CN116107135A - Centimeter-level optical imaging system driven by ultrasonic motor and driving method - Google Patents
Centimeter-level optical imaging system driven by ultrasonic motor and driving method Download PDFInfo
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- 238000012634 optical imaging Methods 0.000 title claims abstract description 51
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- 238000003384 imaging method Methods 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims description 33
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- 238000005452 bending Methods 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 7
- 238000010276 construction Methods 0.000 claims 1
- 238000002059 diagnostic imaging Methods 0.000 abstract description 3
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/32—Means for focusing
- G03B13/34—Power focusing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/065—Large signal circuits, e.g. final stages
- H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
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Abstract
An ultrasonic motor driven centimeter-level optical imaging system and a driving method thereof relate to the technical field of optical imaging and solve the problems that the motion resolution of an imaging module of the traditional optical imaging system is low and the traditional optical imaging system cannot be suitable for high-precision optical imaging. The invention is realized by the following scheme: the optical imaging system includes: the device comprises an ultrasonic motor rotor, a limiting rubber ring, an ultrasonic motor, a lens module and a CMOS imaging module; the ultrasonic motor drives the ultrasonic motor rotor to move along the axial direction, and the limiting rubber rings are arranged on the upper side and the lower side of the ultrasonic motor and used for limiting the movement of the ultrasonic motor; the ultrasonic motor rotor is fixedly connected with the lens module; the lens module is used for collecting images and outputting the collected images to the CMOS imaging module. The invention is applied to the fields of medical imaging cameras, space cameras, industrial cameras and the like.
Description
Technical Field
The invention relates to the technical field of optical imaging, in particular to an ultrasonic motor-driven centimeter-level optical imaging system.
Background
In recent years, optical imaging technology has been widely used in aerospace photography, topographic surveying, and the like. The current optical imaging system generally uses an electromagnetic motor as a driving element, and has the defects of easy magnetic field interference, low response speed and the like. Along with the development of technology, a non-resonant piezoelectric motor is developed, and researchers propose to develop a piezoelectric motor with high positioning accuracy by utilizing the characteristics of a piezoelectric stack under a non-resonant condition, but the existing non-resonant piezoelectric motor has the defects of small stroke and low speed. Compared with an electromagnetic motor and a non-resonance piezoelectric motor, the ultrasonic motor has the outstanding advantages of easy miniaturization, quick response, high resolution, power failure self-locking, no electromagnetic interference, easy realization of miniaturization, light weight and the like.
The prior patent CN202305998U discloses a scanning mirror imaging system, including camera, motor and by motor drive's scanning mirror, incident light is parallel incidence to the lens of camera after scanning mirror reflection on, the motor is the ultrasonic motor, the scanning mirror includes primary mirror and the secondary mirror of relative setting, and the output shaft and the primary mirror transmission of motor are connected, and motor drive primary mirror rotates, and the secondary mirror is fixed on the camera, and has the contained angle with the camera lens. The technical scheme solves the problems that the existing scanning mirror imaging system is easy to work and is interfered by electromagnetic environment, power failure can not be self-locked, and a transmission structure is complex. However, the technology is only suitable for large-precision optical imaging, and the imaging module has low motion resolution and cannot be suitable for high-precision optical imaging.
Disclosure of Invention
In order to solve the problem that the existing optical imaging system has low imaging module movement resolution and cannot be suitable for high-precision optical imaging, the invention provides an ultrasonic motor-driven centimeter-level optical imaging system.
The invention is realized by the following scheme:
an ultrasonic motor-driven centimeter-level optical imaging system, the optical imaging system comprising:
the device comprises an ultrasonic motor rotor, a limiting rubber ring, an ultrasonic motor, a lens module and a CMOS imaging module;
the ultrasonic motor drives the ultrasonic motor rotor to move along the axial direction, and the limiting rubber rings are arranged on the upper side and the lower side of the ultrasonic motor and used for limiting the movement of the ultrasonic motor; the ultrasonic motor rotor is fixedly connected with the lens module; the lens module is used for collecting images and outputting the collected images to the CMOS imaging module.
Further, there is also provided a preferable mode, the optical imaging system further comprising:
the device comprises an end cover, a dustproof sheet, a wiring terminal and a shell;
the dustproof sheet is embedded into the end cover;
the ultrasonic motor rotor, the limiting rubber ring, the ultrasonic motor, the lens module and the CMOS imaging module are arranged in the shell, and the wiring terminal is arranged in a through hole of the shell;
the shell surface sets up the through-hole, the end cover passes through cantilever beam buckle and through-hole and is connected with the shell.
Further, a preferable mode is also provided, wherein the ultrasonic motor comprises bending vibration ceramics, a metal matrix, longitudinal vibration ceramics, a driving foot and a driving foot mounting groove;
the bending vibration ceramics are symmetrically attached to two sides of the metal matrix along the Z-axis direction and are used for exciting out-of-plane bending motion of the ultrasonic motor; the longitudinal vibration ceramics are attached to two sides of the metal matrix along the X-axis direction and are used for exciting the in-plane longitudinal vibration of the ultrasonic motor;
the ultrasonic motor is characterized in that two driving foot mounting grooves are formed in the inner side of the ultrasonic motor, and the driving feet are mounted in the driving foot mounting grooves.
Further, a preferred mode is also provided, wherein the structure for realizing out-of-plane bending and in-plane longitudinal vibration is a piezoelectric structure, and the piezoelectric structure is a patch structure.
Further, a preferred mode is also provided, wherein the driving foot is columnar and is used for contacting with an ultrasonic motor rotor.
Further, a preferable mode is also provided, and the ultrasonic motor rotor is of a hollow structure.
Based on the same inventive concept, the invention also provides a driving method of an ultrasonic motor driven centimeter-level optical imaging system, the method comprising the following steps:
and the longitudinal vibration and bending vibration piezoelectric ceramic plates of the ultrasonic motor are given with alternating voltage signals with phase differences, the driving feet received by the ultrasonic motor generate elliptical motion tracks and are contacted with the active cell 3 of the ultrasonic motor, and the driving feet drive the active cell to move along the axial direction and drive the lens module to move along the axial direction by controlling the excitation signals excited by the voltage of the piezoelectric ceramic plates.
Further, a preferred mode is also provided, wherein the excitation signal of the voltage excitation is a sinusoidal alternating current signal or a sinusoidal step pulse alternating current signal.
The invention has the advantages that:
the problem that an imaging module of an existing optical imaging system is low in motion resolution and cannot be suitable for high-precision optical imaging is solved.
1. The invention provides a centimeter-level optical imaging system driven by an ultrasonic motor, which has the characteristics of easy miniaturization, quick response, high resolution, power-off self-locking, no electromagnetic interference, light weight and the like, and adopts the ultrasonic motor which works in a resonance mode and has the working frequency of more than 20kHz and millisecond-level response
2. The invention provides a centimeter-level optical imaging system driven by an ultrasonic motor, which converts microscopic vibration (micrometer level) of a stator into macroscopic motion (centimeter level) of a rotor through friction effect by adopting the ultrasonic motor, solves the problems of huge volume, multiple light path elements and high cost of the traditional optical imaging system, avoids complex and additional motion transmission mechanisms to realize driving, and avoids complex design of the motion transmission structure, thereby having the advantages of high response speed and light weight; the optical focal length adjusting function is realized through the axial output movement of the ultrasonic motor.
3. The invention can realize the focal length adjustment of large stroke by using different excitation methods, and can realize the focal length adjustment function of high resolution by step pulse alternating current excitation, so that the invention has wide application prospect in the fields of medical imaging cameras, space cameras, industrial cameras and the like.
4. According to the two excitation schemes of the centimeter-level optical imaging system driven by the ultrasonic motor, the ultrasonic motor is excited by a periodic excitation signal, and the ultrasonic motor is driven by friction force to respectively output continuous motion; the second excitation method is to use the high-frequency stepping pulse signal for outputting the stepping high-resolution motion of the rotor, so that the large-range optical focusing and the small-range high-resolution optical focusing can be realized.
The invention is applied to the fields of medical imaging cameras, space cameras, industrial cameras and the like.
Drawings
Fig. 1 is a schematic diagram of an ultrasonic motor-driven centimeter-level optical imaging system according to an embodiment, in which 1 is an end cover, 2 is a dust-proof sheet, 3 is an ultrasonic motor mover, 4 is a limiting rubber ring, 5 is an ultrasonic motor, 6 is a lens module, 7 is a connection terminal, 8 is a CMOS imaging module, and 9 is a housing;
fig. 2 is a three-dimensional schematic diagram of an ultrasonic motor according to a third embodiment;
fig. 3 is a schematic polarization diagram of a piezoelectric ceramic plate of an ultrasonic motor according to a third embodiment;
fig. 4 is a schematic diagram of an in-plane longitudinal vibration deformation motion and an out-of-plane bending deformation motion of the ultrasonic motor according to the fourth embodiment;
FIG. 5 is a schematic diagram of an excitation scheme corresponding to an in-plane longitudinal vibration deformation motion and an out-of-plane bending deformation motion of an ultrasonic motor according to a seventh embodiment, wherein +A is a maximum value of a voltage amplitude of a continuous alternating current signal, and-A is a minimum value of the voltage amplitude of the continuous alternating current signal; further, +A is the maximum value of the voltage amplitude of the step alternating current signal, -A is the minimum value of the voltage amplitude of the step alternating current signal, fs is the frequency applied by the step pulse, and fr is the working excitation frequency of the stator.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments.
Embodiment one, this embodiment will be described with reference to fig. 1. An ultrasonic motor-driven centimeter-level optical imaging system according to the present embodiment, the optical imaging system comprising:
the ultrasonic motor comprises an ultrasonic motor rotor 3, a limiting rubber ring 4, an ultrasonic motor 5, a lens module 6 and a CMOS imaging module 8;
the ultrasonic motor 5 drives the ultrasonic motor rotor 3 to move along the axial direction, and the limit rubber rings 4 are arranged on the upper side and the lower side of the ultrasonic motor 5 and are used for limiting the movement of the ultrasonic motor 5; the ultrasonic motor rotor 3 is fixedly connected with the lens module 6; the lens module 6 is used for collecting images and outputting the collected images to the CMOS imaging module 8.
In actual movement, the ultrasonic motor 5 drives the ultrasonic motor rotor 3 to move along the axial direction, and indirectly drives the lens group to move along the axial direction, so that the optical focusing effect is realized.
The centimeter-level optical imaging system driven by the ultrasonic motor has the characteristics of compact structure, easy miniaturization, quick response, high resolution, power failure self-locking, no electromagnetic interference, light weight and the like, realizes an optical focal length adjusting function through axial output motion of the ultrasonic motor, is suitable for small-precision optical imaging, and has high resolution.
The second embodiment is further defined by the ultrasonic motor driven centimeter level optical imaging system according to the first embodiment, wherein the optical imaging system further includes:
the end cover 1, the dust-proof sheet 2, the wiring terminal 7 and the shell 9;
the dustproof sheet 2 is embedded into the end cover 1;
the ultrasonic motor rotor 3, the limiting rubber ring 4, the ultrasonic motor 5, the lens module 6 and the CMOS imaging module 8 are arranged in the shell 9, and the wiring terminal 7 is arranged in a through hole of the shell 9;
the surface of the shell 9 is provided with a through hole, and the end cover 1 is connected with the shell 9 through a cantilever beam buckle and the through hole.
The connection terminal 7 according to the present embodiment is an electrical interface of an optical imaging system, and the assembly is packaged by the housing 9, the end cap 1, and the dust-proof sheet 2.
Embodiment three, this embodiment will be described with reference to fig. 2 and 3. The present embodiment is further defined by the centimeter-level optical imaging system driven by an ultrasonic motor according to the first embodiment, wherein the ultrasonic motor 5 includes a flexural vibration ceramic 5-1, a metal substrate 5-2, a longitudinal vibration ceramic 5-3, a driving foot 5-4, and a driving foot mounting groove 5-5;
the bending vibration ceramics 5-1 are symmetrically attached to two sides of the metal matrix 5-2 along the Z-axis direction and are used for exciting out-of-plane bending motion of the ultrasonic motor 5; the longitudinal vibration ceramics 5-3 are attached to two sides of the metal matrix 5-2 along the X-axis direction and are used for exciting the in-plane longitudinal vibration of the ultrasonic motor 5;
the inner side of the ultrasonic motor 5 is provided with two driving foot mounting grooves 5-5, and the driving feet 5-4 are mounted in the driving foot mounting grooves 5-5.
In practical application, the connecting terminal 7 is arranged in a through hole of the shell 9 and connected with the bending vibration ceramic 5-1 and the longitudinal vibration ceramic 5-3 through wires, and is used for providing electric signals for the bending vibration ceramic 5-1 and the longitudinal vibration ceramic 5-3.
The polarization directions of the bending vibration ceramics are consistent, the polarization direction of the longitudinal vibration ceramics at one end is mutually perpendicular to the polarization direction of the bending vibration ceramics, and the polarization directions of the longitudinal vibration ceramics at the other end are opposite; all piezoelectric ceramics are adhered to the metal base 5-2.
Embodiment four, this embodiment will be described with reference to fig. 4. The present embodiment is further defined by the ultrasonic motor driven centimeter level optical imaging system according to the third embodiment, wherein the structure for realizing out-of-plane bending and in-plane longitudinal vibration is a piezoelectric structure, and the piezoelectric structure is a patch structure.
In this embodiment, compared with a sandwich piezoelectric structure using a bolt for pretensioning, the patch piezoelectric structure adopting the D31 piezoelectric working mode has the characteristics of small volume, simple structure and easy realization of miniaturized design.
The fifth embodiment is further defined that the ultrasonic motor driven centimeter level optical imaging system of the third embodiment, wherein the driving foot 5-4 is columnar and is used for contacting with the ultrasonic motor rotor 3.
In practical application, the driving foot 5-4 is made of wear-resistant materials and is used for outputting linear motion; the driving feet 5-4 are columnar and are used for being fully contacted with the ultrasonic motor rotor 3 in a line contact mode.
The driving foot structure can also be a cuboid structure, namely, the section shape is rectangular.
In the sixth embodiment, the ultrasonic motor mover 3 of the centimeter-level optical imaging system driven by the ultrasonic motor in the first embodiment is a hollow structure.
In the fifth embodiment, the ultrasonic motor mover 3 may have a circular tube structure or a square tube structure, and is in transition fit with the shaft hole of the lens module (5).
Embodiment seven, this embodiment will be described with reference to fig. 5. The driving method of the ultrasonic motor driven centimeter-level optical imaging system according to the embodiment includes:
the longitudinal vibration and bending vibration piezoelectric ceramic plates of the ultrasonic motor 5 are given with alternating voltage signals with phase differences, the driving feet 5-4 received by the ultrasonic motor 5 generate elliptical motion tracks and are contacted with the ultrasonic motor rotor 3, and the feet are driven to push the rotor to move along the axial direction by controlling the excitation signals excited by the voltage of the piezoelectric ceramic plates, so that the lens module 6 is driven to move along the axial direction.
In this embodiment, the driving foot received by the ultrasonic motor generates an elliptical motion track, fully contacts with the ultrasonic motor rotor 3, drives the ultrasonic motor rotor 3 to move along the axial direction by controlling the excitation signal excited by the voltage of the piezoelectric ceramic plate, drives the lens module 6 to move along the axial direction, and adjusts the magnitude and direction of the driving force by changing the phase difference of the two excitation signals, so as to realize reverse driving.
By using different excitation methods, not only can the focal length adjustment of a large stroke be realized, but also the focal length adjustment function with high resolution can be realized by step pulse alternating current excitation.
An eighth embodiment is a further limitation of the driving method of the ultrasonic motor driven centimeter level optical imaging system according to the seventh embodiment, wherein the voltage excitation signal is a sinusoidal ac signal or a sinusoidal step pulse ac signal.
Specifically, the two driving methods of the ultrasonic motor driven centimeter-level optical imaging system are as follows:
the method comprises the following steps:
alternating voltage signals with certain phase difference are respectively applied to the bending vibration ceramic 5-1 and the longitudinal vibration ceramic 5-3, so that in-plane longitudinal vibration deformation movement and out-of-plane bending deformation movement are realized;
the driving foot 5-4 drives the ultrasonic motor rotor 3 to axially move under the action of friction force according to the in-plane longitudinal vibration deformation movement and the out-of-plane bending deformation movement, and the ultrasonic motor rotor 3 drives the lens module 6 to axially move so as to realize optical focal length adjustment;
the magnitude and the direction of the driving force are adjusted by changing the phase difference of the two excitation signals, so that the reverse driving is realized.
The second method is as follows:
sinusoidal stepping pulse alternating current signals with the phase of 90 degrees are respectively applied to the bending vibration ceramic 5-1 and the longitudinal vibration ceramic 5-3, so that in-plane longitudinal vibration deformation movement and out-of-plane bending deformation movement are realized;
the driving foot 5-4 drives the ultrasonic motor rotor 3 to axially move under the action of friction force according to the deformation movement, and the ultrasonic motor rotor 3 drives the lens module 6 to axially move, so that optical high-resolution focal length adjustment is realized;
the magnitude and the direction of the driving force are adjusted by changing the phase difference of the two paths of excitation signals, so that the reverse stepping driving is realized.
The ultrasonic motor is driven by the two excitation schemes of the centimeter-level optical imaging system by the ultrasonic motor, and the ultrasonic motor is excited by a periodic excitation signal by the first excitation method and is driven by friction force to respectively output continuous motion; the second excitation method is to use the high-frequency stepping pulse signal for outputting the stepping high-resolution motion of the rotor, so that the large-range optical focusing and the small-range high-resolution optical focusing can be realized.
The technical solution provided by the present invention is described in further detail above with reference to the accompanying drawings, which is to highlight the advantages and benefits, not to limit the present invention, and any modification, combination of embodiments, improvement and equivalent substitution etc. within the scope of the spirit principles of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. An ultrasonic motor-driven centimeter-level optical imaging system, characterized in that the optical imaging system comprises:
an ultrasonic motor rotor (3), a limiting rubber ring (4), an ultrasonic motor (5), a lens module (6) and a CMOS imaging module (8);
the ultrasonic motor (5) drives the ultrasonic motor rotor (3) to move along the axial direction, and the limiting rubber rings (4) are arranged on the upper side and the lower side of the ultrasonic motor (5) and used for limiting the movement of the ultrasonic motor (5); the ultrasonic motor rotor (3) is fixedly connected with the lens module (6); the lens module (6) is used for collecting images and outputting the collected images to the CMOS imaging module (8).
2. The ultrasonic motor-driven centimeter-level optical imaging system of claim 1, further comprising:
an end cover (1), a dust-proof sheet (2), a wiring terminal (7) and a shell (9);
the dustproof sheet (2) is embedded into the end cover (1);
the ultrasonic motor rotor (3), the limiting rubber ring (4), the ultrasonic motor (5), the lens module (6) and the CMOS imaging module (8) are arranged in the shell (9), and the wiring terminal (7) is arranged in a through hole of the shell (9);
the surface of the shell (9) is provided with a through hole, and the end cover (1) is connected with the shell (9) through a cantilever beam buckle and the through hole.
3. An ultrasonic motor-driven centimeter level optical imaging system according to claim 1, wherein the ultrasonic motor (5) comprises a flexural vibration ceramic (5-1), a metal base body (5-2), a longitudinal vibration ceramic (5-3), a driving foot (5-4) and a driving foot mounting groove (5-5);
the bending vibration ceramics (5-1) are symmetrically attached to two sides of the metal matrix (5-2) along the Z-axis direction and are used for exciting out-of-plane bending motion of the ultrasonic motor (5); the longitudinal vibration ceramics (5-3) are attached to two sides of the metal matrix (5-2) along the X-axis direction and are used for exciting the in-plane longitudinal vibration of the ultrasonic motor (5);
the ultrasonic motor (5) is internally provided with two driving foot mounting grooves (5-5), and the driving feet (5-4) are mounted in the driving foot mounting grooves (5-5).
4. A cm-scale optical imaging system according to claim 3, wherein the structure for achieving out-of-plane bending and in-plane longitudinal vibration is a piezoelectric structure, and the piezoelectric structure is a patch structure.
5. An ultrasonic motor-driven cm-scale optical imaging system according to claim 3, wherein the driving feet (5-4) are columnar for contact with the ultrasonic motor mover (3).
6. An ultrasonic motor driven cm-scale optical imaging system according to claim 1, wherein the ultrasonic motor mover (3) is of hollow construction.
7. A method of driving an ultrasonic motor driven centimeter level optical imaging system, the method comprising:
and giving voltage excitation signals with phase differences to longitudinal vibration and bending vibration piezoelectric ceramic plates of the ultrasonic motor (5), wherein a driving foot (5-4) received by the ultrasonic motor (5) generates an elliptical motion track and is fully contacted with the mover, and the driving foot drives the mover to axially move by controlling the voltage excitation signals of the piezoelectric ceramic plates so as to drive the lens module (6) to axially move.
8. The method of claim 7, wherein the voltage-excited excitation signal is a sinusoidal ac signal or a sinusoidal step-pulse ac signal.
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| CN109951105A (en) * | 2019-04-19 | 2019-06-28 | 深圳市三阶微控实业有限公司 | A kind of supersonic motor driving device and its linear ultrasonic electric machine |
| CN112994517A (en) * | 2021-04-23 | 2021-06-18 | 吉林大学 | Ultrathin piezoelectric ultrasonic motor for microminiature equipment and driving method thereof |
| CN115379074A (en) * | 2021-05-18 | 2022-11-22 | 宁波舜宇光电信息有限公司 | Optical actuator and corresponding camera module |
| CN113671662A (en) * | 2021-08-19 | 2021-11-19 | 吉林大学 | Piezoelectric driven stepless zoom lens module and driving method |
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