CN116124360A - Method for self-judging out-of-tolerance output of piezoresistive pressure sensor - Google Patents
Method for self-judging out-of-tolerance output of piezoresistive pressure sensor Download PDFInfo
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- CN116124360A CN116124360A CN202310397358.1A CN202310397358A CN116124360A CN 116124360 A CN116124360 A CN 116124360A CN 202310397358 A CN202310397358 A CN 202310397358A CN 116124360 A CN116124360 A CN 116124360A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
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Abstract
The piezoresistive pressure sensor comprises a piezoresistive pressure sensitive core, a filtering and amplifying module, a temperature acquisition module and an MCU, wherein the piezoresistive pressure sensitive core is electrically connected with the MCU through the filtering and amplifying module, the MCU is electrically connected with the temperature acquisition module, the MCU acquires a standard output voltage obtained after self calibration and compensation and records the standard output voltage as U, and the output voltage of the filtering and amplifying module is acquired and recorded as U1; when (when)
Greater than or equal to
And less than or equal to
When the pressure sensor is out of tolerance, the piezoresistive pressure sensor outputs an out-of-tolerance judgment result through the MCU; when U1 and U acquired by the piezoresistive pressure sensor MCU meet inequality, the piezoresistive pressure sensor is not out of tolerance; conversely, piezoresistive pressure sensors are out of tolerance; the problem that special equipment is required to acquire characteristic parameters is solved, and the out-of-tolerance self-judging work of the piezoresistive pressure sensor is realized.
Description
Technical Field
The invention relates to a pressure sensor, in particular to a method for self-judging out-of-tolerance output of a piezoresistive pressure sensor.
Background
The piezoresistive pressure sensor has the advantages of small structure size, light weight, easy integration and ultrahigh sensitivity and resolution. The method is widely applied to aerospace, navigation, petrochemical industry, medical equipment, weather and military equipment. Its output is often associated with an important parameter of the system, so it is necessary to determine whether its output value is within a tolerance (also known as "out of tolerance").
The piezoresistive pressure sensor can convert the sensed pressure value into an electric signal through the pressure sensitive core body, and convert the electric signal into a standard signal for output through amplification, compensation and conditioning. The pressure value and the standard signal are in linear correspondence. Taking the standard voltage signal output as an example, the conversion relationship is as follows:
in the formula ,
、
-current pressure and voltage output at current pressure;
During the production and use of the piezoresistive pressure sensor, whether the output exceeds the tolerance is usually determined by the relative error of fullness
(see formula (2)) and sensor accuracy a (see formula (3)) to determine:
And when the output of the sensor is more than A, judging that the output of the sensor is out of tolerance.
in the formula ,
-the sensor outputs a measurement value;
The step of checking and judging whether the output of the pressure sensor exceeds the tolerance in the production process is as follows:
1) The sensor is arranged on a pressurizing tool, and a stabilized voltage supply is used for supplying power to the sensor;
2) Pressurizing the sensor by using a precise pressurizing device, and calculating a standard value according to the pressure
；
3) Measuring sensor output using a digital meter or other detecting instrument, and recording actual output values
；
4) Actually outputting measured value by sensor
And standard value->
Is substituted into the formula of the formula,and calculating whether the sensor output error is within an error allowable range. If the error is within the error allowable range, the sensor output is not out of tolerance; if not, outputting out-of-tolerance. />
The same is true of the on-line monitoring principle of whether the output of the pressure sensor exceeds the tolerance in the use process, and the standard pressure sensor is used for converting the current pressure value of the sensor into a standard signal
And compares it with the current output value of the sensor +.>
Collecting the signals into an online detection device, and calculating +.>
And A, judging whether the sensor is out of tolerance.
In summary, the method for judging the production and use processes of the analysis sensor has the common point that whether the output of the sensor exceeds the tolerance or not is judged under the auxiliary condition of special equipment
The sensor output out-of-tolerance self-judging process cannot be realized because the sensor output out-of-tolerance self-judging process is acquired through special equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a self-judging method for the out-of-tolerance output of a piezoresistive pressure sensor, which judges whether the out-of-tolerance output of the sensor is based on the linear corresponding relation between the input and the output of the sensor, and solves the problem that the piezoresistive pressure sensor can judge whether the out-of-tolerance output is out of tolerance only by using special equipment.
The piezoresistive pressure sensor comprises a piezoresistive pressure sensitive core body, a filtering and amplifying module, a temperature acquisition module and an MCU, wherein the piezoresistive pressure sensitive core body is electrically connected with the MCU through the filtering and amplifying module, and the MCU is electrically connected with the temperature acquisition module; the method comprises the following steps:
step 1: the MCU is used for collecting the standard output voltage obtained after self calibration and compensation and marking the standard output voltage as U, and collecting the output voltage of the filtering and amplifying module and marking the standard output voltage as U1;
step 2: when (when)
Greater than or equal to->
And less than or equal to->
When the pressure sensor is out of tolerance, the piezoresistive pressure sensor outputs out-of-tolerance judgment results through the MCU;
wherein ,
absolute value of maximum error allowed for the piezoresistive pressure sensor;
a1 is the voltage output by the filtering and amplifying module when the stress of the piezoresistive pressure sensor is zero;
b1 is the voltage output by the filtering and amplifying module when the stress of the piezoresistive pressure sensor is the corresponding full-scale pressure;
a is the standard output voltage of the MCU when the piezoresistive pressure sensor is in a zero position;
b is the standard output voltage of the MCU when the piezoresistive pressure sensor is in full range.
The method further comprises the following steps: and one voltage acquisition end of the MCU is electrically connected with the output end of the standard output voltage of the MCU through a circuit and is used for acquiring the standard output voltage of the MCU.
The method further comprises the following steps: the a1, b1, a, b are measured by a technician and summed
And writing the data into the MCU together and taking the data as quantitative data of the piezoresistive pressure sensor.
The invention has the beneficial effects that: when U1 and U acquired by the piezoresistive pressure sensor MCU meet inequality, the piezoresistive pressure sensor is not out of tolerance; conversely, piezoresistive pressure sensors are out of tolerance; all the quantification can be acquired through writing or calibration acquisition, and the variable can be acquired in real time when the piezoresistive pressure sensor works, so that the problem that special equipment is required to acquire characteristic parameters is solved, and the out-of-tolerance self-judging work of the sensor is realized; the invention has the advantages that the program corresponding to the out-of-tolerance judgment inequality is written in the MCU in the original piezoresistive pressure sensor, and the circuit for connecting the output end of the MCU standard output voltage and the voltage signal acquisition end of the MCU standard output voltage is added on the original circuit board.
Drawings
FIG. 1 is a flow chart of the present invention;
FIG. 2 is a block diagram of a piezoresistive pressure sensor according to the present invention;
fig. 3 is a graph showing a correspondence between a standard output voltage obtained after calibration and compensation of the MCU and an output voltage of the filtering and amplifying module.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings. Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention. The terms left, middle, right, upper, lower, etc. in the examples of the present invention are merely relative concepts or references to the normal use state of the product, and should not be construed as limiting.
As shown in figures 1 and 2, the piezoresistive pressure sensor comprises a piezoresistive pressure sensitive core, a filtering and amplifying module, a temperature acquisition module, an MCU and a power supply module, wherein the piezoresistive pressure sensitive core is electrically connected with the MCU through the filtering and amplifying module, and the MCU is electrically connected with the temperature acquisition module;
the piezoresistive pressure sensitive core is the signal front end of the piezoresistive pressure sensor and is used for sensing the pressure from the environment or the medium to be measured, and the pressure signal is converted into a millivolt voltage signal through the built-in pressure sensitive element and is output; the filtering and amplifying module is used for processing millivolt-level voltage signals from the piezoresistive pressure sensitive core body, and converting the millivolt-level voltage signals into voltage signals which can be measured by the MCU after signal conditioning such as filtering and amplifying treatment; the temperature acquisition module is used for acquiring the working environment temperature of the pressure sensor and is used for temperature compensation and calibration of the MCU on the output data of the piezoresistive pressure sensitive core; the MCU is a core component of the piezoresistive pressure sensor, and comprises an A/D conversion module, an operation processing module, a D/A conversion module, a digital communication module, a FLASH module and the like, and is used for collecting electric signals of the filtering amplification module and the temperature acquisition module, performing temperature compensation, output calibration and working state judgment on sensor data, and outputting the sensor data in a standard voltage signal or a digital signal; the power supply module is used for supplying power to other functional modules of the sensor, and ensuring that the power supply of each module is normal.
As shown in fig. 1, the method comprises the steps of:
step 1: the MCU is used for collecting the standard output voltage obtained after self calibration and compensation and marking the standard output voltage as U, and collecting the output voltage of the filtering and amplifying module and marking the standard output voltage as U1;
step 2: when (when)
Greater than or equal to->
And less than or equal to->
When the pressure sensor is out of tolerance, the piezoresistive pressure sensor outputs out-of-tolerance judgment results through the MCU;
wherein ,
for the absolute value of the maximum error allowed for the piezoresistive pressure sensor,
a1 is the voltage output by the filtering and amplifying module when the stress of the piezoresistive pressure sensor is zero;
b1 is the voltage output by the filtering and amplifying module when the stress of the piezoresistive pressure sensor is the corresponding full-scale pressure;
a is the standard output voltage of the MCU when the piezoresistive pressure sensor is in a zero position;
b is the standard output voltage of the MCU when the piezoresistive pressure sensor is in a full range;
the a1, b1, a, b are measured by a technician and summed
And writing the data into the MCU together and taking the data as quantitative data of the piezoresistive pressure sensor.
Referring to fig. 2, a voltage acquisition end of the MCU is electrically connected to an output end of the MCU for acquiring its own standard output voltage.
In fig. 3, variables directly related to the output of the piezoresistive pressure sensor are U2, U1 and U, and the U2 and the U1 are processed by a filtering and amplifying circuit, so that a proportional relationship exists between the two, but the U2 is a differential signal, and the U2 is a millivolt level voltage, so that the acquisition error of the U2 is larger; therefore, the output U1 of the acquisition filter amplifying circuit and the output U of the piezoresistive pressure sensor are taken as characteristic parameters, U1 is taken as an abscissa variable, and U is taken as an ordinate variable to establish a coordinate system shown in FIG. 3;
in the view of figure 3 of the drawings,
-compensating the linear curve (standard output curve) of the correspondence of U with U1 after calibration;
According to fig. 3, the linear equation for column L is:
in the formula ,
，
；
the linear equation for L1 is:
in the formula ,
substituting into formula (5) to obtain:
the linear equation for L2 is similarly:
as shown in fig. 3, when the coordinate points (g, h) thereof fall within the range enclosed by the straight lines L1, L2, u1=a1 and the straight line u1=b1 (including the boundary, shown in the gray area of fig. 3), the output of the piezoresistive pressure sensor is not out of tolerance (as shown in the point S of fig. 3); when its coordinate point (g, h) falls outside the range enclosed by straight lines L1, L2, u1=a1 and straight line u1=b1, the sensor output is out of tolerance (as in points P and Q in fig. 3).
Therefore, when the coordinate points (g, h) are substituted to the left of the equal sign of the formula (4) according to the relationship between the points and the straight line in the coordinate system, g and h satisfy the inequality (8):
and substituting the m and p values to obtain a judging condition that the pressure sensor is not out of tolerance:
namely:
in the formula ,
for calibrating the collected quantitative data +.>
For written quantitative data, U1 and U are variables collected during working.
In summary, the method for self-judging the out-of-tolerance output of the piezoresistive pressure sensor provided by the invention can realize the self-judging work of the out-of-tolerance output of the sensor; when U1 and U acquired by the piezoresistive pressure sensor MCU meet inequality (11), the piezoresistive pressure sensor is not out of tolerance; conversely, piezoresistive pressure sensors are out of tolerance. The problem that whether the piezoresistive pressure sensor is out of tolerance can be avoided by adopting special equipment, labor cost and equipment cost are reduced, working efficiency is greatly improved, and convenience is brought to the fact that whether the piezoresistive pressure sensor is out of tolerance is judged.
Prototype design tests were performed in accordance with the teachings of the present invention, and the test procedures and test results are described below.
The test prototype requires that the pressure signal of 0-30 KPa be converted into a standard signal of 0-5V to be output, and the allowable error is + -1% FS, namely + -0.05V. The pressure sensitive core with sensitivity of 12mV/V is used as a sampling machine sensitive element, the singlechip with a 12-bit AD acquisition channel is used as an information processing unit, the reference voltage is 5.181V of the singlechip power supply voltage, the acquisition result of the sensor standard voltage U is output through a serial port, and the out-of-tolerance judgment result is output in a high-low level (when the sensor is out-of-tolerance, a high level is output, and when the sensor is not out-of-tolerance, a low level is output).
The bridge voltage of the sensor prototype is 2.5V, the amplification factor of the filter amplifying circuit is 169, the calibration compensation is carried out on each pressure point in the normal temperature (25 ℃) and low temperature (-43 ℃) environments of the sensor, the calibration compensation processing is not carried out on the data in the high temperature (120 ℃) environments, and the normal temperature compensation coefficient is directly written into FLASH for calculation. The output of the sensor model machine under normal temperature and low temperature environment is in the error range, and the output under high temperature environment is not in the error range, so that the output is used as the contrast of out-of-tolerance and out-of-tolerance judgment.
Two test groups were now set up for comparison:
test group 1: pressurizing the sensor by using a high-precision pressure calibrator, and detecting the output of the sensor by using a six-digit half-digital multimeter;
test group 2: the sensor is pressurized by using a high-precision pressure calibrator (used as a pressure reference in a test), a serial port assistant is used for monitoring the acquisition value of the standard voltage U of the sensor, and a universal meter is used for detecting the judgment result of whether the sensor is out of tolerance.
Description of test phenomena and data:
the sensor outputs were measured and recorded at 25 ℃, -43 ℃ and 125 ℃ for the two test groups, respectively, and the tables shown in tables 1 and 2 were recorded.
Table 1 test group 1 test data
Table 2 test group 2 test data
Conclusion of the test: comparing the data in tables 1 and 2, it can be seen that the method for self-judging the sensor out of tolerance provided by the invention can satisfy the self-judging process of the sensor out of tolerance under different environmental conditions and different pressures. And the 12-bit AD acquisition precision used in the test is far higher than the precision requirement of +/-1% FS required by the sensor.
1. The purpose of using a high-precision pressure calibrator in test 2 is to use the calibrator as a reference for pressure values during the test to illustrate the feasibility of the method and to determine out-of-tolerance accuracy. In the actual use process of the sensor, the design method can judge whether the sensor is out of tolerance without knowing the current pressure value and using other equipment as a reference.
2. The six-bit half data in the test group 1 only acquire four-bit half data, because the accuracy of the sensor is not very high, the rear two-bit data of the universal meter is rapidly jumped, and the four-bit half data can indicate whether the accuracy of the sensor meets the error requirement; in the calculation process, the voltage value converted from the serial data in the test group 2 is compared with the data in the test group 1, so that only four decimal places are reserved.
If the sensor pursues higher acquisition precision, an external high-precision ADC circuit can be used, the acquisition precision is not excessively described, and the precision can meet the design requirement in the use process.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (3)
1. The piezoresistive pressure sensor comprises a piezoresistive pressure sensitive core body, a filtering and amplifying module, a temperature acquisition module and an MCU, wherein the piezoresistive pressure sensitive core body is electrically connected with the MCU through the filtering and amplifying module, and the MCU is electrically connected with the temperature acquisition module; characterized in that the method comprises the steps of:
step 1: the MCU is used for collecting the standard output voltage obtained after self calibration and compensation and marking the standard output voltage as U, and collecting the output voltage of the filtering and amplifying module and marking the standard output voltage as U1;
step 2: when (when)
Greater than or equal to->
And less than or equal to->
When the pressure sensor is out of tolerance, the piezoresistive pressure sensor outputs out-of-tolerance judgment results through the MCU;
wherein ,
absolute value of maximum error allowed for the piezoresistive pressure sensor;
a1 is the voltage output by the filtering and amplifying module when the pressure born by the piezoresistive pressure sensor is zero;
b1 is the voltage output by the filtering and amplifying module when the pressure born by the piezoresistive pressure sensor is full-scale pressure;
a is the standard output voltage of the MCU when the pressure born by the piezoresistive pressure sensor is zero;
b is the standard output voltage of the MCU when the pressure born by the piezoresistive pressure sensor is full-scale pressure.
2. The method for self-judging whether the output of the piezoresistive pressure sensor exceeds the tolerance according to claim 1, wherein the method comprises the following steps: and one voltage acquisition end of the MCU is electrically connected with the output end of the standard output voltage of the MCU through a circuit.
3. The method for self-judging whether the output of the piezoresistive pressure sensor exceeds the tolerance according to claim 1, wherein the method comprises the following steps: the a1, b1, a, b are measured by a technician and summed
And writing the data into the MCU together and taking the data as quantitative data of the piezoresistive pressure sensor. />
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101286055A (en) * | 2008-04-25 | 2008-10-15 | 大赢数控设备(深圳)有限公司 | High speed air-floating main shaft temperature alarming and rotation speed monitoring system |
| JP2010002388A (en) * | 2008-06-23 | 2010-01-07 | Tdk Corp | Magnetic proportional current sensor |
| JP5182149B2 (en) * | 2009-02-25 | 2013-04-10 | 株式会社アドヴィックス | Sensor failure detection device |
| CN105716749A (en) * | 2014-12-03 | 2016-06-29 | 武汉航空仪表有限责任公司 | Temperature compensation circuit for piezoresistive pressure sensor |
| DE112012002932B4 (en) * | 2011-07-13 | 2017-02-16 | Allegro Microsystems, LLC. | Current sensor with a calibration for a current divider configuration |
| CN106441644A (en) * | 2016-05-25 | 2017-02-22 | 南京高华科技股份有限公司 | Silicon piezoresistive pressure sensor temperature drift compensation method |
| DE202017102747U1 (en) * | 2016-05-12 | 2017-06-13 | Hui-Ting Hsiao | Construction of a brush tool with autorotation |
| KR102015329B1 (en) * | 2019-03-05 | 2019-08-28 | 주식회사 인터엠 | fault detection device by use of hall sensor and electronic load for speaker lines of emergency broadcasting |
| CN110895177A (en) * | 2019-09-18 | 2020-03-20 | 南京航空航天大学 | Intelligent pressure sensor system for distributed control of intelligent engine |
| CN211085270U (en) * | 2019-07-08 | 2020-07-24 | 哈尔滨理工大学 | Temperature self-compensating device of resistance type displacement sensor |
-
2023
- 2023-04-14 CN CN202310397358.1A patent/CN116124360B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101286055A (en) * | 2008-04-25 | 2008-10-15 | 大赢数控设备(深圳)有限公司 | High speed air-floating main shaft temperature alarming and rotation speed monitoring system |
| JP2010002388A (en) * | 2008-06-23 | 2010-01-07 | Tdk Corp | Magnetic proportional current sensor |
| JP5182149B2 (en) * | 2009-02-25 | 2013-04-10 | 株式会社アドヴィックス | Sensor failure detection device |
| DE112012002932B4 (en) * | 2011-07-13 | 2017-02-16 | Allegro Microsystems, LLC. | Current sensor with a calibration for a current divider configuration |
| CN105716749A (en) * | 2014-12-03 | 2016-06-29 | 武汉航空仪表有限责任公司 | Temperature compensation circuit for piezoresistive pressure sensor |
| DE202017102747U1 (en) * | 2016-05-12 | 2017-06-13 | Hui-Ting Hsiao | Construction of a brush tool with autorotation |
| CN106441644A (en) * | 2016-05-25 | 2017-02-22 | 南京高华科技股份有限公司 | Silicon piezoresistive pressure sensor temperature drift compensation method |
| KR102015329B1 (en) * | 2019-03-05 | 2019-08-28 | 주식회사 인터엠 | fault detection device by use of hall sensor and electronic load for speaker lines of emergency broadcasting |
| CN211085270U (en) * | 2019-07-08 | 2020-07-24 | 哈尔滨理工大学 | Temperature self-compensating device of resistance type displacement sensor |
| CN110895177A (en) * | 2019-09-18 | 2020-03-20 | 南京航空航天大学 | Intelligent pressure sensor system for distributed control of intelligent engine |
Non-Patent Citations (2)
| Title |
|---|
| 李文博等: "一种气压传感器超差调整连接模块设计与超差调整方法", 中国计量, no. 4 * |
| 王华章等: "HMP155湿度传感器超差分析及调整", 湖北农业科学, no. 5 * |
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