CN116075993A - Free-form collimating lens for angled facet laser devices - Google Patents

Free-form collimating lens for angled facet laser devices Download PDF

Info

Publication number
CN116075993A
CN116075993A CN202180056298.6A CN202180056298A CN116075993A CN 116075993 A CN116075993 A CN 116075993A CN 202180056298 A CN202180056298 A CN 202180056298A CN 116075993 A CN116075993 A CN 116075993A
Authority
CN
China
Prior art keywords
waveguide
free
collimating lens
axis
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180056298.6A
Other languages
Chinese (zh)
Inventor
G·帕特里奇
J·门德斯-洛佩斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of CN116075993A publication Critical patent/CN116075993A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3401Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
    • H01S5/3402Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers intersubband lasers, e.g. transitions within the conduction or valence bands
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/146External cavity lasers using a fiber as external cavity
    • H01S5/147External cavity lasers using a fiber as external cavity having specially shaped fibre, e.g. lensed or tapered end portion
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/02Simple or compound lenses with non-spherical faces
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06745Tapering of the fibre, core or active region
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06754Fibre amplifiers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0225Out-coupling of light
    • H01S5/02253Out-coupling of light using lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1082Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
    • H01S5/1085Oblique facets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/141External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5027Concatenated amplifiers, i.e. amplifiers in series or cascaded
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5045Amplifier structures not provided for in groups H01S5/02 - H01S5/30 the arrangement having a frequency filtering function
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/023Mount members, e.g. sub-mount members
    • H01S5/02325Mechanically integrated components on mount members or optical micro-benches

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Lasers (AREA)

Abstract

An apparatus having a waveguide and a free-form collimating lens. The waveguide is characterized by a waveguide axis and a planar tip having a normal axis inclined at a tip angle greater than 0 degrees relative to the waveguide axis. The free-form collimating lens collimates light exiting the planar end of the waveguide into a collimated beam characterized by a beam direction parallel to the waveguide axis. The device suppresses reflection from the flat end of the waveguide from propagating back to the waveguide while providing a collimated light beam having a direction parallel to the axis of the waveguide.

Description

Free-form collimating lens for angled facet laser devices
Cross Reference to Related Applications
The present application claims priority and benefit from U.S. provisional patent application No. 63/066,070, filed 8/14/2020, the contents of which are hereby incorporated by reference in their entirety.
Background
Quantum cascade laser devices (QCLs) are typically composed of an elongated, approximately rectangular box of active semiconductor waveguide structure attached to a metal base that provides thermal and electrical contact. Divergent light emitted from the front facet of the waveguide of such devices is typically collimated using an aspherical high numerical aperture lens that is effective in correcting spherical aberration.
QCL device waveguides are most commonly fabricated with normally incident output facets. That is, the normal to the output facet is parallel to the long axis of the waveguide and the direction of light propagation. This is done for convenience and ease of manufacture because the light is emitted straight along the device axis so that it can be mounted right on the submount and collimated by a lens coaxially aligned with the waveguide, regardless of wavelength.
However, it has been demonstrated that introducing angles (typically 7-10 degrees) to the output facet of a quantum cascade laser waveguide can enhance its performance (maximum power, spatial mode quality) while reducing or eliminating the need for high complexity, high cost multilayer anti-reflective coatings.
Unfortunately, the introduction of angled facets adds complexity to a broader optical design. The angled facets refract light emitted from the waveguide at an angle relative to the long axis of the gain chip. In principle, the beam steering effect may be corrected by mounting the collimator lens at an angle with respect to the gain chip holder such that light enters the collimator lens along its central axis. This also requires the external cavity to rotate to accommodate the new beam direction. However, this solution introduces significant complexity to the mounting scheme of the gain chip and the collimator lens. In the case of wavelength dependence of the propagation angle from the waveguide, this solution also does not necessarily correct the refractive beam steering nor eliminate the non-rotationally symmetrical aberrations caused by the offset object plane distance.
Disclosure of Invention
The invention includes an apparatus having a waveguide and a free-form collimating lens. The waveguide is characterized by a waveguide axis and a planar tip having a normal axis inclined at a tip angle greater than 0 degrees relative to the waveguide axis. The free-form collimating lens collimates light exiting the planar end of the waveguide into a collimated beam characterized by a beam direction parallel to the waveguide axis.
In one aspect, the tip angle is greater than 7 degrees.
In another aspect, the device further comprises an optical amplifier that amplifies light reflected from the planar tip, the tip angle being selected such that the intensity of light reflected from the planar tip is insufficient to lasing in a system incorporating the device.
In another aspect, the optical amplifier includes a quantum cascade gain chip.
In another aspect, the optical amplifier includes a doped optical fiber.
In another aspect, the device further comprises an external cavity reflector that returns the collimated light beam to the free form collimating lens, the return light traveling in a direction parallel to the waveguide axis.
In another aspect, the external cavity has a wavelength selective filter.
In another aspect, the wavelength selective filter comprises a diffraction grating.
In another aspect, the free-form collimating lens includes a free-form concave surface proximate the planar extremity and a spherical convex surface distal the planar extremity.
In another aspect, the apparatus further comprises a lens holder that positions the free-form collimating lens relative to the quantum cascade gain chip such that an optical axis of the free-form lens is parallel to the waveguide axis.
Drawings
Fig.1 shows a typical QCL with an EC for tuning a laser.
Fig.2 shows a gain chip with facets cut at a slight angle.
Fig.3 shows a gain chip with a rotated collimating lens.
Fig.4 shows a collimating lens according to one embodiment of the present invention.
Fig.5 shows an example of a Main Oscillating Power Amplifier (MOPA).
Fig.6 illustrates a waveguide according to an embodiment of the present invention, which may be used in the amplifier shown in fig. 5.
Detailed Description
The manner in which the present invention provides its advantages can be more readily understood with reference to QCL that uses an External Cavity (EC) to tune the output wavelength. Referring now to fig.1, a typical QCL with an EC for tuning a laser is shown. The laser 40 includes a gain chip 41 mounted on a mount 42. Light emitted from the front facet 43 of the gain chip 41 is collimated by the lens 52 and reflected from the grating 46. The angle of the grating 46 relative to the beam from the gain chip 41 is selected to lock the laser in a particular mode. The angle is set by an actuator 45 which rotates the grating about an axis 53 which is selected such that the diffraction wavelength and the length of the cavity are maintained to provide the desired wavelength. The lens 47 expands the output beam to a desired size to provide output light for use by a measurement system using the laser 40 as its light source. The lens 52 expands the light leaving the front facet 43 of the gain chip 41.
The above description assumes that there is no reflection at facet 43. If facet 43 reflects light and is parallel to facet 48, both facets form a fixed length optical cavity that "competes" with the desired optical cavity provided by facet 48 and grating 46. To avoid this problem, the prior art external cavity lasers coat facet 43 with an anti-reflection coating that adds to the cost of the laser. Since these lasers are designed to be tunable over a large wavelength range, the cost of an antireflective coating that functions over the entire wavelength range can be significant.
In prior art systems, the gain chip is typically mounted to the mount by wire bonding to electrically connect the chip to the mount. The collimating lens is typically rigidly attached to a structure common to the chip carrier. The collimating lens holder typically requires multiple degrees of freedom to properly align the lens with respect to the gain chip.
A solution to this second cavity problem uses a gain chip in which facet 43 is not parallel to facet 48. Referring now to fig.2, a gain chip with facets cut at a slight angle is shown. The gain chip 11 has facets 12 cut at an angle between 7 ° and 10 ° with respect to the facets 13. Since the two ends of the gain chip are no longer parallel, the light reflected from the ends cannot form a resonant cavity. The angled surfaces cause refraction of light exiting facet 12 relative to the direction that light would travel through a conventional vertical facet. Two problems are encountered if the collimator lens 14 is kept in the same position as a corresponding collimator lens used with non-slanted facets.
To generalize the following discussion to other optical systems, the angle of the end of the waveguide will be specified by the angle between the plane of the end and the optical guide axis. In this nomenclature, the angle between the slanted tip and the waveguide axis is 80 degrees to 83 degrees.
First, the light leaving the facet 12 is not a point source, but extends over a small area on the facet 12. Thus, a portion of the light will now be emitted at a point different from the focal point of the collimator lens 14. This results in impaired collimation of the light.
Second, the lower portion of the collimating lens 14 is not optimally used because the beam from the angled surface does illuminate the lower portion of the lens as much as possible.
One way to reduce these problems involves rotating the collimating lens 14 to compensate for the variation in emission angle introduced by the slanted facets. Referring now to fig.3, a gain chip with a rotated collimating lens is shown. In the configuration shown in fig.3, the collimator lens 14 has been rotated such that the optical axis 15 of the collimator lens 14 is perpendicular to the surface of the facet 12 and is positioned at the center of the area of emitted light. While this solution partially compensates for the optical aberrations discussed above, it requires a complex mounting arrangement for the collimator lens 14. Furthermore, the axis of the collimated beam is no longer collinear with the axis of the waveguide of the gain chip 13. This requires changing the mounting system of the diffraction grating, which also increases the cost of the laser.
The lasers of the present disclosure overcome these problems by compensating for the effects of oblique facets using a collimating lens that may be placed at the home position. As used in this disclosure, the term "collimated" describes a beam that can propagate laboratory-scale distances (a few centimeters to a few meters) without significant changes in size (beam divergence reduced to milliradian levels). For mid-infrared (wavelength of about 4 to 12 microns) beams, the beam waist must be several millimeters. In one exemplary embodiment, the beam waist is 5 millimeters. In another exemplary embodiment, the beam waist is 7 millimeters. Similarly, in one exemplary embodiment, the focal length of the collimating lens is 2 millimeters to 5 millimeters.
Referring now to fig.4, a collimating lens in accordance with one embodiment of the present invention is shown. The gain chip 11 comprises angled facets 12 that emit light at a position centered on the optical axis of the waveguide in the gain chip 11. Light rays leaving facet 12 are collimated by a lens, which will be referred to as a "free-form lens". The free-form lens 60 has a convex spherical surface 61 and a concave surface 62 having a shape calculated to collimate light rays emitted from the facet 12. This inner surface will be referred to as the free-form surface.
Free-form lenses of the type shown in fig.4 are known in the art and will therefore not be discussed in detail herein. For the purposes of this disclosure, it is sufficient to note that the free-form surface is defined by a function having a plurality of variable parameters determined such that the shape of the surface, together with the lens material and the other surface of the lens, provides the desired collimation. In one aspect, the freeform surface is represented as a three-dimensional polynomial having a plurality of freeform parameters determined such that light rays exiting facet 12 and passing through the surface area will diffract into light rays exiting lens 60 in a direction parallel to optical axis 64. The function describing each small surface area is further constrained such that the entire surface constructed from the collection of surface areas is a continuous and smooth surface. The respective polynomial surfaces are preferably at least quadratic or higher order. Furthermore, the parameters and points at which the surface areas join each other are selected such that the first derivative of the entire surface is continuous at the point at which the two surface areas join.
The parameters of lens 60 are also selected so that lens 60 and gain chip carrier 68 may be secured to a common surface 67. In this arrangement, the optical axis 64 is collinear with the axis 65 of the waveguide of the gain chip 11. Thus, the existing geometry of the external cavity laser can be maintained while correcting for artifacts introduced by the angled facets 12 and thus significantly reducing the need for an anti-reflective coating on the facets 12.
The above embodiments use a grating for the wavelength selective filter and a reflector for the external cavity. However, the collimation system of the present disclosure may be used with any external cavity quantum cascade laser to maintain the linear geometry of the laser cavity while correcting for distortion introduced by the slanted facet edges on the gain chip. Furthermore, such a collimation system may be used with other wavelength selective filters within the external laser cavity.
The above embodiments relate to lasers; however, the system of the present disclosure may be advantageously used in other optical systems, wherein light reflected from the exit facet of the waveguide may cause the system to laser, as the exit facet provides one surface of the resonant cavity for light of the wavelength in question. Referring now to fig.5, an example of MOPA is shown. MOPA80 uses seed laser 81 to generate an optical signal that is coupled to optical amplifier 82 through coupler 83. The power supply for the optical amplifier 82 has been omitted from the drawing for simplicity of the drawing. The output of the optical amplifier 82 is provided to an output optical fiber 84. The output fiber may be part of an optical amplifier 82. For example, the optical amplifier 82 may be a doped fiber that is pumped to provide amplification. Doped fibers for amplifying optical signals are known in the art and will therefore not be discussed in detail herein. In this case, the output fiber 84 may be the end of a doped fiber. The output of the output fiber 84 is typically expanded into a collimated beam 87 by a collimating lens 86. The collimating lens 86 is rigidly connected to the output optical fiber 84 by a mounting structure 88, similar to the mounting structure discussed in the previous embodiments of the laser.
One problem with the arrangement shown in fig.5 arises from reflection at surface 85. Typically, surface 85 is perpendicular to the axis of output fiber 84. If the reflectivity at surface 85 is sufficient, a laser cavity is formed by surface 85 and the reflective surfaces in seed laser 81 or coupler 83. Thus, the optical amplifier 82 may become a separate laser having a different spectral pattern from that of the seed laser 81. Thus, surface 85 is typically coated with an anti-reflective coating, which increases the cost of MOPA 80.
Referring now to fig.6, a waveguide is shown in place that may be used for waveguide 84 shown in fig. 5. Waveguide 95 has an end surface 96 cut at an angle other than 90 degrees relative to optical axis 97. The angle of the end surface 96 relative to the axis 97 is selected such that reflections from the surface 96 are not directed back towards the waveguide 95 and thus avoid the lasing problems discussed above. The freeform lens 90 provides collimation of the output light from the waveguide 95 in the direction of the axis 97. In this example, the optical axis 93 of the collimated beam coincides with the optical axis of the waveguide 95. The waveguide 95 is fixed on a mount 98 that is rigidly positioned relative to the free-form lens via attachment to the common surface 94.
Exemplary embodiments
Embodiment 1 an apparatus comprising: a waveguide characterized by a waveguide axis and a planar tip having a normal axis inclined at a tip angle greater than 0 degrees relative to the waveguide axis; and a free-form collimating lens that collimates light exiting the planar end of the waveguide into a collimated beam characterized by a beam direction parallel to the waveguide axis.
Embodiment 2. The device of embodiment 1, wherein the tip angle is greater than 7 degrees.
Embodiment 3 the device of embodiment 1 or 2 further comprising an optical amplifier that amplifies light reflected from the flat tip, the tip angle preventing lasing in a system incorporating the device.
Embodiment 4. The device of embodiment 3, wherein the optical amplifier comprises a quantum cascade gain chip.
Embodiment 5. The device of embodiment 3, wherein the optical amplifier comprises a doped optical fiber.
Embodiment 6 the device of any one of embodiments 1 to 4, further comprising an external cavity reflector that returns a collimated light beam to the free-form collimating lens, the returned light traveling in a direction parallel to the waveguide axis.
Embodiment 7 the device of embodiment 6 comprising a cavity external to the quantum cascade gain chip, wherein the cavity comprises a wavelength selective filter.
Embodiment 8. The device of embodiment 7, wherein the wavelength selective filter comprises a diffraction grating.
Embodiment 9 the device of any one of embodiments 1-8, wherein the free-form collimating lens comprises a free-form concave surface proximate the planar extremity and a spherical convex surface distal the planar extremity.
Embodiment 10 the device of any one of embodiments 1-9, further comprising a lens holder that positions the free-form collimating lens relative to the quantum cascade gain chip to maintain the beam direction parallel to the waveguide axis.
The above embodiments of the invention have been provided to illustrate various aspects of the invention. It is to be understood, however, that different aspects of the invention, which are shown in different particular embodiments, may be combined to provide further embodiments of the invention. In addition, various modifications of the present invention will become apparent from the foregoing description and accompanying drawings. Accordingly, the invention is limited only by the scope of the appended claims.

Claims (10)

1. An apparatus, comprising:
a waveguide characterized by a waveguide axis and a planar tip having a normal axis inclined at a tip angle greater than 0 degrees relative to the waveguide axis; and
a free-form collimating lens that collimates light exiting the planar end of the waveguide into a collimated beam characterized by a beam direction parallel to the waveguide axis.
2. The device of claim 1, wherein the tip angle is greater than 7 degrees.
3. The device of claim 1, further comprising an optical amplifier that amplifies light reflected from the flat tip, the tip angle preventing lasing in a system incorporating the device.
4. The apparatus of claim 3, wherein the optical amplifier comprises a quantum cascade gain chip.
5. The apparatus of claim 3, wherein the optical amplifier comprises a doped optical fiber.
6. The device of claim 4, further comprising an external cavity reflector that returns a collimated light beam to the free-form collimating lens, the returned light traveling in a direction parallel to the waveguide axis.
7. The device of claim 6, comprising a cavity external to the quantum cascade gain chip, wherein the cavity comprises a wavelength selective filter.
8. The apparatus of claim 7, wherein the wavelength selective filter comprises a diffraction grating.
9. The device of claim 1, wherein the free-form collimating lens comprises a free-form concave surface proximate the planar extremity and a spherical convex surface distal the planar extremity.
10. The device of claim 4, further comprising a lens mount that positions the free-form collimating lens relative to the quantum cascade gain chip to maintain the beam direction parallel to the waveguide axis.
CN202180056298.6A 2020-08-14 2021-08-12 Free-form collimating lens for angled facet laser devices Pending CN116075993A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063066070P 2020-08-14 2020-08-14
US63/066,070 2020-08-14
PCT/US2021/045726 WO2022036085A1 (en) 2020-08-14 2021-08-12 Freeform collimator lens for angled facet laser devices

Publications (1)

Publication Number Publication Date
CN116075993A true CN116075993A (en) 2023-05-05

Family

ID=80248169

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180056298.6A Pending CN116075993A (en) 2020-08-14 2021-08-12 Free-form collimating lens for angled facet laser devices

Country Status (6)

Country Link
US (1) US20230299558A1 (en)
EP (1) EP4197072A1 (en)
JP (1) JP2023538249A (en)
KR (1) KR20230040383A (en)
CN (1) CN116075993A (en)
WO (1) WO2022036085A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4085970B2 (en) * 2003-12-03 2008-05-14 ソニー株式会社 External cavity semiconductor laser
US7565084B1 (en) * 2004-09-15 2009-07-21 Wach Michael L Robustly stabilizing laser systems
KR100701006B1 (en) * 2005-05-31 2007-03-29 한국전자통신연구원 Parabolic waveguide-type collimated lens and tunable external cavity laser diode including the same
US9876330B1 (en) * 2017-01-30 2018-01-23 Agilent Technologies, Inc. Wavelength tunable external cavity quantum cascade laser utilizing an angle tuned immersion grating as a wavelength selective filter element
US10732105B1 (en) * 2019-02-15 2020-08-04 Agilent Technologies, Inc. Method and apparatus for characterizing laser gain chips

Also Published As

Publication number Publication date
KR20230040383A (en) 2023-03-22
WO2022036085A1 (en) 2022-02-17
EP4197072A1 (en) 2023-06-21
US20230299558A1 (en) 2023-09-21
JP2023538249A (en) 2023-09-07

Similar Documents

Publication Publication Date Title
US6327292B1 (en) External cavity laser source using spectral beam combining in two dimensions
US9705289B2 (en) High brightness multijunction diode stacking
JP4068566B2 (en) Retroreflective devices especially for tunable lasers
US6005717A (en) Diode laser beam combiner system
US7545844B2 (en) Use of Bragg grating elements for the conditioning of laser emission characteristics
US6212216B1 (en) External cavity micro laser apparatus
US6529542B1 (en) Incoherent beam combined optical system utilizing a lens array
US8340151B2 (en) V-shaped resonators for addition of broad-area laser diode arrays
WO2015134931A1 (en) High brightness multijunction diode stacking
CA2329089C (en) Fiber grating feedback stabilization of broad area laser diode
JPWO2019155668A1 (en) Semiconductor laser device
US20060165144A1 (en) Semiconductor laser device
EP3767761B1 (en) Laser module
US10714902B2 (en) Laser oscillator
KR20120024682A (en) Folded lasers system
US7936803B2 (en) External cavity semiconductor laser
US20230299558A1 (en) Freeform collimator lens for angled facet laser devices
US7376168B2 (en) Semiconductor laser device
US6563983B2 (en) Laser diode module
WO1998015994A1 (en) External cavity micro laser apparatus
KR20110126720A (en) Folded optical system with a lens having axial astigmatism
US20230108080A1 (en) Semiconductor laser device
CN109494566A (en) A kind of outer lumen type laser
JP2011077076A (en) External resonance type semiconductor laser
JP2006269990A (en) External resonance semiconductor laser

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination