CN116125568A - Double-focus achromatic super-structured lens, design preparation method thereof and imaging device applied to double-focus achromatic super-structured lens - Google Patents
Double-focus achromatic super-structured lens, design preparation method thereof and imaging device applied to double-focus achromatic super-structured lens Download PDFInfo
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- CN116125568A CN116125568A CN202211740754.1A CN202211740754A CN116125568A CN 116125568 A CN116125568 A CN 116125568A CN 202211740754 A CN202211740754 A CN 202211740754A CN 116125568 A CN116125568 A CN 116125568A
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Abstract
The invention discloses a double-focus achromatic super-structured lens, which comprises a dielectric substrate and a dielectric nano-pillar structural unit array, wherein the dielectric nano-pillar structural unit array is arranged on the dielectric substrate and comprises a plurality of dielectric nano-pillar structural units with different shapes. According to the invention, the phase distribution and the structure matching optimization of the super-structured lens array are designed, the achromatic super-structured lens array with orthogonal polarization dual channels is obtained, and the light field imaging with three different focusing modes is realized by adjusting the linear polarization state of incident light, so that the light field imaging can be carried out on different depth ranges, and the depth expansion is realized.
Description
Technical Field
The invention relates to the technical field of optical lenses, in particular to an ultra-structured lens for realizing broadband achromatic imaging, and particularly relates to a double-focus achromatic ultra-structured lens, a design preparation method thereof and an imaging device applied to the double-focus achromatic ultra-structured lens.
Background
In a traditional light field imaging system, a micro lens array is added in a light path to obtain two-dimensional intensity information and two-dimensional direction information at the same time, and the traditional micro lens array has limitations, such as being influenced by diffraction limit, the diameter of a micro lens cannot be made too small, the depth of field range close to the natural compound eye of an insect cannot be obtained, and spherical aberration exists to influence imaging quality. These limitations result in complex conventional light field imaging optics, difficult processing, bulky and difficult device integration.
Along with the development of intelligent equipment, various devices of an optical system are developed towards miniaturization, integration, multifunction and high performance. The super-structured surface is a novel planar optical regulating element based on the generalized Snell's law, and by regulating the shape, size, position and direction of a scatterer, any electromagnetic wave parameters including the phase, amplitude, polarization and frequency of light can be regulated. The super-structured surface is used for imaging, and a novel element which is light, thin, planar and multifunctional integrated is called a super-structured lens, so that a novel scheme is provided for reducing the complexity of an optical system, and the super-structured lens has a wide application prospect.
In addition, the depth of field of the traditional light field imaging is limited, and the traditional method adopts the staggered arrangement of micro lenses with different focal lengths to realize the extended depth of field, but the reduction of the spatial resolution is caused, so that the trade-off between space, angle and depth of field is needed. The focal length of the micro lens cannot be regulated and controlled in real time after being designed according to a specific occasion, the polarization regulation function of the super-structured lens can realize the switching of focal lengths under different polarization channels, the function of expanding the depth of field can be realized on the basis of not reducing the spatial resolution and the visual angle, and most of the current polarization multiplexing super-structured lenses can only realize imaging under single wavelength or discrete wavelength and cannot meet the broadband achromatic imaging of visible light, so that the development of the super-structured lens capable of realizing broadband achromatic imaging under a plurality of polarization channels is urgently needed, and the application of the super-structured lens is widened.
Disclosure of Invention
The invention aims to design a double-focus achromatic super-structure lens, a design preparation method thereof and an imaging device applying the double-focus achromatic super-structure lens, so as to solve the problems in the background art, realize the coding of the double-focus super-structure lens of three independent polarization channels by regulating the in-plane angles of the nano structures at all positions, realize the enhancement of the imaging depth resolution of a light field under different focal length modes by regulating the polarization and the wave band range of incident light and emergent light, and have the advantages of tunability, high integration level, multiple functions and the like.
In order to achieve the above purpose, the present invention provides the following technical solutions: the double-focus achromatic super-structure lens comprises a light source, a main lens, a linear polaroid, a polarization conversion plate, a first objective lens, a double-focus achromatic super-structure lens array, a second objective lens and an optical sensor, wherein the light source, the main lens, the linear polaroid, the polarization conversion plate, the first objective lens, the double-focus achromatic super-structure lens array, the second objective lens and the optical sensor sequentially form optical path connection, and the double-focus achromatic super-structure lens array is formed by a plurality of super-structure lens arrangement. The super-structure lens comprises a dielectric substrate and a dielectric nano-pillar structure unit array, wherein the dielectric nano-pillar structure unit array is arranged on the dielectric substrate, and the dielectric nano-pillar structure unit array comprises a plurality of dielectric nano-pillar structure units with different shapes. The dielectric nano-pillar cell array is represented by a Jones matrix, the Jones matrix comprises two independent phase information, spherical focusing phase sections corresponding to different polarization states respectively, and the phase sections are designed to be reconstructed independently through two different orthogonal linear polarizations.
As a preferred embodiment of the present invention, the dielectric substrate is made of indium tin oxide conductive glass, a quartz substrate, a silicon oxide substrate, a silicon substrate or a diamond substrate.
As a preferred embodiment of the present invention, the dielectric nanopillar unit is made of TiO2 or HfO 2 、ZrO 2 、GaN、Si 2 N 3 Si, gaAs, znS or AlN.
As a preferred embodiment of the present invention, the dielectric nanopillar structure unit has a rectangular, v-shaped, asymmetric cross-shaped or i-shaped shape.
As a preferred embodiment of the invention, the height of the dielectric nano-pillar structural unit ranges from 200nm to 1500nm, the size of the dielectric nano-pillar structural unit on the surface of the dielectric substrate ranges from 20nm to 1000nm, the distribution size of the dielectric nano-pillar structural unit on the dielectric substrate can be regulated and controlled at will, and the dielectric nano-pillar structural unit is arranged at will on the surface of the dielectric substrate.
As a preferred embodiment of the present invention, a double-focus achromatic super-structured lens is prepared, comprising the steps of:
designing a phase;
then, obtaining propagation phase responses of nano units with different sizes and structures under different wavelengths through numerical simulation, and constructing a database;
periodically distributing dielectric nano-pillar units on the dielectric substrate according to a specific size to form phase response and match with lens phase distribution;
generating a layout unit;
generating a layout array;
generating the super-structured lens;
selecting a transparent medium substrate, and coating photoresist on the surface;
baking, exposing and developing by using an electron beam lithography technology;
manufacturing a hole structure complementary with the dielectric nano-pillar structure array on a transparent dielectric substrate, and then depositing a dielectric material to fill the hole by using an atomic layer deposition technology to obtain the dielectric nano-structure array and an attached dielectric film layer;
then removing the dielectric film layer by using an ion beam etching technology;
and finally, removing the photoresist by using a reactive ion etching technology, releasing the dielectric nanostructure array, and removing the metal mask to finish the preparation of the super-structure lens.
As a preferred embodiment of the present invention, the dielectric nanopillar unit array includes a plurality of dielectric nanopillar structural units of the same or different sizes and is represented by a jones matrix, where the jones matrix includes two independent phase information, and the two independent phase information are respectively corresponding to spherical focusing phase sections of different polarization states, and the phase sections are designed to be independently reconfigurable through two different orthogonal linear polarizations.
Compared with the prior art, the invention provides the double-focus achromatic super-structured lens, the design and preparation method thereof and the imaging device applying the same, and the double-focus achromatic super-structured lens has the following beneficial effects:
the invention can realize the coding of the bifocal super-structured lens of three independent polarization channels by regulating and controlling the in-plane angles of the nano structures at all positions.
According to the invention, light field imaging with three different focusing modes is realized by adjusting the polarization and the wave band range of incident light and emergent light, and light field imaging can be carried out on different depth of field ranges, so that depth of field extension is realized.
The invention reasonably designs the phase distribution of the super-structured lens through structural phase matching, realizes the polarization dual-channel achromatic super-structured lens, can perform achromatic focusing at different focal lengths, forms a double-focus achromatic super-structured lens array, and has the filling rate of 100 percent.
The imaging device can perform light field imaging on different depth of field ranges by adopting the double-focus achromatic super-structured lens, solves the problem of restriction of the depth of field range, the spatial resolution and the visual angle in light field imaging, and expands the depth of field range of light field imaging under the condition of not reducing the spatial resolution and the visual angle range.
The double-focus achromatic super-structured lens can be used in a visible light broadband range, can be used in a wider wave band by selecting different materials and structures, and can be used in other wave bands such as ultraviolet wave bands, infrared wave bands and the like.
The double-focus achromatic super-structured lens array has the advantages of being ultrathin and easy to integrate, can be integrated with a sensor chip and the like, and realizes super-compact light field imaging equipment.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
fig. 1 is a schematic view of the optical path of an imaging device employing a double-focus achromatic super-lens according to the present invention.
Wherein 1 is a light source, 2 is a main lens, 3 is a linear polaroid, 4 is a polarization conversion sheet, 5 is a first objective lens, 6 is a double-focus achromatic super-structure lens array, 7 is a second objective lens, and 8 is an optical sensor;
FIG. 2 is a schematic diagram of an array arrangement of a double-focus achromatic super-constructed lens array according to the present invention;
FIG. 3 is a schematic view of light focusing in three modes of a double-focus achromatic super-constructed lens array according to the present invention;
FIG. 4 is a graph of the focal length optical characterization of a dual-focus achromatic super-constructed lens of the present invention in different polarization states;
FIG. 5 is a schematic diagram of a design flow and a preparation flow of a double-focus achromatic super-constructed lens according to the present invention;
fig. 6 is a schematic diagram of a function of extending a depth of field of a light field according to an embodiment of the present invention.
Detailed Description
For a better understanding of the objects, structures and functions of the present invention, the method for preparing the same, and the imaging apparatus using the same will be described in further detail with reference to the accompanying drawings.
The double-focus achromatic super-structured lens comprises a dielectric substrate and dielectric nano-pillar structural unit arrays with different shapes, wherein the dielectric nano-pillar structural unit arrays with different shapes are arranged on the dielectric substrate.
Further, the dielectric substrate is made of indium tin oxide conductive glass, a quartz substrate, a silicon oxide substrate, a silicon substrate or a diamond substrate.
Further, the dielectric nano-pillar unit is made of TiO2, hfO2, zrO2, gaN, si2N3, si, gaAs, znS or AlN.
Further, the dielectric nano-pillar structure unit is rectangular, v-shaped, asymmetric cross-shaped or I-shaped.
Further, the height range of the dielectric nano-pillar structure unit is 200nm-1500nm, the size of the dielectric nano-pillar structure unit on the surface of the dielectric substrate is 20nm-1000nm, the distribution size of the dielectric nano-pillar structure unit on the dielectric substrate can be regulated and controlled at will, and the dielectric nano-pillar structure unit is arranged at will on the surface of the dielectric substrate.
The preparation method of the double-focus achromatic super-structured lens specifically comprises the following steps:
designing a phase;
then, obtaining propagation phase responses of nano units with different sizes and structures under different wavelengths through numerical simulation, and constructing a database;
periodically distributing dielectric nano-pillar units on the dielectric substrate according to a specific size to form phase response and match with lens phase distribution;
generating a layout unit;
generating a layout array;
generating the super-structured lens;
selecting a transparent medium substrate, and coating polymethyl methacrylate (PMMA) on the surface;
baking, exposing and developing by using an electron beam lithography technology;
manufacturing a hole structure complementary with the dielectric nano-pillar structure array on a transparent dielectric substrate, and then depositing a dielectric material to fill the hole by using an atomic layer deposition technology to obtain the dielectric nano-structure array and an attached dielectric film layer;
then removing the dielectric film layer by using an ion beam etching technology;
finally, a reactive ion etching technology is used for removing PMMA, releasing the dielectric nanostructure array, removing the metal mask and completing the preparation of the super-structured lens.
Further, the dielectric nano-pillar unit array comprises a plurality of dielectric nano-pillar structural units with nano-dimensions of the same or different sizes, and can be represented by a jones matrix, wherein the jones matrix comprises two independent phase information, and the two independent phase information respectively correspond to spherical focusing phase sections with different polarization states, and the phase sections can be independently reconstructed through two different orthogonal linear polarizations.
The imaging device using the double-focus achromatic super-constructed lens comprises a light source 1, a main lens 2, a linear polaroid 3, a polarization conversion sheet 4, a first objective lens 5, a double-focus achromatic super-constructed lens array 6, a second objective lens 7 and an optical sensor 8, wherein the light source 1, the main lens 2, the linear polaroid 3, the polarization conversion sheet 4, the first objective lens 5, the double-focus achromatic super-constructed lens array 6, the second objective lens 7 and the optical sensor 8 sequentially form optical path connection, and the double-focus achromatic super-constructed lens array 6 consists of a plurality of super-constructed lens arrangement;
when the device is used, linear polarized light is generated by carrying out polarization through the linear polarizing plate 3, when x-ray polarization is incident, the focal length of the double-focus achromatic super-structured lens is fx, and in a light field imaging device, light field imaging is carried out on a near field range, and the depth of field of the light field is DOFx; when y linear polarization is incident, the focal length of the double-focus achromatic super-constructed lens is fy, light field imaging is carried out on a distant range, and the depth of field of the light field is DOFy; when 45-degree polarized light is incident, light field imaging is carried out on a near view range and a far view range simultaneously, the depth of field range of the light field is DOFx+DOFy, and the depth of field extended light field imaging is carried out under different modes.
Wherein each dielectric nanopillar structural unit is considered a linear birefringent unit, then the dielectric nanopillar structural units can be expressed in terms of jones matrix:
wherein, the liquid crystal display device comprises a liquid crystal display device,
and->
The phase delay of the linearly polarized incident light along the long axis and the short axis of the nanostructure unit is determined by the structural parameters of the long axis and the short axis of the nanostructure unit, and the phase of the emergent light can cover the range of 0-2 pi through the size of the proper structural parameters.
To achieve the lens focusing function, the phase distribution of the super-structured surface should follow the spherical lens phase formula:
wherein lambda is the design wavelength, x, y are the position coordinates of the nanostructure unit, and f is the focal length.
To achieve polarized double Jiao Chaogou lenses, switching of the focal length of the super-lenses is achieved by changing the polarization state of the incident light. For the phases of the super-structure lenses of different polarization channels, the phase profile is designed
To control the phase distribution of the incident x-polarized light, distance f in the z-direction 1 Focusing; design phase profile +.>
To control the phase distribution at the incidence of y-polarized light, the distance f in the z-direction 2 Focusing.
The design of the super-structured surface phase regulation adopts transmission phase, and the phase response of waveguide effect propagation of each nano-pillar structure can be expressed as follows:
wherein n is eff Is the effective refractive index of the nanopillar, which is related to the intrinsic refractive index and cross-sectional shape of the nanopillar; lambda is the wavelength and H is the height of the nanopillar structure.
Four structures with different cross sections are selected as structural units of the super-structured surface, and as shown in fig. 2, phase response databases with different size parameters under different wavelengths are obtained through FDTD numerical simulation when x polarized light and y polarized light are respectively incident.
In order to achieve a spherical lens function for broadband achromatic focusing, the phase of the super-structured surface should satisfy the formula:
wherein lambda is the design wavelength, x, y are the position coordinates of the nanostructure unit, f is the focal length, r λ Is a wavelength dependent value introduced. The distance between the position and the center of the nanostructure unit is less than r λ The relationship of the lens phase response to wavenumber (2pi/lambda) is converted to a positive correlation, so phase matching can be provided by the nanostructure elements, and r λ Is wavelength dependent and then precisely matches the structural dispersion by constructing a phase dispersion relationship at any location. R for different wavelengths by particle swarm optimization algorithm PSO λ Optimizing the value to find the most suitable r λ The value is such that the lens phase and structural phase match error under both x and y polarization channels is minimized. Finally, the phase profile of the bifocal broadband achromatic lens of the x and y polarized channels is encoded onto a single super-structured surface, switching under incidence of left-hand and y-ray polarized light, respectively. Fig. 4 shows a graph of the focal length optical characterization of the double-focus achromatic super-constructed lens of the present invention at different polarized incidence.
FIG. 3 is a schematic view of the focusing of light rays in three modes of the present invention, a double-focus achromatic super-constructed lens at a distance f under x-polarized incidence x Focusing at a focal length of (2) is mode 1; under the incidence of y linear polarized light, the double-focus achromatic super-constructed lens is at a distance f y Focusing at a focal length of (2) is mode; under 45-degree linear polarized light incidence, the double-focus achromatic super-constructed lens is at a distance f x And distance f y Simultaneous focusing is performed at the focal length of (2), mode 3.
Fig. 6 shows a schematic diagram of the function of extending the depth of field of the light field, in which, in the mode 1, the near view with the distance ax is imaged, the depth of field range is DOFx, in the mode 2, the far view with the distance ay is imaged, in the mode 3, the near view with the distance ax and the far view with the distance ay are imaged at the same time, and the depth of field range is dofx+dofy.
It will be understood that the invention has been described in terms of several embodiments, and that various changes and equivalents may be made to these features and embodiments by those skilled in the art without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (7)
1. A double-focus achromatic super-constructed lens, characterized by: the double-focus achromatic super-structure lens array comprises a light source, a main lens, a linear polaroid, a polarization conversion plate, a first objective lens, a double-focus achromatic super-structure lens array, a second objective lens and an optical sensor, wherein the light source, the main lens, the linear polaroid, the polarization conversion plate, the first objective lens, the double-focus achromatic super-structure lens array, the second objective lens and the optical sensor sequentially form optical path connection, and the double-focus achromatic super-structure lens array is formed by a plurality of super-structure lens arrangement; the super-structure lens comprises a dielectric substrate and a dielectric nano-pillar structure unit array, wherein the dielectric nano-pillar structure unit array is arranged on the dielectric substrate and comprises a plurality of dielectric nano-pillar structure units with different shapes; the dielectric nano-pillar cell array is represented by a Jones matrix, the Jones matrix comprises two independent phase information, spherical focusing phase sections corresponding to different polarization states respectively, and the phase sections are designed to be reconstructed independently through two different orthogonal linear polarizations.
2. The double-focus achromatic super-constructed lens according to claim 1, wherein: the dielectric substrate is made of indium tin oxide conductive glass, and is a quartz substrate, a silicon oxide substrate, a silicon substrate or a diamond substrate.
3. The double-focus achromatic super-constructed lens according to claim 2, wherein: the dielectric nano-pillar unit is made of TiO 2 、HfO 2 、ZrO 2 、GaN、Si 2 N 3 Si, gaAs, znS or AlN.
4. A double-focus achromatic super-constructed lens according to claim 1 or 3, wherein: the dielectric nano-pillar unit is of an anisotropic structure.
5. The double-focus achromatic super-constructed lens according to claim 4, wherein: the dielectric nano-pillar structure unit is rectangular, v-shaped, asymmetric cross-shaped or I-shaped.
6. The double-focus achromatic super-constructed lens according to claim 5, wherein: the height range of the dielectric nano-pillar structure unit is 200nm-1500nm, the size of the dielectric nano-pillar structure unit on the surface of the dielectric substrate is 20nm-1000nm, the distribution size of the dielectric nano-pillar structure unit on the dielectric substrate can be regulated and controlled at will, and the dielectric nano-pillar structure unit can be arranged at will on the surface of the dielectric substrate.
7. A method of designing and producing a double-focus achromatic super-constructed lens according to any one of claims 1 to 6, wherein: the method comprises the following steps:
and (3) design:
designing a phase;
then, obtaining propagation phase responses of nano units with different sizes and structures under different wavelengths through numerical simulation, and constructing a database;
periodically distributing dielectric nano-pillar units on the dielectric substrate according to a specific size to form phase response and match with lens phase distribution;
generating a layout unit;
generating a layout array;
generating the super-structured lens;
preparation:
selecting a transparent medium substrate, and coating photoresist on the surface;
baking, exposing and developing by using an electron beam lithography technology;
manufacturing a hole structure complementary with the dielectric nano-pillar structure array on a transparent dielectric substrate, and then depositing a dielectric material to fill the hole by using an atomic layer deposition technology to obtain the dielectric nano-structure array and an attached dielectric film layer;
then removing the dielectric film layer by using an ion beam etching technology;
and finally, removing the photoresist by using a reactive ion etching technology, releasing the dielectric nanostructure array, and removing the metal mask to finish the preparation of the super-structure lens.
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| CN202211740754.1A CN116125568A (en) | 2022-12-30 | 2022-12-30 | Double-focus achromatic super-structured lens, design preparation method thereof and imaging device applied to double-focus achromatic super-structured lens |
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| CN202211740754.1A CN116125568A (en) | 2022-12-30 | 2022-12-30 | Double-focus achromatic super-structured lens, design preparation method thereof and imaging device applied to double-focus achromatic super-structured lens |
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