and similar parts between the embodiments are all enough to be referred to each other.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the embodiments of the invention.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or terminal device comprising the element.
The foregoing has outlined the detailed description of a process task and a semiconductor processing device, wherein specific examples are provided herein to illustrate the principles and embodiments of the present invention, and the above examples are provided to assist in understanding the method and core idea of the present invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.
Claims (10)
1. A method of processing a process task, characterized by being applied to a semiconductor process equipment, the semiconductor process equipment being coupled to a factory automation system, the method comprising:
receiving a process task sent by the factory automation system, and acquiring target parameter information of the process task, wherein the target parameter information comprises a formula control mode and a formula identifier;
judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment;
if the formula control mode is a unique formula control mode, the formula identification comprises a path formula file identification, a path formula file is searched according to the path formula file identification, and the path formula file comprises a layout formula file and a process operation formula file; executing the process task according to the layout formula file and the process operation formula file;
If the formula control mode is a formula adjustment control mode, the formula identifier comprises a path formula file identifier, the target parameter information further comprises a process variable list, variable parameters of a process operation formula file in a path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to a layout formula file of the path formula file and the modified process operation formula file;
if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information does not comprise a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; executing the process task according to the layout formula file and the process operation formula file;
if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information further comprises a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; modifying the variable parameters of the process operation recipe file according to the process variable list, and executing the process task according to the layout recipe file and the modified process operation recipe file.
2. The method of claim 1, wherein prior to the step of receiving the process task sent by the factory automation system, the method further comprises:
receiving an instruction for starting the process task sent by the factory automation system;
acquiring initial parameter information of the process task according to the instruction; the initial parameter information includes: recipe control mode and recipe identification;
judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment;
if the formula control mode is a unique formula control mode, the formula identifier is a path formula file identifier, judging whether the path formula file identifier is valid, and if the path formula file identifier is valid, determining the formula control mode and the path formula file identifier as target parameter information;
if the formula control mode is a formula adjustment control mode, the formula identifier is a path formula file identifier, the initial parameter information further comprises a variable list, whether the path formula file identifier and the variable list are valid or not is judged, and if the path formula file identifier and the variable list are valid, the formula control mode, the path formula file identifier and a process variable list stored in the variable list are determined to be target parameter information;
If the formula control mode is a formula adjustment control mode, the formula identifier is a process operation formula file identifier and is effective, and the initial parameter information also comprises a variable list, judging whether a layout formula file identifier is stored in the variable list; if the variable list stores the layout recipe file identification, judging whether the layout recipe file identification is valid or not; if the layout recipe file identification is valid, judging whether the variable list is valid or not; if the variable list is valid, determining the recipe control mode, the layout recipe file identifier, the process operation recipe file identifier and a process variable list stored in the variable list as target parameter information;
and if the variable list is invalid, determining the formula control mode, the layout formula file identification and the process operation formula file identification as target parameter information.
3. The method of claim 2, wherein said determining whether the path recipe file identification is valid comprises:
judging whether the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment or not;
And if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, determining that the path recipe file identifier is valid.
4. The method of claim 2, wherein said determining whether the layout recipe file identification is valid comprises:
judging whether the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment or not;
and if the layout recipe file corresponding to the layout recipe file identifier exists in the semiconductor process equipment, determining that the layout recipe file identifier is valid.
5. The method of claim 2, wherein said determining whether said variable list is valid comprises:
judging whether a process variable list is stored in the variable list and whether the process variable list is effective, wherein the process variable list is used for storing variable parameter values to be modified;
and if the process variable list is stored in the variable list and is valid, determining that the variable list is valid.
6. The method of claim 5, wherein said determining whether said process variable list is valid comprises:
Judging whether the variable parameter value in the process variable list is in a preset process parameter value range or not, and judging whether the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment or not;
and if the variable parameter value in the process variable list is in a preset process parameter value range and the process parameter corresponding to the variable parameter value exists in the semiconductor process equipment, determining that the process variable list is effective.
7. The method of claim 1, wherein the variable parameter comprises: at least one of the process chamber room temperature, the gas flow, the duration of the process steps.
8. The semiconductor process equipment is characterized by comprising a controller, wherein the controller is used for receiving a process task sent by the factory automation system and obtaining target parameter information of the process task, and the target parameter information comprises a formula control mode and a formula identifier; judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment; if the formula control mode is a unique formula control mode, the formula identification comprises a path formula file identification, a path formula file is searched according to the path formula file identification, and the path formula file comprises a layout formula file and a process operation formula file; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identifier comprises a path formula file identifier, the target parameter information further comprises a process variable list, variable parameters of a process operation formula file in a path formula file corresponding to the path formula file identifier are modified according to the process variable list, and the process task is executed according to a layout formula file of the path formula file and the modified process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information does not comprise a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; executing the process task according to the layout formula file and the process operation formula file; if the formula control mode is a formula adjustment control mode, the formula identification comprises a layout formula file identification and a process operation formula file identification, and the target parameter information further comprises a process variable list, searching a layout formula file according to the layout formula file identification, and searching a process operation formula file according to the process operation formula file identification; modifying the variable parameters of the process operation recipe file according to the process variable list, and executing the process task according to the layout recipe file and the modified process operation recipe file.
9. The semiconductor processing apparatus of claim 8 wherein said controller is further configured to receive instructions sent by said factory automation system to initiate said process task; acquiring initial parameter information of the process task according to the instruction; the initial parameter information includes: recipe control mode and recipe identification; judging the control mode of the formula as a control mode of only formula or a control mode of formula adjustment; if the formula control mode is a unique formula control mode, the formula identifier is a path formula file identifier, judging whether the path formula file identifier is valid, and if the path formula file identifier is valid, determining the formula control mode and the path formula file identifier as target parameter information; if the formula control mode is a formula adjustment control mode, the formula identifier is a path formula file identifier, the initial parameter information further comprises a variable list, whether the path formula file identifier and the variable list are valid or not is judged, and if the path formula file identifier and the variable list are valid, the formula control mode, the path formula file identifier and a process variable list stored in the variable list are determined to be target parameter information; if the formula control mode is a formula adjustment control mode, the formula identifier is a process operation formula file identifier and is effective, and the initial parameter information also comprises a variable list, judging whether a layout formula file identifier is stored in the variable list; if the variable list stores the layout recipe file identification, judging whether the layout recipe file identification is valid or not; if the layout recipe file identification is valid, judging whether the variable list is valid or not; if the variable list is valid, determining the recipe control mode, the layout recipe file identifier, the process operation recipe file identifier and a process variable list stored in the variable list as target parameter information; and if the variable list is invalid, determining the formula control mode, the layout formula file identification and the process operation formula file identification as target parameter information.
10. The semiconductor processing apparatus of claim 9, wherein the controller is further configured to determine whether a path recipe file corresponding to the path recipe file identification exists in the semiconductor processing apparatus; and if the path recipe file corresponding to the path recipe file identifier exists in the semiconductor process equipment, determining that the path recipe file identifier is valid.
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